CN106078640A - A kind of 3 axial planes are to bit platform - Google Patents
A kind of 3 axial planes are to bit platform Download PDFInfo
- Publication number
- CN106078640A CN106078640A CN201610605423.5A CN201610605423A CN106078640A CN 106078640 A CN106078640 A CN 106078640A CN 201610605423 A CN201610605423 A CN 201610605423A CN 106078640 A CN106078640 A CN 106078640A
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- Prior art keywords
- unit module
- bearing support
- lower bearing
- mobile unit
- moving direction
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
The invention discloses a kind of 3 axial planes to bit platform, including: base, work top, the first mobile unit module being arranged on base, the second mobile unit module and the 3rd mobile unit module, work top is supported by mobile unit module；First, second, third mobile unit module all includes substrate, lower bearing support, piezo-electric motor, driving sheet, upper branching holder, supporting connecting portion, and the moving direction of upper branching holder is vertical with the moving direction of lower bearing support；The moving direction of the lower bearing support of the first mobile unit module and the lower bearing support of the second mobile unit module is identical；The moving direction of the lower bearing support of the 3rd mobile unit module is perpendicular to the moving direction of the lower bearing support of first, second mobile unit module.The present invention is high to the aligning accuracy of bit platform, and volume is smaller and more exquisite.
Description
Technical field
The present invention relates to accurate control alignment device, particularly relate to one and can realize X, Y-direction translation and Plane Rotation
To bit platform.
Background technology
3 axles are a kind of X of can be implemented in, Y-direction translation and the platform rotated around the axle being perpendicular to x/y plane to bit platform,
Its optical detection, silk-screen, expose, processing and other fields of fitting tool be widely used.Fig. 1 is a kind of to bit platform in prior art
Structural representation, as it is shown in figure 1, this to bit platform by 100, Y-axis translation stage 101 of an X-axis translation stage and a rotation
Turntable 102 vertically stacked forms, and each platform is respectively by respective stepping or driven by servomotor.Due to motor and each platform
Size, this vertically stacked bit platform is typically had bigger height, thus be subject in the use of the occasion of limited space
To limiting.
The problem bigger in order to solve the para-position podium level size of traditional vertically stacked, a kind of XXY or UVW puts down altogether
In the face of bit platform arises at the historic moment.As in figure 2 it is shown, copline is in bit platform, platform base arranges 4 cell module, its
In, cell module is made up of motor, screw mechanism and a bearing, and electric motor driven screw mechanism drives a bearing to move, workbench
Face is arranged in a bearing.Cell module M1, M2 the moving direction of bearing identical, the movement of a bearing of cell module M3
Direction is vertical with the moving direction of a bearing of M1, M2, and cell module M4 is free axle.Cell module M1, M2 bearing by
Motor drives and moves along the x-axis, and a bearing of cell module M3 is driven by motor and moves along Y-axis, by controlling two X-axis and Y-axis
The motor of cell module drive bearing to move, work top can be realized within the specific limits along X, the translation of Y-axis and plane
Rotation, reach the purpose of para-position.
Reduce in vertically stacked para-position platform size although bit platform is compared by copline, but copline para-position has been put down
Platform usually uses electromagnetic motor (servo, motor) to realize the movement of a bearing, stepping or servomotor list to be driven
A bearing for unit's module moves along X or Y-axis and needs to coordinate a set of screw mechanism to realize, and screw mechanism is plus the chi of motor self
Very little, make the size of whole aligning platform reduce and be restricted, and due to the precision of motor, the factor such as backhaul gap of screw mechanism
Also the aligning accuracy to bit platform can be affected.
Summary of the invention
In order to overcome the deficiencies in the prior art, it is an object of the invention to provide a kind of 3 axial planes to bit platform, it can solve
Certainly existing problem not enough and bulky to bit platform aligning accuracy.
The purpose of the present invention realizes by the following technical solutions:
A kind of 3 axial planes are to bit platform, including: base, work top, the first mobile unit of being arranged on described base
Module, the second mobile unit module and the 3rd mobile unit module, described work top is supported by mobile unit module；First moves
Moving cell module, the second mobile unit module and the 3rd mobile unit module all include: be fixedly arranged on the substrate on described base；Can
The most reciprocatingly it is arranged at the lower bearing support on described substrate；It is arranged at the piezo-electric motor on described substrate, described pressure
Electric notor is positioned opposite with described lower bearing support；Driving sheet, described driving sheet is that be arranged at described lower bearing support with described piezoelectricity
On the side that motor is relative, the driving foot of described piezo-electric motor contacts with described driving sheet and drives described lower bearing support to move
Dynamic；Can the most reciprocatingly be arranged at the upper branching holder on described lower bearing support, the moving direction of described upper branching holder with
The moving direction of described lower bearing support is vertical；Can around own axis the supporting that is arranged on described upper branching holder connect
Portion, described supporting connecting portion is connected with described work top；The lower bearing support and second of described first mobile unit module moves
The moving direction of the lower bearing support of cell module is identical, and the moving direction of the lower bearing support of described 3rd mobile unit module is vertical
Moving direction in the lower bearing support of described first, second mobile unit module.
Preferably, free axle unit module, described first, second, third mobile unit module and free axle list are also included
Unit's module is arranged at four Angle Position of described base.
Preferably, described free axle unit module includes: be fixedly arranged on the substrate on described base；Can linearly move back and forth
Be arranged at the lower bearing support on described substrate；Can the most reciprocatingly be arranged at the upper supporting on described lower bearing support
Seat, the moving direction of described upper branching holder is vertical with the moving direction of described lower bearing support；Can arrange around own axis
Supporting connecting portion on described upper branching holder, described supporting connecting portion is connected with described work top.
Preferably, the moving direction of described lower bearing support is parallel to the centrage of described driving sheet.
Preferably, between described lower bearing support and described substrate, pass through between described upper branching holder and described lower bearing support
Guide rail, the structure of guide groove are connected.
Preferably, described lower bearing support is provided with lower bearing support guide groove, arranges first in described lower bearing support guide groove and lead
Rail, described first guide rail is decussation roller guide rail, and described decussation roller guide rail is connected with substrate and lower bearing support respectively.
Preferably, described upper branching holder is provided with upper branching holder guide groove, arranges second in described upper branching holder guide groove and lead
Rail, described second guide rail is decussation roller guide rail, and described decussation roller guide rail is connected with upper branching holder and lower bearing support respectively.
Preferably, described 3rd mobile unit module is positioned at the side of line between first, second mobile unit module.
Preferably, described first mobile unit module and described second mobile unit module spacing side by side are arranged.
Preferably, the moving direction of the lower bearing support of described free axle unit module and described first mobile unit module
The moving direction of lower bearing support is identical.
Compared to existing technology, the beneficial effects of the present invention is: the present invention uses piezo-electric motor to substitute traditional electromagnetism horse
Reach the movement controlling a bearing, to the driving of 3 cell module and control to realize coplanar work surface by piezo-electric motor
Translation and rotation, reach the purpose of para-position；And use piezo-electric motor, the shifting of a bearing just can be controlled without screw mechanism
Dynamic, not only increase aligning accuracy, and can also produce volume less to bit platform, reduce the restriction using space.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation to bit platform in prior art；
Fig. 2 is the another kind of structural representation to bit platform in prior art；
Fig. 3 is the side view of the embodiment of the present invention；
Fig. 4 is the structural representation of invention unit module.
Detailed description of the invention
Below, in conjunction with accompanying drawing and detailed description of the invention, the present invention is described further.
Piezo-electric motor (or claiming ultrasound electric machine, ultrasonic motor) is the reciprocal piezoelectric effect utilizing piezoelectric, i.e. piezoelectric ceramics
Material deforms under electric field action and drives the mover of motor to move.According to the pattern driven, piezo-electric motor can be divided into directly
Line piezo-electric motor and rotary piezo-electric motor, the piezo-electric motor used by the present invention refers to Linear piezoelectric motor.
As it is shown on figure 3,3 axial planes of the present embodiment include base 1, work top the 2, first mobile unit mould to bit platform
Group the 3, second mobile unit module the 4, the 3rd mobile unit module 5 and free axle unit module 6.First mobile unit module 3,
Two mobile unit module the 4, the 3rd mobile unit modules 5 and free axle unit module 6 may be contained within base 1, and lay respectively at
Four Angle Position of base 1, work top is supported by cell module.First mobile unit module the 3, second mobile unit module 4
Identical with the structure of the 3rd mobile unit module 5, structure to mobile unit module as a example by the first mobile unit module 3 below
Illustrate.
Shown in Fig. 4, the first mobile unit module 3 includes substrate 3-1, piezo-electric motor 3-2, drives sheet 3-3, lower support
Seat 3-4, upper branching holder 3-5 and supporting connecting portion 3-6.Substrate 3-1 is fixedly installed on base 1, and lower bearing support 3-4 can be linearly
Reciprocatingly it is arranged on substrate 3-1, is connected by the structure of guide rail, guide groove between lower bearing support 3-4 with substrate 3-1, this
In embodiment, lower bearing support 3-4 is provided with lower bearing support guide groove a, the first guide rail 3-7 is set in lower bearing support guide groove a, the
One guide rail 3-7 uses decussation roller guide rail.Decussation roller guide rail is a kind of mechanical part being commonly used in motion platform.Its bag
Containing two sections of relatively-movable band V-groove tracks, roller body cross arrangement and track in V-groove, is had to contact to reduce by two rails
The frictional force of road relative motion, two sections of tracks of decussation roller guide rail are connected with substrate 3-1 and lower bearing support 3-4 respectively, lower
Bearing 3-4 can move back and forth along the first guide rail 3-7 opposing substrate 3-1.Piezo-electric motor 3-2 is positioned opposite with lower bearing support 3-4, drives
Moving plate 3-3 is arranged on the side relative with piezo-electric motor 3-2 of lower bearing support 3-4, drives the centerline parallel of sheet in first
Guide rail 3-7, is i.e. parallel to the moving direction of lower bearing support.The driving foot 3-2a of piezo-electric motor 3-2 contacts with driving sheet 3-3,
When piezo-electric motor 3-2 works, when it drives foot by driving sheet 3-3 to promote lower bearing support 3-4, two sections of decussation roller guide rail
Slide staggers, and lower bearing support 3-4 moves along the first guide rail 3-7.
Upper branching holder 3-5 can the most reciprocatingly be arranged on lower bearing support 3-4, the moving direction of upper branching holder with
The moving direction of lower bearing support is vertical.Again by guide rail, the structure phase of guide groove between upper branching holder 3-5 and lower bearing support 3-4
Even, in the present embodiment, upper branching holder 3-5 is provided with upper branching holder guide groove b, in upper branching holder guide groove b, the second guide rail is set
3-8, the second guide rail 3-8 and the first guide rail 3-7 are perpendicular, and second guide rail of the present embodiment is also adopted by decussation roller guide rail, intersect
Two sections of tracks of roller guide are connected with lower bearing support 3-4 and upper branching holder 3-5 respectively, and upper branching holder 3-5 can be along the second guide rail
3-8 moves back and forth relative to lower bearing support 3-4.Supporting connecting portion 3-6 is arranged on upper branching holder 3-5, and supporting connecting portion 3-6 can be around
Own axes rotates relative to upper branching holder 3-5, and supporting connecting portion 3-6 is connected with work top.The supporting connecting portion of the present embodiment
3-6 is cylindrical.
The first mobile unit module 3 of the present embodiment and the second mobile unit module 4 spacing side by side are arranged.First moves list
The lower bearing support of unit's module 3 and the moving direction identical (x-axis direction in Fig. 3) of the lower bearing support of the second mobile unit module 4, it
Moving direction be parallel to the line between first, second mobile unit module.The 3rd mobile unit module 5 of the present embodiment
The side of line between first, second mobile unit module.Moving direction (Fig. 3 of the lower bearing support of the 3rd mobile unit module 5
Middle y-axis direction) it is perpendicular to the moving direction of the lower bearing support of first, second mobile unit module, the i.e. first mobile unit module 3
Identical with the moving direction of the lower bearing support of the second mobile unit module 4, the movement of the lower bearing support of the 3rd mobile unit module 5
Direction is perpendicular to the moving direction of the lower bearing support of the first mobile unit module 3 or the second mobile unit module 4.The present embodiment will
3rd mobile unit module is arranged at the side of line between first, second mobile unit module, but the 3rd mobile unit module is also
Other positions can be arranged at, if the lower bearing support moving direction of piezo-electric motor driving and first, second mobile unit module
Lower bearing support moving direction vertically.The structure of free axle unit module and first, second, third mobile unit module
Structure roughly the same, simply do not have piezo-electric motor and drive sheet, the shifting of free axle unit module 6 lower bearing support of the present embodiment
Dynamic direction is identical with the moving direction of first, second mobile unit module lower bearing support, but free axle unit module 6 lower bearing support
Moving direction can also be identical with the moving direction of the lower bearing support of the 3rd mobile unit module.
When work top to be controlled moves along the x-axis direction, the first mobile unit module 3 and the second mobile unit module 4
Piezo-electric motor by drive sheet drive respective lower bearing support move, now the piezo-electric motor of the 3rd mobile unit module 5 is not
Work, the upper branching holder of the 3rd mobile unit module 5 is servo-actuated along the second guide rail, and the lower bearing support of free axle unit module 6 is along the
One guide rail is servo-actuated；When work top to be controlled moves along the y-axis direction, the piezo-electric motor of the 3rd mobile unit module 5 is by driving
Moving plate drives its lower bearing support to move, now the first mobile unit module 3 and the piezo-electric motor not work of the second mobile unit module 4
Making, the upper branching holder of the first mobile unit module 3 and the second mobile unit module 4 is servo-actuated along its second guide rail, free axle unit
The upper branching holder of module is servo-actuated along its second guide rail；When work top to be controlled oblique mobile time, the first mobile unit module 3,
The piezo-electric motor of the second mobile unit module the 4, the 3rd mobile unit module 5 is simultaneously by driving sheet to drive respective lower bearing support
Mobile.
The present invention uses piezo-electric motor to substitute the movement of traditional electromagnetic motor control bearing, by piezo-electric motor to 3
The driving of individual cell module and controlling can realize coplanar work surface along X, Y, translation within the specific limits and scratching is perpendicular to
The rotation of plane axis, reaches the purpose of para-position；And piezo-electric motor has light, thin, short and small feature, use piezo-electric motor, no
Just can control the movement of a bearing with screw mechanism, not only increase aligning accuracy, and it is less to produce volume
To bit platform, reduce the restriction using space.
Additionally, in previous embodiment, use decussation roller to lead between substrate and lower bearing support, upper branching holder and lower bearing support
Rail guides the movement of bearing, simplifies structure, can reduce the volume of whole parts, but, substrate and lower bearing support, on
Prop up and common guide rail between bearing with lower bearing support, can also be used to coordinate the movement guiding a bearing with guide groove, such as at substrate
On guide rail is set, lower bearing support bottom surface arranges the guide groove that coordinates with guide rail, in like manner, lower bearing support arranges guide rail, upper
Support and guide groove etc. is set on seat bottom face, or in turn, at substrate surface and lower bearing support surface configuration guide groove, at lower bearing support
Bottom surface and upper branching holder bottom surface are arranged at the guide rail etc. that guide groove coordinates.
For a person skilled in the art, can technical scheme as described above and design, make other each
Plant corresponding change and deformation, and all these changes and deforms the protection model that all should belong to the claims in the present invention
Within enclosing.
Claims (10)
1. 3 axial planes are to a bit platform, including: base, work top, the first mobile unit mould of being arranged on described base
Group, the second mobile unit module and the 3rd mobile unit module, described work top is supported by mobile unit module；
It is characterized in that:
First mobile unit module, the second mobile unit module and the 3rd mobile unit module all include:
It is fixedly arranged on the substrate on described base；
Can the most reciprocatingly be arranged at the lower bearing support on described substrate；
Being arranged at the piezo-electric motor on described substrate, described piezo-electric motor is positioned opposite with described lower bearing support；
Driving sheet, described driving sheet is arranged on the side relative with described piezo-electric motor of described lower bearing support, described piezoelectricity
The driving foot of motor contacts with described driving sheet and drives described lower bearing support to move；
Can the most reciprocatingly be arranged at the upper branching holder on described lower bearing support, the moving direction of described upper branching holder with
The moving direction of described lower bearing support is vertical；
Can be around own axis ground the supporting connecting portion that is arranged on described upper branching holder, described supporting connecting portion and described work
Make table top to be connected；
The moving direction of the lower bearing support of described first mobile unit module and the lower bearing support of the second mobile unit module is identical,
The moving direction of the lower bearing support of described 3rd mobile unit module is perpendicular to lower of described first, second mobile unit module
The moving direction of bearing.
3 axial planes the most according to claim 1 are to bit platform, it is characterised in that: also include free axle unit module, the
One, second, third mobile unit module and free axle unit module are arranged at four Angle Position of described base.
3 axial planes the most according to claim 2 are to bit platform, it is characterised in that: described free axle unit module includes:
It is fixedly arranged on the substrate on described base；
The lower bearing support being arranged on described substrate that can linearly move back and forth；
The upper branching holder being arranged on described lower bearing support that can linearly move back and forth, the moving direction of described upper branching holder with
The moving direction of described lower bearing support is vertical；
Can be around the supporting connecting portion being arranged on described upper branching holder of own axis, described supporting connecting portion and described work
Make table top to be connected.
3 axial planes the most according to claim 1 are to bit platform, it is characterised in that: the moving direction of described lower bearing support is put down
Row is in the centrage of described driving sheet.
5. according to 3 axial planes described in claim 1 or 3 or 4 to bit platform, it is characterised in that: described lower bearing support is with described
Between substrate, it is connected by the structure of guide rail, guide groove between described upper branching holder and described lower bearing support.
3 axial planes the most according to claim 5 are to bit platform, it is characterised in that: it is provided with down on described lower bearing support and props up
Bearing guide groove, arranges the first guide rail in described lower bearing support guide groove, described first guide rail is decussation roller guide rail, and described intersection is rolled
Post guide rail is connected with substrate and lower bearing support respectively.
3 axial planes the most according to claim 5 are to bit platform, it is characterised in that: it is provided with on described upper branching holder and props up
Bearing guide groove, arranges the second guide rail in described upper branching holder guide groove, described second guide rail is decussation roller guide rail, and described intersection is rolled
Post guide rail is connected with upper branching holder and lower bearing support respectively.
3 axial planes the most according to claim 1 are to bit platform, it is characterised in that: described 3rd mobile unit module is positioned at
The side of line between first, second mobile unit module.
3 axial planes the most according to claim 1 are to bit platform, it is characterised in that: described first mobile unit module and institute
State the second mobile unit module spacing side by side to arrange.
3 axial planes the most according to claim 3 are to bit platform, it is characterised in that: lower of described free axle unit module
The moving direction of bearing is identical with the moving direction of the lower bearing support of described first mobile unit module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610605423.5A CN106078640A (en) | 2016-07-27 | 2016-07-27 | A kind of 3 axial planes are to bit platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610605423.5A CN106078640A (en) | 2016-07-27 | 2016-07-27 | A kind of 3 axial planes are to bit platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106078640A true CN106078640A (en) | 2016-11-09 |
Family
ID=57479114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610605423.5A Pending CN106078640A (en) | 2016-07-27 | 2016-07-27 | A kind of 3 axial planes are to bit platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106078640A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109676577A (en) * | 2019-02-26 | 2019-04-26 | 苏州舍勒智能科技有限公司 | A kind of linear motor to bit platform |
| CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
| CN113595440A (en) * | 2020-10-09 | 2021-11-02 | 中国科学院合肥物质科学研究院 | Double-folding cross multi-dimensional piezoelectric motor, control method thereof and scanning probe microscope |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109676577A (en) * | 2019-02-26 | 2019-04-26 | 苏州舍勒智能科技有限公司 | A kind of linear motor to bit platform |
| CN113595440A (en) * | 2020-10-09 | 2021-11-02 | 中国科学院合肥物质科学研究院 | Double-folding cross multi-dimensional piezoelectric motor, control method thereof and scanning probe microscope |
| CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
| CN113059537B (en) * | 2021-02-26 | 2022-07-15 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
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Application publication date: 20161109 |
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