CN110243290A - Read the Three Degree Of Freedom nanopositioning stage of displacement rotation information in real time by optical interference method - Google Patents
Read the Three Degree Of Freedom nanopositioning stage of displacement rotation information in real time by optical interference method Download PDFInfo
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 37
- 230000003287 optical effect Effects 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 35
- 230000005540 biological transmission Effects 0.000 claims abstract description 32
- 230000033001 locomotion Effects 0.000 claims abstract description 20
- 238000012360 testing method Methods 0.000 claims abstract description 4
- 238000003780 insertion Methods 0.000 claims abstract description 3
- 230000037431 insertion Effects 0.000 claims abstract description 3
- 239000011521 glass Substances 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 10
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- 238000010586 diagram Methods 0.000 description 5
- 238000012634 optical imaging Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
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- 229910052573 porcelain Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
Read the Three Degree Of Freedom nanopositioning stage of displacement rotation information in real time by optical interference method, Three Degree Of Freedom nanopositioning stage includes upper transmission plate quiet plate under, upper dynamic plate and under there are three transmission components between quiet plate, three transmission components are evenly distributed on the circumference by three transmission components in 120 °, the top of piezoelectric ceramic actuator connects lower Spherical plug, it is driven in the circular groove of plate in the hemispherical top insertion of lower Spherical plug, upper transmission plate is mounted in the circular groove of dynamic plate, spring be parallel to piezoelectric ceramic actuator in 120 ° be evenly distributed in dynamic plate and under quiet plate spring support on.It further include the real-time measuring device for reading fine motion sloping platform displacement angle information, the output laser of laser is with the reflecting surface normal transmission of 45 degree of angular alignment reflection units into wedge fringes device, wedge fringes device connects testee, and object under test is placed on above Three Degree Of Freedom nanopositioning stage.
Description
Technical field
The present invention relates to Ultra-precision positionings to adjust equipment, and especially a kind of Three Degree Of Freedom with two rotations, one movement is simultaneously
Connection formula can read the nanopositioning stage of displacement rotation information in real time.
Background technique
In recent years, with the fast development of microelectric technique, precision optics and precision processing technology, existing positioning
Precision is no longer satisfied the demand of people, develops a kind of multiple degrees of freedom, nano grade positioning precision and high flexibility ratio and height
The positioning system of sensitivity is extremely urgent for realizing high-precision operation and experimental study.Existing nanometer positioning is flat
Platform is mostly using piezoelectric ceramics as driving setting element, using flexure hinge mechanism as motion guide rail, passes through driving driving piezoelectricity pottery
Porcelain driver, using flexible hinge as precision drive mechanism, the displacement of Lai Shixian nanoscale.Although flexible hinge is compared with conventional motion
Pair greatly reduces quantity, weight, installation step and kinematic accuracy, but undeniable is that there are also very for flexible hinge transmission
Mostly fatal defect, especially in precision drive.First, since the movement that flexible member deformation is realized receives its own by force
The limitation of degree causes its stroke limited；Second, due to the energy stores of flexible motion, flexible member is easy when being driven
Axis drift and parasitic error are generated, on the one hand causes its precision limited, on the other hand also increases its complexity for controlling program；
Third, Flexible Transmission section stiffness is poor, and under conditions of being subjected to stress or high temperature for a long time, be easy to produce creep and
Stress relaxation phenomenon increases the unstability of its mechanism.And in order to platform realization real-time accurate control in high precision manipulation
System, it is sometimes necessary to the motion information of precision surface plate is read out in real time, to feed back into control system, to realize to platform
Real-time accurate control, so far without a multidimensional nanoscale platform that can read motion information in real time for high-precision
The operation of degree and experimental study, therefore develop a kind of nanoscale multidimensional locating platform that can read motion information in real time and become
It is most important.
Summary of the invention
In order to make up existing high-precision nano-scale localization platform cannot reading angular information in real time defect, the present invention mentions
The Three Degree Of Freedom nanopositioning stage of displacement rotation information can be read in real time for one kind.
The present invention can overcome drawbacks described above, which can be real by the method for optical interference
When reading displacement angle information, the positioning measurement of high precision and high sensitivity may be implemented.
Read the Three Degree Of Freedom nanopositioning stage of displacement rotation information in real time by optical interference method, feature exists
In including a carrying testee and the three free nanopositioning stages for being displaced testee generation and real-time reading quilt
The measuring device of displacement angle information:
The Three Degree Of Freedom nanopositioning stage includes upper transmission plate 2 quiet plate 8 under, upper dynamic plate 2 quiet plate under
There are three transmission component between 8, three transmission components are evenly distributed on the circumference by three transmission components in 120 °,
Each transmission component includes the piezoelectric ceramic actuator 6 being vertically installed at down on quiet plate 8, the top of piezoelectric ceramic actuator 6
Portion connects ramuscule square 5, and ramuscule square 5 pushes Spherical plug 4 of staying；Plate is driven in the hemispherical top insertion of lower Spherical plug 4
In 3 circular groove, lower Spherical plug 4 and the circular groove tangential, lower Spherical plug 4 and the circle
The line in the center of circle of the arc fluting on section quiet plate 8 perpendicular under；Upper transmission plate 3 is mounted on the circular groove of dynamic plate 2
Interior, spring 7 is parallel to the spring branch that piezoelectric ceramic actuator 6 is evenly distributed in the dynamic quiet plate 8 under of plate 2 in 120 °
On frame 1.
The displacement angle information of the Three Degree Of Freedom nanopositioning stage can be read in real time by the method for optical interference, root
According to equal thickness interference principle it is found that when with monochromatic collimated beam vertical irradiation glass splitter, since monochromatic light is two above and below splitter
Surface can generate two beam reflected lights respectively, this two beams reflected light can generate interference, and interference strength in the upper surface of glass splitter
Are as follows:
Wherein IR1And IR2The respectively light intensity of two beam reflected lights, δ are reflected light by the light between medium back reflection light
Path difference, λ are lambda1-wavelength.During actual experiment, IR1> > IR2, then (1) formula can simplify are as follows:
Wherein optical path difference δ=2n (dkX)/L, n are medium refraction index, dkFor kth grade interference fringe corresponding position medium
Thickness between upper and lower interface.Fixed one end is motionless, and dielectric thickness changes at L if testee generates displacement, is situated between
Matter upper surface kth grade interference fringe will move forward Δ l, can be derived from when upper surface is lifted Δ d:
Therefore, if measuring the information of interference fringe in its interference spectrum, determine that the refractive index n of medium is just entirely defined
Microdisplacement measurement model can calculate d by the width of interference fringek, so that it is determined that micro-displacement amount Δ d.
The measuring device, including providing the laser 9 in stable monochromatic coherent light source, laser 9 for measuring device
Output laser with the reflecting surface of 45 degree of angular alignment reflecting mirrors 12, export laser through reflection unit 12 penetrate normal transmission into
Wedge fringes device, forms optical path 121, and optical path 121 is directed at the glass splitter of wedge fringes device.
The glass splitter of wedge fringes device 10 connects testee 11, and object under test 11 is placed on described three freely
It spends on nanopositioning stage, Three Degree Of Freedom nanopositioning stage connects regulated power supply；Along the incident laser of the first optical path 121
It is transmitted through wedge fringes device 10 and will form interference fringe in the upper surface of glass splitter, then pass through interference image anti-
Penetrate mirror 12, the second optical path 122 is sent to lens group 13, then export to CMOS imaging 14, to obtain complete laser interference figure
Picture；The output end of cmos imaging 14 connects data processing system 15；Data processing system 15 is calculated according to microdisplacement measurement model
By the microdisplacement of side object, the microdisplacement measurement model is specifically:
Wherein, IinterFor interference strength, IR1For the light intensity of reflected light, λ is lambda1-wavelength, and n is medium refraction index, dk
For the thickness between kth grade interference fringe corresponding position medium upper and lower interface, L is glass splitter length, and Δ l is table on medium
Face kth grade interference fringe is by the distance of forward movement.
By information (the interference strength I for measuring interference fringe in its interference spectruminter, reflected light light intensity IR1With medium
Upper surface kth grade interference fringe is by the distance of forward movement), determine that the refractive index n of medium just entirely defines microdisplacement measurement
Model can calculate d by the width of interference fringek, so that it is determined that micro-displacement amount Δ d1、Δd2、Δd3, i.e., respectively three
The output displacement of a piezoelectric ceramic actuator.
According to Δ d1、Δd2、Δd3, it can by the kinematics characteristic of analysis platform, show that above-mentioned Three Degree Of Freedom is fixed
Z, θ of bit platformx、θy。
For the kinematics characteristic of analysis platform, the kinematic sketch (taking plate 2) of platform is first drawn as schemed (5) institute
Show, (a) in figure (5) is the initial position of upper dynamic plate 2 in above-mentioned platform.3 points of A, B, C respectively represent three piezoelectric ceramics
The position (circle center distance away from dynamic plate 2 is r) of driver 3,2,1, makees vertical line (relative to respective and circle with three points respectively
The line of the heart) it obtains A1, B1, C1 (its middle conductor AA1=L), the kinematics characteristic of above-mentioned Three Degree Of Freedom nanopositioning stage can
To be equivalent to the kinematics characteristic of line segment AA1, BB1, CC1.The dynamic plate 2 of above-mentioned locating platform is in three Piezoelectric Ceramics
Under the compound action of device, it is assumed that first Z-direction occur it is mobile generate a displacement z, and rotate generation one around x-axis
A θx, finally rotate around y-axis and generate a θy, finally reach the position of figure (b).In coordinate O-XY, point O, A, A1
Coordinate be respectively (0,0), (r, 0) and (r ,-L), when above-mentioned three-dimensional platform is transported under the driving of piezoelectric ceramic actuator
Dynamic, the position of center O is moved to O', and coordinate is (x, y, α), and point A and A1 are moved to respectively A' and A1 '.
By geometrical relationship in Fig. 5 a it can be concluded that point A (- r, 0), A1 (- r ,-L)
In O-XY coordinate system, according to geometrical relationship it can be concluded that the coordinate of point A ' and point A1 ' are respectively as follows:
(Ax ', Ay ')=(x-rcos α, y+rsin α)
(A1x ' A1y ')=(Ax '-Lsin α, Ay '-Lcos α)
According to kinetic characteristic, it can be deduced that:
A1x '=Ax '-Lsin α=A1x=-r
Therefore δA1'-A1=| | A1'-A1 | |=L+y+r sin α-L cos α
It is similar
To:
(value at (0,0,0))
And because
Therefore:
T-1It can indicate are as follows:
According to spatial kinetics model it can be concluded that
So
The rotational angle of above-mentioned Three Degree Of Freedom nanopositioning stage is in μ rad magnitude, and resolution ratio is in nrad rank:
So
Δd1、Δd2、Δd3The respectively micro-displacement of above three piezoelectric ceramic actuator C, B, A；R is piezoelectric ceramics drive
Distance of the dynamic device to 2 center of circle of moving platform.
The real-time measuring device for reading fine motion sloping platform displacement angle information includes light path part and microdisplacement measurement
Part provides stable monochromatic coherent light source for measuring device by laser, and laser is by glass splitter in the upper of glass splitter
Surface will form interference fringe, and it is complete to obtain that interference image is then sent to optical imaging system by reflecting mirror
Laser interference image.Stable voltage is provided for displacement platform by voltage of voltage regulation source, it is flat come command displacement by the variation of voltage
The variation of platform displacement, when displacement changes, tested micro-displacement causes wedge fringes device by mechanical structure
Splitter angle change, to change the space periodic length of laser interference pattern, imaging system and data processing system
This length information is extracted, and tested displacement is calculated.
Piezoelectric ceramic actuator used in Three Degree Of Freedom nanopositioning stage is driven using voltage in the present invention, closed loop
Resolution ratio is 0.1nm, and the linearity 0.03%, driving voltage is -30V -+150V, and maximum load 1kg uses voltage source
As the power supply of piezoelectric ceramic actuator, the control voltage by changing piezoelectric ceramic actuator can control its output
The displacement maximum resolution of displacement, piezoelectric ceramic actuator can achieve 0.1nm, when three piezoelectric ceramic actuator positions
When shifting amount is all the same and in the same direction, upper dynamic plate can be considered as and only moved, there is no correspondingly rotating, maximum is differentiated
Rate is consistent with single piezoelectric ceramic actuator, can reach 0.1nm.It, can when only one piezoelectric ceramic actuator output displacement
It is rotated with being considered as upper flat plate, z, θ can be calculated according to formula (5)x、θy, θx、θyMaximum resolution theoretically can be with
Reach 0.1nm/r, as r > 10mm, platform, which rotates resolution ratio, can reach 10nrad, while the maximum resolution of z theoretically may be used
To reach 0.1nm.
The invention has the advantages that proposed by the invention read in real time by optical interference method is displaced rotation information
On the one hand Three Degree Of Freedom nanopositioning stage possesses very high kinematic accuracy, θx、θyMaximum resolution can achieve 0.1nm/
The maximum resolution of r, z can reach 0.1nm.On the other hand unlike traditional precisely locating platform, light can be passed through
The method for learning interference is read out motion information (θ x, θ y, z) in real time, and whole system implements very simply, reads out
Motion information can be more accurate that stable control is easily realized to platform with Real-time Feedback into closed-loop control system.
Detailed description of the invention
Fig. 1 a and Fig. 1 b are the structural schematic diagrams of the embodiment of the present invention.
Fig. 2 is Three Degree Of Freedom nanopositioning stage structural schematic diagram in the present invention.
Fig. 3 is Three Degree Of Freedom nanopositioning stage cross-sectional view in the present invention.
Fig. 4 is the measuring device of the invention for reading Three Degree Of Freedom nanometer fine motion sloping platform displacement angle information in real time.
Fig. 4 a is the reflected light path schematic diagram of the glass splitter of the wedge fringes device of this measuring device.
Fig. 4 b is the calculating schematic diagram of the micro-displacement amount by side object of this measuring device.
Fig. 5 a and Fig. 5 b are the motion model schematic diagrams of Three Degree Of Freedom nanopositioning stage.
Figure Detail number:
1, spring support 2, upper dynamic plate 3, upper arc groove are driven plate 4, lower Spherical plug 5, for fixing ball
Shape top ramuscule square 6, piezoelectric ceramic actuator 7, spring 8, under quiet plate 9, laser 10, wedge fringes device
11, testee 12, reflecting mirror (including optical path the first optical path 121 and second optical path 122) 13, lens group 14, cmos imaging
15, data processing system
Specific embodiment
Technical solution of the present invention is further illustrated with reference to the accompanying drawing.
The Three Degree Of Freedom nanopositioning stage for reading displacement rotation information in real time by optical interference method of the invention,
Testee is carried including one and the three free nanopositioning stages for making testee generate displacement read measured object with real-time
The measuring device of position shifting angle information:
The Three Degree Of Freedom nanopositioning stage includes upper transmission plate 2 quiet plate 8 under, upper dynamic plate 2 quiet plate under
There are three transmission component between 8, three transmission components are evenly distributed on the circumference by three transmission components in 120 °,
Each transmission component includes the piezoelectric ceramic actuator 6 being vertically installed at down on quiet plate 8, the top of piezoelectric ceramic actuator 6
Portion connects ramuscule square 5, and ramuscule square 5 pushes Spherical plug 4 of staying, it is characterised in that: the hemispherical top of lower Spherical plug 4 is embedding
In the circular groove for entering upper transmission plate 3, lower Spherical plug 4 and the circular groove tangential, lower Spherical plug
4 with the line in the center of circle of the arc groove on section perpendicular under quiet plate 8；Upper transmission plate 3 is mounted on dynamic flat
In the circular groove of plate 2, spring 7 is parallel to piezoelectric ceramic actuator 6 and is evenly distributed in dynamic plate 2 quiet plate under in 120 °
On 8 spring support 1；
The measuring device, including providing the laser 9 in stable monochromatic coherent light source, laser 9 for measuring device
Output laser with the reflecting surface of 45 degree of angular alignment reflection units 12, export laser and enter through reflection unit reflection normal transmission
Wedge fringes device 10, forms the first optical path 121, and the first optical path 121 is directed at the glass splitter of wedge fringes device；
The glass splitter of wedge fringes device 10 connects testee 11, and object under test 11 is placed on described three freely
Nanopositioning stage is spent, Three Degree Of Freedom nanopositioning stage connects regulated power supply；The laser of first optical path 121 is dry by splitter
It relates to device and will form interference fringe in the upper surface of glass splitter, interference image is then passed through into reflection unit 12, the second optical path
122 are sent to optical imaging system 13 to obtain complete laser interference image；The output end of optical imaging system 13 connects
Data processing system 14.
When initial position, the vertical arc groove on upper arc groove transmission 3 bottom surface of plate of lower Spherical plug 4
It is interior, descend Spherical plug 4 to be mounted on piezoelectric ceramic actuator in actual use, it can by the stretching and contraction of piezoelectric ceramics
Lower Spherical plug 4 positive negative sense sliding such as Fig. 1 a and Fig. 1 b in the circular arc groove is realized, to be driven the movement of plate 2 on realizing
And rotation.
The present invention uses voltage mainly to drive piezoelectric ceramic actuator, and closed loop resolution ratio is 0.1nm, and the linearity is
0.03%, driving voltage is -30V -+150V, and maximum load 1kg uses voltage source as the confession of piezoelectric ceramic actuator
Power supply.When initial, it is assumed that apply a forward voltage, single piezoelectricity to single piezoelectric ceramic actuator 6 by power supply
Ceramic driver 6 is stretched to z-axis positive direction, to push lower Spherical plug 4 positive in the circular groove of transmission lithographic plate 3
Sliding such as Fig. 1 b, to realize rotating forward for upper flat plate 2, upper flat plate 2 rotates forward the forward direction for pushing testee 11
Rotation, so that the relative position of wedge fringes device 10 be caused to change as shown in Fig. 4, Fig. 4 a, Fig. 4 b, to change light
Road, the laser of optical path 121 are transmitted through wedge fringes device 10 and will form interference fringe in the upper surface of glass splitter, then
Interference image is sent to lens group 13, then is exported to cmos imaging 14 by reflection unit 12, optical path 122, to obtain
Complete laser interference image；The output end of cmos imaging 14 connects data processing system 15；Data processing system 15 is according to micro-
Displacement measurement model is calculated by the microdisplacement of side object, and the microdisplacement measurement model is specifically:
By measure interference fringe in its interference spectrum information (interference strength I_inter, reflected light light intensity I_R1 with
Medium upper surface kth grade interference fringe is by the distance of forward movement), determine that the refractive index n of medium just entirely defines micro-displacement
Measurement model can calculate d by the width of interference fringek, to determine above three piezoelectric ceramic actuator respectively
Micro-displacement amount Δ d1、Δd2、Δd3。
Further according to transformed matrix N, it can find out z, θ of above-mentioned Three Degree Of Freedom nanopositioning stage respectivelyx、 θy。
Z, θ can be calculated in real timex、θy, so that the motion information of the Three Degree Of Freedom nanopositioning stage is read out in real time,
Wherein θx、θyMaximum resolution can achieve 0.1nm/r；The maximum resolution of z can achieve 0.1nm；(Δd1、Δd2、Δ
d3The respectively micro-displacement of above three piezoelectric ceramic actuator C, B, A；R is piezoelectric ceramic actuator to 2 center of circle of moving platform
Distance.)
Content described in this specification embodiment is only enumerating to the way of realization of inventive concept, guarantor of the invention
Shield range should not be construed as being limited to the specific forms stated in the embodiments, and protection scope of the present invention is also and in this field
Technical staff conceive according to the present invention it is conceivable that equivalent technologies mean.
Claims (1)
1. reading the Three Degree Of Freedom nanopositioning stage of displacement rotation information in real time by optical interference method, which is characterized in that
Testee is carried including one and the three free nanopositioning stages for making testee generate displacement read measured position with real-time
Move the measuring device of angle information:
The Three Degree Of Freedom nanopositioning stage includes upper transmission plate (2) He Xiajing plate (8), upper dynamic plate (2) and under it is quiet flat
There are three transmission component between plate (8), three transmission components are in 120 ° of circumference being evenly distributed in through three transmission components
On, each transmission component includes the piezoelectric ceramic actuator (6) being vertically installed at down on quiet plate (8), Piezoelectric Ceramic
The top of device (6) connects ramuscule square (5), and Spherical plug (4) are stayed in ramuscule square (5) pushing；The dome of lower Spherical plug (4)
It is driven in the circular groove of plate (3) in head insertion, lower Spherical plug (4) and the circular groove tangential, under
Spherical plug (4) and the line in the center of circle of the arc groove on the section quiet plate (8) perpendicular under；Upper transmission plate
(3) it is mounted in the circular groove of dynamic plate (2), spring (7) is parallel to piezoelectric ceramic actuator (6) and is evenly distributed in 120 °
On the spring support (1) of upper dynamic plate (2) He Xiajing plate (8)；
The measuring device, including providing the laser (9) in stable monochromatic coherent light source, laser (9) for measuring device
Output laser with the reflecting surface of 45 degree of angular alignment reflecting mirrors (12), export laser through reflection unit (12) and penetrate normal transmission
It into wedge fringes device, is formed optical path (121), optical path (121) is directed at the glass splitter of wedge fringes device；
The glass splitter of wedge fringes device (10) connects testee (11), and object under test (11) is placed on described three freely
It spends on nanopositioning stage, Three Degree Of Freedom nanopositioning stage connects regulated power supply；Along the laser of the first optical path (121) incidence
It is transmitted through wedge fringes device (10) and will form interference fringe in the upper surface of glass splitter, then pass through interference image anti-
Penetrate mirror (12), the second optical path (122) is sent to lens group (13), then exports to cmos imaging (14), complete swash to obtain
Optical interference picture；The output end of cmos imaging (14) connects data processing system (15)；Data processing system (15) is according to microbit
Shift measurement model is calculated by the microdisplacement of side object, and the microdisplacement measurement model is:
Wherein, IinterFor interference strength, IR1For the light intensity of reflected light, λ is lambda1-wavelength, and n is medium refraction index, dkFor kth
Thickness between grade interference fringe corresponding position medium upper and lower interface, L are glass splitter length, and Δ l is medium upper surface kth grade
Interference fringe is by the distance of forward movement.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110926367A (en) * | 2019-12-17 | 2020-03-27 | 重庆理工大学 | Long-range optical surface shape detection device and detection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2707426Y (en) * | 2004-07-15 | 2005-07-06 | 天津大学 | Nanopositioning workbench with three degrees of freedom |
| CN203720116U (en) * | 2014-02-21 | 2014-07-16 | 中国人民解放军空军勤务学院 | Novel wedge interference linear expansion coefficient tester |
| CN210108265U (en) * | 2019-04-03 | 2020-02-21 | 浙江工业大学 | Three-freedom-degree nanometer positioning platform for reading displacement and rotation information in real time |
-
2019
- 2019-04-03 CN CN201910265406.5A patent/CN110243290B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2707426Y (en) * | 2004-07-15 | 2005-07-06 | 天津大学 | Nanopositioning workbench with three degrees of freedom |
| CN203720116U (en) * | 2014-02-21 | 2014-07-16 | 中国人民解放军空军勤务学院 | Novel wedge interference linear expansion coefficient tester |
| CN210108265U (en) * | 2019-04-03 | 2020-02-21 | 浙江工业大学 | Three-freedom-degree nanometer positioning platform for reading displacement and rotation information in real time |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110926367A (en) * | 2019-12-17 | 2020-03-27 | 重庆理工大学 | Long-range optical surface shape detection device and detection method |
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