CN102305601A - High-precision non-contact measurement method and device for three-dimensional profile of optical freeform curved surface - Google Patents
High-precision non-contact measurement method and device for three-dimensional profile of optical freeform curved surface Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
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- G01B9/0209—Low-coherence interferometers
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Abstract
The invention relates to high-precision in-situ detection for complicated curved-surface parts with high-curvature surface form. In order to provide non-contact for the parts and detection for the surfaces of the parts, the invention provides the following technical scheme, namely a high-precision non-contact measurement method and a high-precision non-contact measurement device for a three-dimensional profile of an optical freeform curved surface. A grating projection device is used for projecting a sine grating stripe onto the surface of a measured object; an image acquisition device acquires a deformed stripe pattern modulated by the surface of the measured object and sends the deformed stripe pattern into a computer to recover the three-dimensional profile of the surface of the measured object; a white light scanning interference measuring head is used for scanning and measuring local characteristics of the measured object in nano-scale precision; a white light scanning image acquisition device acquires an interfered stripe pattern and sends the interfered stripe pattern into the computer to acquire data of the three-dimensional profile of a measurement region; and a result can be obtained according to data obtained by measurement of a grating projection vision detection unit and a white light scanning interference measurement unit through a multi-sensor massive data combination algorithm and corresponding error separation and compensation measures. The invention is mainly applied to the high-precision in-situ detection of the parts.
Description
Technical field
The high accuracy in-situ that the present invention relates to the complex curved surface parts of deep camber face shape detects, and specifically relates to freeform optics surface three-dimensional appearance high precision non-contact measurement method and device.
Background technology
Precision/Ultraprecision Machining has become the main developing direction and the important research field of advanced processing and manufacturing technology, particularly such as the application of ultra precision cutting process technology in high-tech areas such as Aero-Space, national defence, biomedicine, communication, microelectronics of complex curved surface parts such as freeform optics surface more and more widely.An important component part as complex-curved ultraprecise processing; High accuracy in-situ detects and the compensation control technology is the basis of improving ultraprecise processing parts size, form accuracy and surfaceness, also is to realize control of complex curved surface parts surface integrity and the gordian technique of estimating.Both at home and abroad the researchist has developed the ultraprecise in-situ measurement system of number of different types, but present research is mainly based on the contact type measurement principle, and measuring speed is slow, is unfavorable for obtaining fast the three-dimensional appearance data of testee.
Complex curved surface parts opposite shape accuracy requirements such as freeform optics surface are very high, and require surface and top layer not damaged.Advantages such as measuring method such as optical microphotograph mensuration, optical interference measurement, fringe projection method etc. are quick with it, high precision, noncontact have obtained widespread use in micro-nano class precision dimensional measurement field.Wherein, the measurement of white light scanning interferometer has the measurement resolution of nanoscale even Subnano-class, good reproducibility, yet, receive the restriction of the numerical aperture and the field range of optical system, be not suitable for having the complex-curved measurement of deep camber face shape.And under the condition of no sub-scanning device, its measurement range far can not reach a millimeter magnitude.Excellent properties such as the fringe projection method is big with its measurement range, measuring speed is fast have been used widely in the dimensional measurement field, can be used for the measuring three-dimensional morphology of complex curved surface parts.Yet the measuring accuracy of fringe projection method can't reach nano level accuracy requirement.
How to realize that the high precision noncontact in site measurement of complex curved surface parts three-dimensional appearances such as freeform optics surface becomes a primary study direction in precision measurement field.Be difficult to accomplish complex curved surface parts ultraprecise processing in site measurement problem to the single-measurement method; Research and develop a kind of many optical sensors that can satisfy multiple requestings such as measurement range, resolving power, precision and efficiency of measurement and merge measuring method, become the research focus in current ultra precise measurement field.
Summary of the invention
For overcoming the deficiency of prior art, be provided for the method and the device of high accuracy in-situ testing process that freeform optics surface etc. has the complex curved surface parts of deep camber face shape, noncontact is to piece surface and top layer not damaged.For reaching above-mentioned purpose, the technical scheme that the present invention takes is that freeform optics surface three-dimensional appearance high precision non-contact measurement method may further comprise the steps:
Realize the testee three-degree-of-freedom motion by means of the hi-Fix kinetic control system;
Use the optical grating projection device to testee surface projection grating fringe; Obtain deforming stripe figure by optical grating projection vision-based detection image collecting device through the testee surface modulation; Send in the computing machine after subsequent treatment, recover the testee three-dimensional surface shape;
According to the testee three-dimensional surface shape that recovers; Carrying out the testee pose discerns automatically; Planning white light scanning interferometer measuring route, the more accurate white light scanning interferometer gauge head of guiding carries out the nano-precision scanning survey to the testee local feature automatically, obtains interference fringe picture by white light scan image harvester; Send in the computing machine through subsequent treatment, obtain the three-dimensional appearance data of measured zone;
The data that optical grating projection vision-based detection and white light scanning interferometer are measured are through multisensor mass data blending algorithm and corresponding error separating and indemnifying measure, accurately measure the three-dimensional appearance characteristic of complex curved surface parts such as freeform optics surface.
The hi-Fix kinetic control system is made up of high precision electricity driving displacement platform, high precision electric rotating platform and position, the electronic angle of high precision platform, realizes three-degree-of-freedom motion by means of this platform control testee.
Optical grating projection vision-based detection image collector is changed to two Scientific Grade numeral ccd video cameras, and two Scientific Grade numeral ccd video cameras are placed with optical grating projection device center symmetry along the high precision electricity driving displacement platform axis direction of hi-Fix kinetic control system.
The optical grating projection device is to the grating fringe of testee surface projection, is the adjustable sinusoidal grating striped of amplitude, phase place and projecting direction, cosine grating fringe, a kind of in two kinds of grating fringes that frequency is different with direction the composite grating striped, Moire fringe, gray-coded grating fringe and the chromatic grating striped that are combined to form.
White light scanning interferometer gauge head adopts the micro-interference object lens; Adopt the white light source irradiation during scanning; Be connected through breakout box between micro-interference object lens and optical imaging system; Drive the micro-interference object lens through a High Precision Piezoelectric Ceramic steady arm and accomplish vertical scanning; The inclination of micro-interference objective lens optical axis, hi-Fix kinetic control system are driven the testee along continuous straight runs accomplish horizontal scanning, receive interference fringe picture through optical imaging system by white light scan image harvester by the mode of fixed step size motion.
A kind of freeform optics surface three-dimensional appearance high precision non-contact measurement device is made up of hi-Fix kinetic control system, optical grating projection visual detection unit, white light scanning interferometer measuring unit and computing machine;
The hi-Fix kinetic control system is made up of high precision electricity driving displacement platform, high precision electric rotating platform and position, the electronic angle of high precision platform, realizes three-degree-of-freedom motion by means of this platform control testee;
The optical grating projection visual detection unit is made up of optical grating projection device, image collecting device; The grating fringe that is produced by computing machine projects to the surperficial deforming stripe that forms of testee through the optical grating projection device; Testee arrives in the field range of image collecting device along the high precision displacement platform motion; Testee moves under high precision angle position platform and the effect of high precision rotation platform; Testee is rotated a certain angle, so that received with best mode by image collecting device through the deforming stripe figure of testee surface modulation;
White light scanning interferometer measuring unit is made up of micro-interference object lens, optical imaging system, white light source and image collecting device; The micro-interference object lens are used for: drive the micro-interference object lens through a High Precision Piezoelectric Ceramic steady arm and accomplish vertical scanning; With the micro-interference objective lens optical axis tilt, the hi-Fix kinetic control system drives the testee along continuous straight runs and accomplishes horizontal scanning by the mode of fixed step size motion, and be connected through breakout box between optical imaging system;
Computing machine is used for: produce grating fringe; Deforming stripe figure by receiving recovers the testee three-dimensional surface shape; To the needs testee local region information of precision measurement more; Select suitable white light scanning interferometer metering system; Planning white light scanning interferometer measuring route guides white light scanning interferometer gauge head that the testee local feature is carried out the nano-precision scanning survey automatically; The data that optical grating projection visual detection unit and white light scanning interferometer measuring unit are measured accurately measure the three-dimensional appearance characteristic of freeform optics surface complex curved surface parts through multisensor mass data blending algorithm and corresponding error separating and indemnifying measure.
The image collector of optical grating projection visual detection unit is changed to two Scientific Grade numeral ccd video cameras, and two Scientific Grade numeral ccd video cameras are placed with the optical grating projection device center symmetry of optical grating projection visual detection unit along high precision electricity driving displacement platform axis direction.
The optical grating projection device is the LCD LCDs, and the LCD LCDs adopts the downward mode of delivery of level.
The present invention has following technique effect:
Because the present invention is employed in the mode that merges optical grating projection visual detection unit and white light scanning interferometer measuring unit in the same kinetic control system framework; Use the optical grating projection visual detection unit to obtain big visual field overall situation outline data; Use white light scanning interferometer measuring unit that the parts locally minutia is carried out the nano-precision scanning survey; Thereby the present invention can significantly improve accuracy of detection and the resolving power of complex curved surface parts in the processing testing process that freeform optics surface etc. has deep camber face shape; Measuring speed is fast, and noncontact is to piece surface and top layer not damaged.
Description of drawings
Fig. 1 is the freeform optics surface three-dimensional appearance high precision non-contact measurement ultimate principle figure based on multi-sensor fusion technology.Among the figure: 1 for being used for the LCD liquid crystal display of sinusoidal grating projection; 2 is the high precision displacement platform, and 3 is high precision angle position platform and the combination of high precision rotation platform, and 4 is testee; 5 for being used to receive the Scientific Grade numeral ccd video camera of deforming stripe figure, and 6 is white light scanning interferometer gauge head.
Fig. 2 is optical grating projection measuring principle figure.Among the figure: 7 is computing machine, and 8 is microcontroller, and 9 is motor.
Fig. 3 is white light scanning interferometer measuring principle figure.Among the figure: 21 is high-quality white LED light source, and 31 is spectroscope, and 41 is piezoelectric actuator, and 10 for being used to receive the Scientific Grade numeral ccd video camera of white light scanning interferometer bar graph.
Fig. 4 is one embodiment of the invention pictorial diagram.
Embodiment
A kind of freeform optics surface three-dimensional appearance high precision non-contact measurement method: in same hi-Fix kinetic control system framework, make up optical grating projection visual detection unit and white light scanning interferometer measuring unit based on multi-sensor fusion technology; Use the optical grating projection device to testee surface projection sinusoidal grating striped; Obtain deforming stripe figure by image collecting device through the testee surface modulation; Send in the computing machine after subsequent treatment, recover the testee three-dimensional surface shape.The testee three-dimensional surface shape data that measure according to the optical grating projection visual detection unit; Carrying out the part pose discerns automatically; Planning white light scanning interferometer measuring route, the more accurate white light scanning interferometer gauge head of guiding carries out the nano-precision scanning survey to the testee local feature automatically, obtains interference fringe picture by image collecting device; Send in the computing machine through subsequent treatment, obtain the three-dimensional appearance data of measured zone.The data that optical grating projection visual detection unit and white light scanning interferometer measuring unit are measured are through multisensor mass data blending algorithm and corresponding error separating and indemnifying measure, accurately measure the three-dimensional appearance characteristic of complex curved surface parts such as freeform optics surface.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology; It is characterized in that: hi-Fix kinetic control system wherein is made up of high precision electricity driving displacement platform, high precision electric rotating platform and position, the electronic angle of high precision platform, and the may command testee is realized three-degree-of-freedom motion.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein the optical grating projection device of optical grating projection visual detection unit is the LCD LCDs.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method, it is characterized in that: the downward mode of delivery of LCD LCDs employing level that is used for the projection grating striped of optical grating projection visual detection unit wherein based on multi-sensor fusion technology.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein the image collector of optical grating projection visual detection unit is changed to two Scientific Grade numeral ccd video cameras.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein two of the optical grating projection visual detection unit Scientific Grade numeral ccd video cameras are placed with LCD liquid crystal display center symmetry along high precision electricity driving displacement platform axis direction.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein the projection of optical grating projection visual detection unit is the adjustable sinusoidal grating striped of being realized by software programming of amplitude, phase place and projecting direction.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein two of the optical grating projection visual detection unit Scientific Grade numeral ccd video cameras are receiving the sinusoidal grating striped through the testee surface modulation respectively in the field range separately.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein white light scanning interferometer measuring unit is made up of micro-interference object lens, optical imaging system, white light source and image collecting device.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method, it is characterized in that: wherein be connected through breakout box between the micro-interference object lens of white light scanning interferometer measuring unit and optical imaging system based on multi-sensor fusion technology.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein the scan mode of white light scanning interferometer measuring unit is vertical scanning and horizontal scanning.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein the micro-interference object lens in the white light scanning interferometer measuring unit drive it through a High Precision Piezoelectric Ceramic steady arm and accomplish vertical scanning.
In above-mentioned freeform optics surface three-dimensional appearance high precision non-contact measurement method based on multi-sensor fusion technology, it is characterized in that: wherein the horizontal scanning mode in the white light scanning interferometer measuring unit adopts the mode that system optical axis tilts, hi-Fix kinetic control system drive testee along continuous straight runs moves by a fixed step size.
In sum, the measuring method that the present invention proposes and then can exact solution calculate the volume coordinate position of testee surface each point realizes the high precision non-contact measurement to the three-dimensional appearance characteristic of complex curved surface parts such as freeform optics surface.
Below in conjunction with accompanying drawing further explain the present invention.
Fig. 1 is the freeform optics surface three-dimensional appearance high precision non-contact measurement ultimate principle figure based on multi-sensor fusion technology.(a) among the figure 1 for being used for the LCD liquid crystal display of sinusoidal grating projection, 2 be the high precision displacement platform, 3 be that high precision angle position platform makes up with the high precision rotation platform, 4 is testee, 5 is the digital ccd video camera of Scientific Grade that is used to receive deforming stripe figure.At first the optical grating projection visual detection unit is started working; The sinusoidal grating striped that is produced by computing machine projects to the testee surface through the LCD liquid crystal display; Testee arrives in the field range of ccd video camera along the high precision displacement platform motion; Receive the restriction of LCD liquid crystal display size and with reference to the complexity of testee surface topography; Control high precision angle position platform and the motion of high precision rotation platform rotate a certain angle testee, so that received with best mode by ccd video camera through the deforming stripe figure of testee surface modulation.The incident ray and the reflection ray that intersect at testee surface each point are all in accordance with reflection law, shown in a W.From the deforming stripe figure that collects, demodulate the elevation information of testee surface each point, adopt the three-dimensional reconstruction technology to recover the three-dimensional appearance characteristic of testee.The optical grating projection vision-based detection can realize the micron order measurement of testee three-dimensional surface shape.Like need a W near zone is carried out more high Precision Detection; Can be according to the measurement result of optical grating projection visual detection unit planning survey path again; Make in the field range of the white light scanning interferometer gauge head of testee along the high precision displacement platform motion to 6 representatives; Control high precision angle position platform and the motion of high precision rotation platform, the angle of adjustment testee is to obtain the optimum measurement result.From the interference fringe picture that collects, demodulate the elevation information of measured zone each point, adopt the three-dimensional reconstruction technology to recover the three-dimensional appearance characteristic of measured zone.The white light scanning interferometer is measured can realize the nanoscale high Precision Detection to the testee regional area.Measure the measurement data that obtains separately to optical grating projection vision-based detection and white light scanning interferometer, adopt multisensor mass data blending algorithm, accurately recover testee three-dimensional surface shape characteristic.The measurement of white light scanning interferometer has two kinds of metering systems, shown in figure (b) and figure (c).Figure (b) is the vertical scanning metering system; Each point is according to the height of himself relative table plane on the testee surface; When white light scanning interferometer measurement mechanism moves to certain position and relevant Plane intersects reach best and interfere, each point relative height information can be derived in the position (or relative movement distance) of corresponding worktable when arriving best the interference by each point.White light vertical scanning interferometry scope is limited by the visual field; Introduce image mosaic and can cause measuring error; If the testee surf zone that white light scanning interferometer gauge head need be measured is bigger, then adopt the white light horizontal scanning interferometric measuring means shown in the figure (c), the relative surface level of optical axis tilts; Worktable drives the scanning of sample along continuous straight runs by fixed step size completion interference fringe, can confirm the relative height information of each point according to the position of the best interference in image of testee surface each point.
Fig. 2 is optical grating projection measuring principle figure.1 is the LCD liquid crystal display, is used for the sinusoidal grating striped that projection is produced by software programming.Cosine grating, composite grating (combinations of frequency, two kinds of grating fringes that direction is different), Moire fringe and gray-coded grating fringe (like the Gray code grating), chromatic grating striped etc. are also tested, and effect is roughly the same, gives unnecessary details no longer respectively.5 is Scientific Grade numeral ccd video camera, is used to receive the deforming stripe figure through the modulation of measured object body surface, and 4 is testee, and 3 is high precision angle position platform and the combination of high precision rotation platform, and 2 is the high precision displacement platform, and 2 and 3 form the hi-Fix kinetic control system.7 is computing machine, and 8 is microcontroller, and 9 is motor.Receive LCD liquid crystal display size restrictions, when considering that the testee surface curvature change is big, can't obtain testee surface global three-dimensional appearance, therefore adopt two ccd video cameras to measure with single ccd video camera.At first testee 4 (shown in the solid line) moves in the ccd video camera field range of 5 representatives under the control of hi-Fix kinematic system; Rotate suitable angle; Accomplish and measure; Testee 4 (shown in the dotted line) moves in another ccd video camera field range of 5 representatives then, rotates suitable angle, accomplishes and measures.The testee three-dimensional surface shape data that two ccd video cameras are measured respectively recover the complete three-dimensional appearance of testee through the image mosaic technology.
Fig. 3 is white light scanning interferometer measuring principle figure.21 is high-quality white LED light source, and 31 is spectroscope, and 41 is piezoelectric actuator.The white light that is produced by high-quality white LED light source arrives spectroscope through lens combination; Be divided into reference beam and measuring beam; Realize scanning through the feeding of Piezoelectric Ceramic reference mirror to the testee surface; Ccd video camera receives interference image, from interference pattern, extracts the relative height that best interference point position obtains each point, depicts the three-dimensional appearance on testee surface.
In same hi-Fix kinetic control system framework, make up optical grating projection visual detection unit and white light scanning interferometer measuring unit, a whole set of measurement mechanism is placed on the high-precision optical vibration-isolating platform.
Described hi-Fix kinetic control system is made up of high precision electricity driving displacement platform, high precision electric rotating platform and position, the electronic angle of high precision platform, and the may command testee is realized three-degree-of-freedom motion.Wherein high precision electricity driving displacement platform stroke is 300mm, and the high precision electric rotary table can be realized 360 ° of rotations, and position, the electronic angle of high precision platform can be realized ± adjustment of 45 degree.
Described optical grating projection visual detection unit is made up of sinusoidal grating projection arrangement and image collecting device; Wherein can to select screen size for use be the LCD liquid crystal display of 478mm * 300mm to the optical grating projection device; The sinusoidal grating striped that the downward projection of level is produced by computer programming; The amplitude of this sinusoidal grating striped, phase place and projecting direction can be adjusted through software, and the LCD liquid crystal display can carry out the 400mm height control with respect to loading surface.The high resolution numeral ccd video camera that it is 2456 * 2058 pixels that image collecting device is selected two resolution for use, two ccd video cameras are placed with LCD liquid crystal display center symmetry along high precision electricity driving displacement platform axis direction, and its height and angle all can be adjusted.
Described white light scanning interferometer measuring unit is made up of micro-interference object lens, optical imaging system, high-quality white LED light source and Scientific Grade numeral ccd video camera.Wherein the micro-interference object lens can select for use Mirau type micro-interference object lens (10X, 20X, 50X); Through a High Precision Piezoelectric Ceramic steady arm (PI P-721.CL; The control of capacitive transducer feedback closed loop, minimum resolving power 0.7nm, scope 100um) drive object lens completion vertical scanning.Optical imaging system can be selected Ultra-Zoom series camera lens for use.Ultra-Zoom series camera lens provides very high resolution and outstanding contrast; Can select its fine setting focus function and/or coaxial-illuminating function for use; Select the coaxial-illuminating function for use; Can in high enlargement ratio application scenario, even illumination be provided, when using high-resolution camera, resolution clearly be provided.In the present embodiment, Ultra-Zoom is placed on below, is mini breakout box and C-type connector above then, links to each other with the scientific grade CCD video camera with realization.It topmost is ccd video camera as image collecting device.White light source also will be connected into so that illumination to be provided through breakout box.It is the high-quality white LED light source of 580nm that lighting device is selected centre wavelength for use.It is the scientific grade CCD video camera of 1534 * 1024 pixels that image collecting device can be selected resolving power for use, is transferred to computing machine by capture card after gathering and carries out subsequent treatment.
Computing machine demodulates the gradient information of testee surface each point from the deforming stripe figure that collects; Can recover testee three-dimensional appearance characteristic through the wavefront reconstruction algorithm; After obtaining the big visual field of testee overall situation three-D profile, extract the geometric properties information of testee, carry out matching treatment with the CAD processing model; Realize that the part pose of no explicit reference benchmark discerns automatically, for the whole path planning of follow-up partial high-precision scanning survey provides foundation.Space layout result based on the part posture information that obtains and each unit of measuring system; To the needs testee local region information of precision measurement more; Select suitable white light scanning interferometer metering system; Planning white light scanning interferometer measuring route guides white light scanning interferometer gauge head that the testee local feature is carried out the nano-precision scanning survey automatically.White light scan image harvester obtains white light scanning interferometer bar graph, is transferred to through capture card and carries out subsequent treatment in the computing machine, from interference fringe picture, demodulates the relative height information of measured zone, obtains the three-dimensional appearance data of measured zone.The mass data that measures to optical grating projection visual detection unit and white light scanning interferometer measuring unit; Adopt the least square estimation algorithm to carry out not waiting the not isopycnic alignment of data of precision; Realize the spatial registration of foreign peoples's optical sensor mass data; Merge principle based on data Layer and characteristic layer, set up mass data fusion structure model, utilize bayes method to accomplish the fusion of multisensor mass data; And carry out the detection and the compensation of multidirectional kinematic error, accurately measure the three-dimensional appearance characteristic of freeform optics surface.
Can realize high precision non-contact measurement to the complex curved surface parts three-dimensional appearances such as freeform optics surface in 200mm * 200mm * 20mm measurement range.At first; The sinusoidal grating striped projects the testee surface through the LCD liquid crystal display; Testee moves in the field range of a certain ccd video camera under the control of hi-Fix kinetic control system; The angle of adjustment testee is to obtain the optimum measurement result, and the ccd video camera collection is sent into and carried out subsequent treatment in the computing machine through the sinusoidal grating striped of testee surface modulation; Testee moves in the field range of another ccd video camera under the control of hi-Fix kinetic control system then, carries out same operation.From the deforming stripe figure that collects, demodulate the elevation information of testee surface each point, adopt the three-dimensional reconstruction technology to recover the three-dimensional appearance characteristic of testee.According to the reconstructed results of optical grating projection visual detection unit to testee; The testee pose is discerned automatically; Planning white light scanning interferometer measuring route; Automatically the more accurate white light scanning interferometer gauge head of guiding carries out the nano-precision scanning survey to workpiece local detail characteristic, and image collecting device obtains interference fringe picture, gathers the back and is transferred to by capture card and carries out subsequent treatment in the computing machine; From interference fringe picture, demodulate the relative height information of measured zone, obtain the three-dimensional appearance data of measured zone.The data that optical grating projection visual detection unit and white light scanning interferometer measuring unit are recorded accurately measure the three-dimensional appearance characteristic of freeform optics surface through multisensor mass data blending algorithm and corresponding error separating and indemnifying measure.
Claims (8)
1. a freeform optics surface three-dimensional appearance high precision non-contact measurement method is characterized in that, may further comprise the steps:
Realize the testee three-degree-of-freedom motion by means of the hi-Fix kinetic control system;
Use the optical grating projection device to testee surface projection grating fringe; Obtain deforming stripe figure by optical grating projection vision-based detection image collecting device through the testee surface modulation; Send in the computing machine after subsequent treatment, recover the testee three-dimensional surface shape;
According to the testee three-dimensional surface shape that recovers; Carrying out the testee pose discerns automatically; Planning white light scanning interferometer measuring route, the more accurate white light scanning interferometer gauge head of guiding carries out the nano-precision scanning survey to the testee local feature automatically, obtains interference fringe picture by white light scan image harvester; Send in the computing machine through subsequent treatment, obtain the three-dimensional appearance data of measured zone;
The data that optical grating projection vision-based detection and white light scanning interferometer are measured are through multisensor mass data blending algorithm and corresponding error separating and indemnifying measure, accurately measure the three-dimensional appearance characteristic of complex curved surface parts such as freeform optics surface.
2. the method for claim 1; It is characterized in that; The hi-Fix kinetic control system is made up of high precision electricity driving displacement platform, high precision electric rotating platform and position, the electronic angle of high precision platform, realizes three-degree-of-freedom motion by means of this platform control testee.
3. the method for claim 1; It is characterized in that; Optical grating projection vision-based detection image collector is changed to two Scientific Grade numeral ccd video cameras, and two Scientific Grade numeral ccd video cameras are placed with optical grating projection device center symmetry along the high precision electricity driving displacement platform axis direction of hi-Fix kinetic control system.
4. the method for claim 1; It is characterized in that; The optical grating projection device is to testee surface projection grating fringe, is the adjustable sinusoidal grating striped of amplitude, phase place and projecting direction, cosine grating fringe, a kind of in two kinds of grating fringes that frequency is different with direction the composite grating striped, Moire fringe, gray-coded grating fringe and the chromatic grating striped that are combined to form.
5. the method for claim 1; It is characterized in that; White light scanning interferometer gauge head adopts the micro-interference object lens; Adopt the white light source irradiation during scanning, is connected through breakout box between micro-interference object lens and optical imaging system, through a High Precision Piezoelectric Ceramic steady arm drive micro-interference object lens completion vertical scanning; The inclination of micro-interference objective lens optical axis, hi-Fix kinetic control system are driven the testee along continuous straight runs accomplish horizontal scanning, receive interference fringe picture through optical imaging system by white light scan image harvester by the mode of fixed step size motion.
6. a freeform optics surface three-dimensional appearance high precision non-contact measurement device is characterized in that, is made up of hi-Fix kinetic control system, optical grating projection visual detection unit, white light scanning interferometer measuring unit and computing machine;
The hi-Fix kinetic control system is made up of high precision electricity driving displacement platform, high precision electric rotating platform and position, the electronic angle of high precision platform, realizes three-degree-of-freedom motion by means of this platform control testee;
The optical grating projection visual detection unit is made up of optical grating projection device, image collecting device; The grating fringe that is produced by computing machine projects to the surperficial deforming stripe that forms of testee through the optical grating projection device; Testee arrives in the field range of image collecting device along the high precision displacement platform motion; Testee moves under high precision angle position platform and the effect of high precision rotation platform; Testee is rotated a certain angle, so that received with best mode by image collecting device through the deforming stripe figure of testee surface modulation;
White light scanning interferometer measuring unit is made up of micro-interference object lens, optical imaging system, white light source and image collecting device; The micro-interference object lens are used for: drive the micro-interference object lens through a High Precision Piezoelectric Ceramic steady arm and accomplish vertical scanning; With the micro-interference objective lens optical axis tilt, the hi-Fix kinetic control system drives the testee along continuous straight runs and accomplishes horizontal scanning by the mode of fixed step size motion, and be connected through breakout box between optical imaging system;
Computing machine is used for: produce grating fringe; Deforming stripe figure by receiving recovers the testee three-dimensional surface shape; To the needs testee local region information of precision measurement more; Select suitable white light scanning interferometer metering system; Planning white light scanning interferometer measuring route guides white light scanning interferometer gauge head that the testee local feature is carried out the nano-precision scanning survey automatically; The data that optical grating projection visual detection unit and white light scanning interferometer measuring unit are measured accurately measure the three-dimensional appearance characteristic of freeform optics surface complex curved surface parts through multisensor mass data blending algorithm and corresponding error separating and indemnifying measure.
7. device as claimed in claim 6; It is characterized in that; The image collector of optical grating projection visual detection unit is changed to two Scientific Grade numeral ccd video cameras, and two Scientific Grade numeral ccd video cameras are placed with the optical grating projection device center symmetry of optical grating projection visual detection unit along high precision electricity driving displacement platform axis direction.
8. device as claimed in claim 6 is characterized in that, the optical grating projection device is the LCD LCDs, and the LCD LCDs adopts the downward mode of delivery of level.
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| PCT/CN2012/073019 WO2012155688A1 (en) | 2011-05-18 | 2012-03-26 | Optical free surface 3d profile high-precision non-contact measurement method and device |
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