CN107101793A - Multi-direction motion platform - Google Patents
Multi-direction motion platform Download PDFInfo
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- CN107101793A CN107101793A CN201710447949.XA CN201710447949A CN107101793A CN 107101793 A CN107101793 A CN 107101793A CN 201710447949 A CN201710447949 A CN 201710447949A CN 107101793 A CN107101793 A CN 107101793A
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- motion
- motion platform
- supporting plate
- slide rail
- electric motors
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- 230000033001 locomotion Effects 0.000 title claims abstract description 121
- 230000007246 mechanism Effects 0.000 claims abstract description 47
- 229910000831 Steel Inorganic materials 0.000 claims description 35
- 239000010959 steel Substances 0.000 claims description 35
- 230000005540 biological transmission Effects 0.000 claims description 10
- 230000008901 benefit Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/06—Multidirectional test stands
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
Abstract
Present invention is disclosed a kind of multi-direction motion platform, including bottom plate, X on bottom plate is arranged on to motion, Y-direction motion and rotational motion mechanism, X to motion include the X that is arranged on bottom plate to line slide rail, be set in X to the X on line slide rail to sliding block, be fixedly mounted on X to the X on sliding block to supporting plate and X to drive mechanism;Y-direction motion includes being arranged on X to the Y-direction line slide rail on supporting plate, the Y-direction sliding block being set on Y-direction line slide rail, the Y-direction supporting plate being fixedly mounted on Y-direction sliding block and Y-direction drive mechanism;Rotational motion mechanism includes rotary drive mechanism, in addition to the rack being arranged on rotary drive mechanism, and be arranged on Y-direction supporting plate gear, linkage, rotate element, rotate element is connected by linkage with gear.The multi-direction motion platform of the present invention is flexible, make simple, can not only realize high accuracy, move at high speed, additionally it is possible to realize the moving interpolation of Frequency.
Description
Technical field
The invention belongs to manufacture and testing field, and in particular to a kind of platform that can be moved with multiple directions.
Background technology
Multi-direction motion platform is widely used in manufacture and testing field.Existing multi-direction motion platform mainly passes through
The superposition of " electric rotating machine+screw mandrel " linear motion platform and electric rotating machine is realized.Due to the driving of creep and the rotation of screw mandrel
The limitation of mode, while existing electric rotating machine quality/value exerted oneself is larger so that existing multi-direction motion platform response
Slowly, stroke is short, and low precision, payload is small, greatly constrains the development of manufacturing industry and other industry.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of platform that can be moved with multiple directions, can effectively solve
The problem of certainly existing motion platform low-response, short stroke, low precision, small payload.
In order to solve the above technical problems, the technical solution adopted by the present invention is, a kind of multi-direction motion platform, including bottom
Plate, the X being arranged on the bottom plate are to motion, Y-direction motion and rotational motion mechanism;The X is to motion
Including X to motion platform and X to drive mechanism, the X that the X includes being arranged on the bottom plate to motion platform is slided to straight line
Rail, be set in the X to the X on line slide rail to sliding block, be fixedly mounted on the X to the X on sliding block to supporting plate;The Y-direction
Motion includes Y-direction motion platform and Y-direction drive mechanism, and the Y-direction motion platform includes being arranged on the X on supporting plate
Y-direction line slide rail, the Y-direction sliding block being set on the Y-direction line slide rail, the Y-direction support being fixedly mounted on the Y-direction sliding block
Plate;The rotational motion mechanism includes rotary drive mechanism, in addition to the rack being arranged on the rotary drive mechanism, and
Gear on the Y-direction supporting plate, linkage, rotate element are arranged on, the rotate element passes through the linkage and institute
Gear connection is stated, wherein, the rotary drive mechanism drives gear movement described in the rack drives, so as to pass through the connecting rod
Mechanism drives the rotate element rotation.
In addition, the present invention also proposes following attached technical scheme.
It is preferred that, the gear is sector gear, and the linkage is quadric chain, and the rotate element is to turn
Disk.
It is preferred that, the linkage includes the first quadric chain, the second quadric chain, and the rotate element passes through
Bearing is installed in rotation on the Y-direction supporting plate.
It is preferred that, the X to drive mechanism include be arranged on the bottom plate on X is to linear electric motors magnet steel and is fixed on
The X is to the X on supporting plate to linear motor coil;The X is provided at both ends with X to locating part to line slide rail.
It is preferred that, the X also includes the X being arranged on the bottom plate to motion to grating scale and installed in described
X is to the X on supporting plate to grating ruler reading head.
It is preferred that, the Y-direction drive mechanism includes the Y-direction linear electric motors magnet steel being arranged on the bottom plate and is connected to
Y-direction linear motor coil on Y-direction supporting plate;The Y-direction line slide rail is provided at both ends with Y-direction locating part.
It is preferred that, the Y-direction motion also includes Y-direction transmission device, and the Y-direction transmission device includes Y-direction and is driven cunning
Block, Y-direction drive linear slide rail, the Y-direction driving block are connected on the Y-direction linear motor coil by pinboard, the Y
It is arranged on to drive linear slide rail on the Y-direction supporting plate, the Y-direction driving block is set on the Y-direction drive linear slide rail.
It is preferred that, the Y-direction motion also includes the Y-direction grating scale being arranged on bottom plate, and installed in Y-direction straight line
Y-direction grating ruler reading head on motor coil.
It is preferred that, the rotary drive mechanism includes the direction of rotation linear electric motors magnet steel being arranged on the Y-direction supporting plate
And it is fixed on the linear motor coil on link block.
It is preferred that, the rotational motion mechanism also includes the grating scale being arranged on the direction of rotation linear electric motors magnet steel
And the grating ruler reading head on the link block.
Compared to prior art, the advantage of the invention is that:The X of the multi-direction motion platform of the present invention is to motion and Y
To motion, coordinated using line slide rail and sliding block, X is directly driven respectively to motion platform and Y by two linear electric motors
To motion platform, realize that X, to the motion of motion platform and the both direction of Y-direction motion platform, greatly simplify mechanical structure.This
The rotation of invention rotate element is, by rotary drive mechanism drives one group of quadric chain by rack-and-pinion, it is driven again
One group of quadric chain and realize, transmission is accurate and efficiency high.
The multi-direction motion platform of the present invention relies on the advantage of basic machine, can not only with reference to existing movement control technology
It is enough to realize high accuracy, move at high speed, additionally it is possible to realize the moving interpolation of Frequency.
The multi-direction motion platform of the present invention is flexible, make simple, both can be used for the technique stream such as plug-in unit, dispensing, soldering
Journey, can be used for applying forced vibration to the model of the industries such as building or space flight, complete dynamometry and the vibration measuring experiment of model.
Brief description of the drawings
Fig. 1 is the schematic perspective view of multi-direction motion platform of the invention.
Fig. 2 be the bottom plate of multi-direction motion platform of the invention, X to motion combine schematic perspective view.
Fig. 3 is the bottom plate of multi-direction motion platform of the invention, X to motion, the three-dimensional signal of Y-direction motion combination
Figure.
Fig. 4 is the Y-direction supporting plate of multi-direction motion platform of the invention, rotational motion mechanism combination schematic perspective view.
Fig. 5 is the rotate element of multi-direction motion platform of the invention and the assembling schematic diagram of bearing.
Fig. 6 is the rotational motion mechanism sketch of multi-direction motion platform of the invention.
Fig. 7 is the control principle drawing of multi-direction motion platform of the invention.
Wherein,
1. bottom plate 2.X is to sliding block 3.X to line slide rail
4.X is to locating part 5.X to supporting plate 7.X to linear electric motors magnet steel
8.X is to linear motor coil 9.X to grating ruler reading head 10.X to grating scale
11.Y is to linear motor coil 12.Y to the line slide rail of linear electric motors magnet steel 13.
14.Y is to driving block 15.Y to drive linear slide rail 16.Y to grating ruler reading head
17.Y is to grating scale 18.Y to supporting plate 19.Y to sliding block
20.Y is to line slide rail 21.Y to the direction of rotation linear electric motors magnet steel of locating part 22.
23. the grating scale of 24. sliding block of line slide rail 25.
26. the linear motor coil of 27. link block of grating ruler reading head 28.
29. the four-bar mechanism of 30. gear of rack 31. first
32. the four-bar mechanism of 33. bearing tabletting of bearing 34. second
35.PC machine 36.PAC 37.X spindle motor drivers
The rotate element of 39. electric rotating machine driver of 38.Y spindle motors driver 40.
41. the square opening 71.U shape grooves of pinboard 51.
122.U shape groove 221.U shape grooves
Embodiment
Technical solution of the present invention is further non-limitingly described in detail below in conjunction with preferred embodiment and its accompanying drawing.
As shown in Figures 1 to 7, multi-direction motion platform of the invention includes bottom plate 1, is arranged on X on bottom plate 1 to fitness machine
Structure, Y-direction motion and rotational motion mechanism.
As shown in Figure 1 and Figure 2, X includes X to drive mechanism, X to motion platform to motion.X to drive mechanism be X to
Linear electric motors, including X is to linear electric motors magnet steel 7 and X to linear motor coil 8.X includes X to line slide rail to motion platform
3rd, X is to sliding block 2, X to supporting plate 5.
Two X is bolted on bottom plate 1 respectively to line slide rail 3, in order to realize smooth fortune of the X to motion
Dynamic, two X be arranged in parallel to line slide rail 3.X is slideably set in X on line slide rail 3 to sliding block 2, and X passes through to supporting plate 5
X is bolted to on sliding block 2.During assembling, X will be close to X to the side of sliding block 2 to the positioning side on supporting plate 5, with ensure X to
The side of supporting plate 5 is parallel to line slide rail 3 with X, further ensures that the X directions of motion and Y motion direction can be vertical.
X is fitted on the corresponding positioning side of bottom plate 1 and is bolted on bottom plate 1 to linear electric motors magnet steel 7.X to
Linear electric motors magnet steel 7 is provided with U-lag 71.X is fixedly mounted on X to the side of supporting plate 5 to linear motor coil 8, and is arranged into X
Into the U-lag 71 of linear electric motors magnet steel 7.It is preferred that, U-lags 71 of the X to linear motor coil 8 and X to linear electric motors magnet steel 7
The air gap of two side is identical.
The two ends of two X to line slide rails 3 are provided with X to locating part 4, to ensure X to supporting plate 5 always in fixed range
Interior motion.X is jointly mounted on bottom plate 1 to grating scale 10, it is preferred that X is parallel to the direction of motion with X to grating scale 10.X is to support
Square opening 51 is formed on plate 5, the square opening 51 can also be other shapes.X is arranged on X to supporting plate 5 to grating ruler reading head 9
Square opening 51 side.It is preferred that, X is be arranged in parallel to grating ruler reading head 9 and X to grating scale 10 and gap is suitable.
As shown in Figure 1 to Figure 3, Y-direction motion includes Y-direction drive mechanism, Y-direction transmission device, Y-direction motion platform.Y-direction
Drive mechanism is Y-direction linear electric motors, including Y-direction linear electric motors magnet steel 12 and Y-direction linear motor coil 11.Y-direction transmission device
Including Y-direction driving block 14 and Y-direction drive linear slide rail 15.Y-direction motion platform includes Y-direction line slide rail 20, Y-direction sliding block
19th, Y-direction supporting plate 18.
Two Y-direction line slide rails 20 are bolted on X on supporting plate 5 respectively, in order to realize the flat of Y-direction motion
Steady motion, two Y-direction line slide rails 20 be arranged in parallel.The two ends of two Y-direction line slide rails 20 are provided with Y-direction locating part 21,
To ensure that Y-direction supporting plate 18 is moved in fixed range always.
Y-direction linear electric motors magnet steel 12 is fitted on the corresponding positioning side of bottom plate 1 and is bolted on bottom plate 1.Y
Linear electric motors magnet steel 12 is provided with U-lag 122, the line slide rail 13 of Y-direction linear motor coil 11 is bolted installation
On the relevant position of Y-direction linear electric motors magnet steel 12.
During assembling, Y-direction linear motor coil 11 is attached on pinboard 41, and slips into the U-shaped of Y-direction linear electric motors magnet steel 12
In groove 122.It is preferred that, Y-direction linear motor coil 11 and the air gap phase of the two side of U-lag 122 of Y-direction linear electric motors magnet steel 12
Together.Afterwards, Y-direction driving block 14 is installed on pinboard 41, Y-direction drive linear slide rail 15 is assembled to Y along positioning side
Relevant position on supporting plate 18, then slides into Y-direction drive linear slide rail 15 in Y-direction driving block 14.Afterwards, by Y-direction
Supporting plate 18 is bolted on Y-direction sliding block 19.After assembling, Y-direction sliding block 19 is slideably set in Y-direction line slide rail 20
On.
Y-direction grating scale 17 is jointly mounted on bottom plate 1, it is preferred that Y-direction grating scale 17 is parallel with the Y-direction direction of motion.Y-direction
Grating ruler reading head 16 is arranged on Y-direction linear motor coil 11, it is preferred that Y-direction grating ruler reading head 16 and Y-direction grating scale 17
It is arranged in parallel and air gap is suitable.
As shown in Figure 4, Figure 5, rotational motion mechanism includes rotary drive mechanism, rack 29, gear 30, linkage, rotation
Turn element 40.It is preferred that, gear 30 is sector gear, naturally it is also possible to for that can realize the other shapes of its transmission agency.It is preferred that
, linkage is quadric chain, naturally it is also possible to for that can realize the other shapes of its transmission agency.
Rotary drive mechanism is direction of rotation linear electric motors, including direction of rotation linear electric motors magnet steel 22 and linear electric motors
Coil 28.Direction of rotation linear electric motors magnet steel 22 fits on the corresponding positioning side of Y-direction supporting plate 18 and is bolted peace
On Y-direction supporting plate 18.Line slide rail 23 is mounted by means of bolts on direction of rotation linear electric motors magnet steel 22 along positioning side
On.
Grating scale 25 is arranged on direction of rotation linear electric motors magnet steel 22, it is preferred that grating scale 25 and direction of rotation straight line
The direction of motion of motor is parallel.Grating ruler reading head 26 is arranged on link block 27, and linear motor coil 28 is arranged on link block
On 27.Direction of rotation linear electric motors magnet steel 22 is provided with U-lag 221.During assembling, by the above-mentioned part and straight line assembled
Motor coil 28 slides into the U-lag 221 of direction of rotation linear electric motors magnet steel 22, and link block 27 is consolidated by bolt together
Determine onto sliding block 24, after the completion of assembling, sliding block 24 is slidably coupled with line slide rail 23.It is preferred that, grating ruler reading head 26 with
Grating scale 25 be arranged in parallel and air gap is suitable.It is preferred that, the U-shaped of linear motor coil 28 and direction of rotation linear electric motors magnet steel 22
The air gap of the two side of groove 221 is suitable.Rack 29 is bolted on linear motor coil 28.
As shown in Figure 4, Figure 5, rotational motion mechanism also includes bearing 32 and bearing tabletting 33.It is preferred that, bearing 32 is
Deep groove ball bearing.During assembling, in the bearing chamber that bearing 32 is pressed into Y-direction supporting plate 18, bearing 32 is interference fitted with bearing locular wall, it
Bearing tabletting 33 is pressed on the outer ring of bearing 32 afterwards, and is bolted.
Linkage includes the first quadric chain 31 and the second quadric chain 34.It is preferred that, the first quadric chain
31 and second quadric chain 34 be parallel four-bar linkage.It is preferred that, rotate element 40 is rotating disk, and rotate element 40 is connected
On the second quadric chain 34.
During assembling, on the inner ring on the shaft shoulder top of the multi-diameter shaft of rotate element 40 to bearing 32 and it will be bolted.Will
Gear 30 is pivotally mounted on the corresponding pin of Y-direction supporting plate 18, and ensures that gear 30 can fully be engaged with rack 29.It
Afterwards, the connecting rod of the first quadric chain 31 and the second quadric chain 34 is coupled successively, as shown in Figure 6.During work, rotation is driven
Motivation structure driving rack 29 is moved with moving gear 30, so as to by the first quadric chain 31, the second quadric chain 34, drive
Rotate element 40 is rotated.
As shown in fig. 7, PC 35 is the host computer of multi-direction motion platform of the invention, PAC36 is the multi-direction fortune of the present invention
The slave computer of moving platform, both transmit instruction and data by Modbus TCP/IP bus protocols.PAC36 drives with X-axis motor
Device 37, y-axis motor driver 38 and electric rotating machine driver 39 transmit instruction and data by EtherCAT bus protocols.Its
In, X-axis motor driver 37 and X are to linear electric motors (X is constituted to linear electric motors magnet steel 7 and X to linear motor coil 8) and X
The grating (X is constituted to grating ruler reading head 9 and X to grating scale 10) of axle constitutes a closed-loop control system.Y-axis motor drives
Device 38 and Y-direction linear electric motors (Y-direction linear electric motors magnet steel 12 and Y-direction linear motor coil 11 are constituted) and the grating (Y-direction of Y-axis
Grating ruler reading head 16 and Y-direction grating scale 17 are constituted) constitute a closed-loop control system.Electric rotating machine driver 38 and rotation
Direction linear electric motors (direction of rotation linear electric motors magnet steel 22 and linear motor coil 28 are constituted) and direction of rotation linear electric motors
Grating (grating scale 25 and grating ruler reading head 26 are constituted) constitute a closed-loop control system.
The operation principle of the multi-direction motion platform of the present invention is as follows.
The X constituted from X to linear electric motors magnet steel 7 and X to linear motor coil 8 is to linear electric motors, and direct drive is from X to cunning
The X that block 2, X are constituted to supporting plate 5 to line slide rail 3 and X is to motion platform.X is to the real time position of motion platform from X to grating scale
Reading head 9 and X feed back to grating scale 10.In order to ensure X can be moved safely, it is necessary to X to motion platform in fixed position
The range of movement of platform is constrained to locating part 4.
The Y-direction linear electric motors being made up of Y-direction linear electric motors magnet steel 12 and Y-direction linear motor coil 11, are driven by Y-direction and slided
The transmission device that block 14 and Y-direction drive linear slide rail 15 are constituted, directly drives by Y-direction supporting plate 18, Y-direction sliding block 19 and Y-direction straight line
The Y-direction motion platform that slide rail 20 is constituted.The real time position of Y-direction motion platform is by Y-direction grating ruler reading head 16 and Y-direction grating scale 17
Feedback.In order to ensure Y-direction motion platform is capable of the motion in fixed position of safety, it is necessary to which Y-direction locating part 21 constrains platform
Range of movement.
The direction of rotation linear electric motors being made up of direction of rotation linear electric motors magnet steel 22 and linear motor coil 28, pass through tooth
The drive gear 30 of bar 29 drives the first quadric chain 31, then drives the second quadric chain by the first quadric chain 31
34, the purpose for driving rotate element 40 to rotate is reached with this.The real time position that rotate element 40 is rotated is according to grating scale 25 and light
The real time position that grid ruler reading head 26 feeds back is resolved by kinematics and obtained.
The X of the multi-direction motion platform of the present invention is matched somebody with somebody to motion and Y-direction motion using line slide rail and sliding block
Close, directly drive X respectively to motion platform and Y-direction motion platform by two linear electric motors, realize X to motion platform and Y-direction
The motion of the both direction of motion platform, greatly simplify mechanical structure.The rotation of rotate element of the present invention is by rotation driving
Mechanism drives one group of quadric chain by rack-and-pinion, it is driven one group of quadric chain again and is realized, transmission essence
True and efficiency high.
The multi-direction motion platform of the present invention relies on the advantage of basic machine, can not only with reference to existing movement control technology
It is enough to realize high accuracy, move at high speed, additionally it is possible to realize the moving interpolation of Frequency.
The multi-direction motion platform of the present invention is flexible, make simple, both can be used for the technique stream such as plug-in unit, dispensing, soldering
Journey, can be used for applying forced vibration to the model of the industries such as building or space flight, complete dynamometry and the vibration measuring experiment of model.
It is pointed out that the technical concepts and features of above-mentioned preferred embodiment only to illustrate the invention, its object is to
Person skilled in the art can understand present disclosure and implement according to this, the protection of the present invention can not be limited with this
Scope.Any equivalent change or modification in accordance with the spirit of the invention, should all be included within the scope of the present invention.
Claims (10)
1. a kind of multi-direction motion platform, including bottom plate (1), the X that is arranged on the bottom plate (1) are moved to motion, Y-direction
Mechanism and rotational motion mechanism;
The X includes X to motion platform and X to drive mechanism to motion, and the X includes being arranged on described to motion platform
X on bottom plate (1) to line slide rail (3), be set in the X to the X on line slide rail (3) to sliding block (2), be fixedly mounted on institute
X is stated to the X on sliding block (2) to supporting plate (5);
The Y-direction motion includes Y-direction motion platform and Y-direction drive mechanism, and the Y-direction motion platform includes being arranged on described
X pacifies to the Y-direction line slide rail (20) on supporting plate (5), the Y-direction sliding block (19) being set on the Y-direction line slide rail (20), fixation
Y-direction supporting plate (18) on the Y-direction sliding block (19);
The rotational motion mechanism includes rotary drive mechanism, it is characterised in that:The rotational motion mechanism also includes being arranged on
Rack (29) on the rotary drive mechanism, and be arranged on the Y-direction supporting plate (18) gear (30), linkage,
Rotate element (40), the rotate element (40) is connected by the linkage with the gear (30), wherein, the rotation
Drive mechanism drives the rack (29) to drive gear (30) motion, so as to drive the rotation by the linkage
Element (40) rotates.
2. multi-direction motion platform according to claim 1, it is characterised in that:The gear (30) is sector gear, institute
Linkage is stated for quadric chain, the rotate element (40) is rotating disk.
3. multi-direction motion platform according to claim 2, it is characterised in that:The linkage includes the first double leval jib
Mechanism (31), the second quadric chain (34), the rotate element (40) are installed in rotation on the Y-direction by bearing (32)
On supporting plate (18).
4. multi-direction motion platform according to claim 1, it is characterised in that:The X includes being arranged on to drive mechanism
X on the bottom plate (1) is to linear electric motors magnet steel (7) and is fixed on the X to the X on supporting plate (5) to linear motor coil
(8);The X is provided at both ends with X to locating part (4) to line slide rail (3).
5. multi-direction motion platform according to claim 1, it is characterised in that:The X also includes installing to motion
X on the bottom plate (1) is to grating scale (10) and installed in the X to the X on supporting plate (5) to grating ruler reading head (9).
6. multi-direction motion platform according to claim 1, it is characterised in that:The Y-direction drive mechanism includes being arranged on
Y-direction linear electric motors magnet steel (12) on the bottom plate (1) and the Y-direction linear electric motors line being connected on the Y-direction supporting plate (18)
Enclose (11);The Y-direction line slide rail (20) is provided at both ends with Y-direction locating part (21).
7. multi-direction motion platform according to claim 6, it is characterised in that:The Y-direction motion also includes Y-direction and passed
Dynamic device, the Y-direction transmission device includes Y-direction driving block (14), Y-direction drive linear slide rail (15);The Y-direction driving block
(14) it is connected to by pinboard (41) on the Y-direction linear motor coil (11), the Y-direction drive linear slide rail (15) is installed
On the Y-direction supporting plate (18), the Y-direction driving block (14) is set on the Y-direction drive linear slide rail (15).
8. multi-direction motion platform according to claim 6, it is characterised in that:The Y-direction motion also includes installing
Y-direction grating scale (17) on the bottom plate (1), and the Y-direction grating scale on the Y-direction linear motor coil (11)
Reading head (16).
9. multi-direction motion platform according to claim 1, it is characterised in that:The rotary drive mechanism includes being arranged on
Direction of rotation linear electric motors magnet steel (22) on the Y-direction supporting plate (18) and the linear electric motors line being fixed on link block (27)
Enclose (28).
10. multi-direction motion platform according to claim 9, it is characterised in that:The rotational motion mechanism also includes peace
Grating scale (25) on the direction of rotation linear electric motors magnet steel (22) and the light on the link block (27)
Grid ruler reading head (26).
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CN107907959A (en) * | 2017-11-24 | 2018-04-13 | 哈工大机器人集团(哈尔滨)华粹智能装备有限公司 | It is a kind of to be used for pH effect and the ultraprecise six degree of freedom five-axis adjustment device of detection |
CN108649011A (en) * | 2018-07-12 | 2018-10-12 | 苏州大学 | Three Degree Of Freedom dispensing locating platform |
CN109732299A (en) * | 2019-01-09 | 2019-05-10 | 深圳福瑞特自动化有限公司 | Position adjusting mechanism and positioning device |
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