CN114383595B - Optical displacement measuring head space posture self-calibration method and device - Google Patents
Optical displacement measuring head space posture self-calibration method and device Download PDFInfo
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- CN114383595B CN114383595B CN202210021511.6A CN202210021511A CN114383595B CN 114383595 B CN114383595 B CN 114383595B CN 202210021511 A CN202210021511 A CN 202210021511A CN 114383595 B CN114383595 B CN 114383595B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 133
- 230000003287 optical effect Effects 0.000 title claims abstract description 132
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 239000000523 sample Substances 0.000 claims abstract description 14
- 230000036544 posture Effects 0.000 claims description 52
- 238000005096 rolling process Methods 0.000 claims description 6
- 238000010408 sweeping Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a self-calibration method and device for the spatial attitude of an optical displacement measuring head. According to the method, the optical displacement measuring head scans the standard step gauge block to obtain measurement data, and the scanning data of the measuring head is used for calibrating and calibrating the self-calibration method and device of the space gesture of the measuring head. The invention can quickly and effectively eliminate the attitude error of the probe, thereby improving the measurement precision of the detection system.
Description
Technical Field
The invention relates to the technical field of precision measurement, in particular to a self-calibration method and device for the spatial attitude of an optical displacement measuring head.
Background
The optical displacement measuring head gradually replaces the traditional contact measuring head to become a core component of a high-end geometrical feature detection instrument such as a three-dimensional appearance instrument, a non-contact three-coordinate instrument, a non-contact profile instrument and the like due to the advantages of non-contact, non-damage, rapidness and high precision. The instrument reconstructs the space point cloud of the surface of the actual measured object by combining the position data of the motion mechanism and the measurement data of the optical displacement measuring head, thereby realizing the accurate detection of various geometric features taking the length as a measuring unit, such as the surface shape, the contour, the roundness, the flatness and the like of the measured object. In order to ensure that the instrument has high measurement precision and long-term precision stability, the core error sources such as the posture and the nonlinearity of the measuring head of the instrument must be calibrated. The traditional posture calibration method, such as a method for calibrating the posture of the measuring head by using a laser tracker, a standard ball and the like, is high in cost, and usually requires special calibration equipment aiming at calibration of each posture error, so that the operation is complex, and the requirements of high efficiency and normalized calibration are difficult to adapt.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a self-calibration method and device for the spatial gesture of an optical displacement measuring head.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the invention comprises a base (1), a portal frame (2), an optical displacement measuring head light beam (3), an optical displacement measuring head (4), an electric pitching attitude adjustment actuator (5), a swinging table (6), a rotation center (7), an electric adjusting frame (8), an electric deflection attitude adjustment actuator (9), a standard step gauge block high surface (10), a standard step gauge block low surface (11), a standard step gauge block (12), a workpiece adjusting platform (13), a linear motion shaft rotor (14) and a linear motion shaft stator (15);
the base (1) is provided with a portal frame (2), a swinging table (6) is fixed at the center of the portal frame (2), an electric adjusting frame (8) is arranged on the swinging table (6), and the electric adjusting frame is driven by an electric pitching posture adjusting actuator (5) and an electric swaying posture adjusting actuator (9) to adjust the posture of the optical displacement measuring head (4); a linear motion shaft stator (15) and a linear motion shaft rotor (14) are arranged at the center of the base (1); a workpiece adjusting platform (13) and a standard step gauge block (12) are sequentially arranged above the linear motion shaft rotor (14); the optical displacement measuring head (4) emits measuring light beams (3) and can acquire position measurement of the high surface (10) of the standard step gauge block and the low surface (11) of the standard step gauge block.
Furthermore, the optical displacement measuring head (4) is rotationally symmetrical, so that in three postures of pitching, swaying and rolling in a three-dimensional space, the rolling motion does not generate posture deviation, and the three-dimensional posture error can be calibrated only by calibrating the pitching posture deviation and the swaying posture deviation.
The optical displacement measuring head spatial attitude self-calibration method comprises the following steps:
step 1, leveling a workpiece: placing a standard step gauge block (12) on a workpiece adjusting platform (13) and adjusting the level;
step 2, pitch attitude calibration: the standard step gauge block (12) is fixed, the linear motion shaft (12) and the swinging motion shaft (6) are moved to adjust the optical displacement measuring head (4) to vertically and downwards measure the standard step gauge block low surface (11), the optical displacement measuring head (4) is driven by the swinging motion shaft (7) to swing and scan the standard step gauge block low surface (11), the swinging angle B and the measuring head reading d are recorded in real time in the scanning process, the deflection attitude angle deviation of the optical displacement measuring head (4) is calculated by least square fitting according to the scanning data, and the automatic calibration is carried out by the electric deflection attitude adjustment actuator (9);
step 3, correcting the deflection posture: the optical displacement measuring head (4) is fixed and vertically downward, the standard step gauge block (12) is driven to reciprocate through the linear motion shaft rotor (14), so that the optical displacement measuring head collects height data of a standard step gauge block high surface (10) and a standard step gauge block low surface (11), a pitching angle error is calculated according to the relation between the height difference between the standard step gauge block high surface and the standard step gauge block low surface and the theoretical step height difference of the standard step gauge block (12), and automatic calibration is carried out through the electric pitching attitude adjustment actuator (5).
Further, the yaw attitude calibration of the optical displacement probe specifically includes the following steps:
2-1, controlling an optical displacement measuring head (4) to vertically and downwards point to a standard step gauge block (12), and adjusting the position of the standard step gauge block (12) through a linear motion shaft (15) to enable a low surface (11) of the standard step gauge block to be positioned at the measuring range of the optical displacement measuring head (4);
2-2, setting the deflection attitude deflection angle error limit of the optical displacement measuring head (4) as beta 0 ；
2-3, driving the optical displacement measuring head (4) to scan along the anticlockwise direction through the swinging movement shaft (6) until the measured point is out of range, and automatically recording the angle position of the swinging movement shaft (6) before out of range as B 1 ；
2-4, driving the optical displacement measuring head (4) to scan clockwise through the swinging movement shaft (6) until the measured point is out of range, and automatically recording the angle position of the swinging movement shaft (6) before out of range as B 2 ；
2-5 controlling the swinging movement shaft (6) to drive the optical displacement measuring head (7) to move from B 1 Position scan to B 2 The position, record the swing angle B of the swing motion axis (6) and the reading d of the optical displacement measuring head (4) in real time in the scanning process, obtain a series of data sets (B) i ,d i ),i＝1,2,3…,n；
2-6, an intersection line between a swinging plane of the optical displacement measuring head (4) and a standard step gauge block low surface (11) is a scanning track, a coordinate system is established by taking a rotation center (7) as an origin, and then the track meets any linear equation in space:
Hx+Iy+J＝0 (1)
wherein H, I, J is an unknown; setting the distance between the rotation center (7) and the standard step gauge block low surface (11) as D, setting the deviation between the vertical position of the optical displacement gauge head (4) and the normal line of the standard step gauge block low surface (11) as beta, and setting the distance between the measurement range center of the optical displacement gauge head (4) and the rotation center (7) as l; the projection of the distance between the rotation center (7) and the measured point of the optical displacement measuring head (4) on the normal line of the standard step gauge block low surface (11) is always D in the rotation scanning process, and the following relation can be obtained:
2-7. Each set of data (B i ,d i ) The formula is satisfied, so that a least square algorithm can be constructed for fitting, and the attitude deflection angle beta of the optical displacement measuring head can be calculated:
2-8, adjusting the deflection posture of the optical displacement measuring head (4) through an electric deflection posture adjusting actuator (9), wherein the adjustment quantity is beta;
2-9, repeating the steps 2-4 to 2-7, and verifying the deflection attitude deflection angle beta of the adjusted optical displacement measuring head (4); such as beta>β 0 And repeating the steps 2-4 to 2-8, otherwise, completing the self-calibration of the deflection gesture of the optical displacement measuring head (4).
Furthermore, a standard plane in the space is constructed through a standard step gauge block low surface (11) of a standard step gauge block (12), and the deflection attitude deflection angle of the optical displacement gauge head (4) is determined by calibrating the included angle of the optical displacement gauge head (4) relative to the normal line of the standard plane, so that the calibration is carried out through the fine adjustment movement of an electric deflection attitude adjustment actuator (9).
Further, the pitch attitude calibration specifically includes the steps of:
3-1, driving the optical displacement measuring head (4) to rotate to a vertical downward position through the swinging movement shaft (6);
3-2, setting the pitching attitude deflection angle error limit of the optical displacement measuring head (4) as alpha 0 ；
3-3, controlling the linear motion shaft rotor (14) to drive the standard step gauge block (11) to perform back-and-forth sweeping motion, so that the optical displacement measuring head (4) can respectively measure the position d of the high surface (10) of the standard step gauge block 1 Position d with the lower surface (11) of the standard step gauge block 2 ；
3-4, knowing the actual height difference between the standard step gauge block high surface (10) and the standard step gauge block low surface (11) as deltah, the pitching attitude deflection angle of the optical displacement measuring head is as follows:
3-5, adjusting the pitching attitude of the optical displacement measuring head (4) through an electric pitching attitude adjusting actuator (5), wherein the adjusting quantity is alpha;
3-6, repeating the steps 3-3 to 3-4, and verifying the pitching attitude deflection angle alpha of the adjusted optical displacement measuring head (4); such as alpha>α 0 And repeating the steps 3-3 to 3-5, otherwise, completing the self calibration of the pitching gesture of the optical displacement measuring head (4).
Furthermore, the pitch attitude deflection angle of the optical displacement measuring head (4) is solved by combining the actual measurement results of the standard step gauge block high surface (10) and the standard step gauge block low surface (11) through taking the known height difference as a height reference and combining the optical displacement measuring head (4), so that the calibration is carried out through the fine adjustment movement of the electric pitch attitude adjustment actuator (5).
The invention has the following beneficial effects:
the invention provides a self-calibration method and a device for acquiring measurement data by scanning a standard step gauge block through an optical displacement measuring head, calibrating and calibrating the space posture of the measuring head through the scanning data of the measuring head, wherein the method is combined with a posture adjusting mechanism based on a linear actuator, can calculate the pitching posture error and the deflection posture error of the optical displacement measuring head according to the scanning result and automatically calibrate, realizes the full-automatic space posture calibration of precision optical displacement measuring heads such as a spectrum confocal sensor, a laser interferometer displacement sensor and the like, and has important significance for improving the measurement precision and the use efficiency of instruments such as a three-dimensional profilometer, a non-contact profilometer and the like integrating the measuring head.
Aiming at the high-precision posture calibration requirement of a measuring head in a coordinate measuring machine and a cylindricity instrument, the invention provides a self-calibration method for the spatial posture of an optical displacement measuring head.
Drawings
FIG. 1 shows a spatial attitude error calibration device for an optical displacement probe
FIG. 2 is a schematic illustration of the spatial attitude error of an optical displacement probe
FIG. 3 is a flowchart of the whole calibration of the spatial attitude error of the optical displacement probe
FIG. 4 is a flow chart for calibrating the yaw attitude error of an optical displacement probe
FIG. 5 is a flow chart for calibrating the pitch attitude error of an optical displacement probe
FIG. 6 principle of correcting deflection posture error of optical displacement measuring head
FIG. 7 principle of correcting pitch attitude error of optical displacement probe
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings.
As shown in fig. 1, a gantry (2) is mounted on a base (1), a swinging table (6) is fixed at the center of the gantry (2), the swinging table (6) rotates around a rotation center (7), an electric adjusting frame (8) is mounted on the swinging table (6), and the electric adjusting frame is driven by an electric pitching posture adjusting actuator (5) and an electric yawing posture adjusting actuator (9) to adjust the posture of an optical displacement measuring head (4). The center of the base (1) is provided with a linear motion shaft stator (15) and a linear motion shaft rotor (14). A workpiece adjusting platform (13) and a standard step gauge block (12) are sequentially arranged above the workpiece adjusting platform. The optical displacement measuring head (4) emits measuring light beams (3) and can acquire position measurement of the high surface (10) of the standard step gauge block and the low surface (11) of the standard step gauge block.
As shown in fig. 2, the optical displacement probe (4) can be constructed to have a cartesian rectangular coordinate system describing its posture, a horizontal position along the x, y, z directions, and an alpha-pitch motion rotating around the x-axis, a beta-yaw motion rotating around the y-axis, and a gamma-roll motion rotating around the z-axis. The optical displacement measuring head (4) is rotationally symmetrical around the z axis, so that in three postures of pitching, swaying and rolling in a three-dimensional space, the rolling motion in the gamma direction does not generate posture deviation, and the three-dimensional posture error can be calibrated only by calibrating the pitching posture deviation and the swaying posture deviation.
As shown in fig. 3, the whole process of calibrating the spatial attitude error of the optical displacement measuring head comprises the following steps:
(1) Placing a standard step gauge block (12) on a workpiece adjusting platform (13) and adjusting the level;
(2) The standard step gauge block (12) is fixed, the movable linear motion shaft (14) and the swinging motion shaft (6) adjust the optical displacement measuring head (4) to vertically and downwards measure the low surface (11) of the standard step gauge block;
(3) The swinging motion shaft (6) drives the optical displacement measuring head (4) to swing and scan the standard step gauge block low surface (11), the swinging angle B and the measuring head reading d are recorded in real time in the scanning process, the deflection attitude angle deviation beta of the optical displacement measuring head (4) is calculated by least square fitting according to scanning data, and automatic calibration is carried out through the electric deflection attitude adjustment actuator (9);
(4) The optical displacement measuring head (4) is adjusted to vertically downwards by moving the swinging movement shaft (6), the standard step gauge block (12) is driven to reciprocate by the linear movement shaft rotor (14), so that the optical displacement measuring head collects height difference data of the standard step gauge block high surface (10) and the standard step gauge block low surface (11), a pitching angle error alpha is calculated, and automatic calibration is carried out by the electric pitching attitude adjustment actuator (5).
As shown in fig. 4, the optical displacement probe yaw attitude error calibration procedure includes:
(1) the linear motion axis (14) and the swinging motion axis (6) are moved to adjust the optical displacement measuring head (4) to vertically and downwards measure the standard step gauge block low surface (11) and enable the standard step gauge block low surface to be positioned in the optical displacement measuring head measuring range (4);
(2) setting the deflection attitude and deflection angle error limit beta of the optical displacement measuring head (4) 0
(3) The optical displacement measuring head (4) is driven to scan in the anticlockwise direction and the clockwise direction through the swinging movement shaft (6) until the measured point is out of range, and the angle position of the swinging movement shaft (6) before out of range is automatically recorded as B 0 And B 1 ；
(4) Controlling the swinging movement shaft (6) to drive the optical displacement measuring head (4) to move from B 0 Position scan to B 1 The position, record the swing angle B of the swing motion axis (6) and the reading d of the measuring head in real time in the scanning process, obtain a series of data sets (B i ,d i ) I=1, 2,3 …, n, substituting the formula to perform least square algorithm fitting, and obtaining a measurement head posture deflection angle beta, and adjusting the deflection posture of the optical displacement measurement head (4) by an electric deflection posture adjustment actuator (9), wherein the adjustment quantity is-beta;
(5) repeating the step (4), and verifying the adjusted optical displacement measuring head(4) Yaw attitude offset angle beta. Such as beta>β 0 And (4) repeating the step, otherwise, completing the self-calibration of the deflection gesture of the optical displacement measuring head (4).
As shown in fig. 5, the optical displacement probe pitch attitude error calibration procedure includes:
1) The optical displacement measuring head (4) is driven to rotate to a vertical downward position through the swinging movement shaft (6);
2) Setting the deflection angle error limit of the pitching attitude of the optical displacement measuring head (4) to alpha 0 ；
3) The linear motion shaft rotor (14) is controlled to drive the standard step gauge block (11) to perform back and forth sweeping motion, so that the optical displacement gauge head (4) measures the height difference between the standard step gauge block high surface (10) and the standard step gauge block low surface (11), the height difference is substituted into the formula to calculate the pitching attitude deflection angle alpha of the optical displacement gauge head (4), and the pitching attitude of the optical displacement gauge head (4) is adjusted through the electric pitching attitude adjusting actuator (5), wherein the adjustment quantity is-alpha;
4) And (3) repeating the step (3), and verifying the pitching attitude deflection angle alpha of the adjusted optical displacement measuring head (4). Such as alpha>α 0 And (3) repeating the step, otherwise, completing the self-calibration of the pitching gesture of the optical displacement measuring head (4).
As shown in FIG. 6, the position of the standard step gauge block (12) is adjusted through the linear motion shaft rotor (14) to enable the low surface (11) of the standard step gauge block to be positioned in the measuring range (4) of the optical displacement measuring head, and the swinging motion shaft (6) is controlled to drive the optical displacement measuring head (4) to be at the angle limit position B 0 And B is connected with 1 Internal continuous scanning, in which the swinging angle B of the swinging motion shaft (6) and the reading d of the measuring head are recorded in real time in the scanning process to obtain a series of data sets (B i ,d i ) I=1, 2,3 …, n. Each set of data (B i ,d i ) And substituting the measurement head attitude deflection angle beta into a formula to construct a least square algorithm for fitting. The electric deflection posture adjusting actuator (9) is used for adjusting the deflection posture of the optical displacement measuring head (4) by using the adjustment quantity-beta, and the above processes are repeated until beta<β 0 And completing the self-calibration of the deflection gesture of the optical displacement measuring head (4).
As shown in FIG. 7, the optical displacement probe (4) is driven to rotate to a vertically downward direction by the swinging motion shaft (6)Position. The linear motion shaft rotor (14) is controlled to drive the standard step gauge block (11) to move back and forth, so that the optical displacement measuring head (4) respectively measures the difference between the heights of the standard step gauge block (11) at the position 1 and the position 2. The measuring head attitude deflection angle alpha can be calculated according to the actual known height difference between the standard step gauge block high surface (10) and the standard step gauge block low surface (11). Adjusting the pitch attitude of the optical displacement probe (4) by using the adjustment amount-alpha through the electric pitch attitude adjustment actuator (5), repeating the above process until alpha<α 0 And completing the self calibration of the pitching gesture of the optical displacement measuring head (4).
Claims (3)
1. An optical displacement measuring head space posture self-calibration device is characterized by comprising: the device comprises a base (1), a portal frame (2), an optical displacement measuring head light beam (3), an optical displacement measuring head (4), an electric pitching attitude adjustment actuator (5), a swinging table (6), a rotating center (7), an electric adjusting frame (8), an electric deflection attitude adjustment actuator (9), a standard step gauge block high surface (10), a standard step gauge block low surface (11), a standard step gauge block (12), a workpiece adjusting platform (13), a linear motion shaft rotor (14) and a linear motion shaft stator (15);
the base (1) is provided with a portal frame (2), a swinging table (6) is fixed at the center of the portal frame (2), an electric adjusting frame (8) is arranged on the swinging table (6), and the electric adjusting frame is driven by an electric pitching posture adjusting actuator (5) and an electric swaying posture adjusting actuator (9) to adjust the posture of the optical displacement measuring head (4); a linear motion shaft stator (15) and a linear motion shaft rotor (14) are arranged at the center of the base (1); a workpiece adjusting platform (13) and a standard step gauge block (12) are sequentially arranged above the linear motion shaft rotor (14); the optical displacement measuring head (4) emits measuring light beams (3) and can acquire position measurement of the high surface (10) of the standard step gauge block and the low surface (11) of the standard step gauge block;
the optical displacement measuring head (4) is rotationally symmetrical, so that in three postures of pitching, swaying and rolling in a three-dimensional space, the rolling motion does not generate posture deviation, and the three-dimensional posture error can be calibrated only by calibrating the pitching posture deviation and the swaying posture deviation.
2. The optical displacement measuring head spatial attitude self-calibration method is characterized by comprising the following steps of:
step 1, leveling a workpiece: placing a standard step gauge block (12) on a workpiece adjusting platform (13) and adjusting the level;
step 2, pitch attitude calibration: the standard step gauge block (12) is fixed, the linear motion shaft (12) and the swinging motion shaft (6) are moved to adjust the optical displacement measuring head (4) to vertically and downwards measure the standard step gauge block low surface (11), the optical displacement measuring head (4) is driven by the swinging motion shaft (7) to swing and scan the standard step gauge block low surface (11), the swinging angle B and the measuring head reading d are recorded in real time in the scanning process, the deflection attitude angle deviation of the optical displacement measuring head (4) is calculated by least square fitting according to the scanning data, and the automatic calibration is carried out by the electric deflection attitude adjustment actuator (9);
step 3, correcting the deflection posture: the optical displacement measuring head (4) is fixed and vertically downward, the standard step gauge block (12) is driven to reciprocate through the linear motion shaft rotor (14), so that the optical displacement measuring head collects height data of a standard step gauge block high surface (10) and a standard step gauge block low surface (11), a pitching angle error is calculated according to the relation between the height difference between the standard step gauge block high surface and the standard step gauge block low surface and the theoretical step height difference of the standard step gauge block (12), and automatic calibration is carried out through the electric pitching attitude adjustment actuator (5);
the deflection posture calibration of the optical displacement measuring head specifically comprises the following steps:
2-1, controlling an optical displacement measuring head (4) to vertically and downwards point to a standard step gauge block (12), and adjusting the position of the standard step gauge block (12) through a linear motion shaft (15) to enable a low surface (11) of the standard step gauge block to be positioned at the measuring range of the optical displacement measuring head (4);
2-2, setting the deflection attitude deflection angle error limit of the optical displacement measuring head (4) as beta 0 ；
2-3, driving the optical displacement measuring head (4) to scan along the anticlockwise direction through the swinging movement shaft (6) until the measured point is out of range, and automatically recording the angle position of the swinging movement shaft (6) before out of range as B 1 ；
2-4, driving the optical displacement measuring head (4) to scan clockwise through the swinging movement shaft (6) until the measured point exceeds the measured pointMeasuring range, automatically recording the angle position of the swinging motion shaft (6) before exceeding the measuring range as B 2 ；
2-5 controlling the swinging movement shaft (6) to drive the optical displacement measuring head (7) to move from B 1 Position scan to B 2 The position, record the swing angle B of the swing motion axis (6) and the reading d of the optical displacement measuring head (4) in real time in the scanning process, obtain a series of data sets (B) i ,d i ),i＝1,2,3…,n；
2-6, an intersection line between a swinging plane of the optical displacement measuring head (4) and a standard step gauge block low surface (11) is a scanning track, a coordinate system is established by taking a rotation center (7) as an origin, and then the track meets any linear equation in space:
Hx+Iy+J＝0 (1)
wherein H, I, J is an unknown; setting the distance between the rotation center (7) and the standard step gauge block low surface (11) as D, setting the deviation between the vertical position of the optical displacement gauge head (4) and the normal line of the standard step gauge block low surface (11) as beta, and setting the distance between the measurement range center of the optical displacement gauge head (4) and the rotation center (7) as l; the projection of the distance between the rotation center (7) and the measured point of the optical displacement measuring head (4) on the normal line of the standard step gauge block low surface (11) is always D in the rotation scanning process, and the following relation can be obtained:
2-7. Each set of data (B i ,d i ) The formula is satisfied, so that a least square algorithm can be constructed for fitting, and the attitude deflection angle beta of the optical displacement measuring head can be calculated:
2-8, adjusting the deflection posture of the optical displacement measuring head (4) through an electric deflection posture adjusting actuator (9), wherein the adjustment quantity is beta;
2-9, repeating the steps 2-4 to 2-7, and verifying the deflection posture deflection of the optical displacement measuring head (4) after adjustmentAngle beta; such as beta>β 0 Repeating the steps 2-4 to 2-8, otherwise, completing the self calibration of the deflection gesture of the optical displacement measuring head (4);
and calibrating an included angle of the optical displacement measuring head (4) relative to the normal line of the reference plane by constructing the reference plane in the space through the standard step gauge block low surface (11) of the standard step gauge block (12), so as to determine the deflection attitude deflection angle of the optical displacement measuring head (4), thereby calibrating through the fine adjustment movement of the electric deflection attitude adjustment actuator (9).
3. The method for self-calibrating the spatial attitude of an optical displacement probe according to claim 2, wherein the step of calibrating the pitch attitude specifically comprises the steps of:
3-1, driving the optical displacement measuring head (4) to rotate to a vertical downward position through the swinging movement shaft (6);
3-2, setting the pitching attitude deflection angle error limit of the optical displacement measuring head (4) as alpha 0 ；
3-3, controlling the linear motion shaft rotor (14) to drive the standard step gauge block (11) to perform back-and-forth sweeping motion, so that the optical displacement measuring head (4) can respectively measure the position d of the high surface (10) of the standard step gauge block 1 Position d with the lower surface (11) of the standard step gauge block 2 ；
3-4, knowing the actual height difference between the standard step gauge block high surface (10) and the standard step gauge block low surface (11) as deltah, the pitching attitude deflection angle of the optical displacement measuring head is as follows:
3-5, adjusting the pitching attitude of the optical displacement measuring head (4) through an electric pitching attitude adjusting actuator (5), wherein the adjusting quantity is alpha;
3-6, repeating the steps 3-3 to 3-4, and verifying the pitching attitude deflection angle alpha of the adjusted optical displacement measuring head (4); such as alpha>α 0 Repeating the steps 3-3 to 3-5, otherwise, completing the self calibration of the pitching gesture of the optical displacement measuring head (4);
the pitch attitude deflection angle of the optical displacement measuring head (4) is solved by combining the known height difference between the standard step gauge block high surface (10) and the standard step gauge block low surface (11) as a height reference and the actual measurement result of the optical displacement measuring head (4), so that the calibration is carried out through the fine adjustment movement of the electric pitch attitude adjustment actuator (5).
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Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000055664A (en) * | 1998-08-05 | 2000-02-25 | Seiji Aoyanagi | Articulated robot system with function of measuring attitude, method and system for certifying measuring precision of gyro by use of turntable for calibration reference, and device and method for calibrating turntable formed of n-axes |
| JP2003114116A (en) * | 2001-10-04 | 2003-04-18 | Mitsutoyo Corp | Calibration device and calibration method for copying probe and error compensation method for the same |
| JP2006145560A (en) * | 2006-03-06 | 2006-06-08 | Mitsutoyo Corp | Calibration program and method for copying probe |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN109029293A (en) * | 2018-10-19 | 2018-12-18 | 西安交通大学 | A kind of line scanning feeler position and attitude error scaling method in blade face type detection |
| CN109341546A (en) * | 2018-11-16 | 2019-02-15 | 厦门大学 | A kind of light beam scaling method of dot laser displacement sensor under any installation position appearance |
| CN109520421A (en) * | 2018-12-21 | 2019-03-26 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of the adjustment device and its method of adjustment of image gauge head posture |
| CN110455246A (en) * | 2019-08-27 | 2019-11-15 | 浙江大学 | A kind of surface shape measurement device and method for conformal optical element |
| CN111238529A (en) * | 2018-11-28 | 2020-06-05 | 北京航天计量测试技术研究所 | Attitude measuring instrument precision calibration device and method based on starlight measurement |
| JP2020148515A (en) * | 2019-03-11 | 2020-09-17 | 株式会社キーエンス | Three-dimensional coordinate measuring device |
| CN111707186A (en) * | 2019-03-18 | 2020-09-25 | 四川大学 | Calibration test piece of direct-injection type point laser three-coordinate measuring device |
| CN111795644A (en) * | 2020-07-15 | 2020-10-20 | 四川大学 | Orthogonal point laser double-measuring-head pose calibration test piece |
| CN113074663A (en) * | 2021-03-29 | 2021-07-06 | 大连理工大学 | Light beam vector deviation planning compensation method for spectrum confocal on-line measurement |
| CN113465513A (en) * | 2021-06-28 | 2021-10-01 | 西安交通大学 | Laser sensor inclination angle error measurement compensation method and system based on cylindrical angle square |
| CN113834438A (en) * | 2021-08-12 | 2021-12-24 | 浙江大学 | High-precision free-form surface profiling measuring device and method based on three-dimensional measuring frame |
-
2022
- 2022-01-10 CN CN202210021511.6A patent/CN114383595B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000055664A (en) * | 1998-08-05 | 2000-02-25 | Seiji Aoyanagi | Articulated robot system with function of measuring attitude, method and system for certifying measuring precision of gyro by use of turntable for calibration reference, and device and method for calibrating turntable formed of n-axes |
| JP2003114116A (en) * | 2001-10-04 | 2003-04-18 | Mitsutoyo Corp | Calibration device and calibration method for copying probe and error compensation method for the same |
| JP2006145560A (en) * | 2006-03-06 | 2006-06-08 | Mitsutoyo Corp | Calibration program and method for copying probe |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN109029293A (en) * | 2018-10-19 | 2018-12-18 | 西安交通大学 | A kind of line scanning feeler position and attitude error scaling method in blade face type detection |
| CN109341546A (en) * | 2018-11-16 | 2019-02-15 | 厦门大学 | A kind of light beam scaling method of dot laser displacement sensor under any installation position appearance |
| CN111238529A (en) * | 2018-11-28 | 2020-06-05 | 北京航天计量测试技术研究所 | Attitude measuring instrument precision calibration device and method based on starlight measurement |
| CN109520421A (en) * | 2018-12-21 | 2019-03-26 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of the adjustment device and its method of adjustment of image gauge head posture |
| JP2020148515A (en) * | 2019-03-11 | 2020-09-17 | 株式会社キーエンス | Three-dimensional coordinate measuring device |
| CN111707186A (en) * | 2019-03-18 | 2020-09-25 | 四川大学 | Calibration test piece of direct-injection type point laser three-coordinate measuring device |
| CN110455246A (en) * | 2019-08-27 | 2019-11-15 | 浙江大学 | A kind of surface shape measurement device and method for conformal optical element |
| CN111795644A (en) * | 2020-07-15 | 2020-10-20 | 四川大学 | Orthogonal point laser double-measuring-head pose calibration test piece |
| CN113074663A (en) * | 2021-03-29 | 2021-07-06 | 大连理工大学 | Light beam vector deviation planning compensation method for spectrum confocal on-line measurement |
| CN113465513A (en) * | 2021-06-28 | 2021-10-01 | 西安交通大学 | Laser sensor inclination angle error measurement compensation method and system based on cylindrical angle square |
| CN113834438A (en) * | 2021-08-12 | 2021-12-24 | 浙江大学 | High-precision free-form surface profiling measuring device and method based on three-dimensional measuring frame |
Non-Patent Citations (5)
| Title |
|---|
| A new method for detecting surface defects on curved reflective optics using normalized reflectivity;HL Du等;《Review of Scientific Instruments》;全文 * |
| Design of optimal fast scanning trajectory for the mechanical scanner of measurement instruments;Bing-Feng Ju等;《Scanning》;全文 * |
| Implementation and verification of a dual-probe measurement system for geometric form evaluation of a ring-type cylinder;Xin Xiong等;《Precision Engineering》;全文 * |
| 基于双光束激光干涉仪的微动平台六维位姿测量建模与误差分析;张昭;齐臣坤;林剑锋;张朴真;胡华君;高峰;;机械设计与研究(第04期);全文 * |
| 直线运动机构三维角误差同步测量方法研究;陈诚等;《仪器仪表学报》;第40卷(第40期);145-151 * |
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