CN103543612B - A kind of moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree maglev motion platform - Google Patents
A kind of moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree maglev motion platform Download PDFInfo
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Abstract
Moving-iron type with vacuum (-tight) housing, without a cable six-freedom-degree maglev motion platform, is mainly used in semiconductor lithography equipment.This magnetic transportation by driving moving platform contains pedestal, stator, mover, slide holder and measuring system; Between mover and slide holder, be provided with three-axis gyroscope, three axis accelerometer, power module and wireless signal output module, and they be integrated on one piece of wiring board; Mover and stator are arranged in a vacuum chamber respectively.The present invention adopts plane grating chi measuring system to realize high-acruracy survey, and use wireless charging technology and wireless signal transmission techniques, realize magnetic transportation by driving moving platform without cable designs, make the motion parts of magnetic transportation by driving moving platform can realize rotating freely of wide-angle in surface level, substantially increase the antijamming capability of worktable and the control bandwidth of control system; Simultaneously when extreme ultraviolet photolithographic, the impact that some gases avoiding the release of some casting glues produce photoetching.
Description
Technical field
The present invention relates to a kind of magnetic and float worktable, particularly relate to a kind of six-freedom-degree magnetic suspension worktable, be mainly used in semiconductor lithography equipment, belong to Ultra-precision Turning and checkout equipment technical field.
Background technology
The micro displacement workbench with high precision and response fast has extremely important status in Modern Manufacturing Technology, is regarded as the important symbol of a national high technology development level.In ultra-precision machine tool, ultra-precise micro displacement workbench is used for carrying out error compensation to feed system, realizes Ultra-precision Turning; In large scale integrated circuit manufactures, ultra-precise micro displacement workbench is used for carrying out microposition and Fine Feed in lithographic equipment; In scanning probe microscopy, ultra-precise micro displacement workbench, for measuring sample surface morphology, carries out nanoprocessing; In bioengineering, ultra-precise micro displacement workbench, for completing the operation to cell, realizes biological operation through engineering approaches; In medical science, ultra-precise micro displacement workbench is used for microsurgery, to alleviate doctor's burden, shortens operating time, improves success ratio.Ultra-precise micro displacement workbench is also widely used in fiber alignment, the processing of MEMS system, encapsulation and assembling, and in the field such as electrical-chemistry method.
In semiconductor lithography equipment, litho machine manufactures integrated circuit specially.According to the International Technology Roadmap for Semiconductors of version in 2005,2007 by the integrated circuit of the photoetching technique production live width 65nm with 193nm, 2010 by the integrated circuit of production live width 45nm, the integrated circuit of production live width 32nm in 2013.The resolution of litho machine is expressed from the next:
By the numerical aperture NA of lithographic projection system and technological parameter k1 being extended to its practical limit and increasing immersion system, the etching system that use wavelength is 193nm excimer light source can produce the integrated circuit of 65nm live width, and people also wish can continue to use 193nm immersion system to produce the integrated circuit of 45nm live width.Adopt the technology of existing 193nm, in no case can produce the integrated circuit of 32nm live width, new developing direction must be sought, adopt the extreme ultraviolet photolithographic of 13.5nm light can realize more high-resolution leap.
Summarize domestic and international nanoscale micro displacement workbench present Research at present, in order to meet the requirement of extreme ultraviolet photolithographic equipment high precision, high speed, heavy load, high dynamic perfromance.Adopt the silicon wafer stage technology of levitation planar motor just can meet the requirement of lithographic equipment, but when there is extreme ultraviolet photolithographic, some casting glues of levitation planar motor can discharge some gases, certain impact can be produced to photoetching, and planar motor has the deficiencies such as the cable disturbed motion of a large amount of power supplys and sensor, its performance is subject to certain limitation.
Summary of the invention
The present invention aims to provide a kind of moving-iron type with vacuum (-tight) housing without cable six-freedom-degree maglev motion platform, it is made to be applicable to extreme ultraviolet (EUV) photo-etching machine silicon chip platform worktable, also can be used in Ultra-precision Turning and detection to realize six-freedom motion, and there is mover without cable, superpower antijamming capability, the features such as high control bandwidth.
Technical scheme of the present invention is as follows:
Moving-iron type with vacuum (-tight) housing is without a cable six-freedom-degree maglev motion platform, and this magnetic transportation by driving moving platform contains pedestal, stator, mover, slide holder and measuring system, and described mover is made up of halbach permanent magnet array and magnet steel backboard; Described stator is by the coil array organizing coil unit arrangement more; Described measuring system comprises plane grating chi measuring system and current vortex sensor; It is characterized in that: between described mover and slide holder, be also provided with a three-axis gyroscope, three axis accelerometer, power module and a wireless signal output module; Described three-axis gyroscope, three axis accelerometer, power module and wireless signal output module are integrated on one piece of wiring board; Described three-axis gyroscope measures the angle that mover rotates around X-axis, Y-axis and Z axis respectively; The linear acceleration of mover along X-axis, Y-axis and Z axis measured respectively by described three axis accelerometer; Described stator is provided with a reception of wireless signals module, and described three-axis gyroscope and the measuring-signal of three axis accelerometer carry out radio communication by described wireless signal output module and the reception of wireless signals module be arranged on stator; Described current vortex sensor becomes in the gap between each coil unit of arranged in arrays on stator, and the gauge head of current vortex sensor is placed straight up; The position at an angle of stator is provided with three laser triangulation sensors, wherein be provided with two laser triangulation sensors in X direction, be provided with a laser triangulation sensor along Y-direction, three laser triangulation sensors are the demarcation that described three-axis gyroscope and three axis accelerometer do six degree of freedom together with described current vortex sensor;
Described magnetic transportation by driving moving platform is also containing a mover vacuum chamber and a stator vacuum chamber, and described mover, slide holder, three-axis gyroscope, three axis accelerometer, power module, wireless signal output module and plane grating measuring system are placed in mover vacuum chamber; Described stator, current vortex sensor, laser triangulation sensor and pedestal are placed in stator vacuum chamber, described mover vacuum chamber and described stator vacuum chamber independently of one another, are connected with two vacuum pumps being positioned at vacuum chamber outside respectively by gas piping.
Another technology of the present invention is characterized in that: described plane grating chi measuring system comprises four pieces of plane grating chis and some grating reading heads, and these four pieces of plane grating chis are separately positioned on the upper surface of slide holder, and is close to slide holder four sides; Described some grating reading heads are separately positioned on along the orthogonal center line direction of two in stator upper surface directly over plane grating chi, and and keep gap between plane grating chi.
Power module of the present invention adopts can the power module of wireless charging, rechargeable battery, power receiver and Wireless charging coil can be contained by wireless charging power module, described power receiver is arranged in the circuit board, and described Wireless charging coil is then the position at any one angle be arranged on stator.
Coil array of the present invention forms with Y-direction arrangement by organizing coil unit in X direction, often organizes coil unit and at least comprises three square coils, two adjacent groups coil unit perpendicular array.Described coil unit adopts the coil groups of the orthogonal coiling of lamination, or adopt individual layer rectangular coil lamination perpendicular array and the coil groups of horizontal positioned from the bottom to top, or adopt the coil groups of rectangular coil horizontal positioned, or the coil groups adopting rectangular coil vertically to place, or adopt the coil groups of lamination orthogonal printing PCB circuit; The coil quantity of described each coil unit is the multiple of 3, and each coil is made up of electrified wire and coil rack.
Permanent magnet array in mover of the present invention is made up of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are bonded and fixed on the surface of magnet steel backboard with Halbach two-dimensional array form, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, form closed magnetic path.
The present invention has the following advantages and the technique effect of high-lighting: the motion parts of this magnetic transportation by driving moving platform and fixed part are arranged among a vacuum (-tight) housing respectively, avoid when extreme ultraviolet photolithographic, the impact that some gases that some casting glues of levitation planar motor discharge produce photoetching.In addition, compared with prior art, this magnetic transportation by driving moving platform also adopts plane grating chi measuring system to realize high-acruracy survey, three-axis gyroscope is adopted to measure the angle of mover, the linear displacement of mover is measured with three axis accelerometer, and be that three-axis gyroscope and three axis accelerometer carry out real-time Zero positioning to prevent drift with laser triangulation sensor and current vortex sensor, and used wireless charging technology and wireless signal transmission techniques, realize magnetic transportation by driving moving platform without cable designs, make the motion parts of magnetic transportation by driving moving platform can realize rotating freely of wide-angle in surface level, substantially increase the antijamming capability of worktable, improve the control bandwidth of control system simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of moving-iron type with vacuum (-tight) housing provided by the invention without cable six-freedom-degree maglev motion platform.
Fig. 2 indicates the three-dimensional detonation configuration figure removing mover vacuum chamber and stator vacuum chamber.
Fig. 3 indicates three-axis gyroscope, three axis accelerometer, power module and wiring board scheme of installation.
Fig. 4 is the Zero calibration process flow diagram of six-freedom-degree maglev motion platform of the present invention.
Fig. 5 a, Fig. 5 b, Fig. 5 c, Fig. 5 d and Fig. 5 e indicate several different version that coil unit of the present invention adopts.
Fig. 6 a, 6b are two kinds of permanent magnet array structural drawing in mover of the present invention.
In figure: 1-pedestal; 2-slide holder; 4-magnet steel backboard; 5-three-axis gyroscope; 6-three axis accelerometer; 7-power module; 8-wiring board; 9-coil unit; 10-coil rack; 11-current vortex sensor; 12-plane grating chi measuring system; 13-halbach permanent magnet array; 14-coil array; 15-laser triangulation sensor; The main permanent magnet of 16-first; The main permanent magnet of 17-second; The attached permanent magnet of 18-; 19-wireless signal output module; 20-reception of wireless signals module; 21-Wireless charging coil; 22-mover vacuum chamber; 23-stator vacuum chamber; 24-power receiver; 31-plane grating chi; 32-plane grating read head.
Embodiment
Fig. 1 is the structural representation of a kind of moving-iron type with vacuum (-tight) housing provided by the invention without cable six-freedom-degree maglev motion platform, and Fig. 2 is the three-dimensional detonation configuration figure removing mover vacuum chamber and stator vacuum chamber; This magnetic transportation by driving moving platform contains pedestal 1, stator, mover, slide holder 2 and measuring system, and described mover contains halbach permanent magnet array 13 and magnet steel backboard 4; Described stator is by the coil array 14 organizing coil unit 9 arrangement more; Described measuring system comprises plane grating chi measuring system 12, current vortex sensor 11 and laser triangulation sensor 15; A three-axis gyroscope 5, three axis accelerometer 6, power module 7 and a wireless signal output module 19 is also provided with between described mover and slide holder 2; Described three-axis gyroscope 5, three axis accelerometer 6, power module 7 and wireless signal output module 19 are integrated on one piece of wiring board 8, and described three-axis gyroscope 5 can measure the angle that mover rotates around X-axis, Y-axis and Z axis respectively; Described three axis accelerometer 6 can measure the linear acceleration of mover along X-axis, Y-axis and Z axis respectively.Described stator is provided with a reception of wireless signals module 20, and described three-axis gyroscope 5 and the measuring-signal of three axis accelerometer 6 carry out radio communication by described wireless signal output module 19 with the reception of wireless signals module 20 be arranged on stator.In gap between each coil unit 9 of described current vortex sensor 11 one-tenth arranged in arrays on stator, and the gauge head of current vortex sensor 11 is placed straight up; The position at any one angle of stator is provided with three laser triangulation sensors 15, wherein be provided with two laser triangulation sensors 15 in X direction, a laser triangulation sensor 15 is provided with along Y-direction, three laser triangulation sensors and described current vortex sensor 11 with the use of, for three-axis gyroscope 5, three axis accelerometer 6 do the location position of space six degree of freedom, as shown in Figure 2.
Described power module 7 adopts can wireless charging power module, can contain rechargeable battery, power receiver 24 and Wireless charging coil 21 by wireless charging power module, described Wireless charging coil 21 is arranged in of magnetic transportation by driving moving platform stator coil array 14 and determines position.Power module 7 also installs one piece of power receiver 24, and this power receiver 24 can be battery and carries out wireless charging; When battery electric power is inadequate, subpart can be moved to above Wireless charging coil 21 in the inoperative period, to the logical upper high-frequency current of Wireless charging coil 21, just can make the inductive coil generation current in power receiver 24, thus charge the battery, as shown in Figure 3.
Described magnetic transportation by driving moving platform is also containing a mover vacuum chamber 22 and a stator vacuum chamber 23, and described mover, slide holder 2, three-axis gyroscope 5, three axis accelerometer 6, power module 7, wireless signal output module 19 and plane grating measuring system 12 are placed in mover vacuum chamber 22; Described stator, current vortex sensor 11, laser triangulation sensor 15 and pedestal 1 are placed in stator vacuum chamber 23, independently of one another, the vacuum pump being positioned at vacuum chamber outside by two respectively vacuumizes for described mover vacuum chamber 22 and described stator vacuum chamber 23.
Described plane grating chi measuring system 12 comprises four pieces of plane grating chis 31 and some grating reading heads 32, and these four pieces of plane grating chis 31 are separately positioned on the upper surface of slide holder 2, and is close to slide holder 2 four sides; Described some grating reading heads 32 are separately positioned on along on the orthogonal center line direction of two in described stator upper surface directly over plane grating chi 31, and and keep gap between plane grating chi 31.The subpart of this magnetic transportation by driving moving platform can the motion of implementation space six degree of freedom, without cable interference, can rotate freely in surface level around 360 °.
Fig. 5 represents the structural drawing of five kinds of coil winding modes of magnetic transportation by driving moving platform.The coil manufacture of described coil unit adopts five kinds of forms: the first coil unit adopts the coil groups of the orthogonal coiling of lamination, as shown in Fig. 5 (a); Or adopt individual layer rectangular coil lamination perpendicular array and the coil groups of horizontal positioned from the bottom to top, as shown in Fig. 5 (b); Or adopt the coil groups of rectangular coil horizontal positioned, as shown in Fig. 5 (c); Or the coil groups adopting rectangular coil vertically to place, as shown in Fig. 5 (d); Or adopt the coil groups of lamination orthogonal printing PCB circuit, as shown in Fig. 5 (e).The coil quantity of each coil unit is the multiple of 3, and each coil is made up of electrified wire and coil rack 10.
Fig. 6 represents two kinds of permanent magnet array structural drawing of magnetic transportation by driving moving platform.The permanent magnet array of magnetic transportation by driving moving cell is made up of main permanent magnet and attached permanent magnet 18, main permanent magnet (the main permanent magnet 17 of the first main permanent magnet 16, second) and attached permanent magnet 18 are bonded and fixed on the surface of magnet steel backboard 4 with Halbach one-dimensional array form or two-dimensional planar array form, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, form closed magnetic path.
The course of work of the present invention is as follows:
Magnetic direction, the hot-wire coil direction of current of the permanent magnet generation of this magnetic transportation by driving moving platform, and both the Lorentz force directions produced are mutually vertical.Often organize coil unit and simultaneously in permanent magnet array institute planar orthogonal both direction, and vertical permanent magnet array place this three degree of freedom of in-plane can provide thrust.
In the present embodiment, as shown in Figure 4, first, this magnetic transportation by driving moving platform stator coil powers on, and the most of sensors due to measuring system are all the measurements of increment type, now need advanced line sensor to demarcate.At three laser triangulation sensors 15 that a jiao of magnetic transportation by driving moving platform stator is arranged, and the current vortex sensor 11 be positioned on coil array 14 is just intended for, and zero-bit carries out demarcating.Wherein be provided with two laser triangulation sensors 15 in X direction, the position in X direction that magnetic transportation by driving moving platform mover can be measured respectively and the angle of inclination of rotating around Z-direction; Be provided with a laser triangulation sensor 15 along Y-direction, measure the position of magnetic transportation by driving moving platform mover along Y-direction; Be positioned at current vortex sensor 11 array on coil array 14, then can measure the position of magnetic transportation by driving moving platform mover along Y-direction, and around X-direction and the angle of inclination around Y direction rotation.After completing above process, can determine that magnetic transportation by driving moving platform mover is positioned at the position of magnetic transportation by driving moving platform stator, simultaneously, also determine the initial position being arranged on three-axis gyroscope 5 on magnetic transportation by driving moving platform mover and three axis accelerometer 6, because three-axis gyroscope 5 a period of time that works will drift about, so need constantly to repeat above Zero positioning process.
After completing the initial position demarcation of three-axis gyroscope 5 and three axis accelerometer 6, need the adjustment carrying out laser interferometer measurement system 12.First, the position signalling of three-axis gyroscope 5 and three axis accelerometer 6 is constantly notified control system by wireless signal output module 19 and reception of wireless signals module 20, the measuring-signal of transmission of wireless signals can adopt WIFI, bluetooth or the mode such as infrared, the pose of magnetic transportation by driving moving platform mover in magnetic field is constantly adjusted by control system, then plane grating chi is adjusted, can normal light echo work in allowed band, so far the adjustment of plane grating chi measuring system 12 is completed, under magnetic transportation by driving moving platform normal operating conditions, all need plane grating chi measuring system 12 to carry out high precision position measurement.
The power supply mode of three-axis gyroscope 5 and three axis accelerometer 6 adopts installs power module 7 on wiring board 8, power module 7 also installs one piece of power receiver 24, this power receiver 24 can be battery and carries out wireless charging, when battery electric power is inadequate, subpart can be moved to of being arranged in large-scale coils array components 14 in the inoperative period determines above the Wireless charging coil 21 of position, to the logical upper high-frequency current of Wireless charging coil 21, just can make the inductive coil generation current in power receiver 24, thus charge the battery.
The present invention compared with prior art, adopts Radio Transmission Technology, wireless power technology and without cable designs, mover can be rotated freely around 360 ° in surface level, substantially increase the antijamming capability of worktable, improve the control bandwidth of control system simultaneously.
Claims (6)
1. the moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree maglev motion platform, this magnetic transportation by driving moving platform contains pedestal (1), stator, mover, slide holder (2) and measuring system, and described mover is made up of halbach permanent magnet array (13) and magnet steel backboard (4); Described stator is by the coil array (14) organizing coil unit (9) arrangement more; Described measuring system comprises plane grating chi measuring system (12) and current vortex sensor (11); It is characterized in that: between described mover and slide holder (2), be also provided with a three-axis gyroscope (5), three axis accelerometer (6), power module (7) and a wireless signal output module (19); Described three-axis gyroscope (5), three axis accelerometer (6), power module (7) and wireless signal output module (19) are integrated on one piece of wiring board (8); Described three-axis gyroscope (5) measures the angle that mover rotates around X-axis, Y-axis and Z axis respectively; The linear acceleration of mover along X-axis, Y-axis and Z axis measured respectively by described three axis accelerometer (6); Described stator is provided with a reception of wireless signals module (20), and described three-axis gyroscope (5) and the measuring-signal of three axis accelerometer (6) carry out radio communication by described wireless signal output module (19) and the reception of wireless signals module (20) be arranged on stator; Described current vortex sensor (11) becomes in the gap between each coil unit (9) of arranged in arrays on stator, and the gauge head of current vortex sensor (11) is placed straight up; The position at an angle of stator is provided with three laser triangulation sensors (15), wherein be provided with two laser triangulation sensors (15) in X direction, be provided with a laser triangulation sensor (15) along Y-direction, three laser triangulation sensors (15) are the demarcation that described three-axis gyroscope (5) and three axis accelerometer (6) do six degree of freedom together with described current vortex sensor (11);
Described magnetic transportation by driving moving platform is also containing a mover vacuum chamber (22) and a stator vacuum chamber (23), and described mover, slide holder (2), three-axis gyroscope (5), three axis accelerometer (6), power module (7), wireless signal output module (19) and plane grating measuring system (12) are placed in mover vacuum chamber (22); Described stator, current vortex sensor (11), laser triangulation sensor (15) and pedestal (1) are placed in stator vacuum chamber (23), described mover vacuum chamber (22) and described stator vacuum chamber (23) independently of one another, are connected with two vacuum pumps being positioned at vacuum chamber outside respectively by gas piping.
2. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree maglev motion platform, it is characterized in that: described plane grating chi measuring system (12) comprises four pieces of plane grating chis (31) and some grating reading heads (32), these four pieces of plane grating chis (31) are separately positioned on the upper surface of slide holder (2), and are close to slide holder (2) four sides; Described some grating reading heads (32) are separately positioned on along on the orthogonal center line direction of two in described stator upper surface directly over plane grating chi (31), and and keep gap between plane grating chi (31).
3. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree maglev motion platform, it is characterized in that: described power module (7) adopts can the power module of wireless charging, rechargeable battery, power receiver (24) and Wireless charging coil (21) can be contained by wireless charging power module, described power receiver (24) is arranged on wiring board (8), and described Wireless charging coil (21) is then the position at any one angle be arranged on stator.
4. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree maglev motion platform, it is characterized in that: described coil array (14) forms with Y-direction arrangement by organizing coil unit in X direction, often organize coil unit and at least comprise three square coils, two adjacent groups coil unit perpendicular array.
5. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree maglev motion platform, it is characterized in that: described coil unit adopts the coil groups (5a) of the orthogonal coiling of lamination, or adopt individual layer rectangular coil lamination perpendicular array and the coil groups of horizontal positioned (5b) from the bottom to top, or adopt the coil groups (5c) of rectangular coil horizontal positioned, or the coil groups (5d) adopting rectangular coil vertically to place, or adopt the coil groups (5e) of lamination orthogonal printing PCB circuit; The coil quantity of described each coil unit is the multiple of 3, and each coil is made up of electrified wire and coil rack (10).
6. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree maglev motion platform, it is characterized in that: the permanent magnet array in described mover is made up of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are bonded and fixed on the surface of magnet steel backboard with Halbach two-dimensional array form, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, form closed magnetic path.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105045042B (en) | 2015-04-23 | 2017-06-16 | 清华大学 | A kind of silicon wafer stage exposure area six-degree of freedom displacement measuring method |
| US20170179773A1 (en) * | 2015-12-17 | 2017-06-22 | Samsung Electro-Mechanics Co., Ltd. | Coil for wireless communications, coil module and mobile terminal using the same |
| CN105487343A (en) * | 2016-01-14 | 2016-04-13 | 哈尔滨工业大学 | Plane-grating-measurement-based dynamic-magnetic-steel magnetic levitation dual-stage vector arc switching method and device |
| CN110067810B (en) * | 2019-05-15 | 2024-04-16 | 傲基科技股份有限公司 | Suspension control method, controller, support apparatus, and readable storage medium |
| CN112821721A (en) * | 2021-02-01 | 2021-05-18 | 深圳市星环磁控技术有限公司 | Moving-magnet type planar motor |
| CN118074435B (en) * | 2024-04-18 | 2024-08-20 | 佛山市增广智能科技有限公司 | Mover pose detection device and method for planar motor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1484850A (en) * | 2001-08-08 | 2004-03-24 | 尼康株式会社 | Stage system exposure device and method of manufacturing device |
| CN1260772C (en) * | 1999-10-07 | 2006-06-21 | 株式会社尼康 | Substrate, stage device, method of driving stage, exposure system and exposure method |
| CN101551598B (en) * | 2009-04-03 | 2010-12-01 | 清华大学 | Double-stage switching system of photoetching machine wafer stage |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009266883A (en) * | 2008-04-22 | 2009-11-12 | Nikon Corp | Stage apparatus, aligner, and method for manufacturing device |
| JP2011119320A (en) * | 2009-12-01 | 2011-06-16 | Yaskawa Electric Corp | thetaZ DRIVE DEVICE AND STAGE DEVICE WITH THE SAME, AND INSPECTION DEVICE |
-
2013
- 2013-09-25 CN CN201310447559.4A patent/CN103543612B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1260772C (en) * | 1999-10-07 | 2006-06-21 | 株式会社尼康 | Substrate, stage device, method of driving stage, exposure system and exposure method |
| CN1484850A (en) * | 2001-08-08 | 2004-03-24 | 尼康株式会社 | Stage system exposure device and method of manufacturing device |
| CN101551598B (en) * | 2009-04-03 | 2010-12-01 | 清华大学 | Double-stage switching system of photoetching machine wafer stage |
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