CN103868453B - One directly drives grating scale automatic detection device - Google Patents
One directly drives grating scale automatic detection device Download PDFInfo
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- CN103868453B CN103868453B CN201410035866.6A CN201410035866A CN103868453B CN 103868453 B CN103868453 B CN 103868453B CN 201410035866 A CN201410035866 A CN 201410035866A CN 103868453 B CN103868453 B CN 103868453B
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Abstract
One directly drives grating scale automatic detection device, belongs to grating scale detection technique field, mainly includes vibration reduction platform, drives platform and fixture, and vibration reduction platform eliminates the vibration interference of environment；Linear electric motors, as the power source driving platform, provide test speed and the acceleration of relative broad range for tested grating ruler reading head；High-precision displacement transducer detects the precise displacement information of tested grating ruler reading head in real time, provides for the displacement information that tested grating ruler reading head detects and compares accurately and identify；The tested grating tape of fixture clamping different length grade.This device is applicable to detect the tested grating scale of different length grade, reduces the cost of grating scale detection device.Linear electric motors response is fast, and automaticity is high, and test speed and acceleration range are wide, improve the detection efficiency of grating scale.
Description
Technical field
The invention belongs to grating scale detection technique field, the grating scale being specifically related to the driving of a kind of linear electric motors is automatic
Detection device.
Background technology
Grating scale is optical system and scientific instrument such as large-scale astronomical telescope, inertial confinement fusion laser ignition
Core optical element in the engineering system such as system, etching system.The resolution ratio of grating scale, repeatable accuracy and height
Accuracy when adding acceleration and deceleration is the Key Performance Indicator of grating scale.Grating scale product for detection batch production
Qualification rate index, must use the performance indications to grating scale for the equipment for customizing to detect one by one.
CN102865816A discloses the automatic detection device of a kind of grating scale overall measurement accuracy, uses screw mandrel
Control measured grating ruler reading head to move along guide rail.Leading screw is for converting rotational motion into the straight line of guide rail
Motion, therefore transmission efficiency is relatively low.Owing to leading screw exists sideshake, inevitably disturb grating scale repeatable accuracy
Measurement.CN202994097U discloses a kind of grating scale instrument for testing precision, same employing screw mandrel adjusting means
As drive mechanism, by trimming hand wheel regulation mobile platform motion.Owing to using hand drive, drive efficiency
Low, and actuating speed is little, it is impossible to detect the performance of tested grating scale during high acceleration and deceleration.
Content of the invention
For the deficiency of technique scheme, the present invention provides a kind of grating scale using linear electric motors to drive automatic
Detection device, is that the performance indications such as the resolution ratio of efficient detection grating scale, repeatable accuracy and operating rate scope carry
Supply a kind of feasible solution.
The scheme that the present invention uses is as follows:
One directly drives grating scale automatic detection device, and it includes vibration reduction platform, drives platform, fixture 10 and quilt
Surveying grating scale, vibration reduction platform contains granite base 1 and is arranged in four vibration damping feets bottom granite base 1
12, drive platform to include linear electric motors I 3, linear electric motors II 14, slide block the 5th, guide rail the 6th, high-precision displacement sensing
Device the 8th, driving protection 18 and workbench 7；Tested grating scale includes tested grating ruler reading head 13 and by light-metering
Grid tape 11, the stator of linear electric motors I 3, the stator of linear electric motors II 14, guide rail 6 fixed and arranged are being spent
On hilllock batholith seat 1, linear electric motors I 3, linear electric motors II 14 are positioned at the both sides of guide rail 6 and be arranged in parallel；Directly
The mover of line motor I 3 is connected with connector I 4, and the mover of linear electric motors II 14 is connected with connector II 15,
Connector I 4, connector II 15 and slide block 5 are all firm with workbench 7 to be connected, and described slide block 5 is two,
It is connected on guide rail 6, slide along guide rail 6；It is connected with guide rail II 16, guide rail II 16 in the side of pedestal 1
It is arranged in parallel with guide rail 6；It is connected with two fixtures 10 on guide rail II 16；Tested grating ruler reading head 13 passes through
Read head connector 17 connects as one with workbench 7, and tested grating tape 11 is connected with two fixtures 10,
The mover of the mover of linear electric motors I 3 and linear electric motors II 14 drives workbench 7 to move back and forth along guide rail 6,
Tested grating ruler reading head 13 moves back and forth with workbench 7.
High-precision displacement transducer 8 uses high accuracy grating scale or laser interferometer to detect workbench 7 and quilt in real time
Survey the precise displacement information of grating ruler reading head 13, be the displacement information that tested grating ruler reading head 13 detects
Contrast is provided and identifies.
Fixture 10 can be along guide rail II 16 adjusting position, and fixture 10 can be with strong fix in guide rail II
Optional position on 16, fixture 10 is applicable to the quilt of clamping random length grade in guide rail II 16 length range
Light-metering grid tape 11.
The present invention can obtain following beneficial effect:
Linear electric motors I 3 and linear electric motors II 14 provide power source for driving platform, and have higher speed
And acceleration capabilities, it is that tested grating scale provides large-scale test speed and acceleration condition.Linear electric motors
Drive efficiency is high, improves the detection efficiency of tested grating scale.By adjusting linear electric motors I 3 and linear electric motors
The stroke range of II 14, can detect the local performance Index of tested grating tape 11.
High-precision displacement transducer 8 and linear electric motors I 3, linear electric motors II 14 composition displacement closed loop feedback, in real time
Detecting the precise position information of tested grating ruler reading head 13, the performance indications for tested grating scale provide accurately
Comparison and qualification.
The tested grating tape 11 of fixture 10 different length easy to setup grade, therefore this device detection range is wide,
It is applicable to detect the tested grating tape 11 of random length grade in the length range of guide rail II 16.
Brief description:
Fig. 1 directly drives grating scale automatic detection device front view
Fig. 2 directly drives grating scale automatic detection device M-M sectional view
Fig. 3 directly drives grating scale automatic detection device oblique view
In figure, 1. granite base；2. main drag chain；3. linear electric motors I；4. connector I；5. slide block；6.
Guide rail；7. workbench；8. high-precision displacement transducer；9. assist drag chain；10. fixture；11. tested grating tape；
12. vibration damping feets；13. tested grating ruler reading heads；14. linear electric motors II；15. connectors II；16. guide rails
Ⅱ；17. read head connectors；18. driving protections.
Specific embodiments
The specific embodiment of the present invention is described below in conjunction with the accompanying drawings.
Four vibration damping feets 12 can adjust the level of this device, and vibration damping feet 12 also functions to shaking of isolated environment
The effect of moving noise interference.
Linear electric motors I 3, linear electric motors II 14 are as power source, for driving platform and tested grating ruler reading head
The test speed of 13 offer relative broad ranges and acceleration.Main drag chain 2 is to linear electric motors I 3, linear electric motors II 14
Power cable play traction and protective effect.
Linear electric motors I 3, linear electric motors II 14 drive workbench 7 to move along guide rail 6, and workbench 7 drives
Tested grating ruler reading head 13 moves back and forth, and the relatively tested grating tape 11 of tested grating ruler reading head 13 is transported
While dynamic, detect the positional information of self in real time.
High-precision displacement transducer 8 and linear electric motors I 3, linear electric motors II 14 composition displacement closed loop feedback, in real time
Detection workbench 7 and the precise displacement information of tested grating ruler reading head 13, be tested grating ruler reading head 13
The displacement information detecting provides and compares accurately and identify.
The auxiliary cable to tested grating ruler reading head 13 for the drag chain 9 plays traction and protective effect.Driving is protected
18 for limiting the range of movement of workbench 7, it is to avoid driving.
Claims (3)
1. one kind is directly driven grating scale automatic detection device, it is characterised in that: it include vibration reduction platform, drive platform,
Fixture (10) and tested grating scale, vibration reduction platform contains granite base (1) and is arranged in granite base (1)
Bottom four vibration damping feets (12), drive platform include linear electric motors I (3), linear electric motors II (14),
Slide block (5), guide rail (6), high-precision displacement transducer (8), driving protection (18) and workbench (7)；Quilt
Survey grating scale and include tested grating ruler reading head (13) and tested grating tape (11), linear electric motors I (3)
Stator, the stator of linear electric motors II (14), guide rail (6) fixed and arranged in granite base (1),
Linear electric motors I (3), linear electric motors II (14) are positioned at the both sides of guide rail (6) and be arranged in parallel；Straight-line electric
The mover of machine I (3) is connected with connector I (4), the mover of linear electric motors II (14) and connector II (15)
Connecting, connector I (4), connector II (15) and slide block (5) are all firm with workbench (7) to be connected,
Described slide block (5) is two, is connected on guide rail (6), slides along guide rail (6)；In pedestal (1)
Side be connected with guide rail II (16), guide rail II (16) be arranged in parallel with guide rail (6)；Guide rail II (16)
On be connected with two fixtures (10)；Tested grating ruler reading head (13) by read head connector (17) with
Workbench (7) connects as one, and tested grating tape (11) is connected with two fixtures (10), straight-line electric
The mover of the mover of machine I (3) and linear electric motors II (14) drives workbench (7) past along guide rail (6)
Multiple motion, tested grating ruler reading head (13) moves back and forth with workbench (7).
2. one according to claim 1 directly drives grating scale automatic detection device, it is characterised in that: high-precision
Displacement transducer (8) uses high accuracy grating scale or laser interferometer to detect workbench (7) and tested in real time
The precise displacement information of grating ruler reading head (13), is the displacement that tested grating ruler reading head (13) detects
Information provides contrast and identifies.
3. one according to claim 1 directly drives grating scale automatic detection device, it is characterised in that: fixture
(10) can be along guide rail II (16) adjusting position, and fixture (10) can be with strong fix in guide rail II
(16) optional position on, it is arbitrarily long in guide rail II (16) length range that fixture (10) is applicable to clamping
The tested grating tape (11) of degree grade.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410035866.6A CN103868453B (en) | 2014-01-24 | 2014-01-24 | One directly drives grating scale automatic detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410035866.6A CN103868453B (en) | 2014-01-24 | 2014-01-24 | One directly drives grating scale automatic detection device |
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| Publication Number | Publication Date |
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| CN103868453A CN103868453A (en) | 2014-06-18 |
| CN103868453B true CN103868453B (en) | 2016-10-05 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015217907A1 (en) * | 2015-09-18 | 2017-03-23 | Robert Bosch Gmbh | Position sensing device |
| CN106989723B (en) * | 2017-05-09 | 2022-12-23 | 中国地震局地震研究所 | Ultrahigh-precision inclination test platform |
| CN108000172A (en) * | 2017-11-06 | 2018-05-08 | 东莞市恒鼎自动化设备有限公司 | A kind of lathe of linear motor driving |
| CN108050940A (en) * | 2017-12-11 | 2018-05-18 | 西京学院 | A kind of reading head monitor station for grating sensor |
| CN107907057B (en) * | 2017-12-28 | 2019-11-08 | 吉林大学 | A kind of grating scale reliability test bench and the reliability test method based on loading spectrum |
| CN108406442B (en) * | 2018-03-13 | 2020-02-04 | 上海铼钠克数控科技股份有限公司 | Grating scale performance detection method and system |
| CN109877651B (en) * | 2019-01-28 | 2020-08-04 | 苏州凯雷特精密机械有限公司 | Feedback device for spaceflight fastener numerical control turning measurement |
| CN114952023B (en) * | 2022-06-24 | 2024-01-30 | 长沙麓邦光电科技有限公司 | Clamp for preparing grating ruler and joint control method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101414185B (en) * | 2008-11-21 | 2010-08-11 | 广东工业大学 | Device and method for testing accurate servo linear drive system performance |
| CN202994097U (en) * | 2012-12-31 | 2013-06-12 | 东莞市宏诚光学制品有限公司 | A grating ruler precision detector |
| CN203364769U (en) * | 2013-08-05 | 2013-12-25 | 申莉云 | Enclosed grating scale |
| CN203908493U (en) * | 2014-01-24 | 2014-10-29 | 嘉兴华嶺机电设备有限公司 | High-efficiency grating ruler detection platform |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Automatic detection device for direct driving grating ruler Effective date of registration: 20180906 Granted publication date: 20161005 Pledgee: Agricultural Bank of China Limited by Share Ltd Jiaxing science and Technology Branch Pledgor: Jiaxing Hualing Mechatronics Co., Ltd. Registration number: 2018330000262 |
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Address after: 314000 No. 959, Kexing Road, Daqiao Town, Nanhu District, Jiaxing City, Zhejiang Province Patentee after: Hualingjing machine (Zhejiang) Co.,Ltd. Address before: 314006 floor 1, building 6, No. 3339, linggongtang Road, Jiaxing City, Zhejiang Province Patentee before: JIAXING HUALING MECHATRONICS Co.,Ltd. |
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