CN1313817C - Multifunctional optical quality detector - Google Patents
Multifunctional optical quality detector Download PDFInfo
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- CN1313817C CN1313817C CNB2004100173115A CN200410017311A CN1313817C CN 1313817 C CN1313817 C CN 1313817C CN B2004100173115 A CNB2004100173115 A CN B2004100173115A CN 200410017311 A CN200410017311 A CN 200410017311A CN 1313817 C CN1313817 C CN 1313817C
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Abstract
The present invention relates to a multifunctional optical quality detector. The multifunctional optical quality detector is characterized in that a standard collimator tube, a scanning hartmann diaphragm, a condensing lens and a CCD video camera are orderly arranged on an optical axis; the scanning hartmann diaphragm is arranged on a diaphragm support frame, an encoder is fixed at the upper part of the diaphragm support frame, a step motor and a computer are arranged at the low part of the diaphragm support frame, and the CCD video camera, the encoder and the step motor are connected with computer; the scanning hartmann diaphragm is driven by the step motor to rotate around the optical axis under the control of the computer; meanwhile, the computer receives the image output by the CCD video camera and the position information of the scanning hartmann diaphragm, which is given by the encoder, and the data of the image is processed. The present invention can be used for guiding optical element processing and light path adjustment and evaluating the qualities of incident light beams and focal spots, etc.; the present invention has the advantages of high detection precision, high speed and multiple function.
Description
Technical field:
The present invention relates to optical element, particularly a kind of multifunctional optical quality detection device.
Background technology:
Formerly in the technology, traditional Hartmann test apparatus structure as shown in Figure 1, the light that light source 1 sends is through condenser 2 illumination apertures 3, thereby obtains pointolite; Aperture 3 is positioned at the focus place of parallel light tube 4, the light beam that is penetrated by aperture 3 is after parallel light tube 4 collimations are parallel beam, shine on the Hartmann diaphragm 5, this parallel beam is divided into many light pencils with differing heights to the tested element 6 of back directive.By the distance of photographic means, obtain aberration information by analysis at measurement light pencil center, 7,8 positions and optical axis.The structure of Hartmann diaphragm 5 as shown in Figure 2, the aperture on the Hartmann diaphragm 5 pair is symmetrical distribution with the optical axis of parallel light tube 4.
The shortcoming of above-mentioned technology formerly is:
1, the diaphragm manufacturing accuracy is required height.Owing to be that the endless belt of tested element is taken a sample,, thereby very high requirement has been proposed in the processing of diaphragm so the aperture of sustained height is wanted strict symmetry on the diaphragm.
2, can't the measuring sensor local error.Measured error is the face shape error of the different endless belt of tested element, and the control information of each local zonule of element is difficult to obtain.
3, sampling density is limited.Spacing on the diaphragm between the aperture is fixed, can only take a sample with certain density so that can not detect the interval location between the aperture on the diaphragm the control information of corresponding ring belt area, thereby cause measuring accuracy low.
4, Measuring Time is long.Classic method adopts photographic means usually, in measuring process, needs through series of steps such as egative film exposure, development, facula position measurements, and is consuming time longer, may introduce enchancement factors such as vibration simultaneously in this process, and this can cause very big measuring error.
Summary of the invention:
The objective of the invention is to overcome the shortcoming of above-mentioned technology formerly, a kind of multifunctional optical quality detection device is provided, can be used for the processing of guiding optics element, light path adjustment, estimate the quality of incident beam and focal spot etc., have accuracy of detection height, fast, the function advantage how of speed.
Technical solution of the present invention is as follows:
A kind of multifunctional optical quality detection device, it is characterized in that its common optical axis ground is provided with standard parallel light tube, scanning hartmann screen, focus lamp, ccd video camera successively, described scanning hartmann screen is installed on the apertured bracket, this support upper fixed has scrambler, stepper motor is equipped with in the below, also have computing machine, described ccd video camera, scrambler and stepper motor all link to each other with computing machine; Under the control of computing machine, rotate around optical axis by the step motor drive scanning hartmann screen, this computing machine receives the positional information of the image and the scanning hartmann screen that scrambler provides of ccd video camera output on the other hand, and image is carried out data processing.
Described scanning hartmann screen at horizontal radial and vertical diameter to the aperture that respectively has a series of periodic arrangement, spacing between each aperture of horizontal direction is c, spacing between each aperture of vertical direction is d, and c=d, first aperture of horizontal direction and the spacing a in diaphragm axle center are first aperture and axle center spacing b 2 times on the vertical direction, each aperture radius R of two directions all equates, and satisfy and concern R=a/2=c/2, and aperture of the outermost of vertical direction is positioned at the edge of scanning hartmann screen just, is provided with an aperture in the center of scanning hartmann screen 10.
Before described ccd video camera, be provided with micro objective.Described ccd video camera is positioned at the focus of micro objective.
In other words, multifunctional optical quality detection device of the present invention can be regarded as by standard parallel light tube, scanning hartmann screen, focus lamp and image receiving processing system four parts and forms.
Described Hartmann diaphragm is by step motor drive, has the aperture of the mutual homeotropic alignment of two rows, and two row's apertures replenish in mutual dislocation radially; After optical axis rotates, the light beam that incides on the tested element correspondingly is divided into the experimental process light beam.
Described image receiving processing system comprises ccd video camera, computing machine and process software composition, is mainly used in and receives the focal spot image, and image is analyzed and handled.The rotation of Hartmann diaphragm and the gatherer process of ccd video camera all are subjected to computer control, carry out synchronously to guarantee both.
Described micro objective is placed in before the ccd video camera, if focal spot is very little, then available this micro objective will amplify through the spot size that forms behind the focus lamp, reenters to be mapped on the ccd video camera, to improve accuracy of detection.
The present invention compares with technology formerly has following technique effect:
1, the manufacturing accuracy to diaphragm requires low.The motion of Hartmann diaphragm has the aperture of the equidistant arrangement and the half pitch that staggers each other by step motor drive on mutually perpendicular both direction.Adopt this layout structure, and cooperate the rotation of Hartmann diaphragm, can reach the purpose of all endless belt of tested element being carried out scanning survey.Compare with the Hartmann diaphragm in the technology formerly, Hartmann diaphragm of the present invention only needs two row's apertures, and little hole number is few, and manufacturing accuracy is low.
But the local error of 2 measuring sensors.In the clear aperature of detected element, rotate and can obtain the focal spot position that the beamlet by its each local zonule forms behind the Hartmann diaphragm, according to the distribution of these focal spot positions, can obtain local error and the accurate position on tested element thereof.
3, the sampling density height is unrestricted.To finishing of tested focus lamp surface sampling, be that the rotation by scanning hartmann screen realizes, under the driving of stepper motor, diaphragm can be realized the more closely-spaced rotation be scheduled to, so the sampling density height, and can realize the full aperture sampling to tested element, thus obtain the higher detection precision.
4, Measuring Time is short, and speed is fast.Adopt ccd video camera to obtain the positional information of beamlet focus, further detect the line data of going forward side by side by computer control and handle, required time is short, speed is fast, the Hartmann is detected realized robotization, digitizing.
5, function is many.Except that direct check and analysis focal spot energy distribution, also can the manufacturing of optical system be detected with adjusting error, and can obtain error perpendicular to the Two dimensional Distribution in the plane of optical axis; If the focus lamp quality is perfect, also can be used for detecting the quality that is incident in the parallel beam on this tested focus lamp element by analyzing the focal spot quality.
Description of drawings:
Fig. 1 is the apparatus structure of a technology Hartmann test formerly synoptic diagram.
Fig. 2 is the Hartmann diaphragm structural representation that formerly adopts in the technology.
Fig. 3 is the structural representation of an embodiment of multifunctional optical quality testing analytical equipment of the present invention.
Fig. 4 is the scanning hartmann screen structural representation that the present invention adopts.
Fig. 5 be the scanning hartmann screen vertical diameter that adopts of the present invention to the partial sectional view of the first half xsect.
Embodiment:
See also Fig. 3, Fig. 3 is the structural representation of an embodiment of multifunctional optical quality testing analytical equipment of the present invention.As seen from the figure, multifunctional optical quality detection device of the present invention, its formation is that its common optical axis ground is provided with standard parallel light tube 9 successively, scanning hartmann screen 10, tested focus lamp 11, micro objective 12, ccd video camera 13, described scanning hartmann screen 10 is installed on the apertured bracket, this support upper fixed has scrambler 15, stepper motor 16 is equipped with in the below, also has computing machine 14, described ccd video camera 13 is positioned at the focal position of micro objective 12, described ccd video camera 13, scrambler 15 all links to each other with computing machine 14 with stepper motor 16; Under the control of computing machine 14, rotate around optical axis by stepper motor 16 driven sweep formula Hartmann diaphragms 10, this computing machine 14 receives the positional information of the image and the scanning hartmann screen 10 that scrambler 15 provides of ccd video camera 13 outputs on the other hand, and image is carried out data processing.
Described scanning hartmann screen 10 is to the aperture that has periodic arrangement at horizontal radial and vertical diameter, spacing between each aperture of horizontal direction is c, spacing between each aperture of vertical direction is d, and c=d, first aperture of horizontal direction and the spacing a in diaphragm axle center are first aperture and axle center spacing b 2 times on the vertical direction, each aperture radius R of two directions all equates, and satisfy and concern R=a/2=c/2, and aperture of the outermost of vertical direction is positioned at the edge of scanning hartmann screen 10 just, is provided with an aperture in the center of scanning hartmann screen 10.
Described standard parallel light tube 9, scanning hartmann screen 10, tested focus lamp 11, ccd video camera 13 and image receiving processing system, be respectively applied for light beam is projected on the Hartmann diaphragm 10, sampling is cut apart on the corrugated that arrives tested focus lamp 11, again ccd video camera 13 received images are analyzed and handled, obtain control information.
The parallel beam incident that described standard parallel light tube 9 sends arrives scanning hartmann screen 10.Scanning hartmann screen 10 rotates around optical axis under the driving of stepper motor 16 in the measuring process, light beam is divided into beamlet one by one, beamlet is focused on by tested focus lamp 11, beamlet focal position on a plurality of endless belt of while ccd video camera 13 continuous acquisition, obtain the focal spot energy distribution, obtain the particular location and the size of error on this basis.
Said image receiving processing system is made up of computing machine 14 that is connected with ccd video camera 13 and process software wherein, is mainly used in the image that receives ccd video camera 13 outputs and determines corresponding beamlet position, and image is analyzed and handled.By the principle of work of ccd video camera as can be known, the piece image that ccd video camera 13 collects is the image of a sub-focal spot of laser beam, when a plurality of beamlets of an endless belt are repeatedly gathered, obtained the stack of several focal spot images, by described process software, can accurately write down the coordinate position of each focal spot, according to the sparse situation of the distribution of focal spot, can ask to obtain encircled energy, promptly reflect focal spot light distribution situation, again inverse fourier transform be carried out in light distribution, if the incident beam quality is good, just can know the quality quality of tested this endless belt of element, promptly provide the endless belt position that has error on it, so the local error position; If tested element quality is good, just can obtain the quality of incident beam quality.If focal spot size is less, can add micro objective 12 in ccd video camera 13 fronts, the distance of beamlet focal spot and centre distance optical axis thereof can be amplified, make full use of the pixel of ccd video camera 13 target surfaces, so that the measurement and positioning precision improves greatly.
The structure of scanning hartmann screen 10 is referring to Fig. 4, and to the aperture that has periodic arrangement, the spacing between each aperture of horizontal direction is c at the horizontal radial of diaphragm 10 and vertical diameter, and the spacing between each aperture of vertical direction is d, and c=d.The spacing a in first aperture of horizontal direction (itself and axle center nearest) and diaphragm axle center is first aperture on the vertical direction (it is nearest with the axle center) and axle center spacing b 2 times, and each aperture radius R of two directions all equates, the satisfied R=a/2=c/2 that concerns.In addition, aperture of the outermost of vertical direction is positioned at the edge of scanning hartmann screen 10 just.Such design is in order to make scanning hartmann screen 10 under the driving of stepper motor 16, can to collect the information on full aperture surface with not omitting, having improved accuracy of detection effectively.Be provided with an aperture in the center of scanning hartmann screen 10, be used for determining optical axis position.The upper fixed of the support of scanning hartmann screen 10 has a scrambler 15, and stepper motor 16 is equipped with in the below, and the scanning of scanning hartmann screen 10 is rotated by the driving of stepper motor 16 and finished, and its rotational angle is measured by scrambler 15; Scrambler 15 links to each other with computing machine 14 with stepper motor 16, and the collection of the rotation of stepper motor 16 and ccd video camera 13 is all carried out under the control of computing machine 14.In stepper motor 16 rotation processes, know that by scrambler 15 scanning hartmann screen 10 turns over corner cut degree really.
Compare with technology formerly, characteristics of the present invention are that the manufacture difficulty of Hartmann diaphragm is little, the aperture on the sustained height are not had the requirement of strict symmetry on making; The rotation of the collection of ccd video camera 13 and scanning hartmann screen 10 is subjected to the synchro control of computing machine 14; Adopt ccd video camera 13 to carry out data acquisition, the time is short, and speed is fast; By the focal spot energy distribution, can be quantitatively, the location, obtain multiple information measured surely regionally: as the size and the particular location of endless belt mismachining tolerance, local error and other complicated errors of tested element, intuitive measurement results is for element processing and modification provide convenience direct foundation.The image receiving processing system that the present invention adopts comprises by the computing machine 14 and the process software that link to each other with ccd video camera 13 to be formed, be mainly used in the images acquired that receives ccd video camera 13 outputs, and image analyzed and handle, with the robotization of Hartmann's detection method, digitizing.
The present invention can measure multiple element, can be parallel flat element or the assembly that places parallel light path, as telescope, single disk amplifier or amplifier block etc., needs this moment to replace tested focus lamp 11 to focus on the high-quality condenser lens; Can detect condenser lens, as focus lamp in target mirror, the spatial filter etc.
In order to improve accuracy of detection, can before ccd video camera 13, put a micro objective 12 selectively, if focal spot size is smaller, determining of focusing center is just relatively more difficult, error is big, at this moment can adopt micro objective 12.
The course of work of multifunctional optical quality testing analytical equipment of the present invention is divided into two kinds of situations:
The first, be condenser lens for tested element, as the situations such as focus lamp in target mirror, the spatial filter, referring to Fig. 3.The collimated laser beam that sends from standard parallel light tube 9 incides on the scanning hartmann screen 10.The behaviour in service of scanning hartmann screen 10 is referring to Fig. 5, and this figure is the partial sectional views of Hartmann diaphragm 10 vertical diameters to the xsect of the first half.When measuring the information of some endless belt, only corresponding on the scanning hartmann screen 10 aperture to be opened, other aperture clogs with the stopper 101 that is in the light shown in Fig. 5.Scanning hartmann screen 10 rotates around optical axis under the driving of stepper motor 16 in the measuring process, light beam is divided into beamlet one by one, the upper fixed of the support of Hartmann diaphragm 10 has scrambler 15, stepper motor 16 is equipped with in the below, the scanning of scanning hartmann screen 10 is rotated by the driving of stepper motor 16 and is finished, stepper motor 16 links to each other with computing machine 14, and by computing machine 14 controls, ccd video camera 13 is finished collection under the control of computing machine 14 simultaneously.When computing machine 14 sent a pulse control signal, then drive stepping motor 16 made a move, and meanwhile, Hartmann diaphragm 10 is rotating certain angle under the driving of stepper motor 16.In rotation process, turn over really that the corner cut degree can measure by scrambler 15, stepper motor 16 fed back to signal and sent computing machine 14 back to this moment, sent instruction by computing machine 14 and started ccd video camera 13 image data.If deviation appears in angle position, then scrambler sends rub-out signal, sends computing machine 14 back to, and computing machine 14 sends instruction and stops drive motor 16.By the control of closed feedback loop, guaranteed that the focal spot information that ccd video camera 13 collects is corresponding one by one with the aperture position on the Hartmann diaphragm 10.Computing machine 14 whenever sends a pulse signal, makes Hartmann diaphragm 10 rotating certain angle, and correspondingly, the beamlet that is seen through by corresponding that aperture on it focuses on the back by tested focus lamp 11 and collects piece image by ccd video camera 13.After Hartmann diaphragm 10 rotates a week, ccd video camera 13 has just been finished the function of the beamlet focus chart picture on endless belt of continuous acquisition, by the computing machine 14 that links to each other with ccd video camera 13 and process software the image of ccd video camera 13 outputs is handled then, provided focal position, quantitative error and positional information accurately thereof.After finishing the measurement of an endless belt, with the stopper 101 that is in the light aperture corresponding on this endless belt is clogged, open another hole on the Hartmann diaphragm 10, repeat above-mentioned measuring process, then can obtain the two-dimensional coordinate of the beamlet focal position on another endless belt, can obtain the energy distribution of focal spot thus.If do not have local error on the tested endless belt, the focal spot of each beamlet that obtains so should distribute by Cheng Yuanzhuan; Otherwise, focal spot position may be offset to the round inboard and the outside, after having known the energy distribution situation of focal spot, because focal spot is Fu Lang and the fraunhofer-diffraction pattern that the incident corrugated forms behind tested element, tested element is equivalent to Fourier transformer, if the focal spot poor quality, and the incident corrugated is high-quality, then deducibility goes out by the part element to have defective, and the quality that inverse Fourier transform just can be estimated detected element is carried out in light distribution.Principle thus can accurately know each local error of endless belt sum of errors of tested element, that is to say obtained detected element 11 quantitatively, the information in location, fixed zone; According to above-mentioned information,, can also extrapolate the face shape error of tested element and the corrugated error of incident parallel beam etc. based on focal spot light intensity Fourier transform principle.In addition, when tested element deflected, its optical axis can intersect with the optical axis of whole optical system, not exclusively overlapped, and at this moment, error can be introduced in the measurement result.In this case, multifunctional optical quality analysis apparatus of the present invention utilizes light intensity Fourier transform principle, this error-detecting can be come out.
The second, be that focal power is zero the plane component or the situation of assembly for tested element, as telescope, single disk amplifier or amplifier block etc., at this moment, tested element is positioned at the front of Hartmann diaphragm 10, adopts the high-quality condenser lens to replace tested focus lamp 11 after Hartmann diaphragm 10.Behind the tested element of plane wave process of incident, distort in the plane wave corrugated of outgoing, illustrate that then there are certain defective in its surface or inside, through measuring and analyzing, the residing endless belt of defective position can be obtained, and two-dimentional error profile can be further obtained by the plane wave corrugated behind tested element or the assembly.
Fig. 3 is one embodiment of the present of invention, and its concrete structure and parameter are summarized as follows:
The parallel beam bore that standard parallel light tube 9 sends is Φ 300mm.The center-hole diameter of scanning hartmann screen 10 is Φ 8mm, the aperture that it is the periodic arrangement of 20mm that horizontal radial has 7 spacings, and aperture that first is nearest from the diaphragm axle center and distance of shaft centers are from being 20mm, vertical diameter is to aperture that to have 8 spacings be the periodic arrangement of 20mm, and aperture that first is nearest from the diaphragm axle center and distance of shaft centers be from being 10mm, and two radially hole diameters are Φ 10mm.The bore that passes through of tested focus lamp 11 is Φ 300mm, and focal length is 900mm.The enlargement ratio of micro objective 12 is 10
x, ccd video camera 13 is 1/3 " and the black-white CCD video camera, Pixel Dimensions is 6.5 μ m * 6.3 μ m.Stepper motor 16 adopts KH56KM2-801 model composite stepper motor.
Adopting multifunctional optical quality analysis pick-up unit of the present invention is Φ 300mm to clear aperture, and focal length is that the tested focus lamp of 900mm detects, and the focal spot size that records is Φ 23 μ m.
Claims (2)
1, a kind of multifunctional optical quality detection device, it is characterized in that its common optical axis ground is provided with standard parallel light tube (9) successively, scanning hartmann screen (10), focus lamp (11), ccd video camera (13), described scanning hartmann screen (10) is installed on the apertured bracket, this support upper fixed has scrambler (15), stepper motor (16) is equipped with in the below, also has computing machine (14), described scanning hartmann screen (10) is to the aperture that has periodic arrangement at horizontal radial and vertical diameter, spacing between each aperture of horizontal direction is c, spacing between each aperture of vertical direction is d, and c=d, first aperture of horizontal direction and the spacing a in diaphragm axle center are first aperture and axle center spacing b 2 times on the vertical direction, each aperture radius R of two directions all equates, and satisfy and concern R=a/2=c/2, and aperture of the outermost of vertical direction is positioned at the edge of scanning hartmann screen (10) just, be provided with an aperture in the center of scanning hartmann screen 10, described ccd video camera (13), scrambler (15) all links to each other with computing machine (14) with stepper motor (16); Under the control of computing machine (14), rotate around optical axis by stepper motor (16) driven sweep formula Hartmann diaphragm (10), this computing machine (14) receives the positional information of the image and the scanning hartmann screen (10) that scrambler (15) provides of ccd video camera (13) output on the other hand, and image is carried out data processing.
2, multifunctional optical quality detection device according to claim 1 is characterized in that being provided with micro objective (12) before at described ccd video camera (13), and described ccd video camera (13) is positioned at the focal position of micro objective (12).
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| CNB2004100173115A CN1313817C (en) | 2004-03-30 | 2004-03-30 | Multifunctional optical quality detector |
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| CNB2004100173115A CN1313817C (en) | 2004-03-30 | 2004-03-30 | Multifunctional optical quality detector |
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| CN1563943A CN1563943A (en) | 2005-01-12 |
| CN1313817C true CN1313817C (en) | 2007-05-02 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101832911B (en) * | 2010-04-13 | 2011-09-28 | 中国科学院长春光学精密机械与物理研究所 | Photomechanical equipment of vehicular infrared detection system |
| CN101963543B (en) * | 2010-08-19 | 2012-03-07 | 上海理工大学 | System and method for testing lens parameters based on Hartmann-Shark sensor |
| CN105676254B (en) * | 2014-11-19 | 2018-10-26 | 同济大学 | A kind of online Precise Assembling Method of nested type X-ray astronomical telescope system |
| CN109556834B (en) * | 2017-09-26 | 2022-04-05 | 株式会社拓普康 | Lens characteristic measuring device and lens characteristic measuring method |
| CN110146991A (en) * | 2019-04-18 | 2019-08-20 | 珠海达明科技有限公司 | A kind of laser facula shaping optical system |
| CN110646168B (en) * | 2019-05-09 | 2021-12-14 | 苏州东辉光学有限公司 | Longitudinal spherical aberration measurement method of self-focusing lens |
| CN112964454A (en) * | 2021-02-05 | 2021-06-15 | 深圳中科飞测科技股份有限公司 | Detection system and detection method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4471448A (en) * | 1981-09-08 | 1984-09-11 | Hughes Aircraft Company | Method and apparatus for aligning an optical system |
| CN1335862A (en) * | 1998-09-29 | 2002-02-13 | 康宁股份有限公司 | Preparation of organic pieces of optical quality and especially organic lenses |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4471448A (en) * | 1981-09-08 | 1984-09-11 | Hughes Aircraft Company | Method and apparatus for aligning an optical system |
| CN1335862A (en) * | 1998-09-29 | 2002-02-13 | 康宁股份有限公司 | Preparation of organic pieces of optical quality and especially organic lenses |
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