CN102384787A - High-precision controllable microscanning device based on piezoelectric ceramics and sliding guide rail - Google Patents
High-precision controllable microscanning device based on piezoelectric ceramics and sliding guide rail Download PDFInfo
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- CN102384787A CN102384787A CN2011102284127A CN201110228412A CN102384787A CN 102384787 A CN102384787 A CN 102384787A CN 2011102284127 A CN2011102284127 A CN 2011102284127A CN 201110228412 A CN201110228412 A CN 201110228412A CN 102384787 A CN102384787 A CN 102384787A
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Abstract
The invention relates to a design method of a high-precision controllable microscanning mechanism based on piezoelectric ceramics and a sliding guide rail, which belongs to the field of the design of high-performance photoelectronic imaging systems. By utilizing the relation that the expansion amounts of the piezoelectric ceramics are in proportion to driving voltages of the piezoelectric ceramics, the invention provides the high-precision controllable microscanning mechanism which uses the piezoelectric ceramics as driving devices and uses the sliding guide rail as a translation element to control the marching direction. The mechanism comprises two piezoelectric ceramics, a vertical movable framework, a horizontal movable framework, four pairs of dovetail grooves, a microscanning mechanism framework and four groups of balls. The piezoelectric ceramic for realizing displacement driving in the vertical direction is connected with a two-dimensional translation element and is arranged at the inner part of a vertical sliding guide rail component. The piezoelectric ceramic for realizing displacement driving in the horizontal direction is connected with the outer wall of the microscanning mechanism and the vertical sliding guide rail component to realize horizontal displacement driving. The displacement amounts of the piezoelectric ceramics can be controlled in a high-precision manner through the amplitude values of the driving voltages.
Description
Technical field
The present invention relates to the controlled micro scanning device of a kind of high precision, belong to the photo electric imaging system design field based on piezoelectric ceramics and rail plate.
Background technology
Infrared thermal imaging technique is as a kind of cutting edge technology that sightless infrared energy is converted to visible gray level image; Utilization is to the detector of sensitive for infrared radiation; Through the detection of infrared radiation difference between the different objects or between the body surface diverse location being obtained the radiant energy distribution of IR Scene, thereby realize IR Scene is carried out to the purpose of picture.Because therefore characteristics such as the disguise of infrared thermal imaging technique, passivity and suitable round-the-clock application have high military strategy application prospect and demand.Along with theoretical constantly perfect, the continuous maturation of semiconductor fabrication process of infrared technique and the lasting decline of cost price; Infra-red thermal imaging system has obtained to use widely at civil area; The detection of revealing like maritime searching and rescue, traffic administration, industrial automation detection, satellite remote sensing, health care, hazardous gas contactless in transit, scientific research etc. have obtained favorable economic benefit and social value.
Receive the restriction of current semiconductor fabrication process level; The pixel dimension of infrared eye is often big and pixel number detector array is less usually; Therefore cause the resolution of infrared image lower, SF does not satisfy the nyquist sampling law, usually frequency of occurrences aliasing.
Improve infrared image resolution through physical means following several kinds of technological approaches generally arranged:
(1). reduce the physical dimension of detector pixel, increase the pixel number of detector array and improve dutycycle.Though reduce the spatial resolution that detector pixel physical dimension can obviously improve imaging system; But the reducing of pixel dimension can make the integral energy of light intensity on pixel die down; The effective scene signal possibly be submerged in the middle of the various noises of detector self, causes the signal to noise ratio (S/N ratio) of system to reduce.The detector pixel dimension reduces simultaneously; The number of arrays purpose increases and the raising of dutycycle also need be through improving the production technology of infrared eye; Use more high-precision photoetching technique and more complicated technological process to guarantee; Therefore also can cause the increase of production cost, even receive the restriction of actual production level and ability.
(2). shape and arrangement mode to the detector pixel design again, such as adopting honeycomb arrangement or polygon to arrange, make that the pixel quantity on the detector surface unit area can increase considerably.Though Japanese fuji company has designed and developed the Super CCD with similar honeycomb arrangement structure, this structure also has difficulty on semiconductor fabrication and photoetching process, and technological limited factor is more, and the increase rate of resolution is limited.The relevant report that does not also design at present about infrared eye abnormity pixel.
Propose in recent years based on the image high-resolution reconstructing method efficient and cost-effective of optical micro-scanning solved the low excessively problem of infrared image resolution.But the design of the imperfection of existing optical micro-scanning mechanism be easy to generate the off-axis error like dull and stereotyped rotary optical micro scanning mechanism, and contraposition is transferred than the process more complicated; The hinge break phenomenon appears in optical micro-scanning mechanism based on the flexible hinge mode in the course of the work easily, can't under high frequency and long-term work condition, realize effectively using etc., makes that the effect of reconstructed image is unsatisfactory.
Summary of the invention
The objective of the invention is for solve mobile accuracy that existing optical micro-scanning mechanism exists low with problem such as direction consistance difference, the controlled micro scanning device of a kind of high precision based on piezoelectric ceramics and rail plate is proposed.
The technical scheme that the present invention adopted is following:
The controlled micro scanning device of a kind of high precision based on piezoelectric ceramics and rail plate comprises: two piezoelectric ceramics, and a vertical moving framework, one moves horizontally framework, four pairs of dovetail grooves, a micro scanning institutional framework, four groups of balls.
Wherein, said piezoelectric ceramics is used to drive the vertical moving framework and moves horizontally framework, realizes certain microdisplacement.Because piezoelectric ceramics has voltage and displacement is approximated to the characteristic of linear scaling, so through given Piezoelectric Ceramic voltage, just can realize accurate displacement control to optical micro-scanning mechanism.According to the micro scanning imaging requirements, i.e. micro scanning displacement is less than a pixel dimension, and piezoelectric ceramics requires its maximum drive displacement to be less than micro scanning displacement.Reliability and stability during for assurance piezoelectric ceramics operate as normal, micro scanning displacement is 30%～80% of piezoelectric ceramics maximum drive displacement.
Said vertical moving framework is to be used to the physical construction that realizes that the micro scanning vertical direction moves; Its structure is: vertical moving framework outside the right and left is equipped with a vertical dovetail groove, is mutual buckling state with a vertical dovetail groove that moves horizontally the inboard the right and left of framework.At its vertical moving framework with move horizontally between framework and ball to be installed to reduce adjacent inter-agency friction force.
The said framework that moves horizontally is to be used to the physical construction that realizes that the micro scanning horizontal direction moves; Its structure is: move horizontally the inboard the right and left of framework and be equipped with a vertical dovetail groove; Be mutual buckling state with a vertical dovetail groove of vertical moving framework outside the right and left, at its vertical moving framework with move horizontally and ball is installed between framework is reduced adjacent inter-agency friction force; Move horizontally the framework outside simultaneously and be provided with a horizontal dovetail groove in both sides up and down; With micro scanning mechanism inboard up and down a horizontal dovetail groove on both sides be mutual buckling state, move horizontally at it and ball is installed between framework and micro scanning institutional framework is reduced adjacent inter-agency friction force.
Said micro scanning institutional framework is used for installation and moves horizontally framework as the outermost layer mechanism of micro scanning, thereby realizes the micro scanning function of vertical and horizontal direction.Its structure is: micro scanning institutional framework inboard is provided with a horizontal dovetail groove in both sides up and down; With move horizontally the framework outside up and down a horizontal dovetail groove on both sides be mutual buckling state, move horizontally at it and ball is installed between framework and micro scanning institutional framework is reduced adjacent inter-agency friction force.
The annexation of above-mentioned building block is following:
Connected mode from inside to outside: the vertical moving framework is installed on and moves horizontally framework inside; And the mechanical mounting structure through first piezoelectric ceramics with the vertical moving framework with move horizontally framework and be connected; The dovetail groove of vertical moving framework outside the right and left is buckling state with the dovetail groove that moves horizontally the inboard the right and left of framework, between the dovetail groove that fastens, ball is installed; To move horizontally framework then and be installed on micro scanning institutional framework inside; And the mechanical mounting structure through second piezoelectric ceramics will move horizontally framework and be connected with the micro scanning institutional framework; Move horizontally the framework outside up and down both sides dovetail groove and micro scanning institutional framework inboard up and down the dovetail groove on both sides be buckling state, between the dovetail groove of fastening, ball is installed.
This optical micro-scanning device is embedded in the light path of infra-red thermal imaging system, just can forms infrared micro scanning imaging system, and then realize infrared micro scanning imaging, the mode through Flame Image Process obtains the high resolving power infrared image at last.Wherein infrared micro scanning imaging system comprises: an infrared optical system, a Zigzag type light-path adjusting mechanism, an optical micro-scanning structure.According to the optical imagery mode; The connection of each parts is following: incident ray at first passes through infrared optical system along optical axis direction; Turn back through utilizing the Zigzag type light-path adjusting mechanism that radiation direction is carried out 180 degree then, last light is through optical micro-scanning device according to the invention.
It is following to use controlled micro scanning according to the invention mechanism to carry out method for scanning:
At first, during original state, piezoelectric ceramics is controlled by the external circuit system, because the micro scanning device needs and the imaging detector cooperating, controlled by the external circuit system at detector, gathers a two field picture in the branch time, obtains the first frame micro scanning image.Integral time, external detector was in not image formation state.
Then, outside the time, first piezoelectric ceramics is applied predetermined driving voltage, make the vertical moving framework move down inferior pixel displacement in detector integrates.Gather a two field picture in time in detector integrates again, obtain the second frame micro scanning image.Compare with the first frame micro scanning image, only have the micro scanning displacement of vertical direction this moment.
Afterwards, in detector integrates outside the time, keep driving voltage, and second piezoelectric ceramics is applied predetermined driving voltage, make to move horizontally the framework inferior pixel displacement that moves right first piezoelectric ceramics.Gather a two field picture in time in detector integrates again, obtain the 3rd frame micro scanning image.Compare with the first frame micro scanning image, have the micro scanning displacement of vertical and horizontal direction this moment.
Then, outside the time, stop driving voltage, and keep driving voltage, make the inferior pixel displacement that moves up of vertical moving framework second piezoelectric ceramics to first piezoelectric ceramics in detector integrates.Gather a two field picture in time in detector integrates again, obtain the 4th frame micro scanning image.Compare with the first frame micro scanning image, only have the micro scanning displacement of horizontal direction this moment.
At last, outside the time, stop driving voltage, make to move horizontally framework and be moved to the left inferior pixel displacement, be back to original state first piezoelectric ceramics and second piezoelectric ceramics in detector integrates.Gather a two field picture in time in detector integrates again, obtain the 5th frame micro scanning image.At this moment, the micro scanning image is identical with first two field picture.
According to the micro scanning image-forming principle, per four frame micro scanning images are formed the image cycle period.Promptly the 5th, six, seven, eight frame micro scanning images are identical with first, second, third and fourth frame micro scanning image respectively, by that analogy.
Beneficial effect
Compare with existing optical micro-scanning mechanism, the present invention designs and has proposed to realize the accurately optical micro-scanning mechanism of control of displacement, through adopting piezo ceramic element, has realized predetermined micro scanning displacement drive.Adopt the rail plate mode simultaneously; Promptly can realize having the displacement movement control of micron dimension; Guarantee the consistance of micro scanning sense of displacement, can reduce adjacent inter-agency friction again, therefore whole optical micro-scanning has higher mobile accuracy and direction consistance.Structure of the present invention is small and exquisite, easy for installation, accurate positioning, displacement repeatability is high, therefore possesses the practical characteristic of reliable engineering is arranged.
Description of drawings
Fig. 1 is optical micro-scanning device whole structure figure;
Fig. 2 is the vertical moving framework;
Fig. 3 is for moving horizontally framework;
Fig. 4 is the micro scanning institutional framework;
Fig. 5 is the cut-open view of optical micro-scanning mechanism;
Fig. 6 is the whole structure figure in the infrared micro scanning imaging system;
Among the figure; 1-vertical moving framework, 2-move horizontally framework, 3-micro scanning institutional framework, the 4-first vertical dovetail groove, the 5-second vertical dovetail groove, 6-the 3rd vertical dovetail groove, 7-the 4th vertical dovetail groove, 8-first horizontal dovetail groove, 9-second horizontal dovetail groove, 10-the 3rd horizontal dovetail groove, 11-the 4th horizontal dovetail groove, 12-first ball, 13-second ball, 14-the 3rd ball, 15-the 4th ball, 16-first piezoelectric ceramics, 17-second piezoelectric ceramics, 18-infrared optical system; 19-Zigzag type light-path adjusting mechanism, 20-optical micro-scanning structure.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
The controlled micro scanning device of a kind of high precision based on piezoelectric ceramics and rail plate; As shown in Figure 1, vertical moving framework 1, move horizontally the vertical dovetail groove of the vertical dovetail groove of the vertical dovetail groove of the vertical dovetail groove of framework 2, micro scanning institutional framework 3, first 4, second the 5, the 3rd the 6, the 4th 7, first horizontal dovetail groove 8, second horizontal dovetail groove 9, the 3rd horizontal dovetail groove 10, the 4th horizontal dovetail groove 11, first ball 12, second ball 13, the 3rd ball 14, the 4th ball 15, first piezoelectric ceramics 16, second piezoelectric ceramics 17;
Wherein, said first piezoelectric ceramics 16 is used to drive vertical moving framework 1, the second piezoelectric ceramics 17 and is used for driving and moves horizontally framework 2; First piezoelectric ceramics 16 and second piezoelectric ceramics 17 require its maximum drive displacement to be less than micro scanning displacement, and micro scanning displacement is 30%～80% of first piezoelectric ceramics 16 and second piezoelectric ceramics, 17 maximum drive displacements.
Suppose that the micro scanning amount of movement need be 15um, said first piezoelectric ceramics 16, second piezoelectric ceramics 17 can be selected the high-performance piezo ceramic element APA40SM with enlarging function that French Cedrat company the produces displacement drive device as micro scanning mechanism.The maximum displacement of this device is 52um, satisfies 30%～80% displacement choice criteria.
Said vertical moving framework 1 is used to realize that the micro scanning vertical direction moves, and vertical moving framework 1 outside the right and left is respectively equipped with the vertical dovetail groove 4 with first of the second vertical dovetail groove 5.The said framework 2 that moves horizontally is used to realize that the micro scanning horizontal direction moves, and its structure is: move horizontally framework 2 inboard the right and lefts and be respectively equipped with the vertical dovetail groove 7 with the 4th of the 3rd vertical dovetail groove 6; Simultaneously, move horizontally framework 2 outsides and be respectively equipped with first horizontal dovetail groove 8 and second horizontal dovetail groove 9 in both sides up and down.Said micro scanning institutional framework 3 is as the outermost layer mechanism of micro scanning, and its structure is: micro scanning institutional framework 3 inboard both sides up and down are respectively equipped with the 3rd horizontal dovetail groove 10 and the 4th horizontal dovetail groove 11.Like Fig. 2, shown in 3.
The vertical dovetail groove of the vertical dovetail groove of the vertical dovetail groove of the said first vertical dovetail groove 4, second the 5, the 3rd the 6, the 4th 7, first horizontal dovetail groove 8, second horizontal dovetail groove 9, the 3rd horizontal dovetail groove 10, the 4th horizontal dovetail groove 11.In the present embodiment, the opening that its groove depth is 1.5mm, groove is 90 degree.
The annexation of above-mentioned building block is following:
Vertical moving framework 1 is installed on and moves horizontally framework 2 inside, and passes through first piezoelectric ceramics 16 with the two connection; Wherein, the vertical dovetail groove 7 with the 4th of vertical dovetail groove 6, the second vertical dovetail groove 5 with the 3rd of the first vertical dovetail groove 4 is mutual buckling state;
Move horizontally framework 2 and be installed on micro scanning institutional framework 3 inside, and pass through second piezoelectric ceramics 17 the two connection; Wherein, first horizontal dovetail groove 8 and the 3rd horizontal dovetail groove 10, second horizontal dovetail groove 9 and the 4th horizontal dovetail groove 11 are mutual buckling state;
6 of the vertical dovetail grooves of the first vertical dovetail groove 4 first ball 12 is housed with the 3rd; 7 of the vertical dovetail grooves of the second vertical dovetail groove 5 second ball 13 is housed with the 5th; In first horizontal dovetail groove 8 and 10 of the 3rd horizontal dovetail groove the 3rd ball 14 is housed; In second horizontal dovetail groove 9 and 11 of the 4th horizontal dovetail groove the 4th ball 15 is housed.
Said first ball 12, second ball 13, the 3rd ball 14, the 4th ball 15 are that the steel ball of 2.5mm is formed by many diameters.In the present embodiment, first ball 12, second ball 13 are made up of 8 steel balls.The 3rd ball 14, the 4th ball 15 are made up of 10 steel balls.
One end of first piezoelectric ceramics 16 is linked to each other with vertical moving framework 1, the other end with move horizontally framework 2 and link to each other.With an end of second piezoelectric ceramics 17 with move horizontally framework 2 and link to each other, the other end links to each other with micro scanning institutional framework 3, accomplishes the assembling of whole optical micro-scanning mechanism.
It is following to use controlled micro scanning according to the invention mechanism to carry out method for scanning:
At first, during original state, do not apply at piezoelectric ceramics under the condition of driving voltage, gather a two field picture in the time, obtain the first frame micro scanning image in detector integrates.Integral time, external detector was in not image formation state.
Then, outside the time, first piezoelectric ceramics 16 is applied predetermined driving voltage, make vertical moving framework 1 move down 15um in detector integrates.Gather a two field picture in time in detector integrates again, obtain the second frame micro scanning image.Compare with the first frame micro scanning image, only have the micro scanning displacement of vertical direction this moment.
Afterwards, in detector integrates outside the time, keep driving voltage, and second piezoelectric ceramics 17 is applied predetermined driving voltage, make to move horizontally framework 2 15um that moves right first piezoelectric ceramics 16.Gather a two field picture in time in detector integrates again, obtain the 3rd frame micro scanning image.Compare with the first frame micro scanning image, have the micro scanning displacement of vertical and horizontal direction this moment.
Then, outside the time, stop driving voltage, and keep driving voltage, make vertical moving framework 1 15um that moves up second piezoelectric ceramics 17 to first piezoelectric ceramics 16 in detector integrates.Gather a two field picture in time in detector integrates again, obtain the 4th frame micro scanning image.Compare with the first frame micro scanning image, only have the micro scanning displacement of horizontal direction this moment.
At last, outside the time, stop driving voltage, make to move horizontally framework 2 and be moved to the left 15um, be back to original state first piezoelectric ceramics 16 and second piezoelectric ceramics 17 in detector integrates.Gather a two field picture in time in detector integrates again, obtain the 5th frame micro scanning image.At this moment, the micro scanning image is identical with first two field picture.
According to the micro scanning image-forming principle, per four frame micro scanning images are formed the image cycle period.Promptly the 5th, six, seven, eight frame micro scanning images are identical with first, second, third and fourth frame micro scanning image respectively, by that analogy.
Utilize contactless high-rate laser displacement transducer Microtrak that U.S. MTI instrument company produces that optical micro-scanning of the present invention mechanism has been carried out mobile accuracy and uniformity test.Test result shows, optical micro-scanning of the present invention mechanism can realize accurately moving according to given driving voltage, and under the micro scanning pattern, can keep higher mobile consistance, therefore has the practical characteristic of reliable engineering.
Claims (1)
1. controlled micro scanning device of the high precision based on piezoelectric ceramics and rail plate is characterized in that comprising: vertical moving framework (1), move horizontally framework (2), micro scanning institutional framework (3), the first vertical dovetail groove (4), the second vertical dovetail groove (5), the 3rd vertical dovetail groove (6), the 4th vertical dovetail groove (7), first horizontal dovetail groove (8), second horizontal dovetail groove (9), the 3rd horizontal dovetail groove (10), the 4th horizontal dovetail groove (11), first ball (12), second ball (13), the 3rd ball (14), the 4th ball (15), first piezoelectric ceramics (16), second piezoelectric ceramics (17);
Wherein, said first piezoelectric ceramics (16) is used to drive vertical moving framework (1), and second piezoelectric ceramics (17) is used for driving and moves horizontally framework (2); First piezoelectric ceramics (16) and second piezoelectric ceramics (17) require its maximum drive displacement to be less than micro scanning displacement, and micro scanning displacement is 30%～80% of first piezoelectric ceramics (16) and second piezoelectric ceramics (17) maximum drive displacement;
Said vertical moving framework (1) is used to realize that the micro scanning vertical direction moves, and vertical moving framework (1) outside the right and left is respectively equipped with the second vertical dovetail groove with first of vertical dovetail groove (5) (4);
The said framework (2) that moves horizontally is used to realize that the micro scanning horizontal direction moves, and its structure is: move horizontally the inboard the right and left of framework (2) and be respectively equipped with the 3rd vertical dovetail groove with the 4th of vertical dovetail groove (6) (7); Simultaneously, move horizontally framework (2) outside and be respectively equipped with first horizontal dovetail groove (8) and second horizontal dovetail groove (9) in both sides up and down;
Said micro scanning institutional framework (3) is as the outermost layer mechanism of micro scanning, and its structure is: the inboard both sides up and down of micro scanning institutional framework (3) are respectively equipped with the 3rd horizontal dovetail groove (10) and the 4th horizontal dovetail groove (11);
The annexation of above-mentioned building block is following:
Vertical moving framework (1) is installed on and moves horizontally framework (2) inside, and passes through first piezoelectric ceramics (16) with the two connection; Wherein, the first vertical dovetail groove with the 3rd of vertical dovetail groove (4) (6), the second vertical dovetail groove with the 4th of vertical dovetail groove (5) (7) are mutual buckling state;
Move horizontally framework (2) and be installed on micro scanning institutional framework (3) inside, and pass through second piezoelectric ceramics (17) the two connection; Wherein, first horizontal dovetail groove (8) is mutual buckling state with the 3rd horizontal dovetail groove (10), second horizontal dovetail groove (9) with the 4th horizontal dovetail groove (11);
Between the first vertical dovetail groove of vertical dovetail groove (4) (6), first ball (12) is housed with the 3rd; Between the second vertical dovetail groove of vertical dovetail groove (5) (7), second ball (13) is housed with the 5th; Between first horizontal dovetail groove (8) and the 3rd horizontal dovetail groove (10), the 3rd ball (14) is housed; Between second horizontal dovetail groove (9) and the 4th horizontal dovetail groove (11), the 4th ball (15) is housed;
One end of first piezoelectric ceramics (16) is linked to each other with vertical moving framework (1), the other end with move horizontally framework (2) and link to each other; With an end of second piezoelectric ceramics (17) with move horizontally framework (2) and link to each other, the other end links to each other with micro scanning institutional framework (3), accomplishes the assembling of whole optical micro-scanning mechanism;
It is following to use said mechanism to carry out method for scanning:
At first, during original state, first piezoelectric ceramics (16) and second piezoelectric ceramics (17) are controlled by the external circuit system; Because the micro scanning device needs and the imaging detector cooperating; Controlled by the external circuit system at detector, gather a two field picture in the branch time, obtain the first frame micro scanning image; Integral time, external detector was in not image formation state;
Then, outside the time, first piezoelectric ceramics (16) is applied predetermined driving voltage, make vertical moving framework (1) move down inferior pixel displacement in detector integrates; Gather a two field picture in time in detector integrates again, obtain the second frame micro scanning image; Compare with the first frame micro scanning image, only have the micro scanning displacement of vertical direction this moment;
Afterwards, in detector integrates outside the time, keep driving voltage, and second piezoelectric ceramics is executed (17) add predetermined driving voltage, make to move horizontally framework (2) the inferior pixel displacement that moves right first piezoelectric ceramics (16); Gather a two field picture in time in detector integrates again, obtain the 3rd frame micro scanning image; Compare with the first frame micro scanning image, have the micro scanning displacement of vertical and horizontal direction this moment;
Then, outside the time, stop driving voltage, and keep driving voltage, make vertical moving framework (1) the inferior pixel displacement that moves up second piezoelectric ceramics (17) to first piezoelectric ceramics (16) in detector integrates; Gather a two field picture in time in detector integrates again, obtain the 4th frame micro scanning image; Compare with the first frame micro scanning image, only have the micro scanning displacement of horizontal direction this moment;
At last, outside the time, stop driving voltage, make to move horizontally framework (2) and be moved to the left inferior pixel displacement, be back to original state first piezoelectric ceramics (16) and second piezoelectric ceramics (17) in detector integrates; Gather a two field picture in time in detector integrates again, obtain the 5th frame micro scanning image; At this moment, the micro scanning image is identical with first two field picture;
According to the micro scanning image-forming principle, per four frame micro scanning images are formed the image cycle period; Promptly the 5th, six, seven, eight frame micro scanning images are identical with first, second, third and fourth frame micro scanning image respectively, by that analogy.
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