CN113595440A - Double-folding cross multi-dimensional piezoelectric motor, control method thereof and scanning probe microscope - Google Patents
Double-folding cross multi-dimensional piezoelectric motor, control method thereof and scanning probe microscope Download PDFInfo
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Abstract
A double-folded cross multi-dimensional piezoelectric motor, a control method thereof and a scanning probe microscope are provided. This application is a divisional application with application number 202011073350.2. The invention provides a double-folding cross two-dimensional piezoelectric motor which comprises a sliding plate, wherein the sliding plate is of an upper and lower double-layer structure, an XY piezoelectric body frame is arranged in the sliding plate and is arranged between double-layer plates in parallel, two ends of the XY piezoelectric body frame in the X direction and the Y direction are respectively an X + end, an X-end, a Y + end and a Y-end, an X piezoelectric body part and a Y piezoelectric body part are arranged in the XY piezoelectric body frame, the X piezoelectric body part and the Y piezoelectric body part are vertically and crosswise arranged, free ends of the X + piezoelectric body and the X-piezoelectric body are pressed with the lower plate of the double-layer plates, and free ends of the Y + piezoelectric body and the Y-piezoelectric body are pressed with the upper plate of the double-layer plates. The advantages are that: the piezoelectric body has high utilization rate, large thrust, small size, self-adjusting elasticity, wide stroke and large working temperature area.
Description
The invention relates to a split application, the original application has the application number of 202011073350.2, the application date of 10 months and 09 days in 2020, and the title of the invention is 'double-folded cross multi-dimensional piezoelectric motor and control method thereof and scanning probe microscope'
Technical Field
The invention relates to a piezoelectric stepper and a control method thereof, and a three-dimensional piezoelectric motor and a scanning probe microscope manufactured by using the piezoelectric stepper, in particular to a two-dimensional piezoelectric motor with opposite friction and resistance reduction, a control method thereof, and a three-dimensional piezoelectric motor and a scanning probe microscope manufactured by using the piezoelectric stepper, belonging to the technical field of piezoelectric positioners and the technical field of scanning probe microscopes.
Background
The piezoelectric motor is a device capable of simultaneously realizing microscopic nano-scale positioning accuracy and macroscopic centimeter-scale stroke, and mainly utilizes piezoelectric materials to generate small and accumulative periodic electrostrictive deformation so as to realize stepping. Because of high positioning precision and small volume, the micro-electromechanical positioning device is widely applied to positioning processing of micro-electromechanical products, precise mobile platforms in the optical field, precise control in the biomedical field, nano scientific imaging and the like. Is an indispensable high-precision technology application in modern scientific research and industrial manufacturing.
In recent years, the development trend of two-dimensional piezoelectric motors is small structure, large thrust, strong rigidity, large stroke and high precision. However, there are contradictions between these indexes. Such as: the structure is small, large stroke is difficult to realize, thrust is difficult to reduce, the precision is damaged when the thrust is large, and the small structure and high rigidity are difficult to be compatible.
In 2018, we propose "a two-dimensional piezoelectric motor and a control method thereof using opposite friction to reduce resistance" (see patent publication No. CN 109525142 a for details), and the technical characteristics are as follows: including slide, XY deformation piezoelectricity and base, XY deformation piezoelectricity sets up between base and slide, and its one end is fixed with the base, and the other end is fixed with the slide, and its characterized in that still includes the flexible deformation piezoelectricity of X and the flexible deformation piezoelectricity of Y, reciprocal anchorage between the flexible deformation piezoelectricity of X and the flexible deformation piezoelectricity of Y forms X direction deformation and the independent controllable structure of Y direction deformation, is called perpendicular deformation structure, sets up will the positive pressure that the both ends that the flexible deformation piezoelectricity of X deformed and the both ends that the flexible deformation piezoelectricity of Y deformed and slide were pressed mutually simultaneously. The invention has the advantages of simple structure, large thrust, high precision and large stroke.
However, the invention still has the following disadvantages: (1) the four contact points between the vertical deformation structure and the sliding plate are difficult to be in the same plane. Because three points determine a plane, four contact points between the vertical deformation structure and the sliding plate are difficult to be ideally located on the plane of the sliding plate, and if one contact point is not in good contact with the sliding plate, the friction force of the point is influenced, so that the friction force cannot be well counteracted when the motor works, which is fatal to the whole motor. (2) The thrust is not large enough. The motor is operated by inertia force, the output thrust is limited (3) and it is difficult to precisely adjust the positive pressure between the vertical structure and the slide plate. The stressed piece needs to be adjusted for many times to enable the positive pressure of four contact points between the vertical structure and the sliding plate to be approximately equal, and the operation is difficult. (4) The stepping speed of the motor is limited. Since the motor operates by using inertial force, the XY piezoelectric transformer needs to be deformed slowly at the start of stepping, which limits the stepping speed of the motor.
Disclosure of Invention
The present invention provides a novel double-overlapping cross two-dimensional piezoelectric motor and a control method thereof, so as to solve the problems in the background art. The invention also provides a three-dimensional piezoelectric motor and a scanning probe microscope made of the motor.
In order to achieve the purpose, the invention provides the following technical scheme:
a double-folding cross two-dimensional piezoelectric motor comprises a sliding plate, wherein the sliding plate is of an upper-lower double-layer structure, an XY piezoelectric frame is arranged in the sliding plate and is arranged between double-layer plates in parallel, two ends of the XY piezoelectric frame in the X direction and the Y direction are respectively an X + end, an X-end, a Y + end and a Y-end, an X piezoelectric body part and a Y piezoelectric body part are arranged in the XY piezoelectric frame, and the X piezoelectric body part and the Y piezoelectric body part are vertically arranged in a cross manner;
the X piezoelectric body part comprises an X + piezoelectric body and an X-piezoelectric body, one end of the X + piezoelectric body is fixed at an X-end, the other end of the X + piezoelectric body is a free end and points to the X + end, one end of the X-piezoelectric body is fixed at the X + end, the other end of the X-piezoelectric body is a free end and points to the X-end, and the X + piezoelectric body and the X-piezoelectric body are arranged up and down to form a double-layer folding structure;
the Y piezoelectric body part comprises a Y + piezoelectric body and a Y-piezoelectric body, one end of the Y + piezoelectric body is fixed at the Y-end, the other end of the Y + piezoelectric body is a free end and points to the Y + end, one end of the Y-piezoelectric body is fixed at the Y + end, the other end of the Y-piezoelectric body is a free end and points to the Y-end, and the Y + piezoelectric body and the Y-piezoelectric body are arranged up and down to form a double-layer folding structure;
the free ends of the X + piezoelectric body and the X-piezoelectric body are pressed with the lower plate of the double-layer plate, and the free ends of the Y + piezoelectric body and the Y-piezoelectric body are pressed with the upper plate of the double-layer plate.
As a further scheme of the invention: the free ends of the X + piezoelectric body, the X-piezoelectric body, the Y + piezoelectric body and the Y-piezoelectric body are fixedly connected with spring pieces and are in sliding connection with the sliding plate through the spring pieces.
A control method of a double-folded cross two-dimensional piezoelectric motor realizes one-step walking in an X + direction according to the following time sequence deformation arrangement:
s1, the X + piezoelectric body is in an extension state, the X-piezoelectric body is in a contraction state, and the Y + piezoelectric body and the Y-piezoelectric body are both in extension states or contraction states;
s2, the X + piezoelectric body and the X-piezoelectric body are simultaneously reversely deformed, and in the process, the Y + piezoelectric body and the Y-piezoelectric body are simultaneously subjected to periodic opposite stretching deformation for at least half period;
s3, the X + piezoelectric body is elongated and deformed, and the other three piezoelectric bodies are static;
s4, carrying out contraction deformation on the X-piezoelectric body, and keeping the other three piezoelectric bodies still; completing one-step walking in the X + direction;
the remaining X-, Y-, and Y-directions are similar to the X + direction.
A three-dimensional piezoelectric motor is manufactured by using a double-folded cross two-dimensional piezoelectric motor, a Z piezoelectric motor is arranged at the upper end of an XY piezoelectric body, and the output thrust direction of the Z piezoelectric motor is perpendicular to the plane of an XY piezoelectric body frame.
As a further scheme of the invention: the Z piezoelectric motor is a three-friction stepper pushed by two firm bimorphs side by side, or a stacked piezoelectric motor pressed by opposite friction, or an inertia piezoelectric motor device driven by multiple regions, or a bimorph linear nanometer positioning piezoelectric driver.
The scanning probe microscope manufactured by using the double-folded cross two-dimensional piezoelectric motor further comprises a base and a multi-region driven inertia piezoelectric motor device, wherein the multi-region driven inertia piezoelectric motor device is fixed on an XY piezoelectric body frame, and one part of the surface of the base is just opposite to the output thrust direction of the multi-region driven inertia piezoelectric motor device.
As a further scheme of the invention: the XY piezoelectric frame and the multi-zone driven inertia piezoelectric motor device are both fixed on the base, and the output thrust direction of the multi-zone driven inertia piezoelectric motor device is just opposite to the direction of the XY piezoelectric frame.
As a further scheme of the invention: the multi-zone driven inertia piezoelectric motor device is fixed on a base, the output end of the multi-zone driven inertia piezoelectric motor device is fixedly connected with the base, and one part of the surface of the base is parallel to the X direction and the Y direction.
The working principle of the double-overlapping cross two-dimensional piezoelectric motor is as follows: taking the stepping in the X + direction of the motor as an example, when operating, the Y + and Y-piezoelectrics are simultaneously in an extended or contracted state, the X + piezoelectrics are kept in an extended state, and the X-piezoelectrics are kept in a contracted state. Then, the X + and X-piezoelectrics are reversely deformed at the same time, and in the process, the Y + and Y-piezoelectrics are periodically deformed in opposite directions at a higher frequency. Because the Y + and Y-piezoelectrics deform in opposite directions, the two sliding friction forces applied to the Y + and Y-piezoelectrics are cancelled out, and the deformation directions of the X + and X-piezoelectrics are the same, so that the Y + and Y-piezoelectrics are applied with two static friction forces in the same direction. The sum of the maximum static friction force borne by the X + and the X-piezoelectric body is larger than the sum of the dynamic friction force borne by the Y + and the Y-piezoelectric body. This will cause the center of the cross XY piezo to be pulled a distance relative to the sled. Then, the X + piezoelectric body is subjected to elongation deformation, and the remaining three piezoelectric bodies remain stationary. And finally, the X-piezoelectric body is subjected to shrinkage deformation, and the other three piezoelectric bodies are kept still. Because only one piezoelectric body is deformed each time, the sum of the static friction force borne by the three piezoelectric bodies is larger than the sliding friction force borne by the deformed piezoelectric body, and the position of the center of the cross XY piezoelectric body relative to the sliding plate is unchanged in the process. The motor has now stepped one step in the X + direction. Such repetition may enable walking step by step in the X + direction. A similar principle allows the motor to step in four directions, since the motor is symmetrical in four walking directions. It should be noted that, in the second step of the above stepping process, when the X + and X-piezos are deformed reversely at the same time, the Y + and Y-piezos complete at least a deformation movement over a half cycle, otherwise, the motor may be inefficient or even not working. This is because: if the Y + and Y-piezoelectrics are still in a static state when the contraction or extension deformation of the X + and X-piezoelectrics begins, the X + and X-piezoelectrics can work only by overcoming the static friction force between the Y + and Y-piezoelectrics and the sliding plate, if the sum of the thrust force of the X + and X-piezoelectrics is larger than the sum of the static friction force borne by the Y + and Y-piezoelectrics, the motor can still work, but the output efficiency of the motor is greatly reduced, otherwise, the motor cannot work. This analysis is equally true for all four direction motor steps.
The sliding plate can be arranged into an integral double-layer plate structure, the cross XY piezoelectric body is arranged between the double-layer plates in parallel, the free end of the Y + and Y-piezoelectric body is pressed with one of the double-layer plates, and the X + and X-piezoelectric body is pressed with the other double-layer plate. Since three points determine a plane, it is difficult to precisely contact the free ends of the four piezoelectric bodies with a plane at the same time. The two contact surfaces can avoid the problem, the cross XY piezoelectric body clamped in the middle of the sliding plate is similar to a seesaw, the positive pressure from the sliding plate on the free ends of the four piezoelectric bodies can be automatically adjusted according to the lever principle, and the sliding friction force on the free ends of the four piezoelectric bodies can be automatically equal when the motor works under the condition that the quality of the cross XY piezoelectric body is not counted.
Spring pieces can be respectively fixed at the free ends of the X +, X-, Y + and Y-piezoelectrics and are elastically pressed with the sliding plate. Therefore, the four spring pieces slide on the sliding plate to travel, the cross XY piezoelectric body can be protected, the wear of the cross XY piezoelectric body on the sliding plate is avoided, and the elastic force of long-range interaction can be provided.
The double-folding cross two-dimensional piezoelectric motor can be made into a three-dimensional piezoelectric motor, a Z piezoelectric motor is additionally arranged on the XY piezoelectric frame and fixed with the XY piezoelectric frame, and the output thrust direction of the Z piezoelectric motor is perpendicular to the X direction and the Y direction.
The Z piezo motor may be a multi-zone driven inertial piezo motor arrangement, wherein the patent publication No.: CN103986365B may also be a three friction stepper driven side by a solid dual piezoelectric, wherein the chinese patent publication no: CN102856305B, also can be a stacked piezoelectric motor pressed by using opposite friction force, wherein the patent publication no: CN104953889A, also can be a bimorph linear nano positioning piezoelectric actuator, and its patent publication no: CN 1996737A.
The double-folding cross two-dimensional piezoelectric motor can be manufactured into a scanning probe microscope, a multi-region driven inertia piezoelectric motor device (Chinese patent publication number: CN103986365B) and a base are additionally arranged, the double-folding cross two-dimensional piezoelectric motor is fixed on the base, the multi-region driven inertia piezoelectric motor device is fixed on an XY piezoelectric body frame, and a part of the surface of the base is arranged to face the output thrust direction of the multi-region driven inertia piezoelectric motor device. Therefore, the double-folding cross two-dimensional piezoelectric motor can drive the multi-region driven inertia piezoelectric motor device to move on an XY two-dimensional plane, and the multi-region driven inertia piezoelectric motor device is responsible for walking and scanning in the Z direction.
The sliding plate and the multi-region driven inertia piezoelectric motor device can be fixed on the base, and the output thrust direction of the multi-region driven inertia piezoelectric motor device is opposite to the center of the cross XY piezoelectric body. The structure can realize that the multi-region driven inertia piezoelectric motor device can be used for walking and scanning in the Z direction after the double-folding cross two-dimensional piezoelectric motor finishes the movement on an XY two-dimensional plane.
The multi-zone driven inertial piezoelectric motor device can also be fixed on a base, the output end of the inertial piezoelectric motor device is fixed with the sliding plate, and a part of the surface of the base is parallel to the X direction and the Y direction. Thus, the multi-region driven inertia piezoelectric motor device can drive the sliding plate to walk and scan in the Z direction, and the cross XY piezoelectric body can move on the sliding plate in an XY two-dimensional plane
According to the principle, compared with the prior art, the invention has the beneficial effects that:
1. the piezoelectric material of the two-dimensional piezoelectric motor has high use efficiency and large thrust, the four piezoelectric bodies are wide enough and long enough, and the deformation of the whole piezoelectric body contributes to the work of the motor, so that the thrust of the motor is large. The three-dimensional motor and the scanning probe microscope made of the material can be applied to extreme conditions such as low-temperature strong magnetic fields.
2. The two-dimensional piezoelectric motor is small in size, the four piezoelectric bodies are not arranged on the same plane, the length and the width of the two-dimensional piezoelectric motor are not limited by each other, the size of the two-dimensional motor on the XY plane can be set to be as small as possible on the premise that the thrust of the two-dimensional motor is not sacrificed, and the three-dimensional motor and the scanning probe microscope which are made of the two-dimensional piezoelectric motor can be applied to the environment with limited space.
3. The utility model provides an elasticity automatically regulated that cross XY piezoelectricity received if adopt the slide of integrative double-deck plate structure to press from both sides cross XY piezoelectricity in the centre elastically, Y +, Y-piezoelectricity and X +, X-piezoelectricity respectively with two different plane contacts of slide, is similar to the seesaw structure, and according to lever principle, the elasticity that comes from the slide that four piezoelectricity received can automatically regulated, and this will simplify complicated two-dimensional motor frictional force and adjust the step.
4. The two-dimensional piezoelectric motor has large stroke, and the theoretical stroke is only limited by the size of the sliding plate.
5. The two-dimensional piezoelectric motor working temperature area of this application is big: the pressure source between the cross XY piezoelectric body and the sliding plate is elastic force with long-range action, so that the original matching of friction force cannot be obviously changed even if the temperature is greatly changed during working, and the motor can work normally and is very suitable for being applied in extreme conditions such as low-temperature strong magnetic fields and the like.
Drawings
FIG. 1 is a front view of embodiment 1 of the present application;
FIG. 2 is a side view of the present application in example 1;
FIG. 3 is a top view of the present application in example 1;
FIG. 4 is a front view of embodiment 2 of the present application;
FIG. 5 is a side view of the present application in example 2;
FIG. 6 is a top view of the present application in example 2;
FIG. 7 is a schematic view of a control method according to embodiment 1 of the present application;
fig. 8 and 9 are schematic views of a three-dimensional piezoelectric motor according to embodiment 3 of the present application;
FIG. 10 is a schematic view of a scanning probe microscope according to example 4 of the present application;
FIG. 11 is a schematic view of a scanning probe microscope for separation according to example 4 of the present application;
fig. 12 is a schematic view of an umbrella scanning probe microscope according to example 4 of the present application.
In the figure: 1-sled, 2-XY piezo frame, 3a-Y + piezo, 3b-X + piezo, 3 c-Y-piezo, 3 d-X-piezo, 4-multi-zone driven inertial piezoelectric motor device, 5-base, P1-X + piezo control signal waveform, P2-X-piezo control signal waveform, P3-Y +, Y-piezo control signal waveform.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1-3, the present embodiment is a basic type of double-stacked cross two-dimensional piezoelectric motor, including an XY piezoelectric frame 2, an X + piezoelectric body 3b, an X-piezoelectric body 3d, a Y + piezoelectric body 3a, and a Y-piezoelectric body 3c, where two ends of the XY piezoelectric frame 2 in the X direction and the Y direction are respectively referred to as an X + end, a Y + end, and a Y-end, one end of the X + piezoelectric body 3b is fixed to the X-end, the other end is a free end and points to the X + end, one end of the X-piezoelectric body 3d is fixed to the X + end, the other end is a free end and points to the X-end, and the X + piezoelectric body 3b and the X-piezoelectric body 3d are arranged in an up-down structure to form a double-layer folded X piezoelectric body; one end of the Y + piezoelectric body 3a is fixed at the Y-end, the other end is a free end and points to the Y + end, one end of the Y-piezoelectric body 3c is fixed at the Y + end, the other end is a free end and points to the Y-end, and the Y + piezoelectric body 3a and the Y-piezoelectric body 3c are arranged in an up-and-down structure to form a double-layer folding Y piezoelectric body; the double-layer folding X piezoelectric body and the double-layer folding Y piezoelectric body are arranged on the XY piezoelectric body frame 2 in a cross-shaped overlapping mode, the XY piezoelectric body and the XY piezoelectric body frame 2 form a cross-shaped XY piezoelectric body, a sliding plate 1 which is matched with the cross-shaped XY piezoelectric body to slide in the X direction and the Y direction is additionally arranged, four positive pressures with equal magnitude are arranged, and the free ends of the X +, X-, Y + and Y-piezoelectric bodies 3a, 3b, 3c and 3d are pressed on the sliding surface of the sliding plate 1.
Taking the stepping in the X + direction of the motor as an example, when operating, the Y + piezoelectric bodies 3a and 3c are simultaneously extended or contracted, the X + piezoelectric body 3b is kept in an extended state, and the X-piezoelectric body 3d is kept in a contracted state. Then, the X +, X-piezoelectric bodies 3b, 3d are simultaneously deformed in the opposite directions, and in this process, the Y +, Y- piezoelectric bodies 3a, 3c are periodically deformed in opposite directions at a high frequency. Since the Y + and Y- piezoelectric members 3a and 3c are deformed in the opposite directions, the two sliding frictional forces applied thereto cancel each other out, and the X + and X-piezoelectric members 3b and 3d are deformed in the same direction, and are subjected to the two static frictional forces in the same direction. The sum of the maximum static friction forces applied to the X +, X-piezoelectric bodies 3b, 3d is larger than the sum of the kinetic friction forces applied to the Y +, Y- piezoelectric bodies 3a, 3 c. This will result in the center of the cross XY piezo being pulled a distance relative to the sledge 1. Then, the X + piezoelectric body 3b is subjected to elongation deformation, and the remaining three piezoelectric bodies 3a, 3c, and 3d are held still. Finally, the X-piezoelectric body 3d is subjected to shrinkage deformation, and the remaining three piezoelectric bodies 3a, 3b, and 3c are kept still. Because only one piezoelectric body is deformed each time, the sum of the static friction force borne by the three piezoelectric bodies is larger than the sliding friction force borne by the deformed piezoelectric body, and the position of the center of the cross XY piezoelectric body relative to the sliding plate 1 is unchanged in the process. The motor has now stepped one step in the X + direction. Such repetition may enable walking step by step in the X + direction. A similar principle allows the motor to step in four directions, since the motor is symmetrical in four walking directions.
Example 2
Referring to fig. 4-6, in this embodiment, the double-layer slide-plate type double-overlapped cross two-dimensional piezoelectric motor is provided, in this embodiment, the slide plate 1 is provided as an integral double-layer plate structure, the cross XY piezoelectric frame 2 is disposed in parallel between the double-layer plates, the free ends of the Y + piezoelectric bodies 3a and the Y-piezoelectric bodies 3c are pressed against one of the double-layer plates, and the X + piezoelectric bodies 3b and the X-piezoelectric bodies 3d are pressed against the other of the double-layer plates. Since three points determine a plane, it is difficult to simultaneously and precisely contact the free ends of the four piezoelectric bodies Y + piezoelectric body 3a, X + piezoelectric body 3b, Y-piezoelectric body 3c, and X-piezoelectric body 3d with a plane. The two contact surfaces can avoid the problem, the cross XY piezoelectric frame 2 clamped in the middle of the sliding plate 1 is similar to a seesaw, the positive pressure from the sliding plate 1 on the free ends of the four piezoelectric bodies Y + piezoelectric bodies 3a, X + piezoelectric bodies 3b, Y-piezoelectric bodies 3c and X-piezoelectric bodies 3d can be automatically adjusted according to the lever principle, and the sliding friction force on the free ends of the four piezoelectric bodies Y + piezoelectric bodies 3a, X + piezoelectric bodies 3b, Y-piezoelectric bodies 3c and X-piezoelectric bodies 3d can be automatically equal when the motor works under the condition that the mass of the cross XY piezoelectric bodies is not counted.
Example 3
In the present embodiment, a spring-plate-type double-laminated cross two-dimensional piezoelectric motor is used, and in the above embodiments 1 and 2, spring plates are fixed to the free ends of the Y + piezoelectric body 3a, the X + piezoelectric body 3b, the Y-piezoelectric body 3c, and the X-piezoelectric body 3d, respectively, and the spring plates are elastically pressed against the slide plate 1. Therefore, the four spring pieces slide on the sliding plate 1 to travel, the cross XY piezoelectric body can be protected, the abrasion of the cross XY piezoelectric body on the sliding plate 1 can be avoided, and the elastic force of long-range interaction can be provided.
Example 4
Referring to fig. 7, a control method of a basic dual-stacked cross two-dimensional piezoelectric motor according to this embodiment is shown, and a control signal waveform corresponding to the control method of the dual-stacked cross two-dimensional piezoelectric motor is shown in fig. 7.
Taking the stepping in the X + direction of the motor as an example, the working part comprises the following steps
S1, the Y + piezoelectric body 3a and the Y-piezoelectric body 3c are contracted at the same time, the X + piezoelectric body 3b is kept in an extended state, and the X-piezoelectric body 3d is kept in a contracted state;
s2, in the second step, the X + piezoelectric body 3b and the X-piezoelectric body 3d are simultaneously deformed reversely, and in the process, the Y + piezoelectric body 3a and the Y-piezoelectric body 3c are subjected to periodic opposite stretching deformation at a higher frequency;
s3, in the third step, the X + piezoelectric body 3b is elongated and deformed, and the other three piezoelectric bodies, namely the Y + piezoelectric body 3a, the Y-piezoelectric body 3c and the X-piezoelectric body 3d, are kept still;
s4, the fourth step, the X-piezo 3d is contracted and deformed, and the remaining three piezo Y + piezo 3a, X + piezo 3b, and Y-piezo 3c are kept still.
Repeating the above steps can achieve a large range of stepping of the motor in the X + direction.
Similar working steps are applied to the stepping of the motor in the other three directions.
It should be noted that, in the second step of the stepping process, when the X + piezoelectric body 3b and the X-piezoelectric body 3d are deformed in opposite directions at the same time, the Y + piezoelectric body 3a and the Y-piezoelectric body 3c complete at least a deformation movement over a half cycle, otherwise, the motor may be inefficient or even not working. This is because: if the Y + piezoelectric body 3a and the Y-piezoelectric body 3c are still in a static state when the contraction or extension deformation of the X + piezoelectric body 3b and the X-piezoelectric body 3d has already started, the X + piezoelectric body 3b and the X-piezoelectric body 3d need to overcome the static friction force between the Y + piezoelectric body 3a and the Y-piezoelectric body 3c and the sliding plate 1 to work, and if the sum of the thrust forces of the X + piezoelectric body 3b and the X-piezoelectric body 3d is greater than the sum of the static friction forces borne by the Y + piezoelectric body 3a and the Y-piezoelectric body 3c, the motor can still work, but the output efficiency of the motor is greatly reduced, otherwise, the motor cannot work. This analysis is equally true for all four direction motor steps.
Example 5
In this embodiment, the three-dimensional piezoelectric motor is formed by the double-laminated cross two-dimensional piezoelectric motor in embodiment 1, a Z piezoelectric motor is additionally provided on the XY piezoelectric frame 2, and the Z piezoelectric motor is fixed to the XY piezoelectric frame 2, and the direction of the output thrust of the Z piezoelectric motor is perpendicular to the X direction and the Y direction. I.e. perpendicular to the plane of the XY piezoelectric body 2.
The Z piezoelectric motor may be a multi-zone driven inertial piezoelectric motor device 4 (e.g., a relationship motor disclosed in CN103986365B), see fig. 8-9, a three-friction stepper in which two firm piezoelectric bodies are pushed side by side (e.g., a stepper disclosed in CN 102856305B), a stacked piezoelectric motor pressed by opposite friction (e.g., a stacked piezoelectric motor disclosed in CN 104953889A), or a dual piezoelectric body linear nano-positioning piezoelectric actuator (e.g., a piezoelectric actuator disclosed in CN 1996737A).
Example 6
Referring to fig. 10, in this embodiment, the double-folded cross two-dimensional piezoelectric motor in embodiment 1 is made into a scanning probe microscope, a multi-zone driven inertial piezoelectric motor device 4 (such as the piezoelectric motor disclosed in chinese patent CN103986365B) and a base 5 are added, the double-folded cross two-dimensional piezoelectric motor is fixed on the base 5, the multi-zone driven inertial piezoelectric motor device 4 is fixed on the XY piezoelectric frame 2, and a part of the surface of the base 5 is set to face the output thrust direction of the multi-zone driven inertial piezoelectric motor device 4. Thus, the double-folded cross two-dimensional piezoelectric motor can drive the multi-region driven inertial piezoelectric motor device 4 to move on an XY two-dimensional plane, and the multi-region driven inertial piezoelectric motor device 4 is responsible for walking and scanning in a Z direction.
Example 7
Referring to fig. 11, in this embodiment, the double-folded cross two-dimensional piezoelectric motor in embodiment 1 is manufactured into a scanning probe microscope, a multi-zone driven inertial piezoelectric motor device 4 (such as the piezoelectric motor disclosed in chinese patent CN103986365B) and a base 5 are added, the slide plate 1 and the multi-zone driven inertial piezoelectric motor device 4 are both fixed on the base 5, and the output thrust direction of the multi-zone driven inertial piezoelectric motor device 4 is set to face the center of the cross XY piezoelectric frame 2. With the structure, after the double-folded cross two-dimensional piezoelectric motor finishes moving on an XY two-dimensional plane, the inertia piezoelectric motor device 4 driven by multiple zones can be used for walking and scanning in the Z direction.
Example 8
Referring to fig. 12, in this embodiment, the double-folded cross two-dimensional piezoelectric motor described in embodiment 1 is manufactured into a scanning probe microscope, a multi-zone driven inertial piezoelectric motor device 4 (such as a piezoelectric piston disclosed in chinese patent CN103986365B) and a base 5 are additionally provided, the multi-zone driven inertial piezoelectric motor device 4 is fixed on the base 5, an output end of the multi-zone driven inertial piezoelectric motor device is fixed with the slide board 1 to form an umbrella-shaped structure, and a part of a surface of the base 5 is parallel to the X direction and the Y direction. Thus, the multi-region driven inertial piezoelectric motor device 4 can drive the sliding plate 1 to walk and scan in the Z direction, and the cross XY piezoelectric body can move on the sliding plate 1 in an XY two-dimensional plane
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. A double-folded cross two-dimensional piezoelectric motor comprises a sliding plate (1), and is characterized in that the sliding plate (1) is of an upper-lower double-layer structure, an XY piezoelectric frame (2) is arranged in the sliding plate (1), the XY piezoelectric frame (2) is arranged between double-layer plates in parallel, two ends of the XY piezoelectric frame (2) in the X direction and the Y direction are respectively an X + end, an X-end, a Y + end and a Y-end, an X piezoelectric body part and a Y piezoelectric body part are arranged in the XY piezoelectric frame (2), and the X piezoelectric body part and the Y piezoelectric body part are arranged in a vertical cross mode;
the X piezoelectric body part comprises an X + piezoelectric body (3b) and an X-piezoelectric body (3d), one end of the X + piezoelectric body (3b) is fixed at an X-end, the other end of the X + piezoelectric body is a free end and points to the X + end, one end of the X-piezoelectric body (3d) is fixed at the X + end, the other end of the X-piezoelectric body is a free end and points to the X-end, and the X + piezoelectric body (3b) and the X-piezoelectric body (3d) are arranged up and down to form a double-layer folding structure;
the Y piezoelectric body part comprises a Y + piezoelectric body (3a) and a Y-piezoelectric body (3c), one end of the Y + piezoelectric body (3a) is fixed at a Y-end, the other end of the Y + piezoelectric body is a free end and points to the Y + end, one end of the Y-piezoelectric body (3c) is fixed at the Y + end, the other end of the Y-piezoelectric body is a free end and points to the Y-end, and the Y + piezoelectric body (3a) and the Y-piezoelectric body (3c) are arranged up and down to form a double-layer folding structure;
the free ends of the X + piezoelectric body (3b) and the X-piezoelectric body (3d) are pressed with the lower plate of the double-layer plate, and the free ends of the Y + piezoelectric body (3a) and the Y-piezoelectric body (3c) are pressed with the upper plate of the double-layer plate.
2. The double-folded cross two-dimensional piezoelectric motor according to claim 1, wherein the free ends of the X + piezoelectric body (3b), the X-piezoelectric body (3d), the Y + piezoelectric body (3a), and the Y-piezoelectric body (3c) are fixedly connected with a spring piece and are slidably connected with the sliding plate (1) through the spring piece.
3. The control method of a double-folded cross two-dimensional piezoelectric motor according to any one of claims 1 to 2, wherein the one-step walking in the X + direction is realized in a deformed arrangement in the following timing sequence:
s1, wherein the X + piezoelectric body (3b) is in an extension state, the X-piezoelectric body (3d) is in a contraction state, and the Y + piezoelectric body (3a) and the Y-piezoelectric body (3c) are both in an extension state or a contraction state;
s2, the X + piezoelectric body (3b) and the X-piezoelectric body (3d) are simultaneously reversely deformed, and in the process, the Y + piezoelectric body (3a) and the Y-piezoelectric body (3c) are simultaneously subjected to periodic opposite stretching deformation for at least half period;
s3, the X + piezoelectric body (3a) is elongated and deformed, and the other three piezoelectric bodies are static;
s4, the X-piezoelectric body (3d) contracts and deforms, and the other three piezoelectric bodies are static; completing one-step walking in the X + direction;
the remaining X-, Y-, and Y-directions are similar to the X + direction.
4. A three-dimensional piezoelectric motor made of a double-folded cross two-dimensional piezoelectric motor according to claim 1, wherein a Z piezoelectric motor is arranged at the upper end of the XY piezoelectric frame (2), and the output thrust direction of the Z piezoelectric motor is perpendicular to the plane of the XY piezoelectric frame (2).
5. The three-dimensional piezoelectric motor according to claim 4, wherein the Z piezoelectric motor is a three friction stepper with rigid bimorphs pushed side by side, or a stacked piezoelectric motor pressed with opposing friction, or a multizone driven inertial piezoelectric motor arrangement (4), or a bimorph linear nanopositioning piezoelectric actuator.
6. Scanning probe microscope using a double folded cross two dimensional piezoelectric motor according to any of claims 1-2, characterized by further comprising a base (5) and a multi-zone driven inertial piezoelectric motor arrangement (4), said multi-zone driven inertial piezoelectric motor arrangement (4) being fixed to the XY piezoelectric frame (2), a part of the surface of the base (5) facing the output thrust direction of said multi-zone driven inertial piezoelectric motor arrangement (4).
7. A scanning probe microscope according to claim 6 wherein the XY frame (2) and the multi-zone driven inertial piezoelectric motor arrangement (4) are both fixed to a base (5), the output thrust direction of the multi-zone driven inertial piezoelectric motor arrangement (4) being the direction facing the XY frame (2).
8. Scanning probe microscope according to claim 7, characterized in that the multizone driven inertial piezo motor arrangement (4) is fixed on a base (5), the output of the multizone driven inertial piezo motor arrangement (4) is fixedly connected to the sled (1), a part of the surface of the base (5) is parallel to the X-direction and the Y-direction.
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| CN113595440B (en) | 2022-12-23 |
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