CN208045466U - A kind of XY high-speed motion platforms of tier rack type decoupling - Google Patents
A kind of XY high-speed motion platforms of tier rack type decoupling Download PDFInfo
- Publication number
- CN208045466U CN208045466U CN201820313942.9U CN201820313942U CN208045466U CN 208045466 U CN208045466 U CN 208045466U CN 201820313942 U CN201820313942 U CN 201820313942U CN 208045466 U CN208045466 U CN 208045466U
- Authority
- CN
- China
- Prior art keywords
- guide rails
- motor
- axis
- moving platform
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model provides a kind of XY high-speed motion platforms of tier rack type decoupling, including：First pedestal, the second pedestal, x-axis motion module, y-axis motion module and moving platform；The x-axis motion module is mounted on first pedestal；The y-axis motion module is mounted on second pedestal；First pedestal is aerial to be arranged on the second pedestal；The moving platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or carry out y-axis direction linear motion based on the y-axis motion module.The utility model uses parallel-connection decoupling mode, it is simple in structure, it is easier to ensure that moving platform in the consistent of the direction of motion at work, be conducive to the track contour accuracy of control plane movement, and the motion platform is separated x-axis motion module, y-axis motion module in the different plane of height from moving platform by a kind of simply firm frame mode, the complexity for reducing moving parts and its related movement realizes the optimal utilization in X/Y plane space.
Description
Technical field
The utility model is related to the High-speed machining sports equipment of micro-electronic manufacturing manufacture field more particularly to a kind of tier rack types
The XY high-speed motion platforms of decoupling.
Background technology
With the high speed development of microelectronics manufacturing industry, the manufacture of the high production capacity of microelectronic product high quality, micro-electronic manufacturing dress
It is standby that its nucleus movement platform and system are proposed in space availability ratio, stroke, speed, acceleration, kinetic stability etc.
High comprehensive requirement.The two concatenated mode combinations of motor of use of traditional XY decouplings platform substantially form, structure system
System is not compact, and space availability ratio is not high, and there is related link is lengthy and jumbled, and moving parts are more, load the defects of big, it is difficult to very well
The requirement for meeting high speed stable motion.It is mostly L-shaped that existing parallel connection XY, which decouples platform in overall structure, and " L " type is flat
Two motors in platform extend and occupy the XY axial spaces of motion platform, and driving motor is seriously limited in the placement of XY axial directions
The stroke of moving platform XY axial directions, could not realize the optimal utilization in X/Y plane space.In addition, " L " type platform assembly barycenter disperses, group
Part mass-dispersion causes equipment gravity biased, does not concentrate, and bringing serious equipment to microelectronics nanoscale precision manufactureing misses
Difference.Therefore the optimal utilization in XY decoupling platform planes in parallel space how is realized, expanding the stroke of moving platform becomes this field
The technical issues of technical staff's urgent need to resolve
Utility model content
In view of this, the utility model provides a kind of XY high-speed motion platforms of tier rack type decoupling, solves existing parallel connection
The problem of XY decoupling platforms seriously limit the strokes of moving platform XY axial directions, could not realize the optimal utilization in X/Y plane space.
The utility model provides a kind of XY high-speed motion platforms of tier rack type decoupling, including：First pedestal, the second pedestal, x
Axis motion module, y-axis motion module and moving platform；
The bottom surface of the x-axis motion module is the first plane, and first base top surface is attached with first plane to be connected
It connects；
The bottom surface of the y-axis motion module is the second plane, and second base top surface is attached with second plane to be connected
It connects；
First pedestal is aerial to be arranged in the second base top surface；
The top surface of the moving platform is third plane, and first plane and second plane are vertical on different height
In the central shaft of the third plane；
The moving platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or moved based on the y-axis
Module carries out y-axis direction linear motion.
Preferably, the y-axis motion module includes：Second motor control part and the 2nd y guide rails；
Second motor control part includes the second connector and the second motor, second connector and described second
Electric mover is fixedly connected；
The top of second motor stator is located at the bottom of second connector；
The bottom surface of second motor stator is second plane；
The 2nd y guide rails are mounted in second base top surface；
Second connector is slidably connected with the 2nd y guide rails.
Preferably, further include：First x guide rails；Second connector is groove connecting；
The groove connecting outer bottom is fixedly mounted with second electric mover；
Two the 2nd y guide rails are parallel and are separated by preset distance mounted on the groove connecting outer bottom；
The first x guide rails are located at the top of the groove connecting and are connected across the opening of the groove connecting.
Preferably, the x-axis motion module includes：First motor and the 2nd x guide rails；
The bottom surface of the first motor stator is first plane；
The 2nd x guide rails are mounted in first base top surface；
The first motor mover is slidably connected with the 2nd x guide rails.
Preferably, further include：First y guide rails；Two the 2nd x guide rails are parallel and are separated by preset distance mounted on described
In first base top surface；
The first motor mover is connected across in the y-direction between two the 2nd x guide rails；
First motor mover top surface attaches and is equipped with the first y guide rails.
Preferably, the moving platform is slidably connected with two the first x guide rails；
The moving platform is equipped with the matched groove of the first y guide rails and connects with two the first y guide rails slidings
It connects；
Moving platform described in the first motor stator driving is on the first x guide rails and the first motor mover is in institute
It states on the 2nd x guide rails while doing x-axis direction linear motion；
Second motor stator drives the moving platform on the first y guide rails and second electric mover is in institute
It states on the 2nd y guide rails while doing y-axis direction linear motion.
Preferably, the first motor and second motor are U-type groove linear motor.
Preferably, the bottom of the groove connecting is arranged in a crossed manner in the Stilt layer of first pedestal.
Preferably, the XY high-speed motion platforms of above-mentioned tier rack type decoupling further include：The directions x grating scale；
The directions x grating scale, which attaches, to be mounted on the 2nd x guide rails, for detecting the moving platform in x-axis direction
Displacement.
Preferably, the XY high-speed motion platforms of above-mentioned tier rack type decoupling further include：The directions y grating scale；
The directions y grating scale, which attaches, to be mounted on the 2nd y guide rails, for detecting the moving platform in y-axis direction
Displacement.
The utility model provides a kind of XY high-speed motion platforms of tier rack type decoupling, including：First pedestal, the second base
Seat, x-axis motion module, y-axis motion module and moving platform；The bottom surface of the x-axis motion module is the first plane, first base
Seat top surface attaches with first plane and connects；The bottom surface of the y-axis motion module is the second plane, second base top surface
It attaches and connects with second plane；First pedestal is aerial to be arranged in the second base top surface；The top surface of the moving platform
For third plane, first plane is with second plane perpendicular to the central shaft of the third plane on different height；
The moving platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or carry out y based on the y-axis motion module
Axis direction moves along a straight line.
The XY high-speed motion platforms of tier rack type decoupling provided by the utility model are made flat using parallel decoupling mode
Platform is directly slidably connected with the first x guide rails with the first y guide rails, simple in structure, is easier to ensure that moving platform is moving at work
Direction it is consistent, be conducive to control plane movement track contour accuracy.The XY high-speed motions platform of tier rack type decoupling is by the
One motor, the second motor separate from moving platform in the different plane of height, are different from the straight line of existing parallel-connection decoupling platform
Motor is put due to L-shaped, so that driving motor is seriously limited the stroke of moving platform XY axial directions in placement axial XY, is avoided
Since motor extends the problem of occupying motion platform displacement, the optimal utilization of XY spaces is realized.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is the structural schematic diagram of the XY high-speed motion platforms of the utility model tier rack type decoupling；
Fig. 2 is the internal structure schematic diagram of the XY high-speed motion platforms of the utility model tier rack type decoupling；
Fig. 3 is the explosive view of the XY high-speed motion platforms of the utility model tier rack type decoupling；
Wherein, reference numeral, the second pedestal 1, y-axis is to reading head 2, the 2nd y guide rails 3, and y-axis is to grating scale 4, and y-axis is to reading
Several installation parts 5, the second motor control part 6, first motor stator 7, the first x guide rails 8, the first y guide rails 9, moving platform 10, x
Axial reading head installation part 11, x-axis is to grating scale 12, and x-axis is to reading head 13, and the 2nd x guide rails 14, the first pedestal 15, second is electric
Machine stator 16, first motor mover 17.
Specific implementation mode
The technical scheme in the utility model embodiment is clearly and completely described below, it is clear that described reality
It is only the utility model a part of the embodiment to apply example, instead of all the embodiments.Based on the embodiments of the present invention,
Every other embodiment obtained by those of ordinary skill in the art without making creative efforts, belongs to this reality
With novel protected range.
In order to which the utility model is described in more detail, with reference to embodiment to a kind of tier rack type solution provided by the utility model
The XY high-speed motion platforms of coupling are specifically described.
It please refers to Fig.1, Fig. 2 and Fig. 3, the utility model provides the of a kind of XY high-speed motion platforms of tier rack type decoupling
One embodiment, including the first pedestal 15, the second pedestal 1, x-axis motion module, y axis motion module and moving platform 10；First base
Seat 15 is aerial and is fixed on the second pedestal 1 in right-angled intersection formula, and the top surface of moving platform 10 is third plane, wherein x-axis is transported
The first plane belonging to dynamic model block and the second plane belonging to y axis motion modules are on different height perpendicular to moving platform 10 the
The central shaft of three planes.
It is put it should be noted that the linear motor of conventional parallel-connection decoupling platform is L-shaped, driving motor is in XY axial directions
Placement seriously limit the strokes of moving platform XY axial directions.
And the first pedestal 15 is aerial in the present embodiment and is fixed on the second pedestal 1, constitutes tier rack type space, and x-axis is made to transport
Dynamic model block, y-axis motion module and moving platform 10 are in the plane of different height, have been reached saving space and have been expanded moving platform 10
The purpose of stroke.
Further, y-axis motion module includes the second motor control part and the 2nd y guide rails 3, the second motor control part
Including the second motor and the second connector 6.Wherein, the bottom surface of the y-axis motion module i.e. bottom surface of the second motor stator is second flat
The top surface of face, the second plane and the second pedestal 1, which attaches, to be connected.Second connector 6 is fluted body, the outer bottom of the second connector 6
It is fixedly mounted with the second electric mover of L-type.Two article of the 2nd y guide rail 3 is mounted on the top surface of the second pedestal 1, parallel and be separated by
Preset distance is mounted on the outer bottom of the second connector 6 so that the second connector 6 can slidably reciprocate on the 2nd y guide rails 3.
Two article of the first x guide rail 8 is located at the top of the second connector 6 and is connected across its opening, moving platform 10 by the first x guide rails 8 with
The both sides of second connector 6 connect.
Further, x-axis motion module includes：First motor and the 2nd x guide rails 14, the wherein bottom surface of x-axis motion module
I.e. the bottom surface of first motor stator 7 is the first plane, and the top surface of the first pedestal 15 is attached with the first plane to be connected, two article of the 2nd x
Guide rail 14 is parallel and is separated by the both sides that preset distance is mounted on first motor stator 7.First motor mover 17 is connected across in the y-direction
Between two the 2nd x guide rails 14 so that first motor mover 17 can slidably reciprocate on the 2nd x guide rails 14, and first motor is dynamic
The top surface of son 17, which attaches, is equipped with two article of the first y guide rail 9, and moving platform 10 is connected by the first y guide rails 9 with first motor mover 17
It connects.
Further, first motor and the second motor are U-type groove linear motor, and there are two between metallic plate and all
Against first motor mover 17 and the parallel track of the second electric mover of L-type, the L-type second of 6 lower surface of the second connector connection
Electric mover is put in the second motor stator 16 and first motor stator 7 with first motor mover 17 to generate magnetic force respectively,
Wherein first motor mover 17 and the second electric mover put in the part of first motor stator 7 and the second motor stator 16 using forever
Magnetic material or epoxy resin are made, and other parts are obtained using cast iron or steel.When the second motor 16 of lower layer is powered, production
The second connector of raw magnetic force moving 6 does y-axis direction straight line fortune simultaneously along the 2nd y guide rails 3 and moving platform 10 along the first y guide rails 9
It is dynamic.When the first motor 7 on upper layer is powered, magnetic force moving first motor mover 17 is generated along the 2nd x guide rails 14 and is moved flat
Platform 10 does x-axis direction linear motion simultaneously along the first x guide rails 8.When two layers of motor works independently, the movement of moving platform 10 completes
In the decoupling of x-axis direction and y-axis direction.When first motor and the second motor are powered on simultaneously, moving platform 10 is moved in x-axis
Direction forms x/y plane with the y-axis direction of motion, i.e. moving platform does plane motion in x/y plane, completes in x-axis direction and y
The coupling of axis direction movement.
In the utility model embodiment, moving platform 10 is directly slidably connected with the first x guide rails 8 with the first y guide rails 9, adopts
It is simple in structure with parallel-connection decoupling mode, it is easier to ensure that moving platform 10 in the consistent of the direction of motion, is conducive to control at work
The track contour accuracy of plane motion.First motor stator 7, the second motor stator 16 separate different in height from moving platform 10
In plane, avoids since motor extends the problem of occupying motion platform displacement, realize the optimal utilization in X/Y plane space.
In addition, the setting of the 2nd y guide rails 3 and the 2nd x guide rails 14 can carry the second motor control part 6 and first respectively
The gravity of of electric mover 17 itself, on the one hand reduce the second connector 6 do y-axis direction move when and first motor mover 17
The power vertical with the direction of motion generated when doing x-axis direction linear motion improves the second motor control part 6 and the first electricity
The precision of motor-driven sub 17 movement, since the second motor control part 6, first motor mover 17 are respectively in the 2nd y guide rails 3, the 2nd x
It is moved under the support of guide rail 14, chatter caused by the cantilever beam structure without generic linear electric mover, and cross friendship
The first x guide rails 8 and the first y guide rails 9 of fork effectively can mutually inhibit the vibration of moving platform 10 during High acceleration motion, most
Eventually so that system high-speed stable motion.It improves the second connector 6, first motor mover 17 and moving platform 10 and is doing y-axis direction
Or the stability of x-axis direction movement.
It is a kind of first reality of the XY high-speed motion platforms for tier rack type decoupling that the utility model embodiment provides above
Apply example, below by way of a kind of decoupling of tier rack type XY high-speed motion platforms second embodiment to carrying out x-axis direction and direction
Embodiment when displacement is specifically described.
As shown in figures 1 and 3, y-axis is mounted on the side wall of the second connector 6, y-axis to reading head installation part 5 by screw
Y-axis is installed on reading head installation part 5 to reading head 2, attaches to be equipped on the 2nd y guide rails 3 and match to reading head 2 with y-axis
The y-axis of conjunction does y-axis direction to reading head 2 and the second motor control part 6 and moves along a straight line as a whole to grating scale 4, y-axis, and
It is recorded from y-axis to grating scale 4.Similarly, x-axis is mounted on the side of first motor mover 7 to reading head installation part 11, in the 2nd x
It attaches and is equipped with x-axis to the x-axis that reading head 13 coordinates to grating scale 12 on guide rail 14.X-axis is electric to reading head 13 and first
Motor-driven sub 17 do x-axis direction linear motion as a whole, and are recorded from x-axis to grating scale 12.X-axis to grating scale 12 and y-axis to
Grating scale 4 decouples the directions xy or the directions x displacement information feeds back to calculating with the directions y displacement information when the coupled motions of the directions xy
Machine, and then achieve the purpose that carry out precision measure and feedback in the movement of y-axis direction or x-axis direction to moving platform 10.
The above, above example are only to illustrate the technical solution of the utility model, rather than its limitations；Although ginseng
The utility model is described in detail according to previous embodiment, it will be understood by those of ordinary skill in the art that：It is still
Can be with technical scheme described in the above embodiments is modified, or which part technical characteristic is equally replaced
It changes；And these modifications or replacements, various embodiments of the utility model technical solution that it does not separate the essence of the corresponding technical solution
Spirit and scope.
Claims (10)
1. a kind of XY high-speed motion platforms of tier rack type decoupling, which is characterized in that including：First pedestal, the second pedestal, x-axis fortune
Dynamic model block, y-axis motion module and moving platform；
The bottom surface of the x-axis motion module is the first plane, and first base top surface is attached with first plane and connected；
The bottom surface of the y-axis motion module is the second plane, and second base top surface is attached with second plane and connected；
First pedestal is aerial to be arranged in the second base top surface；
The top surface of the moving platform is third plane, and first plane is with second plane perpendicular to institute on different height
State the central shaft of third plane；
The moving platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or be based on the y-axis motion module
Carry out y-axis direction linear motion.
2. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 1, which is characterized in that the y-axis fortune
Dynamic model block includes：Second motor control part and the 2nd y guide rails；
Second motor control part includes the second connector and the second motor, second connector and second motor
Mover is fixedly connected；
The top of second motor stator is located at the bottom of second connector；
The bottom surface of second motor stator is second plane；
The 2nd y guide rails are mounted in second base top surface；
Second connector is slidably connected with the 2nd y guide rails.
3. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 2, which is characterized in that further include：The
One x guide rails；Second connector is groove connecting；
The groove connecting outer bottom is fixedly mounted with second electric mover；
Two the 2nd y guide rails are parallel and are separated by preset distance mounted on the groove connecting outer bottom；
The first x guide rails are located at the top of the groove connecting and are connected across the opening of the groove connecting.
4. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 3, which is characterized in that the x-axis fortune
Dynamic model block includes：First motor and the 2nd x guide rails；
The bottom surface of the first motor stator is first plane；
The 2nd x guide rails are mounted in first base top surface；
The first motor mover is slidably connected with the 2nd x guide rails.
5. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 4, which is characterized in that further include first
Y guide rails；Two the 2nd x guide rails are parallel and are separated by preset distance in first base top surface；
The first motor mover is connected across in the y-direction between two the 2nd x guide rails；
First motor mover top surface attaches and is equipped with the first y guide rails.
6. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 5, which is characterized in that the moving platform
It is slidably connected with two the first x guide rails；
The moving platform is equipped with the matched groove of the first y guide rails and is slidably connected with two the first y guide rails；
Moving platform described in the first motor stator driving is on the first x guide rails and the first motor mover is described the
X-axis direction linear motion is done on two x guide rails simultaneously；
Second motor stator drives the moving platform on the first y guide rails and second electric mover is described the
Y-axis direction linear motion is done on two y guide rails simultaneously.
7. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 4, which is characterized in that first electricity
Machine is U-type groove linear motor with second motor.
8. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 3, which is characterized in that the groove connects
The bottom of fitting is arranged in a crossed manner in the Stilt layer of first pedestal.
9. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 4, which is characterized in that further include the side x
To grating scale；
The directions x grating scale, which attaches, to be mounted on the 2nd x guide rails, for detecting the moving platform in the position of x-axis direction
It moves.
10. a kind of XY high-speed motion platforms of tier rack type decoupling according to claim 8, which is characterized in that further include the side y
To grating scale；
The directions y grating scales, which attaches, to be mounted on the 2nd y guide rails, for detect the moving platform y-axis direction position
It moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820313942.9U CN208045466U (en) | 2018-03-07 | 2018-03-07 | A kind of XY high-speed motion platforms of tier rack type decoupling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820313942.9U CN208045466U (en) | 2018-03-07 | 2018-03-07 | A kind of XY high-speed motion platforms of tier rack type decoupling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208045466U true CN208045466U (en) | 2018-11-02 |
Family
ID=63949459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820313942.9U Active CN208045466U (en) | 2018-03-07 | 2018-03-07 | A kind of XY high-speed motion platforms of tier rack type decoupling |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208045466U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108206155A (en) * | 2018-03-07 | 2018-06-26 | 广东工业大学 | A kind of XY high-speed motion platforms of tier rack type decoupling |
-
2018
- 2018-03-07 CN CN201820313942.9U patent/CN208045466U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108206155A (en) * | 2018-03-07 | 2018-06-26 | 广东工业大学 | A kind of XY high-speed motion platforms of tier rack type decoupling |
| CN108206155B (en) * | 2018-03-07 | 2024-04-19 | 广东工业大学 | Layered-type decoupling XY high-speed motion platform |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108206155A (en) | A kind of XY high-speed motion platforms of tier rack type decoupling | |
| CN106393070B (en) | A kind of antisymmetry straight drive mobile decoupling high-precision servo platform in parallel | |
| CN201555577U (en) | Horizontal cross member of coordinate measuring device and coordinate measuring device provided with same | |
| CN103021473A (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| CN201235472Y (en) | Linear electric motor driven four-shaft linkage numerical control machine | |
| CN105666162A (en) | Macro and micro dual-driving precise wedged feeding worktable and motion generation method | |
| CN106272364A (en) | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform | |
| CN104765382A (en) | Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform | |
| CN202070914U (en) | Movable vertical machining center of vertical post | |
| CN107387959A (en) | Integral type high speed Ultra-precision positioning two-dimensional stage | |
| CN104019332A (en) | Super-long-stroke high-acceleration high-precision-positioning one-dimensional platform | |
| CN101567223A (en) | Pneumatic semi-suspension two-freedom co-baseplane motion workbench with high speed and large stroke | |
| CN208045466U (en) | A kind of XY high-speed motion platforms of tier rack type decoupling | |
| CN208571892U (en) | Straight-line displacement platform and horizontal displacement mechanism | |
| CN104343916A (en) | Parallel mechanism with two degrees of freedom | |
| CN107979223B (en) | Portable high-acceleration macro-micro motion platform | |
| CN202224938U (en) | Fixed-beam gantry-moving pentahedral numerically-controlled gantry boring-milling machine | |
| CN201091959Y (en) | Laser cutting machine tool | |
| CN105067990A (en) | Design method of horizontal flying probe test machine | |
| CN218612804U (en) | Double-gantry double-station driving structure | |
| CN203636226U (en) | High-speed high-precision linearly-driven parallel XY platform | |
| CN102723297A (en) | XY precision motion platform provided with terminal load support and symmetrical structure | |
| CN214843321U (en) | Three-axis hollow precision motion platform | |
| CN102723298A (en) | Electromagnetic preload XY precision motion platform | |
| CN207364560U (en) | Integral type high speed Ultra-precision positioning two-dimensional stage |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |