CN106647175B - A kind of measurement of movable body and apparatus for initializing - Google Patents
A kind of measurement of movable body and apparatus for initializing Download PDFInfo
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- CN106647175B CN106647175B CN201510731086.XA CN201510731086A CN106647175B CN 106647175 B CN106647175 B CN 106647175B CN 201510731086 A CN201510731086 A CN 201510731086A CN 106647175 B CN106647175 B CN 106647175B
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Abstract
The invention discloses a kind of measurement of movable body and apparatus for initializing, for measuring movable body in the displacement in the direction X, Y and Rz and carrying out initial reset to movable body, including three groups of two-dimensional measurement mechanisms, the decoupling mechanism in every group of two-dimensional measurement mechanism and four groups of initial reset mechanisms, wherein Liang Zu two-dimensional measurements mechanism is located in the X-direction of movable body, another set two-dimensional measurement mechanism is located in the Y-direction of movable body, and every group of two-dimensional measurement mechanism includes two orthogonal prismatic pairs being connect with movable body and a revolute pair;Decoupling mechanism is connect with revolute pair and one of prismatic pair;Liang Zu initial resets mechanism is located in the X-direction of movable body, and in addition Liang Zu initial resets mechanism is located in the Y-direction of movable body.The present invention can realize the decoupling of movable body Rx, Ry and Z-direction and realize movable body initial reset, effectively increase the precision of measurement and the stability of measuring device and working efficiency.
Description
Technical field
Present invention relates particularly to a kind of measurement of movable body and apparatus for initializing.
Background technology
With the development of photoetching machine technique, increasingly to the precision of workpiece table system, speed, acceleration and reliability requirement
It is high.Work stage improves exposure quality, needs measuring system to provide and accurately measure knot to realize the high accuracy positioning of exposure desk
Fruit and the vibration interference that outer bound pair exposure desk is isolated, but since work stage long stroke movement velocity, acceleration are higher, to bottom
The reaction force of frame is bigger, and excessive reaction force can feed back to measuring system, influence measurement accuracy.Therefore existing work
Part platform technology is all to balance quality module by installation to reduce or eliminate in work stage long stroke motion process to measuring system
Influence.
As shown in Figure 1, being a kind of existing structural schematic diagram of air-flotation type workpiece table system, include the bottom frame of fixed setting
Frame 101, the balance quality module 102 being connect with under(-)chassis 101, the Y-direction air-float guide rail being set on balance quality module 102
103, and the exposure desk 104 on Y-direction air-float guide rail 103.Wherein balance quality module 102 is real under the support of floating cushion
X, Y and Rz three-degree-of-freedom motion in existing plane, exposure desk 104 rely on the Y-direction air-float guide rail 103 and the X of itself to straight-line electric
Machine come realize long stroke move.According to the conservation of momentum, balance quality module 102 can absorb the reaction force of exposure desk 104 to subtract
Few exposure desk 104 moves the influence to measuring system, while extraneous vibration has been isolated to exposure desk 104 by the way that floating cushion is arranged
Interference.
However balance quality module 102 needs to realize initialization mould by a set of servo and measuring device at work
X, Y and Rz movement under formula, stand-alone mode and follow the mode and control.Interferometer is used in existing planar measuring technique
It measures and realizes accurate measurement, however this method needs to design light path, complicated, cost is higher;And existing two-dimensional grating ruler
Mensuration is although simple in structure, but installation accuracy requires height, and debugging difficulty is big, for larger-size balance quality module
Measurement accuracy can not ensure.
In view of the above-mentioned problems, occurring a kind of measurement of in-plane motion device and method therewith, three group one is utilized in the technology
The opposite optical grating ruler measurement component of dimension measures to complete X, Y and Rz, and this method is at low cost, and installation and debugging are easy, but still remain with
The deficiency of lower three aspect:One, when idler wheel moves along a straight line in slot in the measurement assembly, wheel outer ring generates larger cunning because compressing
Kinetic force of friction accelerates the abrasion of wheel outer ring, causes wheel to generate gap with slot, to substantially reduce measurement accuracy;Two, Wu Fashi
The decoupling of the deviation of Rx, Ry and Z-direction caused by component assembly error when now planar being moved to balance quality module;
Three, due to balance quality module in mechanical limit position small electromotor can not out movement, cause balance quality module cannot
It realizes initialization, reduces the working efficiency of measuring device.
Invention content
The present invention in order to overcome the above deficiency, provide a kind of decoupling that can realize movable body Rx, Ry and Z-direction and
It can realize movable body initial reset, and effectively improve measurement and the apparatus for initializing of the movable body of measurement accuracy.
In order to solve the above-mentioned technical problem, the technical scheme is that:A kind of measurement of movable body and apparatus for initializing,
For measuring movable body in the displacement in the direction X, Y and Rz and carrying out initial reset, including three groups of two-dimensional measurements to movable body
Mechanism, the decoupling mechanism in two-dimensional measurement mechanism described in every group and four groups of initial reset mechanisms, wherein two described in two groups
Dimension measuring mechanism is located in the X-direction of the movable body, and another set two-dimensional measurement mechanism is located at the Y-direction of the movable body
On, two-dimensional measurement mechanism described in every group includes two orthogonal prismatic pairs being connect with the movable body and a rotation
It is secondary;The decoupling mechanism is connect with the revolute pair and one of prismatic pair;Initial reset mechanism described in two groups is located at movement
In the X-direction of body, in addition initial reset mechanism described in two groups is located in the Y-direction of movable body.
Further, two-dimensional measurement mechanism described in every group include installation base plate, two groups on the installation base plate
First movement is secondary, on the installation base plate and both ends are separately connected the connecting plate of first movement pair, set on the company
The second prismatic pair, the Rz revolute pairs being connect with the movable body and the displacement being connect with first movement pair above fishplate bar are surveyed
Measure component, connect with the movable body in the middle part of the connecting plate, second prismatic pair and the Rz revolute pairs with the solution
Coupling mechanism connects.
Further, first movement pair described in every group include the first guide rail and be slidably connected with first guide rail the
One sliding block.
Further, institute's displacement measurement component include be set to the installation base plate on grating ruler reading head mounting plate, with
Grating ruler reading head that the grating ruler reading head mounting plate is fixedly connected and side and first in one of which first movement pair
Sliding block is fixedly connected, the grating scale that the other side is slidably connected with the grating ruler reading head.
Further, the second prismatic pair described in every group include the second guide rail and be slidably connected with second guide rail the
Two sliding blocks.
Further, the decoupling mechanism includes at least one piece flexible decoupling piece, and the thickness of the flexible decoupling piece is less than
0.1mm, and both ends are connect with second sliding block respectively.
Further, the flexible decoupling piece is equipped with one piece, and both ends are corresponding with the position of the second sliding block respectively, and top
Equipped with pressing plate, nut is equipped with above the pressing plate, the pressing plate, flexible decoupling piece and the second sliding block are equipped with and the nut phase
The screw hole of adaptation.
Further, the Rz revolute pairs include the bearing assembly mounting bracket being connect with the movable body, set on described
Bearing assembly in bearing assembly mounting bracket, the bearing assembly are connect with the flexible decoupling piece by connecting rod.
Further, the flexible decoupling piece is equipped with two pieces, and middle part is equipped with U-shaped opening, two pieces of flexible decoupling pieces
U-shaped opening along X to being oppositely arranged, nut, the flexible decoupling piece are equipped with above every piece of flexible decoupling piece left and right ends
It is equipped with screw hole compatible with the nut with the second sliding block.
Further, the Rz revolute pairs include the bearing assembly mounting bracket being connect with the movable body, set on described
Bearing assembly in bearing assembly mounting bracket, the bearing assembly lower end pass through the flexible U-shaped opening for decoupling piece and company
Fishplate bar connects, and the bearing assembly outer ring is fitted closely with the U-shaped opening.
Further, initial reset mechanism described in every group includes the magnet mounting plate being connect with the movable body, is set to
Rectangular magnet group on the magnet mounting plate, is set to the adjustable magnet mounting bracket being oppositely arranged with the magnet mounting plate
Magnet mounting base above adjustable magnet mounting bracket and the rectangular magnet in magnet mounting base, the rectangular magnet
Group is identical with the polarity of rectangular magnet opposite side.
Further, initial reset mechanism described in every group includes the coil group being connect with the movable body and the line
The adjustable magnet mounting bracket of circle group connection being oppositely arranged close to switch, with the coil group is set to the installation of adjustable magnet
Magnet mounting base above frame and the rectangular magnet in magnet mounting base.
Further, the magnet mounting plate is equipped with groove compatible with the rectangular magnet group, the rectangle magnetic
Iron is mounted in the groove;The magnet mounting base is equipped with the second groove compatible with the rectangular magnet, the square
Shape magnet is set in second groove.
Further, the adjustable magnet mounting bracket is equipped with several waist-shaped holes, and positioning column is equipped in the waist-shaped hole.
The measurement of movable body provided by the invention and apparatus for initializing, by the way that three groups of two-dimensional measurement mechanisms are arranged, and every
Decoupling mechanism is set in the group two-dimensional measurement mechanism, not only can accurately measure movable body in X to the displacement with Y-direction, and
And it can effectively realize the solution of the deviation of Rx, Ry and Z-direction caused by component assembly error when movable body planar moves
Coupling improves the precision of measurement and the stability of device;Initial reset mechanism is respectively set to Y-direction along the X of movable body simultaneously
To realize initial reset of the movable body in mechanical position limitation, the working efficiency of measuring device is improved.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of existing air-flotation type workpiece table system;
Fig. 2 is the structural schematic diagram of the measurement and apparatus for initializing embodiment 1 of movable body of the present invention;
Fig. 3 is the structural schematic diagram of the 1 two-dimensional measurement mechanism of measurement and apparatus for initializing embodiment of movable body of the present invention;
Fig. 4 is the sectional view of the 1 two-dimensional measurement mechanism of measurement and apparatus for initializing embodiment of movable body of the present invention;
Fig. 5 is the structural schematic diagram of the 1 initial reset mechanism of measurement and apparatus for initializing embodiment of movable body of the present invention;
Fig. 6 is the vertical view of the 1 initial reset mechanism of measurement and apparatus for initializing embodiment of movable body of the present invention;
Fig. 7 is that the measurement of movable body of the present invention and 1 movable body of apparatus for initializing embodiment are illustrated in the motion range of Y-direction
Figure.
Fig. 8 is the structural schematic diagram of the 2 two-dimensional measurement mechanism of measurement and apparatus for initializing embodiment of movable body of the present invention;
Fig. 9 is the structural schematic diagram of 2 decoupling mechanism of measurement and apparatus for initializing embodiment of movable body of the present invention;
Figure 10 is the vertical view of the 2 initial reset mechanism of measurement and apparatus for initializing embodiment of movable body of the present invention.
Shown in Fig. 1:101, under(-)chassis;102, quality module is balanced;103, Y-direction air-float guide rail;104, exposure desk;
Shown in Fig. 2-10:1, movable body;2, two-dimensional measurement mechanism;21, installation base plate;22, first movement pair;221,
One guide rail;222, the first sliding block;23, the second prismatic pair;231, the first guide rail;232, the first sliding block;24, Rz revolute pairs;241、
Bearing assembly mounting bracket;242, bearing assembly;243, connecting rod;25, displacement measurement component;251, grating ruler reading head is installed
Plate;252, grating ruler reading head;253, grating scale;26, connecting plate;3, decoupling mechanism;31, flexible decoupling piece;32, pressing plate;33, spiral shell
It is female;4, initial reset mechanism;41, magnet mounting plate;42, rectangular magnet group;43, adjustable magnet mounting bracket;431, waist-shaped hole;
44, magnet mounting base;45, rectangular magnet;46, the first groove;47, the second groove;48, coil group;49, close to switch;5, pacify
Frame up frame;6, small electromotor.
Specific implementation mode
The present invention is described in detail below in conjunction with the accompanying drawings.
Embodiment 1
As shown in Fig. 2, the present invention provides a kind of measurement of movable body and apparatus for initializing, exist for measuring movable body 1
X, the displacement in the directions Y and Rz and initial reset is carried out to movable body 1, which is located on installation frame 5, the installation
Frame 5 is fixed, and movable body 1 is moved with respect to installation frame 5 along the direction X, Y and Rz.Three and fortune are additionally provided on installation frame 5
The small electromotor 6 that kinetoplast 1 connects, two of which, to distribution, distinguish fortune of the controlled motion body 1 along tri- directions X, Y and Rz along X
It is dynamic.The device includes three groups of two-dimensional measurement mechanisms 2, decoupling mechanism 3, Yi Jisi in two-dimensional measurement mechanism 2 described in every group
Group initial reset mechanism 4, wherein two-dimensional measurement mechanism 2 described in two groups is located in the X-direction of the movable body 1, for measuring fortune
The displacement of kinetoplast 1 in the X direction, another set two-dimensional measurement mechanism 2 is located in the Y-direction of the movable body 1, for measuring
The displacement of movable body 1 in the Y direction, two-dimensional measurement mechanism 2 described in every group include that connect with the movable body 1 two groups are mutual
Vertical prismatic pair and one group of revolute pair realize two-dimensional measurement mechanism 2 with movable body 1 along the movement in the direction X, Y and Rz;It is described
Decoupling mechanism 3 is connect with the revolute pair and one of which prismatic pair, for the solution to movable body 1 on Rx, Ry and Z-direction
Coupling;Initial reset mechanism 4 described in two groups is located in the X-direction of movable body 1, for realizing the machinery limit of movable body 1 in the Y direction
Position when initial reset, in addition initial reset mechanism 4 described in two groups be located in the Y-direction of movable body 1, for realizing movable body
Initial reset when 1 mechanical position limitation in the X direction.
As shown in figure 3, two-dimensional measurement mechanism 2 described in every group includes installation base plate 21, is set on the installation base plate 21
Two groups of first movement pairs 22, on the installation base plate 21 and both ends are separately connected the connecting plate of the first movement pair 22
26, two the second prismatic pairs 23 for being mounted on the top of the connecting plate 26, the Rz revolute pairs 24 being connect with the movable body 1 and
The displacement measurement component 25 being connect with first movement pair 22,26 middle part of the connecting plate are connect with movable body 1, second movement
23 and Rz of pair revolute pairs 24 are connect with decoupling mechanism 3.Specifically, connecting plate 26 can be moved with movable body 1 along X or Y-direction,
First movement pair 22 and the second prismatic pair 23 is driven to move together simultaneously, displacement measurement component 25 is for measuring first movement pair 22
Displacement.
Please continue to refer to Fig. 3, first movement pair 22 described in every group include the first guide rail 221 and with first guide rail
221 the first sliding blocks 222 being slidably connected.Specifically, two groups of two-dimensional measurement mechanisms 2 in the X-direction of the movable body 1
Along X to setting, connecting plate 26 moves first guide rail 221 in X direction with movable body 1 at this time, while driving the first sliding block 222 together
Opposite first guide rail 221 is along X to moving;First guide rail 221 of one group of two-dimensional measurement mechanism 2 being located in the Y-direction of movable body 1
It is arranged along Y-direction, connecting plate 26 is moved with movable body 1 along Y-direction at this time, while the first sliding block 222 being driven to be led together with respect to first
Rail 221 is moved along Y-direction, and the length of the first guide rail 221 is more than the movement travel of movable body 1 in the Y direction.
Please continue to refer to Fig. 3, institute's displacement measurement component 25 includes the grating ruler reading head being set on the installation base plate 21
Mounting plate 251, the grating ruler reading head 252 being fixedly connected with the grating ruler reading head mounting plate 251 and side and one of which
The first sliding block 222 in first movement pair 22 is fixedly connected, the grating scale that the other side is slidably connected with the grating ruler reading head 252
253.Specifically, for positioned at the movable body 1 X-direction on two-dimensional measurement mechanism 2, grating scale 253 be set to Y negative directions
On first movement pair 22 in the first sliding block 222 be fixedly connected, when grating scale 253 and opposite first guide rail of the first sliding block 222
221 along X to when moving, the X of movable body 1 is read from grating ruler reading head 252 to displacement;For the Y-direction positioned at movable body 1
On two-dimensional measurement mechanism 2, grating scale 253 is fixed with the first sliding block 222 in the first movement pair 22 in the X negative directions to be connected
It connects, when grating scale 253 and opposite first guide rail 221 of the first sliding block 222 are moved along Y-direction, fortune is read from grating ruler reading head 252
The Y-direction displacement of kinetoplast 1.Since Liang Zu two-dimensional measurements mechanism 2 being arranged in the X-direction of movable body 1, when movable body 1 is along the side Rz
To when rotation, X that Liang Zu two-dimensional measurements mechanism 2 obtains to displacement difference, according to two X to the difference of displacement and with
The tangent relation equation of Y-direction displacement obtains the angle that movable body 1 rotates in the directions Rz, and then obtains movable body 1 in X, Y and Rz tri-
The displacement in a direction.
Please continue to refer to Fig. 3, the second prismatic pair 23 described in every group include the second guide rail 231 and with second guide rail
231 the second sliding blocks 232 being slidably connected.Specifically, the second prismatic pair 23 passes through decoupling mechanism 3 and Rz revolute pairs 24 and movable body
Second guide rail 231 of 1 connection, two groups of two-dimensional measurement mechanisms 2 being located in the X-direction of the movable body 1 is arranged along Y-direction, at this time
Second sliding block 232 is moved with respect to the second guide rail 231 along Y-direction with movable body 1;One group be located at the movable body 1 Y-direction on two
The second guide rail 231 of measuring mechanism 2 is tieed up along X to setting, at this time the second sliding block 232 with movable body 1 with respect to the second guide rail 231 along X
To movement;And second guide rail 231 length be more than the movement travel of movable body 1 in the X direction.
Preferably, the decoupling mechanism 3 includes at least one piece flexible decoupling piece 31, and the thickness of the flexible decoupling piece 31 is small
It is preferably 0.05mm~0.1mm in 0.1mm, the present embodiment, and both ends are connect with second sliding block 222 respectively, specifically,
Flexibility decoupling 31 material of piece is 0Cr18Ni9 type stainless steels, since the ratio of length and thickness is very big, when movable body 1 is due to part
When the deviation of Rx, Ry caused by rigging error and Z-direction, by the flexible deformation for decoupling the generation of piece 31 to reach Rx, Ry and Z
To the purpose of decoupling.
As shown in figure 4, the flexible decoupling piece 31 is equipped with one piece, both ends are corresponding with the position of the second sliding block 232 respectively,
And top is equipped with pressing plate 32,32 top of the pressing plate is equipped with nut 33, the pressing plate 32, flexible decoupling piece 31 and the second sliding block
232 are equipped with screw hole (not marked in figure) compatible with the nut 33.Specifically, pressing plate 32 is set to the second sliding block 232
Flexibility decoupling piece 31 is fixed with the second sliding block 232 by nut 33 for both ends.
Preferably, the Rz revolute pairs 24 include the bearing assembly mounting bracket 241 being connect with the movable body 1, are set to
Bearing assembly 242 in bearing assembly mounting bracket 241, the bearing assembly 242 passes through with the flexible decoupling piece 31 to be connect
Bar 243 connects.Specifically, the middle part of bearing assembly 242 and flexible decoupling piece 31 is equipped with lead to compatible with connecting rod 243
Hole carries out Rz azimuthal rotational motions by bearing assembly 242 and movable body 1, while making the of both ends by connecting plate 26 together
Different displacements occurs for one sliding block 222, to calculate the Rz rotation amounts of movable body 1.
As shown in figure 5, initial reset mechanism 4 described in every group include the magnet mounting plate 41 being connect with the movable body 1,
The adjustable magnet that rectangular magnet group 42 and the magnet mounting plate 41 on the magnet mounting plate 41 are oppositely arranged is pacified
Shelve 43, the magnet mounting base 44 above adjustable magnet mounting bracket 43 and the rectangle in magnet mounting base 44
Magnet 45, the rectangular magnet group 42 are identical with the polarity of 45 opposite side of rectangular magnet.Preferably, it is set on magnet mounting plate 41
There are first groove 46 compatible with the rectangular magnet group 42, the rectangular magnet group 42 to be set to 46 in first groove;
The magnet mounting base 44 is equipped with second groove 47 compatible with the rectangular magnet 45, and the rectangular magnet 45 is set to institute
It states in the second groove 47.Specifically, adjustable magnet mounting bracket 43 is set on installation frame 5, the relative position of the two is adjustable, square
Shape group of magnets 42 includes several rectangular magnets, and the quantity of rectangular magnet is 3 in the present embodiment, and rectangular magnet group 42 passes through epoxy
Resin glue is bonded in 46 in the first groove of the magnet mounting plate 41;The rectangular magnet 45 is bonded in by epoxide-resin glue
In second groove 47 of magnet mounting base 44;When rectangular magnet group 42 with movable body 1 move to X to or when Y-direction mechanical position limitation, square
Shape group of magnets 42 and the position of rectangular magnet 45 are mutually close, due to the polarity of 45 opposite side of rectangular magnet group 42 and rectangular magnet
It is identical, therefore the two generates repulsion, and movable body 1 is pushed to be detached with mechanical position limitation, realizes zero-bit initial reset, substantially increases
The working efficiency of device.
As shown in fig. 6, adjustable magnet mounting bracket 43 is equipped with several waist-shaped holes 431, it is fixed to be equipped in the waist-shaped hole 431
Position column, the internal diameter of the waist-shaped hole 431 match with the positioning column outer diameter.Specifically, positioning column is fixed at installation frame 5
On, by adjusting the relative position of positioning column and waist-shaped hole 431, changes rectangular magnet group 42 and the spacing d2 of rectangular magnet 45 comes
Change the size of magnetic force.
As shown in fig. 7, set the normal range of movable body 1 in the Y direction as (- d4, d4), mechanical position limitation ranging from (-
D3-d4, d3+d4), if the length of rectangular magnet 45 is m, the length of rectangular magnet group 42 is d1, then should meet relationship:When movable body 1 is in normal range, initial reset mechanism 4 does not have an effect to movable body 1
Power, when movable body 1 is when normal range (NR) is between mechanical position limitation range, initial reset mechanism 4 provides initial reset to movable body 1
Power, and closer to mechanical position limitation, the active force is bigger.
Embodiment 2
As shown in figure 9, as different from Example 1, the flexible decoupling piece 31 is equipped with two pieces, and flexibility decouples in piece 31
Portion is equipped with U-shaped opening, and for the U-shaped opening of two pieces of flexible decoupling pieces 31 along X to being oppositely arranged, every piece of flexibility decouples piece 31
Nut 33 is equipped with above left and right ends, the flexible decoupling piece 31 and the second sliding block 232 are equipped with and are adapted with the nut 33
Screw hole (not marked in figure), by nut 33 to flexibility decoupling piece 31 be fixed with the second sliding block 232.Specifically, flexible
Decoupling 31 material of piece is 0Cr18Ni9 type stainless steels, since the ratio of length and thickness is very big, when movable body 1 is due to component assembly
When the deviation of Rx, Ry caused by error and Z-direction, by the flexible deformation for decoupling the generation of piece 31 to reach Rx, Ry and Z-direction solution
The purpose of coupling.
As shown in figure 8, the Rz revolute pairs 24 include the bearing assembly mounting bracket 241 being connect with the movable body 1, set
In the bearing assembly 242 in bearing assembly mounting bracket 241,242 lower end of the bearing assembly passes through the flexible decoupling piece 31
U-shaped opening 311 connect with connecting plate 26,242 outer ring of bearing assembly is fitted closely with the U-shaped opening 311, flexibility decoupling piece
31 carry out Rz azimuthal rotational motions together by bearing assembly 242 and movable body 1, while making the first of both ends by connecting plate 26
Different displacements occurs for sliding block 222, to calculate the Rz rotation amounts of movable body 1.
As shown in Figure 10, initial reset mechanism 4 described in every group include the coil group 48 being connect with the movable body 1, with
The adjustable magnet mounting bracket 43 of the connection of coil group 48 being oppositely arranged close to switch 49, with coil group 48 is set to adjustable magnetic
The magnet mounting base 44 and the rectangular magnet 45 in magnet mounting base 44 of 43 top of iron mounting bracket.Preferably, the magnetic
Iron mounting base 44 is equipped with second groove 47 compatible with the rectangular magnet 45, and the rectangular magnet 45 is set to described second
In groove 47.Specifically, adjustable magnet mounting bracket 43 is set on installation frame 5, the relative position of the two is adjustable, coil group 48
Including several coils, in the present embodiment, the quantity of coil is 3, and coil group 48 be powered the magnetic field generated later polarity and
The polarity of 45 opposite side of rectangular magnet is identical, and coil group 48 is bonded in the of the magnet mounting plate 41 by epoxide-resin glue
46 in one groove;The rectangular magnet 45 is bonded in by epoxide-resin glue in the second groove of magnet mounting base 44;Work as coil
Group 48 with movable body 1 move to X to or when Y-direction mechanical position limitation, detect signal close to switch 49, make the energization of coil group 48 and produce
Magnetisation field interacts with rectangular magnet 45 and generates repulsion, and movable body 1 is pushed to complete initial reset.
Preferably, adjustable magnet mounting bracket 43 is equipped with several waist-shaped holes 431, and positioning is equipped in the waist-shaped hole 431
The outer diameter of column, positioning column is adapted with the minimum diameter of waist-shaped hole 431, and the relative position of the two is adjustable.Specifically, positioning column is solid
Surely it is set on installation frame 5, by adjusting the relative position of positioning column and waist-shaped hole 431, changes rectangular magnet group 42 and rectangle
The spacing of magnet 45 changes the size of magnetic force.This kind of design method is taken to compare the shadow that embodiment 1 works normally movable body 1
Ring smaller, and the adjustable extent bigger of magnetic force.
In conclusion measurement and the apparatus for initializing of movable body provided by the invention, by the way that three groups of two-dimensional measurement machines are arranged
Structure 2, and in two-dimensional measurement mechanism 2 described in every group be arranged decoupling mechanism 3, not only can accurately measure movable body 1 X to and Y
To displacement, and can effectively realize Rx, Ry and Z caused by component assembly error when movable body 1 planar moves
The decoupling of the deviation in direction improves the precision of measurement and the stability of device;It is set respectively to Y-direction along the X of movable body 1 simultaneously
Initial reset mechanism 4 is set to realize initial reset of the movable body 1 in mechanical position limitation, improves the work effect of measuring device
Rate.
Although embodiments of the present invention are illustrated in specification, these embodiments are intended only as prompting,
It should not limit protection scope of the present invention.It is equal that various omission, substitution, and alteration are carried out without departing from the spirit and scope of the present invention
It should be included within the scope of the present invention.
Claims (14)
1. measurement and the apparatus for initializing of a kind of movable body, for measuring movable body in the displacement in the direction X, Y and Rz and to fortune
Kinetoplast carries out initial reset, which is characterized in that including three groups of two-dimensional measurement mechanisms, in two-dimensional measurement mechanism described in every group
Decoupling mechanism and four groups of initial reset mechanisms, wherein two-dimensional measurement mechanism described in two groups is located at the X-direction of the movable body
On, another set two-dimensional measurement mechanism is located in the Y-direction of the movable body, two-dimensional measurement mechanism described in every group include with it is described
The two orthogonal prismatic pairs and a revolute pair of movable body connection;The decoupling mechanism and the revolute pair and wherein
One prismatic pair connection;Initial reset mechanism described in two groups is located in the X-direction of movable body, in addition initial reset machine described in two groups
Structure is located in the Y-direction of movable body;Wherein, the X-direction is vertical with the Y-direction, and the directions Rz are to be revolved by axis of Z-direction
Turn, the vertical plane where the X-direction and the Y-direction of the Z-direction.
2. measurement and the apparatus for initializing of movable body according to claim 1, which is characterized in that two-dimensional measurement described in every group
Mechanism includes installation base plate, two groups of first movements on the installation base plate are secondary, is set on the installation base plate and two
End is separately connected the connecting plate, the second prismatic pair above the connecting plate and the movable body of the first movement pair
The Rz revolute pairs of connection and the displacement measurement component being connect with first movement pair, the connecting plate middle part and the movable body
Connection, second prismatic pair and the Rz revolute pairs are connect with the decoupling mechanism.
3. measurement and the apparatus for initializing of movable body according to claim 2, which is characterized in that first movement described in every group
Secondary the first sliding block for including the first guide rail and being slidably connected with first guide rail.
4. measurement and the apparatus for initializing of movable body according to claim 3, which is characterized in that institute's displacement measurement component
Include grating ruler reading head mounting plate on the installation base plate, the grating being fixedly connected with the grating ruler reading head mounting plate
Ruler reading head and side are fixedly connected with the first sliding block of one of which first movement pair, the other side and the grating ruler reading head
The grating scale being slidably connected.
5. measurement and the apparatus for initializing of movable body according to claim 3, which is characterized in that the second movement described in every group
Secondary the second sliding block for including the second guide rail and being slidably connected with second guide rail.
6. measurement and the apparatus for initializing of movable body according to claim 5, which is characterized in that the decoupling mechanism includes
The thickness of at least one piece flexible decoupling piece, the flexible decoupling piece is less than 0.1mm, and both ends connect with second sliding block respectively
It connects.
7. measurement and the apparatus for initializing of movable body according to claim 6, which is characterized in that the flexible decoupling piece is set
There is one piece, both ends are corresponding with the position of the second sliding block respectively, and top is equipped with pressing plate, and nut, institute are equipped with above the pressing plate
It states pressing plate, the flexible decoupling piece and the second sliding block and is equipped with screw hole compatible with the nut.
8. measurement and the apparatus for initializing of movable body according to claim 7, which is characterized in that the Rz revolute pairs include
The bearing assembly mounting bracket that is connect with the movable body, the bearing assembly in the bearing assembly mounting bracket, it is described
Bearing assembly is connect with the flexible decoupling piece by connecting rod.
9. measurement and the apparatus for initializing of movable body according to claim 6, which is characterized in that the flexible decoupling piece is set
Have two pieces, middle part is equipped with U-shaped opening, the U-shaped openings of two pieces of flexible decoupling pieces along X to being oppositely arranged, every piece of institute
It states and is equipped with nut above flexible decoupling piece left and right ends, the flexible decoupling piece and the second sliding block are equipped with and are mutually fitted with the nut
The screw hole matched.
10. measurement and the apparatus for initializing of movable body according to claim 9, which is characterized in that the Rz revolute pairs packet
Include the bearing assembly mounting bracket being connect with the movable body, the bearing assembly in the bearing assembly mounting bracket, institute
Stating bearing assembly lower end passes through the flexible U-shaped opening for decoupling piece to be connect with connecting plate, the bearing assembly outer ring and the U
Type opening fits closely.
11. measurement and the apparatus for initializing of movable body according to claim 1, which is characterized in that initially multiple described in every group
Position mechanism include magnet mounting plate connect with the movable body, the rectangular magnet group on the magnet mounting plate, and
The adjustable magnet mounting bracket that the magnet mounting plate is oppositely arranged, the magnet installation above adjustable magnet mounting bracket
Seat and the rectangular magnet in magnet mounting base, the polarity of the rectangular magnet group and the rectangular magnet opposite side
It is identical.
12. measurement and the apparatus for initializing of movable body according to claim 1, which is characterized in that initially multiple described in every group
Position mechanism include coil group connect with the movable body, connect with the coil group close to switch, and the coil group
The adjustable magnet mounting bracket that is oppositely arranged, the magnet mounting base above adjustable magnet mounting bracket and it is set to magnet
Rectangular magnet in mounting base.
13. according to the measurement of claim 11 or 12 any one of them movable bodies and apparatus for initializing, which is characterized in that described
Magnet mounting plate is equipped with the first groove compatible with the rectangular magnet group, and it is recessed that the rectangular magnet is mounted on described first
In slot;The magnet mounting base is equipped with the second groove compatible with the rectangular magnet, and the rectangular magnet is set to described
In second groove.
14. according to the measurement of claim 11 or 12 any one of them movable bodies and apparatus for initializing, which is characterized in that described
Adjustable magnet mounting bracket is equipped with several waist-shaped holes, and positioning column is equipped in the waist-shaped hole.
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CN101206410A (en) * | 2007-12-17 | 2008-06-25 | 上海微电子装备有限公司 | Balance mass orientation system for workpiece platform |
CN101702078A (en) * | 2004-07-27 | 2010-05-05 | Asml荷兰有限公司 | Lithographic apparatus and method for calibrating the same |
CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
CN104677271A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Device and method for adjusting zero sensor |
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2003026838A1 (en) * | 2001-09-24 | 2003-04-03 | Agency For Science, Technology And Research | Decoupled planar positioning system |
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2015
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Patent Citations (4)
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CN101702078A (en) * | 2004-07-27 | 2010-05-05 | Asml荷兰有限公司 | Lithographic apparatus and method for calibrating the same |
CN101206410A (en) * | 2007-12-17 | 2008-06-25 | 上海微电子装备有限公司 | Balance mass orientation system for workpiece platform |
CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
CN104677271A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Device and method for adjusting zero sensor |
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