WO2012155688A1 - Optical free surface 3d profile high-precision non-contact measurement method and device - Google Patents

Optical free surface 3d profile high-precision non-contact measurement method and device Download PDF

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Publication number
WO2012155688A1
WO2012155688A1 PCT/CN2012/073019 CN2012073019W WO2012155688A1 WO 2012155688 A1 WO2012155688 A1 WO 2012155688A1 CN 2012073019 W CN2012073019 W CN 2012073019W WO 2012155688 A1 WO2012155688 A1 WO 2012155688A1
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precision
grating
white light
measured object
light scanning
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PCT/CN2012/073019
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French (fr)
Chinese (zh)
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张宏伟
李绍辉
刘书桂
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天津大学
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Publication of WO2012155688A1 publication Critical patent/WO2012155688A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Definitions

  • the invention relates to high-precision in-situ detection of complex curved surface parts with large curvature surface shape, in particular to a high-precision non-contact measurement method and device for optical free-form surface three-dimensional shape.
  • Precision/ultra-precision machining technology has become the main development direction and important research field of advanced manufacturing technology, especially ultra-precision machining technology for complex curved parts such as optical free-form surfaces in aerospace, defense, biomedical, communication, microelectronics Applications in the high-tech field are becoming more widespread.
  • ultra-precision machining of complex surfaces high-precision in-situ detection and compensation control technology is the basis for improving the size, shape accuracy and surface roughness of ultra-precision machined parts, as well as the surface integrity control and evaluation of complex curved parts.
  • Key technology researchers at home and abroad have developed many different types of ultra-precision in-situ measurement systems. However, the current research is mainly based on the contact measurement principle, and the measurement speed is slow, which is not conducive to quickly obtaining the three-dimensional shape data of the measured object.
  • Optical measurement methods such as optical microscopy, optical interferometry, and fringe projection have been widely used in the field of micro-nano precision dimensional measurement due to their advantages of fast, high precision, and non-contact.
  • white light scanning interferometry has nanometer or even sub-nanometer measurement resolution and good repeatability.
  • the measurement range is far from the order of millimeters.
  • Stripe projection method has been widely used in the field of dimensional measurement because of its excellent measurement range and fast measurement speed. It can be used for 3D shape measurement of complex curved parts.
  • the measurement accuracy of the stripe projection method cannot meet the nanometer accuracy requirements.
  • the technical solution adopted by the present invention is a high-precision non-contact measurement method for a three-dimensional shape of an optical free-form surface, comprising the following steps: implementing a three-degree-of-freedom motion of the measured object by means of a high-precision positioning motion control system;
  • the grating projection device is used to project the grating stripe on the surface of the object to be measured, and the deformed fringe pattern modulated by the surface of the measured object is obtained by the raster projection visual inspection image capturing device, and sent to the computer for subsequent processing to recover the three-dimensional shape of the surface of the measured object. Appearance
  • the posture of the measured object is automatically recognized, and the white light scanning is planned.
  • the measurement path is automatically guided by a more precise white light scanning interferometer to perform nano-scale precision scanning measurement on the local features of the measured object, and the interference fringe pattern is obtained by the white light scanning image acquisition device, which is sent to the computer for subsequent processing to obtain the measurement area.
  • the data obtained by raster projection visual inspection and white light scanning interferometry are measured by multi-sensor massive data fusion algorithm and corresponding error separation and compensation measures to accurately measure the three-dimensional shape characteristics of complex curved surface parts such as optical free-form surfaces.
  • the high-precision positioning motion control system consists of a high-precision electric displacement platform, a high-precision electric rotating platform and a high-precision electric angle table.
  • the platform is used to control the measured object to achieve three-degree-of-freedom motion.
  • the grating projection visual inspection image acquisition device is two scientific-grade digital CCD cameras. Two scientific-grade digital CCD cameras are placed symmetrically along the axis of the grating projection device along the axis direction of the high-precision electric displacement platform of the high-precision positioning motion control system.
  • the grating stripe projected by the grating projection device on the surface of the object to be measured is a sinusoidal grating stripe with adjustable amplitude, phase and projection direction, a cosine grating stripe, a composite grating stripe formed by combining two kinds of grating strips with different frequencies and directions, Moir One of stripes, gray-coded raster stripes, and colored raster stripes.
  • the white light scanning interferometer adopts a microscopic interference objective lens, which is irradiated with a white light source during scanning, and the microscopic interference objective lens and the optical imaging system are connected through an adapter, and the microscopic interference objective lens is driven by a high precision piezoelectric ceramic locator to complete the vertical. Scanning, tilting the optical axis of the micro-interference objective lens, and the high-precision positioning motion control system drives the object to be measured to perform horizontal scanning in a horizontal direction by a certain step.
  • the white light scanning image acquisition device receives the interference fringe pattern through the optical imaging system.
  • a high-precision non-contact measuring device for optical free-form surface three-dimensional shape comprising a high-precision positioning motion control system, a grating projection visual detecting unit, a white light scanning interferometric unit and a computer;
  • the high-precision positioning motion control system is composed of a high-precision electric displacement platform, a high-precision electric rotating platform and a high-precision electric angle table, by which the object to be measured is controlled to realize three-degree-of-freedom motion;
  • the grating projection visual detecting unit is composed of a grating projection device and an image collecting device, and the raster stripe generated by the computer is projected onto the surface of the object to be measured by the grating projection device to form a deformed stripe, and the measured object moves along the high-precision displacement platform to the image capturing device.
  • the measured object moves under the action of a high-precision angular position table and a high-precision rotating platform, so that the measured object is rotated by a certain angle, so that the deformed fringe pattern modulated by the surface of the measured object is most used by the image collecting device. Good way to receive;
  • the white light scanning interferometric unit is composed of a microscopic interference objective lens, an optical imaging system, a white light source and an image acquisition device.
  • the microscopic interference objective lens is used to: perform a vertical scanning by a micro-interference objective lens through a high-precision piezoelectric ceramic positioner,
  • the micro-interference objective optical axis tilting, high-precision positioning motion control system drives the measured object to complete horizontal scanning in a horizontal direction by a certain step, and is connected with the optical imaging system through the adapter;
  • the computer is used to: generate grating stripe; recover the three-dimensional shape of the surface of the measured object from the received deformed fringe pattern; select a suitable white light scanning interferometry method for planning the white light scanning for the local area information of the measured object that needs more precise measurement
  • the interferometric measuring path automatically guides the white light scanning interferometer to perform nanometer-level precision scanning measurement on the local features of the measured object; the data measured by the grating projection visual detecting unit and the white light scanning interferometric unit passes through the multi-sensor
  • the massive data fusion algorithm and the corresponding error separation and compensation measures accurately measure the three-dimensional topographical features of the complex free-form surface parts of optical free-form surfaces.
  • the image acquisition device of the grating projection visual detection unit is two scientific-grade digital CCD cameras. Two scientific-grade digital CCD cameras are symmetrically placed along the axis of the high-precision electric displacement platform in the center of the grating projection device of the grating projection visual inspection unit.
  • the grating projection device is an LCD liquid crystal display, and the LCD liquid crystal display adopts a horizontal downward projection mode.
  • the present invention adopts a method of combining a grating projection visual detecting unit and a white light scanning interferometric unit in the same motion control system framework, the grating projection visual detecting unit is used to obtain large field of view global contour data, and the white light scanning interferometric unit is used for partial details of the part.
  • the feature performs nano-scale precision scanning measurement, so the invention can significantly improve the detection precision and resolution of the complex curved surface parts with large curvature surface such as optical free-form surface in the process of processing and detection, and the measurement speed is fast, non-contact, on the surface of the part and The surface layer is not damaged.
  • Figure 1 shows the basic principle of high-precision non-contact measurement of optical free-form surface 3D shape based on multi-sensor fusion technology.
  • 1 is the LCD screen for sinusoidal grating projection
  • 2 is the high-precision displacement platform
  • 3 is the combination of high-precision angular position table and high-precision rotary platform
  • 4 is the measured object
  • 5 is used to receive the deformed fringe pattern.
  • the scientific digital CCD camera, 6 is a white light scanning interferometer.
  • Figure 2 is a schematic diagram of the grating projection measurement.
  • 7 is the computer
  • 8 is the microcontroller
  • 9 is the motor.
  • FIG. 3 is a schematic diagram of white light scanning interferometry.
  • 21 is a high-quality white LED light source
  • 31 is a beam splitter
  • 41 is a piezoelectric actuator
  • 10 is a scientific-grade digital CCD camera for receiving white light scanning interference fringe patterns.
  • a high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology a grating projection visual detection unit and a white light scanning interferometric unit are constructed within the framework of the same high-precision positioning motion control system, using a grating projection device to The sinusoidal grating stripe is projected on the surface of the measuring object, and the deformed fringe pattern modulated by the surface of the measured object is obtained by the image collecting device, and sent to the computer for subsequent processing to recover the three-dimensional shape of the surface of the measured object.
  • the part pose is automatically recognized, the white light scanning interferometric path is planned, and the more precise white light scanning interferometer is automatically guided to perform nano-features on the measured object.
  • the level precision scanning measurement, the interference fringe pattern is obtained by the image acquisition device, and sent to the computer for subsequent processing to obtain the three-dimensional shape data of the measurement area.
  • the data measured by the grating projection visual inspection unit and the white light scanning interferometric unit are used to accurately measure the three-dimensional topography of complex curved surface parts such as optical free-form surfaces through multi-sensor massive data fusion algorithm and corresponding error separation and compensation measures.
  • the high-precision positioning motion control system consists of a high-precision electric displacement platform, a high-precision electric rotating platform and The high-precision electric angle table is used to control the measured object to achieve three-degree-of-freedom motion.
  • the feature is: wherein the grating projection device of the grating projection visual detection unit is an LCD liquid crystal display.
  • the feature is:
  • the LCD liquid crystal display screen for projecting the grating stripe of the grating projection visual detection unit adopts a horizontal downward projection mode.
  • the image acquisition device of the grating projection visual detection unit is two scientific-level digital CCD cameras.
  • the characteristics are: two raster-level visual CCD cameras of the scientific projection digital detection unit along the axis of the high-precision electric displacement platform The center of the LCD screen is placed symmetrically.
  • the feature is: wherein the grating projection visual detection unit projects the amplitude, phase and projection direction adjustable by software programming. Sinusoidal grating stripes.
  • the characteristics are as follows: Two scientific-level digital CCD cameras of the grating projection visual detection unit respectively receive the warp in their respective fields of view A sinusoidal grating stripe modulated on the surface of the object is measured.
  • the white light scanning interferometric unit is composed of a microscopic interference objective lens, an optical imaging system, a white light source and an image collecting device.
  • the feature is: wherein the micro-interference objective lens of the white light scanning interferometry unit and the optical imaging system are connected by an adapter.
  • the characteristics are: wherein the scanning mode of the white light scanning interferometric unit is vertical scanning and horizontal scanning.
  • the feature is: wherein the micro-interference objective lens in the white light scanning interferometric unit is driven by a high-precision piezoelectric ceramic locator Vertical scanning.
  • the feature is: wherein the horizontal scanning mode in the white light scanning interferometric unit adopts optical system optical axis tilting, high-precision positioning motion control system The method of moving the measured object in a horizontal direction by a certain step.
  • the measuring method proposed by the invention can accurately calculate the spatial coordinate position of each point on the surface of the measured object, and realize high-precision non-contact measurement of the three-dimensional shape features of the complex curved surface parts such as the optical free-form surface.
  • Figure 1 is a basic schematic diagram of high-precision non-contact measurement of optical free-form surface three-dimensional shape based on multi-sensor fusion technology.
  • 1 is an LCD screen for sinusoidal grating projection
  • 2 is a high-precision displacement platform
  • 3 is a combination of a high-precision angular table and a high-precision rotating platform
  • 4 is an object to be measured
  • 5 is for receiving deformation.
  • the grating projection visual detection unit starts working, and the sinusoidal grating stripe generated by the computer is projected onto the surface of the measured object through the LCD liquid crystal screen, and the measured object moves along the high-precision displacement platform to the field of view of the CCD camera, subject to the LCD liquid crystal screen size.
  • the high-precision angular position table and the high-precision rotating platform are controlled to rotate the measured object by a certain angle, so that the deformed fringe pattern modulated by the surface of the measured object is CCD.
  • the camera is received in the best way.
  • the incident and reflected rays intersecting at various points on the surface of the measured object follow the law of reflection, as shown at point W.
  • the height information of each point on the surface of the measured object is demodulated from the acquired deformed fringe pattern, and the three-dimensional reconstruction feature of the measured object is restored by using three-dimensional reconstruction technology.
  • Grating projection visual inspection enables microscopic measurement of the three-dimensional shape of the surface of the object being measured. If it is necessary to perform higher-precision detection on the vicinity of the point W, the measurement path can be re-planned according to the measurement result of the grating projection visual detection unit, so that the measured object moves along the high-precision displacement platform to the view of the white-light scanning interferometric probe represented by 6 In the field range, control the high-precision angular position table and the high-precision rotary platform motion, and adjust the angle of the measured object to obtain the best measurement result.
  • White light scanning interferometry enables nanometer-level high-precision detection of local areas of the measured object.
  • a multi-sensor massive data fusion algorithm is used to accurately recover the three-dimensional topography of the surface of the measured object.
  • White light scanning interferometry has two measurement methods, as shown in Figure (b) and Figure (c).
  • Figure (b) is a vertical scanning measurement method.
  • the points on the surface of the measured object intersect with the coherent plane to achieve the best interference when the white light scanning interferometer moves to a certain position.
  • the relative height information of each point can be derived by the position (or relative movement distance) of the corresponding table when the best interference is reached.
  • the white light vertical scanning interferometry range is limited by the field of view. The introduction of image stitching will cause measurement error. If the surface area of the measured object to be measured by the white light scanning interferometer is large, the white light horizontal scanning interferometry shown in Figure (c) is used.
  • the optical axis is inclined with respect to the horizontal plane, and the working table drives the sample to be tested to complete the scanning of the interference fringes in a horizontal step in a horizontal direction, and the relative height of each point can be determined according to the position of the best interference of the points on the surface of the object to be measured in the image. information.
  • Figure 2 is a schematic diagram of the grating projection measurement.
  • 1 is an LCD screen for projecting sinusoidal grating stripes generated by software programming.
  • Cosine gratings, composite gratings (combination of two kinds of grating strips with different frequencies and directions), moiré fringes and gray-coded grating strips (such as Gray code grating), and color grating strips have also been tested. The effect is almost the same, no Let us repeat them separately.
  • 5 is a scientific-grade digital CCD camera, which is used to receive the deformed fringe pattern modulated by the measured object table, 4 is the measured object, 3 is a high-precision angular position table and a high-precision rotating platform combination, 2 is a high-precision displacement platform, 2 And 3 constitute a high-precision positioning motion control system.
  • 7 is a computer, 8 is a microcontroller, and 9 is a motor.
  • the measured object 4 moves under the control of the high-precision positioning motion system to the field of view of the CCD camera represented by 5, rotates the appropriate angle, completes the measurement, and then the measured object 4 (shown by the dotted line) Move to the range of the field of view of another CCD camera represented by 5, rotate the appropriate angle to complete the measurement.
  • the three-dimensional shape data of the surface of the measured object measured by the two CCD cameras is restored by image stitching technology to recover the complete three-dimensional shape of the measured object.
  • FIG. 3 is a schematic diagram of white light scanning interferometry.
  • 21 is a high-quality white LED light source
  • 31 is a beam splitter
  • 41 is a piezoelectric actuator.
  • the white light generated by the high-quality white LED light source reaches the beam splitter through the lens group, and is divided into a reference beam and measurement.
  • the beam is scanned by the piezoelectric ceramic driven reference mirror to scan the surface of the object to be measured.
  • the CCD camera receives the interference image, extracts the position of the best interference point from the interference pattern, and obtains the relative height of each point, and depicts the measured object.
  • the three-dimensional shape of the surface is a schematic diagram of white light scanning interferometry.
  • a grating projection visual inspection unit and a white light scanning interferometric measuring unit are constructed in the framework of the same high-precision positioning motion control system, and the whole measuring device is placed on the high-precision optical vibration isolation platform.
  • the high-precision positioning motion control system is composed of a high-precision electric displacement platform, a high-precision electric rotation platform and a high-precision electric angle table, and can control the object to be measured to realize three-degree-of-freedom motion.
  • the high-precision electric displacement platform has a stroke of 300mm
  • the high-precision electric rotary table can realize 360° rotation
  • the high-precision electric angle table can realize ⁇ 45° angle adjustment.
  • the grating projection visual detecting unit is composed of a sinusoidal grating projection device and an image collecting device, wherein the grating projection device can select an LCD liquid crystal screen with a screen size of 478 mm ⁇ 300 mm, and horizontally project a sinusoidal grating strip generated by computer programming downward, the sinusoidal grating.
  • the amplitude, phase and projection direction of the stripe can be adjusted by software.
  • the LCD screen can be adjusted to a height of 400mm with respect to the loading surface.
  • the image acquisition device selects two high-resolution digital CCD cameras with a resolution of 2456x 2058 pixels. The two CCD cameras are symmetrically placed along the axis of the LCD screen in the direction of the axis of the high-precision motorized displacement platform. The height and angle can be adjusted.
  • the white light scanning interferometric unit is composed of a microscopic interference objective lens, an optical imaging system, a high quality white light LED light source, and a scientific digital CCD camera.
  • the micro-interference objective lens can be selected with a Mirau-type micro-interference objective lens (10X, 20X, 50X), through a high-precision piezoelectric ceramic positioner (PI P-721.CL, capacitive sensor feedback closed-loop control, minimum resolution of 0.7nm, Range lOOum) Complete the vertical scan with an animal mirror.
  • Ultra-Zoom lenses are available for optical imaging systems. Ultra-Zoom lenses offer very high resolution and outstanding contrast, with its fine-tuning focus and/or coaxial illumination, and coaxial illumination for uniform illumination in high-magnification applications.
  • the Ultra-Zoom is placed at the bottom, and then the mini adapter and the C-type connector are attached to the scientific CCD camera.
  • a CCD camera used as an image capture device.
  • the white light source is also connected through an adapter to provide illumination.
  • the lighting unit uses a high quality white LED source with a center wavelength of 580 nm.
  • the image acquisition device can select a scientific-grade CCD camera with a resolution of 1534x1024 pixels, and then collect it and transfer it to the computer for subsequent processing.
  • the computer demodulates the gradient information of each point on the surface of the measured object from the acquired deformed fringe pattern.
  • the wavefront reconstruction algorithm can recover the three-dimensional topographical features of the measured object, and obtain the global three-dimensional contour of the large field of view of the measured object.
  • the geometric feature information of the measured object is extracted and matched with the CAD machining model to realize automatic position recognition of the part without explicit reference, which provides a basis for the overall path planning of the subsequent local high-precision scanning measurement.
  • Based on the obtained position and posture information of the part and the spatial layout result of each unit of the measurement system select the appropriate white light scanning interferometry method for the local area information of the measured object that needs more precise measurement, plan the white light scanning interferometry path, and automatically guide the white light scanning.
  • the interferometric probe performs nano-scale precision scanning measurement on the local features of the measured object.
  • the white light scanning image acquisition device obtains the white light scanning interference fringe pattern, and transmits it to the computer for subsequent processing through the acquisition card, and demodulates the relative height information of the measurement area from the interference fringe pattern to obtain the three-dimensional shape data of the measurement area.
  • the least squares estimation algorithm is used to align the data with unequal precision and unequal density, realizing the spatial registration of the massive data of the heterogeneous optical sensor, based on the data layer and characteristics.
  • the data fusion structure model uses the Bayesian method to complete the fusion of multi-sensor massive data, and detects and compensates for multi-directional motion error, and accurately measures the three-dimensional topography of optical free-form surfaces.
  • the sinusoidal grating stripe is projected onto the surface of the object to be measured through the LCD screen, and the object to be measured is moved to the field of view of a certain CCD camera under the control of a high-precision positioning motion control system, and the angle of the object to be measured is adjusted to obtain the best.
  • the CCD camera captures the sinusoidal grating stripe modulated by the surface of the measured object, and sends it to the computer for subsequent processing.
  • the measured object moves to the field of view of another CCD camera under the control of the high-precision positioning motion control system.
  • the height information of each point on the surface of the measured object is demodulated from the acquired deformed fringe pattern, and the three-dimensional reconstruction feature of the measured object is restored by using three-dimensional reconstruction technology.
  • the posture of the measured object is automatically recognized, the white light scanning interferometric path is planned, and the more precise white light scanning interferometer is automatically guided to perform nano-level precision on the local detailed features of the workpiece.
  • the image acquisition device obtains the interference fringe pattern, and then collects it and transmits it to the computer for subsequent processing, and demodulates the relative height information of the measurement area from the interference fringe pattern to obtain the three-dimensional shape data of the measurement area.
  • the data measured by the grating projection visual inspection unit and the white light scanning interferometric unit are accurately measured by the multi-sensor massive data fusion algorithm and the corresponding error separation and compensation measures to accurately measure the three-dimensional topography of the optical free-form surface.

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Abstract

An optical free surface 3D profile high-precision non-contact measurement method comprises the following steps: projecting a sinusoidal grating stripe on the surface of an object under test (4) by using a grating projection device (1), an image collection device (5) acquiring a deformed stripe pattern after modulation of the surface of the object under test (4), and sending the deformed stripe pattern into a computer (7) to recover a surface 3D profile of the object under test (4); a white-light scanning interference probe (6) performing nano-scale precision scanning and measurement on local attributes of the object under test (4), a white-light scanning image collection device acquiring an interference stripe pattern, and entering the interference stripe pattern into the computer (7) to obtain 3D profile data of the measured area; and performing a multi-sensor massive data fusion algorithm and corresponding error separation and compensation measures on the data obtained from grating projection visual detection and white-light scanning interference measurement to obtain a result. Further an optical free surface 3D profile high-precision non-contact measurement device is provided. The measurement method and device are mainly applicable to high-precision in-place inspection of a component with a complex surface.

Description

光学自由曲面三维形貌高精度非接触测量方法及装置 技术领域  High-precision non-contact measuring method and device for optical free-form surface three-dimensional shape
本发明涉及大曲率面形的复杂曲面零件的高精度原位检测， 具体讲涉及光学自由曲面 三维形貌高精度非接触测量方法及装置。 背景技术  The invention relates to high-precision in-situ detection of complex curved surface parts with large curvature surface shape, in particular to a high-precision non-contact measurement method and device for optical free-form surface three-dimensional shape. Background technique
精密 /超精密加工技术已经成为先进加工制造技术的主要发展方向和重要研究领域， 特别是诸如光学自由曲面等复杂曲面零件的超精密切削加工技术在航空航天、 国防、 生物 医学、 通讯、 微电子等高科技领域中的应用越来越广泛。 作为复杂曲面超精密加工的一个 重要组成部分， 高精度原位检测及补偿控制技术是提高超精密加工零件尺寸、 形状精度及 表面粗糙度的基础， 也是实现复杂曲面零件表面完整性控制和评价的关键技术。 国内外研 究人员开发了多种不同类型的超精密原位测量系统， 但目前的研究主要基于接触式测量原 理， 测量速度慢， 不利于快速获取被测物体的三维形貌数据。  Precision/ultra-precision machining technology has become the main development direction and important research field of advanced manufacturing technology, especially ultra-precision machining technology for complex curved parts such as optical free-form surfaces in aerospace, defense, biomedical, communication, microelectronics Applications in the high-tech field are becoming more widespread. As an important part of ultra-precision machining of complex surfaces, high-precision in-situ detection and compensation control technology is the basis for improving the size, shape accuracy and surface roughness of ultra-precision machined parts, as well as the surface integrity control and evaluation of complex curved parts. Key technology. Researchers at home and abroad have developed many different types of ultra-precision in-situ measurement systems. However, the current research is mainly based on the contact measurement principle, and the measurement speed is slow, which is not conducive to quickly obtaining the three-dimensional shape data of the measured object.
光学自由曲面等复杂曲面零件对面形精度要求很高， 而且要求表面及表层无损伤。 光 学测量方法如光学显微测量法、 光学干涉测量法、 条纹投影法等以其快速、 高精度、 非接 触等优点在微纳级精度尺寸测量领域获得了广泛应用。 其中， 白光扫描干涉测量具有纳米 级甚至亚纳米级的测量分辨力， 重复性好， 然而， 受到光学系统的数值孔径和视场范围的 限制， 不适合进行具有大曲率面形的复杂曲面的测量。 而且在无辅助扫描装置的条件下， 其测量范围远不能达到毫米量级。 条纹投影法以其测量范围大、 测量速度快等优异性能， 已经在尺寸测量领域得到广泛应用， 可用于复杂曲面零件的三维形貌测量。 然而， 条纹投 影方法的测量精度无法达到纳米级的精度要求。  Complex curved surface parts such as optical free-form surfaces require high surface accuracy and require no damage to the surface and surface. Optical measurement methods such as optical microscopy, optical interferometry, and fringe projection have been widely used in the field of micro-nano precision dimensional measurement due to their advantages of fast, high precision, and non-contact. Among them, white light scanning interferometry has nanometer or even sub-nanometer measurement resolution and good repeatability. However, due to the numerical aperture and field of view of the optical system, it is not suitable for the measurement of complex curved surfaces with large curvature surface. . Moreover, in the absence of an auxiliary scanning device, the measurement range is far from the order of millimeters. Stripe projection method has been widely used in the field of dimensional measurement because of its excellent measurement range and fast measurement speed. It can be used for 3D shape measurement of complex curved parts. However, the measurement accuracy of the stripe projection method cannot meet the nanometer accuracy requirements.
如何实现光学自由曲面等复杂曲面零件三维形貌的高精度非接触原位测量成为精密 测量领域的一个重点研究方向。 针对单一测量方法难以完成复杂曲面零件超精密加工原位 测量问题， 研究开发一种能够满足测量范围、 分辨力、 精度和测量效率等多重要求的多光 学传感器融合测量方法， 成为当前超精密测量领域的研究焦点。 发明内容  How to realize high-precision non-contact in-situ measurement of three-dimensional shape of complex curved parts such as optical free-form surfaces has become a key research direction in the field of precision measurement. It is difficult to complete the in-situ measurement of ultra-precision machining of complex curved parts for a single measurement method. Research and development of a multi-optical sensor fusion measurement method that can meet the multiple requirements of measurement range, resolution, accuracy and measurement efficiency, and become the current ultra-precision measurement field. Research focus. Summary of the invention
为克服现有技术的不足， 提供用于光学自由曲面等具有大曲率面形的复杂曲面零件的 高精度原位检测过程的方法及装置， 非接触， 对零件表面及表层无损伤。 为达上述目的， 本发明采取的技术方案是，光学自由曲面三维形貌高精度非接触测量方法，包括以下步骤: 借助于高精度定位运动控制系统实现被测物体三自由度运动；  In order to overcome the deficiencies of the prior art, a method and a device for high-precision in-situ inspection of complex curved surface parts having a large curvature surface such as an optical free-form surface are provided, which are non-contact and have no damage to the surface and surface of the part. In order to achieve the above object, the technical solution adopted by the present invention is a high-precision non-contact measurement method for a three-dimensional shape of an optical free-form surface, comprising the following steps: implementing a three-degree-of-freedom motion of the measured object by means of a high-precision positioning motion control system;
使用光栅投影装置对被测物体表面投影光栅条纹， 由光栅投影视觉检测图像采集装置 获取经被测物体表面调制的变形条纹图， 送入计算机中经后续处理后， 恢复出被测物体表 面三维形貌；  The grating projection device is used to project the grating stripe on the surface of the object to be measured, and the deformed fringe pattern modulated by the surface of the measured object is obtained by the raster projection visual inspection image capturing device, and sent to the computer for subsequent processing to recover the three-dimensional shape of the surface of the measured object. Appearance
根据恢复出的被测物体表面三维形貌， 进行被测物体位姿自动识别， 规划白光扫描干 涉测量路径， 自动引导更精密的白光扫描干涉测头对被测物体局部特征进行纳米级精度扫 描测量， 由白光扫描图像采集装置获取干涉条纹图， 送入计算机中经后续处理， 得到测量 区域的三维形貌数据； According to the restored three-dimensional shape of the surface of the measured object, the posture of the measured object is automatically recognized, and the white light scanning is planned. The measurement path is automatically guided by a more precise white light scanning interferometer to perform nano-scale precision scanning measurement on the local features of the measured object, and the interference fringe pattern is obtained by the white light scanning image acquisition device, which is sent to the computer for subsequent processing to obtain the measurement area. Three-dimensional topographical data;
将光栅投影视觉检测和白光扫描干涉测量得到的数据通过多传感器海量数据融合算 法和相应的误差分离与补偿措施， 精确测量出光学自由曲面等复杂曲面零件的三维形貌特 征。  The data obtained by raster projection visual inspection and white light scanning interferometry are measured by multi-sensor massive data fusion algorithm and corresponding error separation and compensation measures to accurately measure the three-dimensional shape characteristics of complex curved surface parts such as optical free-form surfaces.
高精度定位运动控制系统由高精度电动位移平台、 高精度电动旋转平台和高精度电动 角位台组成， 借助于该平台控制被测物体实现三自由度运动。  The high-precision positioning motion control system consists of a high-precision electric displacement platform, a high-precision electric rotating platform and a high-precision electric angle table. The platform is used to control the measured object to achieve three-degree-of-freedom motion.
光栅投影视觉检测图像采集装置为两个科学级数字 CCD 摄像机， 两个科学级数字 CCD 摄像机沿高精度定位运动控制系统的高精度电动位移平台轴线方向以光栅投影装置 中心对称放置。  The grating projection visual inspection image acquisition device is two scientific-grade digital CCD cameras. Two scientific-grade digital CCD cameras are placed symmetrically along the axis of the grating projection device along the axis direction of the high-precision electric displacement platform of the high-precision positioning motion control system.
光栅投影装置对被测物体表面投影的光栅条纹， 是幅值、 相位和投射方向可调的正弦 光栅条纹、 余弦光栅条纹、 频率和方向不同的两种光栅条纹组合形成的复合光栅条纹、 莫 尔条纹、 灰度编码光栅条纹及彩色光栅条纹中的一种。  The grating stripe projected by the grating projection device on the surface of the object to be measured is a sinusoidal grating stripe with adjustable amplitude, phase and projection direction, a cosine grating stripe, a composite grating stripe formed by combining two kinds of grating strips with different frequencies and directions, Moir One of stripes, gray-coded raster stripes, and colored raster stripes.
白光扫描干涉测头采用显微干涉物镜， 扫描时采用白光光源照射， 将显微干涉物镜和 光学成像系统间通过转接器连接， 通过一个高精度压电陶瓷定位器带动显微干涉物镜完成 垂直扫描， 将显微干涉物镜光轴倾斜、 高精度定位运动控制系统带动被测物体沿水平方向 按一定步长运动的方式完成水平扫描， 由白光扫描图像采集装置通过光学成像系统接收干 涉条纹图。  The white light scanning interferometer adopts a microscopic interference objective lens, which is irradiated with a white light source during scanning, and the microscopic interference objective lens and the optical imaging system are connected through an adapter, and the microscopic interference objective lens is driven by a high precision piezoelectric ceramic locator to complete the vertical. Scanning, tilting the optical axis of the micro-interference objective lens, and the high-precision positioning motion control system drives the object to be measured to perform horizontal scanning in a horizontal direction by a certain step. The white light scanning image acquisition device receives the interference fringe pattern through the optical imaging system.
一种光学自由曲面三维形貌高精度非接触测量装置， 由高精度定位运动控制系统、 光 栅投影视觉检测单元、 白光扫描干涉测量单元和计算机构成；  A high-precision non-contact measuring device for optical free-form surface three-dimensional shape, comprising a high-precision positioning motion control system, a grating projection visual detecting unit, a white light scanning interferometric unit and a computer;
高精度定位运动控制系统由高精度电动位移平台、 高精度电动旋转平台和高精度电动 角位台组成， 借助于该平台控制被测物体实现三自由度运动；  The high-precision positioning motion control system is composed of a high-precision electric displacement platform, a high-precision electric rotating platform and a high-precision electric angle table, by which the object to be measured is controlled to realize three-degree-of-freedom motion;
光栅投影视觉检测单元由光栅投影装置、 图像采集装置组成， 由计算机产生的光栅条 纹通过光栅投影装置投影到被测物体表面形成变形条纹， 被测物体沿高精度位移平台运动 到图像采集装置的视场范围内， 被测物体在高精度角位台和高精度旋转平台作用下进行运 动， 使被测物体旋转一定的角度， 以使经被测物体表面调制的变形条纹图被图像采集装置 以最佳方式接收；  The grating projection visual detecting unit is composed of a grating projection device and an image collecting device, and the raster stripe generated by the computer is projected onto the surface of the object to be measured by the grating projection device to form a deformed stripe, and the measured object moves along the high-precision displacement platform to the image capturing device. Within the field range, the measured object moves under the action of a high-precision angular position table and a high-precision rotating platform, so that the measured object is rotated by a certain angle, so that the deformed fringe pattern modulated by the surface of the measured object is most used by the image collecting device. Good way to receive;
白光扫描干涉测量单元由显微干涉物镜、 光学成像系统、 白光光源和图像采集装置组 成，显微干涉物镜用于：通过一个高精度压电陶瓷定位器带动显微干涉物镜完成垂直扫描， 将显微干涉物镜光轴倾斜、 高精度定位运动控制系统带动被测物体沿水平方向按一定步长 运动的方式完成水平扫描， 和光学成像系统间通过转接器连接；  The white light scanning interferometric unit is composed of a microscopic interference objective lens, an optical imaging system, a white light source and an image acquisition device. The microscopic interference objective lens is used to: perform a vertical scanning by a micro-interference objective lens through a high-precision piezoelectric ceramic positioner, The micro-interference objective optical axis tilting, high-precision positioning motion control system drives the measured object to complete horizontal scanning in a horizontal direction by a certain step, and is connected with the optical imaging system through the adapter;
计算机用于： 产生光栅条纹； 由收到的变形条纹图恢复出被测物体表面三维形貌； 针 对需要更精密测量的被测物体局部区域信息， 选择合适的白光扫描干涉测量方式， 规划白 光扫描干涉测量路径， 自动引导白光扫描干涉测头对被测物体局部特征进行纳米级精度扫 描测量； 将光栅投影视觉检测单元和白光扫描干涉测量单元测量得到的数据通过多传感器 海量数据融合算法和相应的误差分离与补偿措施， 精确测量出光学自由曲面复杂曲面零件 的三维形貌特征。 The computer is used to: generate grating stripe; recover the three-dimensional shape of the surface of the measured object from the received deformed fringe pattern; select a suitable white light scanning interferometry method for planning the white light scanning for the local area information of the measured object that needs more precise measurement The interferometric measuring path automatically guides the white light scanning interferometer to perform nanometer-level precision scanning measurement on the local features of the measured object; the data measured by the grating projection visual detecting unit and the white light scanning interferometric unit passes through the multi-sensor The massive data fusion algorithm and the corresponding error separation and compensation measures accurately measure the three-dimensional topographical features of the complex free-form surface parts of optical free-form surfaces.
光栅投影视觉检测单元的图像采集装置为两个科学级数字 CCD摄像机， 两个科学级 数字 CCD摄像机沿高精度电动位移平台轴线方向以光栅投影视觉检测单元的光栅投影装 置中心对称放置。  The image acquisition device of the grating projection visual detection unit is two scientific-grade digital CCD cameras. Two scientific-grade digital CCD cameras are symmetrically placed along the axis of the high-precision electric displacement platform in the center of the grating projection device of the grating projection visual inspection unit.
光栅投影装置为 LCD液晶显示屏， LCD液晶显示屏采用水平向下投射方式。  The grating projection device is an LCD liquid crystal display, and the LCD liquid crystal display adopts a horizontal downward projection mode.
本发明具有以下技术效果：  The invention has the following technical effects:
由于本发明采用在同一运动控制系统框架内融合光栅投影视觉检测单元和白光扫描干 涉测量单元的方式， 使用光栅投影视觉检测单元获得大视场全局轮廓数据， 使用白光扫描 干涉测量单元对零件局部细节特征进行纳米级精度扫描测量， 因而本发明能显著提高光学 自由曲面等具有大曲率面形的复杂曲面零件在加工检测过程中的检测精度和分辨力， 测量 速度快， 非接触， 对零件表面及表层无损伤。 附图说明  Since the present invention adopts a method of combining a grating projection visual detecting unit and a white light scanning interferometric unit in the same motion control system framework, the grating projection visual detecting unit is used to obtain large field of view global contour data, and the white light scanning interferometric unit is used for partial details of the part. The feature performs nano-scale precision scanning measurement, so the invention can significantly improve the detection precision and resolution of the complex curved surface parts with large curvature surface such as optical free-form surface in the process of processing and detection, and the measurement speed is fast, non-contact, on the surface of the part and The surface layer is not damaged. DRAWINGS
图 1 为基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量基本原理 图。 图中： 1为用于正弦光栅投影的 LCD液晶屏， 2为高精度位移平台， 3为高精度角位 台和高精度旋转平台组合， 4为被测物体， 5为用于接收变形条纹图的科学级数字 CCD摄 像机， 6为白光扫描干涉测头。  Figure 1 shows the basic principle of high-precision non-contact measurement of optical free-form surface 3D shape based on multi-sensor fusion technology. In the figure: 1 is the LCD screen for sinusoidal grating projection, 2 is the high-precision displacement platform, 3 is the combination of high-precision angular position table and high-precision rotary platform, 4 is the measured object, and 5 is used to receive the deformed fringe pattern. The scientific digital CCD camera, 6 is a white light scanning interferometer.
图 2为光栅投影测量原理图。 图中： 7为计算机， 8为微控制器， 9为电机。  Figure 2 is a schematic diagram of the grating projection measurement. In the figure: 7 is the computer, 8 is the microcontroller, and 9 is the motor.
图 3为白光扫描干涉测量原理图。 图中： 21为高品质白光 LED光源， 31为分光镜， Figure 3 is a schematic diagram of white light scanning interferometry. In the figure: 21 is a high-quality white LED light source, 31 is a beam splitter,
41为压电驱动器， 10为用于接收白光扫描干涉条纹图的科学级数字 CCD摄像机。 41 is a piezoelectric actuator, and 10 is a scientific-grade digital CCD camera for receiving white light scanning interference fringe patterns.
图 4为本发明一实施例实物图。 具体实施方式  4 is a physical diagram of an embodiment of the present invention. detailed description
—种基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法： 在同一 高精度定位运动控制系统框架内构建光栅投影视觉检测单元和白光扫描干涉测量单元， 使 用光栅投影装置对被测物体表面投影正弦光栅条纹， 由图像采集装置获取经被测物体表面 调制的变形条纹图， 送入计算机中经后续处理后， 恢复出被测物体表面三维形貌。 根据光 栅投影视觉检测单元测量得到的被测物体表面三维形貌数据， 进行零件位姿自动识别， 规 划白光扫描干涉测量路径， 自动引导更精密的白光扫描干涉测头对被测物体局部特征进行 纳米级精度扫描测量， 由图像采集装置获取干涉条纹图， 送入计算机中经后续处理， 得到 测量区域的三维形貌数据。 将光栅投影视觉检测单元和白光扫描干涉测量单元测量得到的 数据通过多传感器海量数据融合算法和相应的误差分离与补偿措施， 精确测量出光学自由 曲面等复杂曲面零件的三维形貌特征。  A high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology: a grating projection visual detection unit and a white light scanning interferometric unit are constructed within the framework of the same high-precision positioning motion control system, using a grating projection device to The sinusoidal grating stripe is projected on the surface of the measuring object, and the deformed fringe pattern modulated by the surface of the measured object is obtained by the image collecting device, and sent to the computer for subsequent processing to recover the three-dimensional shape of the surface of the measured object. According to the three-dimensional shape data of the surface of the measured object measured by the grating projection visual inspection unit, the part pose is automatically recognized, the white light scanning interferometric path is planned, and the more precise white light scanning interferometer is automatically guided to perform nano-features on the measured object. The level precision scanning measurement, the interference fringe pattern is obtained by the image acquisition device, and sent to the computer for subsequent processing to obtain the three-dimensional shape data of the measurement area. The data measured by the grating projection visual inspection unit and the white light scanning interferometric unit are used to accurately measure the three-dimensional topography of complex curved surface parts such as optical free-form surfaces through multi-sensor massive data fusion algorithm and corresponding error separation and compensation measures.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中的高精度定位运动控制系统由高精度电动位移平台、 高精度电动旋转平台和 高精度电动角位台组成， 可控制被测物体实现三自由度运动。 In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology, the feature is: The high-precision positioning motion control system consists of a high-precision electric displacement platform, a high-precision electric rotating platform and The high-precision electric angle table is used to control the measured object to achieve three-degree-of-freedom motion.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中光栅投影视觉检测单元的光栅投影装置为 LCD液晶显示屏。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology, the feature is: wherein the grating projection device of the grating projection visual detection unit is an LCD liquid crystal display.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中光栅投影视觉检测单元的用于投影光栅条纹的 LCD 液晶显示屏采用水平向 下投射方式。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional topography based on multi-sensor fusion technology, the feature is: The LCD liquid crystal display screen for projecting the grating stripe of the grating projection visual detection unit adopts a horizontal downward projection mode.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中光栅投影视觉检测单元的图像采集装置为两个科学级数字 CCD摄像机。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology, the characteristics are: The image acquisition device of the grating projection visual detection unit is two scientific-level digital CCD cameras.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中光栅投影视觉检测单元的两个科学级数字 CCD摄像机沿高精度电动位移平 台轴线方向以 LCD液晶屏中心对称放置。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional topography based on multi-sensor fusion technology, the characteristics are: two raster-level visual CCD cameras of the scientific projection digital detection unit along the axis of the high-precision electric displacement platform The center of the LCD screen is placed symmetrically.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中光栅投影视觉检测单元投射的是由软件编程实现的幅值、 相位和投射方向可 调的正弦光栅条纹。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology, the feature is: wherein the grating projection visual detection unit projects the amplitude, phase and projection direction adjustable by software programming. Sinusoidal grating stripes.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中光栅投影视觉检测单元的两个科学级数字 CCD摄像机在各自视场范围内分 别接收经被测物体表面调制的正弦光栅条纹。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology, the characteristics are as follows: Two scientific-level digital CCD cameras of the grating projection visual detection unit respectively receive the warp in their respective fields of view A sinusoidal grating stripe modulated on the surface of the object is measured.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中白光扫描干涉测量单元由显微干涉物镜、 光学成像系统、 白光光源和图像采 集装置组成。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional topography based on multi-sensor fusion technology, the characteristic is: The white light scanning interferometric unit is composed of a microscopic interference objective lens, an optical imaging system, a white light source and an image collecting device.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中白光扫描干涉测量单元的显微干涉物镜和光学成像系统间通过转接器连接。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional topography based on multi-sensor fusion technology, the feature is: wherein the micro-interference objective lens of the white light scanning interferometry unit and the optical imaging system are connected by an adapter.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中白光扫描干涉测量单元的扫描方式为垂直扫描和水平扫描。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional topography based on multi-sensor fusion technology, the characteristics are: wherein the scanning mode of the white light scanning interferometric unit is vertical scanning and horizontal scanning.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中白光扫描干涉测量单元中的显微干涉物镜通过一个高精度压电陶瓷定位器带 动它完成垂直扫描。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology, the feature is: wherein the micro-interference objective lens in the white light scanning interferometric unit is driven by a high-precision piezoelectric ceramic locator Vertical scanning.
在上述基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量方法中， 其 特征是： 其中白光扫描干涉测量单元中的水平扫描方式采用光学系统光轴倾斜、 高精度定 位运动控制系统带动被测物体沿水平方向按一定步长运动的方式。  In the above-mentioned high-precision non-contact measurement method for optical free-form surface three-dimensional shape based on multi-sensor fusion technology, the feature is: wherein the horizontal scanning mode in the white light scanning interferometric unit adopts optical system optical axis tilting, high-precision positioning motion control system The method of moving the measured object in a horizontal direction by a certain step.
综上所述， 本发明提出的测量方法进而能够精确解算出被测物体表面各点的空间坐标 位置， 实现对光学自由曲面等复杂曲面零件的三维形貌特征的高精度非接触测量。  In summary, the measuring method proposed by the invention can accurately calculate the spatial coordinate position of each point on the surface of the measured object, and realize high-precision non-contact measurement of the three-dimensional shape features of the complex curved surface parts such as the optical free-form surface.
下面结合附图进一步详细说明本发明。  The invention will be further described in detail below with reference to the accompanying drawings.
图 1 为基于多传感器融合技术的光学自由曲面三维形貌高精度非接触测量基本原理 图。 （a) 图中 1为用于正弦光栅投影的 LCD液晶屏， 2为高精度位移平台， 3为高精度角 位台和高精度旋转平台组合， 4为被测物体， 5为用于接收变形条纹图的科学级数字 CCD 摄像机。 首先光栅投影视觉检测单元开始工作， 由计算机产生的正弦光栅条纹通过 LCD 液晶屏投影到被测物体表面， 被测物体沿高精度位移平台运动到 CCD摄像机的视场范围 内， 受 LCD 液晶屏尺寸的限制并参照被测物体表面形貌的复杂程度， 控制高精度角位台 和高精度旋转平台运动， 使被测物体旋转一定的角度， 以使经被测物体表面调制的变形条 纹图被 CCD摄像机以最佳方式接收。 相交于被测物体表面各点的入射光线和反射光线均 遵守反射定律，如点 W处所示。从采集得到的变形条纹图中解调出被测物体表面各点的高 度信息， 采用三维重建技术恢复被测物体的三维形貌特征。 光栅投影视觉检测可实现被测 物体表面三维形貌的微米级测量。如需对点 W附近区域进行更高精度检测，可根据光栅投 影视觉检测单元的测量结果重新规划测量路径， 使被测物体沿高精度位移平台运动到 6所 代表的白光扫描干涉测头的视场范围内， 控制高精度角位台和高精度旋转平台运动， 调整 被测物体的角度以获得最佳测量结果。 从采集得到的干涉条纹图中解调出测量区域各点的 高度信息， 采用三维重建技术恢复测量区域的三维形貌特征。 白光扫描干涉测量可实现对 被测物体局部区域的纳米级高精度检测。 针对光栅投影视觉检测和白光扫描干涉测量各自 得到的测量数据， 采用多传感器海量数据融合算法， 精确恢复出被测物体表面三维形貌特 征。 白光扫描干涉测量有两种测量方式， 如图 （b )和图 （c)所示。 图 （b ) 为垂直扫描测 量方式， 被测物体表面上各点根据其自身相对工作台平面的高度， 在白光扫描干涉测量装 置移动到一定位置时与相干平面相交达到最佳干涉， 由各点到达最佳干涉时对应工作台的 位置 （或相对移动距离） 可推导出各点相对高度信息。 白光垂直扫描干涉测量范围受视场 限制， 引入图像拼接会造成测量误差， 若白光扫描干涉测头需要测量的被测物体表面区域 较大， 则采用图 （c)所示的白光水平扫描干涉测量装置， 光轴相对水平面倾斜， 工作台带 动被测样品沿水平方向按一定步长完成干涉条纹的扫描， 根据被测物体表面各点的最佳干 涉在图像中的位置可确定各点的相对高度信息。 Figure 1 is a basic schematic diagram of high-precision non-contact measurement of optical free-form surface three-dimensional shape based on multi-sensor fusion technology. (a) In the figure, 1 is an LCD screen for sinusoidal grating projection, 2 is a high-precision displacement platform, 3 is a combination of a high-precision angular table and a high-precision rotating platform, 4 is an object to be measured, and 5 is for receiving deformation. Scientific digital CCD with striped pattern Camera. First, the grating projection visual detection unit starts working, and the sinusoidal grating stripe generated by the computer is projected onto the surface of the measured object through the LCD liquid crystal screen, and the measured object moves along the high-precision displacement platform to the field of view of the CCD camera, subject to the LCD liquid crystal screen size. According to the complexity of the surface topography of the measured object, the high-precision angular position table and the high-precision rotating platform are controlled to rotate the measured object by a certain angle, so that the deformed fringe pattern modulated by the surface of the measured object is CCD. The camera is received in the best way. The incident and reflected rays intersecting at various points on the surface of the measured object follow the law of reflection, as shown at point W. The height information of each point on the surface of the measured object is demodulated from the acquired deformed fringe pattern, and the three-dimensional reconstruction feature of the measured object is restored by using three-dimensional reconstruction technology. Grating projection visual inspection enables microscopic measurement of the three-dimensional shape of the surface of the object being measured. If it is necessary to perform higher-precision detection on the vicinity of the point W, the measurement path can be re-planned according to the measurement result of the grating projection visual detection unit, so that the measured object moves along the high-precision displacement platform to the view of the white-light scanning interferometric probe represented by 6 In the field range, control the high-precision angular position table and the high-precision rotary platform motion, and adjust the angle of the measured object to obtain the best measurement result. The height information of each point in the measurement area is demodulated from the interference fringe pattern obtained by the acquisition, and the three-dimensional reconstruction feature of the measurement area is restored by using the three-dimensional reconstruction technique. White light scanning interferometry enables nanometer-level high-precision detection of local areas of the measured object. For the measurement data obtained by the grating projection visual inspection and the white light scanning interferometry, a multi-sensor massive data fusion algorithm is used to accurately recover the three-dimensional topography of the surface of the measured object. White light scanning interferometry has two measurement methods, as shown in Figure (b) and Figure (c). Figure (b) is a vertical scanning measurement method. According to the height of its own surface relative to the table, the points on the surface of the measured object intersect with the coherent plane to achieve the best interference when the white light scanning interferometer moves to a certain position. The relative height information of each point can be derived by the position (or relative movement distance) of the corresponding table when the best interference is reached. The white light vertical scanning interferometry range is limited by the field of view. The introduction of image stitching will cause measurement error. If the surface area of the measured object to be measured by the white light scanning interferometer is large, the white light horizontal scanning interferometry shown in Figure (c) is used. The device, the optical axis is inclined with respect to the horizontal plane, and the working table drives the sample to be tested to complete the scanning of the interference fringes in a horizontal step in a horizontal direction, and the relative height of each point can be determined according to the position of the best interference of the points on the surface of the object to be measured in the image. information.
图 2为光栅投影测量原理图。 1为 LCD液晶屏， 用于投影由软件编程产生的正弦光栅 条纹。 对余弦光栅、 复合光栅 （频率、 方向不同的两种光栅条纹的组合）、 莫尔条纹及灰 度编码光栅条纹 （如格雷码光栅）、 彩色光栅条纹等也进行了测试， 效果大致相同， 不再 分别赘述。 5为科学级数字 CCD摄像机， 用于接收经被测物体表调制的变形条纹图， 4为 被测物体， 3为高精度角位台和高精度旋转平台组合， 2为高精度位移平台， 2和 3组成高 精度定位运动控制系统。 7为计算机， 8为微控制器， 9为电机。 受 LCD液晶屏尺寸限制， 考虑被测物体表面曲率变化较大时， 用单一 CCD摄像机无法获得被测物体表面全局三维 形貌， 因此采用双 CCD摄像机进行测量。 首先被测物体 4 (实线所示）在高精度定位运动 系统控制下运动到 5所代表的 CCD摄像机视场范围内， 旋转适当的角度， 完成测量， 然 后被测物体 4 (虚线所示）运动到 5所代表的另一 CCD摄像机视场范围内， 旋转适当的角 度， 完成测量。 将两 CCD摄像机分别测量得到的被测物体表面三维形貌数据通过图像拼 接技术恢复出被测物体完整三维形貌。  Figure 2 is a schematic diagram of the grating projection measurement. 1 is an LCD screen for projecting sinusoidal grating stripes generated by software programming. Cosine gratings, composite gratings (combination of two kinds of grating strips with different frequencies and directions), moiré fringes and gray-coded grating strips (such as Gray code grating), and color grating strips have also been tested. The effect is almost the same, no Let us repeat them separately. 5 is a scientific-grade digital CCD camera, which is used to receive the deformed fringe pattern modulated by the measured object table, 4 is the measured object, 3 is a high-precision angular position table and a high-precision rotating platform combination, 2 is a high-precision displacement platform, 2 And 3 constitute a high-precision positioning motion control system. 7 is a computer, 8 is a microcontroller, and 9 is a motor. Limited by the size of the LCD screen, considering the large curvature of the surface of the measured object, the global three-dimensional shape of the surface of the measured object cannot be obtained with a single CCD camera. Therefore, the measurement is performed by a dual CCD camera. First, the measured object 4 (shown by the solid line) moves under the control of the high-precision positioning motion system to the field of view of the CCD camera represented by 5, rotates the appropriate angle, completes the measurement, and then the measured object 4 (shown by the dotted line) Move to the range of the field of view of another CCD camera represented by 5, rotate the appropriate angle to complete the measurement. The three-dimensional shape data of the surface of the measured object measured by the two CCD cameras is restored by image stitching technology to recover the complete three-dimensional shape of the measured object.
图 3为白光扫描干涉测量原理图。 21为高品质白光 LED光源， 31为分光镜， 41为压 电驱动器。由高品质白光 LED光源产生的白光经透镜组到达分光镜，分成参考光束和测量 光束， 通过压电陶瓷驱动参考镜进给实现对被测物体表面的扫描， CCD摄像机接收干涉图 像， 从干涉图样中提取出最佳干涉点所在位置得到各点的相对高度， 描绘出被测物体表面 的三维形貌。 Figure 3 is a schematic diagram of white light scanning interferometry. 21 is a high-quality white LED light source, 31 is a beam splitter, and 41 is a piezoelectric actuator. The white light generated by the high-quality white LED light source reaches the beam splitter through the lens group, and is divided into a reference beam and measurement. The beam is scanned by the piezoelectric ceramic driven reference mirror to scan the surface of the object to be measured. The CCD camera receives the interference image, extracts the position of the best interference point from the interference pattern, and obtains the relative height of each point, and depicts the measured object. The three-dimensional shape of the surface.
在同一高精度定位运动控制系统框架内构建光栅投影视觉检测单元和白光扫描干涉 测量单元， 整套测量装置安放在高精度光学隔振平台上。  A grating projection visual inspection unit and a white light scanning interferometric measuring unit are constructed in the framework of the same high-precision positioning motion control system, and the whole measuring device is placed on the high-precision optical vibration isolation platform.
所述的高精度定位运动控制系统由高精度电动位移平台、 高精度电动旋转平台和高精 度电动角位台组成， 可控制被测物体实现三自由度运动。 其中高精度电动位移平台行程为 300mm, 高精度电动旋转台可实现 360°旋转， 高精度电动角位台可实现 ± 45°角度调整。  The high-precision positioning motion control system is composed of a high-precision electric displacement platform, a high-precision electric rotation platform and a high-precision electric angle table, and can control the object to be measured to realize three-degree-of-freedom motion. Among them, the high-precision electric displacement platform has a stroke of 300mm, the high-precision electric rotary table can realize 360° rotation, and the high-precision electric angle table can realize ± 45° angle adjustment.
所述的光栅投影视觉检测单元由正弦光栅投影装置和图像采集装置组成， 其中光栅投 影装置可选用屏幕尺寸为 478mmx300mm的 LCD 液晶屏， 水平向下投影由计算机编程产 生的正弦光栅条纹， 该正弦光栅条纹的幅值、 相位和投射方向可通过软件进行调整， LCD 液晶屏相对于载物面可进行 400mm高度调整。图像采集装置选用两个分辨率为 2456x 2058 像素的高分辨力数字 CCD摄像机，两 CCD摄像机沿高精度电动位移平台轴线方向以 LCD 液晶屏中心对称放置， 其高度和角度均可调整。  The grating projection visual detecting unit is composed of a sinusoidal grating projection device and an image collecting device, wherein the grating projection device can select an LCD liquid crystal screen with a screen size of 478 mm×300 mm, and horizontally project a sinusoidal grating strip generated by computer programming downward, the sinusoidal grating. The amplitude, phase and projection direction of the stripe can be adjusted by software. The LCD screen can be adjusted to a height of 400mm with respect to the loading surface. The image acquisition device selects two high-resolution digital CCD cameras with a resolution of 2456x 2058 pixels. The two CCD cameras are symmetrically placed along the axis of the LCD screen in the direction of the axis of the high-precision motorized displacement platform. The height and angle can be adjusted.
所述的白光扫描干涉测量单元由显微干涉物镜、光学成像系统、高品质白光 LED光源和科 学级数字 CCD摄像机组成。其中显微干涉物镜可选用 Mirau型显微干涉物镜（10X， 20X, 50X) , 通过一个高精度压电陶瓷定位器（PI P-721.CL, 电容传感器反馈闭环控制， 最小分 辨力 0.7nm， 范围 lOOum) 带动物镜完成垂直扫描。 光学成像系统可选用 Ultra-Zoom系列 镜头。 Ultra-Zoom系列镜头提供了非常高的分辨率和突出的对比度， 可选用它的微调对焦 功能和 /或同轴照明功能， 选用同轴照明功能， 可在高放大倍率应用场合中提供均匀照明， 在使用高分辨率摄像机时， 提供清晰的分辨率。 在本实施例中， Ultra-Zoom放在最下方， 然后上面是迷你型转接器和 C-型连接器， 以实现与科学级 CCD摄像机相连。 最上面是用 作图像采集装置的 CCD摄像机。 白光光源也要通过转接器连入以提供照明。 照明装置选 用中心波长为 580nm的高品质白光 LED光源。图像采集装置可选用分辨力为 1534x1024像 素的科学级 CCD摄像机， 进行采集后由采集卡传输给计算机进行后续处理。 The white light scanning interferometric unit is composed of a microscopic interference objective lens, an optical imaging system, a high quality white light LED light source, and a scientific digital CCD camera. The micro-interference objective lens can be selected with a Mirau-type micro-interference objective lens (10X, 20X, 50X), through a high-precision piezoelectric ceramic positioner (PI P-721.CL, capacitive sensor feedback closed-loop control, minimum resolution of 0.7nm, Range lOOum) Complete the vertical scan with an animal mirror. Ultra-Zoom lenses are available for optical imaging systems. Ultra-Zoom lenses offer very high resolution and outstanding contrast, with its fine-tuning focus and/or coaxial illumination, and coaxial illumination for uniform illumination in high-magnification applications. Provides clear resolution when using high resolution cameras. In this embodiment, the Ultra-Zoom is placed at the bottom, and then the mini adapter and the C-type connector are attached to the scientific CCD camera. At the top is a CCD camera used as an image capture device. The white light source is also connected through an adapter to provide illumination. The lighting unit uses a high quality white LED source with a center wavelength of 580 nm. The image acquisition device can select a scientific-grade CCD camera with a resolution of 1534x1024 pixels, and then collect it and transfer it to the computer for subsequent processing.
计算机从采集得到的变形条纹图中解调出被测物体表面各点的梯度信息， 通过波前重 构算法可恢复被测物体三维形貌特征， 获得被测物体大视场全局三维轮廓后， 提取被测物 体的几何特征信息， 与 CAD加工模型进行匹配处理， 实现无显式参考基准的零件位姿自 动识别， 为后续的局部高精度扫描测量的整体路径规划提供依据。 基于得到的零件位姿信 息和测量系统各单元的空间布局结果， 针对需要更精密测量的被测物体局部区域信息， 选 择合适的白光扫描干涉测量方式， 规划白光扫描干涉测量路径， 自动引导白光扫描干涉测 头对被测物体局部特征进行纳米级精度扫描测量。 白光扫描图像采集装置获得白光扫描干 涉条纹图， 通过采集卡传输到计算机中进行后续处理， 从干涉条纹图中解调出测量区域的 相对高度信息， 得到测量区域的三维形貌数据。 针对光栅投影视觉检测单元和白光扫描干 涉测量单元测量得到的海量数据， 采用最小平方估计算法进行不等精度不等密度的数据对 齐， 实现异类光学传感器海量数据的空间配准， 基于数据层和特征层融合原则， 建立海量 数据融合结构模型， 利用贝叶斯方法完成多传感器海量数据的融合， 并进行多向运动误差 的检测与补偿， 精确测量出光学自由曲面的三维形貌特征。 The computer demodulates the gradient information of each point on the surface of the measured object from the acquired deformed fringe pattern. The wavefront reconstruction algorithm can recover the three-dimensional topographical features of the measured object, and obtain the global three-dimensional contour of the large field of view of the measured object. The geometric feature information of the measured object is extracted and matched with the CAD machining model to realize automatic position recognition of the part without explicit reference, which provides a basis for the overall path planning of the subsequent local high-precision scanning measurement. Based on the obtained position and posture information of the part and the spatial layout result of each unit of the measurement system, select the appropriate white light scanning interferometry method for the local area information of the measured object that needs more precise measurement, plan the white light scanning interferometry path, and automatically guide the white light scanning. The interferometric probe performs nano-scale precision scanning measurement on the local features of the measured object. The white light scanning image acquisition device obtains the white light scanning interference fringe pattern, and transmits it to the computer for subsequent processing through the acquisition card, and demodulates the relative height information of the measurement area from the interference fringe pattern to obtain the three-dimensional shape data of the measurement area. For the massive data measured by the grating projection visual detection unit and the white light scanning interferometry unit, the least squares estimation algorithm is used to align the data with unequal precision and unequal density, realizing the spatial registration of the massive data of the heterogeneous optical sensor, based on the data layer and characteristics. Layer integration principle, building massive The data fusion structure model uses the Bayesian method to complete the fusion of multi-sensor massive data, and detects and compensates for multi-directional motion error, and accurately measures the three-dimensional topography of optical free-form surfaces.
可实现对 200mmx200mmx20mm测量范围内的光学自由曲面等复杂曲面零件三维形 貌的高精度非接触测量。 首先， 正弦光栅条纹通过 LCD 液晶屏投射到被测物体表面， 被 测物体在高精度定位运动控制系统控制下运动到某一 CCD摄像机的视场范围内， 调整被 测物体的角度以获得最佳测量结果， CCD 摄像机采集经被测物体表面调制的正弦光栅条 纹， 送入计算机中进行后续处理， 然后被测物体在高精度定位运动控制系统控制下运动到 另一 CCD摄像机的视场范围内， 进行相同操作。 从采集得到的变形条纹图中解调出被测 物体表面各点的高度信息， 采用三维重建技术恢复被测物体的三维形貌特征。 根据光栅投 影视觉检测单元对被测物体的重建结果， 对被测物体位姿进行自动识别， 规划白光扫描干 涉测量路径， 自动引导更精密的白光扫描干涉测头对工件局部细节特征进行纳米级精度扫 描测量， 图像采集装置获得干涉条纹图， 进行采集后由采集卡传输给计算机中进行后续处 理， 从干涉条纹图中解调出测量区域的相对高度信息， 得到测量区域的三维形貌数据。 将 光栅投影视觉检测单元和白光扫描干涉测量单元测得的数据通过多传感器海量数据融合 算法和相应的误差分离与补偿措施， 精确测量出光学自由曲面的三维形貌特征。  High-precision non-contact measurement of the three-dimensional shape of complex curved parts such as optical free-form surfaces in the measurement range of 200mm x 200mm x 20mm. First, the sinusoidal grating stripe is projected onto the surface of the object to be measured through the LCD screen, and the object to be measured is moved to the field of view of a certain CCD camera under the control of a high-precision positioning motion control system, and the angle of the object to be measured is adjusted to obtain the best. The measurement result, the CCD camera captures the sinusoidal grating stripe modulated by the surface of the measured object, and sends it to the computer for subsequent processing. Then, the measured object moves to the field of view of another CCD camera under the control of the high-precision positioning motion control system. Do the same. The height information of each point on the surface of the measured object is demodulated from the acquired deformed fringe pattern, and the three-dimensional reconstruction feature of the measured object is restored by using three-dimensional reconstruction technology. According to the reconstruction result of the object to be measured by the grating projection visual inspection unit, the posture of the measured object is automatically recognized, the white light scanning interferometric path is planned, and the more precise white light scanning interferometer is automatically guided to perform nano-level precision on the local detailed features of the workpiece. Scanning measurement, the image acquisition device obtains the interference fringe pattern, and then collects it and transmits it to the computer for subsequent processing, and demodulates the relative height information of the measurement area from the interference fringe pattern to obtain the three-dimensional shape data of the measurement area. The data measured by the grating projection visual inspection unit and the white light scanning interferometric unit are accurately measured by the multi-sensor massive data fusion algorithm and the corresponding error separation and compensation measures to accurately measure the three-dimensional topography of the optical free-form surface.

Claims

权 利 要 求 Rights request
、 一种光学自由曲面三维形貌高精度非接触测量方法， 其特征是， 包括以下步骤： A high-precision non-contact measurement method for a three-dimensional shape of an optical free-form surface, characterized in that the method comprises the following steps:
借助于高精度定位运动控制系统实现被测物体三自由度运动；  The three-degree-of-freedom motion of the measured object is realized by means of a high-precision positioning motion control system;
使用光栅投影装置对被测物体表面投影光栅条纹， 由光栅投影视觉检测图像采集 装置获取经被测物体表面调制的变形条纹图， 送入计算机中经后续处理后， 恢复出被 测物体表面三维形貌；  The grating projection device is used to project the grating stripe on the surface of the object to be measured, and the deformed fringe pattern modulated by the surface of the measured object is obtained by the raster projection visual inspection image capturing device, and sent to the computer for subsequent processing to recover the three-dimensional shape of the surface of the measured object. Appearance
根据恢复出的被测物体表面三维形貌， 进行被测物体位姿自动识别， 规划白光扫 描干涉测量路径， 自动引导更精密的白光扫描干涉测头对被测物体局部特征进行纳米 级精度扫描测量， 由白光扫描图像采集装置获取干涉条纹图， 送入计算机中经后续处 理， 得到测量区域的三维形貌数据；  According to the restored three-dimensional shape of the surface of the measured object, the posture of the measured object is automatically recognized, the white light scanning interferometric path is planned, and the more precise white light scanning interferometer is automatically guided to perform nano-scale precision scanning measurement on the local features of the measured object. Obtaining an interference fringe pattern by the white light scanning image acquisition device, and sending it to a computer for subsequent processing to obtain three-dimensional shape data of the measurement area;
将光栅投影视觉检测和白光扫描干涉测量得到的数据通过多传感器海量数据融合 算法和相应的误差分离与补偿措施， 精确测量出光学自由曲面等复杂曲面零件的三维 形貌特征。  The data obtained by raster projection visual inspection and white light scanning interferometry are measured by multi-sensor massive data fusion algorithm and corresponding error separation and compensation measures to accurately measure the three-dimensional topography of complex curved surface parts such as optical free-form surfaces.
、 如权利要求 1 所述的方法， 其特征是， 高精度定位运动控制系统由高精度电动位移平 台、 高精度电动旋转平台和高精度电动角位台组成， 借助于该平台控制被测物体实现 三自由度运动。 The method according to claim 1, wherein the high-precision positioning motion control system is composed of a high-precision electric displacement platform, a high-precision electric rotating platform and a high-precision electric angular table, and the object is controlled by the platform. Three degrees of freedom exercise.
、 如权利要求 1 所述的方法， 其特征是， 光栅投影视觉检测图像采集装置为两个科学级 数字 CCD摄像机， 两个科学级数字 CCD摄像机沿高精度定位运动控制系统的高精度 电动位移平台轴线方向以光栅投影装置中心对称放置。 The method according to claim 1, wherein the raster projection visual detection image acquisition device is two scientific-grade digital CCD cameras, and the two scientific-grade digital CCD cameras are positioned along the high-precision positioning motion control system with a high-precision electric displacement platform. The axis direction is symmetrically placed in the center of the grating projection device.
、 如权利要求 1 所述的方法， 其特征是， 光栅投影装置对被测物体表面投影光栅条纹， 是幅值、 相位和投射方向可调的正弦光栅条纹、 余弦光栅条纹、 频率和方向不同的两 种光栅条纹组合形成的复合光栅条纹、 莫尔条纹、 灰度编码光栅条纹及彩色光栅条纹 中的一种。 The method according to claim 1, wherein the grating projection device projects the grating stripe on the surface of the object to be measured, and is a sinusoidal grating stripe, a cosine grating stripe, a frequency and a direction different in amplitude, phase and projection direction. One of a composite grating stripe, a moiré fringe, a gray-coded grating stripe, and a color grating stripe formed by combining two grating strips.
、 如权利要求 1 所述的方法， 其特征是， 白光扫描干涉测头采用显微干涉物镜， 扫描时 采用白光光源照射， 将显微干涉物镜和光学成像系统间通过转接器连接， 通过一个高 精度压电陶瓷定位器带动显微干涉物镜完成垂直扫描， 将显微干涉物镜光轴倾斜、 高 精度定位运动控制系统带动被测物体沿水平方向按一定步长运动的方式完成水平扫 描， 由白光扫描图像采集装置通过光学成像系统接收干涉条纹图。 The method according to claim 1, wherein the white light scanning interferometer adopts a microscopic interference objective lens, and the white light source is irradiated during scanning, and the microscopic interference objective lens and the optical imaging system are connected through the adapter through a The high-precision piezoelectric ceramic locator drives the micro-interference objective lens to complete the vertical scanning. The tilting of the optical axis of the micro-interference objective lens and the high-precision positioning motion control system drive the measured object to move horizontally in a certain step to complete the horizontal scanning. The white light scanning image acquisition device receives the interference fringe pattern through the optical imaging system.
、 一种光学自由曲面三维形貌高精度非接触测量装置， 其特征是， 由高精度定位运动控 制系统、 光栅投影视觉检测单元、 白光扫描干涉测量单元和计算机构成； a high-precision non-contact measuring device for optical free-form surface three-dimensional shape, characterized in that it is composed of a high-precision positioning motion control system, a grating projection visual detecting unit, a white light scanning interferometric unit and a computer;
高精度定位运动控制系统由高精度电动位移平台、 高精度电动旋转平台和高精度 电动角位台组成， 借助于该平台控制被测物体实现三自由度运动； High-precision positioning motion control system consists of high-precision electric displacement platform, high-precision electric rotating platform and high precision The electric angle platform is composed, and the platform is controlled to realize three-degree-of-freedom motion by means of the platform;
光栅投影视觉检测单元由光栅投影装置、 图像采集装置组成， 由计算机产生的光 栅条纹通过光栅投影装置投影到被测物体表面形成变形条纹， 被测物体沿高精度位移 平台运动到图像采集装置的视场范围内， 被测物体在高精度角位台和高精度旋转平台 作用下进行运动， 使被测物体旋转一定的角度， 以使经被测物体表面调制的变形条纹 图被图像采集装置以最佳方式接收；  The grating projection visual detecting unit is composed of a grating projection device and an image collecting device, and the raster stripe generated by the computer is projected onto the surface of the object to be measured by the grating projection device to form a deformed stripe, and the measured object moves along the high-precision displacement platform to the image capturing device. Within the field range, the measured object moves under the action of a high-precision angular position table and a high-precision rotating platform, so that the measured object is rotated by a certain angle, so that the deformed fringe pattern modulated by the surface of the measured object is most used by the image collecting device. Good way to receive;
白光扫描干涉测量单元由显微干涉物镜、 光学成像系统、 白光光源和图像采集装 置组成， 显微干涉物镜用于： 通过一个高精度压电陶瓷定位器带动显微干涉物镜完成 垂直扫描， 将显微干涉物镜光轴倾斜、 高精度定位运动控制系统带动被测物体沿水平 方向按一定步长运动的方式完成水平扫描， 和光学成像系统间通过转接器连接；  The white light scanning interferometric unit is composed of a microscopic interference objective lens, an optical imaging system, a white light source and an image acquisition device. The microscopic interference objective lens is used to: perform a vertical scanning by a micro-interference objective lens through a high-precision piezoelectric ceramic locator, The micro-interference objective optical axis tilting, high-precision positioning motion control system drives the measured object to complete horizontal scanning in a horizontal direction by a certain step, and is connected with the optical imaging system through the adapter;
计算机用于：产生光栅条纹； 由收到的变形条纹图恢复出被测物体表面三维形貌; 针对需要更精密测量的被测物体局部区域信息， 选择合适的白光扫描干涉测量方式， 规划白光扫描干涉测量路径， 自动引导白光扫描干涉测头对被测物体局部特征进行纳 米级精度扫描测量； 将光栅投影视觉检测单元和白光扫描干涉测量单元测量得到的数 据通过多传感器海量数据融合算法和相应的误差分离与补偿措施， 精确测量出光学自 由曲面复杂曲面零件的三维形貌特征。  The computer is used to: generate grating stripe; recover the three-dimensional shape of the surface of the measured object from the received deformed fringe pattern; select a suitable white light scanning interferometry method for the local area information of the measured object that needs more precise measurement, plan white light scanning The interferometric measuring path automatically guides the white light scanning interferometer to perform nano-scale precision scanning measurement on the local features of the measured object; the data measured by the grating projection visual detecting unit and the white light scanning interferometric unit is passed through a multi-sensor massive data fusion algorithm and corresponding The error separation and compensation measures accurately measure the three-dimensional topography of the complex curved surface parts of the optical free-form surface.
7、 如权利要求 6 所述的装置， 其特征是， 光栅投影视觉检测单元的图像采集装置为两个 科学级数字 CCD摄像机， 两个科学级数字 CCD摄像机沿高精度电动位移平台轴线方 向以光栅投影视觉检测单元的光栅投影装置中心对称放置。 7. The apparatus according to claim 6, wherein the image capturing device of the grating projection visual detecting unit is two scientific-grade digital CCD cameras, and the two scientific-grade digital CCD cameras are arranged in the direction of the axis of the high-precision electric displacement platform. The grating projection device of the projection vision detecting unit is placed symmetrically in the center.
8、 如权利要求 6所述的装置， 其特征是， 光栅投影装置为 LCD液晶显示屏， LCD液晶显示 屏采用水平向下投射方式。 8. The apparatus according to claim 6, wherein the grating projection device is an LCD liquid crystal display, and the LCD liquid crystal display screen is horizontally projected downward.
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