CN101409248A - Two-dimensional motion platform - Google Patents
Two-dimensional motion platform Download PDFInfo
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- CN101409248A CN101409248A CNA2007101818050A CN200710181805A CN101409248A CN 101409248 A CN101409248 A CN 101409248A CN A2007101818050 A CNA2007101818050 A CN A2007101818050A CN 200710181805 A CN200710181805 A CN 200710181805A CN 101409248 A CN101409248 A CN 101409248A
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- 230000004907 flux Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
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Abstract
The invention relates to a two-dimensional motion platform driven by a linear motor. The motion platform comprises a Y platform, an X platform installed on the Y platform, and a work table installed on the X platform. The X platform comprises the linear motor which drives the work table to move on the X platform and a linear guideway which supports the work table. The Y platform comprises the linear motor which drives the X platform to move on the Y platform and the linear guideway which supports the X platform. The X platform further comprises a magnetic shield plate which is arranged above a linear motor stator. An X platform stator magnetic field is effectively shielded by the structure, so as to reduce the possible influence of motor flux leakage on a processing workpiece. The change of a Y platform load and the change of load position are distributed to two or a plurality of motors, so as to reduce the dynamic error caused by the structure configuration or load change.
Description
Technical field
The present invention relates to a kind of motion platform, particularly the two-dimension moving platform of linear motor driving.
Background technology
The motion platform that traditional electric rotating machine drives, owing to be subjected to the restriction of factors such as inertia in the machine driving, rigidity, wearing and tearing, and can't realize the required high speed of service and precision, begin to adopt linear electric motors to replace electric rotating machine in therefore producing and drive platform motion.
Open day be that May 16, application number in 2007 are the two-dimension moving platform that No. 200610104984.3 Chinese invention patent application discloses a kind of linear motor driving, this platform comprises upper and lower two platform bases, and a carrying workbench; Upper mounting plate pedestal and carrying workbench are realized rectilinear motion by the linear motor driving that is disposed on lower platform and the upper mounting plate respectively, and both directions of motion are 90 degree quadratures; Upper and lower platform base side all is fixed with grating chi and corresponding grating ruler reading head.
This platform has the higher speed of service and precision than the motion platform that electric rotating machine drives, but still has deficiency.Its shortcoming is: the magnetic field that exists around the linear motor stator electric, owing to do not take any measure to protect, when being used for the semiconductor device fabrication of precisions such as wafer when platform, this magnetic field can exert an influence to the performance of processing work; Lower platform disposes single linear motor driving upper mounting plate action, when bigger variation takes place than big or load situation in load, this motor can't keep good dynamic characteristic because of carrying bigger load or structural change amount separately, produce certain dynamic error thus, and then the workpiece machining accuracy is impacted.
Summary of the invention
For overcoming above shortcoming, the technical problem that institute of the present invention desire solves provides a kind of magnetic field that can effectively shield the motion platform existence, significantly reduces the two-dimension moving platform by linear motor driving of motor flux leakage to the influence of processing work.
Another technical problem that institute of the present invention desire solves provide a kind of can be according to the change in location situation of load and load, the two-dimension moving platform by linear motor driving of preferable distribution bearing capacity.
The present invention solves the problems of the technologies described above the technical scheme that is adopted: a kind of two-dimension moving platform is provided, comprise the Y platform, be installed in the X platform on the Y platform and be installed in workbench on the X platform, the X platform comprises drive the linear electric motors that workbench moves and the line slideway of support table on the X platform, and the Y platform comprises drive linear electric motors that the X platform moves and the line slideway that supports the X platform on the Y platform.Described X platform, Y platform comprise base respectively, and magnetic shield panel is installed in the linear motor stator electric top at least one base.Described X platform, Y platform comprise base respectively, and magnetic shield panel is installed in the linear motor stator electric top at least one base.Described driving X platform is at the linear electric motors that move on the Y platform or drive the linear electric motors that workbench moves comprise two or more on the X platform.
The technique effect that the present invention adopts technique scheme to reach is: the present invention installs barricade on the stator of the linear electric motors on the motion platform, has effectively shielded the magnetic field of motor stator, has significantly reduced the influence of motor flux leakage to processing work; In addition, the X platform of motion platform of the present invention or Y platform are by the independent controlling and driving of two or more linear electric motors, can be according to the carrying of each motor of change in location situation dynamic assignment of load and load, jointly control when driving variation mean allocation with load to each motor, thereby reduce because the dynamic error that structural arrangements or load variations cause.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Fig. 1 is a structure principle chart of the present invention.
Embodiment
With reference to accompanying drawing 1 as can be known, the present invention includes an X platform, Y platform and workbench 5.The Y platform comprises base 1, and a secondary parallel linear guides 2 is installed on the Y platform base 1; The X platform comprises base 3, is supported by Y platform line slideway 2 to be connected with the Y platform, and a secondary parallel linear guides 4 is installed on the X platform base 3, and its installation direction is vertical mutually with Y platform line slideway 2 installation directions.
Workbench 5 is supported by X platform line slideway 4 and is connected with the X platform; The stator 6 of two or more linear electric motors is installed between two line slideways 2 on the Y platform base 1, the mover 7 of corresponding with it Y platform linear electric motors is installed in X platform base 3 bottoms, the Y platform side is installed a grating chi 8, and corresponding with it Y platform grating ruler reading head 9 is installed in the side of X platform base 3; The stator 10 of linear electric motors is installed between two line slideways 4 on the X platform base 3, the mover 11 of corresponding with it X platform linear electric motors is installed in the bottom of workbench 5, the X platform side is installed a grating chi 12, corresponding with it X platform grating ruler reading head 13 is installed in the side of workbench 5, configuration magnetic shield panel 14 in linear motor stator electric 10 tops on the X platform base.
In like manner, the stator of two or more linear electric motors also can be installed on the X platform base, the mover of corresponding with it X platform is installed in the workbench bottom; The also configurable magnetic shield panel in linear motor stator electric top on the Y platform base.
X platform grating chi 12 is formed X position of platform feedback transducer with X platform grating ruler reading head 13, Y platform grating chi 8 is formed Y position of platform feedback transducer with Y platform grating ruler reading head 9, the position of X, Y position of platform feedback transducer difference testing platen 5 and X platform base 3, and this value fed back to control system, realize that the XY platform accurately locatees.
After the magnetic shield panel 14 that the magnetic line of force that X platform linear motor stator electric 10 magnetic fields are produced is disposed by the X platform stops, between magnetic shield panel 14 and X platform linear motor stator electric 10, form magnetic loop, greatly reduce the influence in the suffered magnetic field of processing work.
The Y platform adopts the independent controlling and driving of two or more linear electric motors or jointly controls driving, when controlling separately, system is according to the carrying of each motor of change in location situation dynamic assignment of load and load, when jointly controlling with the change in location mean allocation of load and load to each motor, thereby reduce under single motor-driven state because the dynamic error that structural arrangements or load variations cause.
Claims (5)
1. two-dimension moving platform, comprise the Y platform, be installed in the X platform on the Y platform and be installed in workbench on the X platform, the X platform comprises drive the linear electric motors that workbench moves and the line slideway of support table on the X platform, the Y platform comprises linear electric motors that driving X platform moves and the line slideway that supports the X platform on the Y platform, it is characterized in that: described X platform, Y platform comprise base respectively, and magnetic shield panel is installed in the linear motor stator electric top at least one base.
2. two-dimension moving platform according to claim 1 is characterized in that: the linear electric motors that described driving X platform moves on the Y platform comprise two or more, and the stator of described linear electric motors is installed on the Y platform base, and mover is installed on the X platform base.
3. two-dimension moving platform according to claim 1 and 2, it is characterized in that: the linear electric motors that described driving workbench moves on the X platform comprise two or more, the stator of described linear electric motors is installed on the X platform base, and mover is installed in the bottom of workbench.
4. two-dimension moving platform according to claim 1, it is characterized in that: described two-dimension moving platform also comprises the X position of platform feedback transducer of feedback operation platform movement position, comprises grating chi that is installed in X platform sidepiece and the grating ruler reading head that is installed in the workbench sidepiece.
5. two-dimension moving platform according to claim 1, it is characterized in that: described two-dimension moving platform also comprises the Y position of platform feedback transducer of feedback operation platform and X platform motion position, comprises grating chi that is installed in Y platform sidepiece and the grating ruler reading head that is installed in X platform sidepiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101818050A CN101409248A (en) | 2007-10-12 | 2007-10-12 | Two-dimensional motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101818050A CN101409248A (en) | 2007-10-12 | 2007-10-12 | Two-dimensional motion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101409248A true CN101409248A (en) | 2009-04-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101818050A Pending CN101409248A (en) | 2007-10-12 | 2007-10-12 | Two-dimensional motion platform |
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| CN (1) | CN101409248A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101795088A (en) * | 2010-03-23 | 2010-08-04 | 清华大学 | Multi-leg linear piezoelectric driver and workbench |
| CN103033522A (en) * | 2012-12-14 | 2013-04-10 | 中国科学院深圳先进技术研究院 | Method and system for detecting millimeter wave samples |
| CN104111418A (en) * | 2013-04-19 | 2014-10-22 | 群光电子(苏州)有限公司 | VCM (voice coil motor) jitter detection machine |
| CN104765382A (en) * | 2015-03-26 | 2015-07-08 | 上海大学 | Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform |
| CN105834767A (en) * | 2016-04-27 | 2016-08-10 | 广东工业大学 | High-speed and high-precision symmetric motor driving platform |
| CN105896785A (en) * | 2016-04-27 | 2016-08-24 | 广东工业大学 | High-speed high-precision two-dimensional movement platform |
| CN106026512A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | High-precision and high-acceleration horizontal-vertical combinative motion platform |
| CN106020246A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | Motion platform |
| CN108772718A (en) * | 2018-07-27 | 2018-11-09 | 广东阿达智能装备有限公司 | linear motion platform |
| CN108987291A (en) * | 2017-05-31 | 2018-12-11 | 捷进科技有限公司 | The manufacturing method of semiconductor manufacturing apparatus and semiconductor devices |
| CN110788689A (en) * | 2019-12-04 | 2020-02-14 | 广东罗庚机器人有限公司 | Tail end double-freedom-degree electronic floating device |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
-
2007
- 2007-10-12 CN CNA2007101818050A patent/CN101409248A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101795088A (en) * | 2010-03-23 | 2010-08-04 | 清华大学 | Multi-leg linear piezoelectric driver and workbench |
| CN101795088B (en) * | 2010-03-23 | 2012-12-26 | 清华大学 | Multi-leg linear piezoelectric driver and workbench |
| CN103033522A (en) * | 2012-12-14 | 2013-04-10 | 中国科学院深圳先进技术研究院 | Method and system for detecting millimeter wave samples |
| CN103033522B (en) * | 2012-12-14 | 2015-09-16 | 中国科学院深圳先进技术研究院 | Millimeter wave sample detection methods and system |
| CN104111418A (en) * | 2013-04-19 | 2014-10-22 | 群光电子(苏州)有限公司 | VCM (voice coil motor) jitter detection machine |
| CN104765382A (en) * | 2015-03-26 | 2015-07-08 | 上海大学 | Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform |
| CN105834767A (en) * | 2016-04-27 | 2016-08-10 | 广东工业大学 | High-speed and high-precision symmetric motor driving platform |
| CN105896785A (en) * | 2016-04-27 | 2016-08-24 | 广东工业大学 | High-speed high-precision two-dimensional movement platform |
| CN106026512A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | High-precision and high-acceleration horizontal-vertical combinative motion platform |
| CN106020246A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | Motion platform |
| CN108987291A (en) * | 2017-05-31 | 2018-12-11 | 捷进科技有限公司 | The manufacturing method of semiconductor manufacturing apparatus and semiconductor devices |
| CN108987291B (en) * | 2017-05-31 | 2022-05-27 | 捷进科技有限公司 | Semiconductor manufacturing apparatus and method for manufacturing semiconductor device |
| CN108772718A (en) * | 2018-07-27 | 2018-11-09 | 广东阿达智能装备有限公司 | linear motion platform |
| CN110788689A (en) * | 2019-12-04 | 2020-02-14 | 广东罗庚机器人有限公司 | Tail end double-freedom-degree electronic floating device |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
| WO2023103724A1 (en) * | 2021-12-10 | 2023-06-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilization system |
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Open date: 20090415 |