CN106767521A - A kind of vertical scanning measures white light interference gauge head - Google Patents
A kind of vertical scanning measures white light interference gauge head Download PDFInfo
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- CN106767521A CN106767521A CN201710161336.XA CN201710161336A CN106767521A CN 106767521 A CN106767521 A CN 106767521A CN 201710161336 A CN201710161336 A CN 201710161336A CN 106767521 A CN106767521 A CN 106767521A
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- interference
- white light
- image pickup
- speculum
- lens barrel
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a kind of vertical scanning measurement white light interference gauge head, including white light micro-interference device, vertical movement device, double-raster displacement metering device, image capturing system, signal processing system and computer control system；White light micro-interference device includes illumination path, micro-interference component and ccd image pickup component, vertical movement device includes vertical motion assemblies, its inner platform drive Mirau interference microscopes carry out vertical scanning to measured workpiece, inner platform drives the dynamic grating movement of double-raster displacement metering device simultaneously, there is re-diffraction through quiet grating and produce interference fringe, photelectric receiver receives interference fringe, and the inner platform real-time displacement of vertical motion assemblies is obtained after being processed through signal processing circuit.Computer processing system can obtain the three-dimensional appearance of measured surface by processing the displacement of the inner platform of white light interference image and vertical motion assemblies during vertical scanning.The features such as present invention has compact conformation, certainty of measurement is high.
Description
Technical field
The present invention relates to measurement apparatus technical field, concretely relate to a kind of vertical scanning measurement white light interference and survey
Head, the gauge head can be used for wide range vertical scanning 3 d surface topography optical profilometry instrument.
Background technology
With the development of science and technology with progress, requirement to piece surface precision measure also more and more higher, advanced inspection
Survey technology is paid much attention to and extensive use by every country.Measuring surface form can be with according to whether contact with testee
It is divided into contact and contactless two major class.Vertical scanning white light interferometric method is a kind of highly important measuring surface form
Method, has the advantages that noncontact, wide range, and can carry out three-dimensional measurement, has quite varied answering in surface measurement field
With.
A kind of white light interference profile meter is disclosed in the prior art, is the drawbacks of it is present, the optical profilometer knot
Structure is extremely complex, and gauge head is separated with vertical scanning measurement apparatus and displacement measurement device, therefore, certainty of measurement is relatively low；
Further, since it uses Linnik type interference microscopes, the influence of vibration interference and air-flow to external world is more sensitive, anti-interference
Property is poor.
The content of the invention
It is an object of the present invention to be done for solution problems of the prior art provide a kind of vertical scanning measurement white light
Gauge head is related to, the gauge head carries vertical movement member and displacement measurement system, structure is simpler compact, can reach compared with high measurement
Precision.
To achieve the above object, the technical solution adopted in the present invention is：A kind of vertical scanning measures white light interference gauge head,
Including white light micro-interference device, vertical movement device, double-raster displacement metering device, image capturing system, signal transacting system
System and computer control system；
The white light micro-interference device is included for sending the illumination path of light beam, for receiving light beam and producing interference fringe
Micro-interference component and for image and can show white light interference image ccd image pickup component；Micro-interference group
After part includes that Mirau interference microscopes, white light interference image are gathered through image capturing system, computer analyzing and processing system is delivered to
System；
The vertical movement device include vertical motion assemblies, it include outer platform and be arranged in outer platform can along with treat
The inner platform that micromotion is made in the parallel direction of workpiece surface is surveyed, Mirau interference microscopes are fixedly connected with inner platform；Vertical movement
Piezoelectric ceramics is additionally provided with component, piezoelectric ceramics can drive inner platform under the driving of piezo-ceramic micro displacement unit driving power supply
Make micromotion, so as to drive Mirau interference microscopes to move, complete the vertical scanning measurement to workpiece surface to be measured, piezoelectricity pottery
Porcelain micro positioner driving power supply is by computer control system control；The double-raster displacement metering device is fixed with inner platform and connected
Connect, double-raster displacement metering device produces the interference fringe of cycle movement under the driving of inner platform and transmits to signal transacting system
System, signal processing system obtains the real-time displacement of the inner platform of vertical motion assemblies after being processed, and transmits to computer control
System processed；
Computer control system obtains work to be measured by processing the displacement of the inner platform of white light interference image and vertical motion assemblies
The three-dimensional appearance on part surface.
As further improving, the illumination path include white light source, light source bracket, the first illumination path lens barrel,
Second illumination path lens barrel, illumination path lens cone frame, illumination path support plate, lens group, aperture diaphragm, field stop,
One speculum and the first lens；The white light source is installed on light source bracket, light source bracket and the first illumination path lens barrel
One end is detachably fixed connection, and the other end of the first illumination path lens barrel is detachably fixed with one end of the second illumination path lens barrel
Connection, the other end of the second illumination path lens barrel is installed in illumination path lens cone frame, and illumination path lens cone frame is installed in
On illumination path support plate, the side of illumination path lens cone frame offers through hole A, and lens group is arranged on the first illumination path mirror
In cylinder, aperture diaphragm and field stop are sequentially arranged in the second illumination path lens barrel from top to bottom, and the first speculum is arranged on
In illumination path lens cone frame, the first lens are arranged on illumination path lens cone frame inside near the position of through hole A, illumination path
Support plate is arranged on vertical motion assemblies side.
Used as further improving, the micro-interference component also includes microscope stand, the second speculum and spectroscope,
Mirau interference microscopes are installed on microscope stand, and microscope stand is fixedly connected with inner platform, in Piezoelectric Ceramic
When platform is moved, microscope stand follows inner platform to be synchronized with the movement, so as to drive Mirau interference microscopes to move, completes to treat
Survey the vertical scanning measurement of workpiece surface；Rectangular channel is offered in the vertical motion assemblies, the second speculum is arranged on rectangle
Upper end inside groove, spectroscope is arranged on the lower end inside rectangular channel, and the optical axis of the first lens is by spectroscopical central point.
Used as further improving, the ccd image pickup component includes CCD camera, CCD camera frame, the second lens, the
Three speculums, image pickup light path lens barrel, image pickup light path lens cone frame and image pickup light path supporting plate, image pickup light
The side of road lens cone frame offers through hole B, and CCD camera is installed in one end of CCD camera frame, the other end of CCD camera frame with
One end of image pickup light path lens barrel is detachably fixed connection, and the other end of image pickup light path lens barrel is installed in image pickup light
In the lens cone frame of road, image pickup light path lens cone frame is installed in image pickup light path supporting plate, and lens are picked up installed in image
Take in light path lens barrel, the 3rd speculum is arranged in image pickup light path lens cone frame, the reflecting surface and second of the 3rd speculum
The reflecting surface of speculum is mounted opposite, and image pickup light path support plate is arranged on vertical motion assemblies opposite side.
As further improving, the double-raster displacement metering device include laser, magnifying glass, magnifying glass lens barrel,
It is quiet grating, quiet light barrier holder, quiet grating adjustment plate, dynamic grating, dynamic light barrier holder, dynamic grating motion connecting plate, speculum A, anti-
Penetrate mirror support A, speculum B, mirror support B, photelectric receiver and sensor box；Dynamic grating is arranged on dynamic light barrier holder,
Dynamic light barrier holder is fixed on dynamic grating motion connecting plate bottom, moves grating motion connecting plate bottom and the interior of vertical motion assemblies is put down
Platform is connected；Quiet grating is arranged on quiet light barrier holder, and quiet light barrier holder is arranged in quiet grating adjustment plate, quiet grating adjustment plate peace
Mounted in the inside of sensor box；Laser and magnifying glass lens barrel are installed in the top of sensor box and in opposite sides, amplify
Mirror is arranged in magnifying glass lens barrel, and speculum A is arranged on mirror support A, and mirror support A is arranged in sensor box
Portion, the side near laser, speculum B be arranged on mirror support B on, mirror support B be arranged on sensor box inside,
Near the side of magnifying glass；
Used as further improving, in the state of the reflected mirror A reflections of light beam of laser transmitting, light beam sequentially passes through dynamic light
Grid and quiet grating produce interference fringe after there is diffraction, when the inner platform of vertical motion assemblies drives dynamic grating to move, photoelectricity
Receiver receives the interference fringe of cycle movement, and transmits to signal processing system, and signal processing system is obtained after being processed
To the real-time displacement of the inner platform of vertical motion assemblies, and transmit to computer control system.
As further improving, first speculum from the horizontal by 45° angle, the 3rd speculum and horizontal direction
Angle at 45 °；Second speculum is arranged on the upper end inside rectangular channel, and from the horizontal by 45° angle, spectroscope is arranged on rectangle
Lower end inside groove, and from the horizontal by 45° angle；The underface of mirror support A is from the horizontal by 45O angles, speculum
The underface of support B is from the horizontal by 45O angles.
Used as further improving, the microscope stand side is provided with microscope and screws in cylinder, and microscope screws in cylinder and sets
Internal thread is equipped with, one end of Mirau interference microscopes is threadedly coupled between screwing in cylinder with microscope.
Used as further improving, the CCD camera frame bottom is provided with external screw thread, the top of image pickup light path lens barrel
Internal thread is provided with, is connected through a screw thread between CCD camera frame and image pickup light path lens barrel.
Used as further improving, the vertical motion assemblies are flexible hinge structure.
Compared with prior art, beneficial effects of the present invention are：The gauge head carries vertical movement member and displacement measurement system
System, it is simple and compact for structure, can reach compared with high measurement accuracy, while also greatly reducing production cost.Further, since it is used
Mirau interference microscope types, are influenceed smaller by extraneous vibration interference and air-flow, and anti-interference is preferable.
Brief description of the drawings
Fig. 1 is the operating diagram of the embodiment of the present invention.
Fig. 2 is general structure schematic diagram of the invention.
Fig. 3 is optical schematic diagram of the invention.
Marked in figure：1st, double-raster displacement metering device, 101, laser, 102, magnifying glass, 103, magnifying glass lens barrel,
104th, quiet grating, 105, quiet light barrier holder, 106, quiet grating adjustment plate, 107, dynamic grating, 108, dynamic light barrier holder, 109, dynamic light
Grid move connecting plate, the 110, first speculum, the 111, first mirror support, the 112, second speculum, the 113, second speculum
Support, 114, photelectric receiver, 115, sensor box, 2, vertical movement device, 201, vertical motion assemblies, 202, piezoelectricity pottery
Porcelain, 3, white light micro-interference device, 4, illumination path, 401, white light source, 402, light source bracket, the 403, first illumination path mirror
Cylinder, the 404, second illumination path lens barrel, 405, illumination path lens cone frame, 406, illumination path support plate, 407, lens group,
408th, aperture diaphragm, 409, field stop, 410 first speculums, the 411, first lens, 5, micro-interference component, 501, Mirau
Interference microscope, 502, microscope stand, the 503, second speculum, 504, spectroscope, 6, ccd image pickup component, 601, CCD
Camera, 602, CCD camera frame, the 603, second lens, the 604, the 3rd speculum, 605, image pickup light path lens barrel, 606, image
Pickup light path lens cone frame, 607, image pickup light path supporting plate, 7, signal processing system, 8, computer control system, 9, figure
As acquisition system, 10, workpiece for measurement.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment the present invention is described in further detail.
As Figure 1-3, it is a kind of vertical scanning measurement white light interference gauge head, including double-raster displacement metering device 1, vertical
Telecontrol equipment 2, white light micro-interference device 3, image capturing system 9, signal processing system 7 and computer control system 8；White light
Micro-interference device 3 includes illumination path 4, micro-interference component 5 and ccd image pickup component 6, illumination path, micro-interference
Component and ccd image pickup member parallel layout.
Illumination path provides lighting source, and ccd image pickup component gathers the interference image of Mirau interference microscopes, hangs down
Straight telecontrol equipment 2 carries out motion driving, double-raster displacement meter by signal processing system 7 under the control of computer control system 8
The signal of device 1 is measured by after the treatment of signal processing system 7, by the analytical calculation of computer 8, ccd image pickup component 6 is obtained
Interference image, is gathered by image capturing system 9 and is given computer analyzing and processing.
Illumination path 4 includes white light source 401, light source bracket 402, the first illumination path lens barrel 403, the second illumination path
Lens barrel 404, illumination path lens cone frame 405, illumination path support plate 406, lens group 407, aperture diaphragm 408, field stop
409th, the first speculum 410 and the first lens 411；The flexibility of the white light source 401 is installed in one end of light source bracket 402, the
One illumination path lens barrel 403 is cylindrical, the threaded one end of the other end of light source bracket 402 and the first illumination path lens barrel 403
Connection, one end of the first illumination path lens barrel 403 is connected with the threaded one end of the second illumination path lens barrel 404, the second illumination light
By being threaded into illumination path lens cone frame 405, illumination path lens cone frame 405 is installed in the other end of road lens barrel 404
On illumination path support plate 406, the side of illumination path lens cone frame 405 offers through hole A, and lens group 407 is arranged on first
In illumination path lens barrel 403, aperture diaphragm 408 and field stop 409 are sequentially arranged at the second illumination path lens barrel from top to bottom
In 404, the first speculum 410 is arranged in illumination path lens cone frame 405, and the first speculum 410 is from the horizontal by 45 °
Angle, the first lens 411 are arranged on the inside of illumination path lens cone frame 405 near the position of through hole A；Second illumination path lens barrel one
Side offers otch, the purpose is to convenient installation, adjustment aperture diaphragm and field stop.
In optical system, the diaphragm of thing Electrical imaging beam size is aperture diaphragm on limitation axle.One in optical system
As will be placed in object plane or image plane and be used to the diaphragm for limiting areas imaging as field stop.Aperture diaphragm is constrained to
As the aperture of light beam, that is, determine illumination, the resolution ratio of imaging；Field stop determine visual field, and image objects scope.
Micro-interference component 5 includes Mirau interference microscopes 501, microscope stand 502, the second speculum 503 and light splitting
Mirror 504, the side of microscope stand 502 is provided with microscope and screws in cylinder 5021, and microscope screws in cylinder 5021 and is provided with internal thread,
One end of Mirau interference microscopes 501 is threadedly coupled between screwing in cylinder 502 with microscope.
Ccd image pickup component 6 includes CCD camera 601, CCD camera frame 602, the second lens 603, the 3rd speculum
604th, image pickup light path lens barrel 605, image pickup light path lens cone frame 606 and image pickup light path supporting plate 607, image is picked up
The side for taking light path lens cone frame 606 offers through hole, and CCD camera 601 is installed in one end of CCD camera frame 602, CCD camera
The other end of frame 602 is connected with one end of image pickup light path lens barrel 605, and the other end of image pickup light path lens barrel 605 is fixed
In image pickup light path lens cone frame 606, image pickup light path lens cone frame 606 is installed in image pickup light path supporting plate
On 607, lens 603 are arranged in image pickup light path lens barrel 605, and the 3rd speculum 604 is arranged on image pickup light path lens barrel
In support 606, the 3rd speculum 604 is from the horizontal by 45° angle, the reflecting surface of the 3rd speculum 604 and the second speculum 503
Reflecting surface be mounted opposite；The bottom of CCD camera frame 602 is provided with external screw thread, and the top of image pickup light path lens barrel 605 is provided with interior spiral shell
Line, is connected through a screw thread between CCD camera frame 602 and image pickup light path lens barrel 605.
The light beam that white light source 401 sends, is imaged in the focus of lens group 407, and be completely covered after lens group 407
Aperture diaphragm 408, afterwards light beam pass through field stop 409, and further through the first speculum 410 reflect after pass through the first lens
411, after enter Mirau interference microscopes 501 through spectroscope 504, light beam is in Mirau interference microscopes 501 by its beam splitting
Plate is divided into two beams, a branch of to transmit Mirau interference microscopes 501, and Mirau interference is reflected back by the measured surface of workpiece for measurement 10
Microscope 501, meets at its beam-splitting board with the another light beam reflected by the plane of reference, and two-beam is in aplanatism or optical path difference pole
Small position produces interference fringe, and wherein zero order interference fringe light intensity is most strong, and some are put in Mirau interference microscopes to correspond to tested surface
Focussing plane on, the elevation information comprising measured point.Interference fringe is successively through the second speculum 503 and the first speculum 410
The first lens 411 are sent to after reflection, through the first lens 411 after show white light interference on the photosurface of CCD camera 601
Image, the white light interference image is delivered to after image capturing system 9 is acquired, and is further delivered to computer analyzing and processing system
System 8；
Vertical movement device 2 includes vertical motion assemblies 201, and vertical motion assemblies 201 are flexible hinge structure, and it includes outer flat
Platform and the inner platform that can make micromotion along the direction parallel with the surface of workpiece for measurement 10 being arranged in outer platform, vertical movement
Component 201 is processed using line cutting technology on one piece of steel spring plate.Piezoelectricity pottery is additionally provided with vertical motion assemblies 201
Porcelain 202, piezoelectric ceramics 202 can drive inner platform to make micromotion under the driving of piezo-ceramic micro displacement unit driving power supply, pressure
Electroceramics micro positioner driving power supply offers rectangular channel, second by computer control system control in vertical motion assemblies 201
Speculum 503 is arranged on the upper end inside rectangular channel, and from the horizontal by 45° angle, spectroscope 504 is arranged on inside rectangular channel
Lower end, and from the horizontal by 45° angle, the optical axis of the first lens 411 by spectroscope 504 central point；Microscope stand
502 one end are fixedly connected with inner platform, and the mobile drive microscope stand 502 of inner platform is moved, so that it is aobvious to drive Mirau to interfere
Micro mirror 501 is moved, and completes the vertical scanning measurement to workpiece surface to be measured.When the inner platform of vertical motion assemblies drives Mirau
When interference microscope makees vertical scan motion, each point of the surface different height of measured workpiece 10 passes sequentially through the position of zero optical path difference
Put, CCD camera obtains interference image, double-raster displacement metering device records the real-time displacement of vertical motion assemblies inner platform, warp
The calculating treatment for crossing computer processing system 8 just can obtain measured workpiece surface topography information.
Illumination path support plate 406 is arranged on the side of vertical motion assemblies 201, and image pickup light path support plate 607 is installed
In the opposite side of vertical motion assemblies 201.
Double-raster displacement metering device 1 includes laser 101, magnifying glass 102, magnifying glass lens barrel 103, quiet grating 104, quiet
Light barrier holder 105, quiet grating adjustment plate 106, dynamic grating 107, dynamic light barrier holder 108, dynamic grating motion connecting plate 109, first
Speculum 110, the first mirror support 111, the second speculum 112, the second mirror support 113, photelectric receiver 114 and biography
Sensor box 115；Dynamic grating 107 is arranged on dynamic light barrier holder 108, and dynamic light barrier holder 108 is fixed on dynamic grating motion connecting plate
109 bottoms, the dynamic grating motion bottom of connecting plate 109 is connected with the inner platform of vertical motion assemblies 201；Quiet grating 104 is installed
On quiet light barrier holder 105, quiet light barrier holder 105 is arranged in quiet grating adjustment plate 106, and quiet grating adjustment plate 106 is arranged on
The inside of sensor box 115；Quiet grating is pasted onto on light barrier holder, and quiet grating outward appearance is transparent glass-like, moves light
Grid are also such.By adjusting the position that quiet light barrier holder is arranged on quiet grating is adjusted, dynamic grating, quiet grating can be adjusted
Between angle and distance, so as to adjust the width of interference fringe.
Laser 101 and magnifying glass lens barrel 103 are installed in the top of sensor box 115 and in opposite sides, magnifying glass
102 are arranged in magnifying glass lens barrel 103, and the first speculum 110 is arranged on the first mirror support 111, the first speculum branch
Frame 111 is arranged on inside sensor box 115, and near the side of laser 101, the underface of the first mirror support 111 and water
Square into 45O angles, the second speculum 112 is arranged on the second mirror support 113, and the second mirror support 113 is arranged on
The side of the close magnifying glass 102 in sensor box 115, the underface of the second mirror support 113 is from the horizontal by 45O
Angle；The light beam of the transmitting of laser 101 changes 90 ° through the direction of the first speculum 110, impinges perpendicularly on dynamic grating 107, occurs just
, there is re-diffraction and produce interference fringe in secondary diffraction, through quiet grating 104 when the inner platform of vertical motion assemblies drives dynamic grating
107 when moving in the vertical direction, and photelectric receiver 114 receives the interference fringe of cycle movement, and transmits to signal transacting system
System 7 obtains the real-time displacement of the inner platform of vertical motion assemblies 201 after being processed.
Computer control system 8 is obtained by processing the displacement of the inner platform of white light interference image and vertical motion assemblies 201
To the three-dimensional appearance of the measured surface of workpiece for measurement.
The present invention obtains the white light interference image of measured surface using Mirau interference microscopes, when vertical motion assemblies
When inner platform drives Mirau interference microscopes to make vertical scan motion, each point of measured workpiece surface different height is passed sequentially through
The position of zero optical path difference, CCD camera obtains interference image, and double-raster displacement metering device records the reality of vertical motion assemblies motion block
Shi Weiyi, measured workpiece surface topography information is just can obtain by computer calculating treatment.
Claims (9)
1. a kind of vertical scanning measures white light interference gauge head, it is characterised in that：Including white light micro-interference device（3）, vertical fortune
Dynamic device（2）, double-raster displacement metering device（1）, image capturing system（9）, signal processing system（7）With computer controls system
System（8）；
The white light micro-interference device（3）Including the illumination path for sending light beam（4）, for receiving light beam and producing dry
Relate to the micro-interference component of striped（5）With for image and can show white light interference image ccd image pickup component
（6）；Micro-interference component（5）Including Mirau interference microscopes（501）, white light interference image is through image capturing system（9）Collection
Afterwards, it is delivered to computer analysis process system（8）；
The vertical movement device（2）Including vertical motion assemblies（201）, it includes outer platform and the energy being arranged in outer platform
Enough edges and workpiece for measurement（10）Make the inner platform of micromotion, Mirau interference microscopes in the parallel direction in surface（501）With inner platform
It is fixedly connected；Vertical motion assemblies（201）On be additionally provided with piezoelectric ceramics（202）, piezoelectric ceramics（202）In piezoelectric ceramics micro-displacement
Inner platform can be driven to make micromotion under the driving of device driving power supply, so as to drive Mirau interference microscopes（501）Motion, it is complete
Paired workpiece for measurement（10）The vertical scanning measurement on surface, piezo-ceramic micro displacement unit driving power supply is by computer control system
（8）Control；The double-raster displacement metering device（1）It is fixedly connected with inner platform, double-raster displacement metering device（1）Interior flat
Under the driving of platform the generation cycle movement interference fringe and transmit to signal processing system（7）, signal processing system（7）Located
Vertical motion assemblies are obtained after reason（201）Inner platform real-time displacement, and transmit to computer control system（8）；
Computer control system（8）By processing white light interference image and vertical motion assemblies（201）Inner platform displacement, obtain
To workpiece for measurement（10）The three-dimensional appearance on surface.
2. a kind of vertical scanning according to claim 1 measures white light interference gauge head, it is characterised in that：The illumination path
（4）Including white light source（401）, light source bracket（402）, the first illumination path lens barrel（403）, the second illumination path lens barrel
（404）, illumination path lens cone frame（405）, illumination path support plate（406）, lens group（407）, aperture diaphragm（408）, regard
Field diaphragm（409）, the first speculum（410）With the first lens（411）；The white light source（401）It is installed in light source bracket
（402）On, light source bracket（402）With the first illumination path lens barrel（403）One end be detachably fixed connection, the first illumination path
Lens barrel（403）The other end and the second illumination path lens barrel（404）One end be detachably fixed connection, the second illumination path lens barrel
（404）The other end be installed in illumination path lens cone frame（405）On, illumination path lens cone frame（405）It is installed in illumination light
Road support plate（406）On, illumination path lens cone frame（405）Side offer through hole A, lens group（407）Installed in first
Illumination path lens barrel（403）It is interior, aperture diaphragm（408）And field stop（409）The second illumination light is sequentially arranged at from top to bottom
Road lens barrel（404）It is interior, the first speculum（410）It is arranged on illumination path lens cone frame（405）It is interior, the first lens（411）Install
In illumination path lens cone frame（405）Inside is near the position of through hole A, illumination path support plate（406）Installed in vertical movement
Component（201）Side.
3. a kind of vertical scanning according to claim 2 measures white light interference gauge head, it is characterised in that：The micro-interference
Component（5）Also include microscope stand（502）, the second speculum（503）And spectroscope（504）, Mirau interference microscopes
（501）It is installed in microscope stand（502）On, microscope stand（502）It is fixedly connected with inner platform, in piezoelectric ceramics（202）
When driving inner platform to move, microscope stand（502）Inner platform is followed to be synchronized with the movement, so as to drive Mirau interference microscopes
（501）Motion, completes to workpiece for measurement（10）The vertical scanning measurement on surface；The vertical motion assemblies（201）On offer
Rectangular channel, the second speculum（503）Upper end inside rectangular channel, spectroscope（504）Under inside rectangular channel
End, the first lens（411）Optical axis by spectroscope（504）Central point.
4. a kind of vertical scanning according to claim 3 measures white light interference gauge head, it is characterised in that：The ccd image
Pickup component（6）Including CCD camera（601）, CCD camera frame（602）, the second lens（603）, the 3rd speculum（604）, image
Pickup light path lens barrel（605）, image pickup light path lens cone frame（606）With image pickup light path supporting plate（607）, image pickup
Light path lens cone frame（606）Side offer through hole B, CCD camera（601）It is installed in CCD camera frame（602）One end, CCD
Camera frame（602）The other end and image pickup light path lens barrel（605）One end be detachably fixed connection, image pickup light path mirror
Cylinder（605）The other end be installed in image pickup light path lens cone frame（606）On, image pickup light path lens cone frame（606）Gu
It is located at image pickup light path supporting plate（607）On, lens（603）Installed in image pickup light path lens barrel（605）It is interior, the 3rd reflection
Mirror（604）Installed in image pickup light path lens cone frame（606）It is interior, the 3rd speculum（604）Reflecting surface and the second speculum
（503）Reflecting surface be mounted opposite, image pickup light path support plate（607）Installed in vertical motion assemblies（201）Opposite side.
5. a kind of vertical scanning according to claim 4 measures white light interference gauge head, it is characterised in that：The double grating position
Move metering device（1）Including laser（101）, magnifying glass（102）, magnifying glass lens barrel（103）, quiet grating（104）, quiet grating branch
Frame（105）, quiet grating adjustment plate（106）, dynamic grating（107）, dynamic light barrier holder（108）, dynamic grating motion connecting plate（109）、
Speculum A（110）, mirror support A（111）, speculum B（112）, mirror support B（113）, photelectric receiver（114）With
Sensor box（115）；Dynamic grating（107）Installed in dynamic light barrier holder（108）On, move light barrier holder（108）It is fixed on dynamic grating
Motion connecting plate（109）Bottom, moves grating motion connecting plate（109）Bottom and vertical motion assemblies（201）Inner platform be connected；
Quiet grating（104）Installed in quiet light barrier holder（105）On, quiet light barrier holder（105）Installed in quiet grating adjustment plate（106）On,
Quiet grating adjustment plate（106）Installed in sensor box（115）Inside；Laser（101）With magnifying glass lens barrel（103）It is respectively mounted
In sensor box（115）Top and in opposite sides, magnifying glass（102）Installed in magnifying glass lens barrel（103）It is interior, speculum A
（110）Installed in mirror support A（111）On, mirror support A（111）Installed in sensor box（115）It is internal, close to swash
Light device（101）Side, speculum B（112）Installed in mirror support B（113）On, mirror support B（113）Installed in biography
Sensor box（115）Internal, close magnifying glass（102）Side；
In laser（101）The reflected mirror A of light beam of transmitting（110）In the state of reflection, light beam sequentially passes through dynamic grating（107）
With quiet grating（104）Interference fringe is produced after generation diffraction, dynamic grating is driven in the inner platform of vertical motion assemblies（107）It is mobile
When, photelectric receiver（114）The interference fringe of cycle movement is received, and is transmitted to signal processing system（7）, signal transacting system
System（7）Vertical motion assemblies are obtained after being processed（201）Inner platform real-time displacement, and transmit to computer control system
（8）.
6. a kind of vertical scanning according to claim 5 measures white light interference gauge head, it is characterised in that：First reflection
Mirror（410）From the horizontal by 45°Angle, the 3rd speculum（604）From the horizontal by 45° angle；Second speculum（503）Install
Upper end inside rectangular channel, and from the horizontal by 45°Angle, spectroscope（504）Lower end inside rectangular channel, and with
Horizontal direction is into 45°Angle；Mirror support A（111）Underface from the horizontal by 45OAngle, mirror support B（113）Just
Lower section is from the horizontal by 45OAngle.
7. a kind of vertical scanning according to claim 6 measures white light interference gauge head, it is characterised in that：The microscope branch
Frame（502）Side is provided with microscope and screws in cylinder（5021）, microscope screw-in cylinder（5021）It is provided with internal thread, Mirau interference
Microscope（501）One end and microscope screw in cylinder（502）Between be threadedly coupled.
8. a kind of vertical scanning according to claim 7 measures white light interference gauge head, it is characterised in that：The CCD camera
Frame（602）Bottom is provided with external screw thread, image pickup light path lens barrel（605）Top be provided with internal thread, CCD camera frame（602）With
Image pickup light path lens barrel（605）Between be connected through a screw thread.
9. a kind of vertical scanning according to claim any one of 1-8 measures white light interference gauge head, it is characterised in that：It is described
Vertical motion assemblies（201）It is flexible hinge structure.
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