CN108169131A - Molecule inspection method and equipment based on white light grating interferometry - Google Patents
Molecule inspection method and equipment based on white light grating interferometry Download PDFInfo
- Publication number
- CN108169131A CN108169131A CN201711457893.2A CN201711457893A CN108169131A CN 108169131 A CN108169131 A CN 108169131A CN 201711457893 A CN201711457893 A CN 201711457893A CN 108169131 A CN108169131 A CN 108169131A
- Authority
- CN
- China
- Prior art keywords
- white light
- detected sample
- optical imaging
- imaging system
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention relates to a kind of molecule inspection method and equipment based on white light grating interferometry, it is characterized in that, including：Bearing system；Optical imaging system；Optical lighting system, the optical lighting system include light source and the grating being set to before light source；Control system, the control system are connect with bearing system, for bearing system to be controlled to move along the x-axis and is horizontally rotated；And, computer system, the computer system are connect with optical imaging system and control system, for handling the detection image that optical imaging system returns, identify image in detected sample surface defect and for output order so that control system control bearing system action.The present invention can quickly detect the minute protrusions or recess on detected sample surface.
Description
Technical field
The present invention relates to a kind of molecule inspection methods and equipment based on white light grating interferometry, belong to optical detection
Technical field.
Background technology
Optical detecting method is the surface state that detected sample is obtained using optics, and foreign matter is detected by image processing
Or a kind of detection method of surface defect.Optical detection apparatus mainly includes the structures such as light source and CCD.It is set using optical detection
During standby progress optical detection, detected sample is irradiated using light source, detected sample is scanned by CCD and obtains its figure
As after information, analyzing and whether there is surface defect on detected sample.
With the fast development of Ultraprecision Machining and various miniature instruments, the structure feature ruler of related processing device
It is very little it is less and less, complexity is higher and higher, the development of Ultraprecision Machining proposes detection technique higher requirement, surpass
Precise detection technology is come into being.White light scanning interferometry is combined principle of interference with contemporary optics microtechnic, utilizes interference
Striped realizes nano level measurement resolution, and with non-contact, measurement to very high sensitivity possessed by spatial position change
The advantages that speed is fast is widely used in ultraprecise detection field.
When detected sample raised or sunken and substrate same material or detected sample be transparent material when, color without
Method is distinguished, and can not be detected.In existing patented technology, by the position shape of the position of CCD and light source in an angle, can just it detect
The minute protrusions or recess on detected sample surface.But there are one defects for the method, seek to dozen multi-angle photo-beat and take the photograph multiple photographs
Piece just can determine that protrusion or recess, and the review time is long, efficiency is low.
Invention content
The purpose of the present invention is overcoming the deficiencies in the prior art, provide a kind of based on the micro- of white light grating interferometry
Little particle inspection method and equipment, can quickly, qualitative detection go out the minute protrusions or recess on detected sample surface.
According to technical solution provided by the invention, a kind of molecule based on white light grating interferometry checks equipment,
It is characterized in, including：
Bearing system, the bearing system is used to carry and clamping detected sample can simultaneously drive detected sample to be moved along X-axis
It moves and horizontally rotates；
Optical imaging system, the optical imaging system are installed on above bearing system, and optical imaging system is used for to be detected
Sample is amplified image checking, and returns detection image；
Optical lighting system, the optical lighting system are located at the side of optical imaging system, and the optical lighting system includes
Light source and the grating being set to before the light source；
Control system, the control system are connect with bearing system, for bearing system to be controlled to move along the x-axis and is horizontally rotated；
And computer system, the computer system is connect with optical imaging system and control system, for optical imagery
The detection image of system passback is handled, and identifies the surface defect of detected sample in image, and to surface bulge or recess
Size carry out quantitative detection and for output order so that control system controls the action of bearing system.
Further, pedestal and the column being set on the base are further included；The bearing system is mounted on pedestal；It is described
Optical imaging system slides up and down formula and is installed on column.
Further, the light source is common white light source.
Further, the optical lighting system has angle with optical imaging system shape.
Further, the bearing system includes X-axis platform, which can move along the x-axis；It is solid on the X-axis platform
It is fixed there are one turntable, fixed there are one plummer on turntable, carrying clamping detected sample on plummer；The X-axis platform
It is connect respectively with driving equipment with turntable, driving equipment connection control system.
Further, the optical imaging system includes camera, the micro- cylinder mirror below camera and is set to aobvious
The microcobjective of micro- mirror bottom.
Further, the camera uses CCD or CMOS cameras；The amplification factor of the micro- cylinder mirror 1X to 10X it
Between.
Further, the computer system include the host that is connect respectively with optical imaging system, control system and
The display being connect with host；The host realizes the control to optical imaging system, the control to control system and image
Processing and identification.
Further, the bearing system further include for adjust manually turntable rotation first manual rotation button and
For adjusting the second manual rotation button of X-axis platform movement manually.
The present invention also provides a kind of molecule inspection method based on white light grating interferometry, it is characterized in that, including with
Lower step：
S1, detected sample is placed on bearing system, microcobjective is allow to scan entire detected sample, open white light
Light source；
S2, fine tuning detected sample, are transferred to interference fringe full of entire visual field, and striped is symmetrical；
S3, obtain on the computer systems detected sample on camera into picture, focus to image, clearly treated
Detect sample surfaces image；
The image information that S4, analysis detection obtain, checks raised or sunken.
The advantage of the invention is that：When the protrusion and substrate same material or detected sample of detected sample are transparent material
During matter, photo can easily, quickly recognize it is raised or sunken.
Description of the drawings
Fig. 1 is the structure diagram that the molecule of the present invention based on white light grating interferometry checks equipment.
Reference sign：1- pedestals, 2- columns, 3- bearing systems, 301-X axis platforms, 302- turntables, 303- carryings
Platform, 304- first manuals rotation button, the second manual rotation buttons of 305-, 4- optical imaging systems, 401- cameras, the micro- cylinders of 402-
Mirror, 403- microcobjectives, 5- optical lighting systems, 501- light sources, 502- gratings, 6- control systems, 7- computer systems, 701-
Host, 702- displays.
Specific embodiment
With reference to specific attached drawing, the invention will be further described.
As shown in Figure 1, the molecule of the present invention based on white light grating interferometry checks that equipment includes a pedestal
1st, column 2, bearing system 3, optical imaging system 4, optical lighting system 5, control system 6 and the calculating being fixed on pedestal 1
Machine system 7.The column 2 is equipped with vertical guide, and optical imaging system 4 coordinates with the vertical guide on column 2, realizes optics
Imaging system 4 slides up and down.
The bearing system 3 is assemblied on pedestal 1, for carrying and clamping detected sample.The bearing system 3 can
It moves along the x-axis, and detected sample can be driven to horizontally rotate.In Fig. 1, it is X-direction perpendicular to the direction of paper, says hereby
It is bright.The column 2 is fixed on the side of pedestal 1（On rear side of being in Fig. 1, in the present embodiment using vertical paper inward direction after
Side, on the contrary it is front side）, avoid interfering bearing system 3 that detected sample is driven to horizontally rotate.
Specifically, the bearing system 3 includes the X-axis platform 301 being assemblied on pedestal 1, which can be in pedestal 1
On move along the x-axis；X-axis platform 301 is fixed on a turntable 302；Fixed on turntable 302 there are one plummers 303, hold
Clamping detected sample can be carried on microscope carrier 303；Driving X-axis platform 301 and turntable 302 are further included in the bearing system 3
Driving equipment, driving equipment connection control system 6.The driving equipment includes common driving motor etc., in control system 6
Under control, correspondingly turntable 302 is driven to rotate or X-axis platform 301 is driven to be moved along the x-axis on pedestal 1.The bearing system
3 further include the first manual rotation button 304 for adjusting the rotation of turntable 302 manually and are moved for adjusting X-axis platform 301 manually
The second dynamic manual rotation button 305.
The optical imaging system 4 is assemblied on column 2, can be moved up and down along column 2, be shown as optical imaging system
4 coordinate with the vertical guide on column 2, realize sliding up and down for optical imaging system 4.Optical imaging system 4 can be to be checked
Sample is amplified image checking, and returns detection image.
Specifically, the optical imaging system 4 includes the camera 401 being mounted on column 2, positioned at 401 lower section of camera
Micro- cylinder mirror 402 and the microcobjective 403 for being set to micro- 402 bottom of cylinder mirror.The camera 401 uses CCD or CMOS phases
Machine, for performing imaging display to generated interference fringe；The micro- cylinder mirror 402 can adjust amplification factor, times magnification
Number is between 1X to 10X.
The optical lighting system 5 is located at the side of optical imaging system 4, and has angle with 4 shape of optical imaging system.
The optical lighting system 5 includes light source 501 and is set to the grating 502 of 501 front of light source.Specifically, the light source 501
For common white light source.
The computer system 7 is connect respectively with optical imaging system 4 and control system 6, for optical imaging system 4
The detection image of passback is handled, and identifies the surface defect of detected sample in image；And to control for output order
System 6 controls the action of bearing system 3, such as so that turntable 301 rotates or X-axis platform 301 moves along the x-axis on pedestal 1.Figure
In 1, computer system 7 includes the host 701 being connect respectively with optical imaging system 4, control system 6 and connects with host 701
The display 702 connect；The host 701 realizes the control to optical imaging system 401, the control to control system 6, Yi Jitu
As processing and identification.
Molecule inspection method of the present invention based on white light grating interferometry, includes the following steps：
S1, detected sample is placed on bearing system 3, microcobjective 403 is allow to scan entire detected sample, opened
White light source 501；
S2, fine tuning detected sample, are transferred to interference fringe full of entire visual field, and striped is symmetrical；
S3, obtained in computer system 7 detected sample on camera 401 into picture, focus to image, it is clear to obtain
Detected sample surface image；
The image information that S4, analysis detection obtain, checks raised or sunken.
Claims (10)
1. a kind of molecule based on white light grating interferometry checks equipment, it is characterized in that, including：
Bearing system（3）, the bearing system（3）Detected sample edge can be simultaneously driven for carrying and clamping detected sample
X-axis is mobile and horizontally rotates；
Optical imaging system（4）, the optical imaging system（4）It is installed on bearing system（3）Top, optical imaging system（4）
For being amplified image checking to detected sample, and return detection image；
Optical lighting system（5）, the optical lighting system（5）Positioned at optical imaging system（4）Side, the illumination optical
System（5）Including light source（501）And it is set to the light source（501）The grating of front（502）；
Control system（6）, the control system（6）With bearing system（3）Connection, for controlling bearing system（3）It moves along the x-axis
With horizontally rotate；
And computer system（7）, the computer system（7）With optical imaging system（4）And control system（6）Connection is used
In to optical imaging system（4）The detection image of passback is handled, identify image in detected sample surface defect and
For output order so that control system（6）Control bearing system（3）Action.
2. the molecule based on white light grating interferometry checks equipment as described in claim 1, it is characterized in that：Further include bottom
Seat（1）Be arranged on pedestal（1）On column（2）；The bearing system（3）Mounted on pedestal（1）On；The optical imagery system
System（4）The formula of sliding up and down is installed on column（2）On.
3. the molecule based on white light grating interferometry checks equipment as described in claim 1, it is characterized in that：The light source
（501）For common white light source.
4. the molecule based on white light grating interferometry checks equipment as described in claim 1, it is characterized in that：The optics
Lighting system（5）With optical imaging system（4）Shape has angle.
5. the molecule based on white light grating interferometry checks equipment as described in claim 1, it is characterized in that：The carrying
System（3）Including X-axis platform（301）, the X-axis platform（301）It can move along the x-axis；In the X-axis platform（301）It is fixed on one
A turntable（302）, turntable（302）There are one plummers for upper fixation（303）, plummer（303）Upper carrying clamping is to be detected
Sample；The X-axis platform（301）And turntable（302）It is connect respectively with driving equipment, driving equipment connection control system（6）.
6. the molecule based on white light grating interferometry checks equipment as described in claim 1, it is characterized in that：The optics
Imaging system（4）Including camera（401）, positioned at camera（401）The micro- cylinder mirror of lower section（402）And it is set to micro- cylinder mirror
（402）The microcobjective of bottom（403）.
7. the molecule based on white light grating interferometry checks equipment as claimed in claim 6, it is characterized in that：The camera
（401）Using CCD or CMOS cameras；The micro- cylinder mirror（402）Amplification factor between 1X to 10X.
8. the molecule based on white light grating interferometry checks equipment as described in claim 1, it is characterized in that：The calculating
Machine system（7）Including respectively with optical imaging system（4）, control system（6）The host of connection（701）And and host（701）
The display of connection（702）；The host（701）It realizes to optical imaging system（401）Control, to control system（6）'s
Control and image procossing and identification.
9. the molecule based on white light grating interferometry checks equipment as described in claim 1, it is characterized in that：The carrying
System（3）It further includes to adjust turntable manually（302）The first manual rotation button of rotation（304）And for adjusting manually
X-axis platform（301）The second mobile manual rotation button（305）.
10. a kind of molecule inspection method based on white light grating interferometry, it is characterized in that, include the following steps：
S1, detected sample is placed on bearing system（3）On, make microcobjective（403）Entire detected sample can be scanned,
Open white light source（501）；
S2, fine tuning detected sample, are transferred to interference fringe full of entire visual field, and striped is symmetrical；
S3, in computer system（7）On obtain detected sample in camera（401）On into picture, focus, obtain to image
Clearly detected sample surface image；
The image information that S4, analysis detection obtain, checks raised or sunken.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711457893.2A CN108169131A (en) | 2017-12-28 | 2017-12-28 | Molecule inspection method and equipment based on white light grating interferometry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711457893.2A CN108169131A (en) | 2017-12-28 | 2017-12-28 | Molecule inspection method and equipment based on white light grating interferometry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108169131A true CN108169131A (en) | 2018-06-15 |
Family
ID=62519362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711457893.2A Pending CN108169131A (en) | 2017-12-28 | 2017-12-28 | Molecule inspection method and equipment based on white light grating interferometry |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108169131A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101324422A (en) * | 2007-06-12 | 2008-12-17 | 西安普瑞光学仪器有限公司 | Method and apparatus of fine distribution of white light interference sample surface shapes |
| CN102305601A (en) * | 2011-05-18 | 2012-01-04 | 天津大学 | High-precision non-contact measurement method and device for three-dimensional profile of optical freeform curved surface |
| CN104458763A (en) * | 2014-12-12 | 2015-03-25 | 元亮科技有限公司 | Wide-view surface defect detector |
| CN105651785A (en) * | 2015-12-31 | 2016-06-08 | 中国科学院半导体研究所 | Microscopic imaging device and method for measuring microstructure defects on surface of semiconductor material |
-
2017
- 2017-12-28 CN CN201711457893.2A patent/CN108169131A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101324422A (en) * | 2007-06-12 | 2008-12-17 | 西安普瑞光学仪器有限公司 | Method and apparatus of fine distribution of white light interference sample surface shapes |
| CN102305601A (en) * | 2011-05-18 | 2012-01-04 | 天津大学 | High-precision non-contact measurement method and device for three-dimensional profile of optical freeform curved surface |
| CN104458763A (en) * | 2014-12-12 | 2015-03-25 | 元亮科技有限公司 | Wide-view surface defect detector |
| CN105651785A (en) * | 2015-12-31 | 2016-06-08 | 中国科学院半导体研究所 | Microscopic imaging device and method for measuring microstructure defects on surface of semiconductor material |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10935503B2 (en) | Apparatus, method and computer program product for defect detection in work pieces | |
| US8817249B2 (en) | Device and method for inspecting moving semiconductor wafers | |
| CN111203805B (en) | Full-automatic glass scratch repairing method | |
| TWI333544B (en) | Substrate inspection apparatus | |
| CN108717062A (en) | A kind of the details in a play not acted out on stage, but told through dialogues defect detecting device and its measurement method of heavy caliber ultra-precision surface | |
| CN107703154B (en) | Appearance inspection device and appearance inspection method | |
| CN210119453U (en) | Detection apparatus for smooth surface defect | |
| JP2013534312A (en) | Apparatus and method for three-dimensional inspection of wafer saw marks | |
| CN208833689U (en) | Detection device | |
| CN111879782B (en) | Detection device and detection method | |
| CN115295458A (en) | Wafer detection system and method | |
| CN209992407U (en) | Large-caliber ultra-clean smooth surface defect detection device combined with linear array camera | |
| WO2015174114A1 (en) | Substrate inspection device | |
| CN209085558U (en) | Detection device | |
| JP2019027915A (en) | Inspection method and inspection device | |
| CN108120665A (en) | The method and apparatus of monochromatic structure optical test molecule | |
| CN109884082B (en) | Method for detecting smooth surface defects | |
| WO2024051008A1 (en) | System and method for ultrafast and large-size scanning | |
| KR19980080031A (en) | Transparent object inspection method, apparatus and inspection system used | |
| CN108169131A (en) | Molecule inspection method and equipment based on white light grating interferometry | |
| TWI502185B (en) | Automatic inspection apparatus for substrate appearance | |
| TWI715662B (en) | Check device | |
| TWM615970U (en) | Partition edge inspection device for specially-shaped cut glass substrate | |
| JP4753706B2 (en) | Glossy plane inspection device | |
| KR20210143648A (en) | An apparatus for detecting internal defects in an electronic component and method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180615 |
|
| RJ01 | Rejection of invention patent application after publication |