CN103672328A - Lifting device controlling measuring head to move and be positioned on Z axis - Google Patents

Lifting device controlling measuring head to move and be positioned on Z axis Download PDF

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Publication number
CN103672328A
CN103672328A CN201310716772.0A CN201310716772A CN103672328A CN 103672328 A CN103672328 A CN 103672328A CN 201310716772 A CN201310716772 A CN 201310716772A CN 103672328 A CN103672328 A CN 103672328A
Authority
CN
China
Prior art keywords
axis
guide rail
gear
balancing weight
lifting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310716772.0A
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Chinese (zh)
Inventor
王浩
王刚
殷伟理
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHENJIANG ATEC SEMICONDUCTOR CO Ltd
Original Assignee
ZHENJIANG ATEC SEMICONDUCTOR CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZHENJIANG ATEC SEMICONDUCTOR CO Ltd filed Critical ZHENJIANG ATEC SEMICONDUCTOR CO Ltd
Priority to CN201310716772.0A priority Critical patent/CN103672328A/en
Publication of CN103672328A publication Critical patent/CN103672328A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a lifting device controlling a measuring head to move and be positioned on the Z axis. The lifting device comprises a base, a guide rail, a fixed pulley, a balancing weight and a steel wire tope. The guide rail is perpendicularly installed on the base along the Z axis, the fixed pulley is installed at the top end of the guide rail, the steel wire rope winds around the fixed pulley, one end of the steel wire rope is connected with the balancing weight, the other end of the steel wire rope is connected with a mechanical arm, and the mechanical arm is connected to the guide rail and moves along the guide rail. The lifting device further comprises an accurate adjustment mechanism composed of a gear, a rack, a gear shaft and a turning wheel handle. The lifting device controlling the measuring head to move and be positioned on the Z axis has the advantages that lifting motion and positioning of the measuring head on the Z axis are achieved, the moving position accuracy is accurately controlled, and the handle is easy and convenient to operate and control.

Description

Control the lowering or hoisting gear of test head motion positions on Z axis
Technical field
The present invention relates to a kind of lowering or hoisting gear, particularly a kind of lowering or hoisting gear of controlling test head motion positions on Z axis of controlling component motion.
Background technique
The automatic test of intergrated circuit and other electronics wafer, need to coordinate special test processor, with suitable temperature, suitable position, tests.Wafer test itself is exactly a huge and expensive ATS Automatic Test System, and this system comprises that a test head is connected with the main body of this device handler.In such testing apparatus, test head has been used the electronic circuit of high-precision frequency control apparatus and data-signal, therefore very heavy, 40 to 300 kilograms of left and right, the manipulator that also has connecting test head, weight is equally very heavy, and test head must be combined closely with the main body of device handler, realizes accurate high speed test.
The movement of test head and location are quite important, on the six-freedom degree that moves and rotate, all must accurately locate at test head, and this difficulty that allows the docking of test head can reach test request improves greatly.
For each degrees of freedom is controlled respectively, must control respectively with different mechanisms, by the one or more degrees of freedom of single mechanism controls, the most all degrees of freedom all position, allow the position of test head immobilize.
Summary of the invention
Goal of the invention: for the problems referred to above, the object of this invention is to provide a kind of lowering or hoisting gear of controlling test head motion positions on Z axis, the one-movement-freedom-degree on Z axis is positioned.
Technological scheme: a kind of lowering or hoisting gear of controlling test head motion positions on Z axis, comprise base, guide rail, static pulley, balancing weight, wire rope, described guide rail is vertically mounted on described base along Z axis, described static pulley is arranged on described guide rail top, described wire rope is walked around described static pulley, one connects described balancing weight, and one connects manipulator, and manipulator is connected in described guide rail and moves along it.
Also comprise the fine-tuning mechanism of shaking the hand and forming by gear, tooth bar, gear shaft, runner, described gear and the engagement of described tooth bar, described balancing weight is connected with described tooth bar, and described runner is shaken the hand and is connected with described gear by described gear shaft.Having realized on the basis of moving along Z axis, by fine-tuning mechanism, test head accurate adjustment is located, improve mobile accuracy.
Described tooth bar is connected in the symmetry center position of described balancing weight, and guaranteeing, when shaking runner and shake the hand, has and only have a power perpendicular to balancing weight upper surface, makes the displacement in balancing weight generation Z-direction.
Beneficial effect: compared with prior art, advantage of the present invention is to have realized elevating movement and the location of test head on Z axis, and precisely controls mobile position precision, hand operation is controlled easy.
Accompanying drawing explanation
Fig. 1 is perspective view one of the present invention;
Fig. 2 is perspective view two of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the present invention, should understand these embodiments is only not used in and limits the scope of the invention for the present invention is described, after having read the present invention, those skilled in the art all fall within the application's claims limited range to the modification of the various equivalent form of values of the present invention.
As shown in accompanying drawing 1,2, a kind of lowering or hoisting gear of controlling test head motion positions on Z axis, comprise base 1, guide rail 2, static pulley 3, balancing weight 4, wire rope 5, guide rail 2 is vertically mounted on base 1 along Z axis, static pulley 3 is arranged on guide rail 2 tops, and wire rope 5 is walked around 3, one of static pulley and connected balancing weight 4, one connects manipulator 10, and manipulator 10 is connected in guide rail 2 and moves along it.
By static pulley, balancing weight and manipulator are carried out to stress balance thus, as long as apply again external force, can make manipulator and test head move along Z axis.
Because the operate miss of people in reality is all much larger than the required required precision in location conventionally, therefore on lowering or hoisting gear, be provided with by gear 6, tooth bar 7, gear shaft 8, runner 9 fine-tuning mechanisms that form of shaking the hand, gear 6 and tooth bar 7 engagements, the symmetry center position of balancing weight 4 is connected with tooth bar 7, and runner is shaken the hand and 9 is connected with gear 6 by gear shaft 8.Shake runner shake the hand 9 driven gears 6 and tooth bar 7 gear motions, tooth bar 7 produces the symmetry center position that pulling force act on balancing weight 4, makes balancing weight 4 be subjected to displacement variation, produces the movement on Z axis, thereby precisely regulates running fix.
Wheel and rack can be selected according to accuracy requirement, and the modulus of gear, tooth bar is identical, guarantees that gear rack can be used in conjunction with.

Claims (3)

1. a lowering or hoisting gear of controlling test head motion positions on Z axis, it is characterized in that: comprise base (1), guide rail (2), static pulley (3), balancing weight (4), wire rope (5), described guide rail (2) is vertically mounted on described base (1) along Z axis, described static pulley (3) is arranged on described guide rail (2) top, described wire rope (5) is walked around described static pulley (3), one connects described balancing weight (4), one connects manipulator, and manipulator is connected in described guide rail (2) and moves along it.
2. the lowering or hoisting gear of control test head according to claim 1 motion positions on Z axis, it is characterized in that: also comprise by gear (6), tooth bar (7), gear shaft (8), the runner fine-tuning mechanism that (9) form of shaking the hand, described gear (6) and described tooth bar (7) engagement, described balancing weight (4) is connected with described tooth bar (7), described runner shake the hand (9) be connected with described gear (6) by described gear shaft (8).
3. the lowering or hoisting gear of control test head according to claim 1 motion positions on Z axis, is characterized in that: described tooth bar (7) is connected in the symmetry center position of described balancing weight (4).
CN201310716772.0A 2013-12-23 2013-12-23 Lifting device controlling measuring head to move and be positioned on Z axis Pending CN103672328A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310716772.0A CN103672328A (en) 2013-12-23 2013-12-23 Lifting device controlling measuring head to move and be positioned on Z axis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310716772.0A CN103672328A (en) 2013-12-23 2013-12-23 Lifting device controlling measuring head to move and be positioned on Z axis

Publications (1)

Publication Number Publication Date
CN103672328A true CN103672328A (en) 2014-03-26

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CN201310716772.0A Pending CN103672328A (en) 2013-12-23 2013-12-23 Lifting device controlling measuring head to move and be positioned on Z axis

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104655066A (en) * 2015-02-05 2015-05-27 柳州如洋精密科技有限公司 Joint arm measuring machine
CN106002937A (en) * 2016-06-12 2016-10-12 江苏新光数控技术有限公司 Mechanical arm capable of adjusting height
CN109779270A (en) * 2019-02-22 2019-05-21 阳光学院 A kind of prefabricated post mounting device
CN110454663A (en) * 2019-08-22 2019-11-15 盐城美丽仰徐旅游开发有限公司 A kind of gardens monitoring device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002164394A (en) * 2000-11-22 2002-06-07 Umc Japan Probe for semiconductor and probe card
US20090145241A1 (en) * 2007-12-10 2009-06-11 Cowgill Bruce L Manipulator constant force spring counterbalance
CN101680911A (en) * 2007-05-07 2010-03-24 英泰斯特股份有限公司 Cradle and cable handler for a test head manipulator
CN203743765U (en) * 2013-12-23 2014-07-30 镇江艾科半导体有限公司 Lifting device for controlling testing head to move and be positioned on Z-axis

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002164394A (en) * 2000-11-22 2002-06-07 Umc Japan Probe for semiconductor and probe card
CN101680911A (en) * 2007-05-07 2010-03-24 英泰斯特股份有限公司 Cradle and cable handler for a test head manipulator
US20090145241A1 (en) * 2007-12-10 2009-06-11 Cowgill Bruce L Manipulator constant force spring counterbalance
CN203743765U (en) * 2013-12-23 2014-07-30 镇江艾科半导体有限公司 Lifting device for controlling testing head to move and be positioned on Z-axis

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104655066A (en) * 2015-02-05 2015-05-27 柳州如洋精密科技有限公司 Joint arm measuring machine
CN106002937A (en) * 2016-06-12 2016-10-12 江苏新光数控技术有限公司 Mechanical arm capable of adjusting height
CN109779270A (en) * 2019-02-22 2019-05-21 阳光学院 A kind of prefabricated post mounting device
CN109779270B (en) * 2019-02-22 2021-04-16 阳光学院 Prefabricated post installation device
CN110454663A (en) * 2019-08-22 2019-11-15 盐城美丽仰徐旅游开发有限公司 A kind of gardens monitoring device

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Application publication date: 20140326