CN111398295B - Defect detection device and method thereof - Google Patents
Defect detection device and method thereof Download PDFInfo
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- CN111398295B CN111398295B CN202010335133.XA CN202010335133A CN111398295B CN 111398295 B CN111398295 B CN 111398295B CN 202010335133 A CN202010335133 A CN 202010335133A CN 111398295 B CN111398295 B CN 111398295B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Abstract
The invention discloses a defect detection device and a method thereof, wherein the device drives a workpiece table to move along the push-broom direction of a time delay integral camera by controlling a driving motor, and the time delay integral camera acquires an actually measured object image element when the workpiece table moves once according to a preset step length; the displacement measuring unit measures the actual displacement of the workpiece platform once when the workpiece platform moves once according to the preset step length; the control unit is used for determining a standard object image element to be detected according to the actually measured object image element to be detected and the preset step length, and adjusting the preset step length of the next movement of the workpiece platform according to the current actual displacement until the time delay integral camera finishes scanning the object to be detected to obtain a plurality of standard object image elements to be detected; sequentially splicing a plurality of standard object image elements to form a standard object image; and defect detection is carried out on the object to be detected according to the standard object image, so that the standard object to be detected image is clearer, and the defect of the object to be detected is better identified.
Description
Technical Field
The invention relates to the technical field of optical measurement and detection, in particular to a defect detection device and a defect detection method.
Background
Automatic Optical Inspection (AOI) is an apparatus for detecting common defects encountered in welding production based on an Optical principle, can realize rapid, high-precision and nondestructive detection of an object to be detected, and is widely applied to multiple fields such as PCBs, IC chips, wafers, LEDs, TFTs, solar panels, and the like. The automatic optical detection technology generally adopts a high-precision optical imaging system to image an object to be detected, and a workpiece table bears the object to be detected to carry out high-speed scanning so as to realize high-speed measurement; the system compares the scanned image with an ideal reference image, or identifies the surface defects of the object to be measured by means of feature extraction and the like.
Among them, the camera used in the automatic optical inspection technology is usually a Time Delay Integration (Time Delay Integration) camera. When the camera is used for photographing, particularly in the high-speed scanning process of a workpiece table, errors can be generated in the position of the workpiece table due to the influence of factors such as servo, measurement and guide rails, and then the phenomenon that the camera collects images is blurred is caused. And the larger the position error of the workpiece table is, the more blurred the image acquired by the TDI camera is.
Disclosure of Invention
The invention provides a defect detection device and a method thereof, which aim to solve the problem of image blurring caused by the influence of error factors such as servo, measurement, guide rails and the like on a workpiece table.
In order to achieve the above object, an embodiment of an aspect of the present invention provides a defect detection apparatus, including:
the workpiece table is used for bearing an object to be tested;
the light source is used for emitting a detection light beam, the detection light beam irradiates the object to be detected, and the object to be detected is reflected or scattered to form a light beam to be imaged;
the optical imaging unit is positioned on the transmission path of the light beam to be imaged and used for collecting the light beam to be imaged;
the time delay integral camera is positioned on one side of the optical imaging unit, which is far away from the object to be detected;
the driving unit is used for driving the workpiece table to move along the push-broom direction of the time delay integral camera according to a preset step length, wherein the time delay integral camera acquires an actually measured object image element every time the workpiece table moves once according to the preset step length;
the displacement measuring unit measures the actual displacement of the workpiece table along the push-sweeping direction of the time delay integral camera once when the workpiece table moves once according to the preset step length;
the control unit is respectively electrically connected with the time delay integral camera, the displacement measuring unit and the driving unit and is used for acquiring a standard object image element according to the actually measured object image element and the preset step length, and adjusting the preset step length of the next movement of the workpiece platform according to the actual displacement of the current time until the time delay integral camera scans the object to be detected to finish acquiring a plurality of standard object image elements; sequentially splicing a plurality of standard object image elements to form a standard object image; and detecting the defect of the object to be detected according to the standard object image to be detected.
Optionally, the control unit is further configured to determine a response function of the actually measured object image element according to the preset step length; and determining the standard object image element to be detected according to the response function and the actually measured object image element to be detected.
Optionally, the control unit is further configured to determine the standard object image element according to the response function and the actually measured object image element by using a deconvolution operation.
Optionally, the control unit is further configured to obtain a difference between the preset step length and the actual displacement; and determining the sum of the preset step length and the difference value as the preset step length of the next movement of the workpiece table.
Optionally, the optical imaging unit includes a first optical lens and a second optical lens, the first optical lens is located at a side where the object to be measured deviates from the workpiece stage, the second optical lens is located at a side where the first optical lens deviates from the workpiece stage, the first optical lens is used for collecting and collimating the light beam to be imaged, and the light beam to be imaged passes through the second optical lens and converges on the time delay camera.
Optionally, the displacement measuring unit is a laser interferometer or a grating scale.
In order to achieve the above object, another embodiment of the present invention further provides a defect detection method, which is implemented based on the foregoing defect detection apparatus, and includes the following steps:
controlling the workpiece table to move along the push-scanning direction of the time delay integral camera by a preset step length;
acquiring the actual displacement of the workpiece table;
acquiring an actually measured object image element to be measured formed by the time delay integral camera;
acquiring a standard object image element to be detected according to the actually measured object image element to be detected and the preset step length;
determining a preset step length of the next movement of the workpiece table according to the preset step length and the actual displacement; repeating the steps in sequence until the time delay integral camera finishes scanning the object to be detected to obtain a plurality of standard object to be detected image elements;
sequentially splicing a plurality of standard object image elements to form a standard object image;
and detecting the defect of the object to be detected according to the standard object image to be detected.
Optionally, the obtaining of the standard object-to-be-detected image element according to the actually-measured object-to-be-detected image element and the preset step length includes:
determining a response function of the actually measured object image element according to the preset step length;
and determining the standard object image element to be detected according to the response function and the actually measured object image element to be detected.
Optionally, the determining the standard object-to-be-detected image element according to the response function and the actually-measured object-to-be-detected image element includes:
and determining the standard object image element to be detected according to the response function and the actually measured object image element to be detected by adopting deconvolution operation.
Optionally, the determining the preset step length of the next movement of the workpiece stage according to the preset step length and the actual displacement includes:
obtaining a difference value between the preset step length and the actual displacement;
and determining the sum of the preset step length and the difference value as the preset step length of the next movement of the workpiece table.
In summary, according to the defect detection apparatus and the method thereof provided by the embodiment of the invention, the driving motor is controlled to drive the workpiece stage to move along the sweeping direction of the time delay integral camera, and the time delay integral camera acquires an actually measured image element of the object to be detected every time the workpiece stage moves once according to the preset step length; the displacement measuring unit measures the actual displacement of the workpiece table along the push-scanning direction of the time delay integral camera once the workpiece table moves according to the preset step length; the control unit is used for acquiring a standard object image element to be detected according to the actually measured object image element to be detected and the preset step length, and adjusting the preset step length of the next movement of the workpiece platform according to the current actual displacement until the time delay integral camera finishes scanning the object to be detected to acquire a plurality of standard object image elements to be detected; sequentially splicing a plurality of standard object image elements to form a standard object image; and defect detection is carried out on the object to be detected according to the standard object image, so that the standard object to be detected image is clearer, and the defect of the object to be detected is better identified.
Drawings
FIG. 1 is a schematic structural diagram of a defect detection apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a displacement measuring unit in the defect detecting apparatus according to an embodiment of the present invention;
FIG. 3 is a flow chart of a defect detection method according to an embodiment of the present invention;
FIG. 4 is a flow chart of a defect detection method according to an embodiment of the present invention;
FIG. 5 is a flow chart of a defect detection method according to another embodiment of the present invention;
fig. 6 is a flowchart of a defect detection method according to another embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 1 is a schematic structural diagram of a defect detection apparatus according to an embodiment of the present invention. As shown in fig. 1, the defect detecting apparatus of the present invention includes:
the workpiece table 1 is used for bearing an object to be measured 8;
the light source 2 is used for emitting a detection light beam 201, the detection light beam 201 irradiates the object to be detected 8, and the detection light beam is reflected or scattered by the object to be detected 8 to form a light beam 202 to be imaged;
an optical imaging unit 3, located on the transmission path of the light beam 202 to be imaged, for collecting the light beam 202 to be imaged;
the time delay integral camera 4 is positioned on one side of the optical imaging unit 3, which is far away from the object to be measured 8;
the driving unit 5 is used for driving the workpiece platform 1 to move along the push-broom direction of the time delay integral camera 4 according to a preset step length, and the time delay integral camera 4 moves once in the workpiece platform 1 according to the preset step length to obtain an actually measured object image element;
the displacement measuring unit 6 is used for measuring the actual displacement of the workpiece table 1 which moves once according to the preset step length;
the control unit 7 is electrically connected with the time delay integral camera 4, the displacement measuring unit 6 and the driving unit 5 respectively, and is used for acquiring a standard object image element according to an actually measured object image element and a preset step length, and adjusting the preset step length of the next movement of the workpiece table 1 according to the actual displacement of the current time until the time delay integral camera 4 finishes scanning the object to be detected to acquire a plurality of standard object image elements; sequentially splicing a plurality of standard object image elements to form a standard object image; and detecting the defect of the object to be detected according to the standard image of the object to be detected.
Taking fig. 1 as an example, the working principle of the defect detecting apparatus is as follows: an object to be detected 8 is placed on a workpiece table 1, a light source 2 emits a detection light beam 201 to irradiate the object to be detected 8, the detection light beam 201 is reflected or scattered by the object to be detected to form a light beam 202 to be imaged, the light beam 202 to be imaged enters a time delay integral camera 4 through an optical imaging unit 3, and a control unit 7 controls a driving motor 5 to drive the workpiece table 1 to move along the X direction in the figure 1 in a first preset step length (the X direction is the push-scanning direction of the time delay integral camera 4). The time delay camera 4 forms a first actually measured object image element according to the light beam 202 to be imaged. The control unit 7 obtains a first standard object image element to be detected according to the first preset step length and the first actually-measured object image element.
Optionally, the control unit 7 is further configured to determine a response function of the actually measured object image element according to a preset step length; and determining the standard object image element to be detected through the response function and the actually measured object image element to be detected.
Optionally, the control unit 7 is further configured to determine the standard object image element according to the response function and the actually measured object image element by using a deconvolution operation.
Therefore, the control unit 7 performs deconvolution operation on the first real object image element and the corresponding response function to obtain the first standard object image element.
After the first standard object image element is obtained, the control unit 7 controls the driving unit 5 to drive the workpiece stage 1 to move along the X direction by a second preset step length, the time delay integral camera 4 forms a second actual measurement object image element according to the light beam 202 to be imaged, and obtains the second standard object image element according to the second preset step length and the second actual measurement object image element.
The control unit 7 performs deconvolution operation on the second actually-measured object image element and the corresponding response function to determine a second standard object image element.
And analogizing in sequence until the time delay integral camera 4 traverses the whole object to be measured 8 on the workpiece platform 1, outputting a plurality of standard object to be measured image elements by the time delay integral camera 4 and sending the standard object to the control unit 7, splicing the standard object to be measured image elements in sequence by the control unit 7 to form a standard object to be measured image of the whole object to be measured 8, wherein the standard object to be measured image is clearer, and the influence of the disturbance of the workpiece platform 1 on the imaging of the time delay integral camera 4 is avoided. Furthermore, the control unit 7 is beneficial to detecting and identifying the defects of the object to be measured 8 according to the standard object to be measured image.
Optionally, the control unit 7 is further configured to obtain a difference between the preset step length and the actual displacement; and determining the sum of the preset step length and the difference value as the preset step length of the next movement of the workpiece table.
Before the control unit 7 controls the driving motor 5 to drive the workpiece table 1 to move along the X direction in a second preset step length, the control unit 7 controls the driving motor 5 to drive the workpiece table 1 to move along the X direction in a first preset step length, the displacement measuring unit 6 measures actual displacement of the workpiece table 1 along the X direction, calculates a difference value between the first preset step length and the actual displacement, and performs summation operation on the difference value and the first preset step length to determine the difference value as a value of the second preset step length, and then the control unit 7 controls the driving motor 5 to drive the workpiece table 1 to move along the X direction in the second preset step length.
The preset step length is determined according to the conditions of factors such as the visible scanning distance, the camera pixel size, the camera pixel number and the reserved quantity.
For example, if the first preset step is 10 μm and the actual displacement of the workpiece stage 1 is 9 μm, the second preset step is 11 μm, so as to avoid that the actual measured object image element formed by the time delay integral camera is more and more blurred as the moving position error of the workpiece stage 1 caused by mechanical disturbance is worse and bigger along with the movement of the workpiece stage 1.
The light source 2 may be a highly uniform and highly stable light source, so that the time delay integral camera 4 avoids the detection light beam 201 emitted from the light source 2 from affecting the imaging during the imaging. The control unit 7 may be a computer. The driving unit 5 may be a driving motor.
Optionally, the optical imaging unit 3 includes a first optical lens 31 and a second optical lens 32, the first optical lens 31 is located on a side of the object 8 to be measured away from the stage 1, the second optical lens 32 is located on a side of the first optical lens 31 away from the stage 1, the first optical lens 31 is configured to collect and collimate the light beam 202 to be imaged, and the light beam 202 to be imaged is converged on the time delay camera 4 through the second optical lens 32.
The first optical lens 31 may be a collimating lens, and the second optical lens 32 may be a converging lens (convex lens). It is understood that the first optical lens 31 can be a lens or a group of lenses, and similarly, the second optical lens 32 can also be a lens or a group of lenses, which can be selected according to the actual situation. The first optical lens 31 and the second optical lens 32 may be installed in the same lens barrel, which is beneficial to preventing the optical imaging unit 3 from being disturbed by the external environment, and is further beneficial to sensing all the light beams 202 to be imaged on the detector of the time delay integral camera 4, so that the acquired actually measured object image carries all the defect information of the object 8 to be measured.
Alternatively, the displacement measuring unit 6 may be a laser interferometer or a grating scale.
Taking a laser interferometer as an example, as shown in fig. 2, the single-frequency laser interferometer uses the michelson interference principle, that is, after passing through a beam splitter 10, a laser beam (circularly polarized light) emitted from a laser interferometer main body 9 is split into a first laser beam 13 (linearly polarized light) and a second laser beam 14 (linearly polarized light); two beams of laser are reflected by a pyramid reflector 11 and a pyramid reflector 12 respectively and then return in parallel to emergent light, and are superposed after passing through a spectroscope 10, and the two beams of laser have the same frequency, the same vibration direction and constant phase difference, so that the interference condition is met; the cube-corner mirror 11 will generate a complete bright-dark interference phenomenon (the fringe changes for one period, the bright fringe becomes dark fringe, and the dark fringe becomes bright fringe) every time it moves for a distance of half a laser wavelength. The measuring distance is equal to the number of interference fringes multiplied by the half wavelength of the laser; by adopting a subdivision method, the fringe change condition delta N can be accurately obtained, and the movement measurement distance delta L of the workpiece table 1 is equal to the interference fringe change number delta N multiplied by the half wavelength lambda/2 of the laser. Namely, it is
It is understood that the pyramid reflector 11 may be mounted on the side of the workpiece table 1 along the push-scan direction of the time delay integral camera 4, and the actual displacement of the workpiece table 1 is accurately measured while the workpiece table 1 is moved along the push-scan direction.
It should be noted that the standard object-to-be-detected image element is obtained by deconvolution operation of the actually-measured object-to-be-detected image element and the response function, wherein the obtaining of the response function is related to the preset step length, and the preset corresponding relationship between the preset step length and the response function can be obtained through experiments: in the laboratory, the defect detection apparatus shown in fig. 1 is still used, and the standard defect object to be measured is selected as the object to be measured 8, and the surface of the standard defect object to be measured is flat. The actual displacement of the workpiece table 1 is the same as the preset step length. That is to say, when the control unit 7 controls the workpiece stage 1 to move along the push-scan direction of the time delay integral camera 4 by a preset step length, the actual movement displacement of the workpiece stage 1 is the preset step length, so that the image element of the object to be measured obtained by the time delay integral camera 4 each time is the image element of the standard object to be measured, the image element of the standard object to be measured is taken as the response function corresponding to the preset step length, and so on until the time delay integral camera 4 scans the whole object to be measured, and the corresponding relation between the preset step length and the response function is obtained.
And then prestoring the corresponding relation between the preset step length calibrated in the laboratory and the response function in the control unit 7 in advance, acquiring the response function according to the preset step length in the actual measurement process, and carrying out deconvolution operation on the response function and the actual measurement object image element to finally acquire a clear standard object image to be measured.
It is understood that, during the actual measurement process, the preset step length for controlling the next movement of the workpiece stage 1 may be different from the laboratory calibration, and the process of determining the response function according to the preset step length is exemplified as follows: in a laboratory, a standard object image element is obtained at intervals of 10 μm (i.e. a preset step length), in the actual measurement process, the workpiece stage 1 is controlled to move by 10 μm for the first time, when the actual displacement of the workpiece stage 1 is 9 μm, the workpiece stage 1 is controlled to move by 11 μm for the second time, and then the response function selected for the second time is the standard object image element at the position of 20 μm.
Based on the same inventive concept, the embodiment of the other aspect of the invention also provides a defect detection method. Fig. 3 is a flowchart of a defect detection method according to an embodiment of the present invention. As shown in fig. 3, the method comprises the following steps:
s1, controlling the workpiece table to move along the push-broom direction of the time delay integral camera by a preset step length;
s2, acquiring the actual displacement of the workpiece table;
s3, acquiring an actually measured object image element formed by the time delay integral camera;
s4, acquiring a standard object image element to be detected according to the actually measured object image element to be detected and a preset step length;
s5, determining the preset step length of the next movement of the workpiece table according to the preset step length and the actual displacement;
repeating the steps in sequence until the time delay integral camera finishes scanning the object to be detected to obtain a plurality of standard object to be detected image elements;
s6, sequentially splicing the plurality of standard object image elements to form a standard object image;
and S7, detecting the defect of the object to be detected according to the standard object to be detected image.
Alternatively, as shown in fig. 4, S4 includes:
s41, determining the response function of the actually measured object image element according to the preset step length;
and S42, determining the standard object image element according to the response function and the actually measured object image element.
Alternatively, as shown in fig. 5, S42 includes: and determining the standard object image element to be detected according to the response function and the actually measured object image element by adopting deconvolution operation.
Alternatively, as shown in fig. 6, S5 includes:
s51, acquiring a difference value between a preset step length and an actual displacement;
and S52, determining the sum of the preset step length and the difference value as the preset step length of the next movement of the workpiece table.
In summary, according to the defect detection apparatus and the method thereof provided by the embodiments of the invention, the driving motor is controlled to drive the workpiece stage to move along the sweeping direction of the time delay integration camera. Moving the workpiece table once according to a preset step length, and acquiring an actually measured object image element by a time delay integral camera; the displacement measuring unit measures the actual displacement of the workpiece table along the push-scanning direction of the time delay integral camera once the workpiece table moves according to the preset step length; the control unit is used for acquiring a standard object image element to be detected according to the actually measured object image element to be detected and the preset step length, and adjusting the preset step length of the next movement of the workpiece platform according to the current actual displacement until the time delay integral camera finishes scanning the object to be detected to acquire a plurality of standard object image elements to be detected; sequentially splicing a plurality of standard object image elements to form a standard object image; and defect detection is carried out on the object to be detected according to the standard object image, so that the standard object to be detected image is clearer, and the defect of the object to be detected is better identified.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (8)
1. A defect detection apparatus, comprising:
the workpiece table is used for bearing an object to be tested;
the light source is used for emitting a detection light beam, the detection light beam irradiates the object to be detected, and the object to be detected is reflected or scattered to form a light beam to be imaged;
the optical imaging unit is positioned on the transmission path of the light beam to be imaged and used for collecting the light beam to be imaged;
the time delay integral camera is positioned on one side of the optical imaging unit, which is far away from the object to be detected;
the driving unit is used for driving the workpiece table to move along the push-broom direction of the time delay integral camera according to a preset step length, wherein the time delay integral camera acquires an actually measured object image element every time the workpiece table moves once according to the preset step length;
the displacement measuring unit measures the actual displacement of the workpiece table along the push-sweeping direction of the time delay integral camera once when the workpiece table moves once according to the preset step length;
the control unit is respectively electrically connected with the time delay integral camera, the displacement measuring unit and the driving unit and is used for acquiring a standard object image element according to the actually measured object image element and the preset step length, and adjusting the preset step length of the next movement of the workpiece platform according to the actual displacement of the current time until the time delay integral camera scans the object to be detected to finish acquiring a plurality of standard object image elements; sequentially splicing a plurality of standard object image elements to form a standard object image; detecting the defect of the object to be detected according to the standard object image to be detected;
the control unit is further configured to determine a response function of the actually measured object image element according to the preset step length, wherein according to a standard defect object to be detected with a flat detected surface, the standard defect object to be detected is located on the workpiece stage, the control unit controls the workpiece stage to move along the push-and-sweep direction of the time delay integral camera according to the preset step length, the actual movement displacement of the workpiece stage is the preset step length, and the standard defect object to be detected image element acquired by the time delay integral camera each time is determined as the response function corresponding to the preset step length;
the control unit is further configured to determine the standard object image element to be detected according to the response function and the actually measured object image element to be detected by using deconvolution operation, and the standard object image element to be detected is obtained by deconvolution operation of the actually measured object image element to be detected and the response function.
2. The defect detection apparatus of claim 1, wherein the control unit is further configured to obtain a difference between the preset step length and the actual displacement; and determining the sum of the preset step length and the difference value as the preset step length of the next movement of the workpiece table.
3. The apparatus of claim 1, wherein the optical imaging unit includes a first optical lens and a second optical lens, the first optical lens is located on a side of the object to be measured away from the stage, the second optical lens is located on a side of the first optical lens away from the stage, the first optical lens is configured to collect and collimate the light beam to be imaged, and the light beam to be imaged passes through the second optical lens and is converged by the time delay integrator camera.
4. The apparatus of claim 1, wherein the displacement measuring unit is a laser interferometer or a grating scale.
5. A defect detection method implemented based on the defect detection apparatus of any one of claims 1 to 4, comprising the steps of:
controlling the workpiece table to move along the push-scanning direction of the time delay integral camera by a preset step length;
acquiring the actual displacement of the workpiece table;
acquiring an actually measured object image element to be measured formed by the time delay integral camera;
acquiring a standard object image element to be detected according to the actually measured object image element to be detected and the preset step length;
determining a preset step length of the next movement of the workpiece table according to the preset step length and the actual displacement; repeating the steps in sequence until the time delay integral camera finishes scanning the object to be detected to obtain a plurality of standard object to be detected image elements;
sequentially splicing a plurality of standard object image elements to form a standard object image;
and detecting the defect of the object to be detected according to the standard object image to be detected.
6. The defect detection method of claim 5, wherein the obtaining of the standard object image element according to the actually measured object image element and the preset step length comprises:
determining a response function of the actually measured object image element according to the preset step length;
and determining the standard object image element to be detected according to the response function and the actually measured object image element to be detected.
7. The defect detection method of claim 6, wherein said determining said standard test object image elements from said response function and said measured test object image elements comprises:
and determining the standard object image element to be detected according to the response function and the actually measured object image element to be detected by adopting deconvolution operation.
8. The method of claim 5, wherein the determining the preset step size for the next movement of the workpiece stage according to the preset step size and the actual displacement comprises:
obtaining a difference value between the preset step length and the actual displacement;
and determining the sum of the preset step length and the difference value as the preset step length of the next movement of the workpiece table.
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| CN1514306B (en) * | 2002-12-16 | 2010-04-07 | Asml荷兰有限公司 | Manufacturing method of photoetching equipment and device, and device obtained therefrom |
| CN1259559C (en) * | 2003-12-23 | 2006-06-14 | 四川大学 | Optical grating positioning image scanner |
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