CN1264824A - Displacement sensor for measuring surface form - Google Patents
Displacement sensor for measuring surface form Download PDFInfo
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- CN1264824A CN1264824A CN 00114436 CN00114436A CN1264824A CN 1264824 A CN1264824 A CN 1264824A CN 00114436 CN00114436 CN 00114436 CN 00114436 A CN00114436 A CN 00114436A CN 1264824 A CN1264824 A CN 1264824A
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- surface form
- light path
- measuring
- measuring surface
- displacement transducer
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Abstract
A displacement sensor for measuring the surface form is composed of fixed unit and detachable measuring head. Said fixed unit consists of casing, laser, polarizing splitter, lambda/4 wave piece, displacement device, eye lens, focusing lens, photoelectric converter and automatic focusing controller. Said detachable measuring head comprises contact needle-reflector measuring rod. Its advantages are high accuracy, high stability, reliability and flexible use.
Description
Displacement transducer of the present invention is used for the measurement of surface topography and profile.
For measuring surface form, current contact pin type contact measurement and the optical profile type non-cpntact measurement dual mode of existing, the former measures reliably, but may cause damage to measured surface, and Measuring Time is long; The latter is owing to being non-cpntact measurement, and is particularly suitable to damageable measured surface, and measuring speed is fast, but also exists problems such as surface tilt, reflectivity and surface microscopic topographic sensitivities.J.Kagami et al, Measurement of Surface profiles by thefocusing method, Wear, 134,2, PP221-230, the focusing-detection technology that 1,989 one literary compositions are provided, it is a kind of optical profile type non-contact measuring device, comprise laser instrument and be seated in polarization spectroscope on the light path successively, λ/4 wave plates, gearshift and object lens joining with it, place the optical circuit converter over against polarization λ/4 spectroscopes, incident light is by polarization spectroscope and λ/4 wave plates, by object lens focusing is that a luminous point is to the measured workpiece surface, reflected light returns and is transmitted through polarization spectroscope, be converted to electric signal through photoelectric commutator, again through the auto focus control circuit, driving circuit control bit moving device makes object focal point drop on the measured workpiece surface when scanning survey all the time, the mobile surface topography information of having described of object lens can be handled by computing machine.When the user faces different measuring surface forms, single contact contact pilotage is measured or single optical non-contact measurement may all be difficult to meet the demands, and the surveying instrument that has two different modes simultaneously will increase user's financial burden greatly and use inconvenience.
The object of the present invention is to provide a kind of displacement transducer that is used for measuring surface form, it is made of fixed part and removable section, fixed part can be realized the optical profile type non-cpntact measurement, can realize contact type measurement and load onto removable section, thereby make an instrument possess contact and two kinds of measurement means of noncontact simultaneously, the lowering apparatus cost enlarges range of application.The present invention is used for the displacement transducer of measuring surface form, the polarization spectroscope, λ/4 wave plates, the gearshift that comprise laser instrument and be seated in successively on the light path reach object lens joining with it, described polarization spectroscope and light path angle at 45, over against vertical condenser lens, its focus place placement photoelectric commutator placed of polarization spectroscope with light path, photoelectric commutator is with gathering control circuit, driving circuit, described gearshift order connect by electric signal automatically, above-mentioned each ingredient all is fixed in the housing, it is characterized in that:
(1) described housing has light hole over against light path and object lens place,
(2) connect detachable gauge head at the light hole place by screw thread or trip bolt,
(3) detachable gauge head is made of the measuring staff that a tube-like envelope and an inner end thereof have contact pilotage, the affixed catoptron of the other end.
The present invention is used for the displacement transducer of measuring surface form, and described measuring staff can be by the reed and the flexible connection of tube-like envelope of being fixed in shaft, and described contact pilotage diameter can be 0.5 μ m～2 μ m.
The above-mentioned displacement transducer that is used for measuring surface form, described gearshift can be stepper motor, voice coil motor, linear electric motors or piezoelectric ceramics.
The contact pilotage of the detachable gauge head of sensor utilization of the present invention---catoptron measuring staff structure, laser is assembled directly affixed scanning mirror on the measured workpiece surface scan is converted to measuring staff of light beam, thereby realized contact type measurement, vertical survey scope 1mm, vertical survey resolution 3nm is higher than the precision of general contact vertical survey resolution 10nm far away; Take off detachable gauge head, just realized non-cpntact measurement, vertical survey scope 1mm, vertical survey resolution also reaches 10nm, this sensor measurement precision height, working stability be reliable, use flexibly, simultaneously can carry out contact measurement and non-cpntact measurement on an instrument, the lowering apparatus cost can be widely used in the measuring surface form of research institution and industry spot.
The present invention is further described below in conjunction with accompanying drawing.
Fig. 1 is each ingredient synoptic diagram of displacement transducer of the present invention.
Fig. 2 is the synoptic diagram of detachable probe part of the present invention.
Fig. 3 is used for the synoptic diagram of contact measurement mode for the present invention.
Fig. 4 is used for the synoptic diagram of non-contact measurement for the present invention.
A kind of embodiment that constitutes sensor shown in Figure 1 is: laser instrument 1 adopts 2mw semiconductor laser, wavelength 0.68 μ m, and polarization spectroscope 2, λ/4 wave plates 3, the object lens 4 that link with voice coil motor 5 all are seated on the light path successively; Catoptron 6 and contact pilotage 7 are loaded in the detachable gauge head, 11 is measured workpiece, back light then becomes electric signal through polarization spectroscope 2 and lens 8 to photoelectric commutator 9, move through auto focus control circuit 10 and driving circuit control voice coil motor 5 again, the light beam of object lens 4 is focused on the surface or measured workpiece 11 surfaces of catoptron 6 all the time.
The detachable gauge head that Fig. 2 represents by tube-like envelope 12 and within it the end that moves of the portion measuring staff 13 that has contact pilotage 7, an affixed catoptron 6 of the other end constitute, measuring staff 13 is by shaft fixing reed 15 and 12 flexible connections of tube-like envelope, and a kind of contact pilotage of Cai Yonging is diameter 2 μ m diamond stylus in practice.
Fig. 3 represents that the present invention is used for the contact measurement mode, detachable gauge head 21 connects with sensor housing 20 by screw mandrel and set screw, sensor housing 20 can be installed on the column 25 by screw mandrel and set screw again, measured workpiece 11 is placed on Y worktable 22 and the X worktable 23, and integral body is placed on the platform 24, and column vertically is connected with platform.
Fig. 4 represents that the present invention is used for non-contact measurement, only is detachable gauge head 21 is unloaded from sensor housing 20 with Fig. 3 difference.
Claims (3)
1. displacement transducer that is used for measuring surface form, the polarization spectroscope, λ/4 wave plates, the gearshift that comprise laser instrument and be seated in successively on the light path reach object lens joining with it, described polarization spectroscope and light path angle at 45, over against vertical condenser lens, its focus place placement photoelectric commutator placed of polarization spectroscope with light path, photoelectric commutator is with gathering control circuit, driving circuit, described gearshift order connect by electric signal automatically, above-mentioned each ingredient all is fixed in the housing, it is characterized in that:
(1) described housing has light hole over against light path and object lens place,
(2) connect detachable gauge head at the light hole place by screw thread or trip bolt,
(3) detachable gauge head is made of the measuring staff that a tube-like envelope and an inner end thereof have contact pilotage, the affixed catoptron of the other end.
2. the displacement transducer that is used for measuring surface form as claimed in claim 1 is characterized in that reed and the tube-like envelope flexible connection of described measuring staff by being fixed in shaft; Described contact pilotage diameter is 0.5 μ m～2 μ m.
3. the displacement transducer that is used for measuring surface form as claimed in claim 1 or 2 is characterized in that described gearshift can be stepper motor, voice coil motor, linear electric motors or piezoelectric ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00114436 CN1264824A (en) | 2000-03-20 | 2000-03-20 | Displacement sensor for measuring surface form |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00114436 CN1264824A (en) | 2000-03-20 | 2000-03-20 | Displacement sensor for measuring surface form |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1264824A true CN1264824A (en) | 2000-08-30 |
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| CN 00114436 Pending CN1264824A (en) | 2000-03-20 | 2000-03-20 | Displacement sensor for measuring surface form |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100412567C (en) * | 2006-05-11 | 2008-08-20 | 哈尔滨工业大学（威海） | Automobile collision-proof one-dimensional scanning lidar system |
| CN100462670C (en) * | 2002-04-26 | 2009-02-18 | 索尼精密技术株式会社 | Optical receiving/emitting composite unit, its producing method and displacement detecting apparatus |
| US7547866B2 (en) | 2004-04-28 | 2009-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and method for manufacturing semiconductor device including an autofocusing mechanism using the same |
| CN100501315C (en) * | 2006-01-06 | 2009-06-17 | 鸿富锦精密工业（深圳）有限公司 | Surface profile detection method |
| CN102175153A (en) * | 2011-03-08 | 2011-09-07 | 东莞宏威数码机械有限公司 | Laser beam focusing spot detection system |
| CN1809853B (en) * | 2003-03-14 | 2012-07-11 | 利瓦斯有限责任公司 | A device for detection of road surface condition |
| CN104197847A (en) * | 2014-09-19 | 2014-12-10 | 孙维 | Sensor |
| CN104197845A (en) * | 2014-09-18 | 2014-12-10 | 海宁科海光电科技有限公司 | High-precision laser displacement sensor with focusing direction prompting function |
| CN106197297A (en) * | 2010-11-30 | 2016-12-07 | 庄臣及庄臣视力保护公司 | For the method measuring unhydrated ophthalmic lens |
| CN109269393A (en) * | 2018-11-06 | 2019-01-25 | 吉林大学 | A kind of surface whole audience microscopic three-dimensional pattern automatic tester |
| CN111174717A (en) * | 2020-01-10 | 2020-05-19 | 长飞光纤光缆股份有限公司 | Optical fiber geometric parameter testing system and method |
| CN114952427A (en) * | 2022-04-15 | 2022-08-30 | 大连海事大学 | Milling machine overlength slewing arm gesture self-adaptation high accuracy measuring device |
-
2000
- 2000-03-20 CN CN 00114436 patent/CN1264824A/en active Pending
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100462670C (en) * | 2002-04-26 | 2009-02-18 | 索尼精密技术株式会社 | Optical receiving/emitting composite unit, its producing method and displacement detecting apparatus |
| CN1809853B (en) * | 2003-03-14 | 2012-07-11 | 利瓦斯有限责任公司 | A device for detection of road surface condition |
| US7777210B2 (en) | 2004-04-28 | 2010-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method in which a distance between an irradiation object and an optical system is controlled by an autofocusing mechanism and method for manufacturing semiconductor device using the same |
| US8022380B2 (en) | 2004-04-28 | 2011-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method in which a distance between an irradiation object and an optical system is controlled by an autofocusing mechanism and method for manufacturing semiconductor device using the same |
| CN101604627B (en) * | 2004-04-28 | 2012-05-23 | 株式会社半导体能源研究所 | Laser irradiation method and method for manufacturing semiconductor device using the same |
| US7547866B2 (en) | 2004-04-28 | 2009-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and method for manufacturing semiconductor device including an autofocusing mechanism using the same |
| CN100501315C (en) * | 2006-01-06 | 2009-06-17 | 鸿富锦精密工业（深圳）有限公司 | Surface profile detection method |
| CN100412567C (en) * | 2006-05-11 | 2008-08-20 | 哈尔滨工业大学（威海） | Automobile collision-proof one-dimensional scanning lidar system |
| CN106197297A (en) * | 2010-11-30 | 2016-12-07 | 庄臣及庄臣视力保护公司 | For the method measuring unhydrated ophthalmic lens |
| CN106197297B (en) * | 2010-11-30 | 2019-04-09 | 庄臣及庄臣视力保护公司 | Method for measuring unhydrated ophthalmic lens |
| CN102175153A (en) * | 2011-03-08 | 2011-09-07 | 东莞宏威数码机械有限公司 | Laser beam focusing spot detection system |
| CN102175153B (en) * | 2011-03-08 | 2013-09-11 | 东莞宏威数码机械有限公司 | Laser beam focusing spot detection system |
| CN104197845A (en) * | 2014-09-18 | 2014-12-10 | 海宁科海光电科技有限公司 | High-precision laser displacement sensor with focusing direction prompting function |
| CN104197847A (en) * | 2014-09-19 | 2014-12-10 | 孙维 | Sensor |
| CN109269393A (en) * | 2018-11-06 | 2019-01-25 | 吉林大学 | A kind of surface whole audience microscopic three-dimensional pattern automatic tester |
| CN111174717A (en) * | 2020-01-10 | 2020-05-19 | 长飞光纤光缆股份有限公司 | Optical fiber geometric parameter testing system and method |
| CN111174717B (en) * | 2020-01-10 | 2020-11-10 | 长飞光纤光缆股份有限公司 | Optical fiber geometric parameter testing system and method |
| CN114952427A (en) * | 2022-04-15 | 2022-08-30 | 大连海事大学 | Milling machine overlength slewing arm gesture self-adaptation high accuracy measuring device |
| CN114952427B (en) * | 2022-04-15 | 2024-01-09 | 大连海事大学 | Self-adaptive high-precision measuring device for gesture of super-long rotary arm of milling machine |
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