CN1325895C - Hartmann detection device for continuous sampling - Google Patents
Hartmann detection device for continuous sampling Download PDFInfo
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- CN1325895C CN1325895C CNB2004100842504A CN200410084250A CN1325895C CN 1325895 C CN1325895 C CN 1325895C CN B2004100842504 A CNB2004100842504 A CN B2004100842504A CN 200410084250 A CN200410084250 A CN 200410084250A CN 1325895 C CN1325895 C CN 1325895C
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Abstract
The present invention relates to a Hartmann detection device for continuous sampling, which is used for detecting the optical quality of a lens. The present invention is composed of a lighting system, a light beam scanning mechanism, a detected lens, an image receiving system and system controlling and data processing software. The present invention is characterized in that the lighting system is one collimating light source with an adjustable output light beam aperture; the light beam scanning mechanism is composed of a circular screen, a first stepping motor, a one-dimensional electric adjusting frame and a supporting frame; the image receiving system comprises a CCD video camera, a guide rail, a second stepping motor, a supporting frame and a computer, wherein the computer is connected with the first stepping motor, the second stepping motor, a third stepping motor and the CCD video camera through signal wires. The present invention can fully detect the detected lens, and can obtain the local error of the detected lens. The size of a sampling light aperture can be optionally regulated, and the detection wavelength is variable. The design and the machining difficulty of the lighting system are reduced, the detection efficiency is improved, and the intellectualized performance and the digitization of a Hartmann diaphragm detection method are realized.
Description
Technical field
The present invention relates to the detection of optical element quality, relate in particular to a kind of Hartmann's pick-up unit of continuous sampling.
Background technology
Hartman test is that the convergent beam by tested lens departs from the quantitative detecting method that concentric degree is determined tested lens quality.Its critical piece is an opaque Hartmann diaphragm, and the aperture that utilizes diverse location on the diaphragm is cut apart detecting light beam, with the difference of the beamlet convergent point position that obtains being radiated at tested lens zones of different.Traditional Hartmann's pick-up unit structure as shown in Figure 1, the light that light source 1 sends is through condenser 2 illumination apertures 3, thereby obtains pointolite; Aperture 3 is positioned at the front focus place of parallel light tube 4, and the light beam that is penetrated by aperture 3 shines on the Hartmann diaphragm 5 and by Hartmann diaphragm 5 and is divided into the tested lens 6 of many beamlet directives after parallel light tube 4 collimations are parallel beam.Utilize photographic means to measure the distance of beamlet center and optical axis in 7 and 8 places, obtain the aberration information of tested lens 6 at last by analysis in the position.Formerly in the technology, it is discontinuous that the aperture on the Hartmann diaphragm 5 distributes, and according to the distribution form of aperture, Hartmann diaphragm can be divided into polytypes such as radial, spiral and rectangle array formula.Wherein rectangle array formula Hartmann diaphragm structure as shown in Figure 2, the aperture on this diaphragm is positioned at the intersection point place with the respectively parallel many uniformly-spaced straight lines of two coordinate axis.
The shortcoming of above-mentioned technology formerly is:
1, can't measure local error.Because the aperture that distributes on the diaphragm is discontinuous, make that some zone can not be sampled on the tested lens surface.
2, the sampling of noncontinuity brings error to calculating.The general trapezoidal integration that adopts replaces continuous integration when calculating wave aberration, promptly
(w wherein
xBe the wavefront that is obtained by the directions X integration, d is the distance between adjacent two holes on the directions X).Because Hartmann diaphragm fixes, when tested aperture of lens hour, d is just relatively large at interval for aperture, replaces the caused error of continuous integration just to can not be ignored by trapezoidal rule.
3, aperture big or small non-adjustable on the Hartmann diaphragm measured very flexible.Promptly the sample size of beamlet bore of the size of aperture need be complementary with the focal length and the numerical aperture of tested lens, just can obtain the quite good detecting result.So formerly technology just must design Hartmann diaphragm correspondingly in order to detect the measured lens of different parameters, causes measuring very flexible.
4, parallel light tube there is very high requirement.The light beam that this matching requirements is radiated on the diaphragm is the parallel beam of large caliber and high quality, and its bore must be more than or equal to the bore of tested lens, and this has just proposed high design and processing request to parallel light tube, has improved the cost of instrument.
5, it is unique detecting light wavelength.Because the complicacy of heavy caliber parallel light tube is changed detection light source possibility hardly, therefore just can not it be detected with the operation wavelength of tested lens, causes testing result not direct.
Summary of the invention:
The objective of the invention is to overcome the shortcoming of above-mentioned technology formerly, a kind of Hartmann's pick-up unit of new continuous sampling is provided, to improve precision and the efficient that detects.
Technical solution of the present invention is as follows:
A kind of Hartmann's pick-up unit that is used for the continuous sampling of optics of lens quality testing is accepted system and system's control and data processing software by illuminator, beam flying mechanism, tested lens, image and is formed, and it is characterized in that:
Described illuminator is the adjustable collimated light source of an output beam bore;
Described beam flying mechanism is made up of circle screen, first stepper motor, the electronic adjustment rack of one dimension and support, this circle screen is placed on the described support, one side of this support fixes this first stepper motor, first step motor drive should be rotated around its axle by the circle screen, two guide rails of the electronic adjustment rack of this one dimension radially are fixed on this circle screen, one slide block is set on this guide rail, the described illuminator of carrying on this slide block, described slide block is moved on guide rail by the 3rd step motor drive;
Described image is accepted system and is comprised that ccd video camera, image accept system's guide rail, second stepper motor, image and accept system frame and computing machine, described ccd video camera is accepted system frame by image and is placed image to accept on system's guide rail, it is parallel with the optical axis of tested lens that this image is accepted the direction of system's guide rail, the ccd video camera optical axis is coaxial with the rotating shaft three of tested lens axis and circular screen, and described computing machine links to each other by signal wire with ccd video camera with first stepper motor, second stepper motor, the 3rd stepper motor.
Described circular screen preferably has a dead slot radially, two guide rails of the electronic adjustment rack of this one dimension are fixed on this circle screen along this dead slot, described slide block has been uploaded described illuminator and has been made it be positioned at this dead slot just, and described radially dead slot is the dead slot in this circle screen axle center of a mistake.
Described tested lens are in the light beam working direction of illuminator.
Hartmann's pick-up unit of continuous sampling, illuminator are installed in the beam flying mechanism, and the bore of aperture is suitable in its outgoing beam caliber size and the technology formerly; Beam flying mechanism can sway, the optical axis coincidence of its rotating shaft and tested lens; Tested lens have converging action to light beam; Image receiving system is gathered light spot image at the diverse location of picture side; System control and data processing software can be controlled illuminator along the moving radially of tested lens, and the control bundle scanning mechanism rotates on optical axis, and handles the light spot image data.
1, described illuminator is used to provide specimen beam, is made up of light source, collimation lens set, beam expanding lens group and iris.Behind the collimation of the light beam process collimation lens that light source produces, the expansion bundle and the adjusting of iris of beam expanding lens group, become high-quality parallel beam to beam size.
2, described beam flying mechanism is become with first stepper motor by circle screen, one dimension adjustment rack.Illuminator is installed on the one dimension adjustment rack, and the one dimension adjustment rack radially is installed on the circular screen along the circle screen, and the one dimension adjustment rack can make illuminator move radially along the circle screen, and stepper motor can drive circular screen and rotate around the axis.This mechanism can be used for realizing the two-dimensional scan sampling to the whole clear aperture of tested lens, and wherein two-dimensional scan refers to the scan mode that radius combines with the circumference both direction.At first adjust the one dimension adjustment rack and make illuminator from circle screen a distance, rotating shaft center, the circular screen of step motor drive rotates a circle then, so just finishes the detection to an endless belt of tested lens.The one dimension adjustment rack cooperates the sampling that has just realized tested lens optional position in the above described manner with stepper motor.
3, image receiving system comprises compositions such as ccd video camera, stepper motor, computing machine.Wherein ccd video camera is used to gather the light spot image of image space, and gives computing machine image transfer, by software image is handled.Under the initialization condition, ccd video camera is positioned at defocused with little defocusing amount.When system started working, illuminator combined with the rotation of beam flying mechanism along moving radially of tested lens and finishes sampling to the whole clear aperture of tested lens, and ccd video camera is noted these images simultaneously; Then ccd video camera under the driving of stepper motor vertically tested lens move a certain distance, more tested lens are carried out unified sampling; Repeat above-mentioned steps, up to ccd video camera till several position is finished collection.Ccd video camera is to the control that all is subjected to system software that moves radially of the rotation of the collection of image, beam flying mechanism and illuminator in whole testing process, guaranteed that the facula information that ccd video camera collects is corresponding one by one with tested lens sampled point.
4, system control and data processing software are used to control illuminator and move and the processing of testing result in the precision of the collection of the light spot image of picture side, ccd video camera axial location along the rotation of tested lens moving radially, beam flying mechanism, specimen beam.
The present invention compares with technology formerly has following advantage:
1, the outstanding feature of the present invention is to adopt fine light beam scanning mechanism, has replaced large caliber and high quality parallel light tube and the fixing Hartmann diaphragm of aperture arrangement architecture in traditional Hartmann's pick-up unit.
2, can carry out complete detection to tested lens.Continuous sampling makes each zone of tested lens to be detected, and can obtain the local error of lens.
3, reduced the error of bringing in the calculating.Illuminator can be set along tested lens single step amount of movement radially according to the different bores of tested lens, so that device can both obtain higher sample frequency to different tested lens, the error that replaces continuous integration to cause by the trapezoidal rule integration when calculating can be ignored.
4, the specimen beam caliber size can regulated at will.Can be according to the focal length of tested lens and the iris of numerical aperture adjusting illuminator, to obtain the bore of more suitable specimen beam.
5, detect Wavelength variable.Can realize making testing result direct, practical by changing the light source of different wave length under the operation wavelength of tested lens, it being detected.
6, reduced the design and the difficulty of processing of illuminator, the collimation parallel beam replaces traditional large caliber and high quality parallel beam because the present invention adopts the small-bore.
7, improve the efficient that detects, realized the intellectuality and the digitizing of Hartmann diaphragm detection method.
Description of drawings:
Fig. 1 is a technology Hartmann pick-up unit structural representation formerly.
Fig. 2 is the Hartmann diaphragm structural representation of technology employing formerly.
Fig. 3 is the structural representation of Hartmann's pick-up unit of continuous sampling of the present invention.
Fig. 4 is the lighting system structure synoptic diagram that the present invention adopts.
Fig. 5 is the beam flying mechanism structure synoptic diagram that the present invention adopts.
Fig. 6 is the system's control and data processing software process flow diagram that the present invention adopts.
Embodiment:
See also Fig. 3 earlier, Fig. 3 is the structural representation of Hartmann's pick-up unit specific embodiment of continuous sampling of the present invention.As seen from the figure, the present invention is made up of with data processing software illuminator 9, beam flying mechanism 10, tested lens 11, image receiving system 12 and system's control.Described illuminator 9 is fixed on the electronic adjustment rack 103 of one dimension in the beam flying mechanism 10, and the electronic adjustment rack 103 of one dimension is subjected to computing machine 125 controls.Described beam flying mechanism 10 is installed on the support 104, and a side of support 104 is fixed with first stepper motor 102 that is subjected to computing machine 125 controls, and beam flying mechanism 10 can rotate by the optical axis around tested lens 11 under the driving of first stepper motor 102; 11 pairs of light beams of described tested lens have converging action.Ccd video camera 121 in the described image receiving system 12 is placed on the guide rail 122 by propping up, guide rail 122 moving directions are parallel with the optical axis of tested lens 11, and second stepper motor 123 that links to each other with computing machine 125 is used to control ccd video camera 121 and moves along optical axis.The target surface of ccd video camera 121 is vertical with optical axis, and links to each other with computing machine 125 by signal wire, the light spot image that receives can be passed to computing machine 125.The control of described system is installed on the computing machine 125 with data processing software, be used to control illuminator 9 along the rotation of the moving radially of tested lens 11, beam flying mechanism 10 around optical axis, ccd video camera 121 moves along optical axis, the performance parameter of handling light spot image and calculating tested lens.
Image receiving system 12 of the present invention is made up of ccd video camera 121, guide rail 122, second stepper motor 123, support 124 and the computing machine 125 parallel with optical axis.Ccd video camera 121 places on the guide rail 122 by support 124, and stepper motor 123 is installed below support 124, and ccd video camera 121 can drive 122 motions of lower edge guide rail at second stepper motor 123.Parallel ccd video camera 121 moving directions and the optical axis coincidence of having guaranteed of guide rail 122 and optical axis, the second step motor drive ccd video camera 121 moves, and the distance between the receiving plane can accurately be measured, and has improved the precision of follow-up calculating.Ccd video camera 121 is gathered light spot image and it is passed to computing machine 125 in the testing process, by system software image is carried out rough handling and obtains the coordinate figure of beam center crossover on the ccd video camera target surface.After tested lens 11 unified detections were finished, second stepper motor, 123 driven CCD video cameras 121 moved a segment distance along optical axis, again to tested lens 11 unified samplings.Repeat said process and finished the collection of image up to ccd video camera 121 in several position.
The flow process of system of the present invention control and data processing software as shown in Figure 6, the starting condition of system before starting working is: circular screen 101, and the target surface of ccd video camera 121 all the optical axis with tested lens 11 is vertical, the rotating shaft center of beam flying mechanism 10 and the optical axis coincidence of tested lens 11, the target surface of ccd video camera 121 is positioned at a distance, desirable focal plane rear, and the optical axis of illuminator 9 outgoing beams overlaps with the rotating shaft of beam flying mechanism 10.System is as described below to the checkout procedure of tested lens 11:
(1) software control beam flying mechanism 10 rotates the θ angle around its axle, be incident upon a certain zone of tested lens 11 from the small-bore parallel beam of illuminator 9 outgoing, directive ccd video camera 121 after tested lens 11 are assembled, ccd video camera 121 passes to computing machine 125 with the light spot image that receives, software is handled image, and the central ray that obtains specimen beam is sent to the position coordinates (x on the target surface
1, y
1, z
1) (the XOY face of this coordinate system is as true origin with ccd video camera 121 first pixels of the target surface upper left corner, with vertical paper outwards is the X-axis forward being the Y-axis forward straight down in paper, with the pixel is unit, the Z axle of this coordinate system is parallel with optical axis, with ccd video camera 121 initial positions is zero point, is forward along light path conduct direction);
(2) repeating step (1) has just rotated a circle up to beam flying mechanism 10;
(3) software control second stepper motor makes illuminator move radially certain distance along tested lens 11, repeating step (1) and (2).
(4) after the whole clear aperture of tested lens 11 all is sampled, software control ccd video camera 121 moves axially a segment distance towards the opposite direction of light path, repeating step (1), (2), (3);
(5) repeat above-mentioned steps, when ccd video camera 121 had been moved 4 times, the systematic sampling process finished.The specimen beam that detect tested lens 11 same positions this moment is collected by ccd video camera 121 in 5 positions of picture side, software is handled it simultaneously, obtain the coordinate that the specimen beam central ray intersects at the target surface of these 5 positions and ccd video camera 121 respectively, be designated as respectively that the intersecting point coordinate of specimen beam central ray and target surface is designated as (x respectively when detected
1, y
1, z
1), (x
2, y
2, z
2), (x
3, y
3, z
3), (x
4, y
4, z
4), (x
5, y
5, z
5).
Last computing machine begins to carry out numerical evaluation to obtain some quality assessment parameters of tested lens 11 by software.Numerical procedure is as follows: at first with ccd video camera 121 when the Z1 of position, some coordinate figures that device obtains during to tested lens 11 certain endless belt sampling are justified with least square method and are fitted, and obtain fitting radius of circle R
1, be designated as (R
1, Z
1), then with ccd video camera 121 when other 4 positions, the coordinate figure that device obtains during to the same endless belt sampling of tested lens 11 fits, the result is designated as (R
2, Z
2), (R
3, Z
3), (R
4, Z
4) and (R
5, Z
5).These 5 points are carried out straight line with least square method fit and obtain straight-line equation Z=f (R), make R=0, solve an equation Z
0, Z
0With desirable position of focal plane difference be the average longitudinal spherical aberration of this endless belt.Use the same method and to obtain the average longitudinal spherical aberration δ L ' of tested lens 11 any endless belt.Last endless belt mean wave aberration can be by formula
Calculate, wherein f ' be the ideal of tested lens 11 as square focal length, h is the distance of endless belt from the lens center, Δ h is the distance between the adjacent endless belt.
Fig. 3 is one embodiment of the present of invention, and its concrete structure statement parameter is as follows:
The wavelength of semiconductor laser 91 is 1.06 μ m in the illuminator 9, and the beam divergence angle vertical direction is 40 °, and horizontal direction is 10 °.Collimation lens set 92 is made up of a positive lens and a negative lens, and the bore of the parallel light beam of high-quality of outgoing is Φ 2mm.Collimation lens 932 in the beam expanding lens group 903 is 5 with the ratio of the focal length of focus lamp 931, then is exaggerated 5 times by beam size after the beam expanding lens group, becomes Φ 10mm.The bore of iris 94 is continuously adjustable, and maximum caliber is Φ 15mm, and according to the parameter of tested lens, the bore that we regulate that iris makes outgoing beam is Φ 6mm.It is Φ 400mm that the circle of beam flying mechanism 10 is shielded 101 bores, the wide 20mm of the dead slot on it, and long 420mm, the axis of dead slot cross the rotating shaft center of beam flying mechanism 10.First stepper motor 102 is four phase line composite stepper motors, drives that beam flying mechanism 10 is each to rotate 0.9 ° or according to measuring the each integral multiple that rotates 0.9 ° of needs.Electronic adjustment rack 103 strokes of one dimension are 400mm, and the electronic adjustment rack 103 each illuminators 9 that drive of one dimension move 2mm (accuracy of detection that can obtain as required sets up on their own) in the sampling process.The clear aperture of tested lens 11 is Φ 300mm, and focal length is 900mm, and operation wavelength is 1.06 μ m.Ccd video camera 121 is 1/3, and " black-white CCD video camera, Pixel Dimensions are 6.5 μ m * 6.3 μ m.Second stepper motor, 123 driven CCD video cameras 121 move axially distance at every turn and are 1mm.System's control and data processing software VC++ language compilation, be installed on the computing machine 125, it is controlled ccd video camera 121 by the image pick-up card on the computing machine, by the parallel port on the computing machine 125 stepper motor in the device is sent time sequential pulse and controls.
Claims (3)
1, a kind of Hartmann's pick-up unit that is used for the continuous sampling of optics of lens quality testing, accept system (12) and system's control and data processing software by illuminator (9), beam flying mechanism (10), tested lens (11), image and form, it is characterized in that:
Described illuminator (9) is the adjustable collimated light source of an output beam bore;
Described beam flying mechanism (10) is by circle screen (101), first stepper motor (102), electronic adjustment rack of one dimension (103) and support (104) are formed, this circle screen (101) is placed on the described support (104), one side of this support (104) fixes this first stepper motor (102), first stepper motor (102) drives this circle screen (101) around its axle rotation, two guide rails (1031) of the electronic adjustment rack of this one dimension (103) radially are fixed on this circle screen (101), one slide block (1032) is set on this guide rail (1031), this slide block (1032) is gone up carrying described illuminator (9), and it is upward mobile that described slide block (1032) is driven at guide rail (1031) by the 3rd stepper motor (1033);
Described image is accepted system (12) and is comprised ccd video camera (121), image is accepted system's guide rail (122), second stepper motor (123), image is accepted system frame (124) and computing machine (125), described ccd video camera (121) is accepted system frame (124) by image and is placed image to accept on system's guide rail (122), it is parallel with the optical axis of tested lens (11) that this image is accepted the direction of system's guide rail (122), ccd video camera (121) optical axis is coaxial with the rotating shaft three of tested lens (11) optical axis and circular screen (101), described computing machine (125) and first stepper motor (102), second stepper motor (123), the 3rd stepper motor (1033) links to each other by signal wire with ccd video camera (121).
2. Hartmann's pick-up unit of continuous sampling according to claim 1, it is characterized in that described circular screen (101) has a dead slot radially, two guide rails (1031) of the electronic adjustment rack of this one dimension (103) are fixed on this circle screen (101) along this dead slot, described slide block (1032) has been uploaded described illuminator (9) and has been made it be positioned at this dead slot just, and described radially dead slot is the dead slot in this circle screen (101) axle center of a mistake.
3. Hartmann's pick-up unit of continuous sampling according to claim 1 is characterized in that the light beam working direction of described tested lens (11) in illuminator (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100842504A CN1325895C (en) | 2004-11-17 | 2004-11-17 | Hartmann detection device for continuous sampling |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100842504A CN1325895C (en) | 2004-11-17 | 2004-11-17 | Hartmann detection device for continuous sampling |
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| CN1603773A CN1603773A (en) | 2005-04-06 |
| CN1325895C true CN1325895C (en) | 2007-07-11 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101571450B (en) * | 2009-06-11 | 2011-01-19 | 成都方程式电子有限公司 | Optical fingerprint sensor laboratory table |
| CN104198055B (en) * | 2014-08-29 | 2018-10-23 | 浙江依诺威声信息技术有限公司 | A kind of wavefront sensing device |
| JP7077166B2 (en) * | 2017-09-26 | 2022-05-30 | 株式会社トプコン | How to operate the lens characteristic measuring device and the lens characteristic measuring device |
| CN109556834B (en) * | 2017-09-26 | 2022-04-05 | 株式会社拓普康 | Lens characteristic measuring device and lens characteristic measuring method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5828500A (en) * | 1995-10-11 | 1998-10-27 | Asahi Kogaku Kogyo Kabushiki Kaisha | Optical element inspecting apparatus |
| CN1274842A (en) * | 2000-06-08 | 2000-11-29 | 中国科学院上海光学精密机械研究所 | Method and equipment of detecting optical far field parameters of optical system |
| US20030117683A1 (en) * | 2000-11-30 | 2003-06-26 | Nec Corporation | Optical reticle substrate inspection apparatus and beam scanning method of the same |
| JP2004138948A (en) * | 2002-10-21 | 2004-05-13 | Lasertec Corp | Photomask defect inspection device |
| CN2748898Y (en) * | 2004-11-17 | 2005-12-28 | 中国科学院上海光学精密机械研究所 | 2D scanning type optical quality detecting device |
-
2004
- 2004-11-17 CN CNB2004100842504A patent/CN1325895C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5828500A (en) * | 1995-10-11 | 1998-10-27 | Asahi Kogaku Kogyo Kabushiki Kaisha | Optical element inspecting apparatus |
| CN1274842A (en) * | 2000-06-08 | 2000-11-29 | 中国科学院上海光学精密机械研究所 | Method and equipment of detecting optical far field parameters of optical system |
| US20030117683A1 (en) * | 2000-11-30 | 2003-06-26 | Nec Corporation | Optical reticle substrate inspection apparatus and beam scanning method of the same |
| JP2004138948A (en) * | 2002-10-21 | 2004-05-13 | Lasertec Corp | Photomask defect inspection device |
| CN2748898Y (en) * | 2004-11-17 | 2005-12-28 | 中国科学院上海光学精密机械研究所 | 2D scanning type optical quality detecting device |
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