CN104835548A - Paraboloid type grazing incidence optical lens used for focusing of soft X rays - Google Patents

Paraboloid type grazing incidence optical lens used for focusing of soft X rays Download PDF

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Publication number
CN104835548A
CN104835548A CN201510119956.8A CN201510119956A CN104835548A CN 104835548 A CN104835548 A CN 104835548A CN 201510119956 A CN201510119956 A CN 201510119956A CN 104835548 A CN104835548 A CN 104835548A
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China
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diaphragm
lens barrel
parabola
lens
eyeglass
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CN201510119956.8A
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Chinese (zh)
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CN104835548B (en
Inventor
左福昌
梅志武
莫亚男
邓楼楼
李连升
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Beijing Institute of Control Engineering
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Beijing Institute of Control Engineering
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    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/067Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators using surface reflection, e.g. grazing incidence mirrors, gratings
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
    • G21K1/043Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers changing time structure of beams by mechanical means, e.g. choppers, spinning filter wheels

Abstract

The present invention puts forward a paraboloid type grazing incidence optical lens used for focusing of soft X rays, comprising a paraboloid lens, a diaphragm assembly, a lens barrel, a front baffle plate, a back baffle plate, a thermal control assembly, a front collimation ring assembly, a positioning pin, and a positioning pin clamping ring; wherein an iridium film is plated at the inner surface of the paraboloid lens; the end of the lens for receiving incident rays is defined as a front end; the diaphragm assembly comprises a front diaphragm, a middle diaphragm, a rear diaphragm, a support column and diaphragm pressing plates. An ultra-smooth inner paraboloid lens is used for performing grazing incidence reflection and focusing for X ray photons, the iridium film is plated at the inner surface of the paraboloid lens for improving reflectivity, three diaphragms are used for limiting field of view and reducing stray light, the front collimation ring assembly reduces heat loss, the thermal control assembly actively performs heating, the front collimation ring assembly and the thermal control assembly jointly provide a stable thermal environment to ensure stability of optical performance, the lens barrel supports the paraboloid lens and the diaphragm assembly, and provides an external interface and an interface for the front collimation ring assembly. The paraboloid type grazing incidence optical lens of the present invention has the advantages of simple structure, stray light interference resistance, easy realization, etc.

Description

A kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray
Technical field
The present invention relates to a kind of grazing incidence optics camera lens for realizing grenz ray focusing collector in space X X-ray detection X and X-ray pulsar navigation task, belonging to space optics technical field.
Background technology
X-ray pulsar navigation is applicable to the complete independent navigation of terrestrial space, survey of deep space and space flight spacecraft, can be most of space tasks spacecraft and the comprehensively navigation information such as position, speed, attitude and time is provided, realize the complete independent navigation of spacecraft, there is the advantages such as reliability is strong, good stability, accuracy are high, applicability is wide, it is an extremely potential novel autonomous navigation technology, be the splendid selection improving Spacecraft Autonomous Navigation system performance, there is extremely important engineering practical value and strategic research meaning.
The measuring accuracy of X-ray pulse time of arrival determines the precision of X-ray pulsar navigation, by design X-ray optical system, increases useful detection area, reduce ground unrest, improve the signal to noise ratio (S/N ratio) of ranging pulse profile, the measuring accuracy of pulse arrival time can be improved, thus ensure navigation accuracy.The X ray being applicable to pulsar navigation is grenz ray, and energy spectrum is generally 0.1-10keV, belongs to grenz ray, generally adopts grazing incidence optics system to carry out focusing collector to it.
Existing grenz ray grazing incidence optics system many employings Wolter-I type structure, by two secondary reflections, grenz ray is focused on focal plane, this structure is mainly applicable to the imaging of grenz ray target source, two secondary reflections reduce reflectivity, and between the catoptron of front and back, there is strict coupled relation, increase resetting difficulty.Another soft x-ray optics system is lobster eye structure, and the soft x-ray optics system visual field with this structure is comparatively large, and will introduce more ground unrest, be only applicable to X ray sky patrol, and structure is more complicated, resetting difficulty is large.
Summary of the invention
The technical matters that the present invention solves is: the above-mentioned deficiency overcoming prior art, a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray is provided, parabola eyeglass is utilized to reflect grenz ray, focused on focal plane, realize the collection of grenz ray photon, there is the advantages such as simple, the anti-interference of stray light of structure, easily realization.
Technical scheme of the present invention is: a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray, comprises parabola eyeglass, diaphragm component, lens barrel, front apron, backboard, thermal control assembly, front collimation ring assemblies, register pin, register pin trim ring; The inside surface plating iridium film of described parabola eyeglass; It is front end that definition camera lens receives incident light line end; Described diaphragm component comprises front stop, middle diaphragm, back stop, support column and diaphragm pressing plate, and front stop, middle diaphragm, back stop are furnished with two diaphragm pressing plates all separately, and diaphragm pressing plate is positioned at diaphragm both sides and diaphragm is compressed rear fixed installation on the support columns;
Front apron is installed on lens barrel front end by screw, provides the mounting interface of camera lens; Described lens barrel is tubular structure, and the front stop pressing plate of front stop and front apron fixedly mount; The excircle of the back stop pressing plate of back stop has groove, and the inner periphery of lens barrel rear end has groove, and the circumference being realized back stop pressing plate and lens barrel by register pin is located, and register pin trim ring is installed on lens barrel rear end, implements to compress to register pin; Parabola eyeglass is columnar structured, and outside surface is the face of cylinder, and inside surface is parabola, and the axis on the face of cylinder and paraboloidal axis coaxle; Parabola eyeglass front port footpath is large, and rear end bore is little, and end face is plane; Parabola eyeglass inner sleeve is inner in lens barrel; Backboard is installed on lens barrel rear end by screw, provides outside mounting interface, and the rear end face of back stop pressing plate and parabola eyeglass is fitted, and back stop pressing plate and backboard fixedly mount simultaneously, realize diaphragm component axial location; Middle diaphragm is positioned at the axial centre position of parabola eyeglass;
Front collimation ring assemblies comprises shell and interior panelling, and the main body of interior panelling is cylindrical structure, and cylindrical outer is evenly arranged three identical annular plates in the axial direction, each annular plate respectively has the endless groove allowing incident ray to pass through; Shell is cylindrical structure, and one end of one end and interior panelling is fixed, and the other end and lens barrel front end are fixed, and relative position between interior panelling and lens barrel is fixed;
Thermal control assembly comprises the coil and temperature sensor that are wound in lens barrel outside surface, and coil heats lens barrel, temperature sensor measurement temperature, and the temperature realizing lens barrel and parabola eyeglass controls.
Described paraboloidal mirror sheet material is devitrified glass, and the parabola roughness of parabola eyeglass need reach sub-nanometer scale, and is coated with the iridium film that thickness is not less than 20nm, and paraboloidal average slope angle is 0.5-1.5 °.
Described front stop, middle diaphragm, back stop are stereotype, and front stop pressing plate, diaphragm pressing plate, back stop pressing plate are aluminium sheet.
Described lens barrel adopts indium steel or carbon fibre material.
Before described, the shell of collimation ring assemblies adopts titanium alloy material, carries out surface treatment, make the thermal emissivity of interior panelling lower than 0.03 to interior panelling.
The present invention's advantage is compared with prior art:
(1) a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray of innovative design of the present invention, the parabola eyeglass utilizing inside surface roughness to reach sub-nanometer scale carries out glancing incidence reflect focalization to x-ray photon, and iridium (Ir) film of 20nm is not less than at the inside surface plating thickness of parabola eyeglass, to improve reflectivity, adopt three diaphragm restriction visual fields, abatement parasitic light, front collimation ring assemblies reduces thermal loss, thermal control assembly active heated, the two provides stable thermal environment jointly, ensure the stable of optical property, lens barrel is that parabola eyeglass and diaphragm provide support, and external interface is provided.Product has the advantages such as simple, the anti-interference of stray light of structure, easily realization;
(2) the present invention creatively adopts the parabolic shape grazing incidence optics camera lens being different from x-ray imaging optical system, and the individual reflection realizing X ray focuses on, and compensate for the deficiency that in twice reflecting system, reflectivity is lower.In existing twice reflective optics, there is strict coupled relation between former and later two catoptrons, resetting difficulty is very big, and the parabolic shape grazing incidence optics camera lens that the present invention proposes can reduce resetting difficulty greatly, has very strong realizability;
(3) thermal control assembly of the present invention and front collimation ring assemblies implement accurate thermal control respectively by active mode and passive mode to camera lens, and the matched coefficients of thermal expansion of lens barrel material and paraboloidal mirror sheet material, the thermograde between lens barrel and parabola eyeglass can be reduced, reduce thermal deformation and thermal stress, greatly improve the long-time stability of lens optical performance;
(4) diaphragm component of the present invention adopts stereotype and aluminium sheet array mode, can stop parasitic light, have high strength again, strictly limit visual field, make camera lens have high s/n ratio;
(5) the invention solves a focusing collector difficult problem for grenz ray, the useful area of X-ray detection system can be improved, reduce ground unrest, increase signal to noise ratio (S/N ratio), have very strong realizability and practicality, existing manufacturing technology level can realize it completely.Along with grenz ray is in the widespread use of every field, the parabolic shape grazing incidence optics camera lens that the present invention proposes can be applicable to ground X-ray detecting devices, space X X-ray detection X spacecraft, and X-ray pulsar navigation sensor etc.
Accompanying drawing explanation
Figure 1A is the schematic diagram of parabolic shape grazing incidence optics camera lens of the present invention;
Figure 1B is the cut-open view of parabolic shape grazing incidence optics camera lens of the present invention;
Fig. 2 A is parabolic shape grazing incidence optics camera lens diaphragm component cut-open view of the present invention;
Fig. 2 B is parabolic shape grazing incidence optics camera lens diaphragm component schematic diagram of the present invention;
Fig. 3 is that parabolic shape grazing incidence optics lens barrel and diaphragm component circumference locate schematic diagram;
Fig. 4 is collimation ring assemblies cut-open view before parabolic shape grazing incidence optics camera lens of the present invention;
Fig. 5 A is parabolic shape grazing incidence optics camera lens parabola eyeglass cut-open view of the present invention;
Fig. 5 B is parabolic shape grazing incidence optics camera lens parabola eyeglass cut-open view of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail:
As shown in Figure 1A and Figure 1B, the present invention proposes a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray, comprises parabola eyeglass 13, diaphragm component, lens barrel 1, front apron 7, backboard 16, thermal control assembly 3, front collimation ring assemblies, register pin 20, register pin trim ring 15.It is front end that definition camera lens receives incident light line end;
As shown in Fig. 2 A and Fig. 2 B, front stop 10, middle diaphragm 14, back stop 18, diaphragm pressing plate 11, front stop pressing plate 9, back stop pressing plate 17, support column 12 form relatively independent diaphragm component, and front stop 10, middle diaphragm 14 and back stop 18 play the effect of restriction visual field; Front stop pressing plate 9 and the front apron 7 of front stop 10 fixedly mount;
As shown in Figure 1B and Fig. 3, the excircle of the back stop pressing plate 17 of back stop 18 has groove a, B, and the inner periphery of lens barrel 1 has groove, realizes back stop pressing plate 17 locate with the circumference of lens barrel 1 by register pin 20, register pin trim ring 15 is installed on lens barrel 1 rear end, implements to compress to register pin 20; Backboard 16 is installed on lens barrel 1 rear end by screw, provides outside mounting interface, and back stop pressing plate 17 is fitted with the rear end face of parabola eyeglass 13, and back stop pressing plate 17 and backboard 16 fixedly mount simultaneously, realize diaphragm component axial location; Middle diaphragm 14 is positioned at the axial centre position of parabola eyeglass 13;
As shown in Figure 4, front collimation ring assemblies comprises shell 2 and interior panelling 8, for reducing the visual field of whole camera lens to cold space, thus reduction thermal loss, the main body of interior panelling 8 is cylindrical structure, cylindrical outer is evenly arranged three identical annular plates in the axial direction, each annular plate respectively has the endless groove allowing incident ray to pass through; Shell 2 is cylindrical structure, and one end of one end and interior panelling 8 is fixed, and the other end and lens barrel 1 front end are fixed, and determines that between interior panelling 8 and lens barrel 1, relative position is fixed;
As shown in Figure 1A, thermal control assembly 3 comprises the coil and temperature sensor that are wound in lens barrel 1 outside surface, and coil heats thermal control assembly 3, temperature sensor measurement temperature, the temperature realizing lens barrel 1 and parabola eyeglass 13 controls, and with the low temperature environment of meeting spatial, ensures the stability of optical property.
As fig. 5 a and fig. 5b, parabola eyeglass 13 for the parabolic shape grazing incidence optics camera lens of grenz ray focusing is columnar structured, inside surface is paraboloidal eyeglass, paraboloidal roughness need reach sub-nanometer scale, and be coated with iridium (Ir) film that thickness is not less than 20nm, realize the high reflectance of x-ray photon, paraboloidal average slope angle is 0.5-1.5 °, the outside surface of parabola eyeglass 13 is the face of cylinder, the axis on the face of cylinder and interior paraboloidal axis coaxle, so that debug, parabola eyeglass 13 front end bore is large, rear end bore is little, and two end faces are plane, as locating surface when debuging.
As shown in Figure 2 A and 2 B, the diaphragm component of parabolic shape grazing incidence optics camera lens focused on for grenz ray is by front stop 10, middle diaphragm 14, back stop 18, support column 12 and diaphragm pressing plate 11, front stop pressing plate 9, back stop pressing plate 17, front stop 10, middle diaphragm 14, back stop 18 is furnished with two diaphragm pressing plates 11 all separately, diaphragm pressing plate 11 is positioned at diaphragm both sides and will is fixedly mounted on support column 12 after diaphragm compression, front stop 10, middle diaphragm 14, back stop 18 all adopts lead material, play a part to limit visual field, plumbous have good barrier effect to X ray and high energy particle, in view of lead material hardness, intensity is low, diaphragm pressing plate 11, front stop pressing plate 9, back stop pressing plate 17 all adopts aluminum, and there is reinforcement, to improve mechanical environment adaptability.
As shown in FIG. 1A and 1B, the front apron 7 of parabolic shape grazing incidence optics camera lens focused on for grenz ray is fixed on the front end of lens barrel 1 by screw, provide outside mounting interface, and front apron 7 and diaphragm component are fixed, and realize the location of diaphragm component.
As shown in FIG. 1A and 1B, the backboard 16 of parabolic shape grazing incidence optics camera lens focused on for grenz ray is fixed on the rear end of lens barrel 1 by screw, implement to compress to back stop pressing plate 17 and register pin trim ring 15.
As shown in Figure 1B, the register pin trim ring 15 of parabolic shape grazing incidence optics camera lens focused on for grenz ray is fixed on the rear end of lens barrel 1 by screw, implement to compress to register pin 20.
As shown in FIG. 1A and 1B, lens barrel for the parabolic shape grazing incidence optics camera lens of grenz ray focusing is tubular structure, parabola eyeglass 13, diaphragm component, thermal control assembly 3, front collimation ring assemblies are provided to location, support and fix, there is provided external interface simultaneously, for being connected with the system of application parabolic shape grazing incidence optics camera lens of the present invention, lens barrel adopts indium steel or carbon fibre material, to mate the microcrystal glass material of parabola eyeglass 13.
As shown in Figure 1A, thermal control assembly 3 for the parabolic shape grazing incidence optics camera lens of grenz ray focusing comprises coil and temperature sensor, be installed on lens barrel 1 outside, the temperature realizing lens barrel 1 and parabola eyeglass 13 accurately controls, reduce thermal gradient, reduce thermal deformation and thermal stress, ensure lens optical stability.
As shown in Figure 1A, Figure 1B and Fig. 4, the front end that ring assemblies is positioned at whole camera lens is collimated for before the parabolic shape grazing incidence optics camera lens that grenz ray focuses on, comprise shell 2 and interior panelling 8, the main body of interior panelling 8 is cylindrical structure, cylindrical outer is evenly arranged three identical annular plates in the axial direction, each annular plate respectively has the endless groove allowing incident ray to pass through; Shell 2 is columnar structured, one end of one end and interior panelling 8 is fixed, the other end and lens barrel 1 front end are fixed, to determine that the relative position between interior panelling 8 and lens barrel 1 is fixed, the shell 2 of front collimation ring assemblies adopts titanium alloy material, carries out surface treatment to interior panelling 8, make the thermal emissivity of interior panelling 8 lower than 0.03, for reducing the visual field of whole camera lens to cold space, thus making thermal loss minimum, coordinating thermal control assembly simultaneously for whole camera lens provides stable thermal environment.
Embodiment 1
In parabolic shape grazing incidence optics lens bodies structure of the present invention, the average grazing angle of parabola eyeglass 13 is 1.25 °, and eyeglass length is 140mm, visual field is ± and 7.5 ', focal length 1200mm, front end bore 101mm, rear end bore 94.9mm, Ir film thickness is 20nm.
The content be not described in detail in instructions of the present invention belongs to the known technology of those skilled in the art.

Claims (5)

1., for the parabolic shape grazing incidence optics camera lens that grenz ray focuses on, it is characterized in that: comprise parabola eyeglass (13), diaphragm component, lens barrel (1), front apron (7), backboard (16), thermal control assembly (3), front collimation ring assemblies, register pin (20), register pin trim ring (15); The inside surface plating iridium film of described parabola eyeglass (13); It is front end that definition camera lens receives incident light line end; Described diaphragm component comprises front stop (10), middle diaphragm (14), back stop (18), support column (12) and diaphragm pressing plate (11), front stop (10), middle diaphragm (14), back stop (18) are furnished with two diaphragm pressing plates (11) all separately, and diaphragm pressing plate (11) is positioned at diaphragm both sides and will is fixedly mounted on support column (12) after diaphragm compression;
Front apron (7) is installed on lens barrel (1) front end by screw, provides the mounting interface of camera lens; Described lens barrel (1) is tubular structure, and front stop pressing plate (9) and the front apron (7) of front stop (10) fixedly mount; The excircle of the back stop pressing plate (17) of back stop (18) has groove, the inner periphery of lens barrel (1) rear end has groove, realize back stop pressing plate (17) by register pin (20) to locate with the circumference of lens barrel (1), register pin trim ring (15) is installed on lens barrel (1) rear end, implements to compress to register pin (20); Parabola eyeglass (13) is for columnar structured, and outside surface is the face of cylinder, and inside surface is parabola, and the axis on the face of cylinder and paraboloidal axis coaxle; Parabola eyeglass (13) front end bore is large, and rear end bore is little, and end face is plane; Lens barrel (1) is placed on inner in parabola eyeglass (13); Backboard (16) is installed on lens barrel (1) rear end by screw, outside mounting interface is provided, back stop pressing plate (17) is fitted with the rear end face of parabola eyeglass (13), back stop pressing plate (17) and backboard (16) fixedly mount simultaneously, realize diaphragm component axial location; Middle diaphragm (14) is positioned at the axial centre position of parabola eyeglass (13);
Front collimation ring assemblies comprises shell (2) and interior panelling (8), the main body of interior panelling (8) is cylindrical structure, cylindrical outer is evenly arranged three identical annular plates in the axial direction, each annular plate respectively has the endless groove allowing incident ray to pass through; Shell (2) is cylindrical structure, and one end of one end and interior panelling (8) is fixed, and the other end and lens barrel (1) front end are fixed, and relative position between interior panelling (8) and lens barrel (1) is fixed;
Thermal control assembly (3) comprises the coil and temperature sensor that are wound in lens barrel (1) outside surface, coil heats lens barrel (1), temperature sensor measurement temperature, the temperature realizing lens barrel (1) and parabola eyeglass (13) controls.
2. a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray according to claim 1, it is characterized in that: described parabola eyeglass (13) material is devitrified glass, the parabola roughness of parabola eyeglass (13) need reach sub-nanometer scale, and being coated with the iridium film that thickness is not less than 20nm, paraboloidal average slope angle is 0.5-1.5 °.
3. a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray according to claim 1, it is characterized in that: described front stop (10), middle diaphragm (14), back stop (18) are stereotype, front stop pressing plate (9), diaphragm pressing plate (11), back stop pressing plate (17) are aluminium sheet.
4. a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray according to claim 1, is characterized in that: described lens barrel (1) adopts indium steel or carbon fibre material.
5. a kind of parabolic shape grazing incidence optics camera lens focused on for grenz ray according to claim 1, it is characterized in that: before described, the shell (2) of collimation ring assemblies adopts titanium alloy material, surface treatment is carried out to interior panelling (8), makes the thermal emissivity of interior panelling (8) lower than 0.03.
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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN105093484A (en) * 2015-08-27 2015-11-25 北京控制工程研究所 Multilayer nested conical surface type X-ray grazing incidence optical lens
CN106569521A (en) * 2016-11-04 2017-04-19 北京控制工程研究所 Precision temperature control device for X-ray pulsar navigation sensor
CN106569254A (en) * 2016-11-04 2017-04-19 北京控制工程研究所 X-ray grazing incidence lens long-distance light source alignment device and alignment method thereof
CN108492906A (en) * 2018-04-28 2018-09-04 北京控制工程研究所 The unstressed regulating device of eyeglass and method of nested glancing incidence focusing optical lens
CN112635095A (en) * 2020-12-09 2021-04-09 中国科学院上海应用物理研究所 Dynamic bending adjusting device and dynamic stable micron focusing system
CN116149053A (en) * 2023-03-16 2023-05-23 哈尔滨工业大学 Method for simultaneously realizing single-point focusing and wave front segmentation of extreme ultraviolet band light

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105093484A (en) * 2015-08-27 2015-11-25 北京控制工程研究所 Multilayer nested conical surface type X-ray grazing incidence optical lens
CN105093484B (en) * 2015-08-27 2017-12-22 北京控制工程研究所 A kind of multilayer nest circular conical surface type X ray grazing incidence optics camera lens
CN106569521A (en) * 2016-11-04 2017-04-19 北京控制工程研究所 Precision temperature control device for X-ray pulsar navigation sensor
CN106569254A (en) * 2016-11-04 2017-04-19 北京控制工程研究所 X-ray grazing incidence lens long-distance light source alignment device and alignment method thereof
CN106569254B (en) * 2016-11-04 2018-10-09 北京控制工程研究所 A kind of X-ray glancing incidence camera lens remote light source alignment device and its alignment methods
CN106569521B (en) * 2016-11-04 2018-12-21 北京控制工程研究所 A kind of precise temperature control device for X-ray pulsar navigation sensor
CN108492906A (en) * 2018-04-28 2018-09-04 北京控制工程研究所 The unstressed regulating device of eyeglass and method of nested glancing incidence focusing optical lens
CN112635095A (en) * 2020-12-09 2021-04-09 中国科学院上海应用物理研究所 Dynamic bending adjusting device and dynamic stable micron focusing system
CN112635095B (en) * 2020-12-09 2022-07-19 中国科学院上海应用物理研究所 Dynamic bending adjusting device and dynamic stable micron focusing system
CN116149053A (en) * 2023-03-16 2023-05-23 哈尔滨工业大学 Method for simultaneously realizing single-point focusing and wave front segmentation of extreme ultraviolet band light

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