CN105068208A - Installation and adjustment system and method for multi-layer nested X-ray grazing incidence optical lens - Google Patents

Installation and adjustment system and method for multi-layer nested X-ray grazing incidence optical lens Download PDF

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Publication number
CN105068208A
CN105068208A CN201510508487.9A CN201510508487A CN105068208A CN 105068208 A CN105068208 A CN 105068208A CN 201510508487 A CN201510508487 A CN 201510508487A CN 105068208 A CN105068208 A CN 105068208A
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eyeglass
subsystem
installation
suspension
disc
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CN105068208B (en
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左富昌
梅志武
石永强
孙建波
邓楼楼
李连升
王春宇
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Beijing Institute of Control Engineering
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Beijing Institute of Control Engineering
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Abstract

The invention proposes an installation and adjustment system and method for a multi-layer nested X-ray grazing incidence optical lens, and the system comprises a suspension subsystem, a measurement subsystem, a displacement subsystem, a pre-installation supporting device, an optical supporting platform, and a focal plane receiving screen. The method comprises seven steps: preparation, suspension, pre-installation, alignment, measurement, binding, and supporting structure installation. The system and method can greatly improve the installation and adjustment precision, speed and yield of the multi-layer nested X-ray grazing incidence optical lens, achieve no-stress installation and adjustment, improve the optical performance, are easy to implement, is high in universality, is high in installation and adjustment precision, and is high in installation and adjustment efficiency.

Description

A kind of assembling & adjusting system of multilayer nest X ray grazing incidence optics camera lens and method
Technical field
The present invention relates to a kind of assembling & adjusting system and method for multilayer nest X ray grazing incidence optics camera lens, belong to space optics technical field.
Background technology
X-ray pulsar navigation is applicable to the complete independent navigation of terrestrial space, survey of deep space and space flight spacecraft, can be most of space tasks spacecraft and the comprehensively navigation information such as position, speed, attitude and time is provided, realize the complete independent navigation of spacecraft, there is the advantages such as reliability is strong, good stability, accuracy are high, applicability is wide, be an extremely potential novel autonomous navigation technology, there is extremely important engineering practical value and strategic research meaning.
The core of X-ray pulsar navigation sensor is X ray optical lens.As the one of X ray optical lens, multilayer nest X ray grazing incidence optics camera lens is in recent years and the Main Trends of The Development in future.The eyeglass of multilayer nest X ray grazing incidence optics camera lens generally copies shaping obtaining by aluminium foil or glass sheet, thickness only has tens to hundreds of micron, debug in process and easily produce relative position and attitude misalignment between each layer eyeglass, every layer of eyeglass is yielding, thus causes the face shape error of optical lens to increase and angular resolution decline.Research shows, the maximum error item of multilayer nest X ray grazing incidence optics camera lens is derived from the process of debuging.Traditional optical lens Method of Adjustment, mainly for the lens of heavy thickness, is debug in process to relate to and larger is debug power, cannot be applicable to multilayer nest X ray grazing incidence optics camera lens.
Summary of the invention
The technical matters that the present invention solves is: the above-mentioned deficiency overcoming prior art, a kind of assembling & adjusting system and method for multilayer nest X ray grazing incidence optics camera lens are proposed, the operations such as preparation, suspention, pre-installation, aligning, measurement, bonding and supporting construction installation are integrated together, that greatly can improve optical lens debugs precision, speed and yield rate, realize that multilayer nest X ray grazing incidence optics lens wearer is unstressed to be debug, and improve optical property, have be easy to realization, highly versatile, debug precision high, debug efficiency advantages of higher.
The solution of the present invention is: a kind of assembling & adjusting system of multilayer nest X ray grazing incidence optics camera lens, comprises suspention subsystem, measurement subsystem, displacement subsystem, pre-installation bracing or strutting arrangement, optics support platform, focal plane receiving screen; Described suspention subsystem comprises suspension, suspension rope and hanging hook, realizes the short distance transhipment of eyeglass from storage platform to assembling & adjusting system; Described measurement subsystem comprises roundness measuring equipment, paraboloidal mirror and pointolite, the face shape of real-time online measuring eyeglass, relative position and attitude; Described displacement subsystem comprises radial displacement regulating device and axial displacement regulating device, comprises degree of freedom turntable and drive motor;
Described suspention subsystem is positioned at the top of optics support platform, and suspension is disc-shaped structure, and suspension rope is distributed in suspension circumferentially, and can radially move, and to mate the eyeglass of different-diameter, hanging hook is positioned at the lower end of suspension rope, for hooking eyeglass;
The roundness measuring equipment of described measurement subsystem is for measuring the circularity of eyeglass near end, paraboloidal mirror and pointolite are positioned at the below of optics support platform, pointolite is positioned at the focus place of paraboloidal mirror, produce the collimated visible light beam launched straight up, collimated visible light beam is after lens reflecting, focus on the receiving screen of focal plane, by the shape of focus on the receiving screen of focal plane, size and position, determine the face shape of eyeglass, relative position and attitude;
Described displacement subsystem, by disc before radial and axial adjustment, realizes the adjustment of eyeglass relative position and attitude;
Described pre-installation bracing or strutting arrangement is used for the eyeglass of suspention to optics support platform tentatively to support; Described pre-installation bracing or strutting arrangement comprises support column, skirt, support bar and sucker, wherein support column is positioned in optics support platform, support column upper end supports a skirt, skirt vertically moves up and down along support column, skirt inner periphery is radially uniformly distributed some support bars, the length of adjustment support bar is to adapt to the eyeglass of different-diameter, and each support bar end is furnished with a sucker; Pre-installation bracing or strutting arrangement utilizes external valve to control vacuum tightness and the suction-combining force of sucker, eyeglass outside surface is held, and move to straight down in ring groove corresponding on front disc, in measuring process, keep the support to eyeglass, after bonding, remove pre-installation bracing or strutting arrangement;
Described optics support platform is for supporting the eyeglass of measurement subsystem, displacement subsystem, front disc and subsequent installation;
Utilize above-mentioned assembling & adjusting system to carry out the method debug, step is as follows:
1) prepare; Visual examination, surface testing and roughness measurement, cleaning are carried out to the eyeglass machined, guarantees that the precision of eyeglass and cleanliness factor meet matching requirements; Utilize finite element software to analyze eyeglass, obtain mounting points and point of suspension number, relation between position and lens deformation, determine best mounting points and point of suspension number and position, and beat suspension eye, for suspention in the point of suspension position of eyeglass rear end; Front disc and middle studdle are fixed, and the two is fixed on the degree of freedom turntable in optics support platform simultaneously; Each layer eyeglass debug order be from-inner-to-outer, namely first debug innermost layer eyeglass, outer layers eyeglass is debug successively;
2) suspend in midair; By suspention subsystem, eyeglass is suspended in midair, the suspension hook of suspention subsystem is placed in step 1) described in suspension eye in, by the load of fine setting suspension apparatus each suspension rope, eyeglass face shape is revised, ensure the axis of eyeglass vertically, and there is not distortion;
3) pre-installation; By pre-installation bracing or strutting arrangement, the eyeglass that suspention subsystem is sling is converted into rigid body, detailed process is: move up and down skirt, the length of adjustment support bar, make the lucky haptic lens outside surface of the sucker of support bar end, external valve is utilized to control the suction-combining force of sucker, held by eyeglass outside surface, remove suspention subsystem, now eyeglass is by the operating point rigid support of pre-installation bracing or strutting arrangement;
4) aim at; By moving down skirt along support column, and utilizing displacement subsystem, the position of the front disc of adjustment and attitude, realize aiming between eyeglass with corresponding ring groove on front disc, ensure between eyeglass with location ring groove coaxial, and the end of eyeglass and annular groove bottom are fitted;
For innermost layer eyeglass: after realizing the aligning between innermost layer eyeglass with corresponding ring groove on front disc, with glue by itself and front disc permanent adhesive, innermost layer eyeglass has been debug;
For other layer of eyeglass: after realizing the aligning between this layer of eyeglass ring groove corresponding to front disc, enter step 5), and with step 5) measurement result be according to repeating this step, the relative position further between adjustment this layer of eyeglass and innermost layer eyeglass and attitude;
5) measure; Collimated visible light beam is utilized to measure the focal position of innermost layer eyeglass and pre-installation eyeglass, if the two misalignment, namely there is relative position and attitude misalignment, then focus can not overlap, measurement subsystem measures relative position and the attitude misalignment value of innermost layer eyeglass and pre-installation eyeglass, feeds back to displacement subsystem as adjustment amount; The circularity of pre-installation eyeglass front end measured by roundness measuring equipment, feeds back to displacement subsystem;
6) repeat step 4), step 5), until the position deviation of eyeglass, attitude misalignment and distortion are in permissible range;
7) bonding; Be in position in front disc ring groove using eyeglass end as adhesive spots, apply bonded adhesives, by eyeglass and front disc permanent adhesive in adhesive spots; Repeat step 2) ~ 7), until the equal permanent adhesive of all eyeglasses is in front disc;
8) supporting construction is installed; By pre-installation bracing or strutting arrangement, cylindrical shape lens barrel is moved to directly over eyeglass, and slowly move down, until close with front disc, by two register pins, lens barrel and front disc aimed at, remove pre-installation bracing or strutting arrangement, lens barrel and front disc are fixed; By suspention subsystem, rear disc is moved to directly over eyeglass, disc, lens barrel and all eyeglasses before fine setting, make the ring groove on disc after eyeglass back-end aligned, remove suspention subsystem, each layer eyeglass is all embedded in ring groove, and gap uniformity, apply bonded adhesives, make all eyeglasses be adhered to rear disc; And lens barrel and middle studdle and rear disc are fixed.
The present invention compared with prior art tool has the following advantages:
(1) assembling & adjusting system of the present invention and method adopt suspention flexible support and non-contact measurement, can reduce to debug the distortion produced in process, ensure the initial surface figure accuracy of eyeglass, avoid the damage of eyeglass; Enough supports and stability can be provided, guarantee that optical lens can bear the load in emission process, and the decline of optical property and mechanical property does not occur; By real-time online measuring, reduce the resetting error that the converted position measurement brings;
(2) operations such as preparation, suspention, pre-installation, aligning, measurement, bonding and supporting construction installation integrate by assembling & adjusting system of the present invention and method, that can improve optical lens debugs precision, speed and yield rate, have be easy to realization, highly versatile, debug precision high, debug efficiency advantages of higher;
(3) assembling & adjusting system of the present invention and method can be applicable to multilayer nest X ray grazing incidence optics camera lens, also can be applicable to have optical lens that is nested or array cylindrical shape eyeglass, applied widely.
Accompanying drawing explanation
Fig. 1 is the assembling & adjusting system schematic diagram of multilayer nest X ray grazing incidence optics camera lens of the present invention;
Fig. 2 is the assembling & adjusting system suspention subsystem schematic diagram of multilayer nest X ray grazing incidence optics camera lens of the present invention;
Fig. 3 is the assembling & adjusting system measurement subsystem schematic diagram of multilayer nest X ray grazing incidence optics camera lens of the present invention;
Fig. 4 is the assembling & adjusting system displacement subsystem schematic diagram of multilayer nest X ray grazing incidence optics camera lens of the present invention;
Fig. 5 is the assembling & adjusting system pre-installation bracing or strutting arrangement schematic diagram of multilayer nest X ray grazing incidence optics camera lens of the present invention;
Fig. 6 is the multilayer nest X ray grazing incidence optics camera lens schematic diagram using the assembling & adjusting system of multilayer nest X ray grazing incidence optics camera lens of the present invention and method to debug;
Fig. 7 is the Method of Adjustment process flow diagram of multilayer nest X ray grazing incidence optics camera lens of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail:
As shown in Figure 6, wait the multilayer nest X ray grazing incidence optics camera lens debug by multilayer eyeglass 14, front disc 16, after disc 12, middle studdle 13, eyeglass 14 and lens barrel 15 form, eyeglass 14 is thin wall cylinder-shaped structure, one end that definition eyeglass 14 diameter is larger is front end, the other end is rear end, and when debuging, the front end of eyeglass 14 straight down;
As shown in Figure 1, a kind of assembling & adjusting system of multilayer nest X ray grazing incidence optics camera lens comprises suspention subsystem, measurement subsystem, displacement subsystem, pre-installation bracing or strutting arrangement, optics support platform 10, focal plane receiving screen 6; Defining direction is straight up debug coordinate system+Z-direction, optics support platform 10 surface is the initial point O debuging coordinate system with the intersection point of vertical direction, optics support platform 10 surface in and be the X-axis debuging coordinate system by the straight line of initial point O, according to right-hand rule determination Y direction; Described suspention subsystem comprises suspension 1, suspension rope 2 and hanging hook 3, realizes the short distance transhipment of eyeglass 14 from storage platform to assembling & adjusting system; Described measurement subsystem comprises roundness measuring equipment 7, paraboloidal mirror 4 and pointolite 5, realizes real-time online measuring;
As depicted in figs. 1 and 2, suspention subsystem is positioned at the top of optics support platform 10, can within the specific limits up and down, move left and right, suspension 1 is disc-shaped structure, suspension rope 2 is distributed in disk circumferentially, and can radially move, to adapt to the eyeglass 14 of different-diameter, hanging hook 3 is positioned at the lower end of suspension rope 2, for hooking the suspension eye near eyeglass 14 rear end; Suspension rope 2 need have higher intensity, and to bear the gravity of eyeglass 14, and adjustable in length, the position of suspension rope 2 on suspension 1 can radially accurate adjustment, and after adjustment, position can be fixed; Whole suspention subsystem can rotate freely around the vertical axis of suspension 1; Hanging hook 3 opening is comparatively large, and hardness need lower than eyeglass 14 material, in order to avoid damage eyeglass 14;
As shown in figures 1 and 3, measurement subsystem measures the face shape of eyeglass 14, position and attitude, comprise the roundness measuring equipment 7 measuring eyeglass 14 end circularity and the paraboloidal mirror 4 measuring eyeglass 14 shapes, the measurement range of roundness measuring equipment 7 should contain all eyeglasses 14, should be non-cpntact measurement, paraboloidal mirror 4 and pointolite 5 are positioned at the below of optics support platform 10, pointolite 5 is positioned at the focus place of paraboloidal mirror 4, to produce the collimated visible light beam launched straight up, collimated visible light beam is after eyeglass 14 reflects, focus on focal plane receiving screen 6, according to the shape of focus on focal plane receiving screen 6, size and position, determine the face shape of eyeglass 14, position and attitude, the axis of paraboloidal mirror 4 should be vertical, and to ensure that the collimated visible light beam through its reflection is launched straight up, beam diameter should be able to cover the front end bore of outermost layer eyeglass 14, focal plane receiving screen 6 is positioned at the focal plane of optical lens, and upper-lower position is fine-tuning, for receiving the hot spot that optical lens focuses on,
As shown in Figure 1 and Figure 4, displacement subsystem, by disc 16 before radial and axial adjustment, realizes the adjustment of eyeglass 14 relative position and attitude, and the direction of adjustment is respectively along debuging three translations of coordinate system X, Y, Z axis and two rotations around X, Y-axis; Implemented along X-axis and the adjustment of Y-axis radial direction by two motors 8, along the translation of Z axis with implement around three motors 8 that are rotated through of X, Y-axis, the precision of motor 8 must be better than 0.1 μm;
As shown in Figure 1 and Figure 5, pre-installation bracing or strutting arrangement is used for the eyeglass 14 of suspention to optics support platform 10 tentatively to support, comprise support column 17, skirt 18, support bar 19 and sucker 20, wherein support column 17 is positioned in optics support platform 10, support column 17 upper end supports a skirt 18, skirt 18 vertically can move up and down along support column 17, skirt 18 inner periphery is radially uniformly distributed some support bars 19, the adjustable in length of support bar 19, to adapt to the eyeglass 14 of different-diameter, each support bar 19 end is furnished with a sucker 20; Utilize external valve to control vacuum tightness and the suction-combining force of sucker 20, eyeglass 14 outside surface is held, and moves to straight down in ring groove corresponding on front disc 16, in measuring process, keep the support to eyeglass 14, after bonding, remove pre-installation bracing or strutting arrangement;
As shown in Figure 7, Method of Adjustment comprises the following steps:
1) prepare; Visual examination, surface testing and roughness measurement, cleaning are carried out to the eyeglass 14 machined, guarantees that the precision of eyeglass 14 and cleanliness factor meet matching requirements; Finite element software is utilized to analyze eyeglass 14, obtain mounting points and point of suspension number and position and eyeglass 14 be out of shape between relation, determine best mounting points and point of suspension number and position, and beat suspension eye in the point of suspension position of eyeglass 14 rear end, for suspention; In addition, front disc 16 and middle studdle 13 are screwed, and the two is fixed on optics support platform 10 simultaneously;
2) suspend in midair; By active control type suspention subsystem, eyeglass 14 is suspended in midair, by suspention subsystem hanging hook 3 be placed in step 1) described in suspension eye in, by the load of each suspension rope 2 of fine setting suspension apparatus, eyeglass 14 shapes are revised, ensure the axis of eyeglass 14 vertically, and there is not distortion and stress;
3) pre-installation; By pre-installation bracing or strutting arrangement, the eyeglass 14 that suspention subsystem is sling is converted into rigid body; Detailed process moves up and down skirt 18, the length of adjustment support bar 19, make sucker 20 haptic lens 14 outside surface just of support bar 19 end, and contact position should be positioned at the axially middle of eyeglass 14 as far as possible, external valve is utilized to control the suction-combining force of sucker 20, held by eyeglass outside surface, eyeglass 14 is by the operating point rigid support of pre-installation bracing or strutting arrangement; For ease of removing suspention subsystem, first suspention subsystem slowly should be landed, suspension rope 2 is loosened;
4) aim at; By moving down skirt 18 along support column 17, and utilizing displacement subsystem, the position of the front disc 16 of adjustment and attitude, realize aiming between eyeglass 14 with the corresponding ring groove of front disc 16, ensure between eyeglass 14 with location ring groove coaxial, and the end of eyeglass 14 and annular groove bottom are fitted;
For innermost layer eyeglass: after realizing the aligning between innermost layer eyeglass with the corresponding ring groove of front disc 16, with glue by itself and front disc 16 permanent adhesive, innermost layer eyeglass has been debug;
For other layer of eyeglass: after realizing the aligning between this layer of eyeglass with the corresponding ring groove of front disc 16, enter step 5), and with step 5) measurement result be according to repeating this step, the relative position further between adjustment this layer of eyeglass and innermost layer eyeglass and attitude;
5) measure; Collimated visible light beam is utilized to measure the focal position of innermost layer eyeglass and pre-installation eyeglass, if the two misalignment, namely there is relative position and attitude misalignment, then focus does not overlap, measurement subsystem measures relative position and the attitude misalignment value of innermost layer eyeglass and pre-installation eyeglass, feeds back to displacement subsystem as adjustment amount; The circularity of pre-installation eyeglass front end measured by roundness measuring equipment 7, feeds back to displacement subsystem;
6) repeat step 4), step 5), until the position deviation of eyeglass 14, attitude misalignment and distortion are in permissible range;
7) bonding; Be in position in front disc 16 ring groove using eyeglass end as adhesive spots, apply bonded adhesives in adhesive spots, by eyeglass 14 and front disc 16 permanent adhesive; Repeat step 2) ~ 7), until the equal permanent adhesive of all eyeglasses 14 is in front disc 16;
8) supporting construction is installed; By pre-installation bracing or strutting arrangement, cylindrical shape lens barrel 15 is moved to directly over eyeglass 14, and slowly move down, until close with front disc 16, by two register pins, lens barrel 15 and front disc 16 are aimed at, remove pre-installation bracing or strutting arrangement, lens barrel 15 and front disc 16 are fixed by screw; By suspention subsystem, rear disc 12 is moved to directly over eyeglass 14, disc 16, lens barrel 15 and all eyeglasses 14 before fine setting, make the ring groove on disc 12 after eyeglass 14 back-end aligned, remove suspention subsystem, each layer eyeglass 14 is all embedded in ring groove, and gap uniformity, apply bonded adhesives, make all eyeglasses 14 be adhered to rear disc 12; And lens barrel 15 and middle studdle 13 are fixed by screw with rear disc 12;
Embodiment 1
The maximum outside diameter that the assembling & adjusting system of multilayer nest X ray grazing incidence optics camera lens of the present invention and method can debug eyeglass is 500mm, and minimum outer diameter is 40mm, debugs precision and is better than 0.1 μm, estimates 15 minutes/1 layer eyeglass of debuging speed.
The unspecified part of the present invention belongs to general knowledge as well known to those skilled in the art.

Claims (2)

1. an assembling & adjusting system for multilayer nest X ray grazing incidence optics camera lens, is characterized in that: comprise suspention subsystem, measurement subsystem, displacement subsystem, pre-installation bracing or strutting arrangement, optics support platform (10), focal plane receiving screen (6); Described suspention subsystem comprises suspension (1), suspension rope (2) and hanging hook (3), realizes the short distance transhipment of eyeglass (14) from storage platform to assembling & adjusting system; Described measurement subsystem comprises roundness measuring equipment (7), paraboloidal mirror (4) and pointolite (5), the face shape of real-time online measuring eyeglass (14), relative position and attitude; Described displacement subsystem comprises radial displacement regulating device and axial displacement regulating device, comprises 6DOF turntable (9) and drive motor (8);
Described suspention subsystem is positioned at the top of optics support platform (10), suspension (1) is disc-shaped structure, suspension rope (2) is distributed in suspension (1) circumferentially, and can radially move, to mate the eyeglass (14) of different-diameter, hanging hook (3) is positioned at the lower end of suspension rope (2), for hooking eyeglass (14);
The roundness measuring equipment (7) of described measurement subsystem is for measuring the circularity of eyeglass (14) near end, paraboloidal mirror (4) and pointolite (5) are positioned at the below of optics support platform (10), pointolite (5) is positioned at the focus place of paraboloidal mirror (4), produce the collimated visible light beam launched straight up, collimated visible light beam is after eyeglass (14) reflection, focus on focal plane receiving screen (6), by the shape of the upper focus of focal plane receiving screen (6), size and position, determine the face shape of eyeglass (14), relative position and attitude,
Described displacement subsystem, by disc (16) before radial and axial adjustment, realizes the adjustment of eyeglass (14) relative position and attitude;
Described pre-installation bracing or strutting arrangement is used for the eyeglass (14) suspended in midair to optics support platform (10) tentatively to support, described pre-installation bracing or strutting arrangement comprises support column (17), skirt (18), support bar (19) and sucker (20), wherein support column (17) is positioned in optics support platform (10), support column (17) upper end supports a skirt (18), skirt (18) vertically moves up and down along support column (17), skirt (18) inner periphery is radially uniformly distributed some support bars (19), the length of adjustment support bar (19) is to adapt to the eyeglass (14) of different-diameter, each support bar (19) end is furnished with a sucker (20), pre-installation bracing or strutting arrangement utilizes external valve to control vacuum tightness and the suction-combining force of sucker (20), eyeglass (14) outside surface is held, and move in the upper corresponding ring groove of front disc (16) straight down, in measuring process, keep the support to eyeglass (14), after bonding, remove pre-installation bracing or strutting arrangement,
Described optics support platform (10) is for supporting the eyeglass (14) of measurement subsystem, displacement subsystem, front disc (16) and subsequent installation.
2. utilize assembling & adjusting system described in claim 1 to carry out the method debug, it is characterized in that step is as follows:
1) prepare; Visual examination, surface testing and roughness measurement, cleaning are carried out to the eyeglass machined (14), guarantees that the precision of eyeglass (14) and cleanliness factor meet matching requirements; Finite element software is utilized to analyze eyeglass (14), obtain mounting points and point of suspension number, position and eyeglass (14) be out of shape between relation, determine best mounting points and point of suspension number and position, and beat suspension eye, for suspention in the point of suspension position of eyeglass (14) rear end; Front disc (16) and middle studdle (13) are fixed, and the two is fixed on the 6DOF turntable in optics support platform (10) simultaneously; Each layer eyeglass (14) debug order be from-inner-to-outer, namely first debug innermost layer eyeglass (14), outer layers eyeglass (14) is debug successively;
2) suspend in midair; By suspention subsystem, eyeglass (14) is suspended in midair, by suspention subsystem suspension hook (3) be placed in step 1) described in suspension eye in, by the load of the fine setting each suspension rope of suspension apparatus (2), eyeglass (14) face shape is revised, ensure the axis of eyeglass (14) vertically, and there is not distortion;
3) pre-installation; By pre-installation bracing or strutting arrangement, the eyeglass (14) that suspention subsystem is sling is converted into rigid body, detailed process is: move up and down skirt (18), the length of adjustment support bar (19), make sucker (20) haptic lens (14) outside surface just of support bar (19) end, external valve is utilized to control the suction-combining force of sucker (20), eyeglass outside surface is held, remove suspention subsystem, now eyeglass (14) is by the operating point rigid support of pre-installation bracing or strutting arrangement;
4) aim at; By moving down skirt (18) along support column (17), and utilize displacement subsystem, the position of the front disc (16) of adjustment and attitude, realize aiming between eyeglass (14) with the upper corresponding ring groove of front disc (16), ensure between eyeglass (14) with location ring groove coaxial, and the end of eyeglass (14) and annular groove bottom are fitted;
For innermost layer eyeglass: after realizing the aligning between innermost layer eyeglass with the upper corresponding ring groove of front disc (16), with glue by itself and front disc permanent adhesive, innermost layer eyeglass has been debug;
For other layer of eyeglass: after realizing the aligning between this layer of eyeglass with front disc (16) corresponding ring groove, enter step 5), and with step 5) measurement result be according to repeating this step, the relative position further between adjustment this layer of eyeglass and innermost layer eyeglass and attitude;
5) measure; Collimated visible light beam is utilized to measure the focal position of innermost layer eyeglass and pre-installation eyeglass, if the two misalignment, namely there is relative position and attitude misalignment, then focus can not overlap, measurement subsystem measures relative position and the attitude misalignment value of innermost layer eyeglass and pre-installation eyeglass, feeds back to displacement subsystem as adjustment amount; The circularity of pre-installation eyeglass front end measured by roundness measuring equipment (7), feeds back to displacement subsystem;
6) repeat step 4), step 5), until the position deviation of eyeglass (14), attitude misalignment and distortion are in permissible range;
7) bonding; Be in position in front disc (16) ring groove using eyeglass (14) end as adhesive spots, apply bonded adhesives in adhesive spots, by eyeglass (14) and front disc (16) permanent adhesive; Repeat step 2) ~ 7), until the equal permanent adhesive of all eyeglasses (14) is in front disc (16);
8) supporting construction is installed; By pre-installation bracing or strutting arrangement, cylindrical shape lens barrel (15) is moved to directly over eyeglass (14), and slowly move down, until close with front disc (16), by two register pins, lens barrel (15) and front disc (16) are aimed at, remove pre-installation bracing or strutting arrangement, lens barrel (15) and front disc (16) are fixed; By suspention subsystem, rear disc (12) is moved to directly over eyeglass (14), disc (16), lens barrel (15) and all eyeglasses (14) before fine setting, make the ring groove on disc (12) after eyeglass (14) back-end aligned, remove suspention subsystem, each layer eyeglass (14) is all embedded in ring groove, and gap uniformity, apply bonded adhesives, make all eyeglasses (14) be adhered to rear disc (12); And lens barrel (15) and middle studdle (13) are fixed with rear disc (12).
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CN108492906A (en) * 2018-04-28 2018-09-04 北京控制工程研究所 The unstressed regulating device of eyeglass and method of nested glancing incidence focusing optical lens
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CN113878537A (en) * 2021-10-13 2022-01-04 哈尔滨工业大学 Device for controlling and adjusting active force of multilayer nested X-ray focusing lens
CN113884023A (en) * 2021-10-13 2022-01-04 哈尔滨工业大学 High-precision detection device for inner wall of Wolteri type X-ray focusing lens
CN113917644A (en) * 2021-10-29 2022-01-11 中国科学院光电技术研究所 Lens six-degree-of-freedom micro-motion platform
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CN114779428A (en) * 2022-04-14 2022-07-22 北京理工大学 Suspension type precision adjustment device for pose of multilayer nested reflector
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CN116839506A (en) * 2023-09-01 2023-10-03 中国科学院长春光学精密机械与物理研究所 Surface shape detection method and system for grazing incidence type spliced plane mirror

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CN113878537A (en) * 2021-10-13 2022-01-04 哈尔滨工业大学 Device for controlling and adjusting active force of multilayer nested X-ray focusing lens
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