CN109813226A - A kind of three-dimensional shape measuring apparatus - Google Patents
A kind of three-dimensional shape measuring apparatus Download PDFInfo
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- CN109813226A CN109813226A CN201910301563.7A CN201910301563A CN109813226A CN 109813226 A CN109813226 A CN 109813226A CN 201910301563 A CN201910301563 A CN 201910301563A CN 109813226 A CN109813226 A CN 109813226A
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- 239000000523 sample Substances 0.000 claims abstract description 94
- 239000000919 ceramic Substances 0.000 claims abstract description 56
- 238000001514 detection method Methods 0.000 claims abstract description 34
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 22
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 21
- 238000010586 diagram Methods 0.000 description 14
- 230000003746 surface roughness Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000012876 topography Methods 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 2
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- 238000005314 correlation function Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 241000397426 Centroberyx lineatus Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- 230000003447 ipsilateral effect Effects 0.000 description 1
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- 238000004441 surface measurement Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The invention discloses a kind of three-dimensional shape measuring apparatus, including optical platform and the XY linear motion device being set on optical platform and the Z axis lifting device for being provided with fixed plate, XY linear motion device is for driving sample placement unit to move in a straight line in X/Y plane, and Z axis lifting device is for driving detector for three-dimensional appearance to move up and down；Sample placement unit includes the horizontal adjustment platform, X/Y axis piezoelectric ceramics and sample stage set gradually from the bottom to top；Detector for three-dimensional appearance includes the position detection unit, laser generating unit and probe unit connecting with fixed plate, the laser that laser generating unit issues focuses on the back side of detecting element in probe unit, and from the backside reflection to position detection unit of detecting element；Alternatively, detector for three-dimensional appearance includes the contact pilotage fixed plate being arranged in fixed plate and the contact pilotage measuring instrument being set in contact pilotage fixed plate.Three-dimensional shape measuring apparatus structure of the present invention is simple, at low cost, and measurement accuracy is high.
Description
Technical field
The invention belongs to machine-building field of measuring technique more particularly to a kind of available Part Surface Roughness, plane
The three-dimensional shape measuring apparatus of the surface characteristics information such as degree.
Background technique
With modern precision processing and manufacturing development, required precision and quality requirement to piece surface are increasingly
Height, traditional two-dimensional measurement technology can no longer meet the market demand, and three-dimensional surface measurement can provide the complete of piece surface
Whole information, therefore the three dimensional topography of piece surface is measured be particularly important；Wherein three dimensional topography includes
Contour area, surface defect, surface abrasion and surface roughness etc..
Wherein, Part Surface Roughness refers to actual microcosmic morphology and ideal surface after part processing
Error between geometry；In actual processing, Part Surface Roughness to the assembling of part, leakproofness, noise, fatigue,
Abrasion etc. has larger impact, therefore it is an important feature for evaluating surface quality of workpieces.
Currently, there are many instrument for measuring part three-dimensional appearance, but structure is complicated for most measuring instruments, manufacturing cost
Height, and it is directed to the low measurement accuracy of Part Surface Roughness；Poor universality is had a single function, different roughness cannot be required
Parts product carries out particular detection.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, it is simple, at low cost and measure that the present invention provides a kind of structure
Three-dimensional shape measuring apparatus with high accuracy.
In order to solve the above technical problems, the technical scheme adopted by the invention is that: a kind of three-dimensional shape measuring apparatus, including light
The XY linear motion device and Z axis lifting device learning platform and being set on the optical platform, which is characterized in that further include setting
Set on the XY linear motion device sample placement unit and the fixed plate that is arranged on the Z axis lifting device, it is described
Detector for three-dimensional appearance is provided in fixed plate, the XY linear motion device is for driving the sample placement unit in XY
It is moved in a straight line in plane, the Z axis lifting device is for driving the detector for three-dimensional appearance to move up and down；
The sample placement unit includes the horizontal adjustment platform, X/Y axis piezoelectric ceramics and sample stage set gradually from the bottom to top；
The detector for three-dimensional appearance includes the position detection unit, laser generating unit and spy being arranged in the fixed plate
Survey unit；The laser that the laser generating unit issues focuses on the back side of detecting element in the probe unit, and from described
In the backside reflection of detecting element to the position detection unit；Alternatively, the detector for three-dimensional appearance includes being arranged in institute
The contact pilotage measuring instrument stating the contact pilotage fixed plate in fixed plate and being set in the contact pilotage fixed plate.
Preferably, the probe unit includes the piezoelectric ceramics supporting plate, Z axis piezoelectric ceramics and spy from top to bottom set gradually
Needle fixing seat, the piezoelectric ceramics supporting plate are connect with the fixed plate, and the probe base is set to the Z axis piezoelectric ceramics
Bottom, and the probe base extends an extension tilted down, the extension from Z axis piezoelectric ceramics side
The one end in portion is provided with the detecting element, and the detecting element is cantilever probe, and the Z axis piezoelectric ceramics is described for adjusting
The position of cantilever probe, the flare for receiving the position detection unit are moved to the center of the position detection unit
Position.
Preferably, the position detection unit includes the first connecting plate connecting with the fixed plate, first connection
It is provided with first angle adjustment platform on plate, position detector supporting plate, the position inspection are provided on the first angle adjustment platform
It surveys on device supporting plate and is provided with manual two-dimension adjustment platform, be provided with position detector on the manual two-dimension adjustment platform；
The laser generating unit includes the second connecting plate connecting with the fixed plate, and is provided on second connecting plate
Two angles adjust platform, are provided with laser supporting plate on the second angle adjustment platform, are provided with laser on the laser supporting plate
Device position adjusts platform, is provided with laser on the laser positions adjustment platform.
Preferably, the first angle adjustment platform and second angle adjustment platform include ontology and connect with the ontology
The adjustment block connect；The ontology disc-shaped structure is provided with handle on the ontology, and an end face of the ontology, which is provided with, to be used for
The rotary shaft being rotatablely connected with first connecting plate or second connecting plate；The adjustment block is equipped with arcuate guide hole,
One holding screw one end is pierced by the arcuate guide hole and is threadedly coupled with first connecting plate or second connecting plate, institute
The center of circle for stating arcuate guide hole is overlapped with the center of the rotary shaft.
Preferably, the position detector supporting plate is L-shaped, the bottom of the position detector supporting plate be equipped with for it is described
First angle adjusts the first mounting hole and the second mounting hole of platform connection, wherein second mounting hole is waist-shaped hole, institute's rheme
The side of detector supporting plate is set equipped with the third mounting hole for connecting with the manual two-dimension adjustment platform.
Preferably, the manual two-dimension adjustment platform includes the first slide unit module and the second slide unit module, first slide unit
Module and the second slide unit module are for making the relatively described position detector supporting plate of the position detector make two-dimensional adjustment
It is mobile；
The first slide unit module and the second slide unit module are dovetail slide unit structure；The dovetail slide unit structure includes phase
The dovetail slide block and dovetail guide mutually cooperated, the end of the dovetail guide are equipped with fixing seat, and the fixing seat is equipped with and is used for
The adjusting screw of sliding stroke between the dovetail slide block and the dovetail guide is adjusted, the adjusting screw and the dovetail are sliding
Block is threadedly engaged；
The dovetail guide is equipped with positioning plate, and the positioning plate is equipped with waist-shaped hole, the extending direction of the waist-shaped hole and institute
The glide direction for stating dovetail slide block is consistent, and one end of a fastening screw passes through the waist-shaped hole and connects with the dovetail slide block screw thread
It connects；
The dovetail guide of the first slide unit module is fixedly connected with the position detector supporting plate, the second slide unit mould
The dovetail guide of block is fixedly connected with the dovetail slide block of the first slide unit module, the institute of the second slide unit module
Dovetail slide block is stated to be fixedly connected with the position detector.
Preferably, the laser supporting plate be equipped with for the second angle the 4th mounting hole that connect of adjustment platform and
5th mounting hole, two the 6th mounting holes for being connect with laser positions adjustment platform；Wherein the 5th mounting hole,
Two the 6th mounting holes are waist-shaped hole, and the extension of the extending direction of the 5th mounting hole and the 6th mounting hole
Direction is vertical.
Preferably, the laser positions adjustment platform includes outer L shaped plate, interior L shaped plate and active plate；The outer L shape
Sheetpile is stacked in the outside of the interior L shaped plate and is detachably connected with the interior L shaped plate；
The outer L shaped plate is connect with the laser supporting plate, is connected between the interior L shaped plate and the active plate by multiple tension springs
It connects, for adjusting the adjusting bolt of the active plate pitch angle, and the adjusting there are three settings in the interior L shaped plate
Bolt screws out one end of the interior L shaped plate and the active plate abuts against, and three adjusting bolts are triangularly arranged,
The laser is provided on the active plate.
Preferably, the XY linear motion device includes X-axis linear motion unit and Y-axis linear motion unit, the Z axis
Lifting device includes Z axis linear motion unit；
The X-axis linear motion unit, the Y-axis linear motion unit and the Z axis linear motion unit include pedestal, institute
It states pedestal and is equipped with two parallel sliding rails, be slidably fitted with take-up housing on the sliding rail, be rotatably equipped with silk on the pedestal
Thick stick, and the lead screw is located at for driving the take-up housing to slide along the sliding rail between two sliding rails, on the pedestal
Equipped with for driving the driving motor of the lead screw rotation；
The pedestal of the Y-axis linear motion unit is horizontally arranged on the optical platform, the X-axis linear motion unit
The pedestal be fixedly connected with the take-up housing of the Y-axis linear motion unit, the sliding block of the X-axis linear motion unit
The sample placement unit is provided on seat；
The pedestal of the Z axis linear motion unit is vertically installed on the optical platform, the Z axis linear motion unit
The take-up housing be fixedly connected with the fixed plate.
Preferably, the horizontal adjustment platform includes mounting plate, movable plate and regulating part, the mounting plate and the movable plate
Between connected by multiple tension springs, one end of the regulating part acts against on the movable plate, the other end of the regulating part with it is described
Mounting plate is threadedly coupled；The mounting plate is connect with the XY linear motion device, and the X/Y axis is provided on the movable plate
Piezoelectric ceramics.
By using above-mentioned technical proposal, the beneficial effect that the present invention obtains is:
Three-dimensional shape measuring apparatus structure of the invention is simple, mainly puts including XY linear motion device, Z axis lifting device, sample
Set unit and detector for three-dimensional appearance.Sample is placed on sample stage, the level of sample, Z axis are adjusted by horizontal adjustment platform
Lifting device drives probe unit close to sample surfaces, and the flare for receiving position detection unit falls in position testing unit
The center of member.Start to measure, X/Y axis piezoelectric ceramics starts to apply voltage, makes sample that X/Y axial displacement fluctuation occur.Together
When, the laser that laser generating unit issues focuses on the back side of detecting element, and examines from the backside reflection of detecting element to position
It surveys on unit；Each measurement is obtained to obtain using the relative position of flare in position detection unit and the amount of exercise of detecting element
The Z-direction altitude information of point, the position coordinates and Z-direction altitude information of each measurement point correspond, and can be obtained three
Topographic data is tieed up, that is, obtains surface roughness.Alternatively, directly being measured using contact pilotage measuring instrument, the Z-direction of measurement point
Altitude information is that the voltage signal conversion based on contact pilotage measuring instrument (detecting element is contact pilotage) itself feedback obtains, and is suitable for detection
Roughness Ra range is the part of 0.2 ~ 10um.The continuous of measurement may insure using X/Y axis piezoelectric ceramics and horizontal adjustment platform
Property and accuracy.
Wherein, probe unit includes cantilever probe (detecting element) and Z axis piezoelectric ceramics, is visited when Z axis lifting device drives
Unit is surveyed close to sample surfaces, optical path change caused by deflecting by cantilever probe judges whether to contact, and makes pottery by Z axis piezoelectricity
Porcelain adjusts cantilever probe position, and the flare for receiving position detector falls in the center of position detector；Outstanding
Under arm probe and sample contact condition, the out-of-flatness of sample surfaces makes the cantilever of cantilever probe deflect, and leads to laser reflection
Light class changes on position detector, changes feedback cantilever probe deflection by facula position, thick in detection sample surfaces
While rugosity, falls and be moved in position detector by the flare that Z axis piezoelectric ceramics receives position detector
Heart position.The Z-direction altitude information of measurement point is relative position based on flare in position detection unit and z to pressure at this time
Electroceramics amount of exercise obtains.The use of Z axis piezoelectric ceramics further improves the precision of measurement, is suitable for detection roughness Ra
Range is the part of 0.008 ~ 0.2um.The combined use of two kinds of detector for three-dimensional appearance improves three-dimensional shape measuring apparatus
Versatility, the parts product that can be required for different roughness carry out particular detection.
To sum up, three-dimensional shape measuring apparatus of the invention, structure is simple, at low cost, measurement accuracy is high and versatile.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of three-dimensional shape measuring apparatus of the present invention；
Fig. 2 is the structural schematic diagram at another visual angle of three-dimensional shape measuring apparatus of the present invention；
Fig. 3 is the structural schematic diagram of XY linear motion device and Z axis lifting device in Fig. 1；
Fig. 4 is the partial enlargement diagram of Fig. 3；
Fig. 5 is the structural schematic diagram of horizontal adjustment platform in Fig. 1；
Fig. 6 is a kind of structural schematic diagram of embodiment of detector for three-dimensional appearance in Fig. 1；
Fig. 7 is the structural schematic diagram of detector for three-dimensional appearance another kind embodiment；
Fig. 8 is the structural schematic diagram of probe unit in Fig. 6；
Fig. 9 is the structural schematic diagram of position detection unit in Fig. 6；
Figure 10 is the decomposition texture schematic diagram of Fig. 9；
Figure 11 is the structural schematic diagram of first angle adjustment platform in Figure 10；
Figure 12 is the structural schematic diagram of manual two-dimension adjustment platform in Figure 10；
Figure 13 is the structural schematic diagram of laser generating unit in Fig. 6；
Figure 14 is the decomposition texture schematic diagram of Figure 13；
In figure: 1- optical platform, 2-XY linear motion device, 21-X axis linear motion unit, 211- pedestal, 212- sliding rail,
213- take-up housing, 2131- limit plate, 214- lead screw, 215- driving motor, 216- supporting plate, 2161- limit base, 22-Y axis straight line
Moving cell, 221- pedestal, 222- take-up housing, 3-Z axis lifting device, 31- pedestal, 32- take-up housing, 4- sample placement unit,
41- horizontal adjustment platform, 411- mounting plate, 412- movable plate, 413- regulating part, 414- tension spring, 42-X/Y axis piezoelectric ceramics, 43-
Sample stage, 5- detector for three-dimensional appearance, 51- fixed plate, 52- position detection unit, the first connecting plate of 521-, first jiao of 522-
Degree adjustment platform, 5221- ontology, 5222- adjustment block, 5223- handle, 5224- rotary shaft, 5225- arcuate guide hole, 5226- are tight
Determine screw, 523- position detector supporting plate, the first mounting hole of 5231-, the second mounting hole of 5232-, 5233- third mounting hole,
The manual two-dimension adjustment platform of 524-, 5241- the first slide unit module, 5242- the second slide unit module, 5243- dovetail slide block, 5244- swallow
Tail guide rail, 5245- fixing seat, 5246- adjusting screw, 5247- positioning plate, 5248- waist-shaped hole, 5249- fastening screw, 5250-
Dovetail slide block, 5251- dovetail guide, 525- position detector, 53- laser generating unit, the second connecting plate of 531-, 532- laser
Device supporting plate, the 4th mounting hole of 5321-, the 5th mounting hole of 5322-, the 6th mounting hole of 5323-, 533- laser positions adjust platform,
The outer L shaped plate of 5331-, L shaped plate in 5332-, 5333- active plate, 5334- adjust bolt, 5335- tension spring, 534- laser,
535- second angle adjustment platform, 54- probe unit, 541- piezoelectric ceramics supporting plate, 542-Z axis piezoelectric ceramics, 543- probe are fixed
Seat, 544- extension, 545- cantilever probe, 55- contact pilotage fixed plate, 56- contact pilotage measuring instrument, 57- contact pilotage.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing to the present invention
Embodiment be described in detail.
Embodiment one:
As Fig. 1 and Fig. 2 jointly shown in, three-dimensional shape measuring apparatus mainly by optical platform 1, XY linear motion device 2, Z axis go up and down
This five most of composition of device 3, sample placement unit 4 and detector for three-dimensional appearance 5.Wherein: XY linear motion device 2 and Z
Axis lifting device 3 is set on optical platform 1；Sample placement unit 4 is arranged in 2 power output part of XY linear motion device
On, XY linear motion device 2 is for driving sample placement unit 4 to move in a straight line in X/Y plane；Fixed plate 51 is arranged in Z axis
On 3 power output part of lifting device, detector for three-dimensional appearance 5 is arranged in fixed plate 51, and Z axis lifting device 3 is used for band
Dynamic detector for three-dimensional appearance 5 moves up and down.
As Fig. 3 and Fig. 4 jointly shown in, in the present embodiment, XY linear motion device 2 include X-axis linear motion unit 21 and Y
Axis linear motion unit 22, Z axis lifting device 3 include Z axis linear motion unit；X-axis linear motion unit 21, Y-axis straight line fortune
Moving cell 22 is identical with the structure of Z axis linear motion unit, carries out by taking X-axis linear motion unit 21 as an example to its structure below detailed
It is thin to illustrate；X-axis linear motion unit 21 includes pedestal 211, and pedestal 211 is equipped with two parallel sliding rails 212, on sliding rail 212
It is slidably fitted with take-up housing 213, lead screw 214 is rotatably equipped on pedestal 21, and lead screw 214 is used between two sliding rails 212
It is slided in driving take-up housing 213 along sliding rail 212；Wherein, 213 bottom of take-up housing is equipped with the company that connection is threadedly engaged with lead screw 214
Block is connect, which is in nut type；Pedestal 21 is equipped with the driving motor 215 for driving lead screw 214 to rotate simultaneously.
Supporting plate 216 is provided on the pedestal 211 in one sliding rail, 212 outside.Wherein supporting plate 216 is L-shaped, including the first plate portion and
Second plate portion, the first plate portion are equipped with multiple waist type mounting holes for connecting with the side of pedestal 211, are arranged in the second plate portion
There is limit base 2161, is provided with U-lag on limit base 2161；The side (ipsilateral with limit base 2161) of take-up housing 213 is provided with
Limit plate 2131, the L-shaped structure of limit plate 2131, including third plate portion and the 4th plate portion, wherein the 4th plate portion can slide into U-lag
It is interior, it is matched therewith realization limit function.
The pedestal 221 of Y-axis linear motion unit 22 is horizontally arranged on optical platform 1, the base of X-axis linear motion unit 21
Seat 211 is fixedly connected with the take-up housing 222 of Y-axis linear motion unit 22, is set on the take-up housing 213 of X-axis linear motion unit 21
It is equipped with above-mentioned sample placement unit 4；The pedestal 31 of Z axis linear motion unit is vertically installed on optical platform 1, Z axis straight line
The take-up housing 32 of moving cell is fixedly connected with above-mentioned fixed plate 51.
Sample placement unit 4 includes the horizontal adjustment platform 41 set gradually from the bottom to top, X/Y axis piezoelectric ceramics 42(resolution
Rate 5nm) and sample stage 43, wherein horizontal adjustment platform 41 is fixedly connected with the take-up housing 213 of X-axis linear motion unit 21.
As shown in figure 5, horizontal adjustment platform 41 includes mounting plate 411, movable plate 412 and regulating part 413 in the present embodiment,
It is connected between mounting plate 411 and movable plate 412 by multiple tension springs 414, one end of regulating part 413 acts against on movable plate 412, adjusts
The other end of part 413 is threadedly coupled with mounting plate 411；The take-up housing 213 of mounting plate 411 and X-axis linear motion unit 21 is fixed
It connects, is provided with X/Y axis piezoelectric ceramics 42 on movable plate 412.It can make the work of horizontal adjustment platform 41 by rotating regulating part 413
Movable plate 412 verts, to adjust levelness.X/Y axis piezoelectric ceramics 42 is shaken by the vibration of exportable X-direction and Y direction
Dynamic piezoelectric ceramics is integrated；Piezoelectric ceramics need to connect external control power supply, using the inverse piezoelectric effect of piezoelectric ceramics, by electric energy
For mechanical energy, power supply is controlled by outside and applies different voltages to piezoelectric ceramics, piezoelectric ceramics is made to work in device resonant frequency point,
And then stable vibration output is generated, to control micro-displacement of the sample in X-axis/Y-axis.
As shown in fig. 6, detector for three-dimensional appearance 5 includes the position detection unit 52 being arranged in fixed plate 51, laser
Generating unit 53 and probe unit 54；The laser that laser generating unit 53 issues focuses on the back of detecting element in probe unit 54
Face, and on from the backside reflection of detecting element to position detection unit 52, i.e., position detection unit 52 is based on detection at this time
In the reflection light that unit 54 generates.
As shown in figure 8, in the present embodiment, probe unit 54 include the piezoelectric ceramics supporting plate 541 from top to bottom set gradually,
Z axis piezoelectric ceramics 542(resolution ratio 0.1nm) and probe base 543.Wherein piezoelectric ceramics supporting plate 541 is L-shaped, including vertical
Plate portion and horizontal plate part；The vertical plate portion of piezoelectric ceramics supporting plate 541 is connect with fixed plate 51, the level of piezoelectric ceramics supporting plate 541
Plate portion is fixedly connected with Z axis piezoelectric ceramics 542, and probe base 543 is set to the bottom of Z axis piezoelectric ceramics 542, and probe is solid
Reservation 543 extends the extension 544(that one tilts down from 542 side of Z axis piezoelectric ceramics convenient for connecing detecting element with sample
Touching), one end of extension 544 is provided with detecting element, which is cantilever probe 545；Z axis piezoelectric ceramics 542 is applied
Add different driving voltages, so that it is exported different vibratory outputs to adjust the position of cantilever probe 545, connect position detection unit 52
The center that the flare being subject to is moved to position detection unit 52 (ensures that flare remains at position detection
The center of unit 52).
As Fig. 9 to Figure 12 jointly shown in, in the present embodiment, position detection unit 52 includes connecting with above-mentioned fixed plate 51
First connecting plate 521 is provided with first angle adjustment platform 522 on first connecting plate 521, is arranged on first angle adjustment platform 522
There is position detector supporting plate 523, manual two-dimension adjustment platform 524, manual two-dimension adjustment platform are provided on position detector supporting plate 523
Position detector 525 is provided on 524.
Wherein, first angle adjustment platform 522 includes ontology 5221 and the adjustment block 5222 connecting with 5221 lower end of ontology；This
The disc-shaped structure of body 5221, handle 5223 is provided on ontology 5221, and an end face of ontology 5221 is provided with for connecting with first
The rotary shaft 5224 that fishplate bar 521 is rotatablely connected；Adjustment block 5222 is equipped with arcuate guide hole 5225,5226 one end of a holding screw
It is pierced by arcuate guide hole 5225 and is threadedly coupled with the first connecting plate 521, the center of circle in arcuate guide hole 5225 and rotary shaft 5224
Center be overlapped.Holding screw 5226, control handle 5223 are loosened, ontology 5221 is rotated around the central axis of rotary shaft 5224,
Relative motion occurs for arcuate guide hole 5225 and holding screw 5226 simultaneously, then fastens holding screw 5226, completes angle
Adjustment.
Wherein, position detector supporting plate 523 is L-shaped, the bottom of position detector supporting plate 523 set there are two be used for and first
Angle adjusts the first mounting hole 5231 and the second mounting hole 5232 of 522 ontology 5221 of platform connection, for the ease of installing, wherein the
Two mounting holes 5232 are designed as waist-shaped hole, and the side of position detector supporting plate 523 is equipped with for connecting with manual two-dimension adjustment platform 524
The third mounting hole 5233 connect.
Wherein, manual two-dimension adjustment platform 524 includes the first slide unit module 5241 and the second slide unit module 5242, the first slide unit
Module 5241 and the second slide unit module 5242 are dovetail slide unit structure.It is sliding to dovetail by taking the second slide unit module 5242 as an example below
Platform structure is described in detail.Second slide unit module 5242 includes mutually matched dovetail slide block 5243 and dovetail guide 5244,
The end of dovetail guide 5244 is equipped with fixing seat 5245, in fixing seat 5245 rotation be provided with for adjust dovetail slide block 5243 with
The adjusting screw 5246 of sliding stroke, adjusting screw 5246 are threadedly engaged with dovetail slide block 5243 between dovetail guide 5244；Swallow
The cavity for accommodating adjusting screw 5246 is equipped with inside tail guide rail 5244, adjusting screw 5246 stretches out one end setting of fixing seat 5245
There is the knob convenient for operation；In the present embodiment the bottom of dovetail slide block 5243 be equipped with interconnecting piece, adjusting screw 5246 really with
Interconnecting piece is threadedly engaged connection.
One side of dovetail guide 5244 is equipped with positioning plate 5247, and positioning plate 5247 is equipped with waist-shaped hole 5248, waist-shaped hole
5248 extending direction is consistent with the glide direction of dovetail slide block 5243, and one end of a fastening screw 5249 passes through waist-shaped hole 5248
And it is threadedly coupled with dovetail slide block 5243.
The dovetail guide 5251 of first slide unit module 5241 is fixedly connected with position detector supporting plate 523, the second slide unit mould
The dovetail guide 5244 of block 5242 is fixedly connected with the dovetail slide block 5250 of the first slide unit module 5241, the second slide unit module 5242
Dovetail slide block 5243 be fixedly connected with position detector 525.First slide unit module 5241 and the second slide unit module 5242 are used for
525 relative position detector supporting plate 523 of position detector is set to make two-dimensional adjustment movement.
As Figure 13 and Figure 14 jointly shown in, laser generating unit 53 includes the second connecting plate connecting with above-mentioned fixed plate 51
531, it is provided with second angle adjustment platform 535(on the second connecting plate 531, elaboration is had been carried out to its structure above, herein not
Repeat), second angle adjusts and is provided with laser supporting plate 532 on platform 535, and laser position is provided on laser supporting plate 532
Adjustment platform 533 is set, is provided with laser 534 on laser positions adjustment platform 533；The laser that laser 534 issues focuses on outstanding
The back side of arm probe 545, and on from the backside reflection of cantilever probe 545 to position detector 525.
Wherein, the 4th mounting hole there are two being set on laser supporting plate 532 for being connect with second angle adjustment platform 535
5321 and the 5th mounting hole 5322, two for the 6th mounting holes 5323 that connect of laser positions adjustment platform 533；Wherein
Five the 6th mounting holes 5323 of mounting hole 5322, two are waist-shaped hole, and the extending direction of the 5th mounting hole 5322 and the 6th peace
The extending direction for filling hole 5323 is vertical.
It includes outer L shaped plate 5331, interior L shaped plate 5332 and active plate 5333 that laser positions, which adjust platform 533,；Outer L shape
Plate 5331 is stacked on the outside of interior L shaped plate 5332 and is detachably connected with interior L shaped plate 5332.Outer L shaped plate 5331 and laser branch
Plate 532 connects, and is connected between interior L shaped plate 5332 and active plate 5333 by multiple tension springs 5335, is provided in interior L shaped plate 5332
Three are used to adjust the adjusting bolt 5334 of 5333 pitch angle of active plate, and adjust bolt 5334 and screw out interior L shaped plate
5332 one end is abutted against with active plate 5333, and three adjusting bolts 5334 are triangularly arranged, on active plate 5333
It is provided with laser 534.
The present embodiment three-dimensional shape measuring apparatus is suitable for detecting the part that roughness Ra range is 0.008 ~ 0.2um；Below
The course of work for obtaining part three dimensional topography using the present embodiment is described in detail:
S0, by XY linear motion device 2, Z axis lifting device 3, X/Y axis piezoelectric ceramics 42, position detector 525, laser 534
With Z axis piezoelectric ceramics 542 with control system (host computer, display screen, external control power supply, servo-system etc., herein not as
The innovative point of the application only briefly describes herein) electrical connection.
S1, sample is placed on sample stage 43, the levelness of sample is adjusted by horizontal adjustment platform 41, and be manually operated the
One angle adjusts platform 522, second angle adjustment platform 535 and manual two-dimension adjustment platform 524 and laser position adjusts platform 533, makes
The laser that laser 534 issues focuses on the back side of cantilever probe 545, and from 545 backside reflection of cantilever probe to position detection
On device 525, that is to say, position detector 525 is based in the reflection light of the generation of cantilever probe 545 at this time；Control Z axis liter
Falling unit 3 drives probe unit 54 close to sample surfaces, when close to sample surfaces, caused by being deflected by cantilever probe 545
Optical path change judges whether to contact with sample, and by applying different voltages to Z axis piezoelectric ceramics 542, to adjust cantilever probe
545 positions, so that the flare that position detector 525 receives falls the center for being moved to position detector 525.
S2, start to measure, start the triangle wave voltage for applying control Y direction vibration, sample to X/Y axis piezoelectric ceramics 42
It is moved along Y-axis, the out-of-flatness of sample surfaces makes the cantilever of cantilever probe 545 deflect, and causes flare in position detection
Change in location on device 525；The deflection of change in location feedback cantilever probe 545 based on flare, when flare is mobile
When (such as away from edge 10%) to distance and position detector photosensitive sites edge certain distance, apply electricity to Z axis piezoelectric ceramics 542
Pressure, the vibration that Z axis piezoelectric ceramics 542 exports keep flare mobile to the center of position detector 525.
S3, the relative position for recording the flare that each measurement point generates on position detector 525 and Z axis piezoelectricity
Ceramic 542 amounts of exercise substitute into the Z-direction height that correlation function obtains corresponding measurement point.
S4, after completing Y direction one-shot measurement, start applying the vibration of control X-direction just to X/Y axis piezoelectric ceramics 42
String wave voltage, sample stop after motor unit distance in X-axis, start to apply control Y-axis side again to X/Y axis piezoelectric ceramics 42
To the triangle wave voltage of vibration.After the X-axis scanning distance for completing setting, image mosaic and other operations are carried out to data are obtained
It handles (relatively conventional technological means, this will not be repeated here)；The position coordinates and Z-direction altitude information of each measurement point are one by one
It is mapped, can be obtained three-dimensional appearance data, that is, obtain Part Surface Roughness.
The setting of X/Y axis piezoelectric ceramics 42 and Z axis piezoelectric ceramics 542, improves the measurement accuracy of three-dimensional shape measuring apparatus.
Embodiment two:
It is that the structure of detector for three-dimensional appearance 5 is different in place of the present embodiment and the difference of embodiment one, below only for area
Place is not described in detail.
As shown in fig. 7, detector for three-dimensional appearance 5 includes the contact pilotage fixed plate connecting with fixed plate 51 in the present embodiment
55 and the contact pilotage measuring instrument 56 that is set in contact pilotage fixed plate 55, contact pilotage measuring instrument 56 includes externally visible contact pilotage 57, internal
Equipped with the sensor lever being connected with contact pilotage 57 and the inductive displacement transducer being connect with sensor lever.
The present embodiment three-dimensional shape measuring apparatus is suitable for detecting the part that roughness Ra range is 0.2 ~ 10um；Below to benefit
It is described in detail with the course of work that the present embodiment obtains part three dimensional topography:
A0, it is with control by XY linear motion device 2, Z axis lifting device 3, X/Y axis piezoelectric ceramics 42 and contact pilotage measuring instrument 56
System (host computer, display screen, external control power supply, servo-system etc., herein not as the innovative point of the application, herein only briefly
Description) electrical connection.
A1, sample is placed on sample stage 43, the levelness of sample, control Z axis lifting is adjusted by horizontal adjustment platform 41
Device 3 drives contact pilotage measuring instrument 56 close to sample surfaces, and its internal sensor lever is made to be in equilbrium position (contact pilotage measurement
Instrument 56 itself feedback).
A2, start to measure, start the triangle wave voltage for applying control Y direction vibration, sample to X/Y axis piezoelectric ceramics 42
It being moved along Y-axis, the out-of-flatness of sample surfaces makes 57 height of contact pilotage change, after sensor lever ratio enlargement, sensing
(magnetic core changes position the inductive displacement transducer of device lever rear end connection in difference coil, and magnetic core evolution is led
Cause two coil inductance imbalances of difference coil) differential signal is formed, target voltage signal is obtained after treatment.
A3, the target voltage signal for recording each measurement point substitute into the Z-direction height that correlation function obtains corresponding measurement point.
A4, after completing Y direction one-shot measurement, start applying the vibration of control X-direction just to X/Y axis piezoelectric ceramics 42
String wave voltage, sample stop after motor unit distance in X-axis, start to apply control Y-axis side again to X/Y axis piezoelectric ceramics 42
To the triangle wave voltage of vibration.After the X-axis scanning distance for completing setting, image mosaic and other operations are carried out to data are obtained
Processing；The position coordinates and Z-direction altitude information of each measurement point correspond, and can be obtained three-dimensional appearance data, i.e.,
Obtain Part Surface Roughness.
It is also possible to which the detector for three-dimensional appearance 5 in embodiment one and embodiment two is mounted on fixed plate simultaneously
On 51, replacement when using can avoid.
To sum up, three-dimensional shape measuring apparatus structure of the present invention is simple, at low cost, and measurement accuracy is high；Match the three of two kinds of structures
Shape measure device 5 is tieed up, the parts product that can be required for different roughness carries out particular detection, improves versatility.
Above in conjunction with attached drawing, the embodiment of the present invention is explained in detail, but the present invention is not limited to above-mentioned
Embodiment, technical field those of ordinary skill within the scope of knowledge, ancestor of the present invention can also not departed from
Various changes can be made under the premise of purport.
Claims (10)
1. a kind of three-dimensional shape measuring apparatus, including optical platform and the XY linear motion device being set on the optical platform and
Z axis lifting device, which is characterized in that further include that the sample placement unit being arranged on the XY linear motion device and setting exist
Fixed plate on the Z axis lifting device is provided with detector for three-dimensional appearance, the XY linear motion dress in the fixed plate
It sets for driving the sample placement unit to move in a straight line in X/Y plane, the Z axis lifting device is for driving described three
Shape measure device is tieed up to move up and down；
The sample placement unit includes the horizontal adjustment platform, X/Y axis piezoelectric ceramics and sample stage set gradually from the bottom to top；
The detector for three-dimensional appearance includes the position detection unit, laser generating unit and spy being arranged in the fixed plate
Survey unit；The laser that the laser generating unit issues focuses on the back side of detecting element in the probe unit, and from described
In the backside reflection of detecting element to the position detection unit；Alternatively, the detector for three-dimensional appearance includes being arranged in institute
The contact pilotage measuring instrument stating the contact pilotage fixed plate in fixed plate and being set in the contact pilotage fixed plate.
2. three-dimensional shape measuring apparatus according to claim 1, which is characterized in that the probe unit include from top to bottom according to
Piezoelectric ceramics supporting plate, Z axis piezoelectric ceramics and the probe base of secondary setting, the piezoelectric ceramics supporting plate and the fixed plate connect
It connects, the probe base is set to the bottom of the Z axis piezoelectric ceramics, and the probe base is made pottery from the Z axis piezoelectricity
An extension tilted down is extended in porcelain side, and one end of the extension is provided with the detecting element, the detection member
Part is cantilever probe, and the Z axis piezoelectric ceramics is used to adjust the position of the cantilever probe, receives the position detection unit
To flare be moved to the center of the position detection unit.
3. three-dimensional shape measuring apparatus according to claim 1 or 2, which is characterized in that the position detection unit include with
First connecting plate of fixed plate connection is provided with first angle adjustment platform, the first angle on first connecting plate
It is provided with position detector supporting plate on adjustment platform, manual two-dimension adjustment platform, the hand are provided on the position detector supporting plate
Position detector is provided on dynamic two-dimension adjustment platform；
The laser generating unit includes the second connecting plate connecting with the fixed plate, and is provided on second connecting plate
Two angles adjust platform, are provided with laser supporting plate on the second angle adjustment platform, are provided with laser on the laser supporting plate
Device position adjusts platform, is provided with laser on the laser positions adjustment platform.
4. three-dimensional shape measuring apparatus according to claim 3, which is characterized in that first angle adjustment platform and described the
Two angles adjust the adjustment block that platform includes ontology and connect with the ontology；The disc-shaped structure of ontology, on the ontology
It is provided with handle, an end face of the ontology is provided with for being rotatablely connected with first connecting plate or second connecting plate
Rotary shaft；The adjustment block be equipped with arcuate guide hole, a holding screw one end be pierced by the arcuate guide hole and with it is described
First connecting plate or second connecting plate are threadedly coupled, the center of circle in the arcuate guide hole and the center weight of the rotary shaft
It closes.
5. three-dimensional shape measuring apparatus according to claim 3, which is characterized in that the position detector supporting plate is L-shaped, institute
The bottom for stating position detector supporting plate is equipped with for adjusting the first mounting hole and the second installation that platform is connect with the first angle
Hole, wherein second mounting hole is waist-shaped hole, the side of the position detector supporting plate be equipped with for the manual two dimension
Adjust the third mounting hole of platform connection.
6. three-dimensional shape measuring apparatus according to claim 3, which is characterized in that the manual two-dimension adjustment platform includes first
Slide unit module and the second slide unit module, the first slide unit module and the second slide unit module are for making the position detector
Make two-dimensional adjustment movement relative to the position detector supporting plate；
The first slide unit module and the second slide unit module are dovetail slide unit structure；The dovetail slide unit structure includes phase
The dovetail slide block and dovetail guide mutually cooperated, the end of the dovetail guide are equipped with fixing seat, and the fixing seat is equipped with and is used for
The adjusting screw of sliding stroke between the dovetail slide block and the dovetail guide is adjusted, the adjusting screw and the dovetail are sliding
Block is threadedly engaged；
The dovetail guide is equipped with positioning plate, and the positioning plate is equipped with waist-shaped hole, the extending direction of the waist-shaped hole and institute
The glide direction for stating dovetail slide block is consistent, and one end of a fastening screw passes through the waist-shaped hole and connects with the dovetail slide block screw thread
It connects；
The dovetail guide of the first slide unit module is fixedly connected with the position detector supporting plate, the second slide unit mould
The dovetail guide of block is fixedly connected with the dovetail slide block of the first slide unit module, the institute of the second slide unit module
Dovetail slide block is stated to be fixedly connected with the position detector.
7. three-dimensional shape measuring apparatus according to claim 3, which is characterized in that the laser supporting plate be equipped with for
The 4th mounting hole and the 5th mounting hole of second angle adjustment platform connection, two be used for and the laser positions adjust platform
6th mounting hole of connection；Wherein the 5th mounting hole, two the 6th mounting holes are waist-shaped hole, and the 5th peace
The extending direction for filling hole is vertical with the extending direction of the 6th mounting hole.
8. three-dimensional shape measuring apparatus according to claim 3, which is characterized in that the laser positions adjustment platform includes outer
L shaped plate, interior L shaped plate and active plate；The outer L shaped plate is stacked on the outside of the interior L shaped plate and can with the interior L shaped plate
Dismantling connection；
The outer L shaped plate is connect with the laser supporting plate, is connected between the interior L shaped plate and the active plate by multiple tension springs
It connects, for adjusting the adjusting bolt of the active plate pitch angle, and the adjusting there are three settings in the interior L shaped plate
Bolt screws out one end of the interior L shaped plate and the active plate abuts against, and three adjusting bolts are triangularly arranged,
The laser is provided on the active plate.
9. three-dimensional shape measuring apparatus according to claim 1, which is characterized in that the XY linear motion device includes X-axis
Linear motion unit and Y-axis linear motion unit, the Z axis lifting device include Z axis linear motion unit；
The X-axis linear motion unit, the Y-axis linear motion unit and the Z axis linear motion unit include pedestal, institute
It states pedestal and is equipped with two parallel sliding rails, be slidably fitted with take-up housing on the sliding rail, be rotatably equipped with silk on the pedestal
Thick stick, and the lead screw is located at for driving the take-up housing to slide along the sliding rail between two sliding rails, on the pedestal
Equipped with for driving the driving motor of the lead screw rotation；
The pedestal of the Y-axis linear motion unit is horizontally arranged on the optical platform, the X-axis linear motion unit
The pedestal be fixedly connected with the take-up housing of the Y-axis linear motion unit, the sliding block of the X-axis linear motion unit
The sample placement unit is provided on seat；
The pedestal of the Z axis linear motion unit is vertically installed on the optical platform, the Z axis linear motion unit
The take-up housing be fixedly connected with the fixed plate.
10. three-dimensional shape measuring apparatus according to claim 1, which is characterized in that the horizontal adjustment platform include mounting plate,
Movable plate and regulating part are connected between the mounting plate and the movable plate by multiple tension springs, and one end of the regulating part acts against
On the movable plate, the other end of the regulating part is threadedly coupled with the mounting plate；The mounting plate and the XY straight line are transported
Dynamic device connects, and is provided with the X/Y axis piezoelectric ceramics on the movable plate.
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| CN110068300A (en) * | 2019-05-30 | 2019-07-30 | 山东中科普锐检测技术有限公司 | Self-adaptive limiting mechanism for transmission shaft of roughness meter |
| CN110837068A (en) * | 2019-11-25 | 2020-02-25 | 中北大学 | Device for maintaining constant uniform magnetic field locally and precisely adjusting direction strength |
| CN111370344A (en) * | 2020-03-03 | 2020-07-03 | 武汉大学 | Monitoring system for on-line monitoring semiconductor substrate etching process |
| CN111750986A (en) * | 2020-06-29 | 2020-10-09 | 苏州猎奇智能设备有限公司 | Light spot testing mechanism and testing method thereof |
| CN111998791A (en) * | 2020-08-14 | 2020-11-27 | 苏州领裕电子科技有限公司 | Laser measuring device and automatic measuring equipment using same |
| CN113049881A (en) * | 2021-04-09 | 2021-06-29 | 中国电子技术标准化研究院 | Extension resistance tester for epitaxial layer of integrated circuit |
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| CN111370344A (en) * | 2020-03-03 | 2020-07-03 | 武汉大学 | Monitoring system for on-line monitoring semiconductor substrate etching process |
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| CN111998791A (en) * | 2020-08-14 | 2020-11-27 | 苏州领裕电子科技有限公司 | Laser measuring device and automatic measuring equipment using same |
| CN113049881A (en) * | 2021-04-09 | 2021-06-29 | 中国电子技术标准化研究院 | Extension resistance tester for epitaxial layer of integrated circuit |
| CN116060329A (en) * | 2023-02-17 | 2023-05-05 | 苏州天准科技股份有限公司 | Electromagnetic valve detection equipment of automobile air shock absorber ware |
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| CN109813226B (en) | 2019-07-16 |
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