CN1658074A - Multifreedom motion and positioning device - Google Patents
Multifreedom motion and positioning device Download PDFInfo
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- CN1658074A CN1658074A CN 200510024172 CN200510024172A CN1658074A CN 1658074 A CN1658074 A CN 1658074A CN 200510024172 CN200510024172 CN 200510024172 CN 200510024172 A CN200510024172 A CN 200510024172A CN 1658074 A CN1658074 A CN 1658074A
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Abstract
A multi-freedom degree movement and locating equipment. It is composed of a leveling shaft, a flexible block, a locus plate and the holding structure made up of a pillar frame, a lifting rotary separating device, a guide locus, a guide locus platform, an electrical platform and a moving platform. The leveling shaft is on the pillar frame, and adjusts the adjusting platform held by it through the rotary leveling shaft; the locus plate is fixed on the pillar frame, and the locus pin is fixed on the moving platform, the lifting rotary separating device is fixed at the bottom of the guide platform through the impacting nut. The structure is compact, the holding capacity is good, can reduce the lash, the height and the level can be adjusted. It has several freedom degrees and can move accurately according the appointed locus, and the movement is smooth and reliable. It can realize the lifting, rotating and separating of the device. Especially in the manufacturing of the photo-etching equipment, it is applied to hold the mask platform and makes the mask platform move according the appointed locus.
Description
Technical field
The present invention relates to a kind of multifreedom motion and locating device, it is used for the accurate location of realization level, height, and presses the desired trajectory motion, realizes that when maintenance translation, lifting, rotation separate multifreedom motion.Particularly in lithographic equipment is made, be used to support mask aligner mask platform and make mask platform press the desired trajectory motion.
Background technology
The motion positions device that uses is used in the heavy equipmentes such as building, boats and ships more or is used for the trickle positioning equipment of optics at present.Mostly its structure is in oil cylinder or the stationary shaft translation of chain effect lower edge, rotation in heavy equipment.If be used to realize the mask platform motion of integrated circuit manufacturing equipment litho machine, the location, promote and support and the rotation separation, said apparatus shows the apparatus structure complexity, it is big to take up room, need special-purpose system's controlled motion, and need external power supply holdout device position, and can not press the desired trajectory motion, be difficult for the accurate of implement device, rapid movement, and the level of device is with highly the location is accurately low, can't satisfy the requirement of mask platform, and be to avoid interfering the function that the lifting that requires rotates and the accurate position of motion can't satisfy the maintenance of lithographic equipment mask platform the time device height and the adjustable location of level.
Mostly the structure of fine adjustments equipment is to regulate the location by guide rod translation and thousand fens nuts trace.This tunable arrangement function singleness, can't realize multifreedom motion, Area of bearing and load-bearing capacity are little, and do not have pooling feature, the weight of lithographic equipment mask platform 400～500Kg and the impulsive force that long stroke motor instantaneous acceleration produces can't be supported, and lithographic equipment mask platform lifting spinfunction and movement position requirement accurately can't be satisfied.
Summary of the invention
Deficiency at above-mentioned motion and locating device, the purpose of this invention is to provide a kind of multifreedom motion and locating device, solved the deficiency of above-mentioned motion and locating device, its compact conformation, the supporting load is big, can alleviate impact, highly, horizontal adjustable, have a plurality of degree of freedom, and can accurately move by desired trajectory, and motion is steadily, the reliability height, and can realize lifting, rotation and the separation of mechanism.
In order to solve the problems of the technologies described above, the present invention is achieved in that
A kind of multifreedom motion and locating device is characterized in that: it by levelling shaft, flexible block, track pad with by column frame, promote the supporting mechanism that rotation separating mechanism, guide rail, guide rail platform, motor platform, motion platform constitute jointly and formed; Wherein, this levelling shaft screws on column frame, accurately adjusts the adjustment platform of its support by the rotation levelling shaft; This track pad is fixed on the column frame, and trace pin then is fixed on the motion platform, and the main shaft of this lifting rotation separating mechanism is fixed on guide rail platform bottom by gland nut.
This promotes the rotation separating mechanism by taper roll bearing, worm gear case, worm screw, worm gear, thread spindle, thread bush, cylinder, steel ball, the dense planting ball retainer, last main shaft, guide, gland nut, straight pin and gathering sill constitute, worm gear case is provided with worm screw, with the worm axis vertical direction on be provided with worm gear and form the worm and gear transmission, the thread spindle that is connected by key with worm gear, between worm gear case and thread spindle, install and be used for the positioning threads axle and bear the taper roll bearing of axial load, the thread bush that is connected with the thread spindle threaded engagement, with the thread bush tolerance fit and limit the straight pin of its circumferencial direction motion, slide in the gathering sill of straight pin on cylinder, thread bush is provided with can produce with last main shaft realizes point (or line) contact and the steel ball that separates automatically, be provided with between last main shaft and the guide and allow motion of main shaft dense planting ball retainer freely, last main shaft pass to adjust platform and use gland nut to be fixed on the guide rail platform.
One supporting pad is assemblied in the levelling shaft annular groove, and flexible block is installed and is supported on the supporting pad.
This flexible block has spherical structure crown structure up.
One drawbar and motion platform are fixed, and can steadily slide freely therein with the linear advancement clearance fit.
This levelling shaft has the inner via hole external thread structure, and external thread adopts the little fine thread of pitch.
The effect and the principle of work of above-mentioned multifreedom motion and locating device each several part are: when in off working state, device is in the stationary support state, because 3 constitute a plane, so can locate the level of whole device, highly by three levelling shafts and three flexible blocks.Levelling shaft has the inner via hole external thread structure, external thread adopts the little fine thread of pitch easily to realize accurately regulating the location, so can make the level of device and highly all be easy to accurate location by adjusting three levelling shafts, the intermediate throughholes structure of levelling shaft can make screw can pass the levelling shaft pretension simultaneously, thereby has increased the reliability that connects.Levelling shaft has circular groove structure, is easy to rotate flexibly when levelling shaft is adjusted, and also is easy to supporting pad carrying, spacing.Flexible block has crown structure and can effectively utilize self elastic deformation to offset outside instantaneous impact, the spherical structure of while flexible block makes itself and levelling shaft remain sphere and contacts, guarantee the contact area of support, thereby can avoid stress to concentrate simplified structure again.The device supporting mechanism is made up of column frame, guide rail, platform, lifting rotation separating mechanism etc.Column frame plays the main support effect.Guide rail not only plays a supportive role and also forms the degree of freedom of a direction translation simultaneously.Drawbar one end is constrained on sliding translation in the supporting mechanism, in the time of can preventing that the locking apparatus translation promotes because upsetting moment causes device to topple.
Device need realize promoting spinfunction in the time of in working order.Hoisting gear mainly is made of worm screw, worm gear, thread spindle, worm gear set and straight pin, and the rotation separating mechanism mainly is made of steel ball, last main shaft, dense planting ball retainer and gland nut.Adopt stable worm screw, the worm-drive of transmission to make the turning axle direction change 90 °.For realizing that rotatablely moving of mechanism becomes rectilinear motion, between the thread spindle on thread bush and the worm gear, adopt to be threaded, and limit its circumferencial direction with the straight pin that can only in the gathering sill of cylinder, slide and move.Connect with steel ball between thread bush and last main shaft, can realize that for point (or line) contact main shaft rotates freely between steel ball and the last main shaft, the while can be realized that off working state and thread bush separate automatically and is convenient to mechanism and locate.Between guide and last main shaft, make motion of main shaft flexible with dense planting ball retainer guiding.
In the implementation method of this device movement locus, movement locus is embodied directly on the track pad, the relative motion by trace pin and track pad has realized that device presses the desired trajectory motion then.At first directly be reflected in predetermined path of movement on the track pad by track flute profile formula, again track pad is fixed on the column frame and remains static, then trace pin is bound up on the motion platform fixing, can drive trace pin when motion platform moves by desired trajectory moves together, and slide relatively because trace pin constrains in the track groove, press the desired trajectory motion so retrained motion platform.
Compact conformation of the present invention, reliability height, the repetitive positioning accuracy height, can accurately move by movement locus, the device deflection is little, motion steadily, can satisfy the strict demand of litho machine equipment at normal temperatures, realization promoted rotation when lithographic equipment promptly overhauled in working order simultaneously, realized during off working state that the automatic disengaging of mechanism is so that accurately locate.
Description of drawings
Fig. 1 is the front view of multifreedom motion of the present invention and locating device.
Fig. 2 is the left view of multifreedom motion of the present invention and locating device.
Fig. 3 is the structural representation that promotes the rotation separating mechanism among the present invention.
Fig. 4 is track pad and a trace pin movement position graph of a relation among the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, multifreedom motion of the present invention and locating device are further described.
Shown in Fig. 1-4, this device by levelling shaft 2, flexible block 5, track pad 102 with by column frame 1, promote the supporting mechanism that rotation separating mechanism 3, guide rail 8, guide rail platform 7, motor platform 9, motion platform 12 constitute jointly and formed.Wherein, this levelling shaft 2 screws on column frame 1, accurately adjusts the adjustment platform 6 of its support by rotation levelling shaft 2; This track pad 102 is fixed on the column frame 1, and trace pin 101 then is fixed on the motion platform 12, and the last main shaft 310 of this lifting rotation separating mechanism 3 is fixed on guide rail platform 7 bottoms by gland nut 312.
As Fig. 1, this levelling shaft 2 screws on column frame 1, between levelling shaft 2 and the column frame 1 is thread connection, this levelling shaft 2 has the inner via hole external thread structure, external thread adopts the little fine thread of pitch easily to realize accurately regulating the location, accurately adjusts horizontal location and the highly location and the support adjustment platform 6 of the adjustment platform 6 of its support by rotation levelling shaft 2, on levelling shaft 2 side great circle cylinders, have the through hole of 4 φ 6 can be so that rotate levelling shaft 2.Supporting pad 4 is assemblied in levelling shaft 2 annular grooves, and its loop configuration is easy to support and is spacing.Flexible block 5 is installed and is supported on the supporting pad 4, its spherical structure makes that up adjusting platform 6 remains the sphere contact when adjusting, and its crown structure makes the adjustment platform 6 that supports thereon can utilize flexible block 5 self-deformations to play buffer action when being subjected to external impact force.When off working state was not promptly moved, figure central post framework 1, adjustment platform 6, guide rail 8, guide rail platform 7, motor platform 9 had constituted supporting mechanism jointly, and mechanism was locked and can not moves this moment.When promptly moving in working order, then constituted supporting mechanism jointly by lifting rotation separating mechanism 3, guide rail 8, guide rail platform 7, motor platform 9, this moment, multifreedom motion can be done by mechanism.This supporting mechanism is simple in structure, and bearing capacity is big, and translation in one direction is easy to implement device and separates in the mechanism of working with under the off working state, thereby has realized using under different states different supporting mechanisms.
In Fig. 2, drawbar 10 is fixing with motion platform 12, can steadily slide freely therein with linear advancement 11 clearance fit, when motion platform 12 translations, drive drawbar 10 translation in linear advancement 11, because motion platform 12 translation has forward produced upsetting moment, this moment, one end of drawbar 10 was supported in the adjustment platform 6, thereby had prevented that device from toppling.
Fig. 3 is the structural representation that promotes rotation separating mechanism 3.As shown in the figure: worm gear case 302 is provided with worm screw 303, with worm screw 303 axis normal directions on be provided with worm gear 304 and form the worm and gear transmissions, the thread spindle 305 that is connected by key with worm gear 304, between worm gear case 302 and thread spindle 305, install and be used for positioning threads axle 305 and bear the taper roll bearing 301 of axial load, the thread bush 306 that is connected with thread spindle 305 threaded engagement, with thread bush 306 tolerance fit and limit the straight pin 314 of its circumferencial direction motion, slide in the gathering sill 313 of straight pin 314 on cylinder 307, thread bush 306 is provided with can produce with last main shaft 310 realizes point (or line) contact and the steel ball 308 that separates automatically, be provided with the dense planting ball retainer 309 that allows main shaft 310 move freely between last main shaft 310 and the guide 311, last main shaft 310 uses gland nuts 312 to be fixed on the guide rail platform 7.Between described thread spindle 305 and the thread bush 306 for threaded engagement is connected, straight pin 314 restriction thread bushs 306 circumferencial directions motion simultaneously, therefore when thread spindle 305 rotated, thread bush 306 axially moved up and down along thread spindle 305.Contact for point (or line) between steel ball 308 and the last main shaft 310, therefore except that but jack-up is gone up main shaft 310 above-mentioned motions, last main shaft 310 can also rotate freely around axis, simultaneously behind thread bush 306 decline certain altitudes, last main shaft 310 can be fast and steel ball 308 disengage and be convenient to adjust platform 6 and adjust.
The course of action of this lifting rotation separating mechanism is: when lithographic equipment is in the service work state, turning handle (accompanying drawing does not show) drives worm screw 303 and rotates, through over-type worm gear worm gear 304 is rotated, thread spindle 305 is connected with worm gear 304 usefulness keys, so thread spindle 305 rotates.Between thread bush 306 and the thread spindle 305 is to be threaded, straight pin 314 can only slide in gathering sill 313 and limit the rotation of thread bush 306 circumferencial directions simultaneously, so thread bush 306 can only move up and down, by adjusting handle (accompanying drawing does not show) thus sense of rotation can make thread bush 306 do upward movement to promote steel ball 308 and go up main shaft 310, go up main shaft 310 usefulness gland nuts 312 again and be fixed on the guide rail platform 7, so guide rail platform 7 is done upward movement.Because between last main shaft 310 and the steel ball 308 is that point (or line) contacts, guide rail platform 7 can rotate back-out guide rail platform 7 after rising to the height of regulation.During off working state, counter-rotation handle (accompanying drawing does not show) descends guide rail platform 7, because guide rail platform 7 just is supported in no longer decline on the adjustment platform 6 after dropping to certain position, and the last main shaft 310 that is installed in guide rail platform 7 is that point (or line) contacts with steel ball 308, automatically break away from so can realize main shaft 310 and steel ball 308, thereby be convenient to 3 adjustment.
In the implementation method of this device movement locus, by sliding relatively in the track groove of trace pin 101 on track pad 102, can press the desired trajectory motion by implement device as shown in Figure 4.Reflection moving line track (the track groove of I → II → III → IV → V → VI) is arranged on the track pad 102.In this device, trace pin 101 usefulness screws are fixed on the movable platform 12, and trace pin 101 heads have the smooth cylindrical surface structure of protrusion, can be constrained in the track groove and slide.Track pad 102 is fixed on the column frame 1, is in stationary state.When motion platform 12 motions, drive trace pin 101 and move together, owing to being constrained in the track groove, trace pin 101 moves, so motion platform 12 is along with trace pin 101 is pressed the desired trajectory motion.At first motion platform 12 is raised along track I → II, then along II → III translation, be raised along III → IV again, then along IV → V translation, be raised along V → VI at last, thereby do not need external control signal to press the desired trajectory motion by finishing device, avoided in motion process, interfering with other parts.
Being preferred embodiment of the present invention only in sum, is not to be used for limiting practical range of the present invention.Be that all equivalences of doing according to the content of the present patent application claim change and modification, all should be technology category of the present invention.
Claims (6)
1, a kind of multifreedom motion and locating device is characterized in that: it by levelling shaft (2), flexible block (5), track pad (102) with by column frame (1), promote rotation separating mechanism (3), guide rail (8), guide rail platform (7), motor platform (9), the common supporting mechanism that constitutes of motion platform (12) and formed; Wherein, this levelling shaft (2) screws on column frame (1), accurately adjusts the adjustment platform (6) of its support by rotation levelling shaft (2); This track pad (102) is fixed on the column frame (1), and trace pin (101) then is fixed on the motion platform (12), and the last main shaft (310) of this lifting rotation separating mechanism (3) is fixed on guide rail platform (7) bottom by gland nut (312).
2, multifreedom motion according to claim 1 and locating device, it is characterized in that: this lifting rotation separating mechanism (3) is by taper roll bearing (301), worm gear case (302), worm screw (303), worm gear (304), thread spindle (305), thread bush (306), cylinder (307), steel ball (308), dense planting ball retainer (309), last main shaft (310), guide (311), gland nut (312), straight pin (314) and gathering sill (313) constitute, worm gear case (302) is provided with worm screw (303), with worm screw (303) axis normal direction on be provided with worm gear (304) and form the worm and gear transmission, the thread spindle (305) that is connected by key with worm gear (304), between worm gear case (302) and thread spindle (305), install and be used for positioning threads axle (305) and bear the taper roll bearing (301) of axial load, the thread bush (306) that is connected with thread spindle (305) threaded engagement, with thread bush (306) tolerance fit and limit the straight pin (314) of its circumferencial direction motion, slide in the gathering sill (313) of straight pin (314) on cylinder (307), thread bush (306) is provided with can produce with last main shaft (310) realizes point (or line) contact and the steel ball (308) that separates automatically, be provided with between last main shaft (310) and the guide (311) and allow main shaft (310) motion dense planting ball retainer (309) freely, last main shaft (310) passes adjustment platform (6) and uses gland nut (312) to be fixed on the guide rail platform (7).
3, multifreedom motion according to claim 1 and locating device is characterized in that: a supporting pad (4) is assemblied in levelling shaft (2) annular groove, and flexible block (5) is installed and is supported on the supporting pad (4).
4, multifreedom motion according to claim 3 and locating device is characterized in that: this flexible block (5) has spherical structure crown structure up.
5, multifreedom motion according to claim 1 and locating device is characterized in that: a drawbar (10) is fixing with motion platform (12), can steadily slide freely therein with linear advancement (11) clearance fit.
6, according to claim 1 or 2 or 3 or 4 or 5 described multifreedom motion and locating devices, it is characterized in that: this levelling shaft (2) has the inner via hole external thread structure, and external thread adopts the little fine thread of pitch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510024172 CN1658074A (en) | 2005-03-02 | 2005-03-02 | Multifreedom motion and positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510024172 CN1658074A (en) | 2005-03-02 | 2005-03-02 | Multifreedom motion and positioning device |
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| Publication Number | Publication Date |
|---|---|
| CN1658074A true CN1658074A (en) | 2005-08-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510024172 Pending CN1658074A (en) | 2005-03-02 | 2005-03-02 | Multifreedom motion and positioning device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103128628A (en) * | 2013-03-18 | 2013-06-05 | 厦门大学 | Optical element processing and detecting platform based on multi-degree-of-freedom motor |
| CN106548677A (en) * | 2017-01-23 | 2017-03-29 | 云南电网有限责任公司玉溪供电局 | A kind of universal action platform of many balls of plane that can be upper and lower safely |
| WO2020124656A1 (en) * | 2018-12-21 | 2020-06-25 | 斯坦德机器人（深圳）有限公司 | Multi-degree-of-freedom translational jacking mechanism |
| CN113864596A (en) * | 2021-08-31 | 2021-12-31 | 中国科学院西安光学精密机械研究所 | Structural deformation type leveling mechanism for theodolite and leveling theodolite system |
-
2005
- 2005-03-02 CN CN 200510024172 patent/CN1658074A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103128628A (en) * | 2013-03-18 | 2013-06-05 | 厦门大学 | Optical element processing and detecting platform based on multi-degree-of-freedom motor |
| CN103128628B (en) * | 2013-03-18 | 2015-06-10 | 厦门大学 | Optical element processing and detecting platform based on multi-degree-of-freedom motor |
| CN106548677A (en) * | 2017-01-23 | 2017-03-29 | 云南电网有限责任公司玉溪供电局 | A kind of universal action platform of many balls of plane that can be upper and lower safely |
| CN106548677B (en) * | 2017-01-23 | 2023-06-13 | 云南电网有限责任公司玉溪供电局 | Planar multi-ball universal action platform capable of safely moving up and down |
| WO2020124656A1 (en) * | 2018-12-21 | 2020-06-25 | 斯坦德机器人（深圳）有限公司 | Multi-degree-of-freedom translational jacking mechanism |
| CN113864596A (en) * | 2021-08-31 | 2021-12-31 | 中国科学院西安光学精密机械研究所 | Structural deformation type leveling mechanism for theodolite and leveling theodolite system |
| CN113864596B (en) * | 2021-08-31 | 2022-08-19 | 中国科学院西安光学精密机械研究所 | Structural deformation type leveling mechanism for theodolite and leveling theodolite system |
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