CN114577103A - Magnetic grid precision calibration detection device and detection method thereof - Google Patents
Magnetic grid precision calibration detection device and detection method thereof Download PDFInfo
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- CN114577103A CN114577103A CN202210185310.XA CN202210185310A CN114577103A CN 114577103 A CN114577103 A CN 114577103A CN 202210185310 A CN202210185310 A CN 202210185310A CN 114577103 A CN114577103 A CN 114577103A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/30—Assessment of water resources
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Abstract
The invention discloses a magnetic grid precision calibration detection device and a detection method thereof, belonging to the technical field of precision detection equipment of linear metering elements, wherein the magnetic grid precision calibration detection device is provided with a base, and an air-floatation guide rail is distributed on the upper part of the base; the air floatation sliding block is connected with the air floatation guide rail in a sliding manner; a guide groove which is parallel to the air floatation guide rail and is used for accommodating a magnetic grid belt to be detected is formed on the base, and the air floatation sliding block is provided with a magnetic grid reading head; the grating strips and the grating reading heads are arranged on the air-floating slide block, so that the air-floating slide block is driven to enable the two grating strips to form a first reference axis and a second reference axis to calibrate the magnetic grating strips to be detected based on double references.
Description
Technical Field
The invention relates to the technical field of precision detection equipment of linear metering elements, in particular to a magnetic grid precision calibration detection device and a detection method thereof.
Background
The magnetic grid ruler is an element for measuring linear displacement, is usually used in automatic processing equipment, mainly comprises a reading head and a magnetic grid, and is used as a metering element and needs to be subjected to precision detection before leaving a factory;
the detection method generally uses a measuring device with higher precision to carry out precision detection on the magnetic grid ruler, but the detection is carried out on the premise of not eliminating Abbe errors in the precision detection of the magnetic grid ruler at present, so that the precision detection effect of the magnetic grid ruler is poor, in the precision detection process, errors caused by the fact that the axis of a measuring reference is not coincident with the axis to be detected are called Abbe errors, and on the premise of not solving the Abbe errors, the precision detection result of the magnetic grid ruler is greatly influenced;
chinese patent publication CN 110617758A proposes a precision detector for a magnetic scale, which uses a high-precision linear module to detect the precision of the magnetic scale, and uses the high-precision linear module as a measurement reference, and the axis of the high-precision linear module and the axis of the magnetic scale do not coincide, so the abbe error is not considered by the device; for another example, the article [1] zangjie, magnetic grating-based high-precision displacement sensor design [ D ]. suzhou university, in which a laser interferometer is used to perform precision detection on a magnetic grating ruler, and in chinese patent publication CN 205482772U, the grating ruler is used to perform precision detection and calibration on the magnetic grating ruler with high precision of the grating, which also has the same problems in the above two documents;
therefore, in view of the above problems, it is desirable to provide a magnetic scale accuracy calibration detecting apparatus and a detecting method thereof, which can eliminate abbe errors by using double references and improve detection accuracy when performing accuracy detection on a magnetic scale.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a magnetic grid precision calibration detection device and a detection method thereof;
in order to achieve the above purpose, the invention provides the following technical scheme:
the invention discloses a magnetic grid precision calibration detection device, which comprises:
the upper part of the base is provided with an air floatation guide rail;
the air floating slide block is connected with the air floating guide rail in a sliding way;
a guide groove which is parallel to the air floatation guide rail and is used for accommodating a magnetic grid belt to be detected is formed on the base, and the air floatation sliding block is provided with a magnetic grid reading head; and
two grating areas, it is installed on the base and symmetrically distributed in the guide way both sides, grating area grating reading head, set up in on the air supporting slider, thereby the drive the air supporting slider makes two grating area, formation first reference axis and the two benchmark calibrations of second reference axis the magnetic grating area of examining.
Furthermore, a first positioning datum line A is formed by connecting the centers of the two grating reading heads, and the center of the magnetic grating reading head is superposed with the first positioning datum line A.
Further, the guide way width direction with wait to examine magnetic grid area clearance fit, guide way bottom wall cloth is equipped with and is used for adsorbing wait to examine the negative pressure adsorption structure in magnetic grid area.
Further, the negative pressure adsorption structure comprises an air suction hole formed along the length direction of the bottom wall of the guide groove and a negative pressure pipeline arranged in the base and communicated with the air suction hole;
and the negative pressure pipeline is connected with a negative pressure adsorption system gas circuit through a joint.
Furthermore, the base is provided with rotatable cable collecting plates corresponding to two ends of the guide groove in an evenly distributed mode and used for containing the to-be-detected grid belt, and the cable collecting plates are fixedly connected with the base through supports.
Further, fixed buckles are installed at both ends of the guide grooves and used for fixing the end parts of the magnetic grid belts to be detected.
Further, the base is a marble work table.
Furthermore, the grating belt is a steel belt grating.
The magnetic grid precision calibration detection method uses the magnetic grid precision calibration detection device,
the method comprises the following steps:
providing the magnetic grid belt to be detected;
step two, the guide groove is fully paved with the magnetic grid belt to be detected, and the actual physical length of the magnetic grid belt to be detected is measured to be L2；
Driving the air-floating slide block to displace along the air-floating guide rail, and acquiring the first reference axis and the second reference axis;
step four, acquiring the length of a check reference axis;
according to the formula:
wherein L is1Is the length of the first reference axis, L4Calculating the length of the checking reference axis as L according to the length of the second reference axis3So as to obtain L on the first positioning reference line A3And L2Between Abbe arms is L6。
Further, the first reference axis, the second reference axis and the measurement starting point of the actual physical length of the magnetic grating strip to be detected are the first positioning reference line a;
the tail end of the stroke of the air-floating slide block is a second positioning datum line B;
the first reference axis, the second reference axis and the measurement end point of the actual physical length of the magnetic grating belt to be detected are the second positioning reference lines B.
In the technical scheme, the magnetic grid precision calibration detection device and the detection method thereof provided by the invention have the beneficial effects that:
firstly, the magnetic grid precision calibration detection device utilizes two grating belts to be symmetrically arranged at two sides of the magnetic grid belt to be detected to form a first reference axis and a second referenceThe magnetic grating belt to be detected is subjected to axis ground double-reference calibration, the grating belt is a steel belt grating, the consistency with the magnetic grating belt to be detected in the height direction is favorably kept, the length obtained by averaging the measurement results of the first reference axis and the second reference axis is used as a check reference axis to be compared with the axis of the magnetic grating belt to be detected, and the Abbe arm L between the axis of the magnetic grating belt to be detected and the first reference axis and the second reference axis is realized5Abbe arm L reduced to be between the axis of the magnetic grating belt to be detected and the checking reference axis6Therefore, the coincidence of the axis of the magnetic grating belt to be detected and the checking reference axis is ensured to the maximum extent, and the detection precision is improved;
secondly, the bottom wall of the base guide groove of the magnetic grid precision calibration detection device is provided with an air suction hole, the magnetic grid belt to be detected is adsorbed through the air suction hole, so that the magnetic grid belt to be detected is fixedly connected with the guide groove, the fixing mode is simple, convenient and fast, gum is not needed, shearing is not needed, the measurement of the long magnetic grid belt can be realized, the measurement of the short magnetic grid belt can be realized, and the magnetic grid precision calibration detection device has high universality.
Drawings
In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.
FIG. 1 is an isometric view of a magnetic grid accuracy calibration detection device as disclosed herein;
FIG. 2 is an isometric view of a base of the magnetic grid accuracy calibration detection device disclosed herein;
FIG. 3 is an enlarged view of a portion of the base of the magnetic grid accuracy calibration detection device disclosed in the present invention;
FIG. 4 is a schematic diagram of a measuring method of the magnetic grid precision calibration detecting device disclosed by the invention.
Description of reference numerals:
1. an air-float guide rail; 2. an air-floating slide block; 3. a grating band; 4. a grating reading head; 5. a magnetic grid reading head; 6. a magnetic grid strip to be detected; 7. a fixing buckle; 8. a support; 9. a storage tray; 10. a joint; 11. a grating band; 12. a grating reading head; 13. a storage tray;
100. a base; 101. a guide groove; 102. a negative pressure pipeline; 103. a suction hole;
a first positioning reference line a;
the second positioning reference line B.
Detailed Description
In order to make the technical solutions of the present invention better understood, those skilled in the art will now describe the present invention in further detail with reference to the accompanying drawings.
As shown in fig. 1;
the invention relates to a magnetic grid precision calibration detection device, which comprises:
a base 100, on the upper part of which an air-float guide rail 1 is arranged;
the air-floating slide block 2 is connected with the air-floating guide rail 1 in a sliding way;
a guide groove 101 which is parallel to the air-floating guide rail 1 and is used for accommodating a magnetic grid belt 6 to be detected is formed on the base 100, and a magnetic grid reading head 5 is arranged on the air-floating slide block 2; and
two grating strips 3, 11 are mounted on the base 100 and symmetrically distributed on both sides of the guide groove 101, and grating reading heads 4, 12 of the grating strips 3, 11 are arranged on the air-floating slider 2, so that the air-floating slider 2 is driven to enable the two grating strips 3, 11 to form a first reference axis and a second reference axis to calibrate the grating strip 6 to be detected in a double-reference mode.
Specifically, in the structure, a base 100 is a marble workbench, two air-floating guide rails 1 are formed on the base 100, an air-floating slide block 2 is connected on the air-floating guide rails 1 in a sliding manner, the air-floating guide rails 1 and the air-floating slide block 2 are both in the prior art, a driving principle is adopted, the air-floating guide rails 1 and the air-floating slide block 2 form a sliding pair, gas is filled between the air-floating guide rails 1 and the air-floating slide block 2 to form an air film, and when the air-floating slide block 2 is pushed by hand, the air-floating slide block 2 can slide along the air-floating guide rails 1;
a guide groove 101 is formed between the two air-floating guide rails 1 of the base 100, a magnetic grating belt 6 to be detected is accommodated through the guide groove 101, the guide groove 101 is parallel to the air-floating guide rails 1 (the parallelism tolerance is higher than the installation tolerance of the magnetic grating belt to be detected), a grating belt 3 is arranged on one side of the guide groove 101 of the base 100, a grating belt 11 is arranged on the other side of the guide groove 101, the grating belt 3 and the grating belt 11 are symmetrically arranged relative to the guide groove 101 and are both parallel to the guide groove 101 (the parallelism is far higher than the installation tolerance of the magnetic grating belt 6 to be detected and can be ignored);
the air-floating slide block 2 is provided with a grating reading head 4 and a grating reading head 12 corresponding to the positions of the grating belt 3 and the grating belt 11, the grating reading head 5 corresponding to the position of the grating belt 6 to be detected is provided, during detection, the air-floating slide block 2 is driven, the grating belt 3 and the grating belt 11 form a first reference axis and a second reference axis to calibrate the grating belt 6 to be detected based on double references, the first reference axis and the second reference axis are summed and averaged to obtain a calibration reference axis, the calibration reference axis is compared with the axis of the grating belt 6 to be detected by calibrating the reference axis, so that the Abbe arm L5 between the axis of the grating belt 6 to be detected and the first reference axis and the second reference axis is reduced to the Abbe arm L6 between the axis of the grating belt to be detected and the calibration reference axis, the coincidence of the grating belt to be detected and the calibration reference axis is ensured to the greatest extent, and the detection precision is improved.
Referring to fig. 4, preferably, the center of the two grating reading heads 4 and 12 is connected to form a first positioning reference line a, and the center of the magnetic grating reading head 5 coincides with the first positioning reference line a.
In the structure, the center of the magnetic grating reading head 5 is arranged on the first positioning reference line A of the central connecting line of the grating reading head 4 and the grating reading head 12, so that the detection precision of the detection device is further improved;
preferably, the guide way 101 width direction with wait to examine the 6 clearance fit in magnetic grid area, wait to examine magnetic grid area 6 and place in guide way 101 through clearance fit, can further the accuracy wait to examine the position of magnetic grid area 6 on base 100, keep examining 6 axes in magnetic grid area and parallel with first reference axis and second reference axis, be favorable to improving and detect the precision, the guide way 101 diapire is laid and is used for adsorbing the negative pressure adsorption structure who waits to examine magnetic grid area 6. So that the magnetic grid belt 6 to be detected is fixedly connected with the guide groove 101, the displacement of the magnetic grid belt 6 to be detected in the detection process is avoided, and the measurement reference can be used for calibrating the magnetic grid belt 6 to be detected more accurately;
referring to fig. 2-3, preferably, the negative pressure adsorption structure includes a plurality of air suction holes 103 and a negative pressure pipeline 102 communicated with the air suction holes 103, the plurality of air suction holes 103 are distributed along the length direction of the bottom wall of the guide groove 101 at intervals, the negative pressure pipeline 102 is formed inside the base 100, and both ends of the negative pressure pipeline are connected with an external negative pressure adsorption system through a connector 10, during detection, the negative pressure adsorption system is started, the air suction holes 103 suck and adsorb the magnetic grid strip 6 to be detected, so that the magnetic grid strip 6 to be detected is fixedly attached to the bottom wall of the guide groove 101;
referring to fig. 1, preferably, rotatable cable collecting discs 9 and 13 are uniformly arranged at two ends of the base 100 corresponding to the guide groove 101 and used for containing the to-be-detected magnetic grid strip 6, and the cable collecting discs 9 and 13 are fixedly connected with the base 100 through a support 8.
Specifically, one end of the base 100, which corresponds to the guide groove 101, is fixedly connected with a cable collecting plate 9 through a support 8, the other end of the base 100 is fixedly connected with a cable collecting plate 13 through the support 8, an undetected magnetic grid belt to be detected 6 can be wound on the cable collecting plate 9, the detected magnetic grid belt can be collected through the cable collecting plate 13, the long magnetic grid belt is convenient to detect, the use is convenient, preferably, fixing buckles 7 are arranged at two ends of the guide groove 101 and used for fixing the end part of the magnetic grid belt to be detected 6, specifically, through holes are formed in the fixing buckles 7, bolts are arranged in the through holes and matched with threaded holes in the base 100, the bolts are screwed, the fixing buckles 7 compress the magnetic grid belt 6, the bolts are loosened, the magnetic grid belt 6 is loosened through the fixing buckles, and the detection result is prevented from being influenced by the warping of the detected part of the magnetic grid belt to be detected 6;
when the magnetic grating belt 6 to be detected is released from the storage disc 9, the storage disc 13 simultaneously winds up the magnetic grating belt which is detected completely, the length of the magnetic grating belt is measured as the stroke length of the air-floating slide block 2, when the magnetic grating belt which is detected completely is wound up to the storage disc 13, the guide groove 101 is fully paved with the part to be detected of the magnetic grating belt, the negative pressure system is started, the part to be detected of the magnetic grating belt is adsorbed to the guide groove and fixed, the part to be detected of the magnetic grating belt is fixed at two ends of the guide groove 101 by the fixing buckle 7, the detection is started, the air-floating slide block 2 slides from one end to the other end of the air-floating guide rail 1 of the base 100, the grating reading head 4, the grating reading head 12 and the magnetic grating reading head 5 synchronously read data in real time in the sliding process, the data are output to the data storage unit and calculate and output the detection result, after the precision detection of the length of the magnetic grating belt is completed, the negative pressure air path is released, the magnetic grating belt is measured and the partial winding is completed by repeating the above processes, and the part to be detected of the magnetic grid belt is fully paved in the guide groove 101 again, a negative pressure system is started for adsorption, the length of the next section of the magnetic grid belt to be detected 6 is detected, and the whole roll of the magnetic grid belt is circularly detected.
Preferably, the grating strips 3, 11 are steel strip gratings.
Specifically, in the structure, the grating belt 3 and the grating belt 11 are set to be steel belt gratings, and the steel belt gratings and the magnetic grating belt 6 can be arranged on the same plane;
the invention relates to a magnetic grid precision calibration detection method, which uses the magnetic grid precision calibration detection device and comprises the following steps:
providing a magnetic grid belt 6 to be detected;
step two, paving the magnetic grid belt 6 to be detected in the guide groove 101, and measuring the actual physical length L of the magnetic grid belt 6 to be detected2；
Driving the air-floating slide block 2 to displace along the air-floating guide rail 1 to obtain a first reference axis and a second reference axis;
step four, acquiring the length of a check reference axis;
according to the formula:
wherein L is1Is the length of the first reference axis, L4The length of the second reference axis is calculated, so that the length of the checking reference axis is L3So as to obtain L on the first positioning reference line A3And L2Between Abbe arms is L6And thus a minimum Abbe arm is obtained.
Preferably, the first reference axis, the second reference axis and the measurement starting point of the actual physical length of the magnetic grating belt 6 to be detected are a first positioning reference line a formed by connecting three central points of the two grating reading heads 4 and 12 and the magnetic grating reading head 5;
wherein, the stroke end of the air-floating slide block 2 is a second positioning datum line B;
the measurement end points of the first and second reference axes and the actual physical length of the magnetic grating strip to be inspected 6 are second positioning reference lines B.
Specifically, the grating reading head 4 and the grating belt 3 form a first measurement reference to form a first reference axis, and the grating reading head 12 and the grating belt 11 form a second measurement reference to form a second reference axis; the magnetic grid belt 6 is an item to be detected;
referring to FIG. 4, the first and second reference axes are parallel to each other and are equidistant L from the axis on which the grating reader head 5 is located5At this time L5For actually measuring the Abbe arm, the central line of the grating reading head 4 and the grating reading head 12 passes through the center of the magnetic grating reading head 5, and L is measured1For the reading length, L, of the grating reading head 44For the reading length, L, of the grating reading head 122For the actual physical length, L, of the strip 6 to be examined3The length of the reference axis is checked for the combination of the first reference axis and the second reference axis, and the actual position distance of the magnetic grid reading head 5 can be calculated3＝(L1+L4) /2, when L3And L2Between Abbe arms is L6Whereby the Abbe arm is defined by L5Decrease to L6Thereby improving the detection precision;
in particular, assume L60.1mm (much less than 0.1mm in the actual installation process), 1 ° and can calculate the error caused by abbe error as Δ L6＝L6×sina＝0.1×sin1°≈0.0017，L5The actual size of (2) is limited by the mounting structure and the size of the grating reading head 4, and is often several tens of millimeters, if 10mm is taken (in practical cases, much more than 10 mm), Δ L at this time5＝L5X sina ≈ 10 x sin1 ° ≈ 0.17, with an order of magnitude difference of 100 times between the two, whereas the actual case L5Often much larger than 10mm and much larger error, so L is adopted3To replace L1Or L4Closer to L than the individual measurements2. Since in the actual measurement L2And L3The angle a of (a) is very small (the guide groove can ensure the parallelism of the grating strip to be tested and the grating strip to a certain extent), and cos1 degrees is taken as an exampleThe length error of 1mm is 0.0002mm, and since a is far less than 1 degree in practical application and cosa is extremely close to 1 degree, L is2And L3The values can be replaced approximately by L3＝(L1+L4) /2 to replace L2Further comparing with the reading of the reading head 5 of the magnetic grid, greatly reducing the influence factor of Abbe error, adopting L3The magnetic grid strip can be more accurately calibrated as a measurement reference.
The magnetic grid precision calibration detection device can greatly reduce the Abbe error between the measurement reference and the magnetic grid strip to be measured, so that the measurement reference can calibrate the magnetic grid strip more accurately, and meanwhile, the magnetic grid strip can be fixed simply, conveniently and quickly without gum or shearing, and the measurement of the long magnetic grid strip can be realized.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.
Claims (10)
1. Magnetic grid precision calibration detection device, its characterized in that includes:
a base (100) with an air-float guide rail (1) distributed on the upper part;
the air-floating slide block (2) is connected with the air-floating guide rail (1) in a sliding way;
a guide groove (101) which is parallel to the air floatation guide rail (1) and is used for accommodating a magnetic grating belt (6) to be detected is formed on the base (100);
the air-floating slide block (2) is provided with a magnetic grid reading head (5); and
two grating zones (3, 11), it is installed on base (100) and symmetrically distributed guide way (101) both sides, grating reading head (4, 12) of grating zone (3, 11) set up in on the air supporting slider (2), thereby the drive air supporting slider (2) make two grating zone (3, 11) form the two benchmark calibrations of first reference axis and second reference axis treat magnetic grating zone (6).
2. The magnetic grid accuracy calibration detecting device according to claim 1, characterized in that;
the center connecting line of the two grating reading heads (4 and 12) forms a first positioning datum line A, and the center of the magnetic grating reading head (5) is coincided with the first positioning datum line A.
3. The apparatus and method for calibrating and detecting magnetic grid accuracy of claim 1, wherein;
guide way (101) width direction with wait to examine magnetic grid area (6) clearance fit, guide way (101) diapire has been laid and is used for adsorbing wait to examine the negative pressure adsorption structure of magnetic grid area (6).
4. The magnetic grid accuracy calibration detecting device according to claim 3, characterized in that;
the negative pressure adsorption structure comprises an air suction hole (103) formed along the length direction of the bottom wall of the guide groove (101) and a negative pressure pipeline (102) arranged in the base (100) and communicated with the air suction hole (103);
the negative pressure pipeline (102) is connected with a negative pressure adsorption system air passage through a joint (10).
5. The magnetic grid accuracy calibration detecting device according to claim 1, characterized in that;
the device is characterized in that the base (100) is provided with rotatable cable collecting plates (9, 13) corresponding to two ends of the guide groove (101) in an evenly distributed mode and used for containing the to-be-detected grid belt (6), and the cable collecting plates (9, 13) are fixedly connected with the base (100) through supports (8).
6. The magnetic grid accuracy calibration detecting device according to claim 5, characterized in that;
fixing buckles (7) are installed at the two ends of the guide groove (101) and used for fixing the end part of the magnetic grid belt to be detected (6).
7. The magnetic grid accuracy calibration detecting device according to claim 1, characterized in that;
the base (100) is a marble work table.
8. The magnetic grid accuracy calibration detecting device according to claim 1, characterized in that;
the grating belts (3, 11) are steel belt gratings.
9. A magnetic grid precision calibration detection method using the magnetic grid precision calibration detection device according to any one of claims 1 to 8, characterized in that;
the method comprises the following steps:
step one, providing the magnetic grid belt to be detected (6);
step two, the guide groove (101) is fully paved with the magnetic grating belt to be detected (6), and the actual physical length of the magnetic grating belt to be detected (6) is measured to be L2；
Driving the air-floating slide block (2) to displace along the air-floating guide rail (1) to obtain the first reference axis and the second reference axis;
step four, acquiring the length of a check reference axis;
according to the formula:
wherein L is1Is the length of the first reference axis, L4Calculating the length of the checking reference axis as L according to the length of the second reference axis3So as to obtain L on the first positioning reference line A3And L2Between Abbe arms is L6。
10. The magnetic grid accuracy calibration detection method according to claim 9, characterized in that;
the first reference axis, the second reference axis and the measurement starting point of the actual physical length of the magnetic grating belt to be detected (6) are the first positioning reference line A;
the tail end of the stroke of the air-floating slide block (2) is a second positioning datum line B;
the first reference axis, the second reference axis and the measurement end point of the actual physical length of the magnetic grating belt to be detected (6) are the second positioning reference lines B.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111141152X | 2021-09-28 | ||
| CN202111141152.XA CN113739687A (en) | 2021-09-28 | 2021-09-28 | Magnetic grid precision calibration detection device and detection method thereof |
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| CN114577103A true CN114577103A (en) | 2022-06-03 |
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| JP2000186925A (en) * | 1998-12-24 | 2000-07-04 | Nikon Corp | Length measuring device for removing error caused by attitude error for moving base |
| TW200424034A (en) * | 2003-03-10 | 2004-11-16 | Asm Tech Singapore Pte Ltd | Determination of a movable gantry position |
| CN202092624U (en) * | 2011-04-28 | 2011-12-28 | 昆山双虎电子科技有限公司 | Three-dimensional measuring device with high through capability |
| CN102506702A (en) * | 2011-09-29 | 2012-06-20 | 天津大学 | Large three-dimensional coordinate measuring method with laser tracking and device |
| TWI618918B (en) * | 2017-01-09 | 2018-03-21 | 龍華科技大學 | Length measuring device |
| CN107514986A (en) * | 2017-10-11 | 2017-12-26 | 重庆建设工业(集团)有限责任公司 | A kind of calibrating device for displacement sensor based on air floating platform |
| CN207197480U (en) * | 2017-10-11 | 2018-04-06 | 重庆建设工业(集团)有限责任公司 | A kind of calibrating device for displacement sensor based on air floating platform |
| CN110132307A (en) * | 2018-12-11 | 2019-08-16 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of straight line dynamic calibration apparatus |
| CN210036600U (en) * | 2019-07-30 | 2020-02-07 | 青岛前哨精密仪器有限公司 | Grating ruler detection device |
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| Publication number | Publication date |
|---|---|
| CN114577103B (en) | 2023-09-08 |
| CN113739687A (en) | 2021-12-03 |
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