CN111421523A

CN111421523A - Micro-motion platform

Info

Publication number: CN111421523A
Application number: CN202010258478.XA
Authority: CN
Inventors: 赵景山; 魏松涛; 纪俊杰; 徐胜金
Original assignee: Tsinghua University
Current assignee: Tsinghua University
Priority date: 2020-04-03
Filing date: 2020-04-03
Publication date: 2020-07-17

Abstract

The invention relates to the field of mechanical positioning devices, in particular to a micro-motion platform which comprises a rotating platform, a plurality of hinge mechanisms arranged at the lower part of the rotating platform, a high-precision linear motor fixed with the other end of each hinge mechanism, a spherical hinge fixed at the center of the lower part of the rotating platform and a base fixed at the bottom of the high-precision linear motor; the spherical hinge is fixed with the base through a support rod; the hinge mechanism can enable the rotating platform to rotate freely relative to the high-precision linear motor. The invention provides the micro-motion platform which is high in precision, simple in principle and simple and convenient to operate.

Description

Micro-motion platform

Technical Field

The invention relates to the field of mechanical positioning devices, in particular to a micro-motion platform.

Background

In recent years, research objects in various research fields are continuously developed towards smaller scale, and a micro-motion platform composed of a compliant mechanism and an intelligent driver is widely applied to the fields of micro-operation and micro-assembly. In general, a micro-motion platform is used for micro-nano-scale positioning control and multi-dimensional orientation adjustment.

There is a need in many fields to achieve finer motions by micro-motion platforms that are difficult to achieve with general mechanical platforms. Such as high precision measurements, precision instrument machining, lithography machines, and the like. The realization of micron-scale precise motion plays a great role in promoting the development and application of high-precision micro-nano parts in the field of high-precision manufacturing.

Currently, there are a variety of different drive types for micro motion platforms. Such as voice coil motor type, piezo type, and electromagnetic type, etc. However, all of these types of micro-motion platforms have complex structures, and the electronic circuit part has high requirements on precision, so that the micro-motion platforms are not suitable for practical application. Meanwhile, due to the principle limitation, the rotation angles of the micro-motion platforms are small, and the rotation with a slightly large angle cannot be realized.

Disclosure of Invention

The invention aims to provide a micro-motion platform, which aims to solve the problems and is high in precision, simple in principle and simple and convenient to operate.

In order to achieve the purpose, the invention provides the following scheme:

a micro-motion platform comprises a rotating platform, more than two hinge mechanisms arranged at the lower part of the rotating platform, a high-precision linear motor fixed with the other end of each hinge mechanism, a spherical hinge fixed at the center of the lower end of the rotating platform and a base fixed at the bottom of the high-precision linear motor;

the spherical hinge is fixed with the base through a support rod; the hinge mechanism can enable the rotating platform to rotate freely relative to the high-precision linear motor.

Preferably, the hinge mechanism is a flexible hinge, and the flexible hinge is in a double-cone shape.

Preferably, the flexible hinge is a spring steel cable or a flexible polymer material.

Preferably, the rotating platform is connected with the hinge mechanism through screws, and the rotating platform is connected with the spherical hinge through screws.

Preferably, the base is connected with the high-precision linear motor through a screw, and the base is connected with the supporting rod through a screw.

Preferably, the number of the hinge mechanisms is four, and the hinge mechanisms and the stress centers of the high-precision linear motors are on the same central axis.

The invention has the following technical effects:

through adopting a plurality of high accuracy linear electric motor, flexible hinge, can change a plurality of linear electric motor's the motion into the rotary motion of rotating platform. The rotary platform can be limited in displacement through the spherical hinge, so that the rotary platform can only perform rotary motion, and the motion precision of the micro-motion platform is further improved. Compared with other micro-motion platforms, the micro-motion platform provided by the invention has the same rotation precision and a larger rotation angle. The whole technical scheme not only innovates the existing micro-motion platform in the market, increases the variety of the micro-motion platform, and provides technical support for further improving the precision production and research of industrial products.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.

FIG. 1 is a schematic view of the structure of the present invention.

Wherein, 1 is the rotating platform, 2 is flexible hinge, and 201 is two spherical hinges, and 3 is high accuracy linear electric motor, and 4 are the base, and 5 are spherical hinges, and 6 are the bracing piece.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Referring to fig. 1, the invention provides a micro-motion platform, which comprises a rotating platform 1, more than two hinge mechanisms arranged at the lower part of the rotating platform 1, a high-precision linear motor 3 fixed with the other end of each hinge mechanism, a spherical hinge 5 fixed at the center of the bottom of the rotating platform 1 and a base 4 fixed at the bottom of the high-precision linear motor 3;

the spherical hinge 5 is fixed with the base 4 through a support rod 6; the hinge mechanism can enable the rotating platform 1 to freely rotate relative to the high-precision linear motor 3, and under the action of the cooperative motion of the high-precision linear motor 3, the rotating platform 1 rotates around the spherical center of the spherical hinge 5. When the motion precision of the high-precision linear motor 3 is high, the rotation precision of the micro-motion platform 1 is also high. The hinge mechanism of the invention has simple connection mode with the rotating platform 1, makes up the defects of large volume and large manufacturing difficulty of the prior micro-motion platform, and improves the rotation angle of the prior micro-motion platform.

In a further optimized scheme, the hinge mechanism is a flexible hinge 2, and the flexible hinge is in a double-cone shape.

In a further optimized scheme, the flexible hinge 2 is a spring steel cable or a flexible high polymer material.

According to the further optimization scheme, the rotating platform 1 is connected with the hinge mechanism through screws, and the rotating platform 1 is connected with the spherical hinge 5 through screws.

Further optimize the scheme, base 4 passes through the screw connection with high accuracy linear electric motor 3, and base 4 passes through the screw connection with bracing piece 6.

According to the further optimized scheme, the number of the hinge mechanisms is four, and the hinge mechanisms and the stress center of the high-precision linear motor 3 are on the same central axis.

The working process of the embodiment is as follows:

when two adjacent high accuracy linear electric motor 3 upwards drive, two other high accuracy linear electric motor 3 drives downwards, high accuracy linear electric motor 3 promotes the hinge, the hinge promotes rotating platform 1, rotating platform 1 realizes an axial rotation, two adjacent high accuracy motors 1 clockwise or anticlockwise trade a motor position and drive, rotating platform 1 can produce another axial rotation, when rotating platform 1 produced the displacement in the direction of difference, the platform had also wholly taken place to rotate, the slope.

When the rotating platform 1 rotates and tilts, each hinge not only bends and deforms, but also compresses, stretches and dislocates correspondingly.

In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience of description of the present invention, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.

The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solutions of the present invention can be made by those skilled in the art without departing from the spirit of the present invention, and the technical solutions of the present invention are within the scope of the present invention defined by the claims.

Claims

1. A micro motion platform, comprising: the device comprises a rotating platform (1), more than two hinge mechanisms arranged at the lower part of the rotating platform (1), a high-precision linear motor (3) fixed with the other end of each hinge mechanism, a spherical hinge (5) fixed at the center of the lower end of the rotating platform (1) and a base (4) fixed at the bottom of the high-precision linear motor (3);

the spherical hinge (5) is fixed with the base (4) through a support rod (6).

2. A micropositioning platform according to claim 1, wherein: the hinge mechanism is a flexible hinge (2), and the flexible hinge is in a double-cone shape.

3. A micropositioning platform according to claim 2, wherein: the flexible hinge (2) is a spring steel cable or a flexible high polymer material.

4. A micropositioning platform according to claim 1, wherein: the rotary platform (1) is connected with the hinge mechanism through screws, and the rotary platform (1) is connected with the spherical hinge (5) through screws.

5. A micropositioning platform according to claim 1, wherein: the base (4) is connected with the high-precision linear motor (3) through screws, and the base (4) is connected with the supporting rod (6) through screws.

6. A micropositioning platform according to claim 1, wherein: the number of the hinge mechanisms is four, and the hinge mechanisms and the stress centers of the high-precision linear motors (3) are on the same central axis.