CN107144228A - Miniature slipper bearing measuring lubricating oil film inclination-angle regulating device and its adjusting method - Google Patents
Miniature slipper bearing measuring lubricating oil film inclination-angle regulating device and its adjusting method Download PDFInfo
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- CN107144228A CN107144228A CN201710350683.7A CN201710350683A CN107144228A CN 107144228 A CN107144228 A CN 107144228A CN 201710350683 A CN201710350683 A CN 201710350683A CN 107144228 A CN107144228 A CN 107144228A
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- glass plate
- bearing
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- sliding block
- inclination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
Abstract
The invention discloses a kind of miniature slipper bearing measuring lubricating oil film inclination-angle regulating device and its adjusting method, leveling is carried out to glass plate using holding screw, miniature sliding block is contacted with glass plate, synchronous pulley drives glass disc spins, judges whether two contact surfaces are substantially parallel by whether there is interference fringe in the contact zone optical imagery that shows over the display.Operating voltage according to needed for demarcating in advance in each piezoelectric actuator under the conditions of specific inclination angle carries out fast setting to drive power supply for piezoelectric ceramics, and then glass plate is deflected under piezoelectric actuator effect, thus quickly obtain required contact inclination angle.Inclination angle size and the regulation efficiency and precision in direction are greatly improved.
Description
Technical field
The invention belongs to the experiment field of measuring technique of low secondary contact fluid lubrication oil film, it is related to a kind of miniature slipper bearing
Measuring lubricating oil film inclination-angle regulating device and its adjusting method.
Background technology
In industrial application, film lubrication is an extremely important research contents.This lubricating system be by
Separate oil film in being formed between two friction surfaces, to reduce surface abrasion.The experimental study of lubricating oil film is mainly in rubbing
Wipe the oil film thickness and shape between pair.According to contact mechanics feature, the contact condition of two friction surfaces in film lubrication can
To be divided into higher pair contact (point contact, linear contact lay) and low secondary contact (face contact).In higher pair contact, to oil film thickness and its shape
The measuring method of shape has had a lot, such as capacitance method, optical interferometry etc..In low secondary contact, friction pair typically has two kinds of shapes
Formula, a kind of is the bush(ing) bearing that axle journal and axle sleeve coordinate, and another is the slipper bearing of two plane contacts.Wherein, footpath
Contact most commonly seen in oil film thickness measuring system in face to the oil film thickness measurement of sliding bearing, for example fiber optics displacement is passed
Sensor method, ultrasonic resonance method etc., there is the indirect method of measurement axle sleeve or diameter of axle displacement in addition.In addition, considerable based on stream
The basic theory of body oil film thickness is carried out by mathematical modeling of the slipper bearing of plane contact.The inclination angle of two interplanars
As one of theoretical basic parameter of research, Basic Experiment Study requirement inclination angle in test process corresponding to it will be used as one
Individual invariant.
There is certain office in the tiny inclination angle regulation of interplanar in existing plane slipper bearing oil film thickness measuring system
It is sex-limited：(1) the flexible multiple degrees of freedom bindiny mechanism used causes the mechanism lower end sliding block free degree to be restricted for crosshead；(2)
Adjustment disk is adjusted using one group of uniform screw rod manually, process is cumbersome, repeatability it is poor, and due to change be system elasticity
Deflection, causing inclination angle easily to be beated by elastic deformation amount is influenceed；(3) glass plate upper and lower surface can not be very using rubber blanket
The bounce and swing of bearing arrangement are balanced well.
The content of the invention
In order to achieve the above object, the present invention provides a kind of miniature slipper bearing measuring lubricating oil film inclination-angle regulating device,
The inclination angle between miniature sliding block working face and clear optical glass disk, and the tune in inclination angle size and direction can easily be determined
Section efficiency and precision are greatly improved.
It is a further object of the present invention to provide a kind of miniature slipper bearing measuring lubricating oil film tilt adjustment method.
The technical solution adopted in the present invention is, miniature slipper bearing measuring lubricating oil film inclination-angle regulating device, including double
The frame of layer and the micro-interference measuring unit being arranged in frame, glass plate revolution adjustment unit, miniature sliding block are fixed and adjusted
Unit and loading unit are saved, the frame is used to supporting and fixing all parts；The glass plate revolution adjustment unit is arranged on
Frame upper surface, glass plate revolution adjustment unit includes bearing, and the surfaces externally and internally of bearing sets bearing inner sleeve, outside bearing respectively
Uniform 6 pieces of piezoelectric actuators are used for entering whole unit in horizontal deflection regulation, bearing inner sleeve at set, the outer convex shoulder of bearing outside
Disc spring is placed at convex shoulder, disc spring sets gradually glass plate and glass plate platen upwards, and glass plate platen is located at circumference on glass plate
Face, the uniform disc spring of glass plate lower edges；Holding screw be arranged in glass plate platen be used to glass plate pre-fix and
Preliminary leveling；Synchronous pulley is connected to drive glass plate to rotate by bearing with glass plate；The micro-interference measuring unit
It is arranged on frame bottom and positioned at the lower section of glass plate；The miniature sliding block secured adjusted unit is arranged on above glass plate, institute
Stating miniature sliding block secured adjusted unit includes take-up housing, and miniature sliding block is fixed in take-up housing bottom, and miniature slider bottom and both sides are equal
Protection pad is set, fixed between miniature sliding block and protection pad by screw；The top of take-up housing sets flexible how free
Bindiny mechanism is spent, flexible multiple degrees of freedom bindiny mechanism top is connected with pressing plate lower end；The loading unit includes pressing plate, pressing plate
One end is fixed in the middle part of the bearing block upper bearing (metal) connection of plate bearing, pressing plate and is vertically arranged with balanced controls, balanced controls
Side is provided with spring, and spring is located between plate bearing and pressing plate；The plate bearing is connected to frame upper surface and is in
On axis.
Further, the bearing upper end is provided with bearing gland.
Further, it is provided with pad between glass plate and the glass plate platen.
Further, the piezoelectric actuator upper and lower surface is provided with actuator pad.
Further, by 6 fixing bolts at convex shoulder outside bearing outside, bearing outside is connected to frame upper surface
And on axis.
Further, the flexible multiple degrees of freedom bindiny mechanism is ball bearing connecting rod.
Further, the micro-interference measuring unit include support, it is accurate translation stage, coaxial optical illumination microscope, aobvious
Pass through microscope sleeve fixing coaxial illumination on fixed precision translation stage, accurate translation stage on micro mirror sleeve and CCD, the support
Obvious micro mirror, CCD is arranged on the microscopical lower section of coaxial optical illumination, and cause coaxial optical illumination microscope just to miniature sliding block with
The contact zone of glass plate；The accurate translation stage is provided with three and mutually closed assembly.
Another technical scheme of the present invention is, a kind of miniature slipper bearing measuring lubricating oil film inclination-angle regulating device
Adjusting method, follow the steps below：
Step 1, the regulation of miniature sliding block static tilt angles
Leveling is carried out to glass plate using holding screw, miniature sliding block makes its lower surface and glass plate under micro force
Upper surface, ball bearing connecting rod makes miniature sliding block realize parallel surface contact state automatically with glass plate, is connected by ball bearing
Screw on extension bar fixes take-up housing present position, while returned by the inverse piezoelectric effect of piezoelectric actuator to glass plate
Turn adjustment unit and carry out nano level deflection regulation, can be observed in the micro-interference measuring unit below glass plate
The interference fringe that two planes are formed, the number of fringe number reflects the size at two interplanar inclination angles；
Step 2, the regulation of miniature sliding block dynamic inclination stability
When synchronous pulley drives glass plate to be rotated with predetermined angular speed, pass through the contact zone optics shown over the display
Whether occur interference fringe in image to judge whether two contact surfaces are substantially parallel, observe the variation of contact zone striped, if hair
Changing then illustrates that bearing produces bounce and swung in rotation process, now answers the holding screw on rotating glass dish platen
Apply pretightning force, lift the running accuracy of bearing, contact zone fringe number is kept stable in glass plate rotation process, Jin Erda
To the accurate adjustment at inclination angle；
Step 3, in experimentation inclination angle setting
After two surfaces are substantially parallel, according to needed for demarcating each piezoelectric actuator under the conditions of specific inclination angle in advance
Operating voltage come to drive power supply for piezoelectric ceramics carry out fast setting, and then make glass plate piezoelectric actuator effect under
Deflect, thus quickly obtain required contact inclination angle；Change experiment parameter sometimes for angle of dynamical inclination is become, can pass through
Driving power supply resets the operating voltage of piezoelectric actuator so that the displacement of piezoelectric actuator changes
Become, thus inclination angle reset；
Step 4,
Choose in interference fringe close to exit a bit, record its light intensity value in stopping process and preserve,
Minimum oil film thickness is can obtain by calculating.
The beneficial effects of the invention are as follows：
1. flexible multiple degrees of freedom bindiny mechanism is ball bearing connecting rod, compared with crosshead, can have lower end sliding block
More frees degree so that take-up housing regulation has more flexibility, is readily obtained initial tilt.
2. transparent disc upper and lower surface is using disc spring as flexible member, compared with rubber blanket, deflection scope is wider, energy
Bounce and swing of the bearing arrangement in operation process is enough better balanced so that inclination angle is more stable in a dynamic condition.
3. in the present invention using fixed slide position in advance, then by piezoelectric actuator to whole turning unit
Enter horizontal deflection to adjust and then realize tilt adjustment.And transparent disc position is fixed with conventional, realized by adjusting slider position
The mode of tilt adjustment is compared, and new method has higher precision, and easier.As long as each under the good specific inclination angle of demarcation in advance
Voltage value needed for individual piezoelectric actuator, can directly realize that the quick of inclination angle sets by applying particular voltage level
Put, you can realize the quick regulation at inclination angle, while inclined plane both sides difference in height degree of regulation is 0.1 micron.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the stereogram of the miniature slipper bearing measuring lubricating oil film inclination-angle regulating device of the embodiment of the present invention.
Fig. 2 is the miniature sliding block of the embodiment of the present invention and glass plate contact portion stereogram.
Fig. 3 is Fig. 2 main sectional view.
Fig. 4 is the stereogram of the miniature sliding block secured adjusted unit of the embodiment of the present invention.
Fig. 5 is the structural representation that glass plate of the embodiment of the present invention turns round adjustment unit.
Fig. 6 is glass plate of embodiment of the present invention revolution adjustment unit deflection regulation schematic diagram.
Fig. 7 is the miniature sliding block tilt adjustment schematic diagram of the embodiment of the present invention.
Fig. 8 is the interference pattern for the different angle that regulation of the embodiment of the present invention is obtained.
Fig. 9 is micro-interference measuring unit structure chart of the embodiment of the present invention.
Figure 10 is the structural representation at balanced controls of the embodiment of the present invention.
In figure, 1. miniature sliding block secured adjusted units, 101. take-up housings, 102. ball bearing connecting rods, 103. miniature sliding blocks,
104. pad is protected, 105. screws, 2. glass plates revolution adjustment unit, 201. glass plates, 202. holding screws, 203. glass plates
Platen, 204. pads, 205. disc springs, 206. bearing outsides, 207. bearings, 208. synchronous pulleys, 209. bearing inner sleeves, 210. axles
Pressure cap, 211. piezoelectric actuators, 212. actuator pads, 213. fixing bolts, 3. micro-interference measuring units, 301.
Support, 302. accurate translation stages, 303. coaxial optical illumination microscopes, 304. microscope sleeves, 305.CCD, 4. loading units,
401. pressing plates, 402. plate bearings, 403. balanced controls, 404. bearing blocks, 405. springs, 5. frames；211-1 to 211-6 points
Wei not the first piezoelectric actuator to the 6th piezoelectric actuator；211-1 ' to 211-6 ' is the first piezoelectric actuator
The change of contact zone interference fringe during output displacement increase respective to the 6th piezoelectric actuator.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Miniature slipper bearing measuring lubricating oil film inclination-angle regulating device, structure as shown in figure 1, including double-deck frame 5 with
And it is arranged on micro-interference measuring unit 3 in frame 5, glass plate revolution adjustment unit 2, miniature sliding block secured adjusted unit 1
With loading unit 4.Frame 5 is used to supporting and fixing all parts.
Glass plate revolution adjustment unit 2 is arranged on the upper surface of frame 5, glass plate revolution adjustment unit 2 be used for it is fixed and
Optically transparent glass plate 201 is adjusted while rotating it, as shown in Fig. 2,3,5, in the upper and lower surface of glass plate 201 with elasticity
Element-disc spring 205 is used as buffer unit；Imitate to return whole glass plate using the inverse piezoelectricity of piezoelectric actuator 211 simultaneously
Turn adjustment unit 2 and carry out minimum deflection regulation.Specifically, glass plate revolution adjustment unit 2 is by glass plate 201, tightening
Screw 202, glass plate platen 203, pad 204, disc spring 205, bearing outside 206, bearing 207, synchronous pulley 208, in bearing
Set 209, bearing gland 210, piezoelectric actuator 211 and actuator pad 212 are constituted.Wherein, the surfaces externally and internally of bearing 207
Bearing inner sleeve 209, bearing outside 206 are set respectively, and the upper end of bearing 207 is provided with bearing gland 210；Positioned at bearing outside 206
6 pieces of piezoelectric actuators 211 at outer convex shoulder are used to enter whole unit horizontal deflection regulation, and then reach that accurate adjustment is inclined
The purpose at angle.Disc spring 205 is placed at the internal shoulder of bearing inner sleeve 209, then to above setting gradually glass plate 201, pad 204 and glass
Glass disk platen 203, glass plate platen 203 is located at periphery on glass plate 201；Holding screw 202 is arranged on glass plate platen 203
It is interior glass plate 201 to be pre-fixed and preliminary leveling.Synchronous pulley 208 drives glass plate 201 to rotate by bearing 207, glass
The lower edges of glass disk 201 offset bounce and swing of the bearing arrangement in operation process by uniform disc spring 205.Glass plate pressure
Disk 203 coordinates holding screw 202 to carry out leveling to glass plate 201.As shown in fig. 6, between bearing outside 206 and frame 5
The upper and lower surface of piezoelectric actuator 211 is provided with actuator pad 212.Piezoelectric actuator 211 and Piezoelectric Ceramic
Power supply is connected.
Micro-interference measuring unit 3, as shown in figure 9, being arranged on the bottom of frame 5 and positioned at the lower section of glass plate 201, is used for
Measurement and the thickness and shape of display lubricating oil film.Specifically include support 301, accurate translation stage 302, coaxial optical illumination to show
Micro mirror 303, microscope sleeve 304 and CCD305,
Miniature sliding block secured adjusted unit 1 is connected to the pressing plate 401 in loading unit 4 by ball bearing connecting rod 102
Underface；Loading unit 4 is connected to the upper surface of frame 5 and on axis by plate bearing 402；Glass plate revolution is adjusted
Whole unit 2 is connected to the upper surface of frame 5 and in axis by 6 fixing bolts 213 at the outer convex shoulder of bearing outside 206
On, pass through the decrement of spring in adjustment mechanism 403 so that the miniature sliding block secured adjusted list positioned at the lower section of pressing plate 401
Miniature sliding block 103 in member 1 is in gentle touchdown state with the glass plate 201 that glass plate is turned round on adjustment unit 2；Micro-interference
Measuring unit 3, including accurate translation stage 302, coaxial optical illumination microscope 303, microscope sleeve 304, CCD305, micro-interference
Measuring unit 3 is arranged on the underlying surfaces of frame 5 by support 301, and causes coaxial optical illumination microscope 303 just to miniature cunning
The contact zone of block 103 and glass plate 201.Specifically, on support 301 on fixed precision translation stage 302, accurate translation stage 302
By the fixing coaxial optical illumination microscope 303 of microscope sleeve 304, CCD305 is arranged under coaxial optical illumination microscope 303
Side.
The course of work of micro-interference measuring unit 3 is that laser passes through the coaxial upper end of optical illumination microscope 303 and barrelshift
Vertical irradiation is irradiated to contact zone through 45 ° of half-reflecting half mirrors after the vertical light inlet of line, and its reflection light is passing through axis light
45 ° of speculums of illumination microscope 303 lower end reflex to contact zone again, and this two-beam is interfered, and interference light is by CCD305
Interference fringe can just be seen over the display by gathering and being converted to electric signal, then carry out data conversion by image pick-up card
.
The optimal observation position of coaxial optical illumination microscope 303 is adjusted by the accurate translation stage 302 of three closed assemblies.Enter
Penetrate light to be irradiated to contact zone generation interference fringe by the coaxial object lens of optical illumination microscope 303 and captured by CCD305, through correlation
Processing can show oil film thickness and shape in a computer.
Miniature sliding block secured adjusted unit 1, as in Figure 2-4, is arranged on above glass plate 201, including for fixed and
Adjust miniature sliding block 103；Miniature sliding block 103 is connected by take-up housing 101 with flexible multiple degrees of freedom bindiny mechanism；With more than flexibility from
The inclination angle of miniature sliding block 103 is tentatively adjusted and fixed by spending bindiny mechanism；The flexible preferred ball bearing of multiple degrees of freedom bindiny mechanism connects
Extension bar 102；Specifically, miniature sliding block secured adjusted unit 1 includes take-up housing 101, and miniature sliding block is fixed in the bottom of take-up housing 101
103, the miniature bottom of sliding block 103 is respectively provided with protection pad 104 with both sides, and spiral shell is passed through between miniature sliding block 103 and protection pad 104
Nail 105 is fixed；The top of take-up housing 101 is provided with ball bearing connecting rod 102, the top of ball bearing connecting rod 102 and pressing plate 401
End connection.
Loading unit 4, for being contacted to miniature sliding block 103 with glass plate 201 after lubricated surface imposed load.By pressing plate
401, plate bearing 402 and balanced controls 403 are constituted.For the application of contact zone load, and pass through the inside bullet of balanced controls 403
The elastic force of spring balances out the deadweight of pressing plate, realizes the accurate loading of load.Loading unit 4 includes pressing plate 401, pressing plate 401
One end be fixed on plate bearing 402 the upper bearing (metal) of bearing block 404 connection, the middle part of pressing plate 401 is vertically arranged with balanced controls
403, the lower section of balanced controls 403 is provided with spring 405, and spring 405 is located between plate bearing 402 and pressing plate 401, refers to accompanying drawing
10。
Miniature slipper bearing measuring lubricating oil film tilt adjustment method, is specifically followed the steps below：
Step 1, the regulation of miniature sliding block static tilt angles
Miniature sliding block 103 makes its lower surface and the upper surface of glass plate 201, ball bearing connecting rod under micro force
102 make miniature sliding block 103 realize parallel surface contact state automatically with glass plate 201, pass through the screw in ball bearing connecting rod 102
105 fix the present position of take-up housing 101, while being turned round by the inverse piezoelectric effect of piezoelectric actuator 211 to glass plate
Adjustment unit 2 carries out nano level deflection regulation, can be seen in the micro-interference measuring unit 3 below glass plate 201
The interference fringe that two planes are formed is observed, the number of fringe number reflects the size at two interplanar inclination angles；
Step 2, the regulation of miniature sliding block dynamic inclination stability
When synchronous pulley 208 drives glass plate 201 to be rotated with predetermined angular speed, the variation of contact zone striped is observed, if
Change, illustrate that bearing 207 produces bounce and swung in rotation process, now answer tight on rotating glass dish platen 203
Determine screw 202 to apply pretightning force, lift the running accuracy of bearing 207, make contact zone fringe number in the rotation process of glass plate 201
It is middle to keep stable, and then reach the accurate adjustment at inclination angle；
3) in experimentation inclination angle setting
In experimentation, it is sometimes desirable to become angle of dynamical inclination to change experiment parameter, Research Requirements, Ke Yitong are met with this
Overdrive power supply to reset the operating voltage of piezoelectric actuator 211 so that the displacement of piezoelectric actuator 211
Change, thus inclination angle is reset.
Implementation process is as follows：
Glass plate 201 is pre-fixed and preliminary leveling with holding screw 202.
Plate bearing 402 is adjusted, radius of gyration r of the miniature sliding block 103 set in advance relative to glass plate 201 is obtained,
And pressing plate 401 is rotated into normal operation position, the deadweight of pressing plate is balanced by balanced controls 403 so that miniature sliding block
103 contacts with glass plate 201 go internal load close to 0.Counterweight is then directly placed to the pressure directly over contact zone
On plate 401, the quantitative loading of load is realized.
Next the control voltage of piezoelectric actuator 211 is adjusted.It is specific under specific inclination angle according to demarcating in advance
Operational voltage value at position needed for piezoelectric actuator 211, quickly sets drive power supply for piezoelectric ceramics (such as Fig. 5), from
And obtain predetermined inclination angle.
When synchronous pulley 208 drives glass plate 201 to be rotated with predetermined angular speed, the variation of contact zone striped is observed, if
Change, illustrate that bearing produces bounce and swung in rotation process, now answer the tightening on rotating glass dish platen 203
Screw 202 applies pretightning force, lifts the running accuracy of bearing, contact zone fringe number is kept steady during disk rotational
It is fixed, and then reach the accurate adjustment at inclination angle.
After predetermined speed runs a period of time, stop glass plate 201 and rotate, record light intensity change, at computer
Minimum oil film thickness is can obtain after reason.
The process of specific glass plate revolution adjustment unit 2 deflection regulation, as shown in Figure 6：
Fixing bolt 213 is reduced to rigid bolt and an elastomer, and assumes the coefficient of elasticity of the elastomer for k1, piezoelectricity
Ceramic actuator 211 then sets the elasticity of actuator pad 212 because this is as displacement generator, therefore it is also contemplated that it is rigid body
Coefficient is k2The distance between 1. and 2., two piezoelectric actuators being arranged symmetrically are B, and frame 5 is rigid body.Made pottery when to piezoelectricity
1. and 2. porcelain actuator applies different operating voltage U1And U2When, piezoelectric actuator 1. with 2. by the different displacement of generation
y1And y2(make y1<y2), displacement difference is y=y2-y1.Due to two-stage elastomer k1、k2Series connection, works as k2Much smaller than k1When, just can be by
Displacement difference y, which is reduced into after y ', is delivered to glass plate revolution adjustment unit 2, and then realizes nano level deflection regulation, and inclination angle is just
String value is y '/B.Correlation derives as follows：
When actuator is not powered on, it can be obtained by stress balance：
k1x1=k2x2 (1)
Wherein, x1And x2Fixing bolt 213 and the respective deformation quantity of actuator pad 212 during for initial equilibrium conditionses；
When 1. and 2. piezoelectric actuator applies different operating voltage U1And U2When, 1. and 2. piezoelectric actuator incites somebody to action
Produce different displacement y1And y2(make y1<y2), it is y=y to make displacement difference2-y1, can be obtained according to stress balance：
k1(x1+ y')=k2(x2+y-y') (2)
It is collated, obtain：
Wherein, y ' is the amount of deflection that glass plate turns round adjustment unit 2.
Such as bolt uses carbon steel, and actuator pad 212 uses nylon, the modulus of elasticity ratio nearly 200 of both, because
And y ' and y differs two orders of magnitude.In the design, the nominal displacement of the actuator used is only 2.4 ± 10% microns, because
And nano level regulation can be realized.
The schematic diagram for giving tilt adjustment between sliding block and glass plate is combined in Fig. 7,8, as shown in Figure 7：Work as synchronous pulley
When driving glass plate is rotated clockwise, numbering is 211-1 to 211-6 piezoelectric actuator in drive power supply for piezoelectric ceramics
The lower output displacement of control produces change so that the inclination angle between miniature sliding block 103 and glass plate 201 changes, contact zone
Interference of light striped also changes therewith.Shown in Fig. 8 is the respective output of piezoelectric actuator as 211-1 to 211-6
The change of contact zone interference fringe during displacement increase, for example：When No. 2 actuator output displacement increases, striped, which becomes, dredges, when No. 5 causes
Striped becomes close during dynamic device output displacement increase, when 1,3,4, No. 6 actuator output displacement increases when striped can occur certain angle
Deflection.
The present invention carries out leveling first with holding screw 202 to glass plate 201, then by miniature sliding block 103 and glass
Disk 201 is contacted, and adds in contact zone some lubricants.Subsequent synchronous pulley 208 drives glass plate 201 to rotate, by aobvious
Show in the contact zone optical imagery shown on device interference fringe whether occur to judge whether two contact surfaces are substantially parallel.When two
After surface is substantially parallel, the work electricity according to needed for demarcating in advance in each piezoelectric actuator 211 under the conditions of specific inclination angle
Pressure to carry out drive power supply for piezoelectric ceramics fast setting, and then glass plate 201 is issued in the effect of piezoelectric actuator 211
Raw deflection, thus quickly obtain required contact inclination angle.Thereafter, choose interference fringe in close to exit a bit, record
Its light intensity value in stopping process is simultaneously preserved, and is that can obtain minimum oil film thickness by the processing of existing algorithm.
Each embodiment in this specification is described by the way of related, identical similar portion between each embodiment
Divide mutually referring to what each embodiment was stressed is the difference with other embodiment.It the foregoing is only this
The preferred embodiment of invention, is not intended to limit the scope of the present invention.Within the spirit and principles of the invention
Any modification, equivalent substitution and improvements made etc., are all contained in protection scope of the present invention.
Claims (8)
1. miniature slipper bearing measuring lubricating oil film inclination-angle regulating device, it is characterised in that including double-deck frame (5) and set
Put the micro-interference measuring unit (3) in frame (5), glass plate and turn round adjustment unit (2), miniature sliding block secured adjusted unit
(1) with loading unit (4), the frame (5) is used to supporting and fixing all parts；
The glass plate revolution adjustment unit (2) is arranged on frame (5) upper surface, and glass plate revolution adjustment unit (2) includes
Bearing (207), the surfaces externally and internally of bearing (207) sets bearing inner sleeve (209), bearing outside (206), bearing outside respectively
(206) uniform 6 pieces of piezoelectric actuators (211) are used for entering whole unit horizontal deflection regulation, bearing inner sleeve at outer convex shoulder
(209) disc spring (205) is placed at internal shoulder, disc spring (205) sets gradually glass plate (201) and glass plate platen upwards
(203), glass plate platen (203) is located at periphery, the uniform disc spring of glass plate (201) lower edges on glass plate (201)
(205)；Holding screw (202), which is arranged in glass plate platen (203), to be used to pre-fix and first step glass plate (201)
It is flat；Synchronous pulley (208) is connected to drive glass plate (201) to rotate by bearing (207) with glass plate (201)；
The micro-interference measuring unit (3) is arranged on frame (5) bottom and positioned at the lower section of glass plate (201)；
The miniature sliding block secured adjusted unit (1) is arranged on glass plate (201) above, the miniature sliding block secured adjusted unit
(1) take-up housing (101) is included, miniature sliding block (103) is fixed in take-up housing (101) bottom, and miniature sliding block (103) bottom and both sides are equal
Protection pad (104) is set, it is fixed by screw (105) between miniature sliding block (103) and protection pad (104)；Take-up housing
(101) top sets flexible multiple degrees of freedom bindiny mechanism, flexible multiple degrees of freedom bindiny mechanism top and pressing plate (401) lower end
Connection；
The loading unit (4) includes pressing plate (401), and one end of pressing plate (401) is fixed on the bearing block of plate bearing (402)
(404) upper bearing (metal) is connected, and is vertically arranged with below balanced controls (403), balanced controls (403) and is set in the middle part of pressing plate (401)
There is spring (405), spring (405) is located between plate bearing (402) and pressing plate (401)；The plate bearing (402) is connected to
Frame (5) upper surface is simultaneously on axis.
2. miniature slipper bearing measuring lubricating oil film inclination-angle regulating device according to claim 1, it is characterised in that described
Bearing (207) upper end is provided with bearing gland (210).
3. miniature slipper bearing measuring lubricating oil film inclination-angle regulating device according to claim 1, it is characterised in that described
Pad (204) is provided between glass plate (201) and glass plate platen (203).
4. miniature slipper bearing measuring lubricating oil film inclination-angle regulating device according to claim 1, it is characterised in that described
Piezoelectric actuator (211) upper and lower surface is provided with actuator pad (212).
5. miniature slipper bearing measuring lubricating oil film inclination-angle regulating device according to claim 1, it is characterised in that pass through
6 fixing bolts (213) at bearing outside (206) outer convex shoulder, frame (5) upper surface is connected to simultaneously by bearing outside (206)
On axis.
6. miniature slipper bearing measuring lubricating oil film inclination-angle regulating device according to claim 1, it is characterised in that described
Flexible multiple degrees of freedom bindiny mechanism is ball bearing connecting rod (102).
7. miniature slipper bearing measuring lubricating oil film inclination-angle regulating device according to claim 1, it is characterised in that described
Micro-interference measuring unit (3) includes support (301), accurate translation stage (302), coaxial optical illumination microscope (303), microscope
Pass through on sleeve (304) and CCD (305), the support (301) on fixed accurate translation stage (302), accurate translation stage (302)
Microscope sleeve (304) fixing coaxial optical illumination microscope (303), CCD (305) is arranged on coaxial optical illumination microscope (303)
Lower section, and cause contact zone of the coaxial optical illumination microscope (303) just to miniature sliding block (103) and glass plate (201)；It is described
Accurate translation stage (302) is provided with three and mutually closed assembly.
8. a kind of adjusting method of slipper bearing measuring lubricating oil film inclination-angle regulating device miniature as described in claim 1-7, its
It is characterised by, follows the steps below：
Step 1, the regulation of miniature sliding block static tilt angles
Leveling is carried out to glass plate (201) using holding screw (202), miniature sliding block (103) makes under micro force under it
Surface and glass plate (201) upper surface, ball bearing connecting rod (102) make miniature sliding block (103) and glass plate (201) automatic
Parallel surface contact state is realized, position residing for take-up housing (101) is fixed by the screw (105) in ball bearing connecting rod (102)
Put, while it is nano level that adjustment unit (2) progress is turned round to glass plate by the inverse piezoelectric effect of piezoelectric actuator (211)
Deflection regulation, can observe what two planes were formed in the micro-interference measuring unit (3) below glass plate (201)
Interference fringe, the number of fringe number reflects the size at two interplanar inclination angles；
Step 2, the regulation of miniature sliding block dynamic inclination stability
When synchronous pulley (208) drives glass plate (201) to be rotated with predetermined angular speed, pass through the contact shown over the display
Whether occur interference fringe in area's optical imagery to judge whether two contact surfaces are substantially parallel, observe the change of contact zone striped
It is dynamic, beat and swing if illustrating that bearing (207) is produced in rotation process if changing, now answer rotating glass dish platen
(203) holding screw (202) on applies pretightning force, and the running accuracy of lifting bearing (207) makes contact zone fringe number in glass
Keep stable in glass disk (201) rotation process, and then reach the accurate adjustment at inclination angle；
Step 3, in experimentation inclination angle setting
After two surfaces are substantially parallel, according to demarcating each piezoelectric actuator (211) institute under the conditions of specific inclination angle in advance
The operating voltage needed to carry out fast setting to drive power supply for piezoelectric ceramics, and then makes glass plate (201) in piezoelectric ceramic actuator
Deflected under device (211) effect, thus quickly obtain required contact inclination angle；Change experiment sometimes for angle of dynamical inclination is become
Parameter, can reset the operating voltage of piezoelectric actuator (211) so that piezoelectric ceramic actuator by driving power supply
The displacement of device (211) is changed, thus inclination angle is reset；
Step 4,
Choose in interference fringe close to exit a bit, record its light intensity value in stopping process and preserve, pass through
Calculate and can obtain minimum oil film thickness.
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