CN208351001U - Laser three-dimensional imaging system with real-time wavefront compensation function - Google Patents

Laser three-dimensional imaging system with real-time wavefront compensation function Download PDF

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CN208351001U
CN208351001U CN201820938502.2U CN201820938502U CN208351001U CN 208351001 U CN208351001 U CN 208351001U CN 201820938502 U CN201820938502 U CN 201820938502U CN 208351001 U CN208351001 U CN 208351001U
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mirror
imaging system
plane
deformation
telescope
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王欣
刘强
黄庚华
舒嵘
何志平
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Shanghai Institute of Technical Physics of CAS
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Shanghai Institute of Technical Physics of CAS
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Abstract

本专利公开了具有实时波前补偿功能的激光三维成像系统,设计了一种具有渐变厚度的平面变形镜,工作于大口径高分辨率激光三维接收望远镜成像系统中;变形镜采用单点驱动方式,通过中心固定和边缘加力,镜面面形发生均匀曲率变化和正交方向不同变化,从而实现对波前球差和像散等多项像差的补偿;望远镜波像差校正采用闭环控制,波前信息用哈特曼传感器进行采集,进而实现实时补偿。本专利解决了大口径望远镜采用传统焦前平面镜调焦方式仅能补偿重力或温度变形引起离焦和较小范围像差变化的问题。采用本专利的渐变厚度平面变形镜,通过主动改正镜面面形,可以补偿多类低高阶像差,放宽了结构设计和热控要求,降低了大口径望远镜成像系统的研制难度。

This patent discloses a laser three-dimensional imaging system with real-time wavefront compensation function, and designs a plane deformation mirror with gradual thickness, which works in the imaging system of a large-diameter high-resolution laser three-dimensional receiving telescope; the deformation mirror adopts a single-point driving method , through the center fixation and edge force, the mirror surface has a uniform curvature change and different orthogonal directions, so as to achieve compensation for multiple aberrations such as wavefront spherical aberration and astigmatism; the telescope wave aberration correction adopts closed-loop control, The wavefront information is collected with a Hartmann sensor, which enables real-time compensation. This patent solves the problem that large-diameter telescopes can only compensate for defocusing and small-scale aberration changes caused by gravity or temperature deformation by using the traditional front-focus plane mirror focusing method. Using the patented gradient thickness plane deformable mirror, by actively correcting the mirror surface shape, it can compensate for many types of low and high-order aberrations, relax the structural design and thermal control requirements, and reduce the difficulty of developing a large-diameter telescope imaging system.

Description

Laser three-dimensional imaging system with real-time wavefront compensation function
Technical field
This patent is related to the aberration active compensation techniques, in particular to one kind of satellite borne laser three-dimensional imaging receiving optics Large aperture telescope is compensated since gravity or thermal deformation cause the scheme form of multinomial aberration using progressive thickness plane deformation mirror.
Background technique
Laser three-dimensional imaging radar is a kind of for accurately and fast obtaining the master on ground and ground target three-dimensional spatial information Dynamic formula the radar exploration technique system is round-the-clock sensor, small with being interfered by earth background, sky background, and has Gao Ding The advantages that position precision and highly sensitive, laser pulse are not influenced vulnerable to shade and sun angle, adopts to substantially increase data The quality of collection.These features enable it to meet the scouting of High-precision high-frequency degree quick environment, the especially hidden mesh of military target monitoring Mark the application requirement of detection.
In terms of the development trend of domestic and international space camera, laser terrain following radar MOLA, GLAS of the transmitting of the states such as America and Europe etc. exist Technique preparation is done in terms of heavy caliber and high-resolution.In order to realize ground imaging resolution better than 4m, altimetry precision better than 0.5m The development of spaceborne three-dimensional laser imaging radar, Image-forming instrument include operating temperature range and crucial mirror temperature to thermal control technology The requirement of the indexs such as gradient is very strict, challenges for existing thermal control technology very big.It is defended simultaneously for microminiature For star, volume, weight and power consumption have stringent limitation, and the permission weight for distributing to heat control system is extremely limited, this is wanted It asks and substantially increases the difficulty of thermal control design.Equally, heavy caliber three-dimensional radar after transmitting track operation during, due to ground Different from the environment of space, mirror surface must endure as the release deformation of gravity caused by in-orbit microgravity environment, and this deformation can only be Ground applies stress and carrys out stimulated microgravity, but simulated conditions have differences with truth, lead to instrument in orbit Imaging characteristics are inconsistent with ground tests.
Current Airborne Lidar examining system in order to solve these problems, be using passively inhibit error source method come Realize the imaging of high quality.The method that plane turning mirror is focused is inserted into generally in radar optical path to become to reduce mirror temperature Influence of the shape to optical system picture element.This method can only solve the problems, such as defocus, spherical aberration, intelligent caused by deforming to mirror temperature The higher order aberratons such as difference, astigmatism then seem helpless.Control the error that different error sources generate need using different technology and Method, and interact and compromise and error is maintained to certain level with optical design, structure design.Radar is in orbit When, other than focus adjusting mechanism can compensate for certain defocus and spherical aberration, these passively technology and methods to being likely to occur Other aberration compensation effects are unobvious.From the perspective of optical system imaging, error caused by power, thermal environment factor is finally all The wave front aberration of optical system is shown as, high-order spherical aberration, coma and astigmatism etc. can be generated.Therefore, active deformation mirror technology is from control Error source processed is set out, and directly can be inhibited and be compensated for imaging wave front aberration.It is adopted in laser three-dimensional imaging radar It is enhancing space camera to power, the adaptability of thermal environment with active deformation mirror technology, simplifies camera structure, reduce camera power consumption and mention New method is supplied, also the space camera for more heavy caliber, more long-focus provides technological approaches.
Summary of the invention
In conclusion how active deformation mirror technology to be combined with large aperture telescope to solve space environment adaptability The problem of, a kind of new technological means is provided for Study of Laser three-dimensional imaging radar.For this purpose, the purpose of this patent is to provide one kind Plane deformation mirror technology based on progressive thickness.
This patent be the laser three-dimensional imaging system with real-time wavefront compensation function, including telescope imaging system 1, point Beam mirror 2, Hartmann sensor 3, plane deformation mirror 4 and imaging CCD camera 5.
400-800nm wavelength imaging beam and 1064nm wavelength detecting light beam from atural object pass through telescope imaging respectively System 1 converges to beam splitter 2,1064nm wavelength detecting light beam after the transmission of beam splitter 2 on Hartmann sensor 3, Hartmann The 1 wavefront distortion information of telescope imaging system in detection light beam is analyzed and obtained to sensor 3, and wavefront distortion result is fed back to The control system of plane deformation mirror 4 produces plane deformation mirror 4 by the piezoelectricity PZT sensor of control system driving plane deformation mirror 4 Raw surface deformation carrys out the wavefront distortion of real-time correction telescope imaging system 1;The atural object imaging beam of 400-800nm wavelength simultaneously Plane deformation mirror 4 is reflexed to by beam splitter 2, image deformation wavefront is imaged onto imaging CCD camera after the compensation of plane deformation mirror 4 On 5.
The telescope imaging system 1 is a Cassegrain telescope, is formed by two-mirror reflection is aspherical, face shape is equal For quadratic surface.
The beam splitter 2 is a quartz material optical filter, by system wave front acquisition wavelength 1064nm and imaging wavelength Both 400-900nm are separated.
The plane deformation mirror 4 is a plane aluminium reflector, at before telescopic system focal plane 50 to 100mm, Mirror surface bore 100mm has progressive thickness t variation as follows with half bore x relationship: T=8.09514+0.24526x- 0.04266x2+0.00174x3-2.90602E-5x4+1.73128E-7x5.Plane deformation mirror 4 is driven using piezoelectricity PZT sensor Surface deformation is generated, there is attaching clamp in plane deformation mirror central area, and mirror edges circumferential plane is that sensor reinforces region, pressure Electric PZT sensor generates displacement and then causes to deform to mirror edges.It is right according to the wavefront variation that Hartmann sensor 3 measures Wavefront carries out data processing, obtains spherical aberration, coma and astigmatism data;According to this data, controls 4 face shape of plane deformation mirror and reversely produce Raw aberration, to realize the compensation to telescope imaging system spherical aberration, coma and astigmatism wavefront distortion.
The plane deformation mirror in heavy caliber high-resolution laser three-dimensional imaging radar optical path is worked according to this patent, will be passed System focusing lens are modified to active deformation mirror, it will be apparent that improve the ability of system balance aberration.The advantages of this patent system, is as follows:
1. applying in heavy caliber high-resolution laser three-dimensional imaging radar, receiving telescope primary mirror bore is greater than 500mm, imaging instantaneous field of view are better than 5 μ rad.
2. the thickness of active deformation mirror is gradual change form with bore variation, this form makes shape behind mirror surface flexible deformation It is small to generate high-order residual error, residual error is only 10E-6mm when plane aperture of mirror is 100mm, overcomes uniform thickness mirror surface and generates high-order picture Difference influences the problem of optical system imaging quality.
3. active deformation mirror can generate the Curvature varying or astigmatism of needs using single-point drive scheme, drive scheme is simple It is easy.
4. active deformation mirror can compensate the spherical aberration or astigmatism variation of low order or high-order, it is suitable for space environment gravity deformation With the correction of temperature deformation.
Detailed description of the invention
Fig. 1 is index path of the plane deformation mirror in laser three-dimensional imaging radar telescope;Wherein: 1- telescope imaging system CCD camera is imaged in system, 2- beam splitter, 3- Hartmann sensor, 4- plane deformation mirror, 5-.
Specific embodiment
The main technical characteristics of laser three-dimensional imaging system and compensation method with real-time wavefront compensation function are as follows:
1. telescope imaging system: primary mirror bore 500mm, 5 μ rad of imaging space resolution ratio.
2. plane deformation mirror: bore 100mm has progressive thickness curve, can compensate for spherical aberration, coma and the astigmatism of system, Residual aberration is less than 10E-6mm.Planar thickness t variation is T=8.09514+0.24526x-0.04266x with half bore x relationship2 +0.00174x3-2.90602E-5x4+1.73128E-7x5
3. plane deformation mirror drive: reinforcing mode using center built-in edge, when driving moment is 200N, generate Spherical aberration, surface deformation amount are 1.15mm;When vertical mirror surface both direction reinforces 105N and 5N respectively, astigmatism is generated, astigmatism becomes Shape amount is 0.55mm.
4. system uses closed-loop measuring and control mode, the wave of telescope imaging system is first measured by Hartmann sensor Preceding variation, then plane deformation mirror is driven to generate opposite aberration, to realize aberration compensation.
5. Hartmann sensor unit contains information collection and data processing module, before advanced traveling wave after information collection, then The aberration of wavefront is obtained by processing module as a result, providing foundation for aberration correction.

Claims (3)

1.一种具有实时波前补偿功能的激光三维成像系统,包括望远镜成像系统(1)、分束镜(2)、哈特曼传感器(3)、平面变形镜(4)和成像CCD相机(5),其特征在于:1. A laser three-dimensional imaging system with real-time wavefront compensation function, comprising a telescope imaging system (1), a beam splitter (2), a Hartmann sensor (3), a plane deformable mirror (4) and an imaging CCD camera ( 5), it is characterized in that: 来自地物的400-800nm波长成像光束和1064nm波长检测光束分别经过望远镜成像系统(1)汇聚到分束镜(2),1064nm波长检测光束经分束镜(2)透射后到哈特曼传感器(3)上,哈特曼传感器(3)分析并获取检测光束中的望远镜成像系统(1)波前畸变信息,将波前变形结果反馈给平面变形镜(4)的控制系统,由控制系统驱动平面变形镜(4)的压电PZT传感器使平面变形镜(4)产生镜面变形来实时改正望远镜成像系统(1)的波前畸变;同时400-800nm波长的地物成像光束由分束镜(2)反射至平面变形镜(4),其成像畸变波前经平面变形镜(4)补偿后成像到成像CCD相机(5)上。The 400-800nm wavelength imaging beam and the 1064nm wavelength detection beam from the ground objects are respectively converged by the telescope imaging system (1) to the beam splitter (2), and the 1064nm wavelength detection beam is transmitted through the beam splitter (2) to the Hartmann sensor On (3), the Hartmann sensor (3) analyzes and obtains the wavefront distortion information of the telescope imaging system (1) in the detection beam, and feeds back the wavefront deformation result to the control system of the plane deformable mirror (4), which is controlled by the control system. The piezoelectric PZT sensor that drives the plane deformation mirror (4) causes the plane deformation mirror (4) to produce mirror surface deformation to correct the wavefront distortion of the telescope imaging system (1) in real time; at the same time, the 400-800nm wavelength ground object imaging beam is generated by the beam splitter (2) Reflected to the plane deformation mirror (4), and the imaging distortion wavefront is imaged on the imaging CCD camera (5) after being compensated by the plane deformation mirror (4). 2.根据权利要求1所述的具有实时波前补偿功能的激光三维成像系统,其特征在于:所述的望远镜成像系统(1)为卡塞格林望远镜。2 . The laser three-dimensional imaging system with real-time wavefront compensation function according to claim 1 , wherein the telescope imaging system ( 1 ) is a Cassegrain telescope. 3 . 3.根据权利要求1所述的具有实时波前补偿功能的激光三维成像系统,其特征在于:所述的平面变形镜(4)为一个平面铝反射镜,具有渐变厚度,渐变厚度t变化随口径位置变化;平面变形镜(4)采用压电PZT传感器驱动产生镜面变形,平面变形镜中心区域有固定凸耳,镜面边缘圆周平面为传感器加力区域,压电PZT传感器产生位移继而对镜面边缘造成变形。3. The laser three-dimensional imaging system with real-time wavefront compensation function according to claim 1, characterized in that: the plane deformable mirror (4) is a plane aluminum mirror with a gradient thickness, and the gradient thickness t changes with The aperture position changes; the plane deformation mirror (4) is driven by a piezoelectric PZT sensor to generate mirror surface deformation. There are fixed lugs in the center area of the plane deformation mirror, and the circumferential plane of the mirror edge is the sensor forcing area. cause deformation.
CN201820938502.2U 2018-06-19 2018-06-19 Laser three-dimensional imaging system with real-time wavefront compensation function Active CN208351001U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108983257A (en) * 2018-06-19 2018-12-11 中国科学院上海技术物理研究所 A kind of laser three-dimensional imaging system with real-time wavefront compensation function
CN114035310A (en) * 2021-11-23 2022-02-11 四川中科朗星光电科技有限公司 A hyperboloid secondary mirror using free-form surface instead of RC optical system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108983257A (en) * 2018-06-19 2018-12-11 中国科学院上海技术物理研究所 A kind of laser three-dimensional imaging system with real-time wavefront compensation function
CN114035310A (en) * 2021-11-23 2022-02-11 四川中科朗星光电科技有限公司 A hyperboloid secondary mirror using free-form surface instead of RC optical system

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