CN102937418B - A kind of scan-type object surface three-dimensional shape measurement method and device - Google Patents
A kind of scan-type object surface three-dimensional shape measurement method and device Download PDFInfo
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Abstract
A kind of scan-type object surface three-dimensional shape measurement device, this device is made up of measuring head, displacement platform, computing machine, and computing machine is connected with measuring head and displacement platform respectively by data line; Wherein, measuring head is made up of laser instrument, scanister and imaging device, keeps predetermined angle between laser instrument and the optical axis of imaging device, is positioned over the homonymy of scanister; Scanister comprises motor, multiple surface rotating mirror, angular encoder, driven by motor multiple surface rotating mirror and angular encoder High Rotation Speed; Imaging device comprises imaging len and camera.A kind of scan-type object surface three-dimensional shape measurement method, it has three large steps.This measuring method has that speed is fast, measurement range is large, precision advantages of higher, can be used for the measuring three-dimensional morphology of general body surface.
Description
Technical field
The present invention relates to a kind of scan-type object surface three-dimensional shape measurement method and device, the ultimate principle of this device utilizes laser triangulation, can realize noncontact optical measurement, can be used for the measuring three-dimensional morphology of general body surface.The invention belongs to optical three-dimensional measurement technical field.
Background technology
Laser triangulation, as typical non-contact optical initiatively method for three-dimensional measurement, is widely used in the numerous areas such as measuring three-dimensional morphology, reverse-engineering and quality testing.Laser triangulation can only be measured a point at every turn, therefore needs to take some measures the topography measurement realized whole object.Common measure comprises: beam flying, ohject displacement and beam flying and the method such as ohject displacement is combined.Common beam flying mode comprises: vibration mirror scanning method, AOD acousto-optical device scanning method, multiple surface rotating mirror scanning method etc.Vibration mirror scanning method sweep velocity is restricted, and the sweep limit of AOD acousto-optical device scanning method is less, all cannot realize high-velocity scanning on a large scale simultaneously.
The present invention uses multiple surface rotating mirror to beam flying, and the motion of binding object simultaneously achieves high-velocity scanning on a large scale and measures.
Summary of the invention
The object of the present invention is to provide a kind of beam flying based on laser triangulation to move with object the object surface three-dimensional shape measurement device combined, this measurement mechanism can realize at a high speed, on a large scale, high precision object surface three-dimensional shape measurement.
1) a kind of scan-type object surface three-dimensional shape measurement of the present invention device, it is made up of measuring head, computing machine and displacement platform, and the position annexation between them is that computing machine is connected with measuring head and displacement platform respectively by data line.
Described measuring head is made up of laser instrument, scanister and imaging device, and the position annexation between them keeps predetermined angle between laser instrument and the optical axis of imaging device, is positioned over the homonymy of scanister.This laser instrument is visible light semiconductor laser.This scanister is made up of motor, multiple surface rotating mirror, angular encoder; Relation is therebetween: driven by motor multiple surface rotating mirror and angular encoder High Rotation Speed; Utilize the characteristic of multiple surface rotating mirror, achieve the high speed periodic scan on a large scale to moving object cross section, direction of scanning is vertical with movement direction of object; Utilize angular encoder, the angle of laser beam deflection can be read in real time.This motor is high-speed servo motor; This multiple surface rotating mirror is the high precision multiple surface rotating mirror of customization; This angular encoder is high precision incremental optical-electricity encoder; This imaging device is made up of lens and camera, and relation is therebetween: in order to assurance device has the larger depth of field, and laser beam, angle between camera imaging plane and optical axis meet certain condition (see Fig. 1).Specifically describe as follows: set the focal length of lens as f, laser spot A is the picture point A ' of m, A to lens distance is n to lens distance; Laser beam, imaging plane and optical axis included angle are respectively α, β; Imaging device light path meets the following conditions:
m·tanα=n·tanβ
These lens are high-quality optical glass lens; This camera is industrial digital camera.
Described computing machine is good digital computing machine; Computing machine receives the view data from camera, the pivoting angle data from angular encoder and the angular movement speed data from displacement platform; Computing machine processes view data, extracts the position of picture point, then calculates the three-dimensional appearance of object under test according to image point position, the anglec of rotation, movement velocity.
Described displacement platform is high-precision electric displacement platform.
As a kind of noncontact optical measurement method, the measurement mechanism light channel structure of invention is as described below: the light that laser instrument sends projects on object under test through the reflection of multiple surface rotating mirror, there is diffuse reflection in laser spot, reflected light enters imaging device imaging through multiple surface rotating mirror reflection on object.This light channel structure can realize synchronous scanning, and when namely multiple surface rotating mirror rotates, the visual field of camera can with laser beam synchronous scanning.The advantage of synchronous scanning is that instantaneous field of view by reducing camera is to improve measuring accuracy, and does not affect the overall measurement range of device.The ultimate principle of the measurement mechanism of invention is laser triangulation (see Fig. 2).The depth information of the angle change calculations tested point that laser triangulation is produced relative to optical reference line skew by tested point, that is: the laser spot imaging on imaging device measuring targets, according to the position of picture point, calculates the depth information of tested point.Again by the segmentation to picpointed coordinate, high accuracy depth information can be obtained.Owing to can obtain the depth information of a point at every turn, the present invention realizes the scanning to object by the method that beam flying combines with object of which movement.The azimuth information of tested point can be obtained from the anglec of rotation of multiple surface rotating mirror and the translational speed of displacement platform, calculate the three-dimensional appearance of body surface according to the depth information of each tested point and azimuth information.
2) a kind of scan-type object surface three-dimensional shape measurement method of the present invention, the method concrete steps are as follows:
Step one: measuring head is arranged on above displacement platform, testee is positioned on displacement platform; Adjustment measuring head attitude, make from the direction of scanning of measuring head outgoing beam and the direction of motion of displacement platform vertical.The height of measuring head can regulate according to the requirement of the size of object under test and measuring accuracy.
Step 2: computing machine controls displacement platform setting in motion; To measuring head energising, make the laser instrument in measuring head, scanister and imaging device in running order.That is, driven by motor multiple surface rotating mirror high-speed rotation, angular encoder measures the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after multiple surface rotating mirror reflection; Camera real-time image acquisition.
Step 3: computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; From the speed data of displacement platform received bit moving stage; Computing machine goes out the three-dimensional appearance data of object under test according to the data real-time resolving received, and completes measurement.
The measuring process of device is: displacement platform drives object under test rectilinear motion, and multiple surface rotating mirror is high-speed rotation under the drive of motor; The light that laser instrument sends is to object periodic scan after multiple surface rotating mirror reflection, and direction of scanning is vertical with movement direction of object; The light of laser spot reflection enters imaging device imaging through multiple surface rotating mirror reflection; Computing machine receives the view data of camera, the angle-data of angular encoder, displacement platform move fast data, automatically calculates the three-dimensional appearance data of object.
As shown in Figure 3, true origin O is based upon on measuring head in surving coordinate system, and Z axis is parallel with displacement platform direction of motion, and X-axis is parallel with displacement platform plane, sets up right-handed coordinate system.Measured point P to O puts distance and is designated as d, and three-dimensional coordinate is designated as (x, y, z).Specific formula for calculation is:
z=vt
Wherein, p is the picpointed coordinate of the laser spot imaging being incident upon P point, a, b, θ
1, θ
2the structural parameters of measuring head,
for the deflection angle of multiple surface rotating mirror, v is displacement platform translational speed, t from measure the time interval of measuring P point.
Advantage and effect: the major advantage of measurement mechanism of the present invention is that sweep velocity is fast, scope large, and have the larger depth of field, measuring accuracy is high.The advantage of this method is simple to operate, needs manual intervention hardly.
Accompanying drawing explanation
Fig. 1 is the position relationship between the laser beam of lens place plane, camera imaging plane and outgoing.
Fig. 2 is laser triangulation schematic diagram.
Fig. 3 is surving coordinate system.
Fig. 4 is apparatus structure block diagram.Wherein, solid line boxes represents measuring head, and black line represents that machinery or electrical equipment connect, and dotted arrow represents the light of measuring head outgoing, and dash-dot arrows represents the light of measuring head incidence.
In figure, symbol description is as follows:
A laser spot; A ' laser spot is imaging point on camera; α laser beam and optical axis included angle; β camera imaging plane and optical axis included angle; M laser spot A is to lens distance; N picture point A ' is to lens distance;
the deflection angle of multiple surface rotating mirror; X-coordinate system X-axis; Y-coordinate system Y-axis; Z coordinate system Z axis; O coordinate origin; P measured point.
1 laser instrument; 2 multiple surface rotating mirrors; 3 imaging lens; 4 cameras; 5 motors; 6 angular encoders; 7 computing machines; 8 displacement platforms; 9 imaging devices; 10 scanister; 11 measuring heads; 12 objects under test.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of measurement mechanism is described.
1) as shown in Figure 4, a kind of scan-type object surface three-dimensional shape measurement of the present invention device, it is made up of measuring head, computing machine and displacement platform, and the position annexation between them is that computing machine is connected with measuring head and displacement platform respectively by data line.
Described measuring head is made up of laser instrument, scanister and imaging device, and the position annexation between them keeps predetermined angle between laser instrument and imaging device, and be positioned over the homonymy of scanister.
This laser instrument is visible light semiconductor laser.This scanister is made up of motor, multiple surface rotating mirror, angular encoder; Relation is therebetween: driven by motor multiple surface rotating mirror and angular encoder High Rotation Speed; Utilize the characteristic of multiple surface rotating mirror, achieve the high speed periodic scan on a large scale to moving object cross section, direction of scanning is vertical with movement direction of object; Utilize angular encoder, the angle of laser beam deflection can be read in real time.This motor is high-speed servo motor; This multiple surface rotating mirror is the high precision multiple surface rotating mirror of customization; This angular encoder is high precision incremental optical-electricity encoder; This imaging device is made up of lens and camera, and relation is therebetween: in order to assurance device has the larger depth of field, and laser beam, angle between camera imaging plane and optical axis meet certain condition (see Fig. 1).Specifically describe as follows: set the focal length of lens as f, laser spot A is the picture point A ' of m, A to lens distance is n to lens distance; Laser beam, imaging plane and optical axis included angle are respectively α, β; Imaging device light path meets the following conditions:
m·tanα=n·tanβ
These lens are high-quality optical glass lens; This camera is industrial digital camera.
Described computing machine is good digital computing machine; Computing machine receives the view data from camera, the pivoting angle data from angular encoder and the angular movement speed data from displacement platform; Computing machine processes view data, extracts the position of picture point, then calculates the three-dimensional appearance of object under test according to image point position, the anglec of rotation, movement velocity.
Described displacement platform is high-precision electric displacement platform.
As a kind of noncontact optical measurement method, the measurement mechanism light channel structure of invention is as described below: the light that laser instrument sends projects on object under test through the reflection of multiple surface rotating mirror, there is diffuse reflection in laser spot, reflected light enters imaging device imaging through multiple surface rotating mirror reflection on object.This light channel structure can realize synchronous scanning, and when namely multiple surface rotating mirror rotates, the visual field of camera can with laser beam synchronous scanning.The advantage of synchronous scanning is that instantaneous field of view by reducing camera is to improve measuring accuracy, and does not affect the overall measurement range of device.The ultimate principle of the measurement mechanism of invention is laser triangulation (see Fig. 2).The depth information of the angle change calculations tested point that laser triangulation is produced relative to optical reference line skew by tested point, that is: the laser spot imaging on imaging device measuring targets, according to the position of picture point, calculates the depth information of tested point.Again by the segmentation to picpointed coordinate, high accuracy depth information can be obtained.Owing to can obtain the depth information of a point at every turn, the present invention realizes the scanning to object by the method that beam flying combines with object of which movement.The azimuth information of tested point can be obtained from the anglec of rotation of multiple surface rotating mirror and the translational speed of displacement platform, calculate the three-dimensional appearance of body surface according to the depth information of each tested point and azimuth information.
2) a kind of scan-type object surface three-dimensional shape measurement method of the present invention, the method concrete steps are as follows:
Step one: measuring head is arranged on above displacement platform, testee is positioned on displacement platform; Adjustment measuring head attitude, make from the direction of scanning of measuring head outgoing beam and the direction of motion of displacement platform vertical.The height of measuring head can regulate according to the requirement of the size of object under test and measuring accuracy.
Step 2: computing machine controls displacement platform setting in motion; To measuring head energising, make the laser instrument in measuring head, scanister and imaging device in running order.That is, driven by motor multiple surface rotating mirror high-speed rotation, angular encoder measures the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after multiple surface rotating mirror reflection; Camera real-time image acquisition.
Step 3: computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; From the speed data of displacement platform received bit moving stage; Computing machine goes out the three-dimensional appearance data of object under test according to the data real-time resolving received, and completes measurement.
The measuring process of device is: displacement platform drives object under test rectilinear motion, and multiple surface rotating mirror is high-speed rotation under the drive of motor; The light that laser instrument sends is to object periodic scan after multiple surface rotating mirror reflection, and direction of scanning is vertical with movement direction of object; The light of laser spot reflection enters imaging device imaging through multiple surface rotating mirror reflection; Computing machine receives the view data of camera, the angle-data of angular encoder, displacement platform move fast data, automatically calculates the three-dimensional appearance data of object.
As shown in Figure 3, true origin O is based upon on measuring head in surving coordinate system, and Z axis is parallel with displacement platform direction of motion, and X-axis is parallel with displacement platform plane, sets up right-handed coordinate system.Measured point P to O puts distance and is designated as d, and three-dimensional coordinate is designated as (x, y, z).Specific formula for calculation is:
z=vt
Wherein, p is the picpointed coordinate of the laser spot imaging being incident upon P point, a, b, θ
1, θ
2the structural parameters of measuring head,
for the deflection angle of multiple surface rotating mirror, v is displacement platform translational speed, t from measure the time interval of measuring P point.
Before measurement, first measuring head is arranged on above displacement platform, adjustment measuring head attitude, make from the direction of scanning of measuring head outgoing beam and the direction of motion of displacement platform vertical.The height of measuring head can regulate according to the requirement of the size of object under test and measuring accuracy.
To measuring head energising, make the laser instrument in measuring head, scanister and imaging device in running order.That is, driven by motor multiple surface rotating mirror high-speed rotation, angular encoder measures the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after multiple surface rotating mirror reflection; Camera real-time image acquisition.
Be held in place by object under test in moving stage, displacement platform drives object under test motion, starts to measure.
Faced by the laser scanning of measuring head outgoing, object under test carries out one-dimensional scanning, and displacement platform drives object under test motion to define two-dimensional scan.
Computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; From the speed data of displacement platform received bit moving stage; Computing machine goes out the three-dimensional appearance data of object under test according to the data real-time resolving received, and completes measurement.
Claims (2)
1. a scan-type object surface three-dimensional shape measurement device, is characterized in that: it is made up of measuring head, computing machine and displacement platform, and computing machine is connected with measuring head and displacement platform respectively by data line;
Described measuring head is made up of laser instrument, scanister and imaging device, keeps predetermined angle between laser instrument and the optical axis of imaging device, is positioned over the homonymy of scanister; This laser instrument is visible light semiconductor laser, and this scanister is made up of motor, multiple surface rotating mirror, angular encoder; Driven by motor multiple surface rotating mirror and angular encoder rotate; Utilize the characteristic of multiple surface rotating mirror, achieve the periodic scan to moving object cross section, direction of scanning is vertical with movement direction of object; Utilize angular encoder, read the angle of laser beam deflection in real time; This motor is servomotor; This multiple surface rotating mirror is the multiple surface rotating mirror of customization; This angular encoder is incremental optical-electricity encoder; This imaging device is made up of lens and camera, and in order to assurance device has the depth of field, laser beam, angle between camera imaging plane and optical axis meet predetermined condition; Specifically describe as follows: set the focal length of lens as f, laser spot A is the picture point A ' of m, A to lens distance is n to lens distance; Laser beam, imaging plane and optical axis included angle are respectively α, β; Imaging device light path meets the following conditions:
m·tanα＝n·tanβ
These lens are optical glass lens; This camera is industrial digital camera;
Described computing machine is digital machine; Computing machine receives the view data from camera, the pivoting angle data from angular encoder and the angular movement speed data from displacement platform; Computing machine processes view data, extracts the position of picture point, then calculates the three-dimensional appearance of object under test according to image point position, the anglec of rotation, movement velocity;
Described displacement platform is electricity driving displacement platform.
2. a scan-type object surface three-dimensional shape measurement method, the method concrete steps are as follows:
Step one: measuring head is arranged on above displacement platform, testee is positioned on displacement platform; Adjustment measuring head attitude, make from the direction of scanning of measuring head outgoing beam and the direction of motion of displacement platform vertical, the height of measuring head regulates according to the size of object under test and the requirement of measuring accuracy;
Step 2: computing machine controls displacement platform setting in motion; To measuring head energising, make the laser instrument in measuring head, scanister and imaging device in running order; That is, driven by motor multiple surface rotating mirror rotates, and angular encoder measures the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after multiple surface rotating mirror reflection; Camera real-time image acquisition;
Step 3: computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; From the speed data of displacement platform received bit moving stage; Computing machine goes out the three-dimensional appearance data of object under test according to the data real-time resolving received, and completes measurement.
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