CN113555197A - Moving magnetic steel type self-driven magnetic suspension guide rail device and control method thereof - Google Patents
Moving magnetic steel type self-driven magnetic suspension guide rail device and control method thereof Download PDFInfo
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- CN113555197A CN113555197A CN202110863862.7A CN202110863862A CN113555197A CN 113555197 A CN113555197 A CN 113555197A CN 202110863862 A CN202110863862 A CN 202110863862A CN 113555197 A CN113555197 A CN 113555197A
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000002436 steel type Substances 0.000 title claims abstract description 22
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- 238000000429 assembly Methods 0.000 claims abstract description 34
- 238000004804 winding Methods 0.000 claims abstract description 18
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0451—Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0472—Active magnetic bearings for linear movement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/30—Fastening or clamping coils, windings, or parts thereof together; Fastening or mounting coils or windings on core, casing, or other support
Abstract
A moving magnetic steel type self-driven magnetic suspension guide rail device and a control method thereof belong to the technical field of high-end equipment. The four guide sleeve supporting frames are combined to form a square sleeve, I-shaped electromagnets are packaged in the middle of each guide sleeve supporting frame, and the permanent magnets are packaged in the guide sleeve supporting frames positioned above the permanent magnets; the guide shaft supporting frame is a cuboid frame, and a plurality of E-shaped assemblies are packaged on four side surfaces of the guide shaft supporting frame along the length direction; the plurality of E-shaped components packaged on the upper side surface and the lower side surface of the guide shaft supporting frame are symmetrically arranged, the plurality of E-shaped components packaged on the left side surface and the right side surface of the guide shaft supporting frame are symmetrically arranged, the plurality of E-shaped components packaged on the four side surfaces of the guide shaft supporting frame and the I-shaped electromagnets packaged in the middle of the four guide sleeve supporting frames are respectively arranged oppositely, the coil winding is packaged on the upper side of the guide shaft supporting frame and located on one side of the E-shaped components, and the coil winding and the permanent magnet are arranged oppositely. The invention is used in ultra-precise system.
Description
Technical Field
The invention belongs to the technical field of high-end equipment, and particularly relates to a moving magnetic steel type self-driven magnetic suspension guide rail device and a control method thereof.
Background
With the development of scientific research and industry, there is an increasing demand for high-precision semiconductor wafers, precision optical elements, precision molds, micro parts, and microstructures. The precision level required by the products is higher and higher, and the development of ultra-precision machining technology, particularly ultra-precision motion platforms, is greatly stimulated. In order to realize the production with high performance, high integration degree, high efficiency and low cost, all IC equipment manufacturers in the world increase research and development investment and develop a new generation of high-speed and high-precision ultra-precise positioning motion platform. The guide rail is used as a core component of the ultra-precise motion platform, and the performance of the guide rail is closely related to the performance of the ultra-precise motion platform. Therefore, the design and development of high-performance guide rails are of great significance.
The air-float guide rail is a form of using air as a support, and compared with the traditional guide rail, the air-float guide rail has the advantages of no contact wear and no mechanical friction in the working process, and can realize the positioning movement with higher precision, so that the air-float guide rail is widely applied to an ultra-precision movement system at present. However, with the improvement of the performance requirement of the linear guide rail by the precision motion platform, the air-floating guide rail has the problems of air gap adjustment lag, difficult control, external interference facing, slow response speed, difficulty in ensuring high rigidity and straightness of the guide rail, high requirement on machining precision, incapability of being used in a vacuum operation environment and the like, and thus cannot meet the requirement of the high-performance guide rail.
The magnetic suspension guide rail is a novel structure of a precision positioning workbench, and has the advantages of no contact wear, no mechanical friction, low power consumption, low cost, long service life, low maintenance cost and the like in the working process compared with the traditional guide rail; compared with an air floatation guide rail, the air floatation guide rail has the advantages of high response speed, high control precision, interference resistance, capability of actively adjusting the gap, high rigidity, good straightness and suitability for occasions such as a vacuum working environment, a high-cleanliness environment and the like. Therefore, high-performance and high-rigidity magnetic suspension guide rails are gradually applied to the field of high-end equipment with expected superiority.
The invention patent application with the publication number of CN110524500A, the publication number of 2019, 12 and 03, and the name of 'magnetic suspension guide rail motion platform' explains the mechanical structure and the installation mode of the motion platform, and realizes the multi-degree-of-freedom adjustment of the motion platform by introducing the gravity compensation device to perform suspension support on guide rails with other degrees of freedom. The magnetic suspension guide rail is a core component part of a precision motion platform, belongs to an ultra-precision traditional part, and is more diversified in application occasions compared with a magnetic suspension motion platform.
The invention discloses a patent application with publication number CN113059365A, publication number 2021, 07/02 and name 'a side-hung machine tool magnetic suspension guide rail', discloses a mechanical structure and an installation mode of the magnetic suspension guide rail on a side-hung machine tool, and solves the problem of poor longitudinal installation strength of the traditional magnetic suspension guide rail while ensuring the operation precision of the machine tool. The magnetic suspension guide rail mentioned in the patent application of the invention utilizes attraction force between electromagnets as a power source of the guide rail to play a role in driving and guiding, belongs to the application of the magnetic suspension technical principle in special scenes, and is not suitable for being applied to the technical field of high-end equipment as a transmission mechanism product.
The invention patent application with the publication number of CN111571242A and the publication date of 2020, 08 and 25 and the name of 'active magnetic suspension guide rail platform and control method' designs the mechanical structure of the guide rail platform by means of the magnetic suspension technology to realize the purposes of magnetic suspension guiding and magnetic suspension bearing. But still has the following disadvantages: the sensors are only arranged in the supporting direction, the suspension gaps on the two sides of the sliding box are not controllable, and the straightness of the guide rail cannot be guaranteed; the strength of a bracket bearing the electromagnet in a limited space is difficult to ensure, and the problem of short service life exists; the sensor and the coil are both arranged on the rotor, an additional cable auxiliary mechanism is needed, the precision of gap adjustment is limited, and the robustness of the rigidity of the guide rail is difficult to ensure.
Disclosure of Invention
The invention aims to provide a moving magnetic steel type self-driven magnetic suspension guide rail device and a control method thereof, aiming at solving the problems that the existing high-performance guide rail cannot be self-driven, cannot actively adjust the gap with multiple degrees of freedom and is difficult to ensure high rigidity and straightness.
The moving magnetic steel type self-driven magnetic suspension guide rail device is an ultra-precise transmission mechanism based on a magnetic suspension technology, the guide rail gap is actively adjusted on the basis of realizing the self-driving of the guide rail, the micro-displacement adjustment of multiple degrees of freedom can be realized on the basis of ensuring that the magnetic suspension guide rail (a guide shaft and a guide sleeve) has high rigidity and good straightness, and the requirements of the current ultra-precise motion platform on high-performance and multi-scene application guide rails can be met.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the invention relates to a moving magnetic steel type self-driven magnetic suspension guide rail device, which comprises a guide sleeve and a guide shaft; the guide sleeve is sleeved on the guide shaft; the guide sleeve comprises a permanent magnet, four guide sleeve supporting frames and four I-shaped electromagnets; the guide shaft comprises a guide shaft supporting frame, a coil winding and a plurality of E-shaped components; each E-shaped assembly comprises a primary coil, an induction coil, a bipolar electromagnet, an eddy current sensor and two Hall elements;
the four guide sleeve supporting frames are combined to form a square sleeve, I-shaped electromagnets are packaged in the middle of each guide sleeve supporting frame respectively, the four I-shaped electromagnets are arranged along the length direction of the guide shaft, and the permanent magnet is packaged in the guide sleeve supporting frame above and positioned on one side of each I-shaped electromagnet;
the guide shaft supporting frame is a cuboid frame, and a plurality of E-shaped assemblies are packaged on four side surfaces of the guide shaft supporting frame along the length direction; the plurality of E-shaped components packaged on the upper side surface and the lower side surface of the guide shaft supporting frame are symmetrically arranged, the plurality of E-shaped components packaged on the left side surface and the right side surface of the guide shaft supporting frame are symmetrically arranged, the plurality of E-shaped components packaged on the four side surfaces of the guide shaft supporting frame and the I-shaped electromagnets packaged in the middle of the four guide sleeve supporting frames are respectively arranged oppositely, the coil winding is packaged on the upper side of the guide shaft supporting frame and positioned on one side of the E-shaped components, and the coil winding is arranged oppositely to the permanent magnet;
the two Hall elements are respectively arranged at the center of two-stage pole faces of the bipolar electromagnet, the induction coil is wound on the peripheral side face of the middle tooth of the bipolar electromagnet, the primary coil is wound on the peripheral side face of the induction coil and is concentric with the induction coil, and the eddy current sensor is fixed at the center of the middle tooth of the bipolar electromagnet and used for measuring the suspension gap.
The invention discloses a control method of a moving magnetic steel type self-driven magnetic suspension guide rail, which comprises the following steps:
the Z freedom degree of the guide sleeve can be adjusted by adjusting the current of the primary coils of the E-shaped assemblies encapsulated at the upper side and the lower side of the guide shaft and requiring the current of the primary coils of the E-shaped assemblies at the same side to be the same;
the current of the primary coils of the E-shaped assemblies encapsulated on the left side and the right side of the guide shaft is regulated, the current of the primary coils of the E-shaped assemblies on the same side is required to be the same, and the Y degree of freedom of the guide sleeve can be regulated;
the current of the primary coils of the E-shaped assemblies encapsulated on the upper side and the lower side of the guide shaft is adjusted, so that the degree of freedom of the guide sleeve Ry can be adjusted; the method specifically comprises the following steps: the current of two adjacent primary coils in the primary coils of the E-shaped assemblies above the guide shaft near the guide sleeve is required to be different, the current of two adjacent primary coils in the primary coils of the E-shaped assemblies below the guide shaft is required to be different, the large current value of the primary coil above is the same as that of the primary coil below, the small current value of the primary coil above is the same as that of the primary coil below, the large current value of the primary coil above is opposite to that of the small current value of the primary coil below, and the small current value of the primary coil above is opposite to that of the large current value of the primary coil below;
the current of the primary coils of the E-shaped assemblies encapsulated on the left side and the right side of the guide shaft is adjusted, so that the degree of freedom of the guide sleeve Rz can be adjusted; the method specifically comprises the following steps: the current of two adjacent primary coils in the primary coils of the E-shaped assemblies on the left side of the guide shaft near the guide sleeve is required to be different, the current of two adjacent primary coils in the primary coils of the E-shaped assemblies on the right side of the guide shaft is required to be different, the large current value of the primary coil on the left side is the same as that of the primary coil on the right side, the small current value of the primary coil on the left side is the same as that of the primary coil on the right side, the primary coil on the left side with the large current is arranged opposite to that of the primary coil on the right side, and the primary coil on the left side with the small current is arranged opposite to that of the primary coil on the right side.
Compared with the prior art, the invention has the beneficial effects that: the moving magnetic steel type self-driven magnetic suspension guide rail device disclosed by the invention can realize active clearance adjustment on the basis of realizing self-driving of the guide sleeve, ensures high rigidity and straightness of the magnetic suspension guide rail, can realize multi-degree-of-freedom adjustment of the guide sleeve relative to the guide shaft, realizes micro-displacement adjustment of the guide sleeve on multiple degrees of freedom, and has the advantages of simple and compact structure, no cable and contact of the guide sleeve, high positioning precision, high response speed, high cleanliness of a working field, diversified working occasions and the like. According to the control method, the magnetic flux signal is acquired in a mode of combining the induction coil and the Hall element, the eddy current sensor measures the suspension gap, the accuracy and the high efficiency of the acquired signal are guaranteed, the suspension gap of the magnetic suspension guide rail is controlled in a magnetic flux feedback mode, the control accuracy of the magnetic suspension guide rail can be improved, and the performance index can be improved. The invention is applied to the ultra-precise motion system which needs to give consideration to high response speed, high positioning precision, high cleanliness or vacuum working environment.
Drawings
FIG. 1 is a schematic structural diagram of a moving-magnet steel type self-driven magnetic levitation guide rail device provided by the present invention;
FIG. 2 is a schematic cross-sectional view of a guide sleeve of a moving magnetic steel type self-driven magnetic levitation guide rail device provided by the invention;
FIG. 3 is a schematic view of a guide shaft of a moving-magnet steel type self-driven magnetic levitation guide rail device provided by the present invention;
FIG. 4 is a schematic structural diagram of an E-shaped component of a moving-magnet-steel self-driven magnetic-levitation guide rail device provided by the invention;
fig. 5 is a schematic diagram of a control scheme of a moving magnetic steel type self-driven magnetic levitation guide rail device provided by the invention.
In the figure: 1-guide sleeve; 1-1-a first guide sleeve support frame; 1-2-a second guide sleeve support frame; 1-3-a third guide sleeve support frame; 1-4-a fourth guide sleeve support frame; 1-5-permanent magnet; 1-6-type I electromagnet; 2-a guide shaft; 2-1-a guide shaft support frame; a 2-2-E type component; 2-2-1-primary coil; 2-2-2-induction coil; 2-2-3-bipolar electromagnet; 2-2-4-eddy current sensors; 2-2-5-hall element; 2-3-coil winding; and 3-water cooling plate.
Detailed Description
The specific structure, operation and control method of the present invention will be further described in detail with reference to the accompanying drawings:
the first embodiment is as follows: as shown in fig. 1-4, the present embodiment discloses a moving magnet steel type self-driven magnetic levitation guide rail device, which includes a guide sleeve 1 and a guide shaft 2; the guide sleeve 1 is sleeved on the guide shaft 2; the guide sleeve 1 comprises permanent magnets 1-5, four guide sleeve supporting frames and four I-shaped electromagnets 1-6; the guide shaft 2 comprises a guide shaft supporting frame 2-1, a coil winding 2-3 and a plurality of E-shaped components 2-2; each E-shaped component 2-2 comprises a primary coil 2-2-1, an induction coil 2-2-2, a bipolar electromagnet 2-2-3, an eddy current sensor 2-2-4 and two Hall elements 2-2-5;
the four guide sleeve supporting frames are combined to form a square sleeve, I-shaped electromagnets 1-6 are respectively packaged in the middle of the four guide sleeve supporting frames, the four I-shaped electromagnets 1-6 are all arranged along the length direction of the guide shaft 2, and the permanent magnets 1-5 are packaged in the guide sleeve supporting frames positioned above and positioned on one sides of the I-shaped electromagnets 1-6 (and the permanent magnets 1-5 are symmetrically arranged front and back);
the guide shaft supporting frame 2-1 is a cuboid frame, and a plurality of E-shaped assemblies 2-2 are packaged on four side surfaces of the guide shaft supporting frame 2-1 along the length direction; the multiple E-shaped components 2-2 packaged on the upper side surface and the lower side surface of the guide shaft supporting frame 2-1 are symmetrically arranged, the multiple E-shaped components 2-2 packaged on the left side surface and the right side surface of the guide shaft supporting frame 2-1 are symmetrically arranged, the multiple E-shaped components 2-2 packaged on the four side surfaces of the guide shaft supporting frame 2-1 and the I-shaped electromagnets 1-6 packaged in the middle parts of the four guide sleeve supporting frames are respectively arranged oppositely, the coil winding 2-3 is packaged on the upper side of the guide shaft supporting frame 2-1 and positioned on one side of the E-shaped components 2-2, and the coil winding 2-3 is arranged oppositely to the permanent magnets 1-5;
the two Hall elements 2-2-5 are respectively arranged at the center of two-stage pole faces of the bipolar electromagnet 2-2-3 (the bipolar electromagnet 2-2-3 is E-shaped), the induction coil 2-2-2 is wound on the peripheral side face of a middle tooth of the bipolar electromagnet 2-2-3, the primary coil 2-2-1 is wound on the peripheral side face of the induction coil 2-2-2 and is concentric with the induction coil 2-2-2, and the eddy current sensor 2-2-4 is fixed at the center of the middle tooth of the bipolar electromagnet 2-2-3 and used for measuring a suspension gap.
Further, as shown in fig. 2, the four guide sleeve support frames are a first guide sleeve support frame 1-1, a second guide sleeve support frame 1-2, a third guide sleeve support frame 1-3 and a fourth guide sleeve support frame 1-4, respectively; the first guide sleeve supporting frame 1-1 and the third guide sleeve supporting frame 1-3 are arranged oppositely up and down, the second guide sleeve supporting frame 1-2 and the fourth guide sleeve supporting frame 1-4 are arranged oppositely left and right, and the permanent magnet 1-5 is packaged on the first supporting frame 1-1 and is positioned on one side of the I-shaped electromagnet 1-6.
Further, as shown in fig. 1 and 3, the moving magnetic steel type self-driven magnetic levitation guide rail device further includes a water-cooling plate 3; the water cooling plate 3 is packaged right above the winding coils 2-3, and cooling of the winding coils 2-3 is achieved.
The second embodiment is as follows: as shown in fig. 1 to 4, the present embodiment discloses a control method for implementing a moving-magnetic-steel self-driven magnetic-levitation guide rail by using a moving-magnetic-steel self-driven magnetic-levitation guide rail device according to the specific embodiment, where the control method includes:
the adjustment of the degree of freedom of the guide sleeve 1Z can be realized by adjusting the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 encapsulated on the upper side and the lower side of the guide shaft 2 and requiring that the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 on the same side is the same (the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 on the upper side and the lower side are different);
the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 encapsulated on the left side and the right side of the guide shaft 2 is adjusted, the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 on the same side is required to be the same (the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 on the left side and the right side are different), and the Y degree of freedom of the guide sleeve 1 can be adjusted;
the current of the primary coils 2-2-1 of the E-shaped components 2-2 encapsulated on the upper side and the lower side of the guide shaft 2 is adjusted, so that the degree of freedom of the guide sleeve 1Ry can be adjusted; the method specifically comprises the following steps: the current of two adjacent primary coils 2-2-1 in the primary coils 2-2-1 of the E-shaped assemblies 2-2 above the guide shaft 2 near the guide sleeve 1 is required to be different in magnitude, the current of two adjacent primary coils 2-2-1 in the primary coils 2-2-1 of the E-shaped assemblies 2-2 below the guide shaft 2 is different in magnitude, the high-current value of the primary coil 2-2-1 above is the same as that of the primary coil 2-2-1 below, the low-current value of the primary coil 2-2-1 above is the same as that of the primary coil 2-2-1 below, the primary coil 2-2-1 above with high current is arranged opposite to that of the primary coil 2-2-1 below, the primary coil 2-2-1 with small current positioned above is arranged opposite to the primary coil 2-2-1 with large current positioned below;
the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 encapsulated on the left side and the right side of the guide shaft 2 is adjusted, so that the degree of freedom of the guide sleeve 1Rz can be adjusted; the method specifically comprises the following steps: the current of two adjacent primary coils 2-2-1 in the primary coils 2-2-1 of the plurality of E-shaped assemblies 2-2 positioned on the left side of the guide shaft 2 near the guide sleeve 1 is required to be different in magnitude, the current of two adjacent primary coils 2-2-1 in the primary coils 2-2-1 of the plurality of E-shaped assemblies 2-2 positioned on the right side of the guide shaft 2 is different in magnitude, the large current value of the primary coil 2-2-1 positioned on the left side is the same as that of the primary coil 2-2-1 positioned on the right side, the small current value of the primary coil 2-2-1 positioned on the left side is the same as that of the primary coil 2-2-1 positioned on the right side, the primary coil 2-2-1 positioned on the left side with the small current primary coil 2-2-1 positioned on the right side is arranged opposite to each other, the small current primary coil 2-2-1 on the left side is arranged opposite to the large current primary coil 2-2-1 on the right side.
In conclusion, the primary coil 2-2-1 of the middle tooth of the bipolar electromagnet 2-2-3 of the E-shaped component 2-2 on the guide shaft 2 is electrified, attraction force is generated between the bipolar electromagnet 2-2-3 and the I-shaped electromagnet 1-6, and therefore the guide sleeve 1 is suspended; the accurate control of the guide sleeve 1 on the Y freedom degree, the Z freedom degree, the Ry freedom degree and the Rz freedom degree of the guide shaft 2 is realized by adjusting the current of the primary coils 2-2-1 of the E-shaped assemblies 2-2 on the four sides of the guide shaft 2;
the coil winding 2-3 on the guide shaft 2 is electrified, the coil winding 2-3 can generate a movable traveling wave magnetic field after being electrified, the traveling wave magnetic field makes linear motion along the direction of X degree of freedom, the magnetic field generated by the permanent magnet 1-5 on the guide sleeve 1 interacts with the traveling wave magnetic field to generate traction force, and the traction force drives the guide sleeve 1 to make linear motion along the direction of the traveling wave along the direction of X degree of freedom on the guide shaft 2, so that the self-driving of the magnetic suspension guide sleeve 1 is realized.
Further, as shown in fig. 1 and 4, a magnetic flux signal is acquired by combining the induction coil 2-2-2 and the hall element 2-2-5 (a high-frequency induction coil and a low-frequency hall element), the eddy current sensor 2-2-4 measures a suspension gap, and the suspension gap of the magnetic suspension guide sleeve 1 is controlled in a magnetic flux feedback manner with high precision.
Furthermore, a grating ruler or a laser interferometer is used for collecting information in the movement direction, and the performance of the X degree of freedom in the movement direction is controlled in a current feedback mode.
Further, as shown in fig. 5, the levitation gap is adjusted based on a magnetic flux feedback manner, where Φ is shownG,refRepresenting the desired magnetic flux, [ phi ]GRepresenting the magnetic flux output by the magnetic levitation guideway system, S representing the differentiator, KP(g) For primary gain, a factor, K, representing the gap dependence of the primary output voltages(g) For the gain of the induction coil, the factor, K, representing the gap dependence of the induction coil output voltageH(g) A coefficient representing the output voltage of the Hall element in relation to the gap is taken as the gain of the Hall element, u represents the output voltage of the primary coilsRepresenting the output voltage of the induction coil, uHIndicating the output voltage of the Hall element, CSIndicating induction coil controllers, CHIndicating Hall-element controllers, G-metersShowing a control object, and 1/s shows an integrator; the invention relates to a magnetic suspension guide rail gap control method which consists of three signal loops. Wherein, the signal loop 1 is a magnetic flux forward control channel, the signal flow is 1, and the desired magnetic flux phiG,refThrough a differentiator S and through a primary gain KP(g) The output voltage u acts on the control object G and is integrated through the integrator 1/s to obtain the magnetic flux phi output by the magnetic suspension guide rail systemGFurther generating magnetic force to adjust the gap; the signal loop 2 is a high-frequency regulation channel, the signal flow 2 of which is the desired magnetic flux phiG,refThrough a differentiator S and through an induction coil gain Ks(g) Then through an induction coil controller CSThe output voltage u acts on the control object G and is integrated by the integrator 1/s to obtain the magnetic flux phi output by the systemGMeanwhile, a feedback loop is formed inside the induction coil, and the signal flow is expressed as: the output signal of the controlled object G passes through the induction coil gain Ks(g) Output induction coil voltage usForming a magnetic flux feedback inside the induction coil, wherein the channel mainly acts on high-frequency signals; the signal circuit 3 is a low-frequency flux-regulating channel, the signal flow of which is the desired magnetic flux phiG,refThrough a Hall element gain KH(g) Output voltage, and pass through Hall element controller CHThe output voltage u acts on the control object G and is integrated by the integrator 1/s to obtain the magnetic flux phi output by the magnetic suspension guide rail systemGMeanwhile, a feedback loop is formed inside the Hall element, and the signal flow of the feedback loop is expressed as follows: the signal flowing out after the output of the control object G passes through the integrator 1/s passes through the Hall element gain K againH(g) Output Hall element voltage uHForming feedback inside the Hall element, wherein the channel mainly processes low-frequency signals; the signal loop 2 and the signal loop 3 jointly form a full-frequency-band magnetic flux feedback adjusting channel, comprehensive magnetic flux information is provided for forward magnetic flux control of the signal loop 1, accurate adjustment of magnetic levitation force of the magnetic levitation guide rail can be achieved through the magnetic flux control, high-precision real-time control of a gap between the magnetic levitation guide sleeve and the guide shaft is further achieved, and robustness of rigidity of the magnetic levitation guide rail is guaranteed.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention, and the present invention is not limited thereto, and any person skilled in the art can substitute or change the technical solution of the present invention and its inventive concept within the technical scope of the present invention.
Claims (6)
1. A moving magnetic steel type self-driven magnetic suspension guide rail device comprises a guide sleeve (1) and a guide shaft (2); the guide sleeve (1) is sleeved on the guide shaft (2); the method is characterized in that: the guide sleeve (1) comprises permanent magnets (1-5), four guide sleeve supporting frames and four I-shaped electromagnets (1-6); the guide shaft (2) comprises a guide shaft supporting frame (2-1), a coil winding (2-3) and a plurality of E-shaped components (2-2); each E-shaped component (2-2) comprises a primary coil (2-2-1), an induction coil (2-2-2), a bipolar electromagnet (2-2-3), an eddy current sensor (2-2-4) and two Hall elements (2-2-5);
the four guide sleeve supporting frames are combined to form a square sleeve, I-shaped electromagnets (1-6) are respectively packaged in the middle of each guide sleeve supporting frame, the four I-shaped electromagnets (1-6) are all arranged along the length direction of the guide shaft (2), and the permanent magnets (1-5) are packaged in the guide sleeve supporting frames positioned above and positioned on one sides of the I-shaped electromagnets (1-6);
the guide shaft supporting frame (2-1) is a cuboid frame, and a plurality of E-shaped assemblies (2-2) are packaged on four side surfaces of the guide shaft supporting frame (2-1) along the length direction; the E-shaped components (2-2) encapsulated on the upper side surface and the lower side surface of the guide shaft supporting frame (2-1) are symmetrically arranged, the E-shaped components (2-2) encapsulated on the left side surface and the right side surface of the guide shaft supporting frame (2-1) are symmetrically arranged, the E-shaped components (2-2) encapsulated on the four side surfaces of the guide shaft supporting frame (2-1) and the I-shaped electromagnets (1-6) encapsulated in the middle parts of the four guide sleeve supporting frames are respectively arranged oppositely, the coil winding (2-3) is encapsulated on the upper side of the guide shaft supporting frame (2-1) and positioned on one side of the E-shaped components (2-2), and the coil winding (2-3) is arranged oppositely to the permanent magnet (1-5);
the two Hall elements (2-2-5) are respectively arranged at the centers of two pole faces of the bipolar electromagnet (2-2-3), the induction coil (2-2-2) is wound on the peripheral side face of a middle tooth of the bipolar electromagnet (2-2-3), the primary coil (2-2-1) is wound on the peripheral side face of the induction coil (2-2-2) and is concentric with the induction coil (2-2-2), and the eddy current sensor (2-2-4) is fixed at the center of the middle tooth of the bipolar electromagnet (2-2-3) and used for measuring a suspension gap.
2. The moving magnet steel type self-driven magnetic suspension guide rail device according to claim 1, characterized in that: the four guide sleeve supporting frames are respectively a first guide sleeve supporting frame (1-1), a second guide sleeve supporting frame (1-2), a third guide sleeve supporting frame (1-3) and a fourth guide sleeve supporting frame (1-4); the first guide sleeve supporting frame (1-1) and the third guide sleeve supporting frame (1-3) are arranged oppositely up and down, the second guide sleeve supporting frame (1-2) and the fourth guide sleeve supporting frame (1-4) are arranged oppositely left and right, and the permanent magnet (1-5) is packaged on the first supporting frame (1-1) and is positioned on one side of the I-shaped electromagnet (1-6).
3. The moving magnet steel type self-driven magnetic suspension guide rail device according to claim 1, characterized in that: the moving magnetic steel type self-driven magnetic suspension guide rail device also comprises a water cooling plate (3); the water cooling plate (3) is packaged right above the winding coils (2-3) to cool the winding coils (2-3).
4. A control method for realizing a moving magnetic steel type self-driven magnetic suspension guide rail by using the moving magnetic steel type self-driven magnetic suspension guide rail device of any one of claims 1 to 3, which is characterized in that: the control method comprises the following steps:
the Z degree of freedom of the guide sleeve (1) can be adjusted by adjusting the current of the primary coils (2-2-1) of the E-shaped assemblies (2-2) encapsulated at the upper side and the lower side of the guide shaft (2) and requiring the current of the primary coils (2-2-1) of the E-shaped assemblies (2-2) at the same side to be the same;
the current of the primary coils (2-2-1) of the E-shaped components (2-2) encapsulated at the left side and the right side of the guide shaft (2) is adjusted, the current of the primary coils (2-2-1) of the E-shaped components (2-2) at the same side is required to be the same, and the Y degree of freedom of the guide sleeve (1) can be adjusted;
the current of primary coils (2-2-1) of a plurality of E-shaped assemblies (2-2) encapsulated on the upper side and the lower side of a guide shaft (2) is adjusted, so that the Ry degree of freedom of the guide sleeve (1) can be adjusted; the method specifically comprises the following steps: the current of two adjacent primary coils (2-2-1) in the primary coils (2-2-1) of a plurality of E-shaped assemblies (2-2) above the guide shaft (2) near the guide sleeve (1) is required to be different in magnitude, the current of two adjacent primary coils (2-2-1) in the primary coils (2-2-1) of a plurality of E-shaped assemblies (2-2) below the guide shaft (2) is required to be different in magnitude, the high-current value of the primary coil (2-2-1) above is required to be the same as that of the primary coil (2-2-1) below, the low-current value of the primary coil (2-2-1) above is required to be the same as that of the primary coil (2-2-1) below, the primary coil (2-2-1) with high current positioned above is arranged opposite to the primary coil (2-2-1) with low current positioned below, and the primary coil (2-2-1) with low current positioned above is arranged opposite to the primary coil (2-2-1) with high current positioned below;
the current of primary coils (2-2-1) of a plurality of E-shaped assemblies (2-2) encapsulated at the left side and the right side of the guide shaft (2) is adjusted, so that the Rz degree of freedom of the guide sleeve (1) can be adjusted; the method specifically comprises the following steps: the current of two adjacent primary coils (2-2-1) in the primary coils (2-2-1) of a plurality of E-shaped assemblies (2-2) positioned on the left side of the guide shaft (2) near the guide sleeve (1) is required to be different in magnitude, the current of two adjacent primary coils (2-2-1) in the primary coils (2-2-1) of a plurality of E-shaped assemblies (2-2) positioned on the right side of the guide shaft (2) is required to be different in magnitude, the large current value of the primary coil (2-2-1) positioned on the left side is required to be the same as that of the primary coil (2-2-1) positioned on the right side, the small current value of the primary coil (2-2-1) positioned on the left side is required to be the same as that of the primary coil (2-2-1) positioned on the right side, the primary coil (2-2-1) with high current on the left side is arranged opposite to the primary coil (2-2-1) with low current on the right side, and the primary coil (2-2-1) with low current on the left side is arranged opposite to the primary coil (2-2-1) with high current on the right side.
5. The control method of the moving magnetic steel type self-driven magnetic suspension guide rail according to claim 4, characterized in that: the magnetic flux signal is collected by the combination of the induction coil (2-2-2) and the Hall element (2-2-5), the eddy current sensor (2-2-4) measures the suspension gap, and the suspension gap of the magnetic suspension guide sleeve (1) is controlled in a magnetic flux feedback mode with high precision.
6. The control method of the moving coil type self-driven magnetic suspension guide rail as claimed in claim 4 or 5, wherein a grating ruler or a laser interferometer is used to collect information of the moving direction, and the performance of the moving direction of the X degree of freedom is controlled by a current feedback mode.
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| CN1415456A (en) * | 2002-08-30 | 2003-05-07 | 中国科学院长春光学精密机械与物理研究所 | Magnetic suspension method for guide rail with ultra precise and micro displacement |
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| CN1415456A (en) * | 2002-08-30 | 2003-05-07 | 中国科学院长春光学精密机械与物理研究所 | Magnetic suspension method for guide rail with ultra precise and micro displacement |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| CN102501224A (en) * | 2011-09-30 | 2012-06-20 | 中南大学 | Planar maglev linear-motion platform |
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