CN102853786B - Apparatus and method for detecting flatness - Google Patents

Apparatus and method for detecting flatness Download PDF

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Publication number
CN102853786B
CN102853786B CN201210319325.7A CN201210319325A CN102853786B CN 102853786 B CN102853786 B CN 102853786B CN 201210319325 A CN201210319325 A CN 201210319325A CN 102853786 B CN102853786 B CN 102853786B
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China
Prior art keywords
image
laser
module
flatness
examining
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CN201210319325.7A
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Chinese (zh)
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CN102853786A (en
Inventor
程俊
陶大程
沈三明
姜军
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深圳先进技术研究院
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Abstract

The invention discloses an apparatus for detecting flatness, which comprises a laser module for emitting linear laser, a sensing module which is used for acquiring multiple detecting images when the laser radiates on different positions of an object to be detected, an image processing module which is used for obtaining multiple laser images, an offset calculating module which is used for calculating image offsets of multiple points on the laser images corresponding to a preset reference surface, a displacement calculating module which is used for calculating the actual offset according to the image offsets and a preset algorithm, a figure forming module which is used for establishing waveform figures corresponding to the various laser images according to the actual offsets, a calculating module which is used for adding the multiple waveform figures to obtain a detecting curve, a flatness calculating module which is used for comparing the detecting curve with a preset standard carve to obtain the flatness of the object to be detected. Furthermore, the invention discloses a corresponding method. According to the apparatus and the method, the flatness can be detected by the optical principle and simple three-dimensional shaping data treatment. Compared with the conventional technology, the apparatus and the method are less in calculation amount and shorter in detection duration.

Description

Flatness detecting device and method
Technical field
The present invention relates to optical measuring technique, particularly relate to flatness detecting device and method.
Background technology
The measurement of body form has strong demand in industry manufacture field, and particularly contactless metering system, all has a wide range of applications in many fields such as precision manufacture, Aero-Space, military affairs.To the measurement of body form, can be divided into contact and contactless measuring method.Contact type measurement is that measuring head and surface of the work carry out contact measurement, along workpiece shape, carries out scanning motion.Its shortcoming is easily measured surface to be caused to damage in various degree.Due to the development of laser measuring technique, non-contact measurement has become main flow.
In traditional detection technology, have a kind of ultrahigh speed real-time three-dimensional measuring device and method, this measurement mechanism comprises: area array camera, one or more laser displacement sensor; This measuring method comprises: utilize laser displacement sensor, area array camera and plane target drone to obtain three-dimensional measurement reference point and space line equation, datum mark based on obtained and space line equation, according to the measured object displacement recording, calculate the tested luminous point of measured object in diverse location and complete the ultrahigh speed real-time three-dimensional of measured object is measured at the coordinate under global coordinate system.
Detection system about workpiece flatness is mostly based on three-dimensional model at present, causes calculated amount large, consuming time more.
Summary of the invention
Based on this, be necessary to provide a kind of flatness detecting device and the method that calculated amount is less.
A flatness detecting device, comprising: carrying platform, driver module, laser module, sensing module, image processing module, calculations of offset module, displacement computing module, composition module, statistical module and flatness computing module,
Described carrying platform is used for carrying examining object;
Described driver module is used for driving described carrying platform to move, to drive described examining object to move;
Described laser module is for launching linear laser to described carrying platform;
Described sensing module is for obtaining several detected image that described linear laser is radiated at described examining object diverse location;
Described image processing module is for extracting and obtain multi-stripe laser image from described several detected image respectively;
Described calculations of offset module is for calculating on described laser image each with respect to the image shift amount of preset reference face;
Described displacement computing module, according to described image shift amount and the preset algorithm of each point on described laser image, calculates the real offset of each point on described laser image;
Described composition module, sets up the oscillogram corresponding with described each laser image for the described real offset of each point according to described each laser image;
Described statistical module, for described a plurality of oscillograms are added, obtains a detection curve;
Described flatness computing module, for by described detection curve and default typical curve comparison, obtains the flatness of described examining object.
In one of them embodiment, first described image processing module obtains the image of predeterminable area from described detected image, then from the image of predeterminable area, extracts described laser image.
In one of them embodiment, described laser module comprises laser instrument and go out light microscopic, and described laser instrument is used for launching linear laser, and is gone out light microscopic and shone out by described; Described sensing module includes optical lens and image-forming component, and described laser lines carry out imaging by described light inlet lens lighting to described image-forming component,
Definition datum face real offset is z, in laser image, the image shift amount of certain point is z', suppose a be laser beam optical axis with the intersection point that receives optical axis to described in enter the distance of optical lens, b enters optical lens to the distance of described image-forming component described in being, θ 1 is the angle between laser beam optical axis and reception optical axis, and so described preset algorithm is as follows:
z = az ′ cos θ 1 b sin θ 1 - z ′ cos θ 1 .
In one of them embodiment, described default typical curve is usingd standard workpiece as described examining object, and obtains by the identical mode that obtains of described detection curve.
In one of them embodiment, described flatness computing module is for adding up the quantity that is greater than default typical curve on described detection curve and surpasses the point of pre-set threshold value, and using it always counting as flatness numerical value divided by detection curve.
A measurement method of planeness, comprises the steps:
Driving examining object moves;
To described examining object transmitting linear laser;
Obtain several detected image that described linear laser is radiated at described examining object diverse location;
From described several detected image, extract and obtain multi-stripe laser image respectively;
Calculate on described laser image each with respect to the image shift amount of preset reference face;
According to described image shift amount and the preset algorithm of each point on described laser image, calculate the real offset of each point on described laser image;
The described real offset of each point of described each laser image of foundation is set up the oscillogram corresponding with described each laser image;
Described a plurality of oscillograms are added, obtain a detection curve;
By described detection curve and default typical curve comparison, obtain the flatness of described examining object.
In one of them embodiment, the described step obtain multi-stripe laser image of extracting from described several detected image is respectively: first from described detected image, obtain the image of predeterminable area, then extract described laser image from the image of predeterminable area.
In one of them embodiment, described linear laser is sent by laser module, and it comprises laser instrument and go out light microscopic, and described laser instrument is used for launching linear laser, and is gone out light microscopic and shone out by described; Obtaining by sensing module of described detected image realizes, and it includes optical lens and image-forming component, and described laser lines carry out imaging by described light inlet lens lighting to described image-forming component,
Definition datum face real offset is z, in laser image, the image shift amount of certain point is z', suppose a be laser beam optical axis with the intersection point that receives optical axis to described in enter the distance of optical lens, b enters optical lens to the distance of described image-forming component described in being, θ 1 is the angle between laser beam optical axis and reception optical axis, and so described preset algorithm is as follows:
z = az ′ cos θ 1 b sin θ 1 - z ′ cos θ 1 .
In one of them embodiment, described default typical curve is usingd standard workpiece as described examining object, and obtains by the identical mode that obtains of described detection curve.
In one of them embodiment, described by described detection curve and default typical curve comparison, the step that obtains the flatness of described examining object is: add up the quantity that is greater than default typical curve on described detection curve and surpasses the point of pre-set threshold value, and using it always counting as flatness numerical value divided by detection curve.
Above-mentioned flatness detecting device and method utilize optical principle and simple two-dimentional forming data to process just can complete flatness detection, and conventional art calculated amount is less relatively, and detection time is short.
Accompanying drawing explanation
Fig. 1 is the configuration diagram of the flatness detecting device of an embodiment;
Fig. 2 is the conversion principle schematic between image shift amount and real offset;
Fig. 3 is the flow chart of steps of the measurement method of planeness of an embodiment.
Embodiment
As shown in Figure 1, it is the configuration diagram of the flatness detecting device 10 of an embodiment.Comprise: carrying platform 100, driver module 110, laser module 120, sensing module 130, image processing module 140, calculations of offset module 150, displacement computing module 160, composition module 170, statistical module 180 and flatness computing module 190.
Carrying platform 100 is for carrying examining object 20.
Driver module 110 is for driving carrying platform 100 to move, to drive examining object 20 to move.
Laser module 120 is for launching linear lasers to carrying platform 100.That is,, when examining object 20 is placed on carrying platform 100, linear laser is radiated at the surface of examining object 20.
Sensing module 130 is radiated at several detected image of examining object 20 diverse locations for obtaining described linear laser.
When examining object 20 surfaces are plane, the laser lines on it are straight line, and when examining object 20 surfaces are on-plane surface (having concavo-convex), the laser lines in the detected image that sensing module 120 is taken there will be fluctuation, i.e. curve.
Image processing module 140 is for extracting and obtain multi-stripe laser image from described several detected image respectively.
In one embodiment, first described image processing module 130 obtains the image of predeterminable area from detected image, then extracts laser image from the image of predeterminable area.Because laser image is very little in the change in location of detected image, if whole detected image is processed, calculated amount is larger.So, the mode that presets area-of-interest can greatly reduce calculated amount, accelerates detection speed.
Calculations of offset module 150 is for calculating on laser image each with respect to the image shift amount of preset reference face.
Displacement computing module 160, according to image shift amount and the preset algorithm of each point on laser image, calculates the real offset of each point on laser image.
About above-mentioned preset algorithm, please refer to Fig. 2, wherein, laser module 110 comprises laser instrument 111 and goes out light microscopic L1, and laser instrument 111 is for launching linear laser, and is irradiated on reference field 30 by going out light microscopic L1.Sensing module 120 includes optical lens L2 and image-forming component 121(as CCD).Laser lines on reference field 30 are irradiated to and on image-forming component 121, carry out imaging by entering optical lens L2.
Definition datum face 30 real offset are z, and in laser image, the image shift amount of certain point is z'.Suppose that a is laser beam optical axis with the intersection point P that receives optical axis to the distance that enters optical lens L2, b is the distance to image-forming component 121 into optical lens L2, and θ 1 is the angle between laser beam optical axis and reception optical axis.Because above-mentioned parameter is changeless given data, therefore, according to the image shift amount z' of certain point in laser image, just can obtain the real offset z of reference field 30, as follows:
z = az ′ cos θ 1 b sin θ 1 - z ′ cos θ 1 .
Composition module 170, sets up the oscillogram corresponding with each laser image for the real offset of each point according to each laser image.
Described oscillogram is a curve, and the waviness of curve represents that examining object 20 surfaces are with respect to the difference in height of index plane.
Statistical module 180, for a plurality of oscillograms are added, obtains a detection curve.
As, the coordinate of each point of oscillogram (curve) comprises X coordinate and Y coordinate, the Y coordinate of identical each point of X coordinate is added, just obtain described detection curve.
Flatness computing module 190, for by detection curve and default typical curve comparison, obtains the flatness of examining object 20.
Described default typical curve is usingd standard workpiece as examining object 20, and obtains by the identical mode that obtains of above-mentioned detection curve.
In one embodiment, flatness computing module 190 is for adding up the quantity that is greater than default typical curve on described detection curve and surpasses the point of pre-set threshold value, and using it always counting as flatness numerical value divided by detection curve.
Described pre-set threshold value scope is because workpiece has certain permissible error conventionally.
Above-mentioned flatness detecting device 10 utilizes optical principle and simple two-dimentional forming data to process just can complete flatness detection, and conventional art calculated amount is less relatively, and detection time is short.
Refer to Fig. 3, it is the flow chart of steps of the measurement method of planeness of an embodiment, comprising:
Step S301, drives examining object to move.
Step S302, to examining object transmitting linear laser.
Step S303, obtains several detected image that described linear laser is radiated at examining object diverse location.
Step S304 extracts and obtains multi-stripe laser image respectively from described several detected image.
In one embodiment, first described step S304 obtains the image of predeterminable area from detected image, then extracts laser image from the image of predeterminable area.Because laser image is very little in the change in location of detected image, if whole detected image is processed, calculated amount is larger.So, the mode that presets area-of-interest can greatly reduce calculated amount, accelerates detection speed.
Step S305, calculates on laser image each with respect to the image shift amount of preset reference face.
Step S306, according to image shift amount and the preset algorithm of each point on laser image, calculates the real offset of each point on laser image.
Described linear laser is sent by laser module, and it comprises laser instrument and go out light microscopic, and described laser instrument is used for launching linear laser, and is gone out light microscopic and shone out by described; Obtaining by sensing module of described detected image realizes, and it includes optical lens and image-forming component, and described laser lines carry out imaging by described light inlet lens lighting to described image-forming component,
Definition datum face real offset is z, in laser image, the image shift amount of certain point is z', suppose a be laser beam optical axis with the intersection point that receives optical axis to described in enter the distance of optical lens, b enters optical lens to the distance of described image-forming component described in being, θ 1 is the angle between laser beam optical axis and reception optical axis, and so described preset algorithm is as follows:
z = az ′ cos θ 1 b sin θ 1 - z ′ cos θ 1 .
Step S307, sets up the oscillogram corresponding with each laser image according to the real offset of each point of each laser image.
Step S308, is added a plurality of oscillograms, obtains a detection curve.
Step S309, by detection curve and default typical curve comparison, obtains the flatness of examining object.
Described default typical curve is usingd standard workpiece as examining object, and obtains by the identical mode that obtains of above-mentioned detection curve.
In one embodiment, step S309 is that statistics is greater than default typical curve on described detection curve and surpasses the quantity of the point of pre-set threshold value, and using it always counting as flatness numerical value divided by detection curve.
Described pre-set threshold value scope is because workpiece has certain permissible error conventionally.
Above-mentioned measurement method of planeness utilizes optical principle and simple two-dimentional forming data to process just can complete flatness detection, and conventional art calculated amount is less relatively, and detection time is short.
The above embodiment has only expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.

Claims (8)

1. a flatness detecting device, is characterized in that, comprising: carrying platform, driver module, laser module, sensing module, image processing module, calculations of offset module, displacement computing module, composition module, statistical module and flatness computing module,
Described carrying platform is used for carrying examining object;
Described driver module is used for driving described carrying platform to move, to drive described examining object to move;
Described laser module is for launching linear laser to described carrying platform;
Described sensing module is for obtaining several detected image that described linear laser is radiated at described examining object diverse location;
Described image processing module is for extracting and obtain multi-stripe laser image from described several detected image respectively;
Described calculations of offset module is for calculating on described laser image each with respect to the image shift amount of preset reference face;
Described displacement computing module, according to described image shift amount and the preset algorithm of each point on described laser image, calculates the real offset of each point on described laser image;
Described composition module, sets up the oscillogram corresponding with described each laser image for the described real offset of each point according to described each laser image;
Described statistical module, for described a plurality of oscillograms are added, obtains a detection curve;
Described flatness computing module, for by described detection curve and default typical curve comparison, obtains the flatness of described examining object;
Described laser module comprises laser instrument and go out light microscopic, and described laser instrument is used for launching linear laser, and is gone out light microscopic and shone out by described; Described sensing module includes optical lens and image-forming component, and described laser lines carry out imaging by described light inlet lens lighting to described image-forming component,
Definition datum face real offset is z, in laser image, the image shift amount of certain point is z', suppose a be laser beam optical axis with the intersection point that receives optical axis to described in enter the distance of optical lens, b enters optical lens to the distance of described image-forming component described in being, θ 1 is the angle between laser beam optical axis and reception optical axis, and so described preset algorithm is as follows:
z = a z ′ cos θ 1 b sin θ 1 - z ′ cos θ 1 .
2. flatness detecting device according to claim 1, is characterized in that, first described image processing module obtains the image of predeterminable area from described detected image, then from the image of predeterminable area, extracts described laser image.
3. flatness detecting device according to claim 1, is characterized in that, described default typical curve is usingd standard workpiece as described examining object, and obtains by the identical mode that obtains of described detection curve.
4. flatness detecting device according to claim 1, it is characterized in that, described flatness computing module is for adding up the quantity that is greater than default typical curve on described detection curve and surpasses the point of pre-set threshold value, and using it always counting as flatness numerical value divided by detection curve.
5. a measurement method of planeness, is characterized in that, comprises the steps:
Driving examining object moves;
To described examining object transmitting linear laser;
Obtain several detected image that described linear laser is radiated at described examining object diverse location;
From described several detected image, extract and obtain multi-stripe laser image respectively;
Calculate on described laser image each with respect to the image shift amount of preset reference face;
According to described image shift amount and the preset algorithm of each point on described laser image, calculate the real offset of each point on described laser image;
The described real offset of each point of described each laser image of foundation is set up the oscillogram corresponding with described each laser image;
Described a plurality of oscillograms are added, obtain a detection curve;
By described detection curve and default typical curve comparison, obtain the flatness of described examining object;
Described linear laser is sent by laser module, and it comprises laser instrument and go out light microscopic, and described laser instrument is used for launching linear laser, and is gone out light microscopic and shone out by described; Obtaining by sensing module of described detected image realizes, and it includes optical lens and image-forming component, and described laser lines carry out imaging by described light inlet lens lighting to described image-forming component,
Definition datum face real offset is z, in laser image, the image shift amount of certain point is z', suppose a be laser beam optical axis with the intersection point that receives optical axis to described in enter the distance of optical lens, b enters optical lens to the distance of described image-forming component described in being, θ 1 is the angle between laser beam optical axis and reception optical axis, and so described preset algorithm is as follows:
z = a z ′ cos θ 1 b sin θ 1 - z ′ cos θ 1 .
6. measurement method of planeness according to claim 5, it is characterized in that, the described step obtain multi-stripe laser image of extracting from described several detected image is respectively: first from described detected image, obtain the image of predeterminable area, then extract described laser image from the image of predeterminable area.
7. measurement method of planeness according to claim 5, is characterized in that, described default typical curve is usingd standard workpiece as described examining object, and obtains by the identical mode that obtains of described detection curve.
8. measurement method of planeness according to claim 5, it is characterized in that, described by described detection curve and default typical curve comparison, the step that obtains the flatness of described examining object is: add up the quantity that is greater than default typical curve on described detection curve and surpasses the point of pre-set threshold value, and using it always counting as flatness numerical value divided by detection curve.
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