CN113358569A - Online positioning and measuring device for sample surface position and drift monitoring method thereof - Google Patents
Online positioning and measuring device for sample surface position and drift monitoring method thereof Download PDFInfo
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- CN113358569A CN113358569A CN202110605782.1A CN202110605782A CN113358569A CN 113358569 A CN113358569 A CN 113358569A CN 202110605782 A CN202110605782 A CN 202110605782A CN 113358569 A CN113358569 A CN 113358569A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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Abstract
The present disclosure provides an online positioning and measuring device for a sample surface position, comprising: the positioning system is used for carrying out online positioning on the surface of a sample to be detected and keeping the surface of the sample at the position of a reference surface; and the measuring system is used for measuring the sample at the position of the reference surface to complete the online positioning measurement of the surface position of the sample. The positioning of the surface of the sample to the position of the reference surface of the system can be completed on line; the method can assist in detecting the drift problem of the system by means of online rapid adjustment of the surface position of the sample after the system drifts, and can judge whether the measurement system needs to be recalibrated and calibrated. The disclosure also provides a drift monitoring method of the sample surface position online positioning and measuring device.
Description
Technical Field
The disclosure relates to the field of optical technologies, and in particular relates to an online positioning and measuring device for a sample surface position and a drift detection method thereof.
Background
The optical principle is used for high-precision position measurement or defect detection, and the like, and the precision level can reach the nanometer level, such as a height measurement system, a semiconductor exposure optical system, a microscopic imaging optical system and the like. . In a high-precision measurement/imaging optical system, the measurement range or focal depth (hereinafter collectively referred to as "d") of the optical system is generally small, and it is difficult to directly place the sample surface within the measurement range or focal depth of the optical system. Meanwhile, under the influence of ambient temperature, vibration, noise and the like, the drift of the precision optical system can also occur, and if the drift exceeds a certain magnitude, the system performance can be obviously reduced. The system drift may be drift inside the optical system, or may be drift in the position of the sample surface, and the drift inside the system usually requires recalibration and calibration of the system, which is generally complicated. However, in the actual operation process, it is difficult to directly judge whether the drift mainly occurs inside the optical system or at the sample position, and the direction and magnitude of the drift are not easy to determine.
For high precision measurement/imaging optical systems, it is generally first necessary to provide a standard reference surface with a tool to perform calibration and calibration of the optical system. In the prior art, high-precision assembly and adjustment of the tool are generally finished off line by using high-precision testing equipment. When the optical system is calibrated and then other samples are tested, the problem that the surface of the sample is difficult to directly place on an optimal measurement/imaging surface (namely a standard reference surface) is also faced, an off-line adjustment mode is usually adopted, and the surface of the test sample is installed in the optical system after being adjusted with high precision. The problem of system drift is difficult to analyze and judge in the experimental process. In the prior art, the surface of a test sample can be accurately positioned by adopting a high-precision displacement table and interferometer closed-loop control. However, the high-precision displacement table and the interferometer have complicated structures, high manufacturing cost and harsh use conditions, and are not suitable for being used in the experiment and debugging process.
Disclosure of Invention
Technical problem to be solved
Based on the above problems, the present disclosure provides an online positioning and measuring device for a sample surface position and a drift detection method thereof, so as to alleviate technical problems of offline adjustment and the like in the prior art.
(II) technical scheme
The present disclosure provides an online positioning and measuring device for a sample surface position, comprising:
the positioning system is used for carrying out online positioning on the sample surface of a sample to be detected and keeping the sample surface at a reference surface position; and
and the measuring system is used for measuring the sample surface at the reference surface position, and the online positioning measurement of the sample surface position of the sample surface is completed.
In an embodiment of the present disclosure, the positioning system includes:
the three-dimensional adjusting mechanism is used for adjusting the position of the surface of the sample and comprises a sample table for bearing the sample;
a metrology mechanism for positional measurement of the sample surface, the metrology mechanism comprising:
a support frame; and
the displacement sensor group is fixed on the supporting frame through a displacement sensor fixing structure, can detect the surface of the sample at a set reference surface position to obtain standard position data, and can also monitor the position of the surface of the sample to obtain monitoring position data;
and the three-dimensional adjusting mechanism adjusts the position of the surface of the sample to the position of the reference surface according to the monitoring position data, so that the online positioning of the sample is completed.
In an embodiment of the present disclosure, the three-dimensional adjustment mechanism further includes:
a substrate; and
the adjusting plate is connected to the base plate through a precision adjusting screw; the precision adjusting screw is used for adjusting the surface of the sample to a reference surface position.
In the disclosed embodiment, the precision adjusting screw has a locking structure.
In an embodiment of the present disclosure, the displacement sensor group includes: the displacement sensors are not on the same straight line, and each displacement sensor can respectively acquire a distance relative to the surface of the sample, so that the position data of the plane where the surface of the sample is located can be determined.
In the embodiment of the disclosure, the optical measurement system is one of a height measurement system, a semiconductor exposure optical system and a microscopic imaging optical system.
In an embodiment of the present disclosure, the reference surface is a standard reference surface obtained by an external calibration and calibration tool.
The present disclosure also provides a drift detection method for any one of the above sample surface position online positioning measurement devices, including:
operation S100: detecting and determining that the positioning system or the measuring system drifts on line; and
operation S200: calibrating the positioning system or the measurement system in which the drift occurs.
In an embodiment of the present disclosure, the operation S100 includes:
operation S110: reading the monitored position data of the displacement sensor;
operation S120: comparing the monitoring position data with the position data of the reference surface to obtain a height difference; and
operation S130: and comparing and analyzing the height difference and the focal depth of the measuring system, wherein the half of the value of the height difference smaller than or equal to the focal depth is that the measuring system drifts, and the half of the value of the height difference larger than the focal depth is that the positioning system drifts.
In an embodiment of the present disclosure, the operation S200 includes:
operation S210: adjusting the position of the surface of the sample to the position of the standard reference surface through a three-dimensional adjusting mechanism according to the monitoring position data, and completing the online calibration of the positioning system or the measuring system; and
operation S220: after the online calibration of the surface of the sample is completed, the height difference is still larger than half of the value of the focal depth, so that the positioning system and the measuring system drift, the reference surface is obtained again through an external calibration and calibration tool, and the online calibration of the positioning system and the measuring system is completed.
(III) advantageous effects
According to the technical scheme, the online positioning and measuring device and the method for the surface position of the sample have at least one or part of the following beneficial effects:
(1) the positioning of the surface of the sample to the position of the reference surface of the system can be completed on line;
(2) can assist in detecting the drift problem of the system by quickly adjusting the sample on line after the system drifts,
(3) it is possible to determine whether recalibration and calibration of the measurement system itself is required.
(4) The scheme does not need to carry out complicated offline adjusting steps, has simple structure, low cost and easy operation, and can carry out primary fault diagnosis and repair when the system goes wrong.
Drawings
Fig. 1 is an assembly schematic diagram of an online positioning and measuring device for a sample surface position according to an embodiment of the disclosure.
FIG. 2 is another schematic view of the online positioning and measuring device for the surface position of a sample according to the embodiment of the disclosure.
Fig. 3 is a flowchart of a drift detection method of an online positioning and measuring device for a sample surface position according to an embodiment of the disclosure.
Fig. 4 is a flowchart of drift occurrence determination of a drift detection method of an online positioning and measuring device for a sample surface position according to an embodiment of the present disclosure.
Fig. 5 is a flowchart of drift calibration of a drift detection method of an online positioning and measuring device for a sample surface position according to an embodiment of the disclosure.
[ description of main reference numerals in the drawings ] of the embodiments of the present disclosure
1 supporting frame
21 first height measuring module
22 second height measuring module
31. 32, 33 displacement sensor
34 displacement sensor fixing structure
4 sample surface
5 sample stage
6 three-dimensional adjusting structure
61. 62, 63, 64 precision adjusting screw
65 locking structure
66 adjusting plate
67 base plate
Detailed Description
The present disclosure provides an on-line positioning and measuring device for sample position, which can record and store the reference surface position of an optical system; the positioning of the surface of the sample to the position of the reference surface of the system can be completed on line; after the system drifts, the problem of the system drift can be detected in an auxiliary mode of quickly adjusting the surface of the sample on line, and whether the measurement system needs to be recalibrated and calibrated or not is judged. The scheme does not need to carry out complicated offline adjusting steps, has simple structure, low cost and easy operation, and can carry out primary fault diagnosis and repair when the system goes wrong. Can overcome the main defects and shortcomings of the existing measuring device.
For the purpose of promoting a better understanding of the objects, aspects and advantages of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.
In an embodiment of the present disclosure, there is provided a sample position on-line positioning measurement device, as shown in fig. 1 and 2, including:
the positioning system is used for carrying out online positioning on the surface 4 of the sample to be detected and keeping the surface 4 of the sample at the position of a reference surface;
and the measuring system is used for measuring the sample surface 4 at the reference surface position, and the online positioning measurement of the sample surface position of the sample surface 4 is completed.
In an embodiment of the present disclosure, the positioning system includes:
a three-dimensional adjustment mechanism comprising a sample surface stage 5, said sample surface stage 5 being for carrying a sample surface 4, said three-dimensional adjustment mechanism being capable of adjusting the position of the sample surface 4;
a metrology mechanism for positional measurement of said sample surface 4, said metrology mechanism comprising:
a support frame 1;
the displacement sensor group is fixed on the supporting frame through a displacement sensor fixing structure 34, can detect the sample surface 4 at a set standard reference surface position to obtain standard position data, and can monitor the position of the sample surface 4 to obtain monitoring position data;
and the three-dimensional adjusting mechanism adjusts the position of the sample surface 4 until the monitoring position data and the standard position data are in a set relationship, and the online positioning of the sample surface 4 is completed.
In an embodiment of the present disclosure, the three-dimensional adjustment mechanism further includes:
a substrate 67;
an adjusting plate 66 connected to the base plate 67 by a fine adjustment screw
A fine adjustment screw to adjust the sample surface 4 to a reference surface position.
In the disclosed embodiment, the precision adjustment screw has a locking structure 65,
in an embodiment of the present disclosure, the displacement sensor group includes: three displacement sensors which are not on the same straight line can acquire a distance relative to the sample surface 4, and the plane of the sample surface 4 can be determined.
In the embodiment of the disclosure, the measuring system is one of a height measuring system, a semiconductor exposure optical system and a microscopic imaging optical system.
In an embodiment of the present disclosure, the measurement system includes:
an optical height measuring mechanism capable of measuring and obtaining the height of the sample surface 4;
the optical height measuring mechanism includes:
a first height measuring module 21 and a second height measuring module 22.
In an embodiment of the present disclosure, the reference surface is a standard reference surface obtained by an external calibration and calibration tool.
Specifically, in the embodiment of the present disclosure, the apparatus of the present disclosure mainly includes, as shown in fig. 1, a supporting frame 1, optical height measuring mechanisms 21, 22, 3 displacement sensors 31, 32, 33, a displacement sensor fixing structure 34, a sample surface 4, a sample surface stage 5, a three-dimensional adjusting structure 6, including 4 fine adjusting screws 61, 62, 63, 64, an adjusting plate 66 and a base plate 67. The precision adjustment screw includes a locking structure 65.
In the embodiment of the present disclosure, the first height measurement module 21 and the second height measurement module 22 of the optical height measurement mechanism are fixed on the support frame 1, and the calibration of the optical system and the adjustment of the calibration tool are completed offline by using a high-precision test device. The tool provides a standard reference surface with which calibration and calibration of the first height measuring module 21 and the second height measuring module 22 of the optical height measuring mechanism is performed.
In the embodiment of the present disclosure, the reference surface positions (i.e., standard reference surface positions) of the optical height measuring mechanism are recorded by using 3 displacement sensors 31, 32, 33, which are a1, a2, and A3, respectively, and in order to ensure the accuracy of the plane position, the number of the displacement sensors needs to be at least 3, and the 3 sensors cannot be installed on the same straight line. The displacement sensors 31, 32, 33 are mounted on a displacement sensor fixing structure 34, and the displacement sensor fixing structure 34 is mounted on the support frame 1. The displacement sensor can be a contact sensor or a non-contact sensor.
In the disclosed embodiment, the sample surface 4 is fixed on the sample stage 5. The sample stage 5 is fixed on the adjusting plate 66 of the adjusting structure 6, the sample surface 4 is adjusted to the reference surface position by the precision adjusting screws 61, 62, 63, 64, i.e. the index of the displacement sensors 31, 32, 33 is again a1, a2 and A3, and then the adjusting plate 66 is locked to the base plate 67 by the locking structure 65.
In the embodiment of the present disclosure, as the performance of the optical height measuring mechanism is significantly degraded, the real-time position data B1, B2, and B3 of the displacement sensors 31, 32, and 33 are first read to determine whether Bi is in the range of (Ai ± d/2), where i ═ 1, 2, 3, and d is the measuring range of the height measuring optical system. If Bi is more than or equal to Ai-d/2 and less than or equal to Ai + d/2, the fact that the interior of the optical system drifts can be judged, and recalibration and calibration are needed; if Ai-d/2 > Bi or Ai + d/2 < Bi, the sample surface 4 can be adjusted on line by the three-dimensional adjusting mechanism 6, so that the readings of the displacement sensors 31, 32 and 33 are A1, A2 and A3 again, and if the system performance returns to normal, the system drift can be judged to be mainly caused by the drift of the test sample surface 4. If the system performance still can not be recovered to normal, the drift inside the system can be judged, and at the moment, the optical height measuring mechanism needs to be calibrated and calibrated again.
In the disclosed embodiment, fig. 2 is a further embodiment of the present patent. As shown in fig. 2, the optical system may also be a first height measuring module 21 and a second height measuring module 22 of the optical height measuring mechanism, and the steps of the method for detecting the system drift are as shown in fig. 3.
The present disclosure also provides a drift detection method for an online positioning and measuring device of a sample surface position, which is described in detail below with reference to the accompanying drawings in combination with specific embodiments in order to make the objects, technical solutions and advantages of the present disclosure more apparent.
In an embodiment of the present disclosure, there is provided a drift detection method for a sample surface position online positioning measurement device, as shown in fig. 3, the drift detection method for a sample surface position online positioning measurement device includes:
operation S100: detecting and determining that the positioning system or the measuring system drifts on line;
operation S200: calibrating the positioning system or the measurement system in which the drift occurs.
In the embodiment of the present disclosure, as shown in fig. 4, the operation S100 includes:
operation S110: reading the monitored position data of the displacement sensor;
operation S120: comparing the monitoring position data with the position data of the reference surface to obtain a height difference;
operation S130: and when the optical measurement system signal is abnormal, comparing and analyzing the height difference and the focal depth of the measurement system, wherein the half of the value of the height difference smaller than or equal to the focal depth is the drift of the measurement system, and the half of the value of the height difference larger than the focal depth is the drift of the positioning system.
In the embodiment of the present disclosure, as shown in fig. 5, the operation S200 includes:
operation S210: adjusting the position of the surface of the sample to a preset relation between the monitoring position data and the standard position data through a three-dimensional adjusting mechanism, and completing the online calibration of the positioning system or the measuring system;
operation S220: after the online calibration of the surface of the sample is completed, the height difference is still larger than half of the value of the focal depth, so that the positioning system and the measuring system drift, the reference surface is obtained again through an external calibration and calibration tool, and the online calibration of the positioning system and the measuring system is completed.
Specifically, in the embodiment of the present disclosure, the method for positioning a reference surface on line first uses a tool to provide a standard reference surface to calibrate and calibrate the optical system. The position of the standard reference surface is recorded and stored by utilizing the displacement sensor; when different sample surfaces are detected, the three-dimensional adjusting mechanism disclosed by the patent is utilized to adjust the sample surfaces to the position of a measuring/imaging surface (namely the position of a standard reference surface) on line.
In the embodiment of the present disclosure, if the performance of the system is significantly reduced, the displacement sensor of the present disclosure may first read real-time position information of the surface of the sample, and determine whether the position is within ± d/2 of a standard reference plane position stored by the displacement sensor. If the real-time position of the surface of the sample is within the range, the drift of the interior of the optical system can be judged, and recalibration and calibration are needed; if the real-time position of the sample surface is not in the range, the position of the sample surface to the standard reference surface can be adjusted on line through the three-dimensional adjusting mechanism, and if the system performance is recovered to be normal, the system drift can be judged to be mainly caused by the drift of the test sample surface. If the system performance cannot be recovered to normal, the drift inside the system can be judged, and at the moment, the measurement system needs to be calibrated and calibrated again.
So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. Further, the above definitions of the various elements and methods are not limited to the various specific structures, shapes or arrangements of parts mentioned in the examples, which may be easily modified or substituted by those of ordinary skill in the art.
From the above description, those skilled in the art should clearly understand the present disclosure of the device for online positioning and measuring the surface position of a sample and the method for detecting the drift thereof.
In summary, the present disclosure provides an online positioning and measuring device for a sample surface position and a drift detection method thereof, which can record and store a reference surface position of an optical system; the positioning of the surface of the sample to the position of the reference surface of the system can be completed on line; the method can help detect the problem of system drift by quickly adjusting the surface of the sample on line after the system drifts, and judge whether the optical system needs to be recalibrated and calibrated. The scheme does not need to carry out complicated offline adjusting steps, has simple structure, low cost and easy operation, and can carry out primary fault diagnosis and repair when the system goes wrong.
It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", and the like, used in the embodiments are only directions referring to the drawings, and are not intended to limit the scope of the present disclosure. Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present disclosure.
And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Unless otherwise indicated, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present disclosure. In particular, all numbers expressing quantities of ingredients, reaction conditions, and so forth used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
In addition, unless steps are specifically described or must occur in sequence, the order of the steps is not limited to that listed above and may be changed or rearranged as desired by the desired design. The embodiments described above may be mixed and matched with each other or with other embodiments based on design and reliability considerations, i.e., technical features in different embodiments may be freely combined to form further embodiments.
Those skilled in the art will appreciate that the modules in the device in an embodiment may be adaptively changed and disposed in one or more devices different from the embodiment. The modules or units or components of the embodiments may be combined into one module or unit or component, and furthermore they may be divided into a plurality of sub-modules or sub-units or sub-components. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the processes or elements of any method or apparatus so disclosed, may be combined in any combination, except combinations where at least some of such features and/or processes or elements are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also in the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be interpreted as reflecting an intention that: that is, the claimed disclosure requires more features than are expressly recited in each claim. Rather, as the following claims reflect, disclosed aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this disclosure.
The above-mentioned embodiments are intended to illustrate the objects, aspects and advantages of the present disclosure in further detail, and it should be understood that the above-mentioned embodiments are only illustrative of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present disclosure should be included in the scope of the present disclosure.
Claims (10)
1. An on-line positioning and measuring device for a sample surface position, comprising:
the positioning system is used for carrying out online positioning on the sample surface of a sample to be detected and keeping the sample surface at a reference surface position; and
and the measuring system is used for measuring the sample surface at the reference surface position, and the online positioning measurement of the sample surface position of the sample surface is completed.
2. The sample surface position on-line positioning measurement device of claim 1, wherein the positioning system comprises:
the three-dimensional adjusting mechanism is used for adjusting the position of the surface of the sample and comprises a sample table for bearing the sample;
a metrology mechanism for positional measurement of the sample surface, the metrology mechanism comprising:
a support frame; and
the displacement sensor group is fixed on the supporting frame through a fixing structure, can measure the surface of the sample at a set reference surface position to obtain standard position data, and can monitor the position of the surface of the sample to obtain monitoring position data;
and the three-dimensional adjusting mechanism adjusts the position of the surface of the sample to the position of the reference surface according to the monitoring position data, so that the online positioning of the sample is completed.
3. The sample surface position on-line positioning measurement device of claim 2, wherein the three-dimensional adjustment mechanism further comprises:
a substrate; and
the adjusting plate is connected to the base plate through a precision adjusting screw; the precision adjusting screw is used for adjusting the surface of the sample to a reference surface position.
4. The sample surface position on-line positioning and measuring device of claim 3, wherein the fine adjustment screw has a locking structure.
5. The sample surface position on-line positioning measurement device of claim 2, wherein the displacement sensor set comprises: the displacement sensors are not on the same straight line, and each displacement sensor can respectively acquire a distance relative to the surface of the sample, so that the position data of the plane where the surface of the sample is located can be determined.
6. The sample surface position on-line positioning measurement apparatus according to claim 1, wherein the optical measurement system is one of a height measurement system, a semiconductor exposure optical system, and a microscopic imaging optical system.
7. The sample surface position on-line positioning measurement device of claim 1, wherein the reference surface is a standard reference surface obtained by an external calibration and calibration tool.
8. The drift detection method of the sample surface position on-line positioning measurement apparatus according to any one of claims 1 to 7, comprising:
operation S100: detecting and determining that the positioning system or the measuring system drifts on line; and
operation S200: calibrating the positioning system or the measurement system in which the drift occurs.
9. The drift detection method of claim 8, wherein the operation S100 comprises:
operation S110: reading the monitored position data of the displacement sensor;
operation S120: comparing the monitoring position data with the position data of the reference surface to obtain a height difference; and
operation S130: and comparing and analyzing the height difference and the focal depth of the measuring system, wherein the half of the value of the height difference smaller than or equal to the focal depth is that the measuring system drifts, and the half of the value of the height difference larger than the focal depth is that the positioning system drifts.
10. The drift detection method of claim 8, wherein the operation S200 comprises:
operation S210: adjusting the position of the surface of the sample to the position of the standard reference surface through a three-dimensional adjusting mechanism according to the monitoring position data, and completing the online calibration of the positioning system or the measuring system; and
operation S220: after the online calibration of the surface of the sample is completed, the height difference is still larger than half of the value of the focal depth, so that the positioning system and the measuring system drift, the reference surface is obtained again through an external calibration and calibration tool, and the online calibration of the positioning system and the measuring system is completed.
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| CN110108904A (en) * | 2019-05-15 | 2019-08-09 | 北京航空航天大学 | The real-time drift compensating system of atomic force microscope and method of view-based access control model sensing |
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