TWI472714B - Shaped surface contact of the oil film thickness analysis device - Google Patents

Shaped surface contact of the oil film thickness analysis device Download PDF

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TWI472714B
TWI472714B TW103106864A TW103106864A TWI472714B TW I472714 B TWI472714 B TW I472714B TW 103106864 A TW103106864 A TW 103106864A TW 103106864 A TW103106864 A TW 103106864A TW I472714 B TWI472714 B TW I472714B
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oil film
turntable
conductor
film thickness
surface contact
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TW201533426A (en
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Univ Nat Formosa
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Description

楔型面接觸之油膜厚度分析裝置Oil film thickness analysis device for wedge surface contact

本發明係有關一種楔型面接觸之油膜厚度分析裝置,尤指一種兼具不透光材質亦可進行油膜厚度之分析量測,與可增設光學組件而能擴大適用於市面透光材質之油膜厚度分析量測之楔型面接觸之油膜厚度分析裝置。The invention relates to an oil film thickness analysis device for wedge surface contact, in particular to an oil opaque material capable of analyzing and measuring oil film thickness, and an optical module capable of expanding an oil film suitable for a market transparent material. An oil film thickness analyzing device for wedge surface contact measurement by thickness analysis.

磨潤是一項研究界面性能表現跨領域的科技,是精密機械、電子、光電、化工、建築、環保、微機電、能源等等各零件(軸承、軸封、凸輪、齒輪、滾珠螺桿、滑軌、研磨、切削、塗層、輸送、機械手臂、人工關節、人工眼球、醫學檢測光碟、、、等)之解決摩擦、磨損、潤滑相關問題的技術與方法。可見磨潤儀器之應用場合廣泛且跨產業。Grinding is a cross-domain technology that studies the performance of interface. It is precision machinery, electronics, optoelectronics, chemical, construction, environmental protection, micro-electromechanical, energy and other parts (bearings, shaft seals, cams, gears, ball screws, sliding). Techniques and methods for solving friction, wear and lubrication related problems of rails, grinding, cutting, coating, conveying, robotic arms, artificial joints, artificial eyeballs, medical inspection discs, and the like. It can be seen that the application of the grinding instrument is extensive and cross-industry.

任何元件如何控制在史崔拜克圖(業界公知)的最佳設計區,則能穩定且有效率的運轉,此為相關裝置之性能與壽命的重要關鍵,亦即磨潤儀器設計製造之緣由。How any component is controlled in the best design area of the Strykerk diagram (known in the industry) can operate stably and efficiently, which is an important key to the performance and life of the relevant device, that is, the reason for the design and manufacture of the grinding instrument. .

關於相關現有技術,茲簡要說明如下:1962年柯爾克(Kirk)等人首次將光干涉法應用於彈液動潤滑試驗研究中,成功的量測出彈液動潤滑油膜的形狀。Regarding the related prior art, the following is briefly described as follows: In 1962, Kirk et al. first applied the optical interference method to the experimental study of the elastic lubrication test, and successfully measured the shape of the elastic lubricating oil film.

1968年富爾德(Foord)等人在玻璃面鍍上透明反射鉻薄膜,使光干涉條紋更加清晰。In 1968, Foord et al. plated a transparent reflective chrome film on the glass surface to make the light interference fringes clearer.

1987年斯拜克(Spikes)和高(Gao)等人採用光學性質與潤滑油膜相近的Al2O3在玻璃表面鍍上薄膜,以薄膜厚度替代了一部分油膜厚度,使光干涉法能夠量測的油膜厚度更小,但另外產生鍍膜不易,且量測誤差大的問題。In 1987, Spikes and Gao et al. used Al2O3, which is similar in optical properties to the lubricating oil film, to coat the surface of the glass, replacing the thickness of the film with the thickness of the film, and measuring the thickness of the film by optical interferometry. It is smaller, but it also has the problem that the coating is not easy and the measurement error is large.

2007年KH儲、RP格羅夫尼亞及斯拜克三人(J.H.Choo,R.P.Glovnea,Spikies)利用點與線的接觸做油膜厚度的量測,但是兩接觸平面的平行度問題與傾角角度問題,使得量測範圍受到局限。In 2007, KH Storage, RP Grosvenor and Spikees used JChoo, RPGlovnea, and Spikies to measure the thickness of the oil film by point-to-line contact, but the parallelism and inclination angle of the two contact planes. The problem is that the measurement range is limited.

亦即,目前裝置都只能以透光材質配合光學量測裝置量測油膜厚度,且鍍膜不易,且,量測誤差大。That is to say, at present, the device can only measure the thickness of the oil film with a light-transmitting material and an optical measuring device, and the coating film is not easy, and the measurement error is large.

目前尚無以不透光材料配合量測接觸電阻值算出油膜厚度之裝置。At present, there is no device for calculating the thickness of the oil film by measuring the contact resistance value with an opaque material.

有鑑於此,必需研發出可解決上述習用缺點之技術。In view of this, it is necessary to develop a technique that can solve the above disadvantages.

本發明之目的,在於提供一種楔型面接觸之油膜厚度分析裝置,其兼具不透光材質亦可進行油膜厚度之分析量測,與可增設光學組件而能擴大適用於市面透光材質之油膜厚度分析量測等優點。特別是,本發明所欲解決之問題係在於目前尚無以不透光材料配合量測接觸電阻值算出油膜厚度之裝置等問題。An object of the present invention is to provide an oil film thickness analyzing device for wedge-shaped surface contact, which can also measure and measure the thickness of the oil film while having an opaque material, and can be expanded to be suitable for a commercially available light-transmitting material by adding an optical component. Oil film thickness analysis and other advantages. In particular, the problem to be solved by the present invention is that there is currently no problem such as a device for calculating the thickness of the oil film by measuring the contact resistance value with an opaque material.

解決上述問題之技術手段係提供一種楔型面接觸之油膜厚度分析裝置,其包括:一機台,係設有一工作孔;一旋轉工作台,係樞設於該工作孔上,該旋轉工作台包括一 固定部及一驅動組件;該固定部係設一轉盤,該轉盤包括一基板及一鍍於該基板上之導體膜,該導體膜上用以設置一油膜,該驅動組件係用以驅動該轉盤旋轉;一導體滑塊,係設於該機台上;一施力部,係設於該機台上,用以固定並使該導體滑塊與該轉盤之間具有一傾斜角;且使該導體滑塊可經該油膜,朝該轉盤施加一工作力;一量測組件,係電性連結該轉盤及該導體滑塊,而即時擷取其間之接觸電阻值;一中央裝置,係電性連結該驅動組件及該量測組件,用以擷取該接觸電阻值;藉此,當控制該轉盤之轉速變慢與慢快,係使該油膜之厚度分別變薄與變厚,進而使該接觸電阻值分別變小與變大;並當控制該工作力之變小與變大,係使該油膜之厚度分別變厚與變薄,而使該接觸電阻值分別變大與變小。The technical means for solving the above problems is to provide a wedge type surface contact oil film thickness analyzing device, comprising: a machine having a working hole; a rotating table pivotally disposed on the working hole, the rotating table Including one a fixing portion and a driving component; the fixing portion is provided with a turntable, the turntable comprises a substrate and a conductor film plated on the substrate, the conductor film is provided with an oil film, and the driving component is used for driving the turntable Rotating; a conductor slider is disposed on the machine; a force applying portion is disposed on the machine for fixing and having an inclination angle between the conductor slider and the turntable; The conductor slider can apply a working force to the turntable through the oil film; a measuring component electrically connects the turntable and the conductor slider, and instantly captures the contact resistance value therebetween; a central device is electrically connected Connecting the driving component and the measuring component to capture the contact resistance value; thereby, when controlling the rotation speed of the rotating disk to be slower and slower, the thickness of the oil film is thinned and thickened respectively, thereby The contact resistance values become smaller and larger, respectively. When the control work force becomes smaller and larger, the thickness of the oil film is thickened and thinned, respectively, and the contact resistance values become larger and smaller, respectively.

本發明之上述目的與優點,不難從下述所選用實施例之詳細說明與附圖中,獲得深入瞭解。The above objects and advantages of the present invention will be readily understood from the following detailed description of the preferred embodiments illustrated herein.

茲以下列實施例並配合圖式詳細說明本發明於後:The invention will be described in detail in the following examples in conjunction with the drawings:

10‧‧‧機台10‧‧‧ machine

11‧‧‧工作孔11‧‧‧Working holes

20‧‧‧旋轉工作台20‧‧‧Rotating table

21‧‧‧固定部21‧‧‧ Fixed Department

211‧‧‧轉盤211‧‧‧ Turntable

21A‧‧‧基板21A‧‧‧Substrate

21B‧‧‧導體膜21B‧‧‧Conductor film

22‧‧‧驅動組件22‧‧‧Drive components

221‧‧‧動力部221‧‧Power Department

222‧‧‧傳動結構222‧‧‧ Transmission structure

30‧‧‧導體滑塊30‧‧‧Conductor Slider

40‧‧‧施力部40‧‧‧ Force Department

41‧‧‧施力臂41‧‧‧ force arm

411‧‧‧樞接端411‧‧‧ pivot end

412‧‧‧固定端412‧‧‧ fixed end

42‧‧‧固定座42‧‧‧ fixed seat

43‧‧‧調整桿43‧‧‧Adjustment rod

50‧‧‧量測組件50‧‧‧Measuring components

51‧‧‧正極部51‧‧‧ positive part

52‧‧‧負極部52‧‧‧Negative part

53‧‧‧對外連結部53‧‧‧ External Linkage Department

60‧‧‧中央裝置60‧‧‧Central installation

61‧‧‧顯示裝置61‧‧‧Display device

70‧‧‧光學組件70‧‧‧Optical components

71‧‧‧單色光源產生部71‧‧‧ Monochrome light source generation department

711‧‧‧單色光束711‧‧‧Monochrome beam

72‧‧‧影像擷取裝置72‧‧‧Image capture device

721‧‧‧工作影像721‧‧‧Working images

91‧‧‧油膜91‧‧‧ oil film

θ‧‧‧傾斜角θ‧‧‧Tilt angle

F‧‧‧工作力F‧‧‧Working power

L1‧‧‧第一曲線L1‧‧‧ first curve

L2‧‧‧第二曲線L2‧‧‧ second curve

L3‧‧‧第三曲線L3‧‧‧ third curve

L4‧‧‧第四曲線L4‧‧‧ fourth curve

θ 1‧‧‧第一角度θ 1‧‧‧ first angle

第一圖係本發明之第一實施例之分解示意圖The first figure is an exploded view of the first embodiment of the present invention.

第二圖係第一圖之部分結構之示意圖The second figure is a schematic diagram of a part of the structure of the first figure

第三圖係本發明之轉盤轉速-油膜厚度-接觸電阻值之對應關係之曲線圖The third graph is a graph showing the corresponding relationship between the rotational speed of the turntable and the thickness of the oil film-contact resistance of the present invention.

第四圖係本發明之工作力-油膜厚度-接觸電阻值之對應關係之曲線圖The fourth graph is a graph showing the correspondence between the working force-oil film thickness-contact resistance value of the present invention.

第五圖係本發明之第二實施例之分解示意圖The fifth drawing is an exploded view of the second embodiment of the present invention.

第六圖係第五圖之部分結構之示意圖The sixth figure is a schematic diagram of part of the structure of the fifth figure

第七圖係第六圖之局部放大之示意圖The seventh figure is a partial enlarged view of the sixth figure

參閱第一、第二及第七圖,本發明係為一種楔型面接觸之油膜厚度分析裝置,其包括:一機台10,係設有一工作孔11;一旋轉工作台20,係樞設於該工作孔11上,該旋轉工作台20包括一固定部21及一驅動組件22;該固定部21係設一轉盤211,該轉盤211包括一基板21A及一鍍於該基板21A上之導體膜21B,該導體膜21B上用以設置一油膜91,該驅動組件22係用以驅動該轉盤211旋轉;一導體滑塊30,係設於該機台10上;一施力部40,係設於該機台10上,用以固定並使該導體滑塊30與該轉盤211之間具有一傾斜角θ;且使該導體滑塊30可經該油膜91,朝該轉盤211施加一工作力F;一量測組件50,係電性連結該轉盤211及該導體滑塊30,而即時擷取其間之接觸電阻值;一中央裝置60,係電性連結該驅動組件22及該量測組件50,用以擷取該接觸電阻值;藉此,當控制該轉盤211之轉速變慢與慢快(參閱第三圖), 係使該油膜91之厚度分別變薄與變厚,進而使該接觸電阻值分別變小與變大;並當控制該工作力F之變小與變大(參閱第四圖),係使該油膜91之厚度分別變厚與變薄,而使該接觸電阻值分別變大與變小。Referring to the first, second and seventh figures, the present invention is a wedge type surface contact oil film thickness analyzing device, comprising: a machine table 10, which is provided with a working hole 11; a rotating table 20, which is pivoted On the working hole 11, the rotating table 20 includes a fixing portion 21 and a driving assembly 22; the fixing portion 21 is provided with a turntable 211, and the rotating plate 211 includes a substrate 21A and a conductor plated on the substrate 21A. The film 21B, the conductor film 21B is provided with an oil film 91, the driving component 22 is used to drive the turntable 211 to rotate; a conductor slider 30 is attached to the machine table 10; a force applying portion 40 is It is disposed on the machine table 10 for fixing and has an inclination angle θ between the conductor slider 30 and the turntable 211; and the conductor slider 30 can pass the oil film 91 to apply a work to the turntable 211. a measuring unit 50 electrically connecting the turntable 211 and the conductor slider 30 to instantly capture the contact resistance value therebetween; a central device 60 electrically connecting the driving component 22 and the measuring The component 50 is configured to capture the contact resistance value; thereby, when the speed of the turntable 211 is controlled to be slow and slow (See third chart), The thickness of the oil film 91 is thinned and thickened, respectively, so that the contact resistance value becomes smaller and larger, respectively; and when the control work force F becomes smaller and larger (refer to the fourth figure), The thickness of the oil film 91 is thickened and thinned, respectively, and the contact resistance value is made larger and smaller, respectively.

實務上,於本發明之第一實施例中:該固定部21可為軸承結構,並介於該工作孔11與該轉盤211之間,並受該驅動組件22傳動,而驅動該轉盤211旋轉。In a first embodiment of the present invention, the fixing portion 21 can be a bearing structure and interposed between the working hole 11 and the turntable 211, and is driven by the driving assembly 22 to drive the turntable 211 to rotate. .

該基板21A可為石英玻璃盤。The substrate 21A may be a quartz glass disk.

該導體膜21B可包括二氧化矽(SiO 2 )鍍膜與鉻(Chromium,英文簡稱Cr)鍍膜。二氧化矽(SiO 2 )鍍膜係介於該基板21A與鉻鍍膜之間。The conductor film 21B may include a ruthenium dioxide ( SiO 2 ) plating film and a chromium (Chromium, abbreviated as Cr) plating film. A cerium oxide ( SiO 2 ) plating film is interposed between the substrate 21A and the chrome plating film.

該驅動組件22係包括:一動力部221,係電性連結該中央裝置60;一傳動結構222,係連結於該動力部221與該固定部21之間,用以輸出該動力部221之動力,而傳動該固定部21。The driving unit 22 includes a power unit 221 electrically connected to the central unit 60. A transmission structure 222 is coupled between the power unit 221 and the fixing unit 21 for outputting the power of the power unit 221. And the fixing portion 21 is driven.

該導體滑塊30可為製作軸承之鋼結構。The conductor slider 30 can be a steel structure for making a bearing.

該施力部40係包括:一施力臂41,係具有一樞接端411及一固定端412;該樞接端411係樞接於該機台10;該固定端312係對應該工作孔11;一固定座42,係用以固定該導體滑塊30;複數個調整桿43,係分別連結於該固定端412與該固定座42之間,用以調整該固定座42與該轉盤211間之該傾斜角θ。The urging portion 40 includes a urging arm 41 having a pivoting end 411 and a fixed end 412. The pivoting end 411 is pivotally connected to the machine table 10; the fixed end 312 is corresponding to the working hole 11 a fixing base 42 for fixing the conductor slider 30; a plurality of adjusting rods 43 respectively connected between the fixing end 412 and the fixing base 42 for adjusting between the fixing base 42 and the rotating plate 211 The inclination angle θ.

該每一調整桿43可為微調螺桿。Each of the adjustment rods 43 can be a fine adjustment screw.

該量測組件50係包括一正極部51、一負極部52及一對外連結 部53,該正極部51係保持電性接觸該轉盤211;該負極部52係電性連結該導體滑塊30,使該量測組件50可即時量測接觸電阻值;該對外連結部53係電性連結該中央裝置60,用以輸出接觸電阻值。The measuring component 50 includes a positive electrode portion 51, a negative electrode portion 52 and an external link. The portion 53 is electrically connected to the turntable 211; the negative portion 52 is electrically connected to the conductor slider 30, so that the measuring component 50 can immediately measure the contact resistance value; the external connecting portion 53 is The central device 60 is electrically connected to output a contact resistance value.

關於第一實施例之使用方式,係如下所述:參閱第二圖,啟動該動力部221,該動力部221經該傳動結構222傳動該轉盤211轉動,參閱第三圖,關於轉盤轉速-油膜厚度-接觸電阻值之對應關係為:該轉盤211之轉速從大約10mm/s(慢速)提高至大約50mm/s(快速)。Regarding the manner of use of the first embodiment, as follows: Referring to the second figure, the power unit 221 is activated, and the power unit 221 is rotated by the transmission structure 222. Referring to the third figure, regarding the rotation speed of the turntable-oil film The correspondence between the thickness-contact resistance values is such that the rotational speed of the turntable 211 is increased from about 10 mm/s (slow speed) to about 50 mm/s (fast).

該油膜91之油膜厚度從大約625nm增厚至大約2000nm(如第一曲線L1所示)。The oil film thickness of the oil film 91 is thickened from about 625 nm to about 2000 nm (as shown by the first curve L1).

而接觸電阻值則從大約7.5Ω提高至大約25Ω(如第二曲線L2所示)。The contact resistance value is increased from about 7.5 Ω to about 25 Ω (as shown by the second curve L2).

亦即,在工作力F不變的情況下,轉速愈快,則油膜厚度愈厚,相對接觸電阻值愈大。That is, in the case where the working force F is constant, the faster the rotational speed is, the thicker the oil film is, and the larger the relative contact resistance value is.

當然,關於轉速與油膜厚度之對應關係,可以機械、電子或是光學方式預先取得相關資料,再與接觸電阻對應即可。Of course, regarding the corresponding relationship between the rotational speed and the thickness of the oil film, the relevant data can be obtained in advance by mechanical, electronic or optical means, and then corresponding to the contact resistance.

另外,當對該施力臂41下壓施力(例如置放砝碼),係經該導體滑塊30、該油膜91而對轉盤211施加工作力F,關於工作力-油膜厚度-接觸電阻值之對應關係係如第四圖所示:當工作力F從大約2(Kpa)增加至大約12(Kpa)。In addition, when the force applying arm 41 is pressed downward (for example, a weight is placed), a working force F is applied to the turntable 211 via the conductor slider 30 and the oil film 91, and the working force-oil film thickness-contact resistance value is used. The correspondence is as shown in the fourth figure: when the working force F increases from about 2 (Kpa) to about 12 (Kpa).

該油膜91之油膜厚度從大約2000nm變薄至大約1100nm(如第 三曲線L3所示)。The oil film thickness of the oil film 91 is thinned from about 2000 nm to about 1100 nm (as in the first The three curve L3 is shown).

而接觸電阻值則從大約18Ω降至大約12Ω(如第四曲線L4所示)。The contact resistance value is reduced from about 18 Ω to about 12 Ω (as shown by the fourth curve L4).

亦即,在轉速不變的情況下,工作力F愈大,則油膜厚度愈薄,相對接觸電阻值愈低。That is, in the case where the rotational speed is constant, the larger the working force F is, the thinner the oil film thickness is, and the lower the relative contact resistance value is.

同樣的,關於轉速與油膜厚度之對應關係,可以機械、電子或是光學方式預先取得相關資料,再與接觸電阻對應即可。Similarly, regarding the corresponding relationship between the rotational speed and the thickness of the oil film, the relevant data can be obtained in advance by mechanical, electronic or optical means, and then corresponding to the contact resistance.

該中央裝置60又包括一顯示裝置61,用以顯示所擷取之相關數據(例如顯示曲線圖)。The central device 60 further includes a display device 61 for displaying the captured data (e.g., display graph).

參閱第五及第六圖,係本發明之第二實施例,其與第一實施之差異處,僅在於:該導體膜21B鍍於該基板21A上後,該轉盤211概呈透光結構。Referring to the fifth and sixth embodiments, the second embodiment of the present invention differs from the first embodiment only in that the conductive film 21B is plated on the substrate 21A, and the turntable 211 has a light transmitting structure.

該導體滑塊30係經研磨,而具有120~170nm之粗糙度,且;又包括:一光學組件70,係具有一單色光源產生部71及一影像擷取裝置72;該單色光源產生部71係產生一單色光束711,其由下往上以一第一角度θ 1穿透該轉盤211,並透過該油膜91而抵達該導體滑塊30後,再向下反射回該光學組件70中,其間產生光學干涉現象而使得該影像擷取裝置72能擷取到一工作影像721,該工作影像721中係包含光學干涉圖像;藉此,利用該光學干涉圖像之變化,而配合等厚干涉理論運算油膜厚度;控制該轉盤211之轉速變慢與變快,係分別使油膜91之厚度變 薄與變厚,且分別使接觸電阻變小與變大,該光學干涉圖像係隨之變化,並當油膜厚度達到奈米單位時,該光學干涉圖像仍概呈清晰。The conductor slider 30 is ground to have a roughness of 120-170 nm, and further includes: an optical component 70 having a monochromatic light source generating portion 71 and an image capturing device 72; the monochromatic light source is generated The portion 71 generates a monochromatic light beam 711 which penetrates the turntable 211 from a bottom to a top at a first angle θ 1 and passes through the oil film 91 to reach the conductor slider 30 and then reflects back down to the optical component. 70, in which an optical interference phenomenon occurs, so that the image capturing device 72 can capture a working image 721, which includes an optical interference image; thereby utilizing the change of the optical interference image, The oil film thickness is calculated according to the equal thickness interference theory; the rotation speed of the turntable 211 is controlled to be slower and faster, and the thickness of the oil film 91 is changed respectively. Thin and thick, and the contact resistance becomes smaller and larger, respectively, the optical interference image changes accordingly, and when the oil film thickness reaches the nanometer unit, the optical interference image is still clear.

本發明之優點及功效係如下所述:The advantages and functions of the present invention are as follows:

[1]不透光材質亦可進行油膜厚度之分析量測。本發明可於轉盤上鍍設一導體膜,進而量測導體膜與導體滑塊間之接觸電阻值的變化,即可反推出油膜厚度。故。可以不透光材質分析量測油膜厚度。[1] The opaque material can also be used for the analysis of oil film thickness. According to the invention, a conductor film can be plated on the turntable, and then the change of the contact resistance value between the conductor film and the conductor slider can be measured, and the thickness of the oil film can be reversed. Therefore. The thickness of the oil film can be measured by opaque material analysis.

[2]可增設光學組件而能擴大適用於市面透光材質之油膜厚度分析量測。本發明只是在市面透光材質轉盤(石英玻璃盤)上加鍍一導體膜,即可量測接觸電阻值,並不需要另外開發專用裝置,且原有光學式油膜厚度分析功能仍可正常使用。故,可直接應用於市面透光材質分析量測油膜厚度。[2] The optical component can be added to expand the oil film thickness measurement and measurement applicable to the market transparent material. The invention only applies a conductor film on the market transparent material turntable (quartz glass disk), and can measure the contact resistance value, and does not need to develop a special device, and the original optical oil film thickness analysis function can still be used normally. . Therefore, it can be directly applied to the market surface light material analysis to measure the oil film thickness.

以上僅是藉由較佳實施例詳細說明本發明,對於該實施例所做的任何簡單修改與變化,皆不脫離本發明之精神與範圍。The present invention has been described in detail with reference to the preferred embodiments of the present invention, without departing from the spirit and scope of the invention.

10‧‧‧機台10‧‧‧ machine

11‧‧‧工作孔11‧‧‧Working holes

20‧‧‧旋轉工作台20‧‧‧Rotating table

21‧‧‧固定部21‧‧‧ Fixed Department

211‧‧‧轉盤211‧‧‧ Turntable

21A‧‧‧基板21A‧‧‧Substrate

21B‧‧‧導體膜21B‧‧‧Conductor film

22‧‧‧驅動組件22‧‧‧Drive components

221‧‧‧動力部221‧‧Power Department

222‧‧‧傳動結構222‧‧‧ Transmission structure

30‧‧‧導體滑塊30‧‧‧Conductor Slider

40‧‧‧施力部40‧‧‧ Force Department

41‧‧‧施力臂41‧‧‧ force arm

411‧‧‧樞接端411‧‧‧ pivot end

412‧‧‧固定端412‧‧‧ fixed end

42‧‧‧固定座42‧‧‧ fixed seat

43‧‧‧調整桿43‧‧‧Adjustment rod

50‧‧‧量測組件50‧‧‧Measuring components

51‧‧‧正極部51‧‧‧ positive part

52‧‧‧負極部52‧‧‧Negative part

53‧‧‧對外連結部53‧‧‧ External Linkage Department

60‧‧‧中央裝置60‧‧‧Central installation

61‧‧‧顯示裝置61‧‧‧Display device

91‧‧‧油膜91‧‧‧ oil film

θ‧‧‧傾斜角θ‧‧‧Tilt angle

F‧‧‧工作力F‧‧‧Working power

Claims (9)

一種楔型面接觸之油膜厚度分析裝置,係包括:一機台,係設有一工作孔;一旋轉工作台,係樞設於該工作孔上,該旋轉工作台包括一固定部及一驅動組件;該固定部係設一轉盤,該轉盤包括一基板及一鍍於該基板上之導體膜,該導體膜上用以設置一油膜,該驅動組件係用以驅動該轉盤旋轉;一導體滑塊,係設於該機台上;一施力部,係設於該機台上,用以固定並使該導體滑塊與該轉盤之間具有一傾斜角;且使該導體滑塊可經該油膜,朝該轉盤施加一工作力;一量測組件,係電性連結該轉盤及該導體滑塊,而即時擷取其間之接觸電阻值;一中央裝置,係電性連結該驅動組件及該量測組件,用以擷取該接觸電阻值;藉此,當控制該轉盤之轉速變慢與慢快,係使該油膜之厚度分別變薄與變厚,進而使該接觸電阻值分別變小與變大;並當控制該工作力之變小與變大,係使該油膜之厚度分別變厚與變薄,而使該接觸電阻值分別變大與變小。An oil film thickness analyzing device for wedge surface contact includes: a machine having a working hole; a rotating table pivotally disposed on the working hole, the rotating table comprising a fixing portion and a driving assembly The fixing portion is provided with a turntable, the turntable comprises a substrate and a conductor film plated on the substrate, the conductor film is provided with an oil film, the driving component is used for driving the turntable to rotate; a conductor slider a force-applying portion is disposed on the machine for fixing and having an inclination angle between the conductor slider and the turntable; and the conductor slider can pass the The oil film applies a working force to the turntable; a measuring component electrically connects the turntable and the conductor slider to instantly capture the contact resistance value therebetween; and a central device electrically connects the driving component and the The measuring component is configured to capture the contact resistance value; thereby, when the rotation speed of the rotating disk is controlled to be slower and slower, the thickness of the oil film is thinned and thickened respectively, thereby making the contact resistance value smaller And become bigger; and when controlling the work force Small and large, the film thickness of the lines are thick and thin, so that the contact resistance value becomes larger and smaller, respectively. 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中,該固定部係為軸承結構,並介於該工作孔與該轉盤之間,並受該驅動組件傳動,而驅動該轉盤旋轉。The oil film thickness analyzing device of the wedge type surface contact according to the first aspect of the invention, wherein the fixing portion is a bearing structure, and is interposed between the working hole and the turntable, and is driven by the driving component, and Drive the turntable to rotate. 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中,該基板係為石英玻璃盤。The oil film thickness analyzing device for wedge-shaped surface contact according to claim 1, wherein the substrate is a quartz glass disk. 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中:該導體膜係包括二氧化矽鍍膜與鉻鍍膜;該二氧化矽鍍膜係介於該基板與鉻鍍膜之間。The oil film thickness analysis device of the wedge type surface contact according to the first aspect of the invention, wherein the conductor film system comprises a ruthenium dioxide coating film and a chrome plating film; the ruthenium dioxide coating film is interposed between the substrate and the chrome plating film. . 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中,該驅動組件係包括:一動力部,係電性連結該中央裝置;一傳動結構,係連結於該動力部與該固定部之間,用以輸出該動力部之動力,而傳動該固定部。The oil film thickness analyzing device of the wedge type surface contact according to the first aspect of the invention, wherein the driving component comprises: a power portion electrically connected to the central device; and a transmission structure coupled to the power portion And the fixing portion is configured to output the power of the power portion to transmit the fixing portion. 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中,該導體滑塊係為製作軸承之鋼結構。The oil film thickness analyzing device for wedge-shaped surface contact according to the first aspect of the invention, wherein the conductor slider is a steel structure for manufacturing a bearing. 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中,該施力部係包括:一施力臂,係具有一樞接端及一固定端;該樞接端係樞接於該機台;該固定端係對應該工作孔;一固定座,係用以固定該導體滑塊;複數個調整桿,係分別連結於該固定端與該固定座之間,用以調整該固定座與該轉盤間之該傾斜角。The oil film thickness analyzing device of the wedge type surface contact according to the first aspect of the invention, wherein the force applying portion comprises: a force applying arm having a pivot end and a fixed end; the pivot end pivoting Connected to the machine; the fixed end corresponds to the working hole; a fixing seat is used for fixing the conductor slider; a plurality of adjusting rods are respectively connected between the fixed end and the fixing seat for adjusting The angle of inclination between the mount and the turntable. 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中,該量測組件係包括一正極部、一負極部及一對外連結部,該正極部係保持電性接觸該轉盤;該負極部係電性連結該導體滑塊,使該量測組件可 即時量測接觸電阻值;該對外連結部係電性連結該中央裝置,用以輸出接觸電阻值。The oil film thickness analyzing device of the wedge type surface contact according to the first aspect of the invention, wherein the measuring component comprises a positive electrode portion, a negative electrode portion and an outer connecting portion, wherein the positive electrode portion is kept in electrical contact with the positive electrode portion. a turntable; the negative portion is electrically connected to the conductor slider, so that the measuring component can be The contact resistance value is measured instantaneously; the external connection portion is electrically connected to the central device for outputting a contact resistance value. 如申請專利範圍第1項所述之楔型面接觸之油膜厚度分析裝置,其中:該導體膜鍍於該基板上後,該轉盤概呈透光結構;該導體滑塊係經研磨,而具有120~170nm之粗糙度,且;又包括:一光學組件,係具有一單色光源產生部及一影像擷取裝置;該單色光源產生部係產生一單色光束,其由下往上以一第一角度穿透該轉盤,並透過該油膜而抵達該導體滑塊後,再向下反射回該光學組件中,其間產生光學干涉現象而使得該影像擷取裝置能擷取到一工作影像,該工作影像中係包含光學干涉圖像;藉此,利用該光學干涉圖像之變化,而配合等厚干涉理論運算油膜厚度;控制該轉盤之轉速變慢與變快,係分別使油膜之厚度變薄與變厚,且分別使接觸電阻變小與變大,該光學干涉圖像係隨之變化,並當油膜厚度達到奈米單位時,該光學干涉圖像仍概呈清晰。The oil film thickness analysis device of the wedge type surface contact according to the first aspect of the invention, wherein: after the conductor film is plated on the substrate, the turntable has a light transmitting structure; the conductor slider is ground and has a roughness of 120 to 170 nm, and further comprising: an optical component having a monochromatic light source generating portion and an image capturing device; the monochromatic light source generating portion generating a monochromatic light beam from bottom to top a first angle penetrates the turntable and passes through the oil film to reach the conductor slider, and then reflects back down to the optical component, thereby causing optical interference phenomenon, so that the image capturing device can capture a working image The working image includes an optical interference image; thereby, the thickness of the optical interference image is used, and the thickness of the oil film is calculated by using an equal thickness interference theory; and the rotation speed of the rotating disk is controlled to be slower and faster, respectively The thickness becomes thinner and thicker, and the contact resistance becomes smaller and larger, respectively, and the optical interference image changes accordingly, and when the oil film thickness reaches the nanometer unit, the optical interference image is still clear.
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