CN108592839B - Ultra-precise three-coordinate test platform - Google Patents
Ultra-precise three-coordinate test platform Download PDFInfo
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- CN108592839B CN108592839B CN201810686832.1A CN201810686832A CN108592839B CN 108592839 B CN108592839 B CN 108592839B CN 201810686832 A CN201810686832 A CN 201810686832A CN 108592839 B CN108592839 B CN 108592839B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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Abstract
The invention provides an ultra-precise three-coordinate test platform, which comprises: the base and the supporting piece connecting piece are provided with square flat plate vacuum preloading air-float supporting pieces; the support piece connecting piece is driven by an X-direction linear motor; the first Z-direction upright post is fixed at the top of the support piece connecting piece, the second Z-direction upright post is arranged at one side, and the bottom of the second Z-direction upright post is provided with a circular flat plate vacuum preloading air-float support piece; the Z-direction upright post is provided with a Z-direction linear motor, and the first vacuum pre-pressure air floatation assembly is connected with the Z-direction linear motor; the gantry beam is fixed between the two first vacuum pre-compression air floatation assemblies, and the Y-direction linear motor is arranged on the gantry beam and connected with the second vacuum pre-compression air floatation assemblies. The ultra-precise three-coordinate testing platform adopts a vacuum pre-compression air floatation technology to realize friction-free rapid movement of the testing platform in the X, Y, Z direction, adopts a bidirectional vacuum pre-compression air floatation assembly in the Z direction and is directly driven by a linear motor, so that the Abbe error in the Z direction is reduced.
Description
Technical Field
The invention relates to the technical field of detection equipment, in particular to an ultra-precise three-coordinate test platform.
Background
The three-coordinate measuring machine has the characteristics of high precision, strong flexibility and the like, and plays an increasingly important role in the modern production and manufacturing and national defense fields such as aviation, aerospace and the like. The device not only can finish the measurement of geometric elements, curves and curved surfaces of various parts, but also can form an integrated system with other processing equipment, such as equipment of a processing center, a numerical control machine tool and the like, and realizes the integration of design, manufacture and detection. With the progress of science and technology and the importance of China to national defense and technology industry, the requirements on the measurement precision of a three-coordinate measuring machine are also higher and higher. Improving the measurement accuracy includes not only reducing the mechanical structure error of the three-coordinate measuring machine and the detection error of the measuring head, but also reducing the measurement uncertainty caused by the environmental conditions and the use conditions, etc. It is widely used in the industries of mechanical manufacturing, electronics, automotive and aerospace. The device can detect the size, shape and mutual position of parts and components, such as the measurement of the space profile of a box body, a guide rail, a worm wheel, a blade, a cylinder body, a cam, a gear, a body and the like. In addition, the device can be used for drawing lines, centering holes, photoetching integrated circuits and the like, and can be used for scanning continuous curved surfaces, preparing processing programs of numerical control machine tools and the like. The device has the advantages of strong universality, large measuring range, high precision, high efficiency and good performance, and can be connected with a flexible manufacturing system to become a large-scale precise instrument, which is called as a measuring center.
Along with the rapid development of ultra-precise machining technology, the requirements on the measurement precision of corresponding three-dimensional detection equipment are also higher and higher. The three-coordinate measuring machine (coordinate measuring machine, CMM) is used as a traditional general high-precision three-dimensional detection device and has a crucial role in detecting the shape and position errors of workpieces. Three-coordinate measuring machines are evolving towards miniaturization of dimensions and nanometer-scale accuracy. The method is characterized in that the shape and position error measurement and uncertainty evaluation are accurately carried out, so that the micro-nano measurement accuracy is ensured to be the key for the research.
The three-dimensional precision measurement technology is an accurate detection technology based on a precision motion platform, is an important part of the ultra-precision machining industry for ensuring the quality of workpieces, and has the characteristics of high measurement precision, good stability, strong universality (length, angle, form and position tolerance and the like can be measured), multi-dimensional measurement, high measurement efficiency and the like. The modern precision measurement motion platform mostly adopts a static pressure air floatation supporting guide rail form as a working platform, and can realize the precision motion of a detection object or ultra-precision machining. In terms of structural design, according to different applicable objects and measurement precision requirements, the existing three-dimensional precision measurement air-bearing platform has three main structural forms, namely a gantry type, a bridge type and a cantilever type, the application of the three main structural forms is more in a movable gantry type structure, the vertical movement of a traditional gantry type coordinate measuring machine and other measuring machines basically adopts that a driving device is arranged on a gantry cantilever beam, for a large-sized measuring machine, the increase of the stroke of the cantilever beam of the measuring machine can lead to the increase of the span and the height of the gantry, so that the mass of the gantry can be increased greatly, the deformation of the gantry can be correspondingly increased due to the dead weight, the dynamic performance of the measuring machine is poor, the motion precision and the Abbe errors (the Abbe errors refer to the fact that the axis of the measuring instrument and the axis of a workpiece to be measured are on the same straight line, otherwise, the Abbe errors are generated, and generally, if the axis of the measuring instrument and the axis of the workpiece to be measured cannot be together, the distance of the measuring machine is required to be shortened as much as possible, so as to reduce the error value) and the like.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an ultra-precise three-coordinate test platform, which adopts a vacuum pre-compression air floatation technology to realize the friction-free rapid movement of the test platform in the X, Y, Z direction, adopts a bidirectional vacuum pre-compression air floatation assembly in the Z direction and is directly driven by a linear motor, thereby reducing the Abbe error in the Z direction, improving the rigidity and the bearing capacity of the system and reducing the deformation caused by dead weight.
The invention is realized by adopting the following scheme, and the ultra-precise three-coordinate test platform comprises: the base is arranged in an L shape, two limiting blocks are arranged on the vertical end face of the L-shaped base at intervals in parallel, and a slideway is formed between the two limiting blocks; the support piece connecting piece is arranged in a 7 shape, square flat vacuum preloading air bearing pieces are arranged on the left end edge and the bottom of the support piece connecting piece, the square flat vacuum preloading air bearing pieces arranged on the left end edge of the support piece connecting piece are placed in a slideway formed between two limiting blocks on the base, and the square flat vacuum preloading air bearing pieces arranged on the bottom of the support piece connecting piece are placed on the plane of the base bottom plate; the X-direction linear motor is arranged below the support piece connecting piece and comprises a linear stator fixed on the base bottom plate through bolts and a rotor arranged on the linear stator, the rotor is fixedly connected with the bottom of the support piece connecting piece, and the linear stator drives the rotor to drive the support piece connecting piece to linearly move along the X direction; the X-direction grating ruler is arranged at the top of the grating ruler base; the first Z-direction upright post is fixed at the top of the support piece connecting piece, the second Z-direction upright post is arranged at one side of the first Z-direction upright post in parallel, the bottom of the second Z-direction upright post is provided with a circular flat vacuum preloading air bearing piece, and the circular flat vacuum preloading air bearing piece is arranged on the plane of the base bottom plate; the first vacuum pre-compression air floatation assembly is fixedly connected with a rotor of the Z-direction linear motor, and the Z-direction linear motor drives the first vacuum pre-compression air floatation assembly to linearly move along the Z direction; the left end of the gantry beam is fixed on the first vacuum pre-compression air floatation assembly of the first Z-direction upright post, the right end of the gantry beam is fixed on the first vacuum pre-compression air floatation assembly of the second Z-direction upright post, the top of the gantry beam is provided with a mounting groove, the inner wall of the mounting groove is provided with a Y-direction grating ruler, a Y-direction linear motor is arranged in the mounting groove and is opposite to the Y-direction grating ruler, a rotor of the Y-direction linear motor is connected with the second vacuum pre-compression air floatation assembly, and the Y-direction linear motor drives the second vacuum pre-compression air floatation assembly to linearly move along the Y direction; the detection head is fixed at the bottom of the second vacuum pre-pressure air floatation assembly and is connected with an industrial computer.
Preferably, the first vacuum pre-compression air floatation assembly and the second vacuum pre-compression air floatation assembly have the same structure and comprise side air floatation supporting pieces and connecting part air floatation supporting pieces, the side air floatation supporting pieces are connected or welded into a U shape through three independent square flat plate vacuum pre-compression air floatation supporting pieces by screws, the connecting part air floatation supporting pieces are fixed at the top of the U-shaped side air floatation supporting pieces by screws, and the inner wall of the connecting part air floatation supporting pieces is fixedly connected with a rotor of the linear motor.
Preferably, the square flat vacuum preloading air supporting piece comprises a shaft sleeve shell and a first air floatation micropore cover plate, a first airtight vacuum adsorption cavity is formed in the shaft sleeve shell, a first air suction hole is formed in the center of the first vacuum adsorption cavity, a first air leakage hole is formed in the side wall of the shaft sleeve shell, the first air suction hole is connected with the first air leakage hole through a pipeline, a plurality of first air film cavities which are distributed in a reverse shape and gradually expand outwards are formed in the periphery of the first vacuum adsorption cavity, a first air inlet hole is formed in the side wall of the shaft sleeve shell, the first air inlet hole is communicated with each first air film cavity, the first air floatation micropore cover plate covers the first air film cavity, and the contact part of the first air floatation micropore cover plate, the first vacuum adsorption cavity and the shaft sleeve shell is connected with each other in a sealing mode through sealing glue.
Preferably, the connecting portion air supporting piece comprises a shell, a cover plate covers the inner side of the shell, two air floatation cavities which are distributed at intervals in parallel are arranged on the shell, a second air film cavity is arranged in the air floatation cavity, a second air floatation micropore cover plate covers the surface of the second air film cavity, a second air inlet hole which corresponds to the air floatation cavity is further formed in the end edge of the shell, the second air inlet hole is communicated with the second air film cavity through a pipeline, a second vacuum adsorption cavity is formed in the left end and the right end of each air floatation cavity, a second air suction hole is formed in the center of each second vacuum adsorption cavity, a second air leakage hole is correspondingly formed in the end edge of the shell, and the second air suction hole is connected with the second air leakage hole through a vacuum suction pipe.
Preferably, two stoppers are symmetrically arranged on the base, the two stoppers are arranged opposite to the supporting member connecting member, and the supporting member connecting member moves between the two stoppers.
Preferably, the front end and the rear end of the grating ruler base are provided with X-direction photoelectric limit switches.
Preferably, the first Z-direction upright post and the second Z-direction upright post are provided with Z-direction photoelectric limit switches on the inner walls of the mounting grooves.
Preferably, a Y-direction photoelectric limit switch is arranged on the inner wall of the mounting groove of the gantry beam.
The ultra-precise three-coordinate test platform provided by the invention has the beneficial effects that:
(1) The Z-direction of the ultra-precise three-coordinate test platform passes through the bidirectional vacuum pre-compression air floatation assembly and is directly driven by the linear motor, so that Abbe errors in the Z-direction are reduced, the rigidity and bearing capacity of the system are improved, meanwhile, the structure that a Z-direction movement device is arranged on a gantry cantilever beam in the prior art is avoided, the deformation caused by the self weight of the Z-direction movement device is reduced, the cantilever gantry beam adopts the mechanical structure of the vacuum pre-compression air floatation assembly, the high rigidity and high bearing capacity are realized, and the real-time braking can be realized through the negative pressure regulation of the vacuum pre-compression air floatation assembly;
(2) The X-direction of the ultra-precise three-coordinate testing platform adopts a unilateral guide rail system, the traditional double-closed type air floatation guide rail system is avoided, the installation is simple, the X-direction square flat vacuum preloading air floatation support piece realizes frictionless movement on the side by positive and negative pressure adjustment, the full-closed loop control is realized by a linear motor and a grating feedback system, the Z-direction vacuum preloading air floatation assembly is driven by a bidirectional linear motor, the double-grating feedback system realizes the precise control in the vertical direction, the Y-direction vacuum preloading air floatation assembly realizes the precise control in the Y direction by the motor and the grating system, the precise linkage control is realized by controlling the movement in the three directions, and the Y-direction freedom degree of the X-direction side vacuum preloading air floatation support piece can be limited, so that the phenomenon of channeling is prevented;
(3) The ultra-precise three-coordinate testing platform adopts a vacuum preloading technology, realizes rapid friction-free movement through an improved cantilever gantry beam vacuum preloading structure, improves the rigidity of the whole system, and realizes ultra-precise measurement;
(4) The ultra-precise three-coordinate testing platform is an ultra-precise air floatation positioning working platform adopting a static pressure air floatation guide rail and a linear motor driving technology, and takes gas as a lubricant, and a gas film is generated between the working platform and a static guide rail surface, so that the supporting element can realize relative movement of the working platform and the static guide rail surface under the condition of no contact; compared with the traditional rolling bearing and oil lubrication bearing, the rolling bearing is more suitable for occasions with small friction, high speed, high precision and no pollution.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional structure I of the present invention.
Fig. 2 is a schematic perspective view ii of the present invention.
Fig. 3 is a schematic diagram illustrating a transmission structure disassembled in the present invention.
FIG. 4 is an enlarged schematic view I of a part of the structure of the present invention.
Fig. 5 is an enlarged schematic diagram ii of a part of the structure of the present invention.
Fig. 6 is a schematic perspective view of a second vacuum pre-compression air floatation assembly according to the present invention.
Fig. 7 is a schematic perspective view ii of a second vacuum pre-compression air floatation assembly according to the present invention.
Fig. 8 is a schematic perspective view of a square flat vacuum preloading air bearing in the present invention.
Fig. 9 is a schematic view showing the internal structure of a square flat vacuum preloading air bearing in the present invention.
Fig. 10 is a schematic perspective view of a connecting portion air bearing according to the present invention.
Fig. 11 is a schematic view showing the internal structure of the connecting portion air bearing member in the present invention.
In the figure: 1. a base; 2. square plate vacuum pre-pressing air-float supporting piece; 3. a support connection; 4. x-direction photoelectric limit switch; 5. a limiter; 6. an X-direction grating ruler; 7. a grating ruler base; 8. an X-direction linear motor; 81. a linear stator; 82. a mover; 9. a limiting block; 10. a first Z-direction upright; 11. a first vacuum pre-pressure air floatation assembly; 12. a gantry beam; 13. round flat vacuum preloading air-float support; 14. a second Z-direction upright post; 15. y-direction photoelectric limit switch; 16. a Y-direction linear motor; 17. a detection head; 18. y-direction grating ruler; 19. z-direction photoelectric limit switch; 20. a Z-direction linear motor; 21. z-direction grating ruler; 22. a second vacuum pre-pressure air floatation assembly; 210. a shaft sleeve; 220. a first air-bearing microporous cover plate; 230. a first vacuum adsorption chamber; 240. a first air inlet hole; 250. a first air extraction hole; 260. a first vent hole; 270. a first air film chamber; 31. a connecting part air bearing member; 310. a housing; 320. a cover plate; 330. a second vacuum adsorption chamber; 331. a second air-extracting hole; 332. vacuumizing the tube; 333. a second vent hole; 340. an air floatation cavity; 341. a second air inlet hole; 342. a second air film cavity; 343. and a second air floatation micropore cover plate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art without making any inventive effort are within the scope of the present invention.
Examples: an ultra-precise three-coordinate test platform.
Referring to fig. 1 to 11, an ultra-precise three-coordinate test platform includes:
the base 1 is formed by splicing a marble plate with a smooth surface which is horizontally arranged and a marble plate with a smooth surface which is vertically arranged into an L shape, two limiting blocks 9 are arranged on the vertical end face of the L-shaped base 1 at intervals in parallel, a slideway is formed between the two limiting blocks 9, the surface of the marble base 1 is smooth and flat, and a uniform air film is formed on the surface of the marble base 1 by the vacuum pre-pressure air floatation assembly;
the support piece connecting piece 3 is arranged in a 7 shape, so that the support piece connecting piece 3 can be conveniently in butt joint with the horizontal plane and the vertical plane of the base 1 at the same time, and the bottom driving device and the measuring device can be conveniently installed; two parallel square flat vacuum preloading air bearing pieces 2 are arranged on the left end edge and the bottom of the bearing piece connecting piece 3, the square flat vacuum preloading air bearing pieces 2 and the bearing piece connecting piece 3 are fixed through bolts, the square flat vacuum preloading air bearing pieces 2 arranged on the left end edge of the bearing piece connecting piece 3 are placed in a slideway formed between two limiting blocks 9 on the base 1, and the square flat vacuum preloading air bearing pieces 2 arranged on the bottom of the bearing piece connecting piece 3 are placed on the plane of the bottom plate of the base 1 (refer to figures 1 and 4); the square flat vacuum preloading air bearing 2 comprises a shaft sleeve shell 210 and a first air floating micropore cover plate 220, the shaft sleeve shell 210 is a closed space, through holes with diameters of 5 microns are uniformly formed in the surface of the first air floating micropore cover plate 220, a closed first vacuum adsorption cavity 230 is formed in the shaft sleeve shell 210, a first air suction hole 250 is formed in the center of the first vacuum adsorption cavity 230, a first air discharge hole 260 is formed in the side wall of the shaft sleeve shell 210, the first air discharge hole 250 is connected with the first air discharge hole 260 through a pipeline, the first air discharge hole 260 is connected with an external vacuumizing device through a pipeline, a plurality of first air film cavities 270 which are distributed in a reverse shape and gradually expand outwards are formed in the periphery of the first vacuum adsorption cavity 230, a first air inlet hole 240 is formed in the side wall of the shaft sleeve shell 210 and is communicated with each first air film cavity 270, the first air inlet hole 240 is connected with an external air inlet device through a pipeline, the first air floating micropore cover plate 220 covers the first air film cavity 270, and the first air floating micropore cover plate 220 is connected with the first air suction cavity 230 through a pipeline, and the positions of the shaft sleeve shell 210 are in contact with an air seal graph (see a sealing graph 9 and a sealing graph) of the sealing graph 9; in the actual use process, the external air inlet equipment is used for introducing high-pressure air into the first air inlet hole 240, after the high-pressure air enters the first air film cavity 270, the high-pressure air is uniformly dispersed and then is sprayed out through the micropores on the first air floatation microporous cover plate 220, and an air film is formed on the surface of the marble base (positive pressure is generated), so that the supporting piece connecting piece 3 is suspended in the air, when the supporting piece connecting piece is moved to an accurate position, ventilation is stopped, air is pumped out through the vacuumizing device (negative pressure is generated), and the surface of the first vacuum adsorption cavity 230 is subjected to negative pressure through the first air pumping hole 250 formed in the center of the first vacuum adsorption cavity 230, so that the aim of stopping at a fixed point immediately is fulfilled;
the X-direction linear motor 8 is installed below the support member connector 3, the X-direction linear motor 8 includes a linear stator 81 fixed on the bottom plate of the base 1 by bolts and a mover 82 (refer to fig. 5) disposed on the linear stator 81, the mover 82 is fixedly connected with the bottom of the support member connector 3 by screws, and the working principle of the X-direction linear motor 8 is as follows: a movable gap is arranged between the upper surface and the lower surface of the linear stator 81 and the upper surface and the lower surface of the mover 82, the mover 82 is inserted into the linear stator 81 under the action of gravity, at the moment, the mover 82 cannot move on the linear stator 81 (in a locking state), when the mover 82 moves upwards against the gravity under the action of pulling force (or reverse pushing force), a gap (in an unlocking state) is generated between the mover 82 and the linear stator 81, at the moment, the mover 82 can move on the linear stator 81 in a linear manner under the driving of the linear stator 81, when the external force is removed, the mover 82 is reinserted into the linear stator 81 under the action of gravity, and the mover 82 is locked again; when the movable support needs to be moved, high-pressure gas is introduced into the square flat vacuum precompaction air floatation support 2, the support piece connecting piece 3 floats upwards under the action of air floatation, the support piece connecting piece 3 floats upwards to drive the mover 82 and the linear stator 81 to generate a moving gap, then the linear stator 81 drives the mover 82 to drive the support piece connecting piece 3 to linearly move along the X direction, so that the friction-free movement of the support piece connecting piece 3 at the bottom and the side is realized, when the vacuumizing device is used for vacuumizing (negative pressure is generated), the mover 82 falls into the linear stator 81 under the action of gravity (the linear motor stops working), the aim of stopping at fixed points immediately is fulfilled, and the phenomenon of inaccurate moving position caused by inertia or dragging is avoided;
the X-direction grating ruler 6 is arranged at the top of the grating ruler base 7, X-direction photoelectric limit switches 4 are arranged at the front end and the rear end of the grating ruler base 7, the X-direction photoelectric limit switches 4 and the X-direction grating ruler 6 are in full-closed loop connection with the X-direction linear motor 8, the X-direction grating ruler 6 is used for accurately measuring the moving coordinates of the supporting piece connecting piece 3 in the X direction and feeding back signals to the X-direction linear motor 8 to accurately control the moving of the supporting piece connecting piece 3 in the X direction, the X-direction photoelectric limit switches 4 are used for controlling the maximum distance of the supporting piece connecting piece 3 moving in the X direction and preventing derailment, two limit devices 5 symmetrically arranged are arranged on the base 1, the two limit devices 5 are opposite to the supporting piece connecting piece 3, and the supporting piece connecting piece 3 moves between the two limit devices 5;
the first Z-direction upright post 10 is fixed at the top of the support piece connecting piece 3, the second Z-direction upright post 14 is arranged at one side of the first Z-direction upright post 10 in parallel, the bottom of the second Z-direction upright post 14 is provided with a circular flat vacuum preloading air bearing piece 13, the circular flat vacuum preloading air bearing piece 13 has the same internal structure (different appearance) as the square flat vacuum preloading air bearing piece 2, and the circular flat vacuum preloading air bearing piece 13 is arranged on the plane of the bottom plate of the base 1;
the side walls of the first Z-direction upright post 10 and the second Z-direction upright post 14 are respectively provided with a mounting groove, the inner wall of each mounting groove is provided with a Z-direction grating ruler 21, the upper end edge and the lower end edge of each Z-direction grating ruler 21 are respectively provided with a Z-direction photoelectric limit switch 19, each Z-direction linear motor 20 is arranged in each mounting groove and is opposite to each Z-direction grating ruler 21, each Z-direction photoelectric limit switch 19 and each Z-direction linear motor 20 are connected in a closed loop manner, the first vacuum pre-compression air floatation assembly 11 is fixedly connected with a rotor of each Z-direction linear motor 20, and each Z-direction linear motor 20 drives the first vacuum pre-compression air floatation assembly 11 to linearly move along the Z direction; the first vacuum pre-compression air floatation assembly 11 comprises a side air floatation support and a connecting part air floatation support 31, wherein the side air floatation support is formed by connecting three independent square flat plate vacuum pre-compression air floatation supports 2 into a U shape through screws, the connecting part air floatation support 31 is fixed on the top of the U-shaped side air floatation support through screws, and the inner wall of the connecting part air floatation support 31 is fixedly connected with a rotor of the Z-direction linear motor 20 through bolts (as shown in fig. 6 and 7); the connection portion air bearing 31 comprises a housing 310, a cover plate 320 is covered on the inner side of the housing 310, two air-floating cavities 340 are arranged on the housing 310 at intervals in parallel, a second air film cavity 342 is arranged in the air-floating cavities 340, a second air-floating micropore cover plate 343 is covered on the surface of the second air film cavity 342, through holes with the diameter of 5 micrometers are uniformly formed on the surface of the second air-floating micropore cover plate 343, a second air inlet hole 341 corresponding to the air-floating cavities 340 is further formed on the end edge of the housing 310, the second air inlet hole 341 is communicated with the second air film cavity 342 through a pipeline, the second air inlet hole 341 is connected with external air inlet equipment through a pipeline, a second vacuum adsorption cavity 330 is arranged at the left end and the right end of each air-floating cavity 340, a second air outlet hole 331 is formed in the center of each second vacuum adsorption cavity 330, second air outlet holes 333 are correspondingly formed on the end edge of the housing 310, the second air outlet holes 331 are connected with the second air outlet holes 333 through vacuum pipes 332, and the external vacuum equipment are connected through pipelines (see fig. 10 and 11); the working principle of the connecting part air bearing 31 is the same as that of the square flat vacuum preloading air bearing 2, when in bearing, external air inlet equipment is used for air inlet through a second air inlet hole 341, and an air film is formed on the surface of an air bearing cavity 340, so that a moving gap is generated between a rotor 82 of a linear motor and a linear stator 81 under the action of counter thrust (no friction force exists between the rotor 82 and the linear stator 81 at the moment), then the linear stator 81 drives the rotor 82 to linearly move, after moving in place, the second vacuum adsorption cavity 330 is vacuumized, the rotor 82 falls into the linear stator 81, the linear motor immediately stops acting (accurately locates), and the connecting part air bearing 31 is designed to be distributed with two air bearing cavities 340 in parallel at intervals, so that the middle part of the connecting part air bearing 31 is conveniently connected with the rotor 82 better; in the embodiment, a bidirectional vacuum pre-pressure air floatation assembly is adopted in the Z direction and is directly driven by a linear motor, so that Abbe errors in the Z direction are reduced, the rigidity and bearing capacity of the system are improved, meanwhile, the structure that a Z-direction movement device is arranged on a gantry cantilever beam in the prior art is avoided, and the deformation caused by the dead weight of the Z-direction movement device is reduced;
the left end of the gantry beam 12 is fixed on the first vacuum pre-pressure air floatation assembly 11 of the first Z-direction upright post 10, the right end of the gantry beam 12 is fixed on the first vacuum pre-pressure air floatation assembly 11 of the second Z-direction upright post 14, the top of the gantry beam 12 is provided with a mounting groove, the inner wall of the mounting groove is provided with a Y-direction grating ruler 18, the left end and the right end of the Y-direction grating ruler 18 are provided with Y-direction photoelectric limit switches 15, a Y-direction linear motor 16 is arranged in the mounting groove and is opposite to the Y-direction grating ruler 18, a rotor of the Y-direction linear motor 16 is connected with a second vacuum pre-pressure air floatation assembly 22, the Y-direction linear motor 16 drives the second vacuum pre-pressure air floatation assembly 22 to linearly move along the Y direction, a connecting part air bearing 31 in the second vacuum pre-pressure air floatation assembly 22 is fixedly connected with the rotor of the Y-direction linear motor 16 through bolts, and when the Y-direction grating ruler 18 moves, the Y-direction linear motor 16 is downwards formed through the connecting part air bearing 31, so that the Y-direction linear motor 16 and the second vacuum pre-pressure air floatation assembly 22 can be accurately driven to move in the Y-direction pre-pressure air floatation assembly to the position, and the Y-pressure pre-pressure air floatation assembly can be accurately detected, and the Y-pressure pre-pressure air floatation assembly can be driven to move in the Y-direction, and the position can be detected, and the vacuum pre-pressure air floatation assembly can be immediately moved to the second vacuum pre-pressure air floatation assembly 22 can be detected, and the position to the position and the second vacuum pre-pressure air floatation assembly 22 can be detected, and the position to the position, and the Y-pressure air can be detected, and the vacuum pre-pressure air, and the vacuum air and the air;
the detecting head 17 is fixed at the bottom of the second vacuum pre-pressure air floatation assembly 22, and the detecting head 17 is used for detecting an object to be detected placed on the base 1 and transmitting detection data to an industrial computer.
In this embodiment, the detection head 17 may drive the second vacuum pre-compression air floatation assembly 22 to move in the Y direction through the Y-direction linear motor 16, so as to precisely control the displacement of the detection head 17 in the Y direction (the Y-direction grating ruler 18 may precisely measure), and the second vacuum pre-compression air floatation assembly 22 is sleeved on the gantry beam 12 by adopting the vacuum pre-compression air floatation technology, so that the bearing of the gantry beam 12 can be reduced, the deformation of the gantry beam 12 is prevented, and the second vacuum pre-compression air floatation assembly 22 is directly driven by adopting the linear motor, so that the abbe error in the Y direction during the movement detection can be reduced; the Z direction adopts a mechanical structure that two first vacuum pre-pressure air floatation assemblies 11 are sleeved on a Z direction upright post and are directly driven by two Z direction linear motors 20, so that the rigidity and bearing capacity of the system can be improved, the deformation caused by dead weight is reduced, the accuracy of Z direction movement is improved, the structure that a traditional Z direction movement device is arranged on a gantry cantilever beam is avoided, the deformation caused by the dead weight is reduced, and the Abbe error in the Z direction is reduced; the X-direction adopts a unilateral guide rail system (a square flat vacuum preloading air bearing piece 2 arranged on the left end edge of a bearing piece connecting piece 3 is placed in a slideway formed between two limiting blocks 9 on a base 1), the bottom of the bearing piece connecting piece 3 and a round flat vacuum preloading air bearing piece 13 at the bottom of a second Z-direction upright post 14 are placed on a base plate 1, the installation is simple, the traditional complex double-closed air bearing guide rail structure is avoided, the square flat vacuum preloading air bearing piece 2 on the X-direction side edge can limit the freedom degree of the bearing piece connecting piece 3 in the Y-direction, the phenomenon of play is prevented, and the X-direction square flat vacuum preloading air bearing piece 2 realizes frictionless movement on the side edge by positive and negative pressure regulation, so that the accurate control of the X-direction upward moving position is facilitated. The ultra-precise three-coordinate testing platform realizes friction-free rapid movement by adopting a vacuum pre-pressure air floatation technology in the X, Y, Z direction, realizes full closed-loop control by adopting a linear motor and a grating feedback system in the X, Y, Z direction, realizes precise linkage control by controlling the movement in three directions, and realizes ultra-precise measurement.
The ultra-precise three-coordinate testing platform is an ultra-precise air floatation positioning working platform adopting a static pressure air floatation guide rail and a linear motor driving technology, and takes gas as a lubricant, and a gas film is generated between the working platform and a static guide rail surface, so that the supporting element can realize relative movement of the working platform and the static guide rail surface under the condition of no contact; compared with the traditional rolling bearing and oil lubrication bearing, the rolling bearing is more suitable for occasions with small friction, high speed, high precision and no pollution.
Standard parts used in the invention can be purchased from the market, special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of the parts adopt conventional means such as mature bolts, rivets and welding in the prior art, the machines, the parts and the equipment adopt conventional models in the prior art, and the gas circuit and the circuit are connected in a conventional connection mode in the prior art, so that the detailed description is omitted.
The foregoing is a preferred embodiment of the present invention, but the present invention should not be limited to the embodiment and the disclosure of the drawings, so that the equivalents and modifications can be made without departing from the spirit of the disclosure.
Claims (6)
1. An ultra-precise three-coordinate test platform, characterized by comprising:
the base is arranged in an L shape, two limiting blocks are arranged on the vertical end face of the L-shaped base at intervals in parallel, and a slideway is formed between the two limiting blocks;
the support piece connecting piece is arranged in a 7 shape, square flat vacuum preloading air bearing pieces are arranged on the left end edge and the bottom of the support piece connecting piece, the square flat vacuum preloading air bearing pieces arranged on the left end edge of the support piece connecting piece are placed in a slideway formed between two limiting blocks on the base, and the square flat vacuum preloading air bearing pieces arranged on the bottom of the support piece connecting piece are placed on the plane of the base bottom plate;
the X-direction linear motor is arranged below the support piece connecting piece and comprises a linear stator fixed on the base bottom plate through bolts and a rotor arranged on the linear stator, the rotor is fixedly connected with the bottom of the support piece connecting piece, and the linear stator drives the rotor to drive the support piece connecting piece to linearly move along the X direction;
the X-direction grating ruler is arranged at the top of the grating ruler base;
the first Z-direction upright post is fixed at the top of the support piece connecting piece, the second Z-direction upright post is arranged at one side of the first Z-direction upright post in parallel, the bottom of the second Z-direction upright post is provided with a circular flat vacuum preloading air bearing piece, and the circular flat vacuum preloading air bearing piece is arranged on the plane of the base bottom plate; the first vacuum pre-compression air floatation assembly is fixedly connected with a rotor of the Z-direction linear motor, and the Z-direction linear motor drives the first vacuum pre-compression air floatation assembly to linearly move along the Z direction;
the left end of the gantry beam is fixed on the first vacuum pre-compression air floatation assembly of the first Z-direction upright post, the right end of the gantry beam is fixed on the first vacuum pre-compression air floatation assembly of the second Z-direction upright post, the top of the gantry beam is provided with a mounting groove, the inner wall of the mounting groove is provided with a Y-direction grating ruler, a Y-direction linear motor is arranged in the mounting groove and is opposite to the Y-direction grating ruler, a rotor of the Y-direction linear motor is connected with the second vacuum pre-compression air floatation assembly, and the Y-direction linear motor drives the second vacuum pre-compression air floatation assembly to linearly move along the Y direction;
the detection head is fixed at the bottom of the second vacuum pre-pressure air floatation assembly and is connected with an industrial computer;
x-direction photoelectric limit switches are arranged at the front end and the rear end of the grating ruler base; and a Y-direction photoelectric limit switch is arranged on the inner wall of the mounting groove of the gantry beam.
2. The ultra-precise three-coordinate test platform of claim 1, wherein: the first vacuum pre-compression air floatation assembly and the second vacuum pre-compression air floatation assembly are identical in structure and comprise side air floatation supporting pieces and connecting part air floatation supporting pieces, the side air floatation supporting pieces are connected or welded into a U shape through three independent square flat plate vacuum pre-compression air floatation supporting pieces through screws, the connecting part air floatation supporting pieces are fixed to the top of the U-shaped side air floatation supporting pieces through screws, and the inner wall of the connecting part air floatation supporting pieces is fixedly connected with a rotor of a linear motor.
3. The ultra-precise three-coordinate test platform of claim 2, wherein: the square flat vacuum preloading air supporting piece comprises a shaft sleeve shell and first air floatation micropore cover plates, a first airtight vacuum adsorption cavity is formed in the shaft sleeve shell, first air suction holes are formed in the centers of the first vacuum adsorption cavities, first air leakage holes are formed in the side walls of the shaft sleeve shell, the first air suction holes are connected with the first air leakage holes through pipelines, a plurality of first air film cavities which are distributed in a shape like a Chinese character 'Hui' and gradually expand outwards are formed in the periphery of the first vacuum adsorption cavity, first air inlet holes are formed in the side walls of the shaft sleeve shell, the first air inlet holes are communicated with each first air film cavity, the first air floatation micropore cover plates cover the first air film cavities, and the contact positions of the first air floatation micropore cover plates, the first vacuum adsorption cavities and the shaft sleeve shell are all connected in a sealing mode through sealing glue.
4. An ultra-precise three-coordinate test platform according to claim 2 or 3, wherein: the connecting portion air supporting piece comprises a shell, a cover plate covers the inner side of the shell, two air floatation cavities which are distributed at intervals in parallel are arranged on the shell, a second air film cavity is formed in the air floatation cavity, a second air floatation micropore cover plate covers the surface of the second air film cavity, a second air inlet hole which corresponds to the air floatation cavity is further formed in the end edge of the shell, the second air inlet hole is communicated with the second air film cavity through a pipeline, a second vacuum adsorption cavity is formed in the left end and the right end of each air floatation cavity, a second air suction hole is formed in the center of each second vacuum adsorption cavity, a second air leakage hole is formed in the end edge of the shell correspondingly, and the second air suction hole is connected with the second air leakage hole through a vacuum suction pipe.
5. The ultra-precise three-coordinate test platform of claim 4, wherein: two limiters which are symmetrically arranged are arranged on the base, the two limiters are opposite to the supporting piece connecting piece, and the supporting piece connecting piece moves between the two limiters.
6. The ultra-precise three-coordinate test platform of claim 1, wherein: and the inner walls of the mounting grooves of the first Z-direction upright post and the second Z-direction upright post are respectively provided with a Z-direction photoelectric limit switch.
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| CN109959504A (en) * | 2019-04-08 | 2019-07-02 | 哈尔滨工业大学 | Planar motor experimental provision |
| CN113458998A (en) * | 2021-06-23 | 2021-10-01 | 安徽天航机电有限公司 | Vacuum adsorption type clamping detection device for easily-deformed parts and use method thereof |
| CN113533208A (en) * | 2021-07-29 | 2021-10-22 | 昆山世纪三友测量技术有限公司 | Splicing type one-key measuring instrument |
| CN114772246B (en) * | 2022-04-29 | 2022-12-20 | 深圳格芯集成电路装备有限公司 | Tray conveying device |
| CN114724618B (en) * | 2022-06-09 | 2022-09-16 | 上海隐冠半导体技术有限公司 | Three-axis motion table |
| CN115325974B (en) * | 2022-10-12 | 2022-12-27 | 湖北上启计量检测有限公司 | Coordinate measuring instrument |
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