CN1987661B - Flat surface stage apparatus - Google Patents
Flat surface stage apparatus Download PDFInfo
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- CN1987661B CN1987661B CN2006101701466A CN200610170146A CN1987661B CN 1987661 B CN1987661 B CN 1987661B CN 2006101701466 A CN2006101701466 A CN 2006101701466A CN 200610170146 A CN200610170146 A CN 200610170146A CN 1987661 B CN1987661 B CN 1987661B
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- surface plate
- supporting member
- plane
- plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/26—Fluid-pressure drives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7007—Alignment other than original with workpiece
- G03F9/7011—Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Machine Tool Units (AREA)
Abstract
The present invention provides a flat surface stage apparatus with light weight and low-cost manufacture, flat surface stage surface holding the plane of high precision without heavy fixed tray. The supporting member (10) surports the flat panel (1) loading the workpiece on the three or the more. And that, the drive member in which the flat panel (1) is shifed along in the XY-direction is setted. The supporting member (10) is provided with the air bearing configured relate to the flat panel (1), the flat panel (1) is floated up by the supporting member (10), therefor the flat panel (1) is shifted in the direction perpendicular to the flat panel (1). Moreover, the shifting condition of the flat panel is retained the selected shifting condition, and the plane of loading workpiece of the flat panel is kept the level and the plane.
Description
Technical field
The present invention relates to flat surface stage apparatus, the surface plate of mounting workpiece etc. can be moved along the XY direction.
Background technology
As the XY flat surface stage apparatus along XY direction (the 2 perpendicular direction of principal axis on the plane parallel) plane of motion plate, known for example patent documentation 1 described device with the face of surface plate.
This objective table uses as the workpiece objective table of for example exposure device.In recent years, liquid crystal panel or tellite maximize every year, follow in this, and the workpiece objective table of the exposure device of their exposures is also maximized.
1 piece of sheet metal that the flat surface stage that absorption workpiece in the XY flat surface stage is used is processed accurately.If maximize, its weight increases, and need apply bigger power in position alignment etc. when the XY direction moves.
Maximize and objective table that the weight increase also can be moved with less power known for example patent documentation 2 described objective tables as flat surface stage.Expression makes flat surface stage float mobile structure by air in Fig. 4 of this communique.
In Fig. 9, the schematic configuration that expression is floated mobile objective table by air.
Air bearing 101 more than 3 places is installed in the flat surface stage 100 of mounting workpiece W, on the processed accurately price fixing 102 in surface, floats mobile.
The travel mechanism of flat surface stage utilizes mechanism shown in for example above-mentioned patent documentation 1, that 2 X-axis mobile members and 1 moving member of y-axis shift be installed on flat surface stage 100.
And as the driving mechanism of flat surface stage, known for example patent documentation 3 described surface motors (surface motor) objective table also considers to use surface motor as the driving mechanism of above-mentioned objective table shown in Figure 9.
The surface motor objective table by the plane pressing plate that is provided with the salient pole of ferromagnetism body with being chessboard trellis or striated, and is constituted by the moving body (cushion) that air etc. floats, make moving body generation shifting magnetic field, make moving body mobile on pressing plate.
In Fig. 9, under the situation of appropriate table surface motor, on price fixing 102, be provided with pressing plate, at the back side of flat surface stage 100 moving body is installed.
Patent documentation 1: Japanese kokai publication hei 8-25163 communique
Patent documentation 2: TOHKEMY 2002-32129 communique
Patent documentation 3: Japanese kokai publication hei 9-23689 communique
Objective table device shown in Figure 9 has as following problem.
(1) be not the surface of the flat surface stage of mounting workpiece, the surface of price fixing also must process with high plane precision.In objective table shown in Figure 9, by air bearing flat surface stage is floated on price fixing and move, if the flatness of disc setting surface is low, flat surface stage can tilt or move up and down.Therefore, the surface of price fixing also must process with high plane precision.
(2) as mentioned above, need make the surface of price fixing keep the plane with high precision, but the face that is provided with of price fixing is final, the ground at the workshop of placement flat surface stage be not necessarily smooth.Therefore, even disc setting surface is processed with high plane precision, if the rigidity of price fixing is low, price fixing can deflection etc. when then being provided with price fixing, thereby is difficult to make its surface keep the plane with high precision.That is, for the surface that makes price fixing with high precision keeps the plane, need to improve the rigidity of price fixing, and increase the weight of price fixing.
Under the situation about using as the objective table of the exposure device of big liquid crystal board of workpiece size or printed circuit board, for example weight becomes 1t～10t.
Therefore, it is very heavy that installation weight becomes, and installation cost raises.
Summary of the invention
The present invention provides a kind of flat surface stage apparatus in order to solve above-mentioned known problem points, to its objective is, does not need the heavy price fixing of operating weight, just can make the flat surface stage surface keep the plane with high precision, and installation weight is light and cost of manufacture is also cheap.
The present invention is as the above-mentioned problem of following solution.
(1) a kind of flat surface stage apparatus, possess: the surface plate of mounting workpiece, 3 sentence the supporting member of this surface plate of upper support and make above-mentioned surface plate at least with this plane parallel the travel mechanism that moves, it is characterized in that: above-mentioned supporting member has: make cylinder that axle moves up and down by thrust arbitrarily, and the air locking mechanism of the position of the above-below direction of fixing above-mentioned axle, and be provided with on the top of above-mentioned supporting member and the surface plate air bearing of arranged opposite mutually
Above-mentioned supporting member, by above-mentioned axle is moved up and down by thrust arbitrarily, make above-mentioned surface plate by thrust arbitrarily at the direction top offset vertical with the plane of this surface plate, and, keep the selecteed displacement state of air bearing by the position of the fixing above-mentioned above-below direction of above-mentioned air locking mechanism.
Thus, make the displacement state of surface plate keep selecteed displacement state, make the face maintenance level and the plane of the workpiece of the fixing above-mentioned surface plate of absorption.
(2) above-mentioned travel mechanism has the driving mechanism of the air bearing that is arranged at above-mentioned supporting member, this driving mechanism comprise moving member with the magnetic pole that produces the shifting magnetic field, and at the back side of above-mentioned surface plate and setting mutually opposed with above-mentioned air bearing, dispose the plane pressing plate of salient pole chessboard trellis or striated.
The invention effect
The present invention can obtain following effect.
(1) because by supporting member with thrust arbitrarily make surface plate with the perpendicular direction top offset in the plane of surface plate, so do not use price fixing with high plane precision, just can make the surface maintenance level and the plane of surface plate, and, because do not need price fixing, so weight that can alleviator.
(2),, can reduce installation cost so the face that need process with high plane precision has only the surface of the surface plate of mounting workpiece because do not need price fixing.
(3) because surface plate is floated, so can be with less power plane of motion plate by air.
(4) as the driving mechanism utilization of surface plate by the moving member with the magnetic pole that produces the shifting magnetic field, and chessboard trellis or striated dispose the surface motor that the plane pressing plate of salient pole constitutes, thereby do not need mechanical XY θ driving mechanism, can simplify the structure of objective table.And the part number reduces makes assembling easily, and cost that can implement device reduces.And, also can eliminate the wearing and tearing of mechanism components of the work of following driving mechanism or the dust that produces here.
Description of drawings
Fig. 1 is the figure (outboard profile) of structure of the flat surface stage of expression the 1st embodiment of the present invention.
Fig. 2 is the figure (vertical view) of structure of the flat surface stage of expression the 1st embodiment of the present invention.
Fig. 3 is the figure of structure of the supporting member of expression embodiments of the invention.
Fig. 4 is the figure of an example of the gap/prestrain curve of expression air bearing.
The figure of the work when Fig. 5 is the situation of flatness deficiency of explanation base plate.
Fig. 6 is the cushion of expression the 2nd embodiment of the present invention and the figure of pressing plate
Fig. 7 is the figure of cross-section structure that expression has the pad of cushion.
Fig. 8 is the figure of the principle of work that moves of explanation cushion.
Fig. 9 is that expression is floated the figure of the schematic configuration of mobile known objective table by air.
Symbol description
1 surface plate
1a plane compensation plate (vacuum adsorption ditch, pressing plate)
10,10 ' supporting member
11 air bearing
The 11a air blows out portion's (air ejection portion, pad)
The 11b swivel bearing
12 way stations
13 fixed discs
14 springs
15 cylinders
The 15a axle
16a pad (fixed disc)
16b air locking mechanism
17 cushions (moving member)
The 17a permanent magnet
17b～17e magnetic pole
17f, the 17g coil
The 17h squit hole
20 base plates
31,32 X-axis mobile members
33 y-axis shifts move member
Embodiment
Fig. 1, Fig. 2 are the figure of structure of the XY flat surface stage of expression the 1st embodiment of the present invention, and Fig. 1 is a sectional side view, and Fig. 2 is a planimetric map.
In addition, Fig. 1 is the A-A sectional view of Fig. 2, and the expression surface plate that makes Fig. 2 is the moving member of X-axis mobile member and y-axis shift along the travel mechanism that moves with this parallel plane perpendicular XY direction in Fig. 1.
In Fig. 1, Fig. 2, plane processing has been carried out on the surface of the surface plate 1 of mounting workpiece W accurately, is formed with the vacuum suction groove 1a that absorption keeps workpiece W.The size of surface plate 1 is 2200mm * 2600mm * 300mm for example.
Be provided with air bearing 11 on the top of supporting member 10.And, with the air bearing 11 opposed parts at the back side of surface plate 1, in order to prevent to spill and the plane compensation plate 1a that has an even surface is installed from the air of air bearing 11 ejections.Surface plate 1 is floated by the air that sprays from air bearing 11.
And surface plate 1 is moved along the XY direction by X-axis mobile member 31,32 and the moving member 33 of y-axis shift as shown in Figure 2.
For example, by X-axis drive member 31,32 is driven along equidirectional same amount simultaneously, flat surface stage 1 is moved to directions X (longitudinal direction of Fig. 2),, flat surface stage 1 is moved to Y direction (transverse direction of Fig. 2) by driving Y-axis drive member 33.
Further, by changing the amount of movement of above-mentioned 2 X-axis drive member 31,32, and be mated and drive Y-axis drive member 33, make surface plate 1, just can carry out the location of θ direction around the axle vertical angle that needs of rotation only with surface plate 1.
Fig. 3 is the structure of expression supporting member 10.This figure is a sectional view.
On the base plate 20 of device, be provided with cylinder 15.Cylinder 15 is by changing the air pressure of supplying with, and axle 15a is moved up and down by thrust arbitrarily.
The axle 15a of cylinder 15 is connected on the way station 12, is provided with spring 14 between cylinder 15 and way station 12.
In the extension of the both sides of way station 12 downward direction fixed disc 13 (for example leaf spring) being installed is, is provided with the pad 16a that is used for fixing fixed disc 13 in the both sides of fixed disc 13, and pad 16a is driven by air locking mechanism 16b.
When to air locking mechanism 16b air supply, pad 16a direction of arrow in figure moves, and is held fixingly by fixed disc 13, and the position of above-below direction of the axle 15a of cylinder 15 is fixed.
Be provided with air bearing 11 on the top of way station 12.Air bearing 11 can be used to be possessed from porous matter or is provided with the commercially available parts of pad 11a (being called air ejection portion) of the surface ejection air of tap hole.
The pad 11a of air bearing 11 freely yaw is installed on way station 12 by swivel bearing 11b movably.
The order of the XY flat surface stage apparatus that present embodiment is set then, is described.
At first determine the quantity of supporting member 10.Supporting member 10 is positioned each one of surface plate 1 for short transverse, so that the surface of surface plate 1 becomes the plane, so 3 of minimum needs.
The surface of the air ejection 11a of portion of decision supporting member 10, and the setting value of the clearance at the back side of the surface plate 1 of mounting thereon.The target of the setting value of clearance is and surface roughness * 10 at the back side of the opposed surface plate 1 of the air ejection 11a of portion times.The plane compensation plate 1a at the back side of surface plate 1 is provided with in order to compensate this surfaceness.
If the clearance increases, the carrying capacity that air bearing 11 can keep can diminish.The variation of allowable load roughly becomes the inversely proportional relation for the variation of the size in gap.The target of the setting value in gap is the zone (be rigidity high zone) of gap with respect to the little variation of variation of allowable load, and the gap generally is 5 to 10 μ m degree.
And, the air pressure that decision is supplied with to the air ejection 11a of portion.The target of air pressure is effective pressure * 0.7 times to unit feeding.
The weight (Weight Loaded) of surface plate 1 that is positioned in supporting member 10 is known in advance, so calculate prestrain (allowable load) amount from the gap/prestrain curve (by the curve of each air bearing decision) that is installed on the air bearing 11 on the supporting member 10.
Fig. 4 represents the figure of an example of the gap/prestrain curve of air bearing.The longitudinal axis of this figure is the size of clearance, and transverse axis is prestrain (allowable load) amount.
For example, air pressure is 4.1kg/cm
2The time, if the gap of 10 μ m, the load of allowing about 20N (newton), air pressure is 5.5kg/cm
2The time allow about 40N load.
Weight Loaded (weight of surface plate 1) divided by the above-mentioned allowable load of obtaining, is obtained the number of supporting member 10.But even calculate under the situation of number below 3 of upper support member, supporting member 10 is 3.
At this, be applied to the thrust of the cylinder 15 of each supporting member 10, need be set at the surface maintenance level of surface plate 1 and the size on plane, for example, be processed under the situation on plane accurately on the surface of surface plate 1, as " offsetting the thrust of deadweight distortion ", when placing surface plate 1 on supporting member 10, the surface of surface plate 1 just can keep level and plane by the thrust that will be applied to cylinder 15.
" only offsetting the thrust of the distortion that is produced by deadweight " in fact needs tight calculating, can illustrate as follows.
With the situation that the surface plate of for example 60kg supports with the supporting member at 6 places, ideally, the 10kg of 60kg ÷ 6=10kg becomes " thrust of only offsetting the distortion that is produced by deadweight ".
In fact, as the method for obtaining " thrust of only offsetting the distortion that is produced by deadweight ", consider by using the simulation of resolving software to calculate the method for the gravity that is applied to each supporting member 10.That is,, utilize calculating such as computer to be applied to the gravity of each supporting member 10 in advance according to the position of size, weight and the supporting member 10 of surface plate 1.
For example, the number of supporting member 10 is 6, for example is 24.7kg, 21.6kg, 24.7kg, 24.6kg, 21.6kg, 24.6kg by the gravity that is applied to each supporting member 10 that calculates.
To cylinder 15 air supplies of supporting member 10, make in the position that is provided with this supporting member 10 to obtain and the suitable thrust (confining force) of gravity that applies.
Air pressure by with air duct that each supporting member 10 is connected on the regulator (not having diagram) that is provided with regulate.
With respect to the air pressure of supplying with, thrust (confining force) is unique to be determined, so when the gravity that is applied to the supporting member 10 that becomes object is 24.7kg, air bearing 15 applies the pressure of the thrust (confining force) that obtains 24.7kg to cylinder, if gravity is 21.6kg, then apply the pressure of the thrust (confining force) that obtains 21.6kg.
Then, on supporting member 10 with the position alignment of plane compensation plate 1a and the air ejection 11a of portion mounting surface plate 1, the air of set pressure as described above is supplied to the air ejection 11a of portion and the cylinder 15 of each supporting member 10, blow out the 11a of portion ejection air from air, and a 15a is risen.And, at cylinder 15 counteracting is applied under the state of surface plate 1 by the thrust of the distortion of the deadweight generation of surface plate 1 by each supporting member 10, make air locking mechanism 16b work and seize fixed disc 16a on both sides by the arms, fix the position of short transverse of the axle 15a of each supporting member 10 by pad 16a.
Thus, become the state that has applied the power corresponding with the deadweight of each supporting member position of surface plate 1 on each supporting member 10, if the surface of surface plate 1 is processed accurately, then the surface of surface plate 1 keeps level and plane.
By adopting this structure, suppose keep thrust because the axle 15a of cylinder 15 stretches, so the surface of surface plate 1 can keep level and plane under the inadequate as illustrated in fig. 5 situation of flatness of base plate 20 of device of mounting support member 10.
Under this state, by driving the moving member 33 of X-axis mobile member shown in Figure 2 31,32 and y-axis shift, surface plate 1 with the scope of the plane compensation plate of the pad opposite disposed of cylinder 11, to the 2 parallel plane perpendicular direction of surface plate 1, and around the sense of rotation of the axle vertical with its plane, be that XY and θ direction move.Surface plate 1 is because floated by air, so even large-scale also next moving along slippage with little power.
At this, when the amount of movement of surface plate 1 is big, in order to keep the level and the planarity of the surface plate 1 after moving, needs cooperate the surface accuracy at the back side of surface plate 1 to change the height of supporting member 10, but the amount of movement of the surface plate of objective table device of the present invention 1 is ± 10mm in, the size of plane compensation plate 1a that is installed on the back side of surface plate 1 also is this degree.
If the rear side of surface plate 1 quilt is Horizon tanga worker to a certain degree, and, amount of movement is above-mentioned degree, for the relative inhomogeneous of the setting angle of the surface level of plane compensation plate 1a is 0.2 ° of degree, if high-precision processing is carried out on the surface of plane compensation plate 1a, even then surface plate 1 moves, the displacement of the short transverse of leveling board 1 (Z-direction) can not become problem.
In addition, when the surface working of surface plate 1 is become plane, also consider by supporting member under the state of many places supporting plane plate 1, its surface working is become plane.
Like this surface of surface plate 1 is supported in many places and is processed under the plane situation, when this surface plate is used as objective table, with add the identical above-mentioned supporting member 10 of position configuration of supporting member that supports this surface plate man-hour, set the thrust of each cylinder 15 for the supporting member that adds supporting plane plate in man-hour at this identical thrust of thrust.If like this, reproduced at the state on the surface of processing plane plate 1, by in the real device of adorning, can keep surface plate 1 with the plane precision that adds man-hour.
In the above-described embodiments, the situation of using X-axis mobile member and the moving member of y-axis shift as the driving mechanism of surface plate is shown, then, the 2nd embodiment of the present invention that utilizes surface motor as above-mentioned driving mechanism is described.
The motor objective table (surface motor objective table) that floats as above-mentioned patent documentation 3 records, is provided with on chessboard trellis or striated ground on the plane pressing plate of salient pole of ferromagnetism body, makes the moving body (the following cushion that also claims) that produces the shifting magnetic field mobile.
The structure of the objective table device of present embodiment, same with above-mentioned Fig. 1, device shown in Figure 2, surface plate 1 is supported in the many places more than 3 o'clock by the supporting member that uses air bearing, but select 3 in these the supporting member, above-mentioned cushion is set at pad (the air ejection portion) 11a of this supporting member of 3.And, will with the opposed part of air ejection portion of the cushion at the back side that is provided with surface plate 1 as plane pressing plate.
Fig. 6 be the expression supporting member 10 ' that possesses the cushion 17 that is provided with above-mentioned air ejection portion, and and the opposed part at the back side be the surface plate 1 of pressing plate.And Fig. 7 represents to have the sectional view of the pad 11a of above-mentioned cushion 17.
As shown in Figure 7, permanent magnet 17a is installed on cushion 17, on magnetic pole 17b～17e, produces the magnetic pole of N or S thus.
Be wound with coil 17f, 17g on magnetic pole 17b～17e, when electric current flowed, each magnetic pole 17b～17e just became electromagnet.If the magnetic field that permanent magnet 17a is produced and the direction in the magnetic field that electromagnet produced are identical, then magnetic force is strengthened mutually.If magnetic field that permanent magnet 17a is produced and the magnetic field that electromagnet produced are opposite, magnetic force is cancelled out each other.
As shown in Figure 7, in the pad that is provided with cushion 17 (air ejection portion) 11a, be provided with the hole 17h of air,, surface plate 1 is floated and keep by air supply.And, in Fig. 7, with the hole of ejection air be arranged on cushion around, still, also can be from the positive center ejection air of cushion.
As shown in Figure 6,11a is corresponding with the pad that is provided with cushion 17 (air ejection portion), imbed pressing plate 1a in the rear side of surface plate 1, the salient pole P of ferromagnetism body sets chessboard trellis or striated for the arrangement corresponding with the moving direction of surface plate, is imbedded by nonmagnetic material between salient pole and the salient pole.
Below, illustrated planar plate 1 with respect to cushion 17 to the drawing left to the principle of work that moves.Fig. 8 is the sectional view that has the pressing plate 1a of a plurality of salient poles that constitute flat surface stage and have the cushion 17 of magnetic pole, in being wound in each coil 17f, 17g of magnetic pole 17b～17e, do not produce the shifting magnetic field from there being the diagram driving circuit by producing electric current in the following order, make pressing plate 1a (surface plate 1) with respect to cushion 17 to the left of this figure to moving.
(1) step 1: flow through electric current at the magnetic pole 17b of cushion 17, the coil 17f of 17c side, the magnetic force of strengthening magnetic pole 17b is strengthened.In the coil 17g of magnetic pole 17d, 17e no current flows.The magnetic force of magnetic pole 17b is reinforced, and attracts each other with the salient pole P1 brute force of pressing plate 1a, makes magnetic pole 17b and salient pole P1 become opposed position.
The magnetic force of magnetic pole 17c is cancelled, on the nonmagnetic material between salient pole P2 and the P3. Magnetic pole 17d and 17e attract each other with salient pole P4, the P6 of vergence direction respectively.
(2) step 2: the electric current that stops the coil 17f of magnetic pole 17b, 17c flows, and flows through electric current at the coil 17g of magnetic pole 17d, 17e side, and the magnetic force of magnetic pole 17e is strengthened.Magnetic pole 17e and salient pole P6 brute force attract each other, and the magnetic force of magnetic pole 17d is cancelled, and do not attract each other with salient pole P4.
Therefore, pressing plate 1a with respect to cushion 17 to this figure left to moving, make magnetic pole 17e mutually opposed with salient pole P6. Magnetic pole 17b and 17c attract each other with salient pole P1, the P3 of vergence direction respectively.
(3) step 3: stop the electric current of the coil 17g of magnetic pole 17d, 17e, in the coil 17f of magnetic pole 17b, 17c side, flow through electric current, the magnetic force of magnetic pole 17c is strengthened.Magnetic pole 17c and salient pole P3 brute force attract each other, and the magnetic force of magnetic pole 17b is cancelled, and do not attract each other with salient pole P1.
Pressing plate 1a with respect to cushion 17 to this figure left to moving, make magnetic pole 17c mutually opposed with salient pole P3.
(4) step 4: stop the electric current of the coil 17f of magnetic pole 17b, 17c, in the coil 17g of magnetic pole 17d, 17e side, flow through electric current, the magnetic force of magnetic pole 17d is strengthened.Magnetic pole 17d and salient pole P5 brute force attract each other, and the magnetic force of magnetic pole 17e is cancelled, and do not attract each other with salient pole P6.Pressing plate 1a with respect to cushion 17 to this figure left to moving, make magnetic pole 17d mutually opposed with salient pole P5.
In addition, move to after the position of step 4, shown in step 4, in coil 17g, continue to flow through electric current, cushion 17 can be remained on the position of step 4.
In being provided with 3 supporting members 10 ' of cushion 17, be arranged at the cushion 17 of 2 supporting members, as shown in Figure 6A, magnetic pole 17b is arranged in X-direction; Be arranged at the cushion of 1 supporting member, shown in Fig. 6 B, magnetic pole 17b is arranged in Y direction.
If the magnetic force of the magnetic pole 17b of the cushion of pole arrangement on Y direction is changed as described above, then surface plate 1 moves along Y direction.Make the magnetic force change of magnetic pole 17b of 2 cushions that magnetic pole arranges along X-direction identical for both, surface plate 1 moves along X-direction.If magnetic pole is in the opposite direction changed along the magnetic force of the magnetic pole 17b of 2 cushions of X-direction arrangement, surface plate 1 moves (θ moves) around the axle rotation vertical with the XY plane.
The order of the objective table device of present embodiment is set, same with above-mentioned the 1st embodiment, to comprising the supporting member 10 of 3 supporting members 10 ' with above-mentioned cushion 17, apply the thrust of counteracting by the distortion of the deadweight generation of surface plate 1, surface plate 1 is positioned on the supporting member 10, float by air, be applied under the state of surface plate 1 in the thrust of counteracting by the distortion that deadweight produced of surface plate 1, make air locking mechanism 16b work and grip disc 16a, fix the position of the short transverse of each supporting member 10 by pad 16a.
Thus, that each supporting member 10 has been applied the surface of state, surface plate 1 of the power corresponding with the deadweight of each bearing position of surface plate 1 is processed accurately if become, the surface maintenance level of surface plate 1 and become the plane.
Under this state, as above-mentioned institute, change the magnetic force of the magnetic pole of cushion, surface plate 1 is moved along XY θ direction.Surface plate 1 is floated by air, so even large-scale also moving with less mechanical compliance slippage.
In addition, the pressing plate side of common unsteady motor objective table does not move and the cushion side shifting, and still, its relation is opposite in the present embodiment, and the cushion side is fixing not to move the pressing plate side shifting.
As present embodiment, by utilizing the motor that floats as driving mechanism be, do not need to be used for the mechanical XY θ driving mechanism of plane of motion plate, the structure of objective table is simplified.And, reducing components number and assemble easily, cost that can implement device reduces.And, can eliminate wearing and tearing, the dust of the mechanism components of the work of following driving mechanism here from producing.
Claims (2)
1. flat surface stage apparatus, it possesses: the surface plate of mounting workpiece, 3 sentence the supporting member of this surface plate of upper support and make above-mentioned surface plate at least with this plane parallel the travel mechanism that moves, it is characterized in that:
Above-mentioned supporting member has: make cylinder that axle moves up and down by thrust arbitrarily, and the air locking mechanism of the position of the above-below direction of fixing above-mentioned axle,
Be provided with on the top of above-mentioned supporting member and the surface plate air bearing of arranged opposite mutually,
Above-mentioned supporting member, by above-mentioned axle is moved up and down by thrust arbitrarily, make above-mentioned surface plate by thrust arbitrarily at the direction top offset vertical with the plane of this surface plate, and, keep the selecteed displacement state of air bearing by the position of the fixing above-mentioned above-below direction of above-mentioned air locking mechanism.
2. flat surface stage apparatus as claimed in claim 1 is characterized in that having:
Above-mentioned travel mechanism has the driving mechanism of the air bearing that is arranged at above-mentioned supporting member, this driving mechanism comprises: have the moving member of the magnetic pole that produces the shifting magnetic field, and at the back side of above-mentioned surface plate and setting mutually opposed with above-mentioned air bearing, dispose the plane pressing plate of salient pole chessboard trellis or striated.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP369959/2005 | 2005-12-22 | ||
| JP2005369959A JP4899469B2 (en) | 2005-12-22 | 2005-12-22 | Flat stage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1987661A CN1987661A (en) | 2007-06-27 |
| CN1987661B true CN1987661B (en) | 2011-06-08 |
Family
ID=38184503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101701466A Expired - Fee Related CN1987661B (en) | 2005-12-22 | 2006-12-22 | Flat surface stage apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4899469B2 (en) |
| KR (1) | KR101076950B1 (en) |
| CN (1) | CN1987661B (en) |
| TW (1) | TW200724294A (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4702083B2 (en) * | 2006-02-10 | 2011-06-15 | ウシオ電機株式会社 | XYθ moving stage |
| TWI409499B (en) * | 2007-10-19 | 2013-09-21 | Hon Hai Prec Ind Co Ltd | An inspection stage used in the microscope |
| US9207023B2 (en) | 2007-12-18 | 2015-12-08 | Sandia Corporation | Heat exchanger device and method for heat removal or transfer |
| US8988881B2 (en) | 2007-12-18 | 2015-03-24 | Sandia Corporation | Heat exchanger device and method for heat removal or transfer |
| WO2010016963A1 (en) * | 2008-08-04 | 2010-02-11 | Sandia National Laboratories | Heat exchanger device and method for heat removal or transfer |
| KR20120036954A (en) * | 2009-07-17 | 2012-04-18 | 로버트 에이. 사막 | Automated, adjustable, machine-tool work-piece-mounting apparatus |
| US9261100B2 (en) | 2010-08-13 | 2016-02-16 | Sandia Corporation | Axial flow heat exchanger devices and methods for heat transfer using axial flow devices |
| JP2012151418A (en) * | 2011-01-21 | 2012-08-09 | Topcon Corp | Suction stage |
| DE102011005157A1 (en) * | 2011-03-04 | 2012-09-27 | JRT Photovoltaics GmbH & Co. KG | Processing station for flat substrates, in particular solar cells |
| TWI463125B (en) * | 2011-12-23 | 2014-12-01 | Stone & Resource Ind R & D Ct | Membrane Rigidity Testing Platform for Air Floating Plane Bearing and Its Application |
| CN106575086B (en) * | 2014-08-01 | 2018-05-18 | 株式会社村田制作所 | Direct write type exposure device |
| KR20170008127A (en) | 2015-07-13 | 2017-01-23 | 박용문 | A ladder for fixing and high safety required |
| CN207424530U (en) * | 2017-07-31 | 2018-05-29 | 东莞科视自动化科技有限公司 | Full-automatic exposure machine feeding device |
| WO2020044685A1 (en) * | 2018-08-30 | 2020-03-05 | 住友重機械工業株式会社 | Stage device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2608939Y (en) * | 2003-02-26 | 2004-03-31 | 台智精密科技股份有限公司 | Three-dimensional measuring device |
| CN1514760A (en) * | 2001-03-30 | 2004-07-21 | ��ķ�о�����˾ | Adjustable force applying air platen, spindle system and its use |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4122922B2 (en) * | 2002-10-18 | 2008-07-23 | ウシオ電機株式会社 | Flat stage device |
| JP2005083789A (en) | 2003-09-05 | 2005-03-31 | Sumitomo Heavy Ind Ltd | Stage device |
| JP2005268608A (en) | 2004-03-19 | 2005-09-29 | Sumitomo Heavy Ind Ltd | Stage equipment |
-
2005
- 2005-12-22 JP JP2005369959A patent/JP4899469B2/en not_active Expired - Fee Related
-
2006
- 2006-09-22 TW TW095135225A patent/TW200724294A/en not_active IP Right Cessation
- 2006-10-23 KR KR1020060102740A patent/KR101076950B1/en active IP Right Grant
- 2006-12-22 CN CN2006101701466A patent/CN1987661B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1514760A (en) * | 2001-03-30 | 2004-07-21 | ��ķ�о�����˾ | Adjustable force applying air platen, spindle system and its use |
| CN2608939Y (en) * | 2003-02-26 | 2004-03-31 | 台智精密科技股份有限公司 | Three-dimensional measuring device |
Non-Patent Citations (5)
| Title |
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| JP特开2002-184664A 2002.06.28 |
| JP特开2002-32129A 2002.01.31 |
| JP特开2003-194059A 2003.07.09 |
| JP特开平8-25163A 1996.01.30 |
| JP特开平9-23689A 1997.01.21 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070066850A (en) | 2007-06-27 |
| CN1987661A (en) | 2007-06-27 |
| JP2007171015A (en) | 2007-07-05 |
| KR101076950B1 (en) | 2011-10-26 |
| TW200724294A (en) | 2007-07-01 |
| JP4899469B2 (en) | 2012-03-21 |
| TWI365117B (en) | 2012-06-01 |
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