CN204302500U - The vacuum targeting device of the particle excitated X-ray spectrometer of a kind of deep space - Google Patents
The vacuum targeting device of the particle excitated X-ray spectrometer of a kind of deep space Download PDFInfo
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- CN204302500U CN204302500U CN201420786145.4U CN201420786145U CN204302500U CN 204302500 U CN204302500 U CN 204302500U CN 201420786145 U CN201420786145 U CN 201420786145U CN 204302500 U CN204302500 U CN 204302500U
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- 239000002245 particle Substances 0.000 title claims abstract description 37
- 230000008685 targeting Effects 0.000 title claims abstract description 20
- 238000012360 testing method Methods 0.000 claims abstract description 12
- 230000005611 electricity Effects 0.000 claims abstract description 4
- 238000013519 translation Methods 0.000 description 11
- 238000002474 experimental method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Abstract
The utility model discloses the vacuum targeting device of the particle excitated X-ray spectrometer of a kind of deep space, it is characterized in that, comprise a vacuum plant, and be positioned at described vacuum plant vacuum tank the second three-axle table and for fixing test sample the one or three axle electricity turntable, X-ray source, the particle excitated X-ray spectrometer of a deep space and a reference platform; Wherein, described first three-axle table and described second three-axle table are separately fixed on described reference platform, and described deep space particle excitated X-ray spectrometer is fixed on described second three-axle table.The utility model accurately can control test sample and the particle excitated X-ray spectrometer of deep space, the complete and staking-out work of accurate energy linearity, resolution ratio and angular response of complete twin detector.Meanwhile, by changing the angle of the relatively same detector of three-axle table, can realize the different angular response of detector to X source.
Description
Technical field
The utility model relates to the vacuum targeting device of the particle excitated X-ray spectrometer of a kind of deep space, is applicable to the scaling experiment of deep space X-ray detector.
Background technology
The X-ray detection instrument adopted in survey of deep space activity is made up of independently detector, in order to correct scientific analysis can be made to the detection data of instrument, just must before instrument is launched to instrument in the Specifeca tion speeification of detector calibrate.
But, along with the development of mankind's survey of deep space technology, improve spatial resolution and the detectivity of instrument on the one hand, but, meanwhile, also make to become more and more difficult to the scaling experiment of deep space X-ray spectrometer because the resolution ratio of detector and the requirement of detectivity improve constantly, this is specifically designed to the targeting device of this quasi-instrument vacuum scaling experiment with regard to an urgent demand development.
Utility model content
For the technical problem existed in prior art, the utility model is the vacuum targeting device that object is to provide the particle excitated X-ray spectrometer of a kind of deep space, in vacuum tank, change X-ray source and detector angle and distance by computer accurate control both optical current potential moving stage X, Y, Z, the energy linearity of deep space X-ray spectrometer, resolution ratio, the corresponding performance of angle are demarcated.
For achieving the above object, technical solution of the present utility model is:
The vacuum targeting device of the particle excitated X-ray spectrometer of a kind of deep space, it is characterized in that, comprise a vacuum plant, and be positioned at described vacuum plant vacuum tank the second three-axle table and for fixing test sample the one or three axle electricity turntable, X-ray source, the particle excitated X-ray spectrometer of a deep space and a reference platform; Wherein, described first three-axle table and described second three-axle table are separately fixed on described reference platform, and described deep space particle excitated X-ray spectrometer is fixed on described second three-axle table.
Further, described vacuum plant comprises described vacuum tank, a part pump, a mechanical pump and a vacuum meter; Wherein, described vacuum meter is arranged on the top of described vacuum tank, and described mechanical pump is connected with the aspirating hole of described vacuum tank, and described molecular pump is connected with described mechanical pump.
Further, described X-ray source is arranged on one end relative with described aspirating hole in described vacuum tank by a ring flange; Described reference platform is parallel to the ground, and the light direction of described X-ray source is parallel to the ground.
Further, be arranged with straight tube surely outside described X-ray source, external diameter and a collar internal diameter of described collimator are suitable, and the collimator of described X-ray source to be enclosed within this collar and to be fixed on described ring flange.
Further, be arranged with straight tube surely outside described X-ray source, described collimator is connected with a back seat, and external diameter and a collar internal diameter of described back seat are suitable, and described back seat to be enclosed within this collar and to be fixed on described ring flange.
The utility model is applicable to deep space X-ray spectrometer scaling experiment, comprises a vacuum tank, a mechanical pump, a molecular pump, a vacuum meter, two three axle electricity turntables, an X-ray source, the particle excitated X-ray spectrometer of a deep space and a reference platform; Vacuum meter is arranged on the top of vacuum tank, mechanical pump is connected with vacuum tank aspirating hole, molecular pump is connected with mechanical pump, X-ray source is arranged on the ring flange bottom vacuum tank, reference platform is arranged on vacuum tank inside, parallel to the ground, the first three-axle table and the second three-axle table are fixed on reference platform, and test sample is fixed on the first three-axle table; The particle excitated X-ray spectrometer of deep space is fixed on the second three-axle table.
Be arranged with collimator outside X-ray source pipe, the external diameter of collimator and the internal diameter of a collar suitable, the collimator of X-ray source pipe to be enclosed within the collar and to be fixed on the ring flange bottom vacuum tank through side screw with screw.
X-ray source pipe ejecting end is oppositely arranged with the receive window of test sample and the particle excitated X-ray spectrometer of deep space.
Described deep space particle excitated X-ray spectrometer targeting device, its for the particle excitated X-ray spectrometer of deep space provide vacuum to be less than 1.3 × 10
-3the environment of Pa.Comprising a vacuum tank, a part pump, a mechanical pump, a vacuum meter.
Described deep space particle excitated X-ray spectrometer targeting device, its first three-axle table and the second three-axle table are by computer or manual adjustments X-direction, Y-direction, Z-direction.
Described deep space particle excitated X-ray spectrometer targeting device, it uses the X-ray source on the ring flange that is fixed on bottom vacuum tank under vacuum conditions.
Compared with prior art, good effect of the present utility model is:
The utility model accurately can control test sample and the particle excitated X-ray spectrometer of deep space, the complete and staking-out work of accurate energy linearity, resolution ratio and angular response of complete twin detector.Meanwhile, by changing the angle of the relatively same detector of three-axle table, can realize the different angular response of detector to X source.
Accompanying drawing explanation
Fig. 1 is the external structure schematic diagram of the utility model deep space particle excitated X-ray spectrometer targeting device.
Fig. 2 is the internal structure schematic diagram of the utility model deep space particle excitated X-ray spectrometer targeting device.
Wherein, 1-vacuum plant, 11-vacuum tank, 12-mechanical pump, 13-molecular pump, 14-vacuum meter, 2-X ray source, 3-reference platform, 4-first three-axle table, 5-second three-axle table, the particle excitated X-ray spectrometer of 6-deep space, 7-tests sample.
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is the external structure schematic diagram of deep space particle excitated X-ray spectrometer targeting device, in figure, and the mechanical pump 12 that vacuum tank 11 is equipped with vacuum meter 14 and automatically controls, molecular pump 13.
Fig. 2 is the inside portion structural representation of deep space particle excitated X-ray spectrometer targeting device, and in figure, three-axle table comprises X-axis, Y-axis, Z axis; Connector, X-ray source 2, test sample 7, the particle excitated X-ray spectrometer 6 of deep space.Wherein, the electric precise translation stage of same model that what X, the Y of first and second three-axle table, Z-direction adopted is, translation stage adopts ball screw to drive, and guide rail adopts precision linear bearing guide, and stepper motor is connected with screw rod.There are zero-bit and limit switch in two ends, and there are screwed hole and the through hole of standard hole pitch in base and two ends, for assembling.
The assembling mode of deep space X-ray spectrometer targeting device is as follows:
1, vacuum meter 14 is arranged on vacuum tank 11 top that design is produced.
2, be connected with molecular pump 13 with mechanical pump 12 by the electronic equipment automatically controlled, the exhaust tube of mechanical pump 12 is connected with the aspirating hole of vacuum tank 11.
3, the translation stage of Y-axis is fixed on reference platform 3 by base screw, and guide rail direction is defined as Y-direction;
4, the translation stage of X-axis is fixed on the translation stage of Y-axis by base screw, and the translation stage guide rail direction of X-axis is defined as X-direction, vertical with the guide rail direction of Y-axis;
5, the translation stage of Z axis is vertically fixed on the translation stage of X-axis by the screw of lower end, and the translation stage guide rail direction of Z axis is defined as Z-direction, vertical with the translation stage guide rail direction of X-axis.
6, be arranged with collimator and back seat outside X-ray source 2, the external diameter of back seat and the internal diameter of the collar suitable, X-ray source pipe back seat to be enclosed within the collar and to be fixed on screw on the ring flange of the bottom of vacuum tank.
Moved by the translation stage of X-axis, Y-axis, Z axis, the three-dimensional localization that can realize, can realize the particle excitated X-ray spectrometer of deep space and point at YZ plane arbitrary height.
7, the first three-axle table 4 is identical with the second three-axle table 5, can assemble in the manner described above.Test sample is fixed on the Z axis of three-axle table 1 by screw state.
8, X-ray source 2 ejecting end, test sample 7 are oppositely arranged with the receive window of the particle excitated X-ray spectrometer 6 of deep space.
During assembling two parts, the selection of corresponding screw can adjust according to the actual requirements, as long as meet above-mentioned assembling mode.
The particle excitated X-ray spectrometer of above-mentioned three-axle table, X-ray source, reference platform, deep space is all well-known components, and no longer the portion of running business into particular one describes.
Workflow of the present utility model is: be fixed on by particle excitated for deep space X-ray spectrometer on the second three-axle table 5, test sample 7 is fixed on the first three-axle table 4, X-ray source 2 is fixed on the ring flange bottom vacuum tank 11, by the X-direction of computer (not illustrating in figure) or manual adjustments first three-axle table 4, Y-direction, the X-direction of Z-direction and the second three-axle table 5, Y-direction, the position that Z-direction is relative with X-ray source 2, the detector of the particle excitated X-ray spectrometer 6 of deep space is calibrated, comprise the energy linearity to deep space X-ray spectrometer, resolution ratio, the corresponding performance of angle is demarcated, simultaneously, by changing the angle of the relatively same detector of three-axle table, can realize the different angular response of detector to X source.
Claims (5)
1. the vacuum targeting device of the particle excitated X-ray spectrometer of deep space, it is characterized in that, comprise a vacuum plant, and be positioned at described vacuum plant vacuum tank the second three-axle table and for fixing test sample the one or three axle electricity turntable, X-ray source, the particle excitated X-ray spectrometer of a deep space and a reference platform; Wherein, described first three-axle table and described second three-axle table are separately fixed on described reference platform, and described deep space particle excitated X-ray spectrometer is fixed on described second three-axle table.
2. the vacuum targeting device of the particle excitated X-ray spectrometer of deep space as claimed in claim 1, it is characterized in that, described vacuum plant comprises described vacuum tank, a part pump, a mechanical pump and a vacuum meter; Wherein, described vacuum meter is arranged on the top of described vacuum tank, and described mechanical pump is connected with the aspirating hole of described vacuum tank, and described molecular pump is connected with described mechanical pump.
3. the vacuum targeting device of the particle excitated X-ray spectrometer of deep space as claimed in claim 2, it is characterized in that, described X-ray source is arranged on one end relative with described aspirating hole in described vacuum tank by a ring flange; Described reference platform is parallel to the ground, and the light direction of described X-ray source is parallel to the ground.
4. the vacuum targeting device of the particle excitated X-ray spectrometer of deep space as claimed in claim 3, it is characterized in that, straight tube is surely arranged with outside described X-ray source, external diameter and a collar internal diameter of described collimator are suitable, and the collimator of described X-ray source to be enclosed within this collar and to be fixed on described ring flange.
5. the vacuum targeting device of the particle excitated X-ray spectrometer of deep space as claimed in claim 3, it is characterized in that, straight tube is surely arranged with outside described X-ray source, described collimator is connected with a back seat, external diameter and a collar internal diameter of described back seat are suitable, and described back seat to be enclosed within this collar and to be fixed on described ring flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420786145.4U CN204302500U (en) | 2014-12-11 | 2014-12-11 | The vacuum targeting device of the particle excitated X-ray spectrometer of a kind of deep space |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420786145.4U CN204302500U (en) | 2014-12-11 | 2014-12-11 | The vacuum targeting device of the particle excitated X-ray spectrometer of a kind of deep space |
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| CN204302500U true CN204302500U (en) | 2015-04-29 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106646585A (en) * | 2017-01-24 | 2017-05-10 | 中国工程物理研究院激光聚变研究中心 | Quasi-monoenergetic X-ray calibration platform |
| CN110286405A (en) * | 2019-07-10 | 2019-09-27 | 中国科学院近代物理研究所 | A kind of caliberating device of deep space probe system and application |
| CN113093265A (en) * | 2021-04-27 | 2021-07-09 | 中国人民解放军63921部队 | Method for calibrating field angle of electronic detector |
| CN113156489B (en) * | 2021-04-27 | 2024-03-22 | 中国人民解放军63921部队 | Energy spectrum calibration method of electronic detector |
-
2014
- 2014-12-11 CN CN201420786145.4U patent/CN204302500U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106646585A (en) * | 2017-01-24 | 2017-05-10 | 中国工程物理研究院激光聚变研究中心 | Quasi-monoenergetic X-ray calibration platform |
| CN106646585B (en) * | 2017-01-24 | 2023-12-22 | 中国工程物理研究院激光聚变研究中心 | Quasi-monoenergetic X-ray calibration platform |
| CN110286405A (en) * | 2019-07-10 | 2019-09-27 | 中国科学院近代物理研究所 | A kind of caliberating device of deep space probe system and application |
| CN110286405B (en) * | 2019-07-10 | 2020-09-15 | 中国科学院近代物理研究所 | Application of calibration device of deep space detector system |
| CN113093265A (en) * | 2021-04-27 | 2021-07-09 | 中国人民解放军63921部队 | Method for calibrating field angle of electronic detector |
| CN113093265B (en) * | 2021-04-27 | 2022-12-06 | 中国人民解放军63921部队 | Method for calibrating field angle of electronic detector |
| CN113156489B (en) * | 2021-04-27 | 2024-03-22 | 中国人民解放军63921部队 | Energy spectrum calibration method of electronic detector |
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