CN112271952B - Inchworm type piezoelectric driving mechanism - Google Patents
Inchworm type piezoelectric driving mechanism Download PDFInfo
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- CN112271952B CN112271952B CN202011052454.5A CN202011052454A CN112271952B CN 112271952 B CN112271952 B CN 112271952B CN 202011052454 A CN202011052454 A CN 202011052454A CN 112271952 B CN112271952 B CN 112271952B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 38
- 241000256247 Spodoptera exigua Species 0.000 title abstract description 22
- 238000005192 partition Methods 0.000 claims abstract description 4
- 230000002093 peripheral effect Effects 0.000 claims description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 229910001374 Invar Inorganic materials 0.000 claims description 3
- 230000036316 preload Effects 0.000 claims description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 241000270322 Lepidosauria Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- 238000003908 quality control method Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses an inchworm type piezoelectric driving mechanism which comprises a clamping body, a moving shaft, an upper nut, a lower nut, an upper clamping piezoelectric stack, a lower clamping piezoelectric stack and a driving piezoelectric stack, wherein the upper clamping piezoelectric stack is arranged on the clamping body; the clamping body is a cylindrical thin-wall structural member, the top of the clamping body is connected with an upper nut, the bottom of the clamping body is connected with a lower nut, the middle of the clamping body is provided with an annular flange, and a partition groove is formed in the side wall between the annular flange and the upper nut and between the annular flange and the lower nut; the upper clamping piezoelectric stack is clamped between the annular flange and the upper nut, and the lower clamping piezoelectric stack is clamped between the annular flange and the lower nut; the moving shaft is arranged in the clamping body in an interference fit manner; the driving piezoelectric stack is arranged in the mounting groove of the motion shaft; the movement shaft drives the piezoelectric stack to apply pre-tightening force. The piezoelectric driving mechanism has the advantages of simple and compact structure, small number of parts, miniaturization and light weight.
Description
Technical Field
The invention relates to the technical field of precision driving and adjusting of spacecrafts, in particular to an inchworm type piezoelectric driving mechanism.
Background
The inchworm type piezoelectric driving mechanism accumulates small step length into large stroke by utilizing the high motion resolution of a piezoelectric device and an inchworm motion principle, realizes the motion of high resolution and large stroke, and has important functions and advantages in the occasions of large output force, precise positioning, low-speed linear motion, precise adjustment and compensation and the like. When the existing inchworm type piezoelectric driving mechanism utilizes the electrification and extension of the piezoelectric stack, the pushing mechanism deforms to clamp and release the rotor and pushes the rotor to move, the working principle of the existing inchworm type piezoelectric driving mechanism is similar to that of a creeping type reptile, and therefore the existing inchworm type piezoelectric driving mechanism is also generally called as an inchworm type or creeping type piezoelectric driver.
The conventional inchworm type piezoelectric driver mainly has the defects of complex structure, about 20 structural parts for realizing inchworm driving, complex assembly and adjustment, more precision influence links, poor mechanical and heat exchange load bearing capacity, large volume, difficulty in miniaturization and light weight and certain limitation on application occasions.
Disclosure of Invention
In view of this, the invention provides an inchworm-type piezoelectric driving mechanism, which has the advantages of simple and compact structure, small number of parts, miniaturization and light weight.
An inchworm-type piezoelectric driving mechanism comprises a clamping body, a moving shaft, an upper nut, a lower nut, an upper clamping piezoelectric stack, a lower clamping piezoelectric stack and a driving piezoelectric stack;
the clamping body is a cylindrical thin-wall structural member, the upper nut is in threaded connection with the outer periphery of the top of the clamping body, the lower nut is in threaded connection with the outer periphery of the bottom of the clamping body, an annular flange is arranged on the outer periphery of the middle of the clamping body, and a plurality of axially-extending partition grooves are formed in the side walls between the annular flange and the upper nut and between the annular flange and the lower nut;
the upper clamping piezoelectric stack and the lower clamping piezoelectric stack are both of annular structures and are sleeved on the outer peripheral side of the clamping body; the upper clamping piezoelectric stack is clamped between the annular flange and the upper nut, and the lower clamping piezoelectric stack is clamped between the annular flange and the lower nut;
the moving shaft is arranged in the clamping body in an interference fit manner, a through mounting groove is formed in the axial middle part, and thin-walled plate structures are arranged on two sides of the mounting groove;
the driving piezoelectric stack is arranged in the mounting groove;
the motion axis applies a pre-load to the drive piezoelectric stack.
Preferably, the top of the clamping body is provided with an upper connecting part, the bottom of the clamping body is provided with a lower connecting part, and the upper connecting part and the lower connecting part are both provided with fine-tooth external threads;
the annular flange and the upper connecting part and the annular flange and the lower connecting part are connected through thin-wall pieces, and the two thin-wall pieces form a waist drum-shaped structure;
the dividing groove is formed in the thin-walled member.
Preferably, a flexible arc-shaped groove is formed at the corner of the thin-wall part.
Preferably, annular grooves are formed in the upper connecting portion, the lower connecting portion and the joint of the annular flange and the thin-walled member.
Preferably, the plurality of dividing grooves are uniformly distributed in the circumferential direction.
Preferably, the dividing groove is processed by a wire cutting process.
Preferably, the annular flange is provided with a radially extending through hole for passing a lead wire of the driving piezoelectric stack therethrough.
Preferably, the clamping body, the motion shaft, the upper nut, the lower nut, the upper clamping piezoelectric stack, the lower clamping piezoelectric stack and the driving piezoelectric stack are made of low thermal expansion coefficient materials.
Preferably, the low coefficient of thermal expansion material is invar.
Preferably, an inner side surface of the clamp body and an outer peripheral surface of the moving shaft are both subjected to nickel plating.
Has the advantages that:
the inchworm type piezoelectric driving mechanism adopts an integrated design idea, so that the structure is simplified and compact, the inchworm type piezoelectric driving mechanism can be realized by only adopting seven parts, and the inchworm type piezoelectric driving mechanism is beneficial to miniaturization, light weight and reliability improvement; the structural form of the clamping body and the moving shaft can conveniently adjust the design and implementation of the clamping force; the variation of clamping force can be realized in a large range by reasonably designing the thickness of the clamping body, the number of the dividing grooves, the width of the dividing grooves and other parameters, the inchworm type piezoelectric driving mechanism has more various working modes, and application scenes of the inchworm type piezoelectric driving mechanism can be greatly expanded, such as precision compensation, linear motion, shape surface control, vibration control and the like.
Drawings
FIG. 1 is a schematic perspective view of an inchworm-type piezoelectric driving mechanism according to the present invention;
FIG. 2 is a schematic cross-sectional view of an inchworm-type piezoelectric driving mechanism according to the present invention;
FIG. 3 is a schematic diagram of a clamping body of the inchworm-type piezoelectric driving mechanism in FIG. 1;
FIG. 4 is a cross-sectional view of the clamp body of FIG. 3 taken along line A-A;
FIG. 5 is a schematic perspective view of the moving shaft of the inchworm-type piezoelectric driving mechanism in FIG. 1;
fig. 6 is a schematic view of a half-section structure of the moving shaft in fig. 5.
Wherein, 1-clamping body, 2-motion axis, 3-upper nut, 4-lower nut, 5-upper clamping piezoelectric stack, 6-lower clamping piezoelectric stack, 7-driving piezoelectric stack, 8-spherical hinge
11-annular flange, 12-dividing groove, 13-upper connecting part, 14-lower connecting part, 15-thin-wall part, 16-flexible arc groove, 17-annular groove, 18-through hole and 21-mounting groove
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
Referring to fig. 1 and 2, the present invention provides an inchworm-type piezoelectric driving mechanism, which includes a clamping body 1, a moving shaft 2, an upper nut 3, a lower nut 4, an upper clamping piezoelectric stack 5, a lower clamping piezoelectric stack 6, and a driving piezoelectric stack 7; in FIG. 1, the upper end part and the lower end part of an inchworm type piezoelectric driving mechanism are respectively connected with a spherical hinge 8;
the clamping body 1 is a cylindrical thin-wall structural member, the top peripheral side is in threaded connection with an upper nut 3, the bottom peripheral side is in threaded connection with a lower nut 4, the middle peripheral side is provided with an annular flange 11, and a plurality of axially extending partition grooves 12 are formed in the side walls between the annular flange 11 and the upper nut 3 and between the annular flange 11 and the lower nut 4; as shown in the structure of fig. 3 and 4, the top of the clamping body 1 is provided with an upper connecting part 13, the bottom is provided with a lower connecting part 14, and both the upper connecting part 13 and the lower connecting part 14 are provided with fine-thread external threads; the upper connecting part 13 is in threaded connection with the upper nut 3 through a fine thread; the lower connecting part 14 is in threaded connection with the lower nut 4 through a fine thread and an external thread; the upper connecting portion 13 and the lower connecting portion 14 may be both ring-shaped members; the annular flange 11 and the upper connecting part 13 and the annular flange 11 and the lower connecting part 14 are connected through thin-wall parts 15; a thin-wall piece 15 is connected between the upper connecting part 13 and the annular flange 11, a thin-wall piece 15 is also connected between the lower connecting part 14 and the annular flange 11, and the two thin-wall pieces 15 form a waist-drum-shaped structure; the dividing grooves 12 are formed in the thin-wall member 15, and as shown in the structures of fig. 3 and 4, a plurality of dividing grooves 12 extending in the vertical direction are respectively arranged on two thin-wall members 15 which are symmetrically arranged up and down; the plurality of dividing grooves 12 are uniformly distributed along the circumferential direction, and the dividing grooves 12 are uniformly distributed along the circumferential direction of the thin-wall part 15, so that uniform deformation of the thin-wall part 15 can be ensured; in the actual production process, the dividing groove 12 can be formed by adopting a linear cutting process;
the upper nut 3 and the lower nut 4 are used for pre-tightening the clamping piezoelectric stack and adjusting the pre-tightening force between the clamping body 1 and the moving shaft 2; meanwhile, the overvoltage between the clamping body 1 and the moving shaft 2 can be adjusted; the shapes of the upper nut 3 and the lower nut 4 can be equilateral hexahedrons, and the upper nut and the lower nut and the upper plane and the lower plane of the annular flange 11 provide nut pre-tightening operation interfaces together;
the upper clamping piezoelectric stack 5 and the lower clamping piezoelectric stack 6 are both of annular structures and are sleeved on the outer peripheral side of the clamping body 1; the upper clamping piezoelectric stack 5 is clamped between the annular flange 11 and the upper nut 3, and the lower clamping piezoelectric stack 6 is clamped between the annular flange 11 and the lower nut 4; as shown in the structure of fig. 1, a radial gap is formed between the upper clamping piezoelectric stack 5 and the thin-wall part 15, and a radial gap is also formed between the lower clamping piezoelectric stack 6 and the thin-wall part 15; the upper clamping piezoelectric stack 5 and the lower clamping piezoelectric stack 6 are symmetrically arranged on two sides of the annular flange 11;
the motion shaft 2 is arranged in the clamping body 1 in an interference fit manner, a through mounting groove 21 is formed in the axial middle part, and thin-walled plate structures are arranged on two sides of the mounting groove 21; as for the moving shaft 2 shown in the structures of fig. 5 and 6, the moving shaft 2 is integrally in a cylindrical structure, and a mounting groove 21 for mounting the driving piezoelectric stack 7 is arranged in the middle of the moving shaft 2 along the axial direction, the mounting groove 21 is in shape fit with the driving piezoelectric stack 7, and the moving shaft 2 applies a pre-tightening force to the driving piezoelectric stack 7; a groove is further formed in the moving shaft 2 corresponding to the mounting groove 21, so that thin-wall plate structures are formed on two sides of the mounting groove 21; the thin-wall plate structure is used for matching the driving force and the driving rigidity of the piezoelectric stack, and the thickness of the thin-wall plate structure can be adjusted according to the requirement; blind holes for mounting parts can be further arranged at two end parts of the moving shaft 2;
the driving piezoelectric stack 7 is arranged in the mounting groove 21; in order to facilitate the assembly of the leads of the driving piezoelectric stack 7, i.e., to facilitate the routing, as shown in the structures of fig. 1, 2 and 4, the annular flange 11 is provided with through holes 18 extending in the radial direction, and the through holes 18 are used for penetrating the leads of the driving piezoelectric stack 7; the through holes 18 may be provided in two or more opposite positions, and may be provided according to actual needs.
The inchworm type piezoelectric driving mechanism only adopts seven parts such as a clamping body 1, a moving shaft 2, an upper nut 3, a lower nut 4, an upper clamping piezoelectric stack 5, a lower clamping piezoelectric stack 6, a driving piezoelectric stack 7 and the like, wherein the upper clamping piezoelectric stack 5 and the lower clamping piezoelectric stack 6 are fixedly arranged on the upper side and the lower side of the clamping body 1 through the upper nut 4 and the lower nut 4, the upper clamping piezoelectric stack 5 and the lower clamping piezoelectric stack 6 are symmetrically arranged, and the moving shaft 2 embedded with the driving piezoelectric stack 7 is arranged in the clamping body 1 in an interference fit manner.
As shown in the structures of fig. 3 and 4, the flexible arc-shaped groove 16 is formed at the corner of the thin-wall member 15, and the strength and rigidity of the thin-wall member 15 can be reduced through the flexible arc-shaped groove 16, so that the flexibility of the thin-wall member 15 is improved, the thin-wall member 15 is more easily deformed, and the movement is realized.
The clamping body 1 is of a cylindrical structure, two sections of thin-walled pieces 15 form a waist drum-shaped structure through machining, a flexible arc-shaped groove 16 is formed in a corner, and meanwhile, the axial dividing grooves 12 are formed through machining such as linear cutting, so that two groups of radial displacement amplification mechanisms with preset quantity are formed, and the inchworm type piezoelectric driving mechanism further has the advantages of wide application range, high integration level and easiness in quality control.
The inchworm type piezoelectric driving mechanism has the following five working modes:
1. power down clamp mode: the upper clamping piezoelectric stack 5, the lower clamping piezoelectric stack 6 and the driving piezoelectric stack 7 are powered off, at the moment, the clamping body 1 clamps the moving shaft 2 through pretightening force, and the clamping body and the moving shaft are fixed relatively to form a stable structure;
2. elongation mode: the motion shaft 2 is extended relative to the clamping body 1 through the power-on and power-off time sequence control of the upper clamping piezoelectric stack 5, the lower clamping piezoelectric stack 6 and the driving piezoelectric stack 7, and the motion time sequence is shown in the following table 1;
3. shortening mode: the motion shaft 2 is shortened relative to the clamping body 1 through the power-on and power-off time sequence control of the upper clamping piezoelectric stack 5, the lower clamping piezoelectric stack 6 and the driving piezoelectric stack 7, and the motion time sequence is shown in the following table 1;
4. zero stiffness mode: the upper clamping piezoelectric stack 5 and the lower clamping piezoelectric stack 6 are powered off simultaneously, so that the pre-tightening force of the clamping body 1 on the moving shaft 2 is relieved, the upper clamping piezoelectric stack and the lower clamping piezoelectric stack are separated from each other, and the tensile and compressive rigidity is zero, as shown in the following table 1;
5. fast jog mode (or called vibration control mode): the upper clamping piezoelectric stack 5 is electrified to release the pretightening force of the upper half part of the clamping body 1 to the moving shaft 2; the lower clamping piezoelectric stack 6 is powered off, and the lower half part of the clamping body 1 clamps the moving shaft 2; the piezoelectric stack 7 is driven to apply a driving voltage with a certain frequency, so that the rapid micro-motion driving of the motion shaft 2 is realized.
TABLE 1 working modes of inchworm type piezoelectric driving mechanism
As shown in the structure of fig. 3, the upper connecting portion 13, the lower connecting portion 14, and the connecting portion between the annular flange 11 and the thin-walled member 15 are all provided with annular grooves 17, that is, the annular groove 17 is provided on the bottom surface of the upper connecting portion 13, the annular groove 17 is provided on the top surface of the lower connecting portion 14, the annular grooves 17 are provided on the top surface and the bottom surface of the annular flange 11, and all the annular grooves 17 are adjacent to the edge of the thin-walled member 15.
On the basis of the above various embodiments, the clamping body 1, the motion shaft 2, the upper nut 3, the lower nut 4, the upper clamping piezoelectric stack 5, the lower clamping piezoelectric stack 6 and the driving piezoelectric stack 7 are all made of low thermal expansion coefficient materials, which may be invar alloy; the adoption of the material with low thermal expansion coefficient is beneficial to improving the thermal matching performance and realizing the normal work in a large temperature range; the inner side surface of the clamping body 1 and the outer peripheral surface of the moving shaft 2 are both subjected to nickel plating, the matching area between the inner side surface of the clamping body 1 and the outer peripheral surface of the rotating shaft can be subjected to surface treatment such as nickel plating to improve the hardness and the friction coefficient, and the specific surface treatment mode can be determined according to the material types of the inner side surface and the outer peripheral surface.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An inchworm-type piezoelectric driving mechanism is characterized by comprising a clamping body, a moving shaft, an upper nut, a lower nut, an upper clamping piezoelectric stack, a lower clamping piezoelectric stack and a driving piezoelectric stack;
the clamping body is a cylindrical thin-wall structural member, the upper nut is in threaded connection with the outer periphery of the top of the clamping body, the lower nut is in threaded connection with the outer periphery of the bottom of the clamping body, an annular flange is arranged on the outer periphery of the middle of the clamping body, and a plurality of axially-extending partition grooves are formed in the side walls between the annular flange and the upper nut and between the annular flange and the lower nut;
the upper clamping piezoelectric stack and the lower clamping piezoelectric stack are both of annular structures and are sleeved on the outer peripheral side of the clamping body; the upper clamping piezoelectric stack is clamped between the annular flange and the upper nut, and the lower clamping piezoelectric stack is clamped between the annular flange and the lower nut;
the moving shaft is arranged in the clamping body in an interference fit manner, a through mounting groove is formed in the axial middle part, and thin-walled plate structures are arranged on two sides of the mounting groove;
the driving piezoelectric stack is arranged in the mounting groove;
the motion axis applies a pre-load to the drive piezoelectric stack.
2. The piezoelectric driving mechanism according to claim 1, wherein the clamp body is provided with an upper connecting portion at a top portion thereof and a lower connecting portion at a bottom portion thereof, and the upper connecting portion and the lower connecting portion are each provided with a fine-pitch external thread;
the annular flange and the upper connecting part and the annular flange and the lower connecting part are connected through thin-wall pieces, and the two thin-wall pieces form a waist drum-shaped structure;
the dividing groove is formed in the thin-walled member.
3. The piezoelectric drive mechanism of claim 2, wherein a flexible circular arc groove is formed at a corner of the thin-walled member.
4. The piezoelectric drive mechanism according to claim 3, wherein annular grooves are provided at the upper connecting portion, the lower connecting portion, and where the annular flange meets the thin-walled member.
5. The piezoelectric driving mechanism according to claim 1, wherein the plurality of dividing grooves are uniformly distributed in the circumferential direction.
6. The piezoelectric driving mechanism according to claim 5, wherein the dividing groove is formed by a wire cutting process.
7. Piezoelectric drive mechanism according to any of claims 1-6, wherein the annular flange is provided with radially extending through holes for passing leads of the driving piezoelectric stack.
8. The piezoelectric drive mechanism according to claim 7, wherein the clamping body, the motion shaft, the upper nut, the lower nut, the upper clamping piezoelectric stack, the lower clamping piezoelectric stack, and the driving piezoelectric stack are made of a low thermal expansion coefficient material.
9. The piezoelectric drive mechanism of claim 8, wherein the low cte material is invar.
10. The piezoelectric driving mechanism according to claim 8, wherein an inner side surface of the clamp body and an outer peripheral surface of the moving shaft are each subjected to a nickel plating treatment.
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| CN202011052454.5A CN112271952B (en) | 2020-09-29 | 2020-09-29 | Inchworm type piezoelectric driving mechanism |
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| CN202011052454.5A CN112271952B (en) | 2020-09-29 | 2020-09-29 | Inchworm type piezoelectric driving mechanism |
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| CN103762887A (en) * | 2014-02-14 | 2014-04-30 | 哈尔滨工业大学 | Cylindrical driven clamping type piezoelectric wriggle linear motor |
| WO2018063647A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Piezoelectric package-integrated motor |
| CN108712103A (en) * | 2018-06-20 | 2018-10-26 | 合肥工业大学 | A kind of impact type piezoelectricity rotation motor |
| CN108768206A (en) * | 2018-06-29 | 2018-11-06 | 南京航空航天大学 | A kind of two-way high thrust piezoelectric straight line actuator and its driving method |
| CN109217723A (en) * | 2018-09-19 | 2019-01-15 | 宁波大学 | The structure-integrated full displacement equations formula piezoelectricity looper linear platform of driving in situ |
| CN110138266A (en) * | 2019-06-26 | 2019-08-16 | 西安电子科技大学 | A kind of Inchworm type piezoelectric actuator |
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2020
- 2020-09-29 CN CN202011052454.5A patent/CN112271952B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103762887A (en) * | 2014-02-14 | 2014-04-30 | 哈尔滨工业大学 | Cylindrical driven clamping type piezoelectric wriggle linear motor |
| WO2018063647A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Piezoelectric package-integrated motor |
| CN108712103A (en) * | 2018-06-20 | 2018-10-26 | 合肥工业大学 | A kind of impact type piezoelectricity rotation motor |
| CN108768206A (en) * | 2018-06-29 | 2018-11-06 | 南京航空航天大学 | A kind of two-way high thrust piezoelectric straight line actuator and its driving method |
| CN109217723A (en) * | 2018-09-19 | 2019-01-15 | 宁波大学 | The structure-integrated full displacement equations formula piezoelectricity looper linear platform of driving in situ |
| CN110138266A (en) * | 2019-06-26 | 2019-08-16 | 西安电子科技大学 | A kind of Inchworm type piezoelectric actuator |
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