CN103822576B - Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase - Google Patents
Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase Download PDFInfo
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- CN103822576B CN103822576B CN201310601121.7A CN201310601121A CN103822576B CN 103822576 B CN103822576 B CN 103822576B CN 201310601121 A CN201310601121 A CN 201310601121A CN 103822576 B CN103822576 B CN 103822576B
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Abstract
The invention discloses a method using a linear Hall sensor group to detect the permanent magnet plane motor rotor coil phase. A rotor coil array comprises 4 drive units. Each drive unit is composed of three coils. First and third drive units generate X axial horizontal thrust. Second and fourth drive units generate Y axial horizontal thrust. A linear Hall sensor group is respectively arranged outside each drive unit. Each linear Hall sensor group is composed of 4 linear Hall sensors. The starting point of each linear Hall sensor is the geometric neutral line of the drive unit corresponding to the linear Hall sensor. The linear Hall sensors are equidistantly arranged at the interval of 1/2 polar distance along the arrangement direction of the coils, so as to measure the X or Y axial horizontal component flux density of the magnetic field of each corresponding arrangement point. According to the horizontal component flux density measured by 4 linear Hall sensors, the phase angle of each rotor coil relative to a stator magnetic field is calculated. A measuring range is not limited by stroke. The method has the advantages of stable and reliable operation and high measuring precision.
Description
Technical field
The invention belongs to Electric Drive technical field is and in particular to a kind of put down using linear hall sensor group detection permanent magnetism
The method of face electric mover coil phase, is particularly well-suited to the modern times such as semiconductor lithography, precision drawing instrument, high-accuracy action platform
Manufacturing equipment field.
Background technology
Obtain fast-developing with advanced manufacturing industry, modern precision, ultrahigh precision manufacturing equipment to high response, at high speed, high
Accurate plane driving means have urgent demand.Traditional two dimensional surface workbench is by electric rotating machine and linear transmission mechanism
Stack combinations form, because this stack combinations mechanism is usually present the problems such as deformation, friction, sideshake, table positions precision
Be extremely difficult to higher level, and the moving component on driving-chain in movement conversion mechanism also increase structure complexity and
The movement inertia of system.Planar motor can directly export two-dimensional electromagnetic thrust and two-dimension translational motion by mover, can be used for
The novel high-performance planar working table of construction direct-drive type.Compared with traditional two dimensional surface workbench, with planar motor as core
Construction direct-drive type planar working table have the advantages that structure is simple, positioning precision is high, fast response time, semiconductor lithography,
In the precisions such as precision drawing instrument, high-accuracy action platform, the modern manufacturing equipment of ultrahigh precision, there is very big application potential.
The mover of motive loop permanent magnetic planar motor is coil array, and stator is permanent magnet array, need to be according to stator phase during work
Position for mover is passed through corresponding electric current with the horizontal thrust required for producing, therefore, motive loop permanent magnetic to coil array
Planar motor rotor is that mover coil is directly connected to respect to the determination of stator field phase place with respect to the position detection of stator
The service behaviour of motor.Motive loop permanent magnetic planar motor rotor coil generally adopts distance element high with respect to the phase place of stator field
Precision laser rangefinder is detected, but this equipment price is expensive, install and use have high demands, measurement range limited, therefore, need
Want a kind of new technical scheme to solve the above problems.
Content of the invention
In view of the shortcomings of the prior art, the present invention proposes one kind using linear hall sensor group detection permanent-magnet planar
The method of electric mover coil phase, the sensor low cost that the method adopts, measurement range is not subject to travel limit, working stability
Reliable.
For achieving the above object, the technical solution adopted in the present invention is: described permanent-magnet planar motor is by stator forever
Magnetic array and mover coil array composition, mover coil array comprises 4 driver elements, and each driver element is by three coils
Composition, the first, the 3rd driver element produces x-axis to horizontal thrust, and the second, the 4th driver element produces y-axis to horizontal thrust, then
Using following steps: (1) respectively arranges a linear hall sensor group outside each driver element, each linear Hall senses
Device group is formed by 4 linear hall sensors；(2) each linear hall sensor is with the geometry of corresponding driver element
The neutral conductor is starting point, and orientation interval 1/2 pole span along coil equally spacedly arranges, to measure each corresponding layout points magnetic field
X-axis to or y-axis to horizontal component magnetic close；(3) according to 4 linear hall sensor institutes in each linear hall sensor group
The horizontal component magnetic density of measurement calculates the phase angle that mover coil is with respect to stator field.
Compared with prior art, the invention has the beneficial effects as follows:
(1) present invention adopts linear hall sensor group to replace conventional laser range finder to permanent-magnet planar motor mover line
Circle phase place is detected, easy to install, hardware cost is low, and measurement range is not subject to travel limit, stable and reliable in work.
(2) present invention is spaced 1/2 pole span using 4 linear hall sensors along coil orientation and equidistantly arranges, and
Vertically the horizontal component in tested magnetic field is installed, and is disturbed little by coil current, certainty of measurement is high.
Brief description
Fig. 1 detects permanent-magnet planar motor mover coil phase method institute for what the present invention provided with linear hall sensor group
The composition structural plan schematic diagram of stator and mover in the permanent-magnet planar motor stated；
In Fig. 1: 1- stator permanent magnet array；2- mover coil array；3- coil；4- linear hall sensor group；A, c- produce
The raw driver element to horizontal thrust for the x-axis；B, d- produce the driver element to horizontal thrust for the y-axis；Ha, hb, hc, hd- and driving
The corresponding linear hall sensor group of unit a, b, c, d；- pole span.
Fig. 2 is a linear hall sensor circuit connection diagram of the present invention；
In Fig. 2, h is linear hall sensor.
Fig. 3 be permanent magnetism permanent-magnet planar motor permanent magnet array magnetic field of the present invention x-axis to or y-axis to magnetic close distribution ripple
Shape；
In Fig. 3,、、WithThe close Horizontal component values of magnetic recording for a linear hall sensor group.
Specific embodiment
It is further elucidated with the present invention with reference to the accompanying drawings and detailed description.As shown in figure 1, present invention linear Hall
Sensor group detects that the permanent-magnet planar motor described in permanent-magnet planar motor mover coil phase method is made up of stator and mover.Fixed
Son is stator permanent magnet array 1, the permanent magnet array of stator permanent magnet array 1, the close x-axis of the magnetic of permanent magnet array to, y-axis to level divide
Amount is cosine distribution.Mover be mover coil array 2, mover coil array 2 non iron-core, mover coil array 2 comprise a, b,
This 4 driver elements of c, d, each driver element is made up of three coils 3.Driver element a, c are diagonally arranged, driver element a, c
Produce x-axis to horizontal thrust；Driver element b, d are diagonally arranged, and driver element b, d produce y-axis to horizontal thrust.
Each 4,4 linear Hall sensings of one linear hall sensor group of arrangement outside each driver element a, b, c, d
Device group 4 is linear hall sensor group ha, hb, hc, hd respectively, linear hall sensor group ha arrangement corresponding with driver element a,
Linear hall sensor group hb arrangement corresponding with driver element b, linear hall sensor group hc arrangement corresponding with driver element c,
Linear hall sensor group hd arrangement corresponding with driver element d.
Each linear hall sensor group 4 is formed by 4 linear hall sensors, and each linear hall sensor
With corresponding driver element a, b, c, d geometrical neutral line as starting point, the orientation along coil 3 is spaced 1/2 pole spanDeng between
Away from ground arrangement, for measure the x-axis in each corresponding mount point magnetic field to or y-axis to the close value of horizontal component magnetic.
As shown in Fig. 2 each linear hall sensor is connected signal conditioning circuit respectively, signal conditioning circuit connects micro- place
Reason device, microprocessor has a/d ALT-CH alternate channel.The output signal of each linear hall sensor is after signal conditioning circuit process
Send into the a/d ALT-CH alternate channel of microprocessor.
If as shown in figure 3, the horizontal component magnetic measured by 4 linear hall sensors in linear hall sensor group 4
Close value is、、With, then microprocessor according to collection each linear hall sensor measured value calculate mover coil
With respect to stator field phase place, the phase angle of each corresponding driver element of linear hall sensor groupComputing formula is:
,
Phase angleI.e. permanent-magnet planar motor mover coil is with respect to stator field phase angle.
Claims (3)
1. a kind of method detecting permanent-magnet planar motor mover coil phase place with linear hall sensor group, described permanent-magnet planar electricity
Machine is made up of stator permanent magnet array and mover coil array, it is characterized in that: mover coil array comprises 4 driver elements, each
Driver element is formed by three coils, and the first, the 3rd driver element produces x-axis to horizontal thrust, the second, the 4th driver element
Produce y-axis to horizontal thrust, then adopt following steps:
(1) respectively arrange a linear hall sensor group outside each driver element, each linear hall sensor group is by 4
Individual linear hall sensor composition；
(2) each linear hall sensor is with the geometrical neutral line of corresponding driver element as starting point, along the arrangement of coil
Direction is spaced 1/2 pole span and equally spacedly arranges, with measure the x-axis in each corresponding layout points magnetic field to or y-axis to horizontal component magnetic
Close amount；
(3) the horizontal component magnetic density meter according to measured by 4 linear hall sensors in each linear hall sensor group
Calculate the phase angle that mover coil is with respect to stator field, particularly as follows: by the output signal of each linear hall sensor through letter
Number modulate circuit sends into microprocessor after processing, and microprocessor is according to formulaCalculate described phase angle,WithIt is the horizontal component magnetic density measured by 4 linear hall sensors respectively.
2. a kind of linear hall sensor group according to claim 1 detects permanent-magnet planar motor mover coil phase place
Method, is characterized in that: the close x-axis of the magnetic of stator permanent magnet array to, y-axis to horizontal component be cosine distribution.
3. a kind of linear hall sensor group according to claim 1 detects permanent-magnet planar motor mover coil phase place
Method, is characterized in that: the first, the 3rd driver element is diagonally arranged, and the second, the 4th driver element is diagonally arranged.
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| CN201310601121.7A CN103822576B (en) | 2013-11-25 | 2013-11-25 | Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase |
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| CN201310601121.7A CN103822576B (en) | 2013-11-25 | 2013-11-25 | Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase |
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| CN103822576B true CN103822576B (en) | 2017-01-18 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330631B (en) * | 2014-10-31 | 2017-04-26 | 华中科技大学 | Magnetic suspension planar motor rotor initial phase positioning method |
| CN104779768A (en) * | 2015-04-01 | 2015-07-15 | 清华大学 | Cylindrical linear motor |
| CN113954955A (en) * | 2021-10-14 | 2022-01-21 | 济南科亚电子科技有限公司 | Implementation method of electric steering wheel motor drive controller |
| CN114370812B (en) * | 2022-01-20 | 2022-09-16 | 哈尔滨工业大学 | Three-degree-of-freedom position measuring device and method for rotor of Y-shaped magnetic levitation planar motor |
| CN115752195A (en) * | 2022-11-09 | 2023-03-07 | 哈尔滨工业大学 | Hall sensor magnetic field position information detection method based on three-phase balance condition |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101769981A (en) * | 2009-12-15 | 2010-07-07 | 清华大学 | Phase searching detection method for permanent-magnet planar motor by adopting linear Hall array |
| CN102790474A (en) * | 2011-05-19 | 2012-11-21 | 上海微电子装备有限公司 | Method for detecting initial position of planar motor |
| CN103256882A (en) * | 2012-02-17 | 2013-08-21 | 上海微电子装备有限公司 | Magnetic levitation plane motor initialization position detection method using Hall array |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060101998A (en) * | 2005-03-22 | 2006-09-27 | 현대모비스 주식회사 | Apparatus for sensing rotor position of ac motor |
| DE102009035091A1 (en) * | 2009-07-28 | 2011-02-10 | Mahle International Gmbh | Position sensor and linear actuator |
-
2013
- 2013-11-25 CN CN201310601121.7A patent/CN103822576B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101769981A (en) * | 2009-12-15 | 2010-07-07 | 清华大学 | Phase searching detection method for permanent-magnet planar motor by adopting linear Hall array |
| CN102790474A (en) * | 2011-05-19 | 2012-11-21 | 上海微电子装备有限公司 | Method for detecting initial position of planar motor |
| CN103256882A (en) * | 2012-02-17 | 2013-08-21 | 上海微电子装备有限公司 | Magnetic levitation plane motor initialization position detection method using Hall array |
Non-Patent Citations (2)
| Title |
|---|
| 基于UKF方法的永磁同步平面电动机位移测量;高阵雨等;《机械工程学报》;20101231;第46卷(第24期);第40-45页 * |
| 基于线性霍尔元件的圆筒型永磁直线同步电机位置检测;徐丽莉等;《微电机》;20071231;第40卷(第3期);第23-25页 * |
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Effective date of registration: 20211217 Address after: 212200 No. 168, Zhongdian Avenue, Yangzhong City, Zhenjiang City, Jiangsu Province Patentee after: Yangzhong inspection and Testing Center Address before: Zhenjiang City, Jiangsu Province, 212013 Jingkou District Road No. 301 Patentee before: JIANGSU University |
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