CN203738787U

CN203738787U - Mechanical arm with testing heads controlled to accurately move and be positioned in XY plane

Info

Publication number: CN203738787U
Application number: CN201320854054.5U
Authority: CN
Inventors: 王浩; 王刚; 殷伟理
Original assignee: ZHENJIANG ATEC SEMICONDUCTOR CO Ltd
Current assignee: Jiangsu Acetec Semiconductor Co ltd
Priority date: 2013-12-23
Filing date: 2013-12-23
Publication date: 2014-07-30
Anticipated expiration: 2023-12-23

Abstract

The utility model discloses a mechanical arm with testing heads controlled to accurately move and be positioned in an XY plane. The mechanical arm is formed by connecting three arm sections. The first arm section is a lifting arm section which conducts rectilinear motion along the Z-axis. The second arm section is in shaft connection with the first arm section. The third arm section is in shaft connection with the second arm section. The second arm section and the third arm section are rotation arm sections which move in the XY plane. The second arm section and the third arm section are respectively provided with a limiting plate. The testing heads are arranged at the front end of the third arm section. The mechanical arm has the advantages that the three arm sections are used for controlling the testing heads to move and turn over in the XY plane so as to limit the range of the freedom degree in the XY plane; the first arm section conducts rectilinear motion along the Z-axis, the second arm section and the third arm section rotate, and consequently the movement positions of the testing heads can be accurately positioned in the XY plane; the mechanical arm is easy to operate and control and high in positioning accuracy.

Description

Control the mechanical arm of measuring head accurate motion positions in XY plane

Technical field

The utility model relates to a kind of mechanical arm, particularly a kind of mechanical arm of controlling measuring head motion positions in XY plane of control assembly motion.

Background technology

The automatic test of integrated circuit and other electronics wafer, need to coordinate special test processor, with suitable temperature, suitable position, tests.Wafer test itself is exactly a huge and expensive Auto-Test System, and this system comprises that a measuring head is connected with the main body of this device handler.Measuring head has been used the electronic circuit of high-precision frequency control apparatus and data-signal, measuring head must be combined closely with the main body of device handler, realize accurate high speed test, this just must realize measuring head can realize accurately location in the main body of device handler.

Accurately location normally utilizes mechanical arm that measuring head is fixed, and utilizes the movement of mechanical arm to control the position of measuring head, finally realizes measuring head and in the scope of six-freedom degree, carries out movement and the upset in XY plane.Six-freedom degree is respectively: the movement of X-axis, the movement of Y-axis, the movement of Z axis, the rotation of the rotation of X-axis, Y-axis, the rotation of Z axis.

Utility model content

Utility model object: for the problems referred to above, the purpose of this utility model is to provide a kind of mechanical arm of controlling measuring head accurate motion positions in XY plane.

Technical scheme: a kind of mechanical arm of controlling measuring head accurate motion positions in XY plane, by three joint arms, connected to form, first segment arm is along the straight-line lifting arm of Z axis, second section arm axle is connected in described first segment arm, the 3rd joint arm axle is connected in described second section arm, described second section arm, described the 3rd joint arm are revolution arm mobile in XY plane, on described second section arm, described the 3rd joint arm, be separately installed with limiting plate, measuring head is arranged on described the 3rd joint arm front end.

Also comprise the pedestal being formed by base, guide rail, elevating mechanism, described guide rail is vertically mounted on described base along Z axis, described first segment arm is connected in described guide rail and drives motion by described elevating mechanism, and the range of movement of controlling thus first segment arm is the straight line along Z axis, does not rotate.

Described elevating mechanism comprises fixed pulley, balancing weight, steel wire rope.

Between described the 3rd joint arm and described measuring head, manipulator is also installed, described manipulator axle is connected in described the 3rd joint arm, and described manipulator overturns in perpendicular to XY plane.

The rotating angular range of its moving-limiting of described limiting plate of installing respectively on described second section arm, described the 3rd joint arm is 0 °～180 °.

Described limiting plate is marked with angle index, convenient adjustment and accurate location.

Beneficial effect: compared with prior art, the utility model has the advantages that and utilize three joint arms to control movement and the upset of measuring head in XY plane, scope with the free degree in restriction XY plane, first segment arm is along Z axis rectilinear motion, thereby second and third joint arm revolution is accurately positioned at the movement position in XY plane, hold easy operation control, positioning precision is high.

Accompanying drawing explanation

Fig. 1 is the utility model perspective view;

Fig. 2 is the utility model front view.

The specific embodiment

Below in conjunction with the drawings and specific embodiments, further illustrate the utility model, should understand these embodiment and only for the utility model is described, be not used in restriction scope of the present utility model, after having read the utility model, those skilled in the art all fall within the application's claims limited range to the modification of the various equivalent form of values of the present utility model.

As shown in accompanying drawing 1,2, a kind of mechanical arm of controlling measuring head accurate motion positions in XY plane, by pedestal, three joint arms, formed, pedestal comprises base 5, guide rail 6, elevating mechanism, elevating mechanism comprises fixed pulley 7, balancing weight 8, steel wire rope 9, base 5 is positioned at XY plane, and guide rail 6 is vertically mounted on base 5 along Z axis.

First segment arm 1 is connected on guide rail 6 by linear bearing, thrust bearing, and steel wire rope 9 is walked around 7, one, fixed pulley and connected 8, one connection first segment arms 1 of balancing weight, by elevating mechanism, drives first segment arm 1 along guide rail 6 oscilaltion campaigns.

Second section arm 2 is connected in first segment arm 1 by axle, deep groove ball bearing, thrust ball bearing, the 3rd joint arm 3 is connected in second section arm 2 by axle, deep groove ball bearing, thrust ball bearing, spheric roller bearing, second section arm 2 and the 3rd joint arm 3 are all mobile in revolution in XY plane, on second section arm 2 and the 3rd joint arm 3, be separately installed with limiting plate 4, the rotating angular range of moving-limiting is 0 °～180 °, the moving range that can reach is all to take the circular arc that arm length is radius separately, limiting plate 4 is marked with angle index, to accurately locate.

Before the 3rd joint arm 3, manipulator 10 is also installed, measuring head is arranged on manipulator 10 front ends.Manipulator 10 axles are connected in the 3rd joint arm 3, and manipulator 10 can overturn in perpendicular to XY plane.Because the volume of manipulator 10 is larger, when second section arm 2 moves to 0 ° or 180 °, the moving range of the 3rd joint arm 3 becomes the region of 45 °～180 ° or 0 °～135 °.

After arm 3 is adjusted between two angles by second section arm 2 and the 3rd joint, then carry out the fine setting in single angle, finally reach completely and coordinate.

Claims

1. control measuring head accurate mechanical arm of motion positions in XY plane for one kind, it is characterized in that: by three joint arms, connected to form, first segment arm (1) is along the straight-line lifting arm of Z axis, second section arm (2) axle is connected in described first segment arm (1), the 3rd joint arm (3) axle is connected in described second section arm (2), described second section arm (2), described the 3rd joint arm (3) is revolution arm mobile in XY plane, described second section arm (2), on described the 3rd joint arm (3), be separately installed with limiting plate (4), measuring head is arranged on described the 3rd joint arm (3) front end.

2. control measuring head according to claim 1 accurate mechanical arm of motion positions in XY plane, it is characterized in that: also comprise the pedestal being formed by base (5), guide rail (6), elevating mechanism, it is upper that described guide rail (6) is vertically mounted on described base (5) along Z axis, and described first segment arm (1) is connected in described guide rail (6) and drives motion by described elevating mechanism.

3. the mechanical arm of control measuring head according to claim 2 accurate motion positions in XY plane, is characterized in that: described elevating mechanism comprises fixed pulley (7), balancing weight (8), steel wire rope (9).

4. control measuring head according to claim 1 accurate mechanical arm of motion positions in XY plane, it is characterized in that: between described the 3rd joint arm (3) and described measuring head, manipulator (10) is also installed, described manipulator (10) axle is connected in described the 3rd joint arm (3), and described manipulator (10) overturns in perpendicular to XY plane.

5. the mechanical arm of control measuring head according to claim 1 accurate motion positions in XY plane, is characterized in that: the rotating angular range of its moving-limiting of described limiting plate (4) of installing respectively on described second section arm (2), described the 3rd joint arm (3) is 0 °～180 °.

6. the mechanical arm of controlling according to claim 1 or 5 measuring head accurate motion positions in XY plane, is characterized in that: described limiting plate (4) is marked with angle index.