CN111879782B - Detection device and detection method - Google Patents
Detection device and detection method Download PDFInfo
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- CN111879782B CN111879782B CN202010624213.7A CN202010624213A CN111879782B CN 111879782 B CN111879782 B CN 111879782B CN 202010624213 A CN202010624213 A CN 202010624213A CN 111879782 B CN111879782 B CN 111879782B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/13—Moving of cuvettes or solid samples to or from the investigating station
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0162—Arrangements or apparatus for facilitating the optical investigation using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing
- G01N2021/0175—Arrangements or apparatus for facilitating the optical investigation using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing for selecting operating means
Abstract
The application discloses a detection device and a detection method, wherein the detection Jiao Mokuai is used for acquiring the height information of a subarea in a region to be detected of an object to be detected along a measurement direction, wherein a first detection light beam is emitted to the surface of the region to be detected of the object to be detected, the region to be detected comprises at least one subarea, the first detection light beam comprises a plurality of lights with different wavelengths, the lights with different wavelengths are focused at different positions along the measurement direction, and the first detection light beam is reflected by the subarea to form first reflected light; acquiring a plurality of first signal lights with different wavelengths reflected by a region to be measured, and acquiring the height information of the subareas in the region to be measured along the measuring direction according to the first signal light intensity of the different wavelengths; the detection module focuses the subareas according to the height information; after focusing the subareas according to the height information, detecting the subareas to obtain the structural information of the subareas, so that the accurate detection of defects such as scratches and cracks indicated by the object to be detected is realized.
Description
Technical Field
The application relates to the technical field of detection, in particular to a detection device and a detection method.
Background
With the development of mobile phone manufacturing industry, requirements on mobile phones are higher and higher, and requirements on industrial detection are also increased. In order to improve the integration level of the product, the screen needs to be perforated in the manufacturing process of the mobile phone for installing the front camera. In the process of punching, defects such as scratches, cracks and the like are easily caused at the edge of the hole, so that the edge of the hole needs to be detected.
Disclosure of Invention
The embodiment of the application provides a detection device and a detection method.
In a first aspect, the present application provides a detection device comprising a detection Jiao Mokuai and a detection module, the detection Jiao Mokuai comprising a first light emitting device and a first detection device, wherein,
the first light emitting device is configured to emit a first detection light beam to a surface of a region to be measured of an object to be measured, where the region to be measured includes at least one sub-region, the first detection light beam includes a plurality of light beams with different wavelengths, the light beams with different wavelengths are focused at different positions along a measurement direction, and the first detection light beam is reflected by the region to be measured to form first reflected light; the first detection device is used for acquiring a plurality of first signal lights with different wavelengths reflected by the subareas, and acquiring the height information of the subareas in the to-be-detected area along the measuring direction according to the first signal light intensity of the different wavelengths;
the detection module is used for focusing the subareas according to the height information, and detecting the subareas after focusing to obtain the structural information of the subareas.
In one implementation, the first light emitting device includes: the first light source is used for emitting the first detection light beam; the dispersion lens is used for converging the light with the plurality of different wavelengths at different positions along the measuring direction;
the detection device comprises: the optical splitter and the first detector are used for receiving the first signal lights with the plurality of different wavelengths; the beam splitter is configured to enable the first signal lights with the plurality of different wavelengths to reach different areas of the photosensitive surface of the first detector.
In one implementation, the apparatus further comprises a first mobile device;
the first moving device is configured to move the sample Jiao Mokuai and the object to be measured relatively along a first moving plane, where the first moving plane has a non-zero included angle with the measuring direction.
In one implementation, the measurement direction is perpendicular to the first moving surface.
In one implementation, the sub-area is a plurality of, and the apparatus further includes: the positioning module is used for acquiring first position information of each subarea in the to-be-detected area along the first moving surface;
the first moving device is further configured to plan a moving track of the relative movement of the test Jiao Mokuai and the object to be tested according to the first position information of each sub-region, and relatively move the test Jiao Mokuai and the object to be tested according to the moving track, so as to obtain the height information of each sub-region.
In one implementation, the first moving device is further configured to obtain a first relative position of the check Jiao Mokuai and the sub-region along the first moving surface;
in terms of focusing the sub-region according to the height information, the detection module is specifically configured to: and acquiring a second relative position of the subarea and the detection module in the first moving plane according to the first relative position, and focusing the subarea according to the second relative position and the height information.
In one implementation, at least part of the surface to be measured has a film layer.
In one implementation, the detection module includes a second light source and a second detector,
the second light source is used for emitting a second detection light beam to the object to be detected;
the second detector is used for receiving second signal light formed by the object to be detected; and determining the structural information of the subareas according to the second signal light.
In one implementation, the structural information includes at least one of: the image information of the to-be-detected area, the geometric dimension information of the to-be-detected area and the defects in the to-be-detected area.
In one implementation, the detection module includes a zoom lens, a focal length of which is adjustable;
or the detection device further comprises a driving device, and the driving device is used for enabling the detection module and the object to be detected to move along a focusing direction, and the focusing direction is not perpendicular to the measuring direction.
In one implementation, the device further includes a second moving device, where the second moving device is configured to make the detection module and the object to be detected move relatively along a second moving plane, and the second moving plane has a non-zero included angle with the measurement direction.
In one implementation, the object to be tested has an opening therein; the region to be measured is the opening edge region.
In a second aspect, the present application provides a detection method applied to a detection device, the detection device including a detection Jiao Mokuai and a detection module, the method comprising:
acquiring the height information of the subarea in the to-be-measured area of the to-be-measured object along the measuring direction through the gauge Jiao Mokuai specifically comprises: emitting a first detection light beam to the surface of a region to be detected of an object to be detected, wherein the region to be detected comprises at least one subregion, the first detection light beam comprises a plurality of lights with different wavelengths, the lights with different wavelengths are focused at different positions along the measuring direction, and the first detection light beam is reflected by the subregion to form first reflected light; acquiring a plurality of first signal lights with different wavelengths reflected by a region to be measured, and acquiring the height information of the subareas in the region to be measured along the measuring direction according to the first signal light intensity of the different wavelengths;
the detection module focuses the subareas according to the height information; and after focusing the subareas according to the height information, detecting the subareas to obtain the structural information of the subareas.
In one implementation, the region to be measured includes a plurality of sub-regions; the detection method comprises the following steps: repeating the steps from the step of acquiring the height information of the subareas along the measuring direction through the detection Jiao Mokuai to the step of detecting the subareas through the detection module to obtain the structural information of the subareas until the structural information of the subareas is obtained.
In one implementation, the detection device further includes the first mobile device, and the method further includes:
the first moving device enables the detection Jiao Mokuai and the object to be detected to relatively move along a first moving surface, and the first moving surface and the measuring direction have a non-zero included angle;
performing first scanning processing on the region to be detected through the detection Jiao Mokuai, and acquiring the height information of the sub-region in the field of view of the detection Jiao Mokuai along the measuring direction in the first scanning processing process; acquiring morphology information of the region to be detected according to the height information of the plurality of sub-regions;
and carrying out second scanning treatment on the to-be-detected area through the detection module, focusing the sub-area in the view field of the detection Jiao Mokuai according to the morphology information in the second scanning treatment process, and detecting the sub-area in the view field of the detection Jiao Mokuai after focusing to obtain the structural information of the sub-area.
In one implementation, the method further comprises:
acquiring a first relative position of the inspection Jiao Mokuai and the subarea along a first moving surface by a first moving device in the first scanning process; acquiring a second relative position of the detection module and the sub-region along the first moving surface according to the first relative position;
the step of obtaining the morphology information of the to-be-detected area comprises the following steps: and determining the morphology information according to the height information of the plurality of subareas and the second relative position information.
In one implementation, the detection device further includes a positioning module, and before the detection module performs the first scanning processing on the to-be-detected area, the detection method further includes:
acquiring position information of each sub-region in the to-be-detected region under a base reference system in the first moving plane through the positioning module;
the detection method further comprises the following steps: planning a first relative movement track of the test Jiao Mokuai and the object to be tested according to the position information of each subarea; the first scanning process includes: the first moving device enables the detection Jiao Mokuai and the object to be detected to move relatively according to the first relative moving track, so that the detection Jiao Mokuai scans the area to be detected;
the detection device further comprises a second moving device; the method further comprises the steps of: the second moving device enables the detection module and the object to be detected to move relatively along a second moving surface, and the second moving surface and the measuring direction have a non-zero included angle; the detection method further comprises the following steps: planning a second relative movement track of the detection module and the object to be detected according to the position information of each subarea; the second scanning process includes: and enabling the detection module and the object to be detected to relatively move according to the second relative movement track so as to enable the detection module to scan the area to be detected.
In one implementation, the object to be tested has an opening therein; the region to be detected is the opening edge region; the first relative movement track and/or the second relative movement track is an annular track along the edge of the opening.
It can be seen that, in the embodiment of the present application, the height information of the sub-area in the area to be measured of the object to be measured along the measurement direction is obtained through the inspection Jiao Mokuai, wherein the first detection light beam is emitted to the surface of the area to be measured of the object to be measured, the area to be measured includes at least one sub-area, the first detection light beam includes a plurality of light beams with different wavelengths, the light beams with different wavelengths are focused at different positions along the measurement direction, and the first detection light beam is reflected by the sub-area to form first reflected light; acquiring a plurality of first signal lights with different wavelengths reflected by a region to be measured, and acquiring the height information of the subareas in the region to be measured along the measuring direction according to the first signal light intensity of the different wavelengths; the detection module focuses the subareas according to the height information; the accuracy of the height information acquired by the inspection Jiao Mokuai is high, so that the focusing accuracy and the detection accuracy can be improved. After focusing the subareas according to the height information, detecting the subareas to obtain the structural information of the subareas, so that the accurate detection of defects such as scratches and cracks indicated by the object to be detected is realized.
Drawings
In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a detecting device according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a focus detection module according to one embodiment of the application;
FIG. 3 is a schematic structural diagram of a detecting device according to another embodiment of the present application;
FIG. 4 is a schematic structural diagram of a detection module according to an embodiment of the present application;
fig. 5 is a flow chart of a detection method according to an embodiment of the present application.
Detailed Description
The present application will be further described in detail with reference to the drawings and examples, for the purpose of making the objects, technical solutions and advantages of the present application more apparent, and it should be understood that the specific examples described herein are only for the purpose of illustrating the present application and are not intended to limit the present application.
Fig. 1 is a schematic structural diagram of a detection device according to an embodiment of the present application. As shown in fig. 1, the detection means comprises a detector Jiao Mokuai and a detection module 20, the detector module 10 comprising a first light emitting means 11 and a first detection means 12, wherein,
the first light emitting device 11 is configured to emit a first detection light beam to a surface of a region to be measured of an object to be measured, where the region to be measured includes at least one sub-region, the first detection light beam includes a plurality of light beams with different wavelengths, the light beams with different wavelengths are focused at different positions along a measurement direction, and the first detection light beam forms a first signal light through the region to be measured; the first detecting device 12 is configured to obtain a plurality of first signal lights with different wavelengths formed by the sub-areas, and obtain height information of the sub-areas in the to-be-detected area along the measurement direction according to the first signal light intensities with different wavelengths;
the detection module 20 is configured to focus the sub-region according to the height information, and detect the sub-region after focusing to obtain structural information of the sub-region.
The structure and connection relationship between the test Jiao Mokuai and the test module 20 are not limited in the present application.
Wherein the structural information includes at least one of: the image information of the to-be-detected area, the geometric dimension information of the to-be-detected area and the defects in the to-be-detected area.
Specifically, when the structural information includes image information of the region to be detected, the first signal light is reflected by the region to be detected, that is, the detection module may perform bright field imaging on the region to be detected. Alternatively, the first signal light is scattered by the region to be detected, that is, the detection module may perform dark field imaging on the region to be detected.
Optionally, the detection device further includes a first stage, where the first stage is used to carry an object to be detected.
In this embodiment, the object to be detected is a screen of an electronic device, for example, a mobile phone, a tablet computer, a smart watch, a smart bracelet, etc., where the object to be detected has an opening; the region to be detected is the opening edge region; the edge area of the screen opening can be detected to detect whether scratches, cracks and other defects exist.
Further, the detection module can focus the subareas according to the height information, and detect the subareas after focusing to obtain the structural information of the subareas.
It can be seen that, in the embodiment of the present application, the height information of the sub-area in the area to be measured of the object to be measured along the measurement direction can be obtained through the inspection Jiao Mokuai, wherein the surface of the area to be measured of the object to be measured is emitted with a first detection light beam, the area to be measured includes at least one sub-area, the first detection light beam includes a plurality of lights with different wavelengths, the plurality of lights with different wavelengths are focused at different positions along the measurement direction, and the first detection light beam is reflected by the sub-area to form a first signal light; acquiring a plurality of first signal lights with different wavelengths reflected by a region to be measured, and acquiring the height information of the subareas in the region to be measured along the measuring direction according to the first signal light intensity of the different wavelengths; the detection module focuses the subareas according to the height information; after focusing the subareas according to the height information, detecting the subareas to obtain the structural information of the subareas, so that the accurate detection of defects such as scratches and cracks indicated by the object to be detected is realized.
In one implementation, as shown in fig. 2, the first light emitting device 11 includes: a first light source 111 for emitting the first detection light beam, and a dispersion lens 112; the dispersion lens is used for converging the light with the plurality of different wavelengths at different positions along the measuring direction;
the first detecting device 12 includes: a beam splitter 121 and a first detector 122 for receiving the plurality of first signal lights of different wavelengths; the beam splitter is configured to enable the first signal lights with the plurality of different wavelengths to reach different areas of the photosensitive surface of the first detector.
The measurement direction may be a central axis direction of the first detection beam. In other embodiments, the measurement direction may have a non-zero angle with the optical axis direction of the dispersive lens. For example, the focus detection module further comprises a mirror for changing the propagation direction of the detection beam.
The first detector 122 may be, for example, a spectrometer, and the first light source may be a white light source.
Specifically, the object to be measured is irradiated by emitting white light, the white light is converged at different positions along the measuring direction, the surfaces of the different positions have different heights, and the light beam is reflected by the subareas and is received by the spectrometer.
The first detector is a linear array charge coupled device (Charge Coupled Device, CCD) or an array of photomultiplier tubes. The beam splitter comprises a grating or a dispersive prism.
In one implementation, the apparatus further comprises a first mobile device 30;
the first moving device is configured to move the sample Jiao Mokuai and the object to be measured relatively along a first moving plane, where the first moving plane has a non-zero included angle with the measuring direction.
In this embodiment, the first moving device is configured to drive the object to be measured to move. Specifically, the first moving device is used for driving the first objective table to move. In other embodiments, the first moving device is configured to drive the focus detection module to move.
In this embodiment, the number of the sub-regions is plural.
The first moving device is further configured to plan a moving track of the relative movement of the test Jiao Mokuai and the object to be tested according to the first position information of each sub-region, and relatively move the test Jiao Mokuai and the object to be tested according to the moving track, so as to obtain the height information of each sub-region.
Specifically, in this embodiment, the first moving device controls the movement of the object to be detected, so that the inspection Jiao Mokuai scans the area to be detected, thereby obtaining the height information of each sub-area. In other embodiments, the first moving device controls the movement of the focus detection module to enable the detection Jiao Mokuai to scan the region to be detected, so as to obtain the height information of each sub-region. Alternatively, the first moving device moves together with the object to be measured by controlling the check Jiao Mokuai. Optionally, the measuring direction is perpendicular to the first moving surface; the measuring direction is perpendicular to the second moving surface. That is, in this embodiment, the first moving surface is parallel to the second moving surface. In other embodiments, the first moving surface and the second moving surface have an acute included angle.
As shown in fig. 3, the detection device further includes: a positioning module 40, the apparatus further comprising: the positioning module 40 is configured to obtain first position information of the sub-area in the to-be-detected area along the first moving surface;
the first moving device is further configured to plan a moving track of the relative movement of the test Jiao Mokuai and the object to be tested according to the first position information of each sub-region, and relatively move the test Jiao Mokuai and the object to be tested according to the moving track, so as to obtain the height information of each sub-region.
It should be noted that the structure and the connection relationship of the positioning module 40 are not limited in the present application, so long as the first position information of each sub-area along the first moving plane in the to-be-detected area can be obtained.
The positioning module obtains first position information of each sub-region in the to-be-detected region along the first moving surface, so that a moving track of relative movement of the detection Jiao Mokuai and the to-be-detected object is determined, a detection track can be provided for the detection module, and further the detection precision of the subsequent to-be-detected region is improved.
Alternatively, the positioning module 40 may be an imaging device or a topography detection device.
In one implementation, the field of view of the positioning module 40 is greater than the field of view of the detection module 20; and the field of view of the positioning module 40 is larger than the field of view of the focus detection module.
The detection device further comprises a third objective table and a conveying device, wherein the third objective table is used for bearing an object to be detected; the conveying device is used for conveying the object to be detected between different object stages.
The detection device further comprises a third moving device for controlling the positioning module and the object to be detected to move relatively along a third moving surface, and the third moving surface and the measuring direction have a non-zero included angle.
In this embodiment, the third moving surface is perpendicular to the measuring direction.
In this embodiment, the third moving device is configured to drive the object to be measured to move. Specifically, in this embodiment, the third moving device drives the third objective table to move, so as to move the object to be measured. In other embodiments, the third moving device may further drive the detection module to move, or the third moving device is configured to drive the detection module and the object to be detected to move together.
In this embodiment, the third moving device drives the object to be detected to move, so that the module to be inspected scans the area to be detected, thereby obtaining the position information of each sub-area.
In other embodiments, the detection device may not include a second mobile device. And the first moving device enables the object to be detected and the detection module to move relatively, so that the detection module scans the area to be detected.
In one implementation, the first moving device 30 is further configured to obtain a first relative position of the check Jiao Mokuai and the sub-region along the first moving surface;
in terms of focusing the sub-region according to the height information, the detection module is specifically configured to: and acquiring a second relative position of the subarea and the detection module in the first moving plane according to the first relative position, and focusing the subarea according to the second relative position and the height information.
In one implementation, at least part of the surface to be measured has a film layer.
In one implementation, as shown in fig. 4, the detection module 20 includes a second light source 21 and a second detector 22,
the second light source 21 is configured to emit a second detection beam to the object to be detected;
the second detector 22 is configured to receive a second signal light formed by the object to be detected; and determining the structural information of the subareas according to the second signal light.
The second light source can be a bright field light source and/or a dark field light source, and the azimuth angle of the direction of the light beam emitted by the dark field light source and the normal of the surface of the object to be detected is different from the azimuth angle of the direction of the optical axis and the normal of the surface of the object to be detected; the direction of the light beam emitted by the bright field light source and the direction of the optical axis of the lens 32 are symmetrical with respect to the normal line of the surface of the object to be measured.
Wherein the second detector may be a linear array charge coupled device (charge coupled device, CCD) or a time delay integrated charge coupled device (time delay and integra-tion charge coupled devices, TDICCD).
Alternatively, the detection module 20 may be an imaging device, a topography detection device, or a film thickness detection device.
The detection module 20 includes: the objective lens is used for receiving the second signal light and converging the second signal light to the second detector.
In one implementation, the detection module includes a zoom lens, a focal length of which is adjustable; or the detection device further comprises a driving device, and the driving device is used for enabling the detection module and the object to be detected to move along a focusing direction, and the focusing direction is not perpendicular to the measuring direction.
In one implementation, the device further includes a second moving device, where the second moving device is configured to make the detection module and the object to be detected move relatively along a second moving plane, and the second moving plane has a non-zero included angle with the measurement direction.
The second moving device is used for controlling the movement of the object to be detected or controlling the movement of the detection module.
The detection device further comprises a second objective table.
Specifically, the second moving device is used for driving the object to be detected to move. Specifically, in this embodiment, the second moving device drives the second stage to move, so as to move the object to be measured. In other embodiments, the second moving device may further drive the detection module to move, or the second moving device is configured to drive the detection module and the object to be detected to move together.
In this embodiment, the second moving device drives the object to be detected to move, so that the module to be inspected scans the area to be detected, thereby obtaining the structural information of each sub-area.
In other embodiments, the detection device may not include a second mobile device. And the first moving device enables the object to be detected and the detection module to move relatively, so that the detection module scans the area to be detected.
In other embodiments, the number of the object stages may be one or two; accordingly, the number of the mobile devices may be one or two.
Fig. 5 is a flow chart of a detection method according to an embodiment of the application. The detection method is applied to the detection device shown in fig. 1 and 3, and as shown in fig. 5, the detection method comprises the following steps:
501. acquiring the height information of the subarea in the to-be-measured area of the to-be-measured object along the measuring direction through the gauge Jiao Mokuai specifically comprises: emitting a first detection light beam to the surface of a region to be detected of an object to be detected, wherein the region to be detected comprises at least one subregion, the first detection light beam comprises a plurality of lights with different wavelengths, the lights with different wavelengths are focused at different positions along the measuring direction, and the first detection light beam is reflected by the subregion to form first reflected light; acquiring a plurality of first signal lights with different wavelengths reflected by a region to be measured, and acquiring the height information of the subareas in the region to be measured along the measuring direction according to the first signal light intensity of the different wavelengths;
502. the detection module focuses the subareas according to the height information;
503. and the detection module detects the subareas after focusing the subareas according to the height information to obtain the structural information of the subareas.
In this embodiment, the object to be detected may be a screen, and the screen has an opening therein; the region to be measured is an edge region of the opening.
Wherein the structural information includes at least one of: the image information of the to-be-detected area, the geometric dimension information of the to-be-detected area and the defects in the to-be-detected area can be cracks, scratches and the like.
In a specific implementation, the detection module can acquire a plurality of images of the subareas, and the geometric dimension or the surface defect information of the subareas can be obtained by analyzing the plurality of images.
It can be seen that, in the embodiment of the present application, the height information of the sub-area in the area to be measured of the object to be measured along the measurement direction is obtained through the inspection Jiao Mokuai, wherein the first detection light beam is emitted to the surface of the area to be measured of the object to be measured, the area to be measured includes at least one sub-area, the first detection light beam includes a plurality of light beams with different wavelengths, the light beams with different wavelengths are focused at different positions along the measurement direction, and the first detection light beam is reflected by the sub-area to form first reflected light; acquiring a plurality of first signal lights with different wavelengths reflected by a region to be measured, and acquiring the height information of the subareas in the region to be measured along the measuring direction according to the first signal light intensity of the different wavelengths; the detection module focuses the subareas according to the height information; after focusing the subareas according to the height information, detecting the subareas to obtain the structural information of the subareas, so that the accurate detection of defects such as scratches and cracks indicated by the object to be detected is realized.
In one implementation, the region under test includes a plurality of sub-regions; the detection method comprises the following steps: repeating the steps from the step of acquiring the height information of the subareas along the measuring direction through the detection Jiao Mokuai to the step of detecting the subareas through the detection module to obtain the structural information of the subareas until the structural information of the subareas is obtained.
In a specific implementation, the to-be-detected area may include a plurality of sub-areas, so that the structural information of the sub-area may be obtained for each sub-area, and the step of obtaining the structural information for each sub-area is the same, so that the structural information of each sub-area may be obtained.
In one implementation, the detection device further comprises the first mobile device, the method further comprising:
the first moving device enables the detection Jiao Mokuai and the object to be detected to relatively move along a first moving surface, and the first moving surface and the measuring direction have a non-zero included angle;
performing first scanning processing on the region to be detected through the detection Jiao Mokuai, and acquiring the height information of the sub-region in the field of view of the detection Jiao Mokuai along the measuring direction in the first scanning processing process; acquiring morphology information of the region to be detected according to the height information of the plurality of sub-regions;
and carrying out second scanning treatment on the to-be-detected area through the detection module, focusing the sub-area in the view field of the detection Jiao Mokuai according to the morphology information in the second scanning treatment process, and detecting the sub-area in the view field of the detection Jiao Mokuai after focusing to obtain the structural information of the sub-area.
In specific implementation, the first moving device controls the detection Jiao Mokuai and the object to be detected to move relatively along the first moving surface, so that the detection Jiao Mokuai can perform the first scanning treatment on the object to be detected, and thus the height information of each sub-region can be obtained, and the shape information of the object to be detected can be obtained according to the height information of the plurality of sub-regions.
The detection module comprises a zoom lens, and the focal length of the zoom lens is adjustable; the focusing the sub-region by the detection module according to the height information comprises: and the detection module focuses the sub-area by controlling the focal length of the zoom lens.
The detection device further comprises a driving device, wherein the driving device is used for enabling the detection module and the object to be detected to move along a focusing direction, and the focusing direction is not perpendicular to the measuring direction. The focusing the sub-region by the detection module according to the height information comprises: and the detection module and the object to be detected are enabled to move along the focusing direction through the driving device, so that the detection module focuses on the sub-region. Specifically, the driving device drives one or both of the detection device and the object to be detected to move along the focusing direction.
The driving device driving the detection device to move along the focusing direction comprises the driving device driving one or both of the second detector and the objective lens to move.
Specifically, in this embodiment, the focusing direction is the same as the measurement direction. In other embodiments, the focus direction has an acute included angle with the measurement direction.
In one implementation, the method further comprises:
acquiring a first relative position of the inspection Jiao Mokuai and the subarea along a first moving surface by a first moving device in the first scanning process; acquiring a second relative position of the detection module and the sub-region along the first moving surface according to the first relative position;
the step of obtaining the morphology information of the to-be-detected area comprises the following steps: and determining the morphology information according to the height information of the plurality of subareas and the second relative position information.
In specific implementation, acquiring a first relative position of the check Jiao Mokuai and the subarea along a first moving surface by a first moving device; according to the first relative position, the second relative position of the detection module and the subareas along the first moving surface is obtained, and the shape information of the subareas can be accurately determined according to the height information and the second relative position information of the plurality of subareas.
In one implementation, the detection device further includes a positioning module, and before the first scanning process is performed on the to-be-detected area through the detection Jiao Mokuai, the detection method further includes:
acquiring position information of each sub-region in the to-be-detected region under a base reference system in the first moving plane through the positioning module;
the detection method further comprises the following steps: planning a first relative movement track of the test Jiao Mokuai and the object to be tested according to the position information of each subarea; the first scanning process includes: the first moving device enables the detection Jiao Mokuai and the object to be detected to move relatively according to the first relative moving track, so that the detection Jiao Mokuai scans the area to be detected;
the detection device further comprises a second moving device; the method further comprises the steps of: the second moving device enables the detection module and the object to be detected to move relatively along a second moving surface, and the second moving surface and the measuring direction have a non-zero included angle; the detection method further comprises the following steps: planning a second relative movement track of the detection module and the object to be detected according to the position information of each subarea; the second scanning process includes: and enabling the detection module and the object to be detected to relatively move according to the second relative movement track so as to enable the detection module to scan the area to be detected.
In this embodiment, the position of the detection module in the base reference frame is a second preset value; the position in the baseline reference frame of the test Jiao Mokuai is a first preset value. Planning a first relative movement track of the object to be detected Jiao Mokuai according to the position information of each subarea comprises acquiring a first preset value according to the position information and planning the first relative movement track according to the first preset value; planning a second relative movement track of the detection module and the object to be detected according to the position information of each subarea comprises the following steps: and planning a second relative movement track of the detection module and the object to be detected according to the second preset value and the position information.
The positioning module is used for acquiring the position information of each subarea in the to-be-detected area in the reference frame in the first moving plane, so that the first relative moving track of the detection Jiao Mokuai and the to-be-detected object can be planned according to the position information of each subarea, and the second relative moving track of the detection module and the to-be-detected object can be planned according to the position information of each subarea, thereby realizing the accurate positioning of the to-be-detected area and improving the detection precision of the subsequent to-be-detected area.
In this embodiment, one or both of the object to be detected and the positioning device may be moved by the third moving device, so as to scan the area to be detected and obtain the position information of each sub-area.
The first relative movement track of the detection Jiao Mokuai and the object to be detected is planned according to the position information of each sub-region, so that the movement of the focus detection module or the object to be detected according to the first relative movement track can be controlled more accurately and efficiently, and the focus detection module can acquire the height information of the sub-region in the area to be detected along the measurement direction.
The detection module and the second relative movement track of the object to be detected are planned according to the position information of each sub-region, so that the detection module can be controlled to move according to the second relative movement track more accurately and efficiently, and the structural information of the sub-region is obtained.
In one implementation, the test object has an opening therein; the region to be detected is the opening edge region; the first relative movement track and/or the second relative movement track is an annular track along the edge of the opening.
In specific implementation, fitting is carried out according to the position information of each sub-region, and an annular track is obtained.
It can be seen that, in the embodiment of the present application, by planning a first relative movement track of the inspection Jiao Mokuai and the object to be measured according to the position information of each sub-area, the first moving device controls the inspection Jiao Mokuai and the object to be measured to move relatively according to the first relative movement track, and the second moving device controls the detection module and the object to be measured to move relatively along the moving surface, and plans a second relative movement track of the detection module and the object to be measured according to the position information of each sub-area; the control detection module and the object to be detected relatively move according to the second relative movement track, so that more accurate detection of the object to be detected can be realized, and the detection precision of the detection device is improved.
The above description is only of the preferred embodiments of the present application, and is not intended to limit the present application. It will be appreciated by those skilled in the art that the inspection apparatus of the present application is applicable not only to wafer inspection but also to inspection of other articles. Any modifications, equivalent substitutions, improvements, etc. which are within the spirit and principles of the present application are therefore intended to be included within the scope of the present application.
Claims (18)
1. A detection device is characterized in that the detection device comprises a detection Jiao Mokuai and a detection module, the detection Jiao Mokuai comprises a first light emitting device and a first detection device, the first light emitting device comprises a dispersion lens, wherein,
the first light-emitting device is configured to emit a first detection light beam to a surface of a region to be measured of an object to be measured, where the region to be measured includes at least one sub-region, the first detection light beam includes a plurality of lights with different wavelengths, the plurality of lights with different wavelengths are focused at different positions along a measurement direction, the first detection light beam is reflected by the region to be measured to form a first reflected light, and the measurement direction has a non-zero included angle with an optical axis direction of the dispersion lens;
the first detection device is used for acquiring a plurality of first signal lights with different wavelengths reflected by the subareas, and acquiring the height information of the subareas in the to-be-detected area along the measuring direction according to the light intensity of the first signal lights with different wavelengths;
and the detection module is used for focusing the sub-region according to the height information, and detecting the sub-region after focusing to obtain the structural information of the sub-region.
2. The apparatus according to claim 1, wherein the dispersion lens is configured to focus the plurality of light of different wavelengths at different positions along the measurement direction, the first light-emitting apparatus further comprising: a first light source for emitting the first detection light beam;
the first detection device comprises: the optical splitter and the first detector are used for receiving the first signal lights with the plurality of different wavelengths; the beam splitter is configured to enable the first signal lights with the plurality of different wavelengths to reach different areas of the photosensitive surface of the first detector.
3. The detection device of claim 1, wherein the device further comprises a first mobile device;
the first moving device is configured to move the sample Jiao Mokuai and the object to be measured relatively along a first moving plane, where the first moving plane has a non-zero included angle with the measuring direction.
4. A detection device according to claim 3, wherein the measuring direction is perpendicular to the first moving surface.
5. A detection device according to claim 3, wherein the sub-area is a plurality, the device further comprising: the positioning module is used for acquiring first position information of each subarea in the to-be-detected area along the first moving surface;
the first moving device is further configured to plan a moving track of the relative movement of the test Jiao Mokuai and the object to be tested according to the first position information of each sub-region, and relatively move the test Jiao Mokuai and the object to be tested according to the moving track, so as to obtain the height information of each sub-region.
6. A detection device according to claim 3, wherein the first moving means is further adapted to obtain a first relative position of the inspection Jiao Mokuai and the sub-area along the first moving face;
in terms of focusing the sub-region according to the height information, the detection module is specifically configured to: and acquiring a second relative position of the subarea and the detection module in the first moving plane according to the first relative position, and focusing the subarea according to the second relative position and the height information.
7. The device of claim 1, wherein at least a portion of the surface of the zone to be detected has a membrane layer.
8. The detection device according to any one of claims 1-7, wherein the detection module comprises a second light source and a second detector,
the second light source is used for emitting a second detection light beam to the object to be detected;
the second detector is used for receiving second signal light formed by the object to be detected; and determining the structural information of the subareas according to the second signal light.
9. The detection apparatus according to claim 8, wherein the structural information includes at least one of: the image information of the to-be-detected area, the geometric dimension information of the to-be-detected area and the defects in the to-be-detected area.
10. The detection apparatus according to claim 9, wherein the detection module includes a zoom lens, a focal length of which is adjustable;
or the detection device further comprises a driving device, and the driving device is used for enabling the detection module and the object to be detected to move along a focusing direction, and the focusing direction is not perpendicular to the measuring direction.
11. The apparatus according to claim 1, further comprising a second moving device for moving the detection module and the object along a second moving plane, wherein the second moving plane has a non-zero angle with respect to the measurement direction.
12. The device of claim 1, wherein the test object has an opening therein; the to-be-detected area is an opening edge area.
13. A detection method, applied to the detection device according to any one of claims 1 to 8, the detection device comprising a detection Jiao Mokuai and a detection module, the method comprising:
acquiring the height information of the subarea in the to-be-measured area of the to-be-measured object along the measuring direction through the gauge Jiao Mokuai specifically comprises: emitting a first detection light beam to the surface of a region to be detected of an object to be detected, wherein the region to be detected comprises at least one subregion, the first detection light beam comprises a plurality of lights with different wavelengths, the lights with different wavelengths are focused at different positions along the measuring direction, and the first detection light beam is reflected by the subregion to form first reflected light; acquiring a plurality of first signal lights with different wavelengths reflected by a region to be measured, and acquiring the height information of the subareas in the region to be measured along the measuring direction according to the first signal light intensity of the different wavelengths;
the detection module focuses the subareas according to the height information; and after focusing the subareas according to the height information, detecting the subareas to obtain the structural information of the subareas.
14. The method of claim 13, wherein the region to be measured comprises a plurality of sub-regions; the detection method comprises the following steps: repeating the steps from the step of acquiring the height information of the subareas along the measuring direction through the detection Jiao Mokuai to the step of detecting the subareas through the detection module to obtain the structural information of the subareas until the structural information of the subareas is obtained.
15. The method of claim 14, wherein the detection device further comprises a first mobile device, the method further comprising:
the first moving device enables the detection Jiao Mokuai and the object to be detected to relatively move along a first moving surface, and the first moving surface and the measuring direction have a non-zero included angle;
performing first scanning processing on the region to be detected through the detection Jiao Mokuai, and acquiring the height information of the sub-region in the field of view of the detection Jiao Mokuai along the measuring direction in the first scanning processing process; acquiring morphology information of the region to be detected according to the height information of the plurality of sub-regions;
and carrying out second scanning treatment on the to-be-detected area through the detection module, focusing the sub-area in the view field of the detection Jiao Mokuai according to the morphology information in the second scanning treatment process, and detecting the sub-area in the view field of the detection Jiao Mokuai after focusing to obtain the structural information of the sub-area.
16. The method of claim 15, wherein the method further comprises:
acquiring a first relative position of the inspection Jiao Mokuai and the subarea along a first moving surface by a first moving device in the first scanning process; acquiring a second relative position of the detection module and the sub-region along the first moving surface according to the first relative position;
the step of obtaining the morphology information of the to-be-detected area comprises the following steps: and determining the morphology information according to the height information of the plurality of subareas and the second relative position information.
17. The method of claim 15, wherein the detection apparatus further comprises a positioning module, and wherein the detection method further comprises, prior to the first scanning of the region to be detected by the detection module:
acquiring position information of each sub-region in the to-be-detected region under a base reference system in the first moving plane through the positioning module;
the detection method further comprises the following steps: planning a first relative movement track of the test Jiao Mokuai and the object to be tested according to the position information of each subarea; the first scanning process includes: the first moving device enables the detection Jiao Mokuai and the object to be detected to move relatively according to the first relative moving track, so that the detection Jiao Mokuai scans the area to be detected; and/or the number of the groups of groups,
the detection device further comprises a second moving device; the method further comprises the steps of: the second moving device enables the detection module and the object to be detected to move relatively along a second moving surface, and the second moving surface and the measuring direction have a non-zero included angle; the detection method further comprises the following steps: planning a second relative movement track of the detection module and the object to be detected according to the position information of each subarea; the second scanning process includes: and enabling the detection module and the object to be detected to relatively move according to the second relative movement track so as to enable the detection module to scan the area to be detected.
18. The method of claim 13, wherein the test object has an opening therein; the to-be-detected area is an opening edge area; the first relative movement track and/or the second relative movement track is a circular track along the edge of the opening.
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| CN113030107A (en) * | 2021-03-08 | 2021-06-25 | 深圳中科飞测科技股份有限公司 | Detection method, detection system, and non-volatile computer-readable storage medium |
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