CN219733933U

CN219733933U - Multifunctional flexible hinge

Info

Publication number: CN219733933U
Application number: CN202320066888.3U
Authority: CN
Inventors: 娄飞
Original assignee: Shenzhen Diaotou Technology Co ltd
Current assignee: Shenzhen Diaotou Technology Co ltd
Priority date: 2023-01-10
Filing date: 2023-01-10
Publication date: 2023-09-22
Anticipated expiration: 2033-01-10

Abstract

The utility model discloses a multifunctional flexible hinge, which comprises a bearing plate, wherein the middle part of the lower bottom surface of the bearing plate is provided with a shaft hole which is matched with an external supporting shaft; the flexible amplifying hinges are circumferentially and uniformly distributed around the bearing plate and are symmetrically arranged in pairs and used for driving the bearing plate to move along X, Y or Rz three degrees of freedom; a limiting part which is convenient to be matched with the positioning piece is arranged on one side wall of the plurality of flexible amplifying hinges, which is far away from the bearing plate; when the shaft hole is matched with the external support shaft, the bearing plate rotates around Rz under the action of a plurality of flexible amplifying hinges; when the limiting part and the positioning piece are matched, the bearing plate moves along the X, Y direction under the action of a plurality of flexible amplifying hinges. The utility model aims to develop a multifunctional flexible hinge capable of meeting the motion of X, Y two degrees of freedom and the rotation of Rz degrees of freedom.

Description

Multifunctional flexible hinge

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a multifunctional flexible hinge.

Background

The prior art has the advantages that the prior art is mainly formed by assembling rigid parts, such as a displacement platform for realizing X, Y-axis two-degree-of-freedom motion, and the displacement platform designed in the mode is mostly designed by adopting a mode of matching screw rod sliding blocks.

The flexible hinge is used as a device for realizing high-precision relative movement through elastic bending deformation of the material, and has the advantages of no friction loss, no lubrication, no hysteresis, no maintenance, compact structure, easy manufacture and the like. However, the displacement platform based on the flexible hinge for semiconductor production in the prior art is subject to decoupling requirements among the degrees of freedom, has single functions, and is difficult to simultaneously meet the use of various application scenes.

Accordingly, those skilled in the art have focused their efforts on developing a multi-functional flexible hinge that can accommodate both two degrees of freedom motion in X, Y and rotation in the Rz degree of freedom.

Disclosure of Invention

In view of the above-mentioned drawbacks of the prior art, the present utility model discloses a multifunctional flexible hinge, and the technical problem to be solved is to provide a multifunctional flexible hinge capable of satisfying two degrees of freedom motion X, Y and rotation Rz degrees of freedom.

To achieve the above object, the present utility model provides a multifunctional flexible hinge comprising

The bearing plate is provided with a shaft hole in the middle of the lower bottom surface of the bearing plate, and the shaft hole is matched with the external supporting shaft;

the flexible amplifying hinges are circumferentially and uniformly distributed around the bearing plate and are symmetrically arranged in pairs and used for driving the bearing plate to move along X, Y or Rz three degrees of freedom; a limiting part which is convenient to match with the positioning piece is arranged on one side wall of the flexible amplifying hinges, which is far away from the bearing plate;

when the shaft hole is matched with an external supporting shaft, the bearing plate rotates around Rz under the action of a plurality of flexible amplifying hinges;

when the limiting part and the positioning part are matched, the bearing plate moves along the X, Y direction under the action of a plurality of flexible amplifying hinges.

Preferably, the flexible amplifying hinge comprises a first connecting arm and a second connecting arm which are arranged at intervals, straight round flexible hinges are symmetrically arranged at two ends of the first connecting arm and the second connecting arm respectively in an included angle mode, mounting seats are inwards extended at included angles of the straight round flexible hinges at each end, and piezoelectric actuators are arranged between the two mounting seats.

Through the structural design of flexible hinge that enlarges, both ends at first linking arm and second linking arm respectively contained angle symmetry set up straight round flexible hinge, when needs satisfy the loading board in X to, Y to two degree of freedom motion, the external force of accessible setting element will distribute in the loading board all around flexible spacing portion of hinge that enlarges, the flexible hinge of straight round is driven to produce deformation along the flexible extension of piezoelectric actuator that X was followed to setting with Y, first linking arm and second linking arm are close to each other or keep away from to this order about the loading board along X to or Y to the motion. When the piezoelectric actuator generates axial elongation based on inverse piezoelectric effect, the flexible amplifying hinges generate tangential displacement relative to the positioning shaft, and then the bearing plates are driven to rotate around the positioning shaft, so that the rotation of the Rz degree of freedom is realized.

Preferably, the first connecting arm extends to the plate edge of the bearing plate and is integrally arranged with the plate edge, and the second connecting arm is parallel to the first connecting arm. The limiting part is a limiting groove formed in the outer side of the second connecting arm, and the outer side walls of the flexible amplifying hinges distributed around the bearing plate can be fixed by clamping the peripheral locating pieces into the limiting groove.

The flexible amplifying hinges arranged in the structure are arranged at a certain included angle between the two straight round flexible hinges arranged in pairs, so that displacement generated when the piezoelectric actuator stretches out and draws back can be amplified or reduced in multiple by utilizing the straight round flexible hinges arranged in pairs at the two ends, and the bearing plate is further driven to move.

Preferably, the shape of the bearing plate is square, the four flexible amplifying hinges are arranged at the edge of the bearing plate, and each mounting seat is parallel to the plate edge of the bearing plate.

Preferably, the aperture of the shaft hole is greater than or equal to D/2 and smaller than D, wherein D is the side length of the bearing plate. The precision bearing is arranged in the shaft hole, the diameter of the precision bearing is too small to enable the bearing plate to rotate freely, the rotation is possibly unstable, and the cost is increased due to the fact that the diameter of the precision bearing is too large.

Preferably, a precision bearing is embedded in the shaft hole, and a bearing hole of the precision bearing is matched with the external supporting shaft. When the rotation of the bearing plate in the Rz degree of freedom needs to be satisfied, the precision bearing is matched with the supporting shaft below, so that the bearing plate can freely rotate without obstruction.

Preferably, the included angle θ between the straight-round flexible hinges at the two ends of the first connecting arm and the second connecting arm is 50-60 °, and the flexible hinge is enlarged or reduced to achieve a better effect through the design of the included angle.

Preferably, the straight round flexible hinges at each end of the first connecting arm and the second connecting arm are symmetrically arranged by four stretching notch type single-axis flexible hinges, and the wall thickness of the flexible notch of each stretching notch type single-axis flexible hinge at each end is respectively D1 and D2.

Preferably, the sizes of D1 and D2 are the same. When the motion of the bearing plate in the X direction and the Y direction is required to be met, in order to enable the driving force generated by the flexible amplifying hinge to act on the side wall of the bearing plate vertically, at the moment, straight round flexible hinge structures which are arranged at two ends of the flexible amplifying hinge in pairs can be arranged to be identical, straight round flexible hinges which are arranged at two ends of the flexible amplifying hinge in pairs are symmetrically arranged at two ends of the piezoelectric actuator, and two straight round flexible hinges in each pair of straight round flexible hinges are symmetrically arranged along the axial direction of the piezoelectric actuator. When the two piezoelectric actuators in the X-axis direction drive the piezoelectric actuators to work under the action of the electric control device, the piezoelectric actuators generate axial extension based on the inverse piezoelectric effect, so that the straight round flexible hinges at the two ends are driven to deform, and then the bearing plate is driven to move along the X-axis direction, otherwise, when the two piezoelectric actuators in the Y-axis direction work, the bearing plate can be driven to move along the Y-axis direction.

Preferably, the ratio D1/D2 of D1 to D2 is in the range of 0.1 to 0.9. When the rotation of the bearing plate in the Rz degree of freedom needs to be met, in order to further improve the tangential force when the flexible amplifying hinge drives the bearing plate to rotate, the straight round flexible hinge structures arranged at two ends of the flexible amplifying hinge in the scheme in pairs are not completely identical. The value of D1/D2 in this scheme is preferably 0.5 to this produces certain tangential displacement through the rigidity difference between two pairs of straight circular flexible hinges, and the drive force of piezoelectric actuator is had certain amplification effect to the flexible hinge of straight circular in addition, consequently the tangential displacement volume of increase loading board that can be better, then drives the smooth rotation certain angle of loading board around Z locating shaft.

Further, for convenient processing, reduce the error because of the assembly brings, can promote the stability when this multi-functional flexible hinge motion again simultaneously, flexible amplified hinge and loading board all adopt AL7075 material wire cut integrated into one piece, and the AL7075 material has good mechanical properties, is applicable to the preparation of flexible hinge relatively.

The beneficial effects of the utility model are as follows:

through the structural design of loading board and flexible hinge that enlarges, both can realize the rotation of Rz degree of freedom through shaft hole and outside back shaft cooperation, can satisfy X, Y orientation's displacement through spacing portion and setting element cooperation again, satisfy the use under two kinds of different operating modes then. Compared with a rigid assembly body movement mechanism, the multifunctional flexible hinge designed by the scheme of the utility model has the advantages of simple structure, multiple functions, easiness in processing, low cost and high response speed, and can meet the position adjustment of workpieces under different working conditions.

Drawings

FIG. 1 is a schematic view of the structure of the multifunctional flexible hinge of the present utility model;

FIG. 2 is a schematic view of a flexible enlarged hinge partially shown at A in FIG. 1;

FIG. 3 is an enlarged schematic view of a portion of FIG. 2;

FIG. 4 is an enlarged schematic view of a portion of FIG. 1 at A;

FIG. 5 is a schematic view of a first embodiment of the multi-function flexible hinge of the present utility model;

FIG. 6 is a schematic view in section B of FIG. 1 (schematic view of a second embodiment of a multi-function flexible hinge of the present utility model);

FIG. 7 is a finite element motion simulation of FIG. 5;

fig. 8 is a finite element motion simulation diagram of fig. 6.

In the above figures: 1. a carrying plate; 11. a shaft hole; 12. a precision bearing; 2. a flexible amplifying hinge; 21. a first connecting arm; 22. a second connecting arm; 23. a straight round flexible hinge; 231. stretching the notch type uniaxial flexible hinge; 24. a mounting base; 25. a limit part; 3. a piezoelectric actuator; 4. and a positioning piece.

Detailed Description

The present utility model will be further described with reference to the drawings and examples, and it should be noted that in the description of the present utility model, the terms "upper", "lower", "left", "right", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, only for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific manner, and thus should not be construed as limiting the present utility model. The terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

As shown in fig. 1 and 2, the present utility model provides a multifunctional flexible hinge, which includes a carrier plate 1 and a flexible amplifying hinge 2. The shape of the bearing plate 1 is square, however, the bearing plate 1 may be in other shapes such as a circle, a polygon, etc., the middle of the bottom surface of the bearing plate 1 is provided with a shaft hole 11, and the shaft hole 11 is matched with an external supporting shaft. The flexible amplifying hinges 2 are circumferentially and uniformly distributed around the bearing plate 1 and symmetrically arranged in pairs, and are used for driving the bearing plate 1 to move along X, Y or Rz three degrees of freedom. A side wall of the flexible amplifying hinges 2 away from the bearing plate 1 is provided with a limiting part 25 which is convenient to be matched with the positioning piece 4. When the shaft hole 11 is matched with an external supporting shaft, the bearing plate 1 rotates around Rz under the action of a plurality of flexible amplifying hinges 2; when the limiting part 25 and the positioning piece 4 are matched, the bearing plate 1 moves along the X, Y direction under the action of the plurality of flexible amplifying hinges 2.

In the above embodiment, through the structural design of the bearing plate 1 and the flexible amplifying hinge 2, the Rz degree of freedom rotation can be realized through the cooperation of the shaft hole 11 and the external supporting shaft, and the displacement in the X, Y direction can be satisfied through the cooperation of the limiting part 25 and the positioning piece 4, so that the use under two different working conditions is satisfied. Compared with a rigid assembly body movement mechanism, the multifunctional flexible hinge designed by the scheme of the utility model has the advantages of simple structure, multiple functions, easiness in processing, low cost and high response speed, and can meet the position adjustment of workpieces under different working conditions.

As shown in fig. 2, the flexible amplifying hinge 2 includes a first connecting arm 21 and a second connecting arm 22 that are disposed at intervals, two ends of the first connecting arm 21 and the second connecting arm 22 are respectively and symmetrically provided with a straight-round flexible hinge 23, an included angle of each straight-round flexible hinge 23 at each end is extended inward to form a mounting seat 24, each mounting seat 24 is parallel to a plate edge of the bearing plate 1, and a piezoelectric actuator 3 is mounted between the two mounting seats 24. Meanwhile, the first connecting arm 21 extends to the edge of the bearing plate 1 and is integrally arranged with the edge, the second connecting arm 22 is parallel to the first connecting arm 21, the limiting part 25 is a limiting groove formed in the outer side of the second connecting arm 22, and the outer side walls of the flexible amplifying hinges 2 distributed around the bearing plate 1 can be fixed by clamping the peripheral positioning pieces 4 into the limiting groove.

As shown in fig. 3 and 4, the included angle θ between the straight-round flexible hinges 23 at the two ends of the first connecting arm 21 and the second connecting arm 22 is 50-60 °, preferably 55 °, so that the flexible hinges can achieve better effect by enlarging or reducing displacement through the design of the included angle. In more detail, the straight round flexible hinges 23 at each end of the first connecting arm 21 and the second connecting arm 22 are symmetrically arranged by four stretching gap type uniaxial flexible hinges 231, that is, every two stretching gap type uniaxial flexible hinges 231 are connected and symmetrically arranged at two sides of the mounting seat 24, and the wall thickness of the flexible gap of the stretching gap type uniaxial flexible hinges 231 at two ends is respectively D1 and D2.

The flexible amplifying hinges 2 arranged in this structure are arranged at a certain included angle between the two straight round flexible hinges 23 arranged in pairs, so that the displacement generated when the piezoelectric actuator 3 stretches out and draws back can be amplified or reduced by times by utilizing the straight round flexible hinges 23 arranged in pairs at the two ends, and the bearing plate 1 is further driven to move.

On the other hand, the aperture of the shaft hole 11 is greater than or equal to D/2 and less than D, wherein D is the side length of the bearing plate 1. The shaft hole 11 is embedded with a precision bearing 12, and the bearing hole of the precision bearing 12 is matched with an external supporting shaft. The precise bearing 12 is installed in the shaft hole 11, the diameter of the precise bearing 12 is too small to enable the bearing plate 1 to rotate freely, the rotation is possibly unstable, and the cost is increased due to the fact that the diameter of the precise bearing 12 is too large. When it is required to satisfy the rotation of the carrier plate 1 in the Rz degree of freedom, the precision bearing 12 is engaged with the underlying support shaft so that the carrier plate 1 can freely rotate without hindrance.

In the above embodiment, through the structural design of the flexible amplifying hinge 2, the straight-round flexible hinge 23 is symmetrically arranged at two ends of the first connecting arm 21 and the second connecting arm 22 respectively at an included angle, when the requirement that the bearing plate 1 moves in two degrees of freedom in the X direction and the Y direction is met, the limiting part 25 of the flexible amplifying hinge 2 distributed around the bearing plate 1 can be fixed by the external force of the positioning piece 4, and then the straight-round flexible hinge 23 is driven to deform by the expansion and contraction of the piezoelectric actuator 3 arranged along the X direction and the Y direction, so that the first connecting arm 21 and the second connecting arm 22 are close to or far away from each other, and the bearing plate 1 is driven to move along the X direction or the Y direction. When the rotation of the bearing plate 1 in the Rz degree of freedom needs to be met, each flexible amplifying hinge 2 is in a free state, the bearing installed on the bearing plate 1 can rotate freely, when the piezoelectric actuator 3 generates axial elongation based on the inverse piezoelectric effect, the flexible amplifying hinge 2 generates tangential displacement relative to the positioning shaft, and then the bearing plate 1 is driven to rotate around the positioning shaft, so that the rotation of the Rz degree of freedom is realized.

The multifunctional flexible hinge has two working conditions, and is specifically divided into two embodiments as follows.

First embodiment:

as shown in fig. 5, when it is required to satisfy the two degrees of freedom of the carrier plate 1 in the X-direction and the Y-direction, in order to make the driving force generated by the flexible amplifying hinge 2 vertically act on the side wall of the carrier plate 1, at this time,

the structures of the straight-round flexible hinges 23 arranged in pairs at the two ends of the flexible amplifying hinge 2 can be completely identical, that is, the sizes of the D1 and the D2 are identical, and the straight-round flexible hinges 23 arranged in pairs at the two ends are symmetrically arranged at the two ends of the piezoelectric actuator 3, and the two straight-round flexible hinges 23 in each pair of straight-round flexible hinges 23 are symmetrically arranged along the axial direction of the piezoelectric actuator 3. When the two piezoelectric actuators 3 in the X-axis direction drive the piezoelectric actuators 3 to work under the action of the electric control device, the piezoelectric actuators 3 generate axial elongation based on the inverse piezoelectric effect, so that the straight round flexible hinges 23 at the two ends are driven to deform, and then the bearing plate 1 is driven to move along the X-axis direction; on the contrary, when the two piezoelectric actuators 3 in the Y-axis direction work, the carrier plate 1 can be driven to move along the Y-axis direction. A simulated view of the motion under this condition is shown with reference to fig. 7.

Second embodiment:

as shown in fig. 6, when the rotation of the carrier plate 1 in the Rz degree of freedom needs to be satisfied, in order to further promote the tangential force when the flexible amplifying hinge 2 drives the carrier plate 1 to rotate, the structures of the straight round flexible hinges 23 arranged at two ends of the flexible amplifying hinge 2 in pairs in the scheme are not completely the same, and the value range of the ratio D1/D2 of D1 to D2 is 0.1-0.9. The value of D1/D2 in this solution is preferably 0.5, so that through the rigidity difference between the two pairs of straight-circle flexible hinges 23, a certain tangential displacement is generated under the driving action of the piezoelectric actuator 3, and the straight-circle flexible hinges 23 have a certain amplification effect on the driving force of the piezoelectric actuator 3, so that the tangential displacement of the carrier plate 1 can be better increased, and then the carrier plate 1 is driven to smoothly rotate around the Z positioning axis by a certain angle, and a motion simulation diagram under the relevant working conditions can be shown with reference to fig. 8. In this embodiment, the cooperation of the external positioning member 4 and the positioning portion is removed, so that each flexible amplifying hinge 2 is in a free state, then the precision bearing 12 installed in the lower counter bore of the carrier plate 1 is matched with the positioning shaft below, and under the action of the electric control device, the piezoelectric actuator 3 is driven to work, when the piezoelectric actuator 3 generates axial extension based on the inverse piezoelectric effect, the flexible amplifying hinge 2 generates tangential displacement relative to the positioning shaft, and then the carrier plate 1 is driven to rotate around the positioning shaft, and by changing the driving voltage direction and time sequence of the piezoelectric actuator 3, the carrier plate 1 can be controlled to generate forward and reverse rotation motions and realize positioning.

Further, for convenient processing, the error caused by assembly is reduced, meanwhile, the stability of the multifunctional flexible hinge during movement can be improved, the flexible amplifying hinge 2 and the bearing plate 1 are integrally formed by linear cutting of AL7075 material, and the AL7075 material has good mechanical properties and is relatively suitable for manufacturing of the flexible hinge

The foregoing describes in detail preferred embodiments of the present utility model. It should be understood that numerous modifications and variations can be made in accordance with the concepts of the utility model by one of ordinary skill in the art without undue burden. Therefore, all technical solutions which can be obtained by logic analysis, reasoning or limited experiments based on the prior art by the person skilled in the art according to the inventive concept shall be within the scope of protection defined by the claims.

Claims

1. A multifunctional flexible hinge, characterized in that: comprising

The bearing plate (1), the middle part of the lower bottom surface of the bearing plate (1) is provided with a shaft hole (11), and the shaft hole (11) is matched with an external supporting shaft;

the flexible amplifying hinges (2) are circumferentially and uniformly distributed around the bearing plate (1) and are symmetrically arranged in pairs and used for driving the bearing plate (1) to move along the X, Y or Rz three degrees of freedom; a limiting part (25) which is convenient to be matched with the positioning piece (4) is arranged on one side wall of the flexible amplifying hinges (2) far away from the bearing plate (1);

when the shaft hole (11) is matched with an external supporting shaft, the bearing plate (1) rotates around Rz under the action of a plurality of flexible amplifying hinges (2);

when the limiting part (25) and the positioning piece (4) are matched, the bearing plate (1) moves along the X, Y direction under the action of the flexible amplifying hinges (2).

2. The multi-function flexible hinge of claim 1, wherein: the flexible amplifying hinge (2) comprises a first connecting arm (21) and a second connecting arm (22) which are arranged at intervals, straight round flexible hinges (23) are symmetrically arranged at two ends of the first connecting arm (21) and the second connecting arm (22) respectively in an included angle mode, mounting seats (24) are inwards extended at included angles of the straight round flexible hinges (23) at each end, and piezoelectric actuators (3) are mounted between the two mounting seats (24).

3. The multi-function flexible hinge of claim 2, wherein: the first connecting arm (21) extends out of the plate edge of the bearing plate (1) and is integrally arranged with the plate edge, and the second connecting arm (22) is parallel to the first connecting arm (21).

4. A multi-function flexible hinge according to claim 3, wherein: the shape of the bearing plate (1) is square, four flexible amplifying hinges (2) are arranged at the edge of the bearing plate (1), and each mounting seat (24) is parallel to the plate edge of the bearing plate (1).

5. The multi-function flexible hinge of claim 4, wherein: the aperture of the shaft hole (11) is larger than or equal to D/2 and smaller than D, wherein D is the side length of the bearing plate (1).

6. The multi-function flexible hinge of claim 1, wherein: the precision bearing (12) is embedded in the shaft hole (11), and the bearing hole of the precision bearing (12) is matched with an external supporting shaft.

7. The multi-function flexible hinge of claim 2, wherein: the included angle theta between the straight round flexible hinges (23) at the two ends of the first connecting arm (21) and the second connecting arm (22) is 50-60 degrees.

8. The multi-function flexible hinge of claim 7, wherein: the straight round flexible hinges (23) at each end of the first connecting arm (21) and the second connecting arm (22) are symmetrically arranged by four stretching notch type single-axis flexible hinges (231), and the wall thickness of the flexible notch of each stretching notch type single-axis flexible hinge (231) at each end is D1 and D2 respectively.

9. The multi-function flexible hinge of claim 8, wherein: the sizes of D1 and D2 are the same.

10. The multi-function flexible hinge of claim 8, wherein: the value range of the ratio D1/D2 of the D1 to the D2 is 0.1-0.9.