CN104330051A - Low-and-medium-frequency surface shape rapid detecting device and method for large-caliber optical elements - Google Patents
Low-and-medium-frequency surface shape rapid detecting device and method for large-caliber optical elements Download PDFInfo
- Publication number
- CN104330051A CN104330051A CN201410614996.5A CN201410614996A CN104330051A CN 104330051 A CN104330051 A CN 104330051A CN 201410614996 A CN201410614996 A CN 201410614996A CN 104330051 A CN104330051 A CN 104330051A
- Authority
- CN
- China
- Prior art keywords
- interferometer
- control computer
- main control
- portal frame
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a low-and-medium-frequency surface shape rapid detecting device and method for large-caliber optical elements. The device comprises a numerical control computer case, a main control computer, a measuring portal frame, a dynamic interferometer, an interferometer fine adjusting mechanism, a working platform and air floatation guide rails. The dynamic interferometer is mounted on the interferometer fine adjusting mechanism which is mounted on a beam of the measuring portal frame, and the measuring portal frame is disposed on the air floatation guide rails. The measuring portal frame and the interferometer fine adjusting mechanism are connected with the numerical control computer case through cables. The main control computer is connected with the numerical control computer case and the dynamic interferometer through signal lines. Measuring main control software, dynamic interferometer measuring software and global wave surface fitting evaluation software are mounted on the main control computer. By means of the device, sub-aperture data global wave surface fitting can be performed to obtain low-and-medium-frequency surface shapes of large-aperture surfaces to be tested, and accordingly, the sensitivity of interference measuring towards the environment is reduced, the requirement for measuring system geometric accuracy is reduced, the equipment integration level is high, the detection efficiency is high, and the measuring can be extended to be performed in the workshop environment.
Description
Technical field
The present invention relates to a kind of optical elements of large caliber medium and low frequency face shape device for fast detecting and method, belong to technical field of optical detection.
Background technology
Optical elements of large caliber is increasingly extensive in the application in the field such as space flight, military affairs, and this is proposed huge challenge to the processing of optical elements of large caliber and detection efficiency and quality.The detection method of existing high-precision heavy-caliber optical element has two kinds, one adopts aperture interferometer directly to measure, one is small-bore interferometer stitching measure, the former high cost, and not there is the possibility measured under workshop condition, because this latter becomes the first-selection improving high precision test efficiency.Nonetheless, being different from the laboratory condition of vibration isolation, constant temperature, constant humidity, also there is many difficult points in the detection under workshop condition, such as interferometer measurement inefficacy etc. under the shop condition having vibrations.
Present stage uses more multiple aperture overlapping scan splicing method, need to measure the sub-aperture that several have overlay region, these sub-aperture must cover tested surface whole faces shape, the factors such as the size of overlay region, the positioning error of sub-aperture all can affect splicing precision, this proposes high requirement to the geometric accuracy of splicing system, and except the measuring uncertainty risk brought except the sampling time is long of the intensive sampling covering whole tested surface shape, calculate the burden too increasing big data quantity and calculate to follow-up splicing.In practical application, particularly in the analysis and modification of processing site technique, large scale optical flat measures a lot of need pay close attention to medium and low frequency information.This gordian technique of quick detection that the present invention be directed to optical elements of large caliber medium and low frequency face shape under the conditions such as job shop launches research.
Summary of the invention
The present invention be directed to the quick testing requirement of optical elements of large caliber medium and low frequency face shape under job shop condition, propose device for fast detecting and the method for a kind of optical elements of large caliber medium and low frequency face shape.This device compares typical measuring arrangements, measure under easily extensible to shop condition, without the need to overlap between sampled aperture, thus sampled aperture is decreased, reduce the requirement to measuring system geometric accuracy, integrated level easy and simple to handle is high, effectively improves detection efficiency, is the pick-up unit of high efficient detection optical elements of large caliber medium and low frequency face shape.
In order to achieve the above object, the present invention adopts following technical scheme:
A kind of optical elements of large caliber medium and low frequency face shape device for fast detecting, comprise numerical control cabinet, main control computer, measure portal frame, dynamic interferometer, interferometer fine-tuning mechanism, workbench, air-float guide rail, dynamic interferometer is arranged on described interferometer fine-tuning mechanism, described interferometer fine-tuning mechanism is installed on the crossbeam of described measurement portal frame, measuring portal frame is placed on air-float guide rail, measured piece is positioned on described workbench, described measurement portal frame is connected with described numerical control cabinet by cable with described interferometer fine-tuning mechanism, described main control computer is connected by signal wire with described numerical control cabinet, described main control computer is connected by signal wire with described dynamic interferometer.Described main control computer is provided with measures main control software, dynamic interferometer Survey Software and overall Wavefront Fitting evaluation software.
The crossbeam of described measurement portal frame installs transversal displacement slide, and drive precision ball screw to realize transverse shifting by drive motor, drive motor is connected with numerical control cabinet by cable.
Described interferometer fine-tuning mechanism is installed on transversal displacement slide, described interferometer fine-tuning mechanism comprises outside framework, mounting base, installation panel, Z-direction precision ball screw, Z-direction drive motor, first fine setting leading screw and drive motor I thereof, second fine setting leading screw and drive motor II thereof, dynamic interferometer is fixed on installation panel, first fine setting leading screw and the paired linea angulata of the second fine setting leading screw are fixed between installation panel and mounting base, another two angles are bolted to connection, mounting base is fixed on Z-direction precision ball screw, Z-direction precision ball screw is installed on outside framework, each drive motor is connected with numerical control cabinet by cable.
The table top of described workbench is installed on closed hydrostatic slideway, and adopt linear electric motors to drive, linear electric motors are connected by cable with numerical control cabinet, and table top is marked with initial zero position.
The main control software that described main control computer is installed controls described measurement portal frame and workbench Y-direction moves, and controls transversal displacement slide X to movement, controls the Z-direction precision ball screw of interferometer fine-tuning mechanism, the first fine setting leading screw, the second fine setting guide screw movement; The dynamic interferometer Survey Software that described main control computer is installed can coordinate dynamic interferometer to carry out data acquisition; Image data can be recovered overall tested surface shape by the overall Wavefront Fitting evaluation software that described main control computer is installed.
A kind of optical elements of large caliber medium and low frequency face shape method for quick, adopt above-mentioned optical elements of large caliber medium and low frequency face shape device for fast detecting to measure, concrete implementation step is:
1) initiation parameter setting: measured piece is positioned over workbench initial zero position, in the measurement main control software of described main control computer, input measured piece size, then software provides the non-overlapped information such as sub-aperture number, position; Select Y-direction traverse measurement portal frame or workbench in measuring process;
2) described main control computer sends instruction, enter calibration mode before measuring: mobile transversal displacement slide, adjusting described interferometer fine-tuning mechanism makes dynamic interferometer emergent light vertical incidence to measured surface center bore, and makes dynamic interferometer reference mirror as far as possible short to measured piece distance; Described dynamic interferometer carries out calibration measurement to measured piece center bore, treats that result enters next step after meeting stability requirement;
3) described main control computer sends instruction, enter measurement pattern: described main control computer controls described measurement portal frame or workbench and transversal displacement slide according to the motion of measurement sub-aperture position, whenever moving to a sub-aperture, trigger dynamic interferometer Survey Software on described main control computer and gather this sub-aperture diametric plane graphic data, after having recorded, described dynamic interferometer moves to next sub-aperture automatically, after each sub-aperture collects data in measurement scheme, feed back to described main control computer and terminate to measure;
4) described main control computer sends instruction, enter overall Wavefront Fitting evaluation model: described main control computer carries out pre-service according to the filtering mode selected to image data, recover tested surface medium and low frequency face shape according to measurement sub-aperture position and face graphic data matching.
The present invention compared with prior art, has following outstanding substantive distinguishing features and remarkable advantage:
The present invention adopts interferometry overall situation fitting technique, has expanded measurement range; Adopt interferometer fine-tuning mechanism, can long-range adjustment interferometer pose; Adopt dynamic interferometry, reduce the requirement to measurement environment; Adopt overall Wavefront Fitting method, reduce the geometric accuracy requirement to measuring system, decrease simultaneously and gather sub-aperture number, improve detection efficiency.
Accompanying drawing explanation
Fig. 1 is optical elements of large caliber of the present invention surface surface shape detection apparatus schematic diagram.
Fig. 2 is that the present invention measures portal frame crossbeam schematic diagram.
Fig. 3 is interferometer fine-tuning mechanism schematic diagram of the present invention.
Fig. 4 is workbench schematic diagram of the present invention.
Fig. 5 is optical elements of large caliber of the present invention surface surface testing method process flow diagram.
Fig. 6 is tested surface sub-aperture distribution schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further details.
See Fig. 1, a kind of optical elements of large caliber surface surface shape detection apparatus, comprise numerical control cabinet 104, main control computer 105, measure portal frame 106, dynamic interferometer 107, interferometer fine-tuning mechanism 108, workbench 102, air-float guide rail 103, dynamic interferometer 107 is arranged on described interferometer fine-tuning mechanism 108, described interferometer fine-tuning mechanism 108 is installed on the crossbeam of described measurement portal frame 106, measuring portal frame 106 is placed on air-float guide rail 103, measured piece 101 is positioned on described workbench 102, described measurement portal frame 106 is connected with described numerical control cabinet 104 by cable with described interferometer fine-tuning mechanism 108, described main control computer 105 is connected by signal wire with described numerical control cabinet 104, described main control computer 105 is connected by signal wire with described dynamic interferometer 107.Described main control computer 105 is provided with measures main control software, dynamic interferometer Survey Software and overall Wavefront Fitting evaluation software.
In the present embodiment, dynamic interferometer selects ZYGO DynaFiz dynamic interferometer, and measured piece adopts 300 × 500mm
2rectangular optical dull and stereotyped.
As Fig. 2, the crossbeam of described measurement portal frame 106 installs transversal displacement slide 203, drive precision ball screw 202 to realize transverse shifting by drive motor 201, drive motor 201 is connected with numerical control cabinet 104 by cable.
As Fig. 3, described interferometer fine-tuning mechanism 108 is installed on transversal displacement slide 203, described interferometer fine-tuning mechanism 108 comprises outside framework 301, mounting base 309, installation panel 310, Z-direction precision ball screw 308, Z-direction drive motor 304, first fine setting leading screw 302 and drive motor I 303 thereof, second fine setting leading screw 307 and drive motor II 306 thereof, dynamic interferometer 305 is fixed on installation panel 310, first fine setting leading screw 302 and the second fine setting leading screw 307 in pairs linea angulata are fixed between installation panel 310 and mounting base 309, another two angles are bolted to connection, mounting base 309 is fixed on Z-direction precision ball screw 308, Z-direction precision ball screw 308 is installed on outside framework 301, each drive motor is connected with numerical control cabinet 104 by cable.
As Fig. 4, the table top 403 of described workbench 102 is installed on closed hydrostatic slideway 402, and adopt linear electric motors 401 to drive, linear electric motors 401 are connected by cable with numerical control cabinet 104, and table top 403 is marked with initial zero position.
The main control software that described main control computer 105 is installed controls described measurement portal frame 106 and workbench 102Y to movement, control transversal displacement slide 203X to movement, control the Z-direction precision ball screw 306 of interferometer fine-tuning mechanism 108, fine setting leading screw 1 301 and fine setting leading screw 2 302 and move; The dynamic interferometer Survey Software that described main control computer 105 is installed can coordinate dynamic interferometer 107 to carry out data acquisition; Image data can be recovered overall tested surface shape by the overall Wavefront Fitting evaluation software that described main control computer 105 is installed.
As Fig. 5, a kind of optical elements of large caliber medium and low frequency face shape method for quick, adopt above-mentioned measurement mechanism, concrete implementation step is:
1) initiation parameter setting: measured piece 101 is positioned over workbench initial zero position, in the measurement main control software of described main control computer 105, input measured piece 101 size, then software provides the non-overlapped information such as sub-aperture number, position, as shown in Figure 6; Select Y-direction traverse measurement portal frame 106 or workbench 102 in measuring process;
2) described main control computer 105 sends instruction, enter calibration mode before measuring: mobile transversal displacement slide 203, adjusting described interferometer fine-tuning mechanism 108 makes dynamic interferometer 107 emergent light vertical incidence to measured surface center bore, and makes dynamic interferometer 107 reference mirror as far as possible short to measured piece distance; Described dynamic interferometer 107 pairs of measured piece 101 center bores carry out calibration measurement, treat that result enters next step after meeting stability requirement;
3) described main control computer 105 sends instruction, enter measurement pattern: described main control computer 105 controls described measurement portal frame 106 or workbench 102 and transversal displacement slide 203 and moves according to measuring route, whenever moving to a sub-aperture, trigger dynamic interferometer Survey Software on described main control computer 105 and gather this sub-aperture diametric plane graphic data, after having recorded, described dynamic interferometer 107 moves to next sub-aperture automatically, after each sub-aperture collects data in measurement scheme, feed back to described main control computer 105 and terminate to measure;
4) described main control computer 105 sends instruction, enter overall Wavefront Fitting evaluation model: described main control computer 105 carries out pre-service according to the filtering mode selected to image data, recover tested surface medium and low frequency face shape according to measurement sub-aperture position and face graphic data matching.
Claims (5)
1. an optical elements of large caliber medium and low frequency face shape device for fast detecting, comprise numerical control cabinet (104), main control computer (105), measure portal frame (106), dynamic interferometer (107), interferometer fine-tuning mechanism (108), workbench (102), air-float guide rail (103), it is characterized in that: described dynamic interferometer (107) is arranged on described interferometer fine-tuning mechanism (108), described interferometer fine-tuning mechanism (108) is installed on the crossbeam of described measurement portal frame (106), measuring portal frame (106) is placed on air-float guide rail (103), measured piece (101) is positioned on described workbench (102), described measurement portal frame (106) is connected with described numerical control cabinet (104) by cable with described interferometer fine-tuning mechanism (108), described main control computer (105) is connected by signal wire with described numerical control cabinet (104), described main control computer (105) is connected by signal wire with described dynamic interferometer (107).
2. optical elements of large caliber medium and low frequency face according to claim 1 shape device for fast detecting, it is characterized in that: the crossbeam of described measurement portal frame (106) installs transversal displacement slide (203), drive precision ball screw (202) to realize transverse shifting by drive motor (201), drive motor (201) is connected with numerical control cabinet (104) by cable.
3. optical elements of large caliber medium and low frequency face according to claim 1 shape device for fast detecting, it is characterized in that: described interferometer fine-tuning mechanism (108) is installed on transversal displacement slide (203), described interferometer fine-tuning mechanism (108) comprises outside framework (301), mounting base (309), installation panel (310), Z-direction precision ball screw (308), Z-direction drive motor (304), first fine setting leading screw (302) and drive motor I (303) thereof, second fine setting leading screw (307) and drive motor II (306) thereof, dynamic interferometer (305) is fixed on installation panel (310), first fine setting leading screw (302) and the second fine setting leading screw (307) in pairs linea angulata are fixed between installation panel (310) and mounting base (309), another two angles are bolted to connection, mounting base (309) is fixed on Z-direction precision ball screw (308), Z-direction precision ball screw (308) is installed on outside framework (301), each drive motor is connected with numerical control cabinet (104) by cable.
4. optical elements of large caliber medium and low frequency face according to claim 1 shape device for fast detecting, it is characterized in that: the table top (403) of described workbench (102) is installed on closed hydrostatic slideway (402), linear electric motors (401) are adopted to drive, linear electric motors (401) are connected by cable with numerical control cabinet (104), and (403) are marked with initial zero position to table top.
5. an optical elements of large caliber medium and low frequency face shape method for quick, adopt above-mentioned detection device to measure, it is characterized in that, concrete implementation step is:
1) initiation parameter setting: measured piece (101) is positioned over workbench (102) initial zero position, in described main control computer (105), input measured piece (101) size, provides the non-overlapped information such as sub-aperture number, position; Select Y-direction traverse measurement portal frame (106) or workbench (102) in measuring process;
2) described main control computer (105) sends instruction, enter calibration mode before measuring: mobile transversal displacement slide (203), adjusting described interferometer fine-tuning mechanism (108) makes dynamic interferometer (107) emergent light vertical incidence to measured surface center bore, and makes dynamic interferometer (107) reference mirror as far as possible short to measured piece distance; Described dynamic interferometer (107) carries out calibration measurement to measured piece (101) center bore, treats that result enters next step after meeting stability requirement;
3) described main control computer (105) sends instruction, enter measurement pattern: described main control computer (105) controls described measurement portal frame (106) or workbench (102) and transversal displacement slide (203) according to the motion of measurement sub-aperture position, whenever moving to a sub-aperture, trigger the upper dynamic interferometer Survey Software of described main control computer (105) and gather this sub-aperture diametric plane graphic data, after having recorded, described dynamic interferometer (107) moves to next sub-aperture automatically, after in measurement scheme, each sub-aperture collects data, feed back to described main control computer (105) to terminate to measure,
4) described main control computer (105) sends instruction, enter overall Wavefront Fitting pattern: described main control computer (105) carries out pre-service according to the filtering mode selected to image data, recover tested surface medium and low frequency face shape according to measurement sub-aperture position and face graphic data matching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410614996.5A CN104330051B (en) | 2014-11-05 | 2014-11-05 | Low frequency face shape device for fast detecting and method in optical elements of large caliber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410614996.5A CN104330051B (en) | 2014-11-05 | 2014-11-05 | Low frequency face shape device for fast detecting and method in optical elements of large caliber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104330051A true CN104330051A (en) | 2015-02-04 |
| CN104330051B CN104330051B (en) | 2018-03-02 |
Family
ID=52404821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410614996.5A Expired - Fee Related CN104330051B (en) | 2014-11-05 | 2014-11-05 | Low frequency face shape device for fast detecting and method in optical elements of large caliber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104330051B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018014720A1 (en) * | 2016-07-22 | 2018-01-25 | 大连理工大学 | Method and device for measuring surface shape of honeycomb core |
| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6552807B1 (en) * | 1999-10-04 | 2003-04-22 | Mitutoyo Corporation | Apparatus and method for shape measurement using interferometer |
| CN101377410A (en) * | 2008-10-10 | 2009-03-04 | 哈尔滨工业大学 | Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning |
| CN201497488U (en) * | 2009-07-31 | 2010-06-02 | 哈尔滨理工大学 | Device for correcting aspheric surface biased error during sub-aperture stitching interferometry |
| CN103245308A (en) * | 2013-04-18 | 2013-08-14 | 上海大学 | In-place detection device and method for planeness of ultra-precise grinding large-aperture optical element |
| CN103558684A (en) * | 2013-07-18 | 2014-02-05 | 中国科学院国家天文台南京天文光学技术研究所 | Synthetic aperture type high-resolution imaging telescope device based on bright source |
-
2014
- 2014-11-05 CN CN201410614996.5A patent/CN104330051B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6552807B1 (en) * | 1999-10-04 | 2003-04-22 | Mitutoyo Corporation | Apparatus and method for shape measurement using interferometer |
| CN101377410A (en) * | 2008-10-10 | 2009-03-04 | 哈尔滨工业大学 | Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning |
| CN201497488U (en) * | 2009-07-31 | 2010-06-02 | 哈尔滨理工大学 | Device for correcting aspheric surface biased error during sub-aperture stitching interferometry |
| CN103245308A (en) * | 2013-04-18 | 2013-08-14 | 上海大学 | In-place detection device and method for planeness of ultra-precise grinding large-aperture optical element |
| CN103558684A (en) * | 2013-07-18 | 2014-02-05 | 中国科学院国家天文台南京天文光学技术研究所 | Synthetic aperture type high-resolution imaging telescope device based on bright source |
Non-Patent Citations (2)
| Title |
|---|
| 于瀛洁等: "拼接干涉测量技术", 《仪器仪表学报》 * |
| 闫锋涛等: "稀疏子孔径采用检测大口径光学器件", 《强激光与粒子束》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018014720A1 (en) * | 2016-07-22 | 2018-01-25 | 大连理工大学 | Method and device for measuring surface shape of honeycomb core |
| US10852129B2 (en) | 2016-07-22 | 2020-12-01 | Dalian University Of Technology | Method and device for measuring surface shape of honeycomb core |
| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN108225213B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | free-form surface non-contact dimensionality reduction error separation detection method and device |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for detecting nanometer precision of free-form surface morphology |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Bilateral dislocation differential confocal detection method and device for free-form surface morphology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104330051B (en) | 2018-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103245308B (en) | Superfine grinding optical elements of large caliber flatness is in level detecting apparatus and method | |
| CN104534995B (en) | Optical measuring apparatus | |
| CN103941106B (en) | Electromagnetic field near-field scan device and scan method | |
| CN104330050A (en) | Dynamic interference splicing measuring device and method for large-caliber optical elements | |
| CN106767558B (en) | A kind of decoupled identification method of guide rail basal plane straightness error | |
| CN103363928B (en) | For detecting the method and apparatus of pcb board part planarization | |
| CN102589492B (en) | A kind of large-scale curved flexible detection device | |
| CN107052908B (en) | Cutter performance detection device and detection method | |
| CN104330051A (en) | Low-and-medium-frequency surface shape rapid detecting device and method for large-caliber optical elements | |
| CN103712555A (en) | Automobile crossbeam assembly hole visual on-line measurement system and method thereof | |
| CN106226759B (en) | A kind of tracking Stabilily parameter device and method | |
| CN105423958A (en) | Multi-optical-axis parallelism detection apparatus and method | |
| CN106813600B (en) | Non-contact discontinuous plane flatness measuring system | |
| CN203704886U (en) | Flatness optical measuring device | |
| CN203518947U (en) | Optical measurement equipment | |
| CN102628674A (en) | Non-contact test piece surface testing system | |
| CN111077511B (en) | Laser attenuation device, laser radar simulation test system and method thereof | |
| CN105066903A (en) | Laser three-dimensional measurement system and measurement method thereof | |
| CN104344803A (en) | Flatness detecting device with variable detecting position | |
| CN105081888A (en) | Two-dimensional vibration auxiliary laser scanning in-situ detection system and detection method thereof | |
| CN204188158U (en) | A kind of flatness checking device of variable detection position | |
| CN109141303A (en) | A kind of component geometrical defect detection system and detection method | |
| CN203758470U (en) | Flatness detection apparatus for cell phone shielding cover | |
| CN205049107U (en) | Image measuring apparatus | |
| CN109239087B (en) | Image detection platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180302 Termination date: 20201105 |