CN1115546C - Surface three-dimensional appearance testing method and equipment - Google Patents
Surface three-dimensional appearance testing method and equipment Download PDFInfo
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- CN1115546C CN1115546C CN99127007A CN99127007A CN1115546C CN 1115546 C CN1115546 C CN 1115546C CN 99127007 A CN99127007 A CN 99127007A CN 99127007 A CN99127007 A CN 99127007A CN 1115546 C CN1115546 C CN 1115546C
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Abstract
The present invention relates to a method and a device for detecting the surface form of an object to be measured. The device comprises an optical path system, a focusing and scanning system and a controlling and data processing system. An optical path for illumination generates a light band. The light band is received by a receiving and imaging optical path, and subsequently imaged on an area array CCD video camera, and a two-dimensional image is obtained. After the optical path system is focused by the focusing and scanning system, and computer demands are received, the optical path system moves for a displacement, and another two-dimensional image is obtained. The operation is repeatedly carried out until scanning is completed. The controlling and data processing system comprises an image card and a computer. After the computer receives multiple digital signals of two-dimensional images, which are converted by the image card, three-dimensional images are obtained after computer processing.
Description
Technical field
The present invention relates to a kind of detection method and device that is used to measure the object under test surface topography.
Technical background
The present various pick-up units that are used to measure the object under test three-dimensional surface shape, can be divided into two big classes, one class is that traditional two-dimentional contact pin type contourgraph is added that one dimension is traversing, promptly after two-dimensional silhouette of measurement, two-dimensional silhouette is surveyed in corresponding displacement of translation again one time, comprehensively repeatedly measures and forms three-dimensional testing result.This method measuring accuracy height, antijamming capability is strong, but measuring speed is slower, and device is complicated, and its detection head scratches the measured piece surface easily, can't carry out the measurement on high-quality and soft material surface.Another kind of is the non-contact measurement method, wherein based on optical measurement, measuring method is very abundant: laser triangulation, out of focus detection method, laser phase shift interference method, scanning white light interferometric method, or the like, these optical measuring methods have overcome the shortcoming of contact contourgraph, have improved measuring speed and measuring accuracy.Chinese patent CN1179535A discloses a kind of three-dimensional measuring apparatus and method that is used for surperficial parts profiles such as testing circuit plate.This method is beaten with laser beam and reflex to the detected material surface on polygon mirror, drive polygon mirror and object to be detected, make light moving along y-axis shift along X-axis and testee, the image utilization principle of triangulation that obtains after the testee reflection can be determined the concavo-convex amount on testee surface.CN1177733A discloses a kind of incident angle of conversion directional light, to obtain the method for largest light intensity.Use this method will make the measuring process complexity, Measuring Time is long.The three-dimensional detection device of utilization interference of light principle, its total shortcoming are very high to the measurement environment requirement, and (needing vibration-isolating platform etc. such as measurement), so poor anti jamming capability is generally can only be in the metering indoor application.
Summary of the invention
The object of the present invention is to provide a kind of detection method and device of three-dimensional surface shape of light belt scan-type, this invention measuring speed is very fast, less demanding to measurement environment, the debugging of device is easy to use, is applicable to that carrying out three-dimensional surface shape in the production scene measures.
The present invention is achieved in that a kind of surface three-dimensional appearance testing method, comprise a narrow light belt on the illumination path with incident angle irradiation measured piece surface, the imaging optical path of reception and charge coupling camera are arranged in the measured piece surface, illumination path and reception imaging optical path are formed light path system, and charge coupling camera obtains a width of cloth two-dimensional silhouette image and imports computing machine through image card; Output order drove a scanning of light path system feeding step pitch after computing machine was received two-dimensional image data, made light belt move a step pitch on the measured piece surface, and charge coupling camera obtains a width of cloth two-dimensional silhouette image again and imports computing machine through image card; Repeat up to complete measured piece surface of scanning, can obtain the two-dimensional silhouette data of all scanning positions, machine obtains 3-D view after handling as calculated, the two groups of coplane light paths of optical routing that it is characterized in that light path system constitute, one group is illumination path, be used for producing a bright thin narrow light belt, shine on the measured piece, another group is for receiving imaging optical path, be used for receiving and reflect from measured piece, the light belt of reflection surface of the work micro-profile is imaged on it on surface array charge-coupled video camera; Light path system is focused, focusing can to light path system along with measured piece surface up-down adjustment, with on the measured piece be with the basal plane certain point of benchmark as basic point, the illumination light belt is focused on the measured piece; Light path system and focus control move along guide rail, and the measurement light belt scanning measured piece surface that light path system has been focused on obtains a width of cloth width of cloth two dimensional image.
In the above-mentioned surface three-dimensional appearance testing method, the two-dimensional silhouette processing method of data of the described piece image that image card is collected is: the machine digital image processing techniques obtain the image border outline data as calculated, promptly obtain the h of every bit "; " cos α/β calculates apparent surface's height h of each point then according to formula h=h, wherein h is that measured piece is certain some surface elevation of benchmark with the basal plane, h " be certain the some distance that receives the imaging optical path reception and collect through charge coupling camera; The each point apparent surface of a plurality of number images highly forms 3-D view.
Implement the device of above-mentioned surface three-dimensional appearance testing method, comprise light path system, focus control, scanister, charge coupling camera and control and data handling system, light path system comprises illumination path and receives imaging optical path, illumination path produces a narrow light belt, charge coupling camera outputs signal to control and data handling system after receiving the imaging optical path signal, control and data handling system comprise image card and computing machine, computing machine links to each other with scanister, light path system is installed on the scanister, scanister is stepper motor and driver, driving the step motor drive light path system behind the signal that the driver receiving computer sends moves, it is characterized in that illumination path is made up of the light source and the object lens that produce a narrow light belt, with the illumination path symmetry reception imaging optical path that comprises object lens is housed, the illumination path object lens comprise attachment objective and object lens, receive the imaging optical path object lens and comprise image-forming objective lens and auxiliary image-forming objective lens, on reception imaging optical path imaging surface, charge coupling camera is housed; Focus control be can to light path system along with the jacking gear of measured piece surface up-down adjustment; Scanister also comprises guide rail and leading screw, and leading screw drives light path system and focus control moves along guide rail, guide rail be set to light path system in the illumination path object lens and to receive the plane of optical axis composition of imaging optical path object lens parallel with measured piece basal plane intersecting lens.
Principle of work: surface three-dimensional appearance testing method comprises light path system, focusing and scanning system, control and data handling system.The light path of light path system has adopted light-section microscope mechanism, is made of two groups of coplane light paths, and one group is illumination path, is used for producing a bright thin narrow light belt, shines on the measured workpiece; Another group is for receiving imaging optical path, is used for receiving from measured workpiece reflecting, and the light belt of reflection surface of the work micro-profile is imaged on it on surface array charge-coupled video camera, has obtained a width of cloth two dimensional image like this.Focusing and scanning system comprise focusing and scanning, focusing be with the whole optical path system along and measured workpiece Surface Vertical direction up-down adjustment, the illumination light belt is focused on the workpiece, thereby obtains distinct image through charge coupling camera; Scanning is that the whole optical path system is moved along (with the parallel lines of the basal plane intersecting lens of illuminating ray and the focusing plane formed of direction and measured workpiece) horizontal direction by step motor drive, make the measurement light belt scanning measured workpiece surface of line focus, obtain another width of cloth two dimensional image, repeat scanning, can go out the three-dimensional microcosmic profile by two-dimentional rim(ming) light line sweep.Control and data handling system are image card and computing machine, and computing machine is coordinated total system work, and output order is given stepper motor driver behind Computer Processing one width of cloth two dimensional image.According to the resolution sizes requirement of measuring, driver can rotate with different single step step angles by the control step motor, perhaps constitutes big step angle with identical small step elongation grouping.Behind the intact piece image of charge coupling camera collection, computing machine is handled rapidly, obtain the two-dimensional silhouette at light belt edge in this time scanning, the computer control stepping circuit rotates a suitable step angle then, driving light path system one section moves, after charge coupling camera obtains piece image again, the instruction of a step angle of output rotation again after computing machine is handled rapidly, repeat like this after finish (stepper motor is covered corresponding step number), computing machine forms three-dimensional picture with all two-dimensional silhouette data processing that obtained, and can calculate the three-dimensional surface feature parameter according to surperficial each point altitude information.Also can obtain profile arithmetic average error Ra, two-dimentional roughness parameter such as maximum height of the profile Ry.
Description of drawings
Present invention is described below in conjunction with accompanying drawing, can further understand purpose of the present invention, feature and advantage.
Fig. 1 is the structural representation of three-dimensional surface shape pick-up unit embodiment of the present invention.
Fig. 2 is an embodiment of the invention light path system synoptic diagram.
Fig. 3 produces the light path synoptic diagram on light belt irradiation measured workpiece surface for embodiment of the invention illumination path.
The image that Fig. 4 collects for embodiment of the invention charge coupling camera.
Embodiment
Referring to Fig. 1, the three-dimensional surface shape pick-up unit comprises light path system, focus control 12, scanister 13, charge coupling camera 14 and control and data handling system.Light path system comprises illumination path 10 and receives imaging optical path 11, referring to Fig. 2, illumination path 10 is by light source 1, optical filter 2, condenser 3, slit 4 and attachment objective 5 and object lens 6 are formed, the white light that light source 1 produces becomes a narrow light belt through optical filter 2, condenser 3 and slit 4, becomes a narrow light belt as light source through slit after also can using laser beam expanding.Embodiment is example with the white light.Light belt is behind attachment objective 5 and object lens 6, focus on measured piece 17 surfaces with an incident angle (as miter angle), in same plane, symmetry is equipped with image-forming objective lens 9 and auxiliary image-forming objective lens 8 (becoming the position of an angle of 90 degrees with the illumination path optical axis), be incident upon on the imaging surface 7 of surface array charge-coupled video camera 14 after receiving the light belt amplification after imaging optical path 11 reflects measured piece 17, imaging surface should be positioned on the focal plane of image-forming objective lens 9, auxiliary image-forming objective lens 8.The optical imagery that charge coupling camera 14 collects is input to image card 15 through cable and carries out treatment conversion and become numerical information to be stored in computing machine 16 internal memories.
Light path system 10 is installed on focus control 12 and the scanister 13, and focus control 12 is jacking gear movably up and down, can to light path system along with measured piece 17 Surface Vertical direction up-down adjustment, the illumination light belt is focused on the measured piece 17.Scanister 13 is made up of stepper motor 20 and stepper motor driver, guide rail and leading screw 21, make stepper motor 20 rotate a suitable step angle after the instruction that stepper motor driver receiving computer 16 sends, drive light path systems and focus control 12 through leading screw 21 and move a section along guide rail and move, charge coupling camera 14 promptly obtains a width of cloth two-dimensional silhouette image again and through image card 15 input computing machines 16; Guide rail be provided with direction for light path system in illumination path object lens 6 and to receive the plane of optical axis composition of imaging optical path object lens 9 parallel with measured piece 17 basal plane intersecting lenses, guaranteed like this that light path system can scan one by one to finish whole measured piece 17 surfaces.
Reach the data disposal route referring to Fig. 3, Fig. 4 for control of the present invention and data handling system.Light source forms optical plane P through slit 4, P is tangent and reflect along the B direction with α angle and measured piece 17 surfaces, the image that collects by charge coupling camera as shown in Figure 4, at measured piece 17 is certain some A of benchmark with the basal plane, and its surface elevation is h, and it is h ' that incident ray enters the distance that A orders, receive that imaging optical path receives and be h and have following geometric relationship between "; at h, h ', h " through the distance that the A that charge coupling camera collects is ordered:
h＝h′cos?α＝h″cosα/β
Wherein β is that object lens enlargement ratio, α are incident angle.
So only require to such an extent that h " just can obtain the height value h of surfaces A point.
Image card is imported calculator memory after the image transitions of gathering is become digital signal, can easily extract the image border outline data by the computer digital image treatment technology, can obtain the h of every bit "; can calculate apparent surface's height h of each point then, so just finish the processing procedure of piece image; Afterwards, the computer instruction stepper motor driver drive stepping motor distance that makes a move, piece image under the acquisition process.
Behind the image (as 300 frames) with the intact predetermined number of certain scanning step pitch collection, (as MATLAB) becomes 3-D view with all data processing with the three-dimensional picture process software, calculate three-dimensional parameter, also can calculate two-dimensional parameter such as Ra, 10 height of nao-and micro relief Rz.
Key of the present invention is that the contour edge that will gather extracts, so the light intensity of light source can be very strong, so that more easily distinct profile and background, its interference to parasitic light neither be very sensitive.
Scanister of the present invention adopts driver, stepper motor, leading screw and guide rail to realize moving of the third dimension, because light path is simple, and compact conformation, so vibration interference to external world is insensitive, strong anti-interference performance, overall dimensions is little, is suitable for the measurement of production scene.
Claims (3)
1. surface three-dimensional appearance testing method, comprise a narrow light belt on the illumination path with incident angle irradiation measured piece surface, the imaging optical path of reception and charge coupling camera are arranged in the measured piece surface, illumination path and reception imaging optical path are formed light path system, and charge coupling camera obtains a width of cloth two-dimensional silhouette image and imports computing machine through image card; Output order drove a scanning of light path system feeding step pitch after computing machine was received two-dimensional image data, made light belt move a step pitch on the measured piece surface, and charge coupling camera obtains a width of cloth two-dimensional silhouette image again and imports computing machine through image card; Repeat up to complete measured piece surface of scanning, can obtain the two-dimensional silhouette data of all scanning positions, machine obtains 3-D view after handling as calculated, the two groups of coplane light paths of optical routing that it is characterized in that light path system constitute, one group is illumination path, be used for producing a bright thin narrow light belt, shine on the measured piece, another group is for receiving imaging optical path, be used for receiving and reflect from measured piece, the light belt of reflection surface of the work micro-profile is imaged on it on surface array charge-coupled video camera; Light path system is focused, focusing can to light path system along with measured piece surface up-down adjustment, with on the measured piece be with the basal plane certain point of benchmark as basic point, the illumination light belt is focused on the measured piece; Light path system and focus control move along guide rail, and the measurement light belt scanning measured piece surface that light path system has been focused on obtains a width of cloth width of cloth two dimensional image.
2. surface three-dimensional appearance testing method according to claim 1, the two-dimensional silhouette processing method of data that it is characterized in that piece image that image card is collected is: the machine digital image processing techniques obtain the image border outline data as calculated, promptly obtain the h of every bit "; " cos α/β calculates apparent surface's height h of each point then according to formula h=h, wherein h is that measured piece is certain some surface elevation of benchmark with the basal plane, h " be certain the some distance that receives the imaging optical path reception and collect through charge coupling camera; The each point apparent surface of a plurality of number images highly forms 3-D view.
3. device of implementing the described surface three-dimensional appearance testing method of claim 1, comprise light path system, focus control, scanister, charge coupling camera and control and data handling system, light path system comprises illumination path and receives imaging optical path, illumination path produces a narrow light belt, charge coupling camera outputs signal to control and data handling system after receiving the imaging optical path signal, control and data handling system comprise image card and computing machine, computing machine links to each other with scanister, light path system is installed on the scanister, scanister is stepper motor and driver, driving the step motor drive light path system behind the signal that the driver receiving computer sends moves, it is characterized in that illumination path is made up of the light source and the object lens that produce a narrow light belt, with the illumination path symmetry reception imaging optical path that comprises object lens is housed, the illumination path object lens comprise attachment objective and object lens, receive the imaging optical path object lens and comprise image-forming objective lens and auxiliary image-forming objective lens, on reception imaging optical path imaging surface, charge coupling camera is housed; Focus control be can to light path system along with the jacking gear of measured piece surface up-down adjustment; Scanister also comprises guide rail and leading screw, and leading screw drives light path system and focus control moves along guide rail, guide rail be set to light path system in the illumination path object lens and to receive the plane of optical axis composition of imaging optical path object lens parallel with measured piece basal plane intersecting lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN99127007A CN1115546C (en) | 1999-12-29 | 1999-12-29 | Surface three-dimensional appearance testing method and equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN99127007A CN1115546C (en) | 1999-12-29 | 1999-12-29 | Surface three-dimensional appearance testing method and equipment |
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| CN1256414A CN1256414A (en) | 2000-06-14 |
| CN1115546C true CN1115546C (en) | 2003-07-23 |
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| CN99127007A Expired - Fee Related CN1115546C (en) | 1999-12-29 | 1999-12-29 | Surface three-dimensional appearance testing method and equipment |
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