CN208887572U - A kind of detector for three-dimensional appearance - Google Patents
A kind of detector for three-dimensional appearance Download PDFInfo
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- CN208887572U CN208887572U CN201920507405.2U CN201920507405U CN208887572U CN 208887572 U CN208887572 U CN 208887572U CN 201920507405 U CN201920507405 U CN 201920507405U CN 208887572 U CN208887572 U CN 208887572U
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Abstract
The utility model discloses a kind of detector for three-dimensional appearance, including the position detection unit, laser generating unit and probe unit connecting with fixed plate；Probe unit includes piezoelectric ceramics supporting plate, Z axis piezoelectric ceramics and probe base；Probe base extends an extension tilted down from Z axis piezoelectric ceramics side, and extension one end is provided with cantilever probe；The laser that laser generating unit issues focuses on the back side of cantilever probe, and from the backside reflection to position detection unit of cantilever probe；Z axis piezoelectric ceramics is used to adjust the position of cantilever probe, and the flare for receiving position detection unit is moved to the center of position detection unit.It can be obtained three-dimensional appearance data with matchings uses such as XY linear motion device, Z axis lifting devices.The utility model structure is simple, at low cost convenient for being used cooperatively with other devices, and measurement accuracy is high.
Description
Technical field
The utility model belong to machine-building field of measuring technique more particularly to a kind of available Part Surface Roughness,
The detector for three-dimensional appearance of the surface characteristics information such as flatness.
Background technique
With modern precision processing and manufacturing development, required precision and quality requirement to piece surface are increasingly
Height, traditional two-dimensional measurement technology can no longer meet the market demand, and three-dimensional surface measurement can provide the complete of piece surface
Whole information, therefore the three dimensional topography of piece surface is measured be particularly important；Wherein three dimensional topography includes
Contour area, surface defect, surface abrasion and surface roughness etc..
Wherein, Part Surface Roughness refers to actual microcosmic morphology and ideal surface after part processing
Error between geometry；In actual processing, Part Surface Roughness to the assembling of part, leakproofness, noise, fatigue,
Abrasion etc. has larger impact, therefore it is an important feature for evaluating surface quality of workpieces.
Currently, there are many instrument for measuring part three-dimensional appearance, but structure is complicated for most measuring instruments, manufacturing cost
Height, and it is directed to the low measurement accuracy of Part Surface Roughness；Poor universality is had a single function, different roughness cannot be required
Parts product carries out particular detection.
Utility model content
In order to overcome above-mentioned the deficiencies in the prior art, the utility model provide a kind of structure it is simple, it is at low cost and
The high detector for three-dimensional appearance of measurement accuracy.
A kind of in order to solve the above technical problems, the technical scheme adopted by the utility model is: detector for three-dimensional appearance,
In fixed plate, the detector for three-dimensional appearance includes the position detection unit being set in the fixed plate, laser hair
Raw unit and probe unit；
The probe unit includes that the piezoelectric ceramics supporting plate, Z axis piezoelectric ceramics and probe from top to bottom set gradually is fixed
Seat, the piezoelectric ceramics supporting plate are connect with the fixed plate, and the probe base is set to the bottom of the Z axis piezoelectric ceramics
Portion, and the probe base extends an extension tilted down from Z axis piezoelectric ceramics side, the extension
One end is provided with cantilever probe；
The laser that the laser generating unit issues focuses on the back side of the cantilever probe, and from the cantilever probe
In backside reflection to the position detection unit；The Z axis piezoelectric ceramics is used to adjust the position of the cantilever probe, makes described
The flare that position detection unit receives is moved to the center of the position detection unit.
Preferably, the position detection unit includes the first connecting plate connecting with the fixed plate, first connection
It is provided with first angle adjustment platform on plate, position detector supporting plate, the position inspection are provided on the first angle adjustment platform
It surveys on device supporting plate and is provided with manual two-dimension adjustment platform, be provided with position detector on the manual two-dimension adjustment platform；
The laser generating unit includes the second connecting plate connecting with the fixed plate, is arranged on second connecting plate
There is second angle to adjust platform, is provided with laser supporting plate on the second angle adjustment platform, is provided on the laser supporting plate
Laser positions adjust platform, are provided with laser on the laser positions adjustment platform.
Preferably, the first angle adjustment platform and second angle adjustment platform include ontology and connect with the ontology
The adjustment block connect；The ontology disc-shaped structure is provided with handle on the ontology, and an end face of the ontology, which is provided with, to be used for
The rotary shaft being rotatablely connected with first connecting plate or second connecting plate；The adjustment block is equipped with arcuate guide hole,
One holding screw one end is pierced by the arcuate guide hole and is threadedly coupled with first connecting plate or second connecting plate, institute
The center of circle for stating arcuate guide hole is overlapped with the center of the rotary shaft.
Preferably, the position detector supporting plate is L-shaped, the bottom of the position detector supporting plate be equipped with for it is described
First angle adjusts the first mounting hole and the second mounting hole of platform connection, wherein second mounting hole is waist-shaped hole, institute's rheme
The side of detector supporting plate is set equipped with the third mounting hole for connecting with the manual two-dimension adjustment platform.
Preferably, the manual two-dimension adjustment platform includes the first slide unit module and the second slide unit module, first slide unit
Module and the second slide unit module are for making the relatively described position detector supporting plate of the position detector make two-dimensional adjustment
It is mobile；
The first slide unit module and the second slide unit module are dovetail slide unit structure；The dovetail slide unit structure packet
Mutually matched dovetail slide block and dovetail guide are included, the end of the dovetail guide is equipped with fixing seat, and the fixing seat is equipped with
For adjusting the adjusting screw of sliding stroke between the dovetail slide block and the dovetail guide, the adjusting screw and the swallow
Tail sliding block is threadedly engaged；
The dovetail guide is equipped with positioning plate, and the positioning plate is equipped with waist-shaped hole, the extending direction of the waist-shaped hole
It is consistent with the glide direction of the dovetail slide block, one end of a fastening screw pass through the waist-shaped hole and with the dovetail slide block spiral shell
Line connection；
The dovetail guide of the first slide unit module is fixedly connected with the position detector supporting plate, and described second is sliding
The dovetail guide of platform module is fixedly connected with the dovetail slide block of the first slide unit module, the second slide unit module
The dovetail slide block be fixedly connected with the position detector.
Preferably, the laser supporting plate be equipped with for the second angle the 4th mounting hole that connect of adjustment platform and
5th mounting hole, two the 6th mounting holes for being connect with laser positions adjustment platform；Wherein the 5th mounting hole,
Two the 6th mounting holes are waist-shaped hole, and the extension of the extending direction of the 5th mounting hole and the 6th mounting hole
Direction is vertical.
Preferably, the laser positions adjustment platform includes outer L shaped plate, interior L shaped plate and active plate；The outer L shape
Sheetpile is stacked in the outside of the interior L shaped plate and is detachably connected with the interior L shaped plate；
The outer L shaped plate is connect with the laser supporting plate, by multiple drawings between the interior L shaped plate and the active plate
Spring connects, for adjusting the adjusting bolt of the active plate pitch angle there are three settings in the interior L shaped plate, and it is described
Adjusting bolt screws out one end of the interior L shaped plate and the active plate abuts against, and three adjusting bolts are triangular in shape
It arranges, is provided with the laser on the active plate.
By using above-mentioned technical proposal, the beneficial effect that the utility model obtains is:
The detector for three-dimensional appearance of the utility model, when use, need to match conventional XY linear motion device and Z axis lifting
Device, XY linear motion device is for driving sample stage to move in a straight line in X/Y plane；The detector for three-dimensional appearance is main
Including the fixed plate for connecting with Z axis lifting device, position detection unit, laser generating unit and spy are provided in fixed plate
Survey unit；The laser that laser generating unit issues focuses on the back side of cantilever probe in probe unit, and from the back of cantilever probe
Face is reflected into position detection unit.Under the driving of Z axis lifting device, probe unit makes position detection close to sample surfaces
The flare that device receives falls in the center of position detector.Utilize the opposite position of flare in position detection unit
Set and the amount of exercise of cantilever probe obtain each measurement point Z-direction altitude information, the position coordinates of each measurement point (can borrow
Help XY linear motion device or obtain) and Z-direction altitude information one-to-one correspondence, it can be obtained three-dimensional appearance data, that is, obtain
Surface roughness.It may insure the continuity and accuracy of measurement using X/Y axis piezoelectric ceramics and horizontal adjustment platform.
Wherein, probe unit includes cantilever probe and Z axis piezoelectric ceramics, when Z axis lifting device driving probe unit is close
Sample surfaces, optical path change caused by being deflected by cantilever probe judge whether to contact, and adjust cantilever by Z axis piezoelectric ceramics
Probe location, the flare for receiving position detector fall in the center of position detector；In cantilever probe and sample
Under product contact condition, the out-of-flatness of sample surfaces makes the cantilever of cantilever probe deflect, and causes laser reflection light class in position
It changes on detector, feedback cantilever probe deflection is changed by facula position, while detecting sample surfaces roughness,
The center for being moved to position detector is fallen by the flare that Z axis piezoelectric ceramics receives position detector.At this time
The Z-direction altitude information of measurement point is relative position based on flare in position detection unit and z to piezo ceramic motion
Amount obtains.The use of Z axis piezoelectric ceramics further improves the precision of measurement, and being suitable for detection roughness Ra range is 0.008
The part of ~ 0.2um.
To sum up, the detector for three-dimensional appearance of the utility model, structure is simple, is easily installed use, at low cost, measurement essence
Degree is high and versatile.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of embodiment of the utility model detector for three-dimensional appearance；
Fig. 2 is the structural schematic diagram of the utility model detector for three-dimensional appearance another kind embodiment；
Fig. 3 is the structural schematic diagram of probe unit in Fig. 1；
Fig. 4 is the structural schematic diagram of position detection unit in Fig. 1；
Fig. 5 is the decomposition texture schematic diagram of Fig. 4；
Fig. 6 is the structural schematic diagram of first angle adjustment platform in Fig. 5；
Fig. 7 is the structural schematic diagram of manual two-dimension adjustment platform in Fig. 5；
Fig. 8 is the structural schematic diagram of laser generating unit in Fig. 6；
Fig. 9 is the decomposition texture schematic diagram of Fig. 8；
Figure 10 is the usage state diagram of the utility model detector for three-dimensional appearance；
In figure: 1- optical platform, 2-XY linear motion device, 3-Z axis lifting device, 4- sample placement unit, 41- are horizontal
Adjust platform, 42-X/Y axis piezoelectric ceramics, 43- sample stage, 5- detector for three-dimensional appearance, 51- fixed plate, 52- position testing unit
Member, the first connecting plate of 521-, 522- first angle adjust platform, 5221- ontology, 5222- adjustment block, 5223- handle, 5224- rotation
Shaft, 5225- arcuate guide hole, 5226- holding screw, 523- position detector supporting plate, the first mounting hole of 5231-, 5232-
Two mounting holes, 5233- third mounting hole, the manual two-dimension adjustment platform of 524-, 5241- the first slide unit module, 5242- the second slide unit mould
Block, 5243- dovetail slide block, 5244- dovetail guide, 5245- fixing seat, 5246- adjusting screw, 5247- positioning plate, 5248- waist
Type hole, 5249- fastening screw, 5250- dovetail slide block, 5251- dovetail guide, 525- position detector, 53- laser occur single
Member, the second connecting plate of 531-, 532- laser supporting plate, the 4th mounting hole of 5321-, the 5th mounting hole of 5322-, 5323- the 6th pacify
Fill hole, 533- laser positions adjust platform, the outer L shaped plate of 5331-, L shaped plate in 5332-, 5333- active plate, and 5334- is adjusted
Bolt, 5335- tension spring, 534- laser, 535- second angle adjustment platform, 54- probe unit, 541- piezoelectric ceramics supporting plate,
542-Z axis piezoelectric ceramics, 543- probe base, 544- extension, 545- cantilever probe, 55- contact pilotage fixed plate, 56- contact pilotage
Measuring instrument, 57- contact pilotage.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The embodiment of utility model is described in detail.
Embodiment one:
As shown in Figure 1, detector for three-dimensional appearance 5 is mounted on fixed plate 51, including the position being arranged in fixed plate 51
Detection unit 52, laser generating unit 53 and probe unit 54；The laser that laser generating unit 53 issues focuses on probe unit
The back side of cantilever probe 545 in 54, and on from the backside reflection of cantilever probe 545 to position detection unit 52, i.e. position at this time
Detection unit 52 is based in the reflection light of the generation of probe unit 54.
As shown in figure 3, in the present embodiment, probe unit 54 include the piezoelectric ceramics supporting plate 541 from top to bottom set gradually,
Z axis piezoelectric ceramics 542(resolution ratio 0.1nm) and probe base 543.Wherein piezoelectric ceramics supporting plate 541 is L-shaped, including vertical
Plate portion and horizontal plate part；The vertical plate portion of piezoelectric ceramics supporting plate 541 is connect with fixed plate 51, the level of piezoelectric ceramics supporting plate 541
Plate portion is fixedly connected with Z axis piezoelectric ceramics 542, and probe base 543 is set to the bottom of Z axis piezoelectric ceramics 542, and probe is solid
Reservation 543 extends the extension 544(that one tilts down from 542 side of Z axis piezoelectric ceramics convenient for making cantilever probe 545 and sample
Product contact), one end of extension 544 is provided with above-mentioned cantilever probe 545；Apply different driving electricity to Z axis piezoelectric ceramics 542
Pressure makes it export different vibratory outputs to adjust the position of cantilever probe 545, the flare for receiving position detection unit 52
The center for being moved to position detection unit 52 (ensures that flare remains at the centre bit of position detection unit 52
It sets).
As Fig. 4 to Fig. 7 jointly shown in, in the present embodiment, position detection unit 52 includes connecting with above-mentioned fixed plate 51
First connecting plate 521 is provided with first angle adjustment platform 522 on first connecting plate 521, is arranged on first angle adjustment platform 522
There is position detector supporting plate 523, manual two-dimension adjustment platform 524, manual two-dimension adjustment platform are provided on position detector supporting plate 523
Position detector 525 is provided on 524.
Wherein, first angle adjustment platform 522 includes ontology 5221 and the adjustment block 5222 connecting with 5221 lower end of ontology；This
The disc-shaped structure of body 5221, handle 5223 is provided on ontology 5221, and an end face of ontology 5221 is provided with for connecting with first
The rotary shaft 5224 that fishplate bar 521 is rotatablely connected；Adjustment block 5222 is equipped with arcuate guide hole 5225,5226 one end of a holding screw
It is pierced by arcuate guide hole 5225 and is threadedly coupled with the first connecting plate 521, the center of circle in arcuate guide hole 5225 and rotary shaft 5224
Center be overlapped.Holding screw 5226, control handle 5223 are loosened, ontology 5221 is rotated around the central axis of rotary shaft 5224,
Relative motion occurs for arcuate guide hole 5225 and holding screw 5226 simultaneously, then fastens holding screw 5226, completes angle
Adjustment.
Wherein, position detector supporting plate 523 is L-shaped, and the bottom of position detector supporting plate 523, which is equipped with, to be used for and first angle
The first mounting hole 5231 and the second mounting hole 5232 of 522 ontology 5221 of platform connection are adjusted, for the ease of installation, wherein the second peace
Dress hole 5232 is designed as waist-shaped hole, and the side of position detector supporting plate 523 is equipped with for connecting with manual two-dimension adjustment platform 524
Third mounting hole 5233.
Wherein, manual two-dimension adjustment platform 524 includes the first slide unit module 5241 and the second slide unit module 5242, the first slide unit
Module 5241 and the second slide unit module 5242 are dovetail slide unit structure.It is sliding to dovetail by taking the second slide unit module 5242 as an example below
Platform structure is described in detail.Second slide unit module 5242 includes mutually matched dovetail slide block 5243 and dovetail guide 5244,
The end of dovetail guide 5244 is equipped with fixing seat 5245, in fixing seat 5245 rotation be provided with for adjust dovetail slide block 5243 with
The adjusting screw 5246 of sliding stroke, adjusting screw 5246 are threadedly engaged with dovetail slide block 5243 between dovetail guide 5244；Swallow
The cavity for accommodating adjusting screw 5246 is equipped with inside tail guide rail 5244, adjusting screw 5246 stretches out one end setting of fixing seat 5245
There is the knob convenient for operation；In the present embodiment the bottom of dovetail slide block 5243 be equipped with interconnecting piece, adjusting screw 5246 really with
Interconnecting piece is threadedly engaged connection.
One side of dovetail guide 5244 is equipped with positioning plate 5247, and positioning plate 5247 is equipped with waist-shaped hole 5248, waist-shaped hole
5248 extending direction is consistent with the glide direction of dovetail slide block 5243, and one end of a fastening screw 5249 passes through waist-shaped hole 5248
And it is threadedly coupled with dovetail slide block 5243.
The dovetail guide 5251 of first slide unit module 5241 is fixedly connected with position detector supporting plate 523, the second slide unit mould
The dovetail guide 5244 of block 5242 is fixedly connected with the dovetail slide block 5250 of the first slide unit module 5241, the second slide unit module 5242
Dovetail slide block 5243 be fixedly connected with position detector 525.First slide unit module 5241 and the second slide unit module 5242 are used for
525 relative position detector supporting plate 523 of position detector is set to make two-dimensional adjustment movement.
As Fig. 8 and Fig. 9 jointly shown in, laser generating unit 53 includes the second connecting plate connecting with above-mentioned fixed plate 51
531, it is provided with second angle adjustment platform 535(on the second connecting plate 531, elaboration is had been carried out to its structure above, herein not
Repeat), second angle adjusts and is provided with laser supporting plate 532 on platform 535, and laser position is provided on laser supporting plate 532
Adjustment platform 533 is set, is provided with laser 534 on laser positions adjustment platform 533；The laser that laser 534 issues focuses on outstanding
The back side of arm probe 545, and on from the backside reflection of cantilever probe 545 to position detector 525.
Wherein, laser supporting plate 532 be equipped with for second angle the 4th mounting hole 5321 that connect of adjustment platform 535 and
5th mounting hole 5322, two is used for the 6th mounting hole 5323 connecting with laser positions adjustment platform 533；Wherein the 5th installation
The 6th mounting hole 5323 of 5322, two, hole is waist-shaped hole, and the extending direction and the 6th mounting hole of the 5th mounting hole 5322
5323 extending direction is vertical.
It includes outer L shaped plate 5331, interior L shaped plate 5332 and active plate 5333 that laser positions, which adjust platform 533,；Outer L shape
Plate 5331 is stacked on the outside of interior L shaped plate 5332 and is detachably connected with interior L shaped plate 5332.Outer L shaped plate 5331 and laser branch
Plate 532 connects, and is connected between interior L shaped plate 5332 and active plate 5333 by multiple tension springs 5335, is provided in interior L shaped plate 5332
Three are used to adjust the adjusting bolt 5334 of 5333 pitch angle of active plate, and adjust bolt 5334 and screw out interior L shaped plate
5332 one end is abutted against with active plate 5333, and three adjusting bolts 5334 are triangularly arranged, on active plate 5333
It is provided with laser 534.
As shown in Figure 10, XY linear motion device 2 and Z axis liter need to be matched when the use of the present embodiment detector for three-dimensional appearance
Falling unit 3.XY linear motion device 2 and Z axis lifting device 3 are arranged on optical platform 1；XY linear motion device 2 includes X
Axis linear motion unit and Y-axis linear motion unit, Z axis lifting device 3 include Z axis linear motion unit.X-axis linear motion is single
Member, Y-axis linear motion unit are identical with the structure of Z axis linear motion unit, include pedestal, pedestal be equipped with two it is parallel
Sliding rail is slidably fitted with take-up housing on sliding rail, lead screw is rotatably equipped on pedestal, and lead screw is located between two sliding rails for driving
Movable slider seat is slided along sliding rail；Wherein, take-up housing bottom is equipped with the link block being cooperatively connected with threads of lead screw, which is in spiral shell
Female shape；Pedestal is equipped with the driving motor for driving lead screw to rotate simultaneously.
Wherein: the pedestal of Y-axis linear motion unit is horizontally arranged on optical platform, the pedestal of X-axis linear motion unit
It is fixedly connected with the take-up housing of Y-axis linear motion unit, sample placement unit is provided on the take-up housing of X-axis linear motion unit
4；The pedestal of Z axis linear motion unit is vertically installed on optical platform 1, the take-up housing and fixed plate of Z axis linear motion unit
51 are fixedly connected.
Wherein: sample placement unit 4 includes horizontal adjustment platform 41, the X/Y axis piezoelectric ceramics 42 set gradually from the bottom to top
(resolution ratio 5nm) and sample stage 43, wherein horizontal adjustment platform 41 is fixedly connected with the take-up housing of X-axis linear motion unit.
The present embodiment detector for three-dimensional appearance 5 matches XY linear motion device 2, Z axis lifting device 3 and sample and places list
After member 4, it is suitable for detecting the part that roughness Ra range is 0.008 ~ 0.2um；Part three is obtained to using the present embodiment below
The course of work of dimension shape characteristic is described in detail:
S0, by XY linear motion device 2, Z axis lifting device 3, X/Y axis piezoelectric ceramics 42, position detector 525, laser
(host computer, display screen, outside control power supply, servo-system etc., herein with control system for device 534 and Z axis piezoelectric ceramics 542
Not as the innovative point of the application, only briefly describe herein) electrical connection.
S1, sample is placed on sample stage 43, the levelness of sample is adjusted by horizontal adjustment platform 41, and be manually operated the
One angle adjusts platform 522, second angle adjustment platform 535 and manual two-dimension adjustment platform 524 and laser position adjusts platform 533, makes
The laser that laser 534 issues focuses on the back side of cantilever probe 545, and from 545 backside reflection of cantilever probe to position detection
On device 525, that is to say, position detector 525 is based in the reflection light of the generation of cantilever probe 545 at this time；Control Z axis liter
Falling unit 3 drives probe unit 54 close to sample surfaces, when close to sample surfaces, caused by being deflected by cantilever probe 545
Optical path change judges whether to contact with sample, and by applying different voltages to Z axis piezoelectric ceramics 542, to adjust cantilever probe
545 positions, so that the flare that position detector 525 receives falls the center for being moved to position detector 525.
S2, start to measure, start the triangle wave voltage for applying control Y direction vibration, sample to X/Y axis piezoelectric ceramics 42
It is moved along Y-axis, the out-of-flatness of sample surfaces makes the cantilever of cantilever probe 545 deflect, and causes flare in position detection
Change in location on device 525；The deflection of change in location feedback cantilever probe 545 based on flare, when flare is mobile
When (such as away from edge 10%) to distance and position detector photosensitive sites edge certain distance, apply electricity to Z axis piezoelectric ceramics 542
Pressure, the vibration that Z axis piezoelectric ceramics 542 exports keep flare mobile to the center of position detector 525.
S3, the relative position for recording the flare that each measurement point generates on position detector 525 and Z axis piezoelectricity
Ceramic 542 amounts of exercise substitute into the Z-direction height that correlation function obtains corresponding measurement point.
S4, after completing Y direction one-shot measurement, start applying the vibration of control X-direction just to X/Y axis piezoelectric ceramics 42
String wave voltage, sample stop after motor unit distance in X-axis, start to apply control Y-axis side again to X/Y axis piezoelectric ceramics 42
To the triangle wave voltage of vibration.After the X-axis scanning distance for completing setting, image mosaic and other operations are carried out to data are obtained
It handles (relatively conventional technological means, this will not be repeated here)；The position coordinates and Z-direction altitude information of each measurement point are one by one
It is mapped, can be obtained three-dimensional appearance data, that is, obtain Part Surface Roughness.
X/Y axis piezoelectric ceramics 42 is integrated by the piezoelectric ceramics of the vibration of exportable X-direction and Y direction vibration；Piezoelectricity pottery
Porcelain need to connect external control power supply and electric energy is turned to mechanical energy using the inverse piezoelectric effect of piezoelectric ceramics, pass through outside control electricity
Source applies different voltages to piezoelectric ceramics, makes piezoelectric ceramics work in device resonant frequency point, and then generates stable vibration output,
To control micro-displacement of the sample in X-axis/Y-axis.
Z axis piezoelectric ceramics 542 improves the measurement accuracy of detector for three-dimensional appearance 5；X/Y axis piezoelectricity pottery is matched simultaneously
Porcelain 42, further improves measurement accuracy.
Embodiment two:
As shown in Fig. 2, detector for three-dimensional appearance 5 includes the contact pilotage fixed plate connecting with fixed plate 51 in the present embodiment
55 and the contact pilotage measuring instrument 56 that is set in contact pilotage fixed plate 55, contact pilotage measuring instrument 56 includes externally visible contact pilotage 57, internal
Equipped with the sensor lever being connected with contact pilotage 57 and the inductive displacement transducer being connect with sensor lever.
The present embodiment detector for three-dimensional appearance 5 matches XY linear motion device 2, Z axis lifting device 3 and sample and places list
After member 4, it is suitable for detecting the part that roughness Ra range is 0.2 ~ 10um；Part three-dimensional shaped is obtained to using the present embodiment below
The course of work of looks feature is described in detail:
A0, by XY linear motion device 2, Z axis lifting device 3, X/Y axis piezoelectric ceramics 42, contact pilotage measuring instrument 56 with control
(host computer, display screen, outside control power supply, servo-system etc. to system processed, herein not as the innovative point of the application, herein only
Briefly describe) electrical connection.
A1, sample is placed on sample stage 43, the levelness of sample, control Z axis lifting is adjusted by horizontal adjustment platform 41
Device 3 drive contact pilotage measuring instrument 56 close to sample surfaces, and make sensor lever be in equilbrium position (contact pilotage measuring instrument 56 oneself
Body feedback).
A2, start to measure, start the triangle wave voltage for applying control Y direction vibration, sample to X/Y axis piezoelectric ceramics 42
It being moved along Y-axis, the out-of-flatness of sample surfaces makes 57 height of contact pilotage change, after sensor lever ratio enlargement, sensing
(magnetic core changes position the inductive displacement transducer of device lever rear end connection in difference coil, and magnetic core evolution is led
Cause two coil inductance imbalances of difference coil) differential signal is formed, target voltage signal is obtained after treatment.
A3, the target voltage signal for recording each measurement point substitute into the Z-direction height that correlation function obtains corresponding measurement point.
A4, after completing Y direction one-shot measurement, start applying the vibration of control X-direction just to X/Y axis piezoelectric ceramics 42
String wave voltage, sample stop after motor unit distance in X-axis, start to apply control Y-axis side again to X/Y axis piezoelectric ceramics 42
To the triangle wave voltage of vibration.After the X-axis scanning distance for completing setting, image mosaic and other operations are carried out to data are obtained
Processing；The position coordinates and Z-direction altitude information of each measurement point correspond, and can be obtained three-dimensional appearance data, i.e.,
Obtain Part Surface Roughness.
It is also possible to which the detector for three-dimensional appearance 5 in embodiment one and embodiment two is mounted on fixed plate simultaneously
On 51, replacement when using can avoid.
To sum up, the utility model detector for three-dimensional appearance 5 is easily installed, and is convenient for and general XY linear motion device 2, Z
Axis lifting device 3 and the matching of sample placement unit 4 use, and structure is simple, and at low cost, measurement accuracy is high；Two of them structure knot
It closes in use, versatility can be improved for the parts product progress particular detection that different roughness requires.
The specific embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the utility model is not
Be limited to above embodiment, technical field those of ordinary skill within the scope of knowledge, can also not depart from
Various changes can be made under the premise of the utility model aims.
Claims (7)
1. a kind of detector for three-dimensional appearance, is mounted in fixed plate, which is characterized in that the detector for three-dimensional appearance includes
Position detection unit, laser generating unit and the probe unit being set in the fixed plate；
The probe unit includes the piezoelectric ceramics supporting plate, Z axis piezoelectric ceramics and probe base from top to bottom set gradually, institute
It states piezoelectric ceramics supporting plate to connect with the fixed plate, the probe base is set to the bottom of the Z axis piezoelectric ceramics, and institute
It states probe base and extends an extension tilted down from Z axis piezoelectric ceramics side, one end of the extension is set
It is equipped with cantilever probe；
The laser that the laser generating unit issues focuses on the back side of the cantilever probe, and from the back side of the cantilever probe
It is reflected into the position detection unit；The Z axis piezoelectric ceramics is used to adjust the position of the cantilever probe, makes the position
The flare that detection unit receives is moved to the center of the position detection unit.
2. detector for three-dimensional appearance according to claim 1, which is characterized in that the position detection unit includes and institute
The first connecting plate of fixed plate connection is stated, first angle adjustment platform, the first angle tune are provided on first connecting plate
It is provided with position detector supporting plate on whole platform, manual two-dimension adjustment platform is provided on the position detector supporting plate, it is described manual
Position detector is provided on two-dimension adjustment platform；
The laser generating unit includes the second connecting plate connecting with the fixed plate, and is provided on second connecting plate
Two angles adjust platform, are provided with laser supporting plate on the second angle adjustment platform, are provided with laser on the laser supporting plate
Device position adjusts platform, is provided with laser on the laser positions adjustment platform.
3. detector for three-dimensional appearance according to claim 2, which is characterized in that first angle adjustment platform and described
Second angle adjusts the adjustment block that platform includes ontology and connect with the ontology；The disc-shaped structure of ontology, the ontology
On be provided with handle, an end face of the ontology is provided with for connecting with first connecting plate or second connecting plate rotation
The rotary shaft connect；The adjustment block be equipped with arcuate guide hole, a holding screw one end be pierced by the arcuate guide hole and with institute
It states the first connecting plate or second connecting plate is threadedly coupled, the center of circle in the arcuate guide hole and the center weight of the rotary shaft
It closes.
4. detector for three-dimensional appearance according to claim 2, which is characterized in that the position detector supporting plate is L-shaped,
The bottom of the position detector supporting plate is equipped with the first mounting hole and the second peace for connecting with first angle adjustment platform
Hole is filled, wherein second mounting hole is waist-shaped hole, the side of the position detector supporting plate is equipped with for described manual two
The third mounting hole of dimension adjustment platform connection.
5. detector for three-dimensional appearance according to claim 2, which is characterized in that the manual two-dimension adjustment platform includes the
One slide unit module and the second slide unit module, the first slide unit module and the second slide unit module are for making the position detection
Device makees two-dimensional adjustment movement relative to the position detector supporting plate；
The first slide unit module and the second slide unit module are dovetail slide unit structure；The dovetail slide unit structure includes phase
The dovetail slide block and dovetail guide mutually cooperated, the end of the dovetail guide are equipped with fixing seat, and the fixing seat is equipped with and is used for
The adjusting screw of sliding stroke between the dovetail slide block and the dovetail guide is adjusted, the adjusting screw and the dovetail are sliding
Block is threadedly engaged；
The dovetail guide is equipped with positioning plate, and the positioning plate is equipped with waist-shaped hole, the extending direction of the waist-shaped hole and institute
The glide direction for stating dovetail slide block is consistent, and one end of a fastening screw passes through the waist-shaped hole and connects with the dovetail slide block screw thread
It connects；
The dovetail guide of the first slide unit module is fixedly connected with the position detector supporting plate, the second slide unit mould
The dovetail guide of block is fixedly connected with the dovetail slide block of the first slide unit module, the institute of the second slide unit module
Dovetail slide block is stated to be fixedly connected with the position detector.
6. detector for three-dimensional appearance according to claim 2, which is characterized in that the laser supporting plate is equipped with and is used for
It is used for the second angle the 4th mounting hole that connect of adjustment platform and the 5th mounting hole, two and laser positions adjustment
6th mounting hole of platform connection；Wherein the 5th mounting hole, two the 6th mounting holes are waist-shaped hole, and the described 5th
The extending direction of mounting hole is vertical with the extending direction of the 6th mounting hole.
7. detector for three-dimensional appearance according to claim 2, which is characterized in that the laser positions adjust platform and include
Outer L shaped plate, interior L shaped plate and active plate；The outer L shaped plate be stacked on the outside of the interior L shaped plate and with the interior L shaped plate
It is detachably connected；
The outer L shaped plate is connect with the laser supporting plate, is connected between the interior L shaped plate and the active plate by multiple tension springs
It connects, for adjusting the adjusting bolt of the active plate pitch angle, and the adjusting there are three settings in the interior L shaped plate
Bolt screws out one end of the interior L shaped plate and the active plate abuts against, and three adjusting bolts are triangularly arranged,
The laser is provided on the active plate.
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| CN201920507405.2U CN208887572U (en) | 2019-04-16 | 2019-04-16 | A kind of detector for three-dimensional appearance |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116060329A (en) * | 2023-02-17 | 2023-05-05 | 苏州天准科技股份有限公司 | Electromagnetic valve detection equipment of automobile air shock absorber ware |
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2019
- 2019-04-16 CN CN201920507405.2U patent/CN208887572U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116060329A (en) * | 2023-02-17 | 2023-05-05 | 苏州天准科技股份有限公司 | Electromagnetic valve detection equipment of automobile air shock absorber ware |
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Denomination of utility model: A three-dimensional shape detection device Effective date of registration: 20220518 Granted publication date: 20190521 Pledgee: Bank of Weifang Limited by Share Ltd. Dongming branch Pledgor: SHANDONG IPRE DETECTION TECHNOLOGY CO.,LTD. Registration number: Y2022980005849 |
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Date of cancellation: 20230531 Granted publication date: 20190521 Pledgee: Bank of Weifang Limited by Share Ltd. Dongming branch Pledgor: SHANDONG IPRE DETECTION TECHNOLOGY CO.,LTD. Registration number: Y2022980005849 |