CN113884023A

CN113884023A - High-precision detection device for inner wall of Wolteri type X-ray focusing lens

Info

Publication number: CN113884023A
Application number: CN202111194457.7A
Authority: CN
Inventors: 王波; 廖秋岩; 李铎; 丁飞; 薛家岱; 乔政; 吴言功; 杨彦佶; 陈勇
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2021-10-13
Filing date: 2021-10-13
Publication date: 2022-01-04
Anticipated expiration: 2041-10-13
Also published as: CN113884023B

Abstract

A high-precision detection device for the inner wall of a Wolteri type X-ray focusing lens belongs to the technical field of non-contact detection of the inner wall of the X-ray focusing lens. The detection device is used for ensuring the detection precision of the inner walls of the large-batch lenses, ensuring the low deformation of the large-size ultrathin lenses and simultaneously improving the detection efficiency. The active hoisting device is supported by a support and used for hoisting the lens cone, the measuring device is used for roundness error and contour error of the lens cone on the side surface, the measuring device is installed on the high-precision air floatation main shaft and is driven by the high-precision air floatation main shaft to rotate for measurement, the high-precision air floatation main shaft is installed on an XY translation table, and the XY translation table is installed on the support. The invention aims at the problem that the existing general measuring instrument can not directly detect the surface shape precision of the inner wall of the Wolter I type X-ray focusing lens, can realize the contour measurement of the inner wall of the lens in the axial direction and the circumferential direction, ensures the low deformation and the high precision of the lens in the detection process, improves the detection efficiency and achieves the effects of cost reduction and efficiency improvement.

Description

High-precision detection device for inner wall of Wolteri type X-ray focusing lens

Technical Field

The invention belongs to the technical field of non-contact detection of an inner wall of an X-ray focusing lens, and particularly relates to a high-precision detection device for an inner wall of a Wolteri type X-ray focusing lens.

Background

In order to study and observe new high-energy radiation phenomena of celestial bodies such as black holes, neutron stars and the like, astronomical platforms and space centers of a plurality of countries and regions including the United states and the like emit more than ten X-ray astronomical satellites to the space. In 1952, the german physicist Hans Wolter designed three Wolter-type X-ray focusing telescopes of grazing incidence that meet the abbe sine condition, called Wolter I II III-type focusing telescopes. The Wolter-I type X-ray telescope is composed of a paraboloidal internal reflection mirror and a hyperboloid internal reflection mirror, has the advantages of being capable of being nested in multiple layers, beneficial to weak source observation and the most common type of the X-ray telescope at present. China predicts the next generation of flagship-level X-ray astronomical satellite-enhanced X-ray time-varying and polarization detection (exttp) space astronomical stage emitted in 2026. The eXTP project deploys 4 payloads, where the Spectral Focusing Array (SFA) and the Polarimetric Focusing Array (PFA) consist of 9 and 4 sets of 5.25m focal length, 500mm aperture Focusing telescope arrays, respectively, with different focal plane detectors. In order to increase the effective measurement area of the telescope, the X-ray focusing telescope adopts a nested design of a multilayer thin-wall structure, and meanwhile, because the main load of eXTP is 13 groups and total 645 lenses are provided, a key link is formed by how to quickly and highly precisely detect the surface shape of the inner wall of the lens after the ultrathin, large-size and high-precision lenses are produced in batches. The problem to be solved at present is to detect the surface shape of the inner wall of the lens rapidly and accurately so as to feed back and guide the optimization of the manufacturing process of the lens. Therefore, high-precision and rapid detection of the inner wall of the focusing lens is a factor to be considered. The X-ray focusing lens is manufactured by a copying method, and the main processing technological processes of copying comprise chemical nickel-phosphorus alloy plating of a mould, ultra-precision machining of the mould, film coating of the mould, nickel matrix electroforming, copying, assembly and adjustment and detection, wherein the detection is one of key links of the production of the focusing lens and is a key process for ensuring the precision of the focusing lens. The lens after being copied is a thin-wall part, and the inner surface of the lens is the working surface of the X-ray focusing lens. Therefore, in order to verify that the mold replication process was successful and that the lens met the use requirements, internal surface measurements of the replicated lens were required. The integrated detection of the focusing telescope lens is a very key link of a satellite project, in order to meet the requirements of a working energy area, a collection area, an angular resolution and the like required by indexes of a focusing telescope array, focusing telescope lenses with the length of 1-45, the diameter of 600mm and the maximum diameter of 500mm need to be assembled and adjusted together, wherein the surface roughness requirement is 0.5nm, the surface shape precision requirement is 0.2 mu m, the thinnest lens is only 0.2mm in thickness and is very easy to deform, and the technical index is very difficult to realize and complete, so that high requirements are provided for the precision and the stability of a detection system. Because the optical surface is the inner surface of the mirror shell, the surface shape precision of the existing general measuring instrument cannot be directly detected.

Disclosure of Invention

The invention aims to solve the defects in the prior art, and further provides a high-precision detection device for the inner wall of a Wolteri type X-ray focusing lens, which is used for ensuring the detection precision of the inner wall of a large batch of lenses, ensuring the low deformation of large-size ultrathin lenses and improving the detection efficiency.

The technical scheme adopted by the invention is as follows: the high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror comprises a support, a measuring device, a high-precision air floatation main shaft, an XY translation table and an active hoisting device; the active hoisting device is supported by a support and used for hoisting the lens cone, the measuring device is used for roundness error and contour error of the lens cone on the side surface, the measuring device is installed on the high-precision air floatation main shaft and is driven by the high-precision air floatation main shaft to rotate for measurement, the high-precision air floatation main shaft is installed on an XY translation table, and the XY translation table is installed on the support.

Compared with the prior art, the invention has the following beneficial effects:

aiming at the problem that the existing general measuring instrument can not directly detect the surface shape precision of the inner wall of the WolterI type X-ray focusing mirror, the invention is of a turntable structure taking an ultra-precise air floatation turntable and a high-precision upright post guide rail as a reference, can realize the contour measurement of the inner wall of the lens in the axial direction and the circumferential direction, ensures the low deformation and the high precision of the lens in the detection process, improves the detection efficiency, and achieves the effects of cost reduction and efficiency improvement.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a front view of the present invention;

FIG. 3 is a schematic view of the installation of the measuring device of the present invention;

FIG. 4 is a schematic structural view of a roundness error measuring mechanism according to the present invention;

FIG. 5 is a front view of a roundness error measuring mechanism of the present invention;

FIG. 6 is a schematic view of a profile error measurement mechanism according to the present invention;

FIG. 7 is a schematic structural view of the active hoisting device of the present invention;

FIG. 8 is a schematic structural view of a hoisting mechanism of the present invention;

wherein: 1. a support; 2. a lens barrel; 3. a measuring device; 4. a high-precision air-floating main shaft; 5. an XY translation stage; 6. an active hoisting device; 11. a granite table-board; 12. high-precision granite upright posts; 31. a roundness error measuring mechanism; 311. a spherical reflector; 312. a laser autocollimator; 32. a profile error measuring mechanism; 321. a long-distance interference measuring head; 322. a plane mirror; 323. a focusing type short-distance interference probe; 324. an X displacement stage; 33. a lifting guide rail; 34. precisely leveling and aligning the workbench; 61. hoisting a disc; 62. a hoisting mechanism; 63. a lifting rope; 621. a lead screw drive mechanism; 623. a knife edge supporting part; 624. a force sensor; 625. a lever; 626. a balancing weight; 627. a voice coil motor.

Detailed Description

Referring to fig. 1 to 8, the detection device is a turntable structure based on the high-precision air-bearing spindle 4 and the lifting guide rail 33, and can realize contour measurement of the lens barrel 2 in the axial direction and the circumferential direction.

The high-precision detection device for the inner wall of the WolterI type X-ray focusing lens comprises a support 1, a measuring device 3, a high-precision air floatation main shaft 4, an XY translation stage 5 and an active hoisting device 6; the active hoisting device 6 is supported by the support 1 and used for hoisting the lens cone 2, the measuring device 3 is used for roundness error and contour error of the lens cone 2 on the side surface, the measuring device 3 is installed on the high-precision air floatation main shaft 4 and is driven by the high-precision air floatation main shaft 4 to rotate and measure, the high-precision air floatation main shaft 4 is installed on the XY translation table 5, and the XY translation table 5 is installed on the support 1.

The main shaft adopts a high-precision air-floating main shaft 4 (nanometer jumping), so that the instrument has the advantages of high rotation precision, good stability, strong bearing capacity, non-contact, no abrasion and long service life. The lifting guide rail 33 of the measuring device 3 ensures that the bus has high measuring precision and good repeatability. The vertical and horizontal motion of the sensor is driven by a linear motor, so that the instrument is convenient to operate and accurate to adjust. And 9000 lines/circle of high-precision circular gratings are adopted to ensure the data sampling resolution.

The profiles of the lens barrel 2 to be measured are two kinds, one is a roundness error in a circumferential direction of a certain height, and the other is a profile error in a generatrix direction of the lens barrel 2. For measuring roundness error, the high-precision air-floating main shaft 4 drives the measuring head to rotate, and a circle of the outline is scanned. The position of the vertical Z axis and the radial position X axis of the stylus remains stationary. When the bus error is measured, the precision air floatation main shaft 4 does not move, moves vertical to the Z axis and the radial X axis, and scans a straight line.

The two scanning modes both need accurate measurement reference, and because the degree of freedom of motion is too large, the difficulty of ensuring the overall measurement precision by strictly ensuring the precision of each motion link is very high, and the measurement of submicron precision is difficult to realize. It is therefore necessary to design an optical measurement reference that is completely independent of the motion system.

As shown in fig. 3 to 5, the measuring device 3 includes a roundness error measuring mechanism 31, a profile error measuring mechanism 32, a lifting guide rail 33, and a precision leveling and aligning table 34; roundness error measuring mechanism 31 and contour error measuring mechanism 32 all set up in lens cone 2, and all install on the slider of lift guide rail 33, lift guide rail 33 is installed on accurate leveling self-aligning workstation 34, accurate leveling self-aligning workstation 34 is installed on high accuracy air supporting main shaft 4.

The roundness error measuring mechanism 31 comprises a spherical reflector 311 and a laser autocollimator 312; the spherical reflector 311 is mounted on a slider of the lifting guide rail 33, in order to position the spherical reflector 311 at the rotation center perpendicular to the Z axis, a vertical through groove for mounting the spherical reflector 311 is formed in the slider, the light beam of the laser autocollimator 312 enters the spherical reflector 311 from below, and then the reflected light returns to the laser autocollimator 312. When the slide block of the lifting guide rail 33 is shifted in any direction in the horizontal direction during the vertical movement or the rotation of the main shaft, the light beam is deviated from the center of the spherical mirror 311, so that the angle measurement of the laser autocollimator 312 can reflect the eccentricity. This collimated beam serves as a reference for both the swivel and vertical scans.

The next step is to measure the radial distance of the inner surface of the barrel 2 from the centre of gyration.

As shown in fig. 3 and 6, since the radius variation range of the lens barrel 2 is relatively large (180mm), the surface of the lens barrel 2 is a curved surface, and the slopes are not uniform at different heights, which makes the optical interference distance measurement difficult. Generally, the long-distance interferometer has high requirements on the angle of the mirror to be measured, and only a specific plane mirror can be selected. The angle that can be measured is improved if the beam is focused by means of a mirror, but the length range that can be measured is difficult to reach 180 mm. Therefore, the design scheme adopts a mode of superposing two measuring heads to meet the measuring requirements of long stroke and large angle.

First, a long-distance interference probe 321 is installed near the center of rotation, a light beam is directed to a plane mirror 322, a focusing type short-distance interference probe 323 is installed on the plane mirror 322, and the plane mirror 322 is controlled in its radial position by a radial X-displacement table 324. The superposition of the measured distances of the two long-distance interference probes 321 and the focusing short-distance interference probe 323 can reflect the position of the inner surface of the lens barrel 2. Because the generatrix of the lens barrel 2 is inclined, the installation of the focusing type short-distance interference measuring head 323 is also designed to be deviated by a certain angle, and the deviated angle range is 0.4-5 degrees, so that the requirement on the measuring head angle measuring range is greatly reduced.

The method specifically comprises the following steps: the profile error measuring mechanism 32 comprises a long-distance interference measuring head 321, a plane reflecting mirror 322, a focusing short-distance interference measuring head 323 and an X displacement table 324; the long-distance interference measuring head 321 is arranged near the rotation center vertical to the Z axis and is installed on a sliding block of the lifting guide rail 33, a light beam emitted by the long-distance interference measuring head 321 is aligned with the plane reflecting mirror 322 for measuring the distance between the long-distance interference measuring head and the plane reflecting mirror 322, and the focusing short-distance interference measuring head 323 is installed on the plane reflecting mirror 322 for measuring the distance between the long-distance interference measuring head and the plane reflecting mirror 2; the plane mirror 322 is controlled in its radial position by an X-displacement stage 324.

Because the diameter of the smallest lens barrel 2 is only 140mm and is smaller than the radius (250mm) of the longest lens barrel 2, the existing radial motion platform cannot meet the requirement due to space limitation. The X-stage 324 is thus designed for a two-stage displacement mode: the two small-sized piezoelectric translation stages are superimposed to ensure that less than 140mm is achieved when shortening and the largest barrel 2 edge is achieved when extending.

The measuring head adopts an Attocube or Smartt nano-scale interference probe, and the measuring precision and the stability are the world leading level. The special measurement analysis management software based on the Windows operating system has the functions of automatic acquisition, automatic eccentricity correction, instrument calibration, digital filtering, measurement parameter evaluation, measurement result database archiving, printing output and the like. The measuring resolution of the measuring head can reach 1 pm. The measuring angle of the short-distance measuring head is selected to be +/-2 degrees, and the measuring range is 10 mm. The measuring range of the long-distance measuring head is 13-650 mm, and the measuring requirement is met.

As shown in fig. 7 and 8, the active hoisting device 6 includes a hoisting disk 61, a plurality of hoisting ropes 63 and a plurality of hoisting mechanisms 62, the hoisting disk 61 is horizontally installed at the upper end of the support 1, the hoisting mechanisms 62 are annularly and uniformly installed on the upper surface of the hoisting disk 61, the inner end of each hoisting mechanism 62 extends out of the hoisting disk 61, and the lens barrel 2 is pulled by the hoisting ropes 63.

Each hoisting mechanism 62 comprises a lead screw driving mechanism 621, a force sensor 624, a lever 625, a balancing weight 626 and a voice coil motor 627; the inner end of the slider of the lead screw driving mechanism 621 is additionally provided with a knife edge supporting part 623, the rod body of the lever 625 is supported by the knife edge supporting part 623, the inner end of the lever 625 is provided with a force sensor 624, the outer end of the lever 625 is connected with a voice coil motor 627, the voice coil motor 627 is arranged on the slider of the lead screw driving mechanism 621, the upper end of the lifting rope 63 is connected with the force sensor 624, the force on the lifting rope 63 is directly measured through the force sensor 624, and the outer end of the lever 625 is also provided with a balancing weight 626.

The hoisting plate 61 is provided with 16 hoisting ropes 63 in total, and each hoisting rope 63 has the same structure. The radial position of each lifting rope 63 is controlled by an electric slide, which uses a compact screw drive 621, with a width of only 60mm, so that there is enough room on the hoisting plate 61 to place 16 slides. The movement range of the sliding table is 200mm, and the adjustment of the radius position of the maximum (250mm) and minimum (70mm) lens barrel 2 is met.

The force on the lifting rope 63 is directly measured by the force sensor 624, the force of the voice coil motor 627 is transmitted by the lever 625 mechanism, the two forces are balanced, and the force can be accurately controlled as long as the current value in the voice coil motor 627 is controlled. When the mass of different lens barrels 2 is different, the weight 626 is replaced to make the load of the voice coil motor 627 smaller, and the heat generation is reduced. The voice coil motor 627 is used to fine tune the force.

The force sensor 624 is a central element. The accuracy of the 16 force sensors 624 therefore needs to be accurately calibrated. Since the size and weight of the lens barrel 2 are preset, the sensitivity of each force sensor 624 can be calibrated at the working point of each weight.

Active control of the force requires a multi-channel closed loop control system. The main function of the system is to read the real-time tension value of the tension sensor 624 and then send a command to control the movement of the voice coil motor 627 of the corresponding channel. A 16 channel control system is therefore required. One of the 16 channels is used as a reference and the remaining 15 degrees of freedom follow the tension on this lifting rope 63.

The calibration of the radial position of the hoist rope 63 is important for directional control of the pulling force. All the suspension cords 63 should be on the same circumference with the same diameter as the lens barrel 2. There may be a deviation in the starting zero point between each lead screw driving mechanism 621. Therefore, when the zero point of the lead screw driving mechanism 621 is determined, all the lead screw driving mechanisms 621 are moved to the innermost side to make the lifting rope 63 gather to the center of the lifting disc 61 as much as possible, then the images of the lifting rope 63 at the 16 force sensors 624 are captured by the camera, the center deviation of each point is obtained by means of image processing, and then the center deviation is used as the zero point of the movement of the lead screw driving mechanism 621. Each lead screw drive 621 can achieve a motion resolution of 0.002 mm.

As shown in fig. 1, the support 1 comprises a granite table 11 and a plurality of high-precision granite upright posts 12; a plurality of high-precision granite upright columns 12 are vertically and uniformly distributed on the edges of the upper end surface and the lower end surface of the granite table surface 11, and air filters are respectively arranged at the upper ends of the high-precision granite upright columns 12 above and at the lower ends of the high-precision granite upright columns 12 below.

The working table surface and the upright post are made of natural granite materials, so that the mechanical performance of the instrument is more stable and reliable, and the instrument is not deformed or drifted. The two-stage built-in air filter, a protective pressure relay and an oil-water separator device ensure that the working air pressure of the compressed air is stable, clean and dry, and ensure that the air-floating main shaft has good rotation stability and high precision.

The granite table surface 11, the XY translation table 5, the high-precision air-floating main shaft 4 and the precision leveling and aligning workbench 34 are all provided with center holes, the center axis of each center hole coincides with the rotation center vertical to the Z axis and is a light beam outflow channel of the laser autocollimator 312, and the laser autocollimator 312 is installed at the lower end of the support 1.

The test flow comprises the following steps:

measuring the inner surface of the lens barrel 2, comparing the measured result with the measured result of the mold, and analyzing the problem of precision retentivity in the copying process; and measuring and representing the geometric surface shape of the lens barrel 2, combining an optical test result, obtaining a relationship between geometric tolerance and optical performance through an experiment, and comparing the relationship with a simulation result.

And measuring and comparing the hub shapes of the lens barrel 2 in different hoisting states of the active hoisting device 6. The effect of hoisting can be quantitatively analyzed and hoisting parameters can be optimized accordingly.

The shape change of the lens barrel 2 in the gluing process is researched, and gluing technological parameters are optimized.

The bus bar scanning measurement mode can be used for measuring the posture of the lens barrel 2, and can be possibly applied to the adjustment process of the lens barrel 2 to be compared with the detection scheme of optical imaging. And selecting an optimal assembly measurement mode.

It is to be understood that the present invention has been described with reference to certain embodiments, and that various changes in the features and embodiments, or equivalent substitutions may be made therein by those skilled in the art without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. The utility model provides a Wolteri type X ray focusing mirror inner wall high accuracy detection device which characterized in that: comprises a bracket (1), a measuring device (3), a high-precision air-floating main shaft (4), an XY translation table (5) and an active hoisting device (6); the active hoisting device (6) is supported by the support (1) and used for hoisting the lens cone (2), the measuring device (3) is used for roundness error and contour error of the lens cone (2) on the side surface, the measuring device (3) is installed on the high-precision air floatation main shaft (4), the high-precision air floatation main shaft (4) drives the high-precision air floatation main shaft to rotate and measure, the high-precision air floatation main shaft (4) is installed on the XY translation table (5), and the XY translation table (5) is installed on the support (1).

2. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror according to claim 1, characterized in that: the measuring device (3) comprises a roundness error measuring mechanism (31), a contour error measuring mechanism (32), a lifting guide rail (33) and a precise leveling and aligning workbench (34); roundness error measuring mechanism (31) and profile error measuring mechanism (32) all set up in lens cone (2), and all install on the slider of riser guide (33), riser guide (33) are installed on accurate leveling aligning workstation (34), accurate leveling aligning workstation (34) are installed on high accuracy air supporting main shaft (4).

3. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror, according to claim 2, is characterized in that: the roundness error measuring mechanism (31) comprises a spherical reflector (311) and a laser autocollimator (312); the spherical reflector (311) is arranged on a sliding block of the lifting guide rail (33), in order to enable the spherical reflector (311) to be positioned at the rotation center vertical to the Z axis, a vertical through groove for installing the spherical reflector (311) is formed in the sliding block, light beams of the laser autocollimator (312) enter the spherical reflector (311) from the lower part, and then reflected light rays return to the laser autocollimator (312).

4. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror, according to claim 2, is characterized in that: the profile error measuring mechanism (32) comprises a long-distance interference measuring head (321), a plane reflecting mirror (322), a focusing type short-distance interference measuring head (323) and an X displacement table (324); the long-distance interference measuring head (321) is arranged near a rotation center vertical to a Z axis and is installed on a sliding block of the lifting guide rail (33), a light beam emitted by the long-distance interference measuring head (321) is aligned with the plane reflecting mirror (322) and is used for measuring the distance between the long-distance interference measuring head and the plane reflecting mirror, and the focusing short-distance interference measuring head (323) is installed on the plane reflecting mirror (322) and is used for measuring the distance between the long-distance interference measuring head and the surface of the lens barrel (2); the plane mirror (322) is controlled in its radial position by an X-displacement stage (324).

5. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror according to claim 4, characterized in that: the focusing type short-distance interference measuring head (323) is obliquely arranged on the plane reflecting mirror (322), and the range of the oblique angle alpha is as follows: 0.4-5 degrees.

6. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror according to claim 4, characterized in that: the X displacement table (324) adopts a double-section displacement mode and is formed by superposing two piezoelectric translation tables.

7. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror according to claim 1, characterized in that: initiative hoist device (6) are including hoisting disk (61), many lifting ropes (63) and a plurality of hoisting machine construct (62), hoisting disk (61) horizontal installation is in support (1) upper end, a plurality of hoisting machine construct (62) annular equipartition and install on hoisting disk (61) upper surface, and outside every hoisting machine construct (62) inner all stretches out hoisting disk (61), through lifting ropes (63) pulling lens cone (2).

8. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror according to claim 7, characterized in that: each hoisting mechanism (62) comprises a lead screw driving mechanism (621), a force sensor (624), a lever (625), a balancing weight (626) and a voice coil motor (627); the inner end of the slider of the screw driving mechanism (621) is additionally provided with a knife edge supporting part (623), the rod body of the lever (625) is supported by the knife edge supporting part (623), the inner end of the lever (625) is provided with a force sensor (624), the outer end of the lever is connected with a voice coil motor (627), the voice coil motor (627) is arranged on the slider of the screw driving mechanism (621), the upper end of the lifting rope (63) is connected with the force sensor (624), the force on the lifting rope (63) is directly measured through the force sensor (624), and the outer end of the lever (625) is also provided with a balancing weight (626).

9. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror, according to claim 2, is characterized in that: the support (1) comprises a granite table board (11) and a plurality of high-precision granite upright posts (12); the edge of both ends face is vertical the equipartition and is installed many high accuracy granite stand (12) about granite mesa (11), and high accuracy granite stand (12) upper end that are located the top and high accuracy granite stand (12) lower extreme that are located the below all embed air cleaner.

10. The high-precision detection device for the inner wall of the Wolteri type X-ray focusing mirror according to claim 9, characterized in that: the granite table surface (11), the XY translation table (5), the high-precision air-floating main shaft (4) and the precision leveling and aligning workbench (34) are all provided with center holes, the center shaft of each center hole coincides with the rotation center vertical to the Z axis and is a light beam outflow channel of the laser autocollimator (312), and the laser autocollimator (312) is installed at the lower end of the support (1).