CN1415456A - Magnetic suspension method for guide rail with ultra precise and micro displacement - Google Patents
Magnetic suspension method for guide rail with ultra precise and micro displacement Download PDFInfo
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- CN1415456A CN1415456A CN 02132839 CN02132839A CN1415456A CN 1415456 A CN1415456 A CN 1415456A CN 02132839 CN02132839 CN 02132839 CN 02132839 A CN02132839 A CN 02132839A CN 1415456 A CN1415456 A CN 1415456A
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Abstract
A magnetic levitation method for ultraprecise microdisplacement track features that the magnetically levitating coils are controlled to levitate, making the microfeeding platform be levitated above the track, and a control system can drive the platform to move ultraprecisely along the track for linear microfeeding. Its apparatus is composed of the primary and secondary windings of linear motor, guide track, microfeeding platform, base magnetically levitating coil, supporter, control computer, power amplifiers of motor and said coil, controller and air gap sensor. Its advantages are simple and compact structure, and high effect.
Description
Technical field: the present invention relates to precision, ultraprecise processing and manufacturing equipment, relate in particular to a kind of Precision Machining that can satisfy industry high-new technology productses such as microelectronics, IT requires and super clean manufacturing environment requires ultraprecise micrometric displacement magnetic suspension method for guide rail and device thereof.
Background technology: in the manufacturing field of industry products such as microelectronics, IT, the traditional scheme that the feed mechanism that uses on various precisions, the ultraprecise processing and manufacturing equipment generally all adopts rotating servo motor driving, precision ball screw transmission and rail plate to support, electric rotating machine drives the guide rail platform by leading screw and does feed motion.Owing to need many intermediate links such as shaft coupling, leading screw, nut, guide rail (being workbench) from motor to the guide rail platform, not only strengthened the inertia mass of feed mechanism, influenced mechanism's response frequency, reduced the feed speed and the acceleration of mechanism; And to finish startup in mechanism, when adding action such as (subtracting) speed, counter-rotating and parking, strain, friction, connection gap and backlass etc. that intermediate link produces can cause the hysteresis and the nonlinearity erron of feed motion.So the traditional scheme feed accuracy is lower, machining period is longer, makes equipment can not satisfy index request to processing work.Since the nineties in 20th century, occurred directly driving the mode that electric rotating machine adds lead screw transmission that replaces, driven the guide rail platform and do feed motion with linear electric motors.All middle transmissions that the application of linear electric motors has been cancelled between driving source and the workbench connect link, have realized the zero transmission of mechanism, have overcome the major defect that traditional feeding scheme exists, and can improve the feed accuracy of mechanism.But owing to still there is friction between the rail plate pair, friction can cause the wearing and tearing of guideway, thereby reduces the precision of feed mechanism gradually.And friction can produce metallic dust, and this utmost point is harmful to the performance and the quality of microelectronic product such as semiconductor components and devices.Therefore, many microelectronics, IT product require to finish processing and fabricating under super clean environment, and machining area has very strict standard to the content of metallic dust and other subparticle.So, because there is friction, more than two types feed mechanism all can not directly satisfy super clean production environment requirement.Moreover the existence of frictional damping can reduce the response frequency of mechanism, influences the feed accuracy of mechanism.
The content of invention: the objective of the invention is to solve the friction between background technology middle guide pair, the feed mechanism precision is low, the little problem of rigidity between guideway, the present invention will make feed mechanism not have metallic dust and grease contamination in order to achieve the above object, improve little feed accuracy of mechanism effectively, make mechanism satisfy the requirement of super clean production environment and the requirement of ultraprecise machining accuracy, the present invention will provide a kind of ultraprecise micrometric displacement magnetic suspension method for guide rail and device thereof for this reason.
Set forth method of the present invention below:
(1), at first utilize two coils to pass to enough big electric current simultaneously, to between coil and guide rail tapered plane, produce the two strand electromagnetic attractions vertical with tapered plane, electromagnetic attraction can be decomposed into the component of vertical and horizontal both direction, and making a concerted effort of vertical direction component is required magnetic suspension force; (2), utilize magnetic suspension force that platform and the parts that are fixedly connected are with it suspended again; (3), when magnetic suspension force and platform, when fixed connecting part gross weight and plus load sum equate with it, platform stable is suspended on the guide rail, and makes the stable air gap ε of maintenance between coil and the guide rail tapered plane; (4), when being subjected to the interference of extraneous power, air gap ε between coil and the guide rail tapered plane changes, utilize the air gap sensor to have the characteristic that output current (or voltage) size and the size of air gap become be similar to the direct proportion linear relationship within the specific limits, export the electric current of variation by the air gap sensor; (5), utilize the electric current of output variation by the processing of controller and power amplifier and the input current of amplification adjustment coil, thereby change the electromagnetic attraction that coil produces, make the vertical component of electromagnetic attraction reach balance again with gravity and applied force with joint efforts, make the air gap of variation return to original size, platform is adjusted rapidly the levitation position when getting back to original balance; (6), utilize electromagnetic attraction to decompose and under ideal state, answer equal and opposite in direction in two components of horizontal direction, the characteristic that direction is opposite, when horizontal component differs in size, platform produces and deflects, air gap changes between coil and the guide rail tapered plane at this moment, the gap, one side that electromagnetic attraction is little becomes big, one side gap smaller that electromagnetic attraction is big, meanwhile, the also corresponding change of the curtage value of air gap sensor, the curtage of control system correction coil then, so that the horizontal component equal and opposite in direction of electromagnetic attraction, platform revert to original equilbrium position again, with the air gap that tapered plane maintenance in the guide rail left and right sides equates, the guiding accuracy when having guaranteed the platform feeding thus.
Device of the present invention is illustrated in figures 1 and 2 by embodiment's, is made up of mechanical system and control system two parts.Mechanical system comprises: linear electric motors elementary 1, guide rail 2, micro-feeding platform 3, linear electric motors secondary 4, elementary base 5, mechanism base 6, magnetic suspension coil 7, rise and fall and support 8, control system comprises: control computer 9, power of motor amplifier 10, magnetic suspension coil power amplifier and controller combination 11, air gap sensor 12, guide rail 2 is fixedly connected symmetrically on mechanism base 6, micro-feeding platform 3 is fixedly connected with a pair of magnetic suspension coil 7, two supports 8 of rising and falling are fixedly mounted on the below of micro-feeding platform 3, micro-feeding platform 3 supports 8 by rising and falling and is supported on plane on the guide rail 2, linear electric motors secondary 4 be fixedly mounted on micro-feeding platform 3 under, linear electric motors elementary 1 are installed in 5 li of elementary bases, and linear electric motors secondary 4 keep certain clearance with linear electric motors elementary 1, and elementary base 5 is fixedly connected with mechanism base 6; The control signal wire of magnetic suspension coil 7 is connected to magnetic suspension coil power amplifier and controller combination 11, the control signal wire of the linear electric motors time utmost point 4 is connected with power of motor amplifier 10, power of motor amplifier 10 all links to each other with the signal end of control computer 9 with magnetic suspension coil power amplifier and controller combination 11, air gap sensor 12 is fixedly mounted on the magnetic suspension coil 7, its probe keeps suitable gap with guide rail 2 tapered planes, the transmission signal line of air gap sensor 12 links to each other with magnetic suspension coil power amplifier and controller combination 11, and guide rail 2 adopts the V-arrangement shape.
When the present invention works, rise and fall to support and pack up, control system control magnetic suspension coil upwards floats, and keep stable gap with the guide rail tapered plane, micro-feeding platform stably is suspended on the guide rail thus, give linear electric motors carry-out bit shift word signal when control system, linear electric motors are secondary will to move given digital displacement amount, not have accurate, the little feed motion of ultraprecise straight line of frictionally realization thereby drive micro-feeding platform along guide rail.
Good effect of the present invention: because the present invention has adopted magnetic levitation technology, and combines the characteristics that linear electric motors can be realized zero transmission, so micro-feed mechanism has the following advantages:
(1) grease lubrication has been saved in not friction between workbench and the guide rail, has eliminated mechanism to the production environmental pollution;
(2) do not have the frictional damping effect during working table movement, very little active force just can drive workbench and do feed motion, saves power greatly;
(3) because of not friction, so movement parts does not have wearing and tearing, the precision of maintaining body prolongs the service life of mechanism long-term effectively;
(4) do not have frictional damping, help improving the feed accuracy of mechanism, shortened the response time of mechanism, improved the response frequency of mechanism;
(5) all driving coupling links in the middle of the application of linear electric motors has been omitted have been simplified mechanism structure, have alleviated mechanism's quality greatly, have correspondingly reduced motion of mechanism inertia, can improve mechanism's feed accuracy and operating efficiency greatly;
(6) micro-feed mechanism unites two into one the generation system of magnetic suspension force and guiding force, simplifies the structure, has reduced controlling unit, reduced cost of manufacture, and can guarantee that micro-feed mechanism has higher magnetic suspension and guiding accuracy.
Because simple and compact for structure, have cleaning, a characteristics of high efficiency, and can realize ultraprecise feed accuracy, to be widely used in products such as microelectronics, IT makes on the special equipment in field, also will be applied to have vast market prospect on the equipment such as scientific research, experiment and production processing of Aero-Space, military project, medicine, instrument and meter, life science and genetic engineering or the like numerous high-tech areas.
Description of drawings:
Fig. 1 is structure of the present invention and control schematic diagram.
Fig. 2 is a principle of the invention schematic diagram.
The specific embodiment such as Fig. 1 and Fig. 2: mechanical system of the present invention comprises: linear electric motors are elementary 1, guide rail 2, micro-feeding platform 3, linear electric motors are secondary 4, elementary base 5, mechanism base 6, magnetic suspension coil 7, rise and fall and support 8, and control system comprises: control computer 9, power of motor amplifier 10, magnetic suspension coil power amplifier and controller combination 11, air gap sensor 12.Determine that according to the length of micro-feed mechanism linear electric motors elementary 1 adopt five groups of coils to form, and require that the plane is in same horizontal plane on five groups of coils, error is not more than 0.1mm; Guide rail 2 is made up of two blocks of V-type rail plates, adopts ferrimagnet, and upper and lower surface is polished processing, and flatness requires to reach 0.3 μ m/25mm, and upper and lower surface is carried out homogeneous handle, and makes that the surface metal performance is an isotropism; Micro-feeding platform 3 is processed by the thick aluminium alloy plate of 10mm, can alleviate the weight of platform; Linear electric motors secondary 4 adopt light aluminum alloys to make, and the gap of linear electric motors secondary 4 and linear electric motors elementary 1 remains on 0.3～0.5mm or selects both gap as required; Elementary base 5 adopts aluminum alloy materials; Mechanism base 6 is processed by the marble polishing; Magnetic suspension coil 7 adopts a pair of U type magnetic suspension coil, and its pole surface will be polished attrition process, and flatness requires to reach 0.3 μ m/25mm; The support 8 of rising and falling adopts two supports of rising and falling to be made by high-abrasive material.Control system hardware is by the assembling of external world buying device, and control computer 9 can adopt the EVOC810 industrial computer, in a plurality of slots are arranged, control program and operating software are write voluntarily.Power of motor amplifier 10 and magnetic suspension coil power amplifier and controller combination 11 can be adopted the 6KGeminiGV model power amplifier of U.S. ParKer company.The EU model sensor of the German Micro-Epsilon of air gap sensor 12 employings company and the eddyNCDT3300 sensor watch-dog that is complementary.As this micro-feed mechanism being replaced existing friction extensible guide formula or air-float guide rail formula feed mechanism, be installed on the microelectronics lithographic equipment, can improve performance such as the positioning accuracy and the machining accuracy of lithographic equipment significantly.
Claims (2)
1, ultraprecise micrometric displacement magnetic suspension method for guide rail, it is characterized in that: (1), at first utilize two coils to pass to enough big electric current simultaneously, to between coil and guide rail tapered plane, produce the two strand electromagnetic attractions vertical with tapered plane, electromagnetic attraction can be decomposed into the component of vertical and horizontal both direction, and making a concerted effort of vertical direction component is required magnetic suspension force; (2), utilize magnetic suspension force that platform and the parts that are fixedly connected are with it suspended again; (3), when magnetic suspension force and platform, when fixed connecting part gross weight and plus load sum equate with it, platform stable is suspended on the guide rail, and makes the stable air gap ε of maintenance between coil and the guide rail tapered plane; (4), when being subjected to the interference of extraneous power, air gap ε between coil and the guide rail tapered plane changes, utilize the air gap sensor to have the characteristic that output current (or voltage) size and the size of air gap become be similar to the direct proportion linear relationship within the specific limits, export the electric current of variation by the air gap sensor; (5), utilize the electric current of output variation by the processing of controller and power amplifier and the input current of amplification adjustment coil, thereby change the electromagnetic attraction that coil produces, make the vertical component of electromagnetic attraction reach balance again with gravity and applied force with joint efforts, make the air gap of variation return to original size, platform is adjusted rapidly the levitation position when getting back to original balance; (6), utilize electromagnetic attraction to decompose and under ideal state, answer equal and opposite in direction in two components of horizontal direction, the characteristic that direction is opposite, when horizontal component differs in size, platform produces and deflects, air gap changes between coil and the guide rail tapered plane at this moment, the gap, one side that electromagnetic attraction is little becomes big, one side gap smaller that electromagnetic attraction is big, meanwhile, the also corresponding change of the curtage value of air gap sensor, the curtage of control system correction coil then, so that the horizontal component equal and opposite in direction of electromagnetic attraction, platform revert to original equilbrium position again, with the air gap that tapered plane maintenance in the guide rail left and right sides equates, the guiding accuracy when having guaranteed the platform feeding thus.
2, ultraprecise micrometric displacement guide rail magnetic levitation system comprises micro-feeding platform 3, elementary base 5, mechanism base 6, and elementary base 5 is fixedly connected with mechanism base 6; It is characterized in that also comprising: mechanical system: linear electric motors elementary 1, guide rail 2, linear electric motors secondary 4, magnetic suspension coil 7, rise and fall and support 8, control system: control computer 9, power of motor amplifier 10, magnetic suspension coil power amplifier and controller combination 11, air gap sensor 12, guide rail 2 is fixedly connected symmetrically on mechanism base 6, micro-feeding platform 3 is fixedly connected with a pair of magnetic suspension coil 7, two supports 8 of rising and falling are fixedly mounted on the below of micro-feeding platform 3, micro-feeding platform 3 supports 8 by rising and falling and is supported on plane on the guide rail 2, linear electric motors secondary 4 be fixedly mounted on micro-feeding platform 3 under, linear electric motors elementary 1 are installed in 5 li of elementary bases, and linear electric motors secondary 4 keep certain clearance with linear electric motors elementary 1, the control signal wire of magnetic suspension coil 7 is connected to magnetic suspension coil power amplifier and controller combination 11, the control signal wire of the linear electric motors time utmost point 4 is connected with power of motor amplifier 10, power of motor amplifier 10 all links to each other with the signal end of control computer 9 with magnetic suspension coil power amplifier and controller combination 11, air gap sensor 12 is fixedly mounted on the magnetic suspension coil 7, its probe keeps suitable gap with guide rail 2 tapered planes, transmission signal line links to each other with magnetic suspension coil power amplifier and controller combination 11, and guide rail 2 adopts the V-arrangement shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02132839 CN1214892C (en) | 2002-08-30 | 2002-08-30 | Magnetic suspension method for guide rail with ultra precise and micro displacement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02132839 CN1214892C (en) | 2002-08-30 | 2002-08-30 | Magnetic suspension method for guide rail with ultra precise and micro displacement |
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| CN1415456A true CN1415456A (en) | 2003-05-07 |
| CN1214892C CN1214892C (en) | 2005-08-17 |
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| CN 02132839 Expired - Fee Related CN1214892C (en) | 2002-08-30 | 2002-08-30 | Magnetic suspension method for guide rail with ultra precise and micro displacement |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1329784C (en) * | 2004-07-09 | 2007-08-01 | 浙江大学 | Soft positive sensor precision straight feeding device |
| CN100383597C (en) * | 2006-05-18 | 2008-04-23 | 武汉大学 | Fourier infrared spectrograph movinglens scanning device |
| CN100418699C (en) * | 2003-05-14 | 2008-09-17 | 鸿富锦精密工业（深圳）有限公司 | Guide rail for processing machine |
| CN1808866B (en) * | 2005-01-21 | 2010-05-26 | 北京前沿科学研究所 | Fully compensated permanent magnetic suspension structure |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| CN102358424A (en) * | 2011-08-17 | 2012-02-22 | 梁锡球 | Flying saucer aircraft |
| CN103909427A (en) * | 2014-04-17 | 2014-07-09 | 电子科技大学 | Mixed excitation magnetic suspension feeding platform |
| CN105522400A (en) * | 2016-01-22 | 2016-04-27 | 缪雪峰 | Permanent magnet suspension slide guide for mini-type machine tool |
| CN105563140A (en) * | 2016-01-22 | 2016-05-11 | 缪雪峰 | Control system for permanent magnet suspension guide rails of micro-machine tool |
| CN107082284A (en) * | 2017-03-29 | 2017-08-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Device for transferring samples and ultra-high vacuum transfer equipment |
| CN107207196A (en) * | 2015-02-04 | 2017-09-26 | 奥的斯电梯公司 | Elevator device apparatus for evaluating |
| CN111156249A (en) * | 2020-02-26 | 2020-05-15 | 中国工程物理研究院机械制造工艺研究所 | Air supporting guide rail with adjustable rigidity |
| CN113555197A (en) * | 2021-07-29 | 2021-10-26 | 哈尔滨工业大学 | Moving magnetic steel type self-driven magnetic suspension guide rail device and control method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102647124B (en) * | 2011-08-15 | 2015-01-07 | 王志林 | Special efficient switch magnetic-resistance transduction driving device |
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2002
- 2002-08-30 CN CN 02132839 patent/CN1214892C/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100418699C (en) * | 2003-05-14 | 2008-09-17 | 鸿富锦精密工业（深圳）有限公司 | Guide rail for processing machine |
| CN1329784C (en) * | 2004-07-09 | 2007-08-01 | 浙江大学 | Soft positive sensor precision straight feeding device |
| CN1808866B (en) * | 2005-01-21 | 2010-05-26 | 北京前沿科学研究所 | Fully compensated permanent magnetic suspension structure |
| CN100383597C (en) * | 2006-05-18 | 2008-04-23 | 武汉大学 | Fourier infrared spectrograph movinglens scanning device |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| CN102358424A (en) * | 2011-08-17 | 2012-02-22 | 梁锡球 | Flying saucer aircraft |
| CN103909427A (en) * | 2014-04-17 | 2014-07-09 | 电子科技大学 | Mixed excitation magnetic suspension feeding platform |
| CN107207196A (en) * | 2015-02-04 | 2017-09-26 | 奥的斯电梯公司 | Elevator device apparatus for evaluating |
| CN105522400A (en) * | 2016-01-22 | 2016-04-27 | 缪雪峰 | Permanent magnet suspension slide guide for mini-type machine tool |
| CN105563140A (en) * | 2016-01-22 | 2016-05-11 | 缪雪峰 | Control system for permanent magnet suspension guide rails of micro-machine tool |
| CN105522400B (en) * | 2016-01-22 | 2019-05-21 | 江苏赐福科技有限公司 | A kind of permanent magnet suspension Miniature machine tool guide rail |
| CN107082284A (en) * | 2017-03-29 | 2017-08-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Device for transferring samples and ultra-high vacuum transfer equipment |
| CN111156249A (en) * | 2020-02-26 | 2020-05-15 | 中国工程物理研究院机械制造工艺研究所 | Air supporting guide rail with adjustable rigidity |
| CN113555197A (en) * | 2021-07-29 | 2021-10-26 | 哈尔滨工业大学 | Moving magnetic steel type self-driven magnetic suspension guide rail device and control method thereof |
| CN113555197B (en) * | 2021-07-29 | 2022-02-15 | 哈尔滨工业大学 | Moving magnetic steel type self-driven magnetic suspension guide rail device and control method thereof |
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| Publication number | Publication date |
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| CN1214892C (en) | 2005-08-17 |
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