CN207364560U - Integral type high speed Ultra-precision positioning two-dimensional stage - Google Patents
Integral type high speed Ultra-precision positioning two-dimensional stage Download PDFInfo
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- CN207364560U CN207364560U CN201721099109.0U CN201721099109U CN207364560U CN 207364560 U CN207364560 U CN 207364560U CN 201721099109 U CN201721099109 U CN 201721099109U CN 207364560 U CN207364560 U CN 207364560U
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Abstract
The utility model belongs to machining auxiliary equipment technical field,More particularly to a kind of integral type high speed Ultra-precision positioning two-dimensional stage,Including base,Floating platform is provided with the base and platform supports base,Platform is supported to be provided with X-axis macro-moving stage on base,Y-axis macro-moving stage is provided with X-axis macro-moving stage,XY micromotion platforms are provided with Y-axis macro-moving stage,Compound voice coil motor is provided with floating platform,Composite rotating motor is provided with compound voice coil motor,The front end of composite rotating rotor is provided with rotor gear,Connecting platform is provided with Y-axis macro-moving stage,The lower part of connecting platform is provided with rack,Rack engages connection with rotor gear,The one side of X-axis macro-moving stage is provided with guide rail,Sliding block is provided with guide rail,Sliding block is fixedly connected with composite rotating motor stator,The problem of big quantity space being taken which solves parallel drive motor and complete machine space can not be saved,Positioning accuracy is high at the same time,It is easy to use.
Description
Technical field
The utility model belongs to machining auxiliary equipment technical field, and in particular to a kind of integral type high speed Ultra-precision positioning
Two-dimensional stage.
Background technology
As microelectronic industry is fast-developing, big Range Ultraprecise locating platform has been shown as the functionality of key equipment
It is existing, particularly in the field of microelectronic fabrication such as wire bonding and photoetching, high acceleration ultraprecise is completed with greater need for motion platform
Positioning movement.At present, high acceleration ultraprecise motion platform generally realizes that two dimension is empty by the parallel drive of two linear motors
Between complete long stroke and fast positioning, this just expands motion platform occupied space, be unfavorable for whole set equipment spatial design and into
This saving.While high acceleration ultraprecise is realized, realize that the effectively reduction of motion platform occupied space is of great significance.For
The high speed ultraprecise motion platform that machining time shortens, production efficiency improves and profit is domestic at present mainly passes through two straight lines
Motor parallel is driven to complete platform two dimensional motion, although these positioning realize high acceleration, high speed, two straight lines
Motor parallel causes motion platform occupied space to increase, and unavoidably expands whole set equipment space, limits production cost.
Utility model content
The purpose of the utility model is to overcome the deficiencies in the prior art, and provide a kind of integral type high speed Ultra-precision positioning
Two-dimensional stage, the integral type high speed Ultra-precision positioning two-dimensional stage solve parallel drive motor and take big quantity space and can not save
The problem of province complete machine space, while positioning accuracy is high, it is easy to use.
The utility model is realized in this way：Integral type high speed Ultra-precision positioning platform, including base, it is characterised in that：
Floating platform is provided with the base and platform supports base, platform is supported to be provided with X-axis macro-moving stage, platform on base
Support to be provided with X-axis platform fromer rail pair and X-axis platform rear rail pair between base and X-axis macro-moving stage, on X-axis macro-moving stage
Y-axis macro-moving stage is provided with, the right guideway of Y-axis platform and Y-axis platform are provided between X-axis macro-moving stage and Y-axis macro-moving stage
Left rail pair, is provided with XY micromotion platforms on Y-axis macro-moving stage, compound voice coil loudspeaker voice coil motor stator is provided with floating platform, compound
Compound voice coil loudspeaker voice coil rotor is provided with voice coil motor stator, composite rotating motor is provided with compound voice coil loudspeaker voice coil rotor and is turned
Son, is provided with composite rotating motor stator in composite rotating rotor, the front end of composite rotating rotor is provided with rotor
Gear, is provided with connecting platform on Y-axis macro-moving stage, the lower part of connecting platform is provided with rack, and rack is engaged with rotor gear
Connection, the one side of X-axis macro-moving stage are provided with guide rail, sliding block are provided with guide rail, and sliding block is consolidated with composite rotating motor stator
Fixed connection.
The floating platform includes upper mounting plate and lower platform, and it is secondary and right that left rail is provided between upper mounting plate and lower platform
Guideway, the secondary and right guideway of left rail are rail plate pair, and the centre position of lower platform is provided with step-like groove, step-like
The front-back of groove is provided with positive stop and backstop, and left guide rod and right guide rod are provided between positive stop and backstop, and a left side is led
Central block is provided with the middle part of bar and right guide rod, central block is connected with upper mounting plate, be provided with left guide rod left front spring and
Left back spring, be provided with right guide rod before the right side spring and it is right after spring.
Front damper is provided between the central block and front apron, after being provided between central block and rear baffle
Damper.
The right guideway of Y-axis platform and Y-axis platform left rail pair are rail plate pair, X-axis platform fromer rail pair and X
It is rail plate pair that pair is led after shaft platform.
Left sliding bearing and right rolling are provided between compound the voice coil loudspeaker voice coil rotor and composite rotating rotor
Bearing.
The composite rotating rotor is fixedly connected with rotor gear.
The Y-axis macro-moving stage is provided with coarse grating glass ruler reading head, Y-axis macro-moving stage close to the side of connecting platform
Opposite side be provided with smart Grating glass ruler reading head, the Y direction of the upper surface of X-axis macro-moving stage is provided with the left light of Y-axis platform
Grid ruler and the right grating scale of Y-axis platform, X-axis macro-moving stage lower part X-direction are provided with before X-axis platform after grating scale and X-axis platform
Grating scale, the leading flank of platform base are fixedly installed coarse grating glass ruler reading head, and the trailing flank of platform base is consolidated
Surely it is provided with smart Grating glass ruler reading head.
The coarse grating glass ruler reading head of the Y-axis macro-moving stage aligns with the left grating scale of Y-axis platform, Y-axis macro-moving stage
Smart Grating glass ruler reading head align with the right grating scale of Y-axis platform, coarse grating glass ruler reading head and the X-axis of platform base are put down
Grating scale aligns before platform, and the smart Grating glass ruler reading head of platform base aligns with grating scale after X-axis platform.
The XY micromotion platforms are connected with Y-axis macro-moving stage by flexible hinge, and X-axis pressure is provided with XY micromotion platforms
Electric drive and Y-axis piezoelectric actuator.
Compared with prior art, the beneficial effects of the utility model are：
1st, the integral type high speed Ultra-precision positioning two-dimensional stage drives X-axis macro-moving stage at the same time using integral type compound machine
Moved with Y-axis macro-moving stage, it is compact-sized, easy to use, solve parallel drive motor and take big quantity space and can not save
The problem of complete machine space and cost；
2nd, glass measurement grating scale feeds back the position signal of motion by locating platform, while passes through fine motion
Platform carries out error compensation, so as to be accurately positioned, realizes the precision positioning motion of whole two-dimensional stage, positioning accuracy is high；
3rd, caused vibration when floating platform eliminates the movement of integral type compound machine, the course of work of floating platform is double
The movement of tandem motion drives upper mounting plate movement, and upper mounting plate is moved along guideway on lower platform, while left and right spring
It is stretched or compressed, forward and backward damper protection camber of spring is excessive and fails, when the ultimate range to spring elongation or compression
When, start to move round about, so as to eliminate the vibration brought by the movement of double tandem motion.
Brief description of the drawings
Fig. 1 is the structure diagram of integral type high speed Ultra-precision positioning two-dimensional stage；
Fig. 2 is the structure diagram of composite rotating motor；
Fig. 3 is the structure diagram of upper mounting plate；
Fig. 4 is the structure diagram that floating platform removes upper mounting plate；
Fig. 5 is the structure diagram of Y-axis macro-moving stage；
Fig. 6 is the structure diagram of X-axis macro-moving stage；
Fig. 7 is the structure diagram of platform base；
In figure：1- floating platforms, the compound voice coil loudspeaker voice coil motor stators of 2-, the compound voice coil loudspeaker voice coil rotors of 3-, 4- connecting platforms, 5- turn
Sub- gear, 6- composite rotating motor stators, 7- sliding blocks, 8- guide rails, 9- Y-axis macro-moving stages, 10- XY micromotion platforms, 11- X-axis
Macro-moving stage, 12- platform bases, 13- bases, 14- roll left dynamic bearing, 15- composite rotating rotors, the right rollings of 16-
Bearing, 17- left rail pairs, 18- upper mounting plates, the right guideways of 19-, 20- lower platforms, the left front springs of 21-, 22- backstops, 23- are left
Spring afterwards, the left guide rods of 24-, 25- rear dampers, spring behind the 26- right sides, the right guide rods of 27-, 28- front dampers, 29- centers block,
Spring before the 30- right sides, 31- positive stops, 32- racks, 33- coarse grating glass ruler reading heads, 34-X axis piezoelectric actuators, 35-Y axis piezoelectricity
Driver, 36- flexible hinges, 37- essence Grating glass ruler reading heads, the right guideway of 38-Y shaft platforms, 39-Y shaft platform left rail pairs,
Grating scale before 40- X-axis platforms, 41-X shaft platform fromer rail pairs, 42-X shaft platform rear rail pairs, grating scale after 43-X shaft platforms,
The left grating scale of 44-Y shaft platforms, the right grating scale of 45-Y shaft platforms.
Embodiment
Embodiment 1, as shown in Fig. 1-Fig. 7 structures, integral type high speed Ultra-precision positioning platform, including base 13, it is described
Floating platform 1 is provided with base 13 and platform supports base 12, platform is supported to be provided with X-axis macro-moving stage 11 on base 12,
Platform is supported to be provided with X-axis platform fromer rail pair 41 and X-axis platform rear rail pair 42, X between base 12 and X-axis macro-moving stage 11
Y-axis macro-moving stage 9 is provided with axis macro-moving stage 11, Y-axis platform is provided between X-axis macro-moving stage 11 and Y-axis macro-moving stage 9
Right guideway 38 and Y-axis platform left rail pair 39, are provided with XY micromotion platforms 10 on Y-axis macro-moving stage 9, are set on floating platform 1
Compound voice coil loudspeaker voice coil motor stator 2 is equipped with, compound voice coil loudspeaker voice coil rotor 3, compound voice coil motor are provided with compound voice coil loudspeaker voice coil motor stator 2
Composite rotating rotor 15 is provided with rotor 3, composite rotating motor stator 6 is provided with composite rotating rotor 15,
The front end of composite rotating rotor 15 is provided with rotor gear 5, and composite rotating rotor 15 is fixed with rotor gear 5 to be connected
Connect, connecting platform 4 is provided with Y-axis macro-moving stage 9, the lower part of connecting platform 4 is provided with rack 32, rack 32 and rotor gear
5 engagement connections, the one side of X-axis macro-moving stage 11 are provided with guide rail 8, and sliding block 7, sliding block 7 and compound rotation are provided with guide rail 8
Rotating motor stator 6 is fixedly connected.
The floating platform 1 includes upper mounting plate 18 and lower platform 20, and a left side is provided between upper mounting plate 18 and lower platform 20
Guideway 17 and right guideway 19, left rail pair 17 and right guideway 19 are rail plate pair, and the interposition of lower platform 20 installs
Step-like groove is equipped with, the front-back of step-like groove is provided with positive stop 31 and backstop 22, positive stop 31 and backstop 22
Between be provided with left guide rod 24 and right guide rod 27, the middle part of left guide rod 24 and right guide rod 27 is provided with central block 29, center stop
Block 29 is connected with upper mounting plate 18, and front damper 28, central block 29 and rear gear are provided between central block 29 and front apron 31
It is provided with rear damper 25 between plate 2, the centre position of the forward and backward centrally disposed block 29 of damper, is set on left guide rod 24
There are left front spring 21 and left back spring 23, spring 30 and spring 26 behind the right side before the right side are provided with right guide rod 27.
The right guideway 38 of the Y-axis platform and Y-axis platform left rail pair 39 are rail plate pair, X-axis platform fromer rail
It is rail plate pair that pair 42 is led after pair 41 and X-axis platform.
Left sliding bearing 14 and the right side are provided between compound the voice coil loudspeaker voice coil rotor 3 and composite rotating rotor 15
Rolling bearing 16.
The Y-axis macro-moving stage 9 is provided with coarse grating glass ruler reading head 33 close to the side of connecting platform 4, and Y-axis is grand dynamic
The opposite side of platform 9 is provided with smart Grating glass ruler reading head 37, and the Y direction of the upper surface of X-axis macro-moving stage 11 is provided with Y-axis
The left grating scale 44 of platform and the right grating scale 45 of Y-axis platform, 11 lower part X-direction of X-axis macro-moving stage are provided with grating before X-axis platform
Grating scale 43 after ruler 40 and X-axis platform, the leading flank of platform base 12 are fixedly installed coarse grating glass ruler reading head 33, put down
The trailing flank of platform support base 12 is fixedly installed smart Grating glass ruler reading head 37.
The coarse grating glass ruler reading head 33 of the Y-axis macro-moving stage 9 aligns 44 with the left grating scale of Y-axis platform, and Y-axis is grand dynamic
Smart Grating glass ruler reading head 37 grating scale 45 right with Y-axis platform of platform 9 aligns, the coarse grating glass ruler of platform base 12
Read head 33 aligns with grating scale 40 before X-axis platform, smart Grating glass ruler reading head 37 and the light after X-axis platform of platform base 12
Grid ruler 43 aligns.
The XY micromotion platforms 10 are connected with Y-axis macro-moving stage 9 by flexible hinge 36, are set on XY micromotion platforms 10
There are X-axis piezoelectric actuator 34 and Y-axis piezoelectric actuator 35.
Compound voice coil loudspeaker voice coil motor stator 2 drives compound voice coil loudspeaker voice coil rotor 3, promotes the X being connected with compound voice coil loudspeaker voice coil rotor 3
Axis macro-moving stage 11 realizes the high speed long stroke movement of X-direction；Composite rotating motor stator 6 drives composite rotating motor to turn at the same time
Sub- gear 5, driving Y-axis macro-moving stage 9 by pinion rack 32, high speed long stroke moves along the Y direction；On Y-axis macro-moving stage 9
X-axis piezoelectric actuator 34, Y-axis piezoelectric actuator 35 are realized and missed according to X-direction and Y-direction kinematic error driving flexible hinge respectively
Difference compensation and Ultra-precision positioning；The vibration of combined type motor during the motion is eliminated by floating platform 1 at the same time, it is final logical
High speed, long stroke and Ultra-precision positioning movement are realized in the combined type motor driving for crossing integral type.
When the utility model is used, rotor gear is engaged with the rack being fastened on connecting platform, driving Y-axis is grand dynamic flat
Platform high-speed motion in the Y-axis direction, is fastenedly connected the coarse grating glass ruler reading head in Y-axis macro-moving stage both sides and smart Grating glass
Ruler reading head reads the reading for the left grating scale of the Y-axis platform and right grating scale of Y-axis platform being fastened at left and right sides of X-axis motion platform respectively
Number, while obtaining measurement error, Y-axis piezoelectric actuator driving flexible hinge carries out error compensation and is accurately positioned；It is multiple
Synaeresis circle rotor drives X-axis macro-moving stage high-speed motion in the X direction by the decoupling motion of sliding block and guide rail, is fastened on
The coarse grating glass ruler reading head of platform base front and rear sides reads and is fastened on X-axis movement respectively with smart Grating glass ruler reading head
The reading of grating scale and grating scale after X-axis platform before the X-axis platform of platform front and rear sides, while obtaining measurement error, X-axis pressure
Electric drive driving flexible hinge carries out error compensation and is accurately positioned；It is final to obtain X, the Ultra-precision positioning of Y-direction.
The above is only the preferred embodiment of the present invention, is not intended to limit the utility model, for this area
Technical staff for, various modifications and changes may be made to the present invention, where within the spirit and principles of the present invention,
Any modification, equivalent replacement, improvement and so on, should be included within the scope of protection of this utility model.
Claims (9)
1. integral type high speed Ultra-precision positioning two-dimensional stage, including base, it is characterised in that：Floating is provided with the base
Platform and platform support base, and platform is supported to be provided with X-axis macro-moving stage on base, and platform supports base and X-axis macro-moving stage
Between be provided with that X-axis platform fromer rail is secondary and X-axis platform rear rail pair, be provided with Y-axis macro-moving stage, X-axis on X-axis macro-moving stage
The right guideway of Y-axis platform and Y-axis platform left rail pair are provided between macro-moving stage and Y-axis macro-moving stage, on Y-axis macro-moving stage
XY micromotion platforms are provided with, compound voice coil loudspeaker voice coil motor stator is provided with floating platform, are provided with compound voice coil loudspeaker voice coil motor stator multiple
Synaeresis circle rotor, is provided with composite rotating rotor in compound voice coil loudspeaker voice coil rotor, is set in composite rotating rotor
Composite rotating motor stator is equipped with, the front end of composite rotating rotor is provided with rotor gear, is provided with Y-axis macro-moving stage
Connecting platform, the lower part of connecting platform are provided with rack, and rack engages connection, the one side of X-axis macro-moving stage with rotor gear
Guide rail is provided with, sliding block is provided with guide rail, sliding block is fixedly connected with composite rotating motor stator.
2. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 1, it is characterised in that：The floating is put down
Platform includes upper mounting plate and lower platform, and the secondary and right guideway of left rail is provided between upper mounting plate and lower platform, and left rail is secondary and right
Guideway is rail plate pair, and the centre position of lower platform is provided with step-like groove, and the front-back of step-like groove is provided with
Positive stop and backstop, are provided with left guide rod and right guide rod, are set in the middle part of left guide rod and right guide rod between positive stop and backstop
Central block is equipped with, central block is connected with upper mounting plate, and left front spring and left back spring are provided with left guide rod, is set on right guide rod
Be equipped with before the right side spring and it is right after spring.
3. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 2, it is characterised in that：The center stop
Front damper is provided between block and front apron, rear damper is provided between central block and rear baffle.
4. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 1, it is characterised in that：The Y-axis is put down
The right guideway of platform and Y-axis platform left rail pair are rail plate pair, are led after X-axis platform fromer rail pair and X-axis platform secondary for slip
Guideway.
5. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 1, it is characterised in that：The complex tone
Left sliding bearing and right rolling bearing are provided between circle rotor and composite rotating rotor.
6. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 1, it is characterised in that：The compound rotation
Rotating motor rotor is fixedly connected with rotor gear.
7. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 1, it is characterised in that：The Y-axis is grand
Moving platform is provided with coarse grating glass ruler reading head close to the side of connecting platform, and the opposite side of Y-axis macro-moving stage is provided with nothing left
Grid glass ruler reading head, the Y direction of the upper surface of X-axis macro-moving stage are provided with the left grating scale of Y-axis platform and the right grating of Y-axis platform
Ruler, X-axis macro-moving stage lower part X-direction are provided with before X-axis platform grating scale, platform base after grating scale and X-axis platform
Leading flank be fixedly installed coarse grating glass ruler reading head, the trailing flank of platform base is fixedly installed smart Grating glass ruler
Read head.
8. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 7, it is characterised in that：The Y-axis is grand
The coarse grating glass ruler reading head of moving platform aligns with the left grating scale of Y-axis platform, the smart Grating glass ruler reading head of Y-axis macro-moving stage with
The right grating scale alignment of Y-axis platform, the coarse grating glass ruler reading head of platform base align with grating scale before X-axis platform, platform
The smart Grating glass ruler reading head of support base aligns with grating scale after X-axis platform.
9. integral type high speed Ultra-precision positioning two-dimensional stage according to claim 1, it is characterised in that：The XY fine motions
Platform is connected with Y-axis macro-moving stage by flexible hinge, and X-axis piezoelectric actuator is provided with XY micromotion platforms and Y-axis piezoelectricity drives
Dynamic device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721099109.0U CN207364560U (en) | 2017-08-30 | 2017-08-30 | Integral type high speed Ultra-precision positioning two-dimensional stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721099109.0U CN207364560U (en) | 2017-08-30 | 2017-08-30 | Integral type high speed Ultra-precision positioning two-dimensional stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207364560U true CN207364560U (en) | 2018-05-15 |
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ID=62350943
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721099109.0U Expired - Fee Related CN207364560U (en) | 2017-08-30 | 2017-08-30 | Integral type high speed Ultra-precision positioning two-dimensional stage |
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| Country | Link |
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| CN (1) | CN207364560U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107387959A (en) * | 2017-08-30 | 2017-11-24 | 河南工业大学 | Integral type high speed Ultra-precision positioning two-dimensional stage |
-
2017
- 2017-08-30 CN CN201721099109.0U patent/CN207364560U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107387959A (en) * | 2017-08-30 | 2017-11-24 | 河南工业大学 | Integral type high speed Ultra-precision positioning two-dimensional stage |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180515 Termination date: 20190830 |
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| CF01 | Termination of patent right due to non-payment of annual fee |