TWI463125B - Membrane Rigidity Testing Platform for Air Floating Plane Bearing and Its Application - Google Patents

Description

Air film rigidity detecting platform for air floating plane bearing and using method thereof

The invention relates to a gas film rigidity detecting platform, in particular to a gas film rigid detecting platform of an air floating plane bearing and a using method thereof.

Referring to FIG. 1 , a conventional air film rigidity detecting platform 1 includes a platform 11 , an air floating carrier 12 disposed on the platform 11 , a gas supply system 13 connected to the air floating carrier 12 , and a racking device The platform 11 is located on the dial gauge 14 above the air floating carrier 12, and a mechanical sensor 15 disposed on the platform 11 and above the air floating carrier 12, the mechanical sensor 15 can It is a load sensor.

Here, the air-floating carrier 12 is described as a downward jet, that is, the air-floating carrier 12 is an object to be tested, and when the detection is performed, the dial gauge 14 is first touched on the surface of the air-floating carrier 12 Returning to zero, then opening the air supply system 13 to float the air bearing carrier 12, reading the data of the dial gauge 14, obtaining the film thickness of the air bearing carrier 12, and then starting the load test Therefore, the sensing head will gradually descend to contact the air bearing carrier 12 until the bottom of the air floating carrier 12 completely contacts the test platform 11, and the measured load value is the bearing capacity, and the gas is calculated by the following formula. Film rigidity:

J = W / H ,

J is the film rigidity (unit: N/μm), W is the bearing capacity, and H is the film thickness.

In the mechanical sensor 15 used in the conventional air film rigidity detecting platform 1, after the startup, the mechanical sensor 15 will start to descend, and when the mechanical sensor 15 contacts the surface of the air floating carrier 12, the machine The sensor 15 begins to apply a load to the air bearing carrier 12, and when the air bearing carrier 12 is subjected to the load applied by the mechanical sensor 15, the air film of the air bearing carrier 12 simultaneously feeds back a reaction force to the mechanical type. The sensor 15, the reaction force is the gas film bearing capacity; when the mechanical sensor 15 load is greater than the gas film bearing capacity, the sensor 15 probe will continue to decrease, and the air film thickness of the air bearing carrier 12 It will gradually decrease; otherwise, when the load of the mechanical sensor 15 is less than the bearing capacity of the film, the probe of the mechanical sensor 15 will rise, and the film thickness of the air bearing carrier 12 will gradually increase; When the bearing capacity is equal to the load of the sensor 15, the two will remain balanced and stationary.

Since the mechanical sensor 15 is mechanical, the output range and the specification are fixed, and the output range cannot be adjusted according to the performance of the object to be tested, and only the maximum value of the film rigidity can be measured. In the past, when the film stiffness was measured, the probe of the mechanical sensor 15 extended from the contact to the air bearing carrier 12, and finally the bottom surface of the air floating carrier 12 completely contacted the table top of the equipment platform 11, mechanical sensing The probe of the device 15 is completely stopped, and it is calculated to calculate the maximum load value of the air-floating carrier 12 that the sensor 15 applies during the pressing process. Therefore, the conventional detection method only measures the air-floating carrier 12 The film has a maximum rigidity, and since the mechanical sensor 15 starts to calculate the load value when the object is completely in contact with the table top of the equipment platform 11, the conventional measurement results tend to overestimate the air bearing carrier 12 The film's own rigidity is rigid and the result is inaccurate.

In the past, the thickness of the film was affected by the setting parameters of the gas supply system 13. When the set parameter was raised to a certain value, the film thickness was limited by the specification of the sample to be measured, and the film thickness was not increased. The value is the initial film thickness value, and the initial film thickness value is the film thickness value achieved when the measured object has not been subjected to any load, so the initial film thickness can be regarded as the maximum film thickness; When the thickness of the film is gradually reduced by the load, when the film thickness approaches zero but not equal to zero, the film thickness value is the minimum film thickness.

When the air-floating carrier 12 is subjected to load, the thickness of the film gradually decreases. The smaller the film thickness is, the larger the film density is. The larger the film density is, the larger the gas film bearing capacity is. The bearing capacity is the maximum load value that the minimum film thickness can withstand, that is, the maximum film carrying capacity; and the minimum film carrying capacity is the maximum load value that the initial film thickness can withstand, that is, the minimum film loading force. .

It is worth emphasizing that the energy type of the gas supply system 13 and the mechanical sensor 15 of the conventional air bearing vehicle 12 are two different systems, and the air floating carrier 12 is fixed only to the air supply system of the air pressure system. 13 is a supply type, and the mechanical sensor 15 can be a variety of supply modes such as mechanical energy rotation energy, or electric energy rotation energy, etc., so in the past, only the air supply system 13 of the air floating carrier 12 can be adjusted. The setting of the air supply system 13 will affect the load capacity of the air floating carrier 12; the conventional mechanical sensor 15 is designed to be fixed, and when the load capacity of the air floating carrier 12 exceeds the allowable range of the measuring device The mechanical sensor 15 will not be able to measure the maximum load capacity of the air bearing carrier 12.

Therefore, a gas film rigidity detecting platform 1 that can be quickly measured is one of the research and development targets of current related companies.

Accordingly, it is an object of the present invention to provide a gas film rigidity detecting platform for a gas floating planar bearing that can be quickly measured and a method of using the same.

Therefore, the gas film rigidity detecting platform of the air floating plane bearing of the present invention comprises a precision ratio measuring platform unit, an air floating carrier, and a gas supply system, and the precision comparison platform unit comprises a precision platform for providing a flat surface. a pneumatic cylinder disposed above the precision platform, and a dial gauge disposed above the precision platform and connected to the pneumatic cylinder, the air float carrier is placed on the precision platform, and the gas supply system is connected to the gas The floating carrier and the pneumatic cylinder of the precision comparison platform unit.

The method for using the gas film rigidity detecting platform of the air floating plane bearing of the present invention comprises the following steps: First, preparing a gas film rigidity detecting platform of an air floating plane bearing as described above, and then, the dial gauge is offset On the surface of the object to be tested, the dial gauge is reset to zero, and then the gas supply system is activated to float the object to be tested, the dial gauge value is read, the film thickness is known, and the pneumatic cylinder is activated. Apply pressure to the object to be tested downward, apply pressure downward until the object to be tested does not float, and read the value of the cylinder to know the bearing capacity of the film.

The effect of the invention is that, by using the pneumatic cylinder, the air supply system is uniformly supplied with the lifting and detecting bearing capacity of the object to be tested, and the load applied by the pneumatic cylinder can be adjusted according to the performance of the object to be tested, and the appropriate specification can be quickly replaced. The pneumatic cylinder, by setting the air pressure system parameters of the pneumatic cylinder, measures the value of the air film rigidity of the object under different gas supply conditions and with different load capacity, and achieves the purpose of rapid measurement.

The above and other technical features, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.

Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.

Referring to FIG. 2 and FIG. 3, a first preferred embodiment of the gas film rigidity detecting platform of the air floating plane bearing of the present invention and a method for using the same comprises a precision ratio measuring platform unit 2, an air floating carrier 3, and a gas supply. System 4.

The precision comparison platform unit 2 includes a precision platform 21 for providing a flat surface, a pneumatic cylinder 22 connected to the precision platform 21, and a connection above the precision platform 21 and connected to the pneumatic cylinder 22 The dial gauge 23 is mounted on the same horizontal surface as the pneumatic cylinder 22, and the height of the dial gauge 23 and the pneumatic cylinder 22 relative to the precision platform 21 can be simultaneously adjusted.

The precision platform 21 may be made of natural granite, artificial stone, cast iron, aluminum honeycomb, and the like.

The air bearing carrier 3 is placed on the precision platform 21. In the first preferred embodiment, the air bearing carrier 3 is the object A to be tested, and the air bearing carrier 3 faces downward toward the precision platform 21 After the air-floating carrier 3 is floated, the article to be transported can be placed on the air-floating carrier 3, thereby saving labor, and generally suitable for transporting articles with large loads, the first preferred embodiment The example belongs to a heavy-load type pneumatic system.

The air supply system 4 is connected to the air-floating carrier 3 and the pneumatic cylinder 22 of the precision comparison platform unit 2. The air supply system 4 includes an air compressor 41 for supplying a gas source, and a connection with the air compressor 41. The pressure regulating valve 42 and a plurality of flow control valves 43 respectively connected between the air floating carrier 3, the pneumatic cylinder 22 and the pressure regulating valve 42 for adjusting the air pressure, the flow control valves 43 is used to adjust the load applied by the air bearing carrier 3 and the pneumatic cylinder 22.

It is further illustrated that the air supply system 4 further includes a freeze dryer 44 disposed between the air compressor 41 and the pressure regulating valve 42 , and a refrigeration dryer 44 disposed between the freeze dryer 44 and the pressure regulating valve 42 . a gas storage tank 45, a precision filter 46 disposed between the pressure regulating valve 42 and the flow control valve 43, and a directional control valve 47 disposed between the precision filter 46 and the flow control valve 43, the freezing The dryer 44 is for reducing the air humidity, the air tank 45 is for stabilizing the air pressure, the precision filter 46 is for filtering the air impurities, and the directional control valve 47 is for controlling the air cylinder 22 to extend or retract the output direction. In the first preferred embodiment, the directional control valve 47 uses a crank-type five-position three-position directional control valve to switch the flow control valves 43 in a manual crank control manner, thereby changing the direction of gas flow in the pipeline or making it It is stationary to drive the pneumatic cylinder 22 to perform an action of extending or retracting.

According to different conditions such as the geometric shape of the object A to be tested and the actual test conditions, the components such as the dial gauge 23, the pneumatic cylinder 22, the pressure regulating valve 42, and the flow control valve 43 can be replaced, and the film thickness of the object A to be tested is changed. In a relatively small hour, it is necessary to replace the high-precision dial gauge 23, the low-load pneumatic cylinder 22, the high-precision pressure regulating valve 42 and the flow control valve 43 in order to accurately measure the more accurate film rigidity; When the load capacity is too large, the high-load pneumatic cylinder 22, the pressure regulating valve 42 and the flow control valve 43 must be replaced to increase the maximum load range, and the load capacity of the object A can be measured.

In the first preferred embodiment, the method for using the air film rigidity detecting platform 21 of the air floating type planar bearing comprises the following steps:

Step 100, first, preparing the gas film rigidity detecting platform 21 of the air floating type planar bearing of the present invention, and adjusting the gas supply system 4 according to the measurement condition of the object A to be tested, that is, according to the geometry of the object A to be tested And the airflow mode, initially determining whether the object A is suitable for the heavy-load type air pressure system; in operation, mainly adjusting the pressure regulating valve 42 and the flow control valve 43 of the air supply system 4 to achieve the control of the air pressure and the flow rate, and The measurement mode is air pressure and flow rate from small to large.

Step 200, next, the dial gauge 23 is touched and pressed against the surface of the object A to be subjected to the zeroing operation of the dial gauge 23.

Step 300, the gas supply system 4 is activated, and the flow control valve 43 between the pressure regulating valve 42 and the air floating carrier 3 is opened, the object A is floated, and the value of the dial gauge 23 is read. After the value measured by the dial gauge 23 tends to be stable, the film thickness is known.

Step 400, the flow control valve 43 between the pressure regulating valve 42 and the pneumatic cylinder 22 is opened, the pneumatic cylinder 22 is activated to apply pressure to the object A to be pressed downward, and the pressure is applied downward until the object A does not float. The value of the pneumatic cylinder 22 is read to know the bearing capacity of the gas film.

Further, in the step 400, the probe probed by the pneumatic cylinder 22 protrudes to contact the upper surface of the object A, and starts to apply a load to the object A, so that the film thickness of the object A starts to decrease. When the bottom surface of the object A is completely attached to the top surface of the precision platform 21, the value of the dial gauge 23 is zero at this time, and then the load applied by the pneumatic cylinder 22 is adjusted to be adjusted to the dial gauge 23 When the value is about to start to change but the value is still zero, the load applied by the pneumatic cylinder 22 is the bearing capacity of the air film of the object A to be tested.

The film stiffness is calculated by the following formula:

J = W / H ,

J is the film rigidity (unit: N/μm), W is the bearing capacity, and H is the film thickness.

Referring to FIG. 4, the second preferred embodiment of the gas film rigidity detecting platform 21 of the air floating type planar bearing of the present invention is substantially the same as the first preferred embodiment member and the assembling method, and the difference lies in the second preferred embodiment. The object A is placed on the air bearing carrier 3, and the air bearing carrier 3 is ejected upward to float the object A, that is, a large-area board, such as a glass substrate, a circuit board, or a liquid crystal surface. When the plate or the like is placed above the air-floating carrier 3, a gas film is formed between the air-floating carrier 3 and the object A to be tested, so that the object A can be floated, thereby achieving the effect of non-contact transportation. It is used for items with large area and light weight, and the second preferred embodiment belongs to a light load type pneumatic system.

In summary, the advantages of the present invention are:

1. The present invention converts the conventional mechanical sensor into the form of the pneumatic cylinder 22 to give the load A to be tested, and integrates the force applying system and the air floating carrier 3 into one, unified by the gas supply system 4 The supply of the object to be tested A is floated, and the supply of the pneumatic cylinder 22 is provided with a load capacity, and the adjustment characteristics of the air supply condition and the load capacity of the object to be tested A are retained, and the pneumatic cylinder 22 is also adjusted by the air supply system 4. The load capacity, and through the pressure regulating valve 42 of the air pressure system 4 and the flow control valve 43 to adjust the pressure and flow of the gas, the moving speed and the load of the probe of the pneumatic cylinder 22 can be controlled, so that the object A can withstand Different load capacities.

2. The range and specifications of the previous measurement methods are mostly fixed, and the present invention can adjust the range of load applied by the pneumatic cylinder 22 according to the measurement condition of the object A, and can quickly replace the appropriate specifications. The pneumatic cylinder 22, for example, when the load capacity of the object A to be tested is small, the load specifications for the pneumatic cylinder 22 must be sequentially changed from large to small until the load capacity of the object A can be accurately measured; On the other hand, when the load capacity of the object A is large, the load specifications of the pneumatic cylinder 22 must be sequentially changed from small to large until the maximum load capacity of the object A can be accurately measured.

3. The present invention can determine the value of the air film rigidity of the object A under different gas supply conditions and with different load capacities by setting the air pressure system parameters of the pneumatic cylinder 22, and achieving rapid measurement. The purpose is that the different load capacities are controlled by the pneumatic cylinder 22, the pressure regulating valve 42, and the flow control valve 43, and the pressure regulating valve 42 and the flow control valve 43 respectively adjust the moving speed and load capacity of the pneumatic cylinder 22, and the previous measuring mode. Only the maximum gas film bearing capacity can be measured, and the measuring mode has no space for elastic adjustment; and the present invention can control the load of the pneumatic cylinder 22, and can be measured by small to large or large to small measuring methods. The load of the pneumatic cylinder 22 can be arbitrarily set to measure the film thickness of the object A under the load value of a certain pneumatic cylinder 22.

4. In the past, the load applied by the mechanical sensor was mostly fixed. If the bearing capacity of the object A exceeds the load range applied by the mechanical sensor, the mechanical sensor cannot accurately measure the load. The bearing capacity of the object A to be tested, the present invention uses the pneumatic cylinder 22 to measure the bearing capacity of the object A, so that the pressure and flow rate of the pneumatic cylinder 22 can be adjusted according to the measurement condition, and even the air pressure of different specifications can be replaced. The cylinder 22 is used to obtain a more accurate bearing force measurement, so that the present invention has the feature of elastically adjusting the measurement range.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

2. . . Precision ratio platform unit

twenty one. . . Precision platform

twenty two. . . Pneumatic cylinder

twenty three. . . Dial indicator

3. . . Air bearing vehicle

4. . . Gas supply system

41. . . Air compressor

42. . . Pressure regulating valve

43. . . Flow control valve

44. . . Freeze dryer

45. . . Gas storage bucket

46. . . Precision filter

47. . . Directional control valve

100. . . step

200. . . step

300. . . step

400. . . step

A. . . Analyte

Figure 1 is a schematic view showing a conventional gas film rigidity detecting platform using a load tester;

Figure 2 is a schematic view showing a first preferred embodiment of the gas film rigidity detecting platform of the air floating type planar bearing of the present invention;

Figure 3 is a flow chart illustrating the method of use of the first preferred embodiment of the present invention;

Figure 4 is a schematic view showing a second preferred embodiment of the gas film rigidity detecting platform of the air floating type planar bearing of the present invention.

2. . . Precision ratio platform unit

twenty one. . . Precision platform

twenty two. . . Pneumatic cylinder

twenty three. . . Dial indicator

3. . . Air bearing vehicle

4. . . Gas supply system

41. . . Air compressor

42. . . Pressure regulating valve

43. . . Flow control valve

44. . . Freeze dryer

45. . . Gas storage bucket

46. . . Precision filter

47. . . Directional control valve

A. . . Analyte

Claims (5)

A gas film rigidity detecting platform for an air floating plane bearing comprises: a precision measuring platform unit, comprising a precision platform for providing a flat surface, a pneumatic cylinder disposed above the precision platform, and a precision setting a dial gauge connected to the pneumatic cylinder above the platform; an air floating carrier placed on the precision platform; and a gas supply system connecting the air bearing carrier and the pneumatic cylinder of the precision comparison platform unit. The air film rigidity detecting platform of the air floating type planar bearing according to claim 1, wherein the air supply system includes an air compressor for supplying a gas source, and a pressure regulating valve connected to the air compressor. And a plurality of flow control valves respectively connected between the air floating carrier, the pneumatic cylinder and the pressure regulating valve. A method for using a gas film rigidity detecting platform for an air floating plane bearing comprises the following steps: (A) preparing a film rigidity detecting platform of an air floating plane bearing as described in claim 1; (B) The dial gauge is pressed against the surface of the object to be tested, and the dial gauge is reset to zero; (C) the gas supply system is activated to float the object to be tested, and the dial gauge value is read to obtain the film thickness; (D) The pneumatic cylinder is started to apply pressure to the object to be tested downward, and the pressure is applied downward until the object to be tested does not float, and the value of the pneumatic cylinder is read to know the bearing capacity of the gas film. The method for using a gas film rigidity detecting platform of an air floating type planar bearing according to claim 3, wherein in the step (A), the gas supply system comprises an air compressor for providing a gas source, and a connection a pressure regulating valve of the air compressor, and a plurality of flow control valves respectively connected between the air floating carrier, the pneumatic cylinder and the pressure regulating valve, in the step (C), opening the pressure regulating valve and the air floating valve In the flow control valve between the vehicles, in the step (D), the flow control valve between the pressure regulating valve and the pneumatic cylinder is opened. According to the method for using the gas film rigidity detecting platform of the air floating type planar bearing described in claim 3, in the step (B), the object to be tested is an air floating carrier.