CN206862597U - Multi-direction motion platform - Google Patents

Multi-direction motion platform Download PDF

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Publication number
CN206862597U
CN206862597U CN201720690681.8U CN201720690681U CN206862597U CN 206862597 U CN206862597 U CN 206862597U CN 201720690681 U CN201720690681 U CN 201720690681U CN 206862597 U CN206862597 U CN 206862597U
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China
Prior art keywords
motion
linear motor
supporting plate
rotary
platform
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CN201720690681.8U
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Chinese (zh)
Inventor
薛立伟
刘吉柱
裴永超
陈立国
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Suzhou Straight Drive Control Technology Co Ltd
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Suzhou Straight Drive Control Technology Co Ltd
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Abstract

The utility model discloses a kind of multi-direction motion platform, including bottom plate, X on bottom plate is arranged on to motion, Y-direction motion and rotational motion mechanism, X to the X that motion includes being arranged on bottom plate to line slide rail, be set in X to the X on line slide rail to sliding block, be fixedly mounted on X to the X on sliding block to supporting plate and X to drive mechanism;Y-direction motion includes being arranged on X to the Y-direction line slide rail on supporting plate, the Y-direction sliding block being set on Y-direction line slide rail, the Y-direction supporting plate being fixedly mounted on Y-direction sliding block and Y-direction drive mechanism;Rotational motion mechanism includes rotary drive mechanism, the rack that is arranged on the rotary drive mechanism, and be arranged on Y-direction supporting plate gear, linkage, rotate element, rotate element is connected by linkage with gear.The multi-direction motion platform of the utility model is flexible, it is simple to make, and can not only realize high accuracy, move at high speed, additionally it is possible to realize the moving interpolation of Frequency.

Description

Multi-directional motion platform
Technical Field
The utility model belongs to make and test field, concretely relates to platform that can a plurality of directions motion.
Background
Multidirectional motion platforms are widely used in the manufacturing and testing fields. The existing multidirectional motion platform is mainly realized by the superposition of a 'rotating motor + screw rod' linear motion platform and a rotating motor. Due to the limitation of creep and rotation driving modes of the screw rod, and the large mass/output value of the existing rotating motor, the existing multidirectional motion platform is slow in response, short in stroke, poor in precision and small in effective load, and the development of the manufacturing industry and other industries is greatly restricted.
Disclosure of Invention
The utility model aims to solve the technical problem that a platform that can a plurality of direction motions is provided, can effectively solve the problem that current motion platform response is slow, the stroke is short, the precision is poor, payload is little.
In order to solve the technical problem, the utility model adopts the technical scheme that the multidirectional motion platform comprises a bottom plate, an X-direction motion mechanism, a Y-direction motion mechanism and a rotary motion mechanism, wherein the X-direction motion mechanism, the Y-direction motion mechanism and the rotary motion mechanism are arranged on the bottom plate; the X-direction movement mechanism comprises an X-direction movement platform and an X-direction driving mechanism, the X-direction movement platform comprises an X-direction linear slide rail arranged on the bottom plate, an X-direction slide block sleeved on the X-direction linear slide rail, and an X-direction supporting plate fixedly arranged on the X-direction slide block; the Y-direction movement mechanism comprises a Y-direction movement platform and a Y-direction driving mechanism, the Y-direction movement platform comprises a Y-direction linear slide rail arranged on the X-direction supporting plate, a Y-direction sliding block sleeved on the Y-direction linear slide rail, and a Y-direction supporting plate fixedly arranged on the Y-direction sliding block; the rotary motion mechanism comprises a rotary driving mechanism, a rack arranged on the rotary driving mechanism, a gear, a connecting rod mechanism and a rotary element, wherein the gear, the connecting rod mechanism and the rotary element are arranged on the Y-direction supporting plate, the rotary element is connected with the gear through the connecting rod mechanism, the rotary driving mechanism drives the rack to drive the gear to move, and therefore the rotary element is driven to rotate through the connecting rod mechanism.
Furthermore, the utility model discloses still provide following subsidiary technical scheme.
Preferably, the gear is a sector gear, the link mechanism is a four-bar link mechanism, and the rotating element is a turntable.
Preferably, the link mechanism comprises a first four-bar linkage mechanism and a second four-bar linkage mechanism, and the rotating element is rotatably mounted on the Y-direction supporting plate through a bearing.
Preferably, the X-direction driving mechanism comprises X-direction linear motor magnetic steel mounted on the bottom plate and an X-direction linear motor coil fixed on the X-direction supporting plate; and X-direction limiting parts are arranged at two ends of the X-direction linear slide rail.
Preferably, the X-direction movement mechanism further comprises an X-direction grating ruler mounted on the bottom plate and an X-direction grating ruler reading head mounted on the X-direction supporting plate.
Preferably, the Y-direction driving mechanism comprises a Y-direction linear motor magnetic steel mounted on the bottom plate and a Y-direction linear motor coil connected to the Y-direction supporting plate; and Y-direction limiting parts are arranged at two ends of the Y-direction linear slide rail.
Preferably, the Y-direction movement mechanism further comprises a Y-direction transmission device, the Y-direction transmission device comprises a Y-direction transmission sliding block and a Y-direction transmission linear sliding rail, the Y-direction transmission sliding block is connected to the Y-direction linear motor coil through a transfer plate, the Y-direction transmission linear sliding rail is installed on the Y-direction supporting plate, and the Y-direction transmission sliding block is sleeved on the Y-direction transmission linear sliding rail.
Preferably, the Y-direction movement mechanism further comprises a Y-direction grating ruler mounted on the bottom plate, and a Y-direction grating ruler reading head mounted on a Y-direction linear motor coil.
Preferably, the rotation driving mechanism includes a rotation direction linear motor magnetic steel mounted on the Y-direction pallet and a linear motor coil fixed to the coupling block.
Preferably, the rotary motion mechanism further comprises a grating ruler arranged on the magnetic steel of the linear motor in the rotation direction and a grating ruler reading head arranged on the coupling block.
Compared with the prior art, the utility model has the advantages of: the utility model discloses multi-direction motion platform's X utilizes linear slide rail and slider cooperation to motion and Y to motion, through two linear electric motor respectively direct drive X to motion and Y to motion, realizes X to motion and Y to the motion of two directions of motion, has greatly simplified mechanical structure to motion and Y. The utility model discloses rotating element's rotation drives a set of four-bar linkage by rotary driving mechanism through rack and pinion, makes it drive a set of four-bar linkage again and realize, and the transmission is accurate and efficient.
The utility model discloses multi-direction motion platform relies on the advantage of machinery body, combines current motion control technique, not only can realize high accuracy, high speed motion, can also realize the interpolation motion of variable frequency.
The utility model discloses multi-direction motion platform flexibility is good, simple manufacture, both can be used for process flows such as plug-in components, point, soldering, also can be used for exerting forced vibration to the model of trades such as building or space flight, accomplishes the dynamometry and the experiment of testing vibration of model.
Drawings
Fig. 1 is a schematic perspective view of the multi-directional motion platform of the present invention.
Fig. 2 is a perspective view of the combination of the bottom plate and the X-direction moving mechanism of the multi-direction moving platform of the present invention.
Fig. 3 is a perspective view of the combination of the bottom plate, the X-direction moving mechanism and the Y-direction moving mechanism of the multi-directional moving platform of the present invention.
Fig. 4 is a perspective view of the combination of the Y-direction supporting plate and the rotary motion mechanism of the multi-directional motion platform of the present invention.
Fig. 5 is a schematic view of the assembly of the rotating element and the bearing of the multi-directional motion platform of the present invention.
Fig. 6 is a schematic diagram of a rotational motion mechanism of the multi-directional motion platform of the present invention.
Fig. 7 is a control schematic diagram of the multi-directional motion platform of the present invention.
Wherein,
1. base plate 2.X is to slider 3.X is to linear slide
4.X is to spacing part 5.X is to layer board 7.X is to linear electric motor magnet steel
X-direction linear motor coil 9. X-direction grating ruler reading head 10. X-direction grating ruler
11, Y-direction linear motor coil 12, Y-direction linear motor magnetic steel 13, linear slide rail
Y-direction transmission slide block 15, Y-direction transmission linear slide rail 16, Y-direction grating ruler reading head
Y-direction grating ruler 18, Y-direction supporting plate 19 and Y-direction sliding block
20, Y-direction linear slide rail 21, Y-direction stopper 22, rotation direction linear motor magnetic steel
23. Linear slide rail 24, slide block 25, grating ruler
26. Raster ruler reading head 27, coupling block 28, linear motor coil
29. Rack 30, gear 31, first four-bar mechanism
32. Bearing 33, bearing pressing sheet 34, second four-bar mechanism
PC 36 PAC 37X-axis motor driver
Y-axis motor drive 39, rotating motor drive 40, rotating element
41. Adapter plate 51, square hole 71. U-shaped groove
122, U-shaped groove 221, U-shaped groove
Detailed Description
The following non-limiting detailed description of the present invention is provided in connection with the preferred embodiments and accompanying drawings.
As shown in fig. 1 to 7, the multi-directional motion platform of the present invention includes a base plate 1, and an X-direction motion mechanism, a Y-direction motion mechanism and a rotation motion mechanism disposed on the base plate 1.
As shown in fig. 1 and 2, the X-direction movement mechanism includes an X-direction driving mechanism and an X-direction movement platform. The X-direction driving mechanism is an X-direction linear motor and comprises X-direction linear motor magnetic steel 7 and an X-direction linear motor coil 8. The X-direction moving platform comprises an X-direction linear slide rail 3, an X-direction slide block 2 and an X-direction supporting plate 5.
Two X-direction linear sliding rails 3 are respectively fixed on the bottom plate 1 through bolts, and in order to realize the smooth movement of the X-direction movement mechanism, the two X-direction linear sliding rails 3 are arranged in parallel. The X-direction sliding block 2 is slidably sleeved on the X-direction linear sliding rail 3, and the X-direction supporting plate 5 is fixed to the X-direction sliding block 2 through a bolt. During assembly, the positioning edge on the X-direction supporting plate 5 is tightly attached to the side edge of the X-direction sliding block 2, so that the side edge of the X-direction supporting plate 5 is parallel to the X-direction linear sliding rail 3, and the X movement direction and the Y movement direction can be further vertical.
The X-direction linear motor magnetic steel 7 is attached to the corresponding positioning edge of the bottom plate 1 and is fixed on the bottom plate 1 through bolts. The X-direction linear motor magnetic steel 7 is provided with a U-shaped groove 71. The X-direction linear motor coil 8 is fixedly arranged on the side edge of the X-direction supporting plate 5 and sleeved in the U-shaped groove 71 of the X-direction linear motor magnetic steel 7. Preferably, the air gaps on the two side walls of the U-shaped groove 71 of the X-direction linear motor coil 8 and the X-direction linear motor magnetic steel 7 are the same.
Two ends of the two X-direction linear sliding rails 3 are provided with X-direction limiting pieces 4 so as to ensure that the X-direction supporting plate 5 always moves in a fixed range. The X-direction grating ruler 10 is attached to the bottom plate 1, and preferably, the X-direction grating ruler 10 is parallel to the X-direction movement direction. The X-direction pallet 5 is formed with a square hole 51, and the square hole 51 may have other shapes. The X-direction grating ruler reading head 9 is arranged on the side of the square hole 51 of the X-direction supporting plate 5. Preferably, the X-direction grating scale reading head 9 and the X-direction grating scale 10 are arranged in parallel with a proper gap.
As shown in fig. 1 to 3, the Y-direction moving mechanism includes a Y-direction driving mechanism, a Y-direction transmission device, and a Y-direction moving platform. The Y-direction driving mechanism is a Y-direction linear motor and comprises Y-direction linear motor magnetic steel 12 and a Y-direction linear motor coil 11. The Y-direction transmission device comprises a Y-direction transmission slide block 14 and a Y-direction transmission linear slide rail 15. The Y-direction moving platform comprises a Y-direction linear slide rail 20, a Y-direction slide block 19 and a Y-direction supporting plate 18.
The two Y-direction linear sliding rails 20 are respectively fixed on the X-direction supporting plate 5 through bolts, and in order to realize the stable motion of the Y-direction motion mechanism, the two Y-direction linear sliding rails 20 are arranged in parallel. Two ends of the two Y-direction linear sliding rails 20 are respectively provided with a Y-direction limiting member 21 to ensure that the Y-direction supporting plate 18 always moves in a fixed range.
The Y-direction linear motor magnetic steel 12 is attached to the corresponding positioning edge of the bottom plate 1 and fixed on the bottom plate 1 through bolts. The Y-direction linear motor magnetic steel 12 is provided with a U-shaped groove 122, and the linear slide rail 13 of the Y-direction linear motor coil 11 is fixedly mounted on the corresponding position of the Y-direction linear motor magnetic steel 12 through a bolt.
During assembly, the Y-direction linear motor coil 11 is mounted on the adapter plate 41 and slides into the U-shaped groove 122 of the Y-direction linear motor magnetic steel 12. Preferably, the air gaps on the two side walls of the U-shaped groove 122 of the Y-direction linear motor coil 11 and the Y-direction linear motor magnetic steel 12 are the same. Then, the Y-direction transmission slide block 14 is mounted on the adapter plate 41, the Y-direction transmission linear slide rail 15 is assembled to the corresponding position on the Y-direction pallet 18 along the positioning edge, and then the Y-direction transmission linear slide rail 15 is slid into the Y-direction transmission slide block 14. Thereafter, the Y-direction pallet 18 is fixed to the Y-direction slider 19 by bolts. After assembly, the Y-direction slider 19 is slidably fitted over the Y-direction linear slide rail 20.
The Y-direction grating ruler 17 is attached to the bottom plate 1, and preferably, the Y-direction grating ruler 17 is parallel to the Y-direction movement direction. The Y-direction grating scale reading head 16 is arranged on the Y-direction linear motor coil 11, and preferably, the Y-direction grating scale reading head 16 is arranged in parallel with the Y-direction grating scale 17, and an air gap is proper.
As shown in fig. 4 and 5, the rotary motion mechanism includes a rotary drive mechanism, a rack 29, a gear 30, a link mechanism, and a rotary member 40. Preferably, the gear 30 is a sector gear, but may have other shapes that perform its driving function. Preferably, the linkage is a four-bar linkage, although other shapes are possible to achieve its transmission function.
The rotation driving mechanism is a rotation direction linear motor, and includes a rotation direction linear motor magnetic steel 22 and a linear motor coil 28. The linear motor magnetic steel 22 in the rotation direction is attached to the corresponding positioning edge of the Y-direction supporting plate 18 and is fixedly mounted on the Y-direction supporting plate 18 through bolts. The linear slide rail 23 is fixedly mounted on the linear motor magnetic steel 22 in the rotating direction along the positioning edge through bolts.
The grating ruler 25 is installed on the rotation direction linear motor magnetic steel 22, preferably, the grating ruler 25 is parallel to the movement direction of the rotation direction linear motor. The grating scale reading head 26 is mounted on a coupling block 27 and the linear motor coil 28 is mounted on the coupling block 27. The rotation direction linear motor magnetic steel 22 is provided with a U-shaped groove 221. During assembly, the assembled components and the linear motor coil 28 slide into the U-shaped groove 221 of the linear motor magnetic steel 22 in the rotating direction, the connecting block 27 is fixed on the sliding block 24 through bolts, and after assembly is completed, the sliding block 24 and the linear sliding rail 23 can be matched in a sliding mode. Preferably, the grating scale reading head 26 is arranged parallel to the grating scale 25 with a suitable air gap. Preferably, the linear motor coil 28 fits into the air gaps on both side walls of the U-shaped groove 221 of the rotational direction linear motor magnetic steel 22. The rack 29 is fixed to the linear motor coil 28 by bolts.
As shown in fig. 4 and 5, the rotary motion mechanism further includes a bearing 32 and a bearing pressing piece 33. Preferably, the bearings 32 are deep groove ball bearings. During assembly, the bearing 32 is pressed into the bearing chamber of the Y-direction supporting plate 18, the bearing 32 is in interference fit with the wall of the bearing chamber, and then the bearing pressing plate 33 is pressed on the outer ring of the bearing 32 and fixed through bolts.
The linkage mechanism includes a first four-bar linkage 31 and a second four-bar linkage 34. Preferably, the first four-bar linkage 31 and the second four-bar linkage 34 are both parallel four-bar linkages. Preferably, the rotating element 40 is a turntable, and the rotating element 40 is connected to the second four-bar linkage 34.
When assembled, the shoulder of the stepped shaft of the rotary member 40 is pressed against the inner race of the bearing 32 and fixed by bolts. The gear 30 is rotatably mounted to a corresponding pin of the Y-bracket 18 and ensures that the gear 30 is fully engaged with the rack 29. Thereafter, the links of the first four-link mechanism 31 and the second four-link mechanism 34 are sequentially coupled, as shown in fig. 6. In operation, the rotation driving mechanism drives the rack 29 to drive the gear 30 to move, so as to drive the rotating element 40 to rotate through the first four-bar linkage 31 and the second four-bar linkage 34.
As shown in fig. 7, the PC 35 is the upper computer of the multi-direction motion platform of the present invention, and the PAC36 is the lower computer of the multi-direction motion platform of the present invention, both of which transmit instructions and data through ModbusTCP/IP bus protocol. PAC36 communicates instructions and data with X-axis motor driver 37, Y-axis motor driver 38, and rotary motor driver 39 via EtherCAT bus protocols. The X-axis motor driver 37, the X-direction linear motor (composed of the X-direction linear motor magnetic steel 7 and the X-direction linear motor coil 8), and the X-axis grating (composed of the X-direction grating scale reading head 9 and the X-direction grating scale 10) form a full closed-loop control system. The Y-axis motor driver 38 forms a fully closed-loop control system with the Y-axis linear motor (formed by the Y-axis linear motor magnetic steel 12 and the Y-axis linear motor coil 11) and the Y-axis grating (formed by the Y-axis grating scale reading head 16 and the Y-axis grating scale 17). The rotary motor driver 38 forms a fully closed loop control system with the rotary direction linear motor (consisting of the rotary direction linear motor magnetic steel 22 and the linear motor coil 28) and the raster of the rotary direction linear motor (consisting of the raster ruler 25 and the raster ruler reading head 26).
The working principle of the multi-direction motion platform of the utility model is as follows.
An X-direction linear motor composed of an X-direction linear motor magnetic steel 7 and an X-direction linear motor coil 8 directly drives an X-direction moving platform composed of an X-direction sliding block 2, an X-direction linear sliding rail 3 and an X-direction supporting plate 5. The real-time position of the X-direction moving platform is fed back by the X-direction grating ruler reading head 9 and the X-direction grating ruler 10. In order to ensure that the X-direction motion platform can safely move in a fixed position, an X-direction limit stop 4 is required to restrict the motion range of the platform.
The Y-direction linear motor composed of the Y-direction linear motor magnetic steel 12 and the Y-direction linear motor coil 11 directly drives the Y-direction motion platform composed of the Y-direction supporting plate 18, the Y-direction sliding block 19 and the Y-direction linear sliding rail 20 through a transmission device composed of the Y-direction transmission sliding block 14 and the Y-direction transmission linear sliding rail 15. The real-time position of the Y-direction motion platform is fed back by the Y-direction grating ruler reading head 16 and the Y-direction grating ruler 17. In order to ensure that the Y-motion stage can move safely in a fixed position, a Y-stop 21 is required to restrict the range of motion of the stage.
The linear motor in the rotation direction, which is composed of the magnetic steel 22 in the linear motor in the rotation direction and the coil 28 in the linear motor in the rotation direction, drives the gear 30 through the rack 29 to drive the first four-bar linkage 31, and then drives the second four-bar linkage 34 through the first four-bar linkage 31, so as to achieve the purpose of driving the rotation element 40 to rotate. The real-time position of the rotation of the rotary member 40 is obtained by kinematic solution in accordance with the real-time position fed back from the grating scale 25 and the grating scale reading head 26.
The utility model discloses multi-direction motion platform's X utilizes linear slide rail and slider cooperation to motion and Y to motion, through two linear electric motor respectively direct drive X to motion and Y to motion, realizes X to motion and Y to the motion of two directions of motion, has greatly simplified mechanical structure to motion and Y. The utility model discloses rotating element's rotation drives a set of four-bar linkage by rotary driving mechanism through rack and pinion, makes it drive a set of four-bar linkage again and realize, and the transmission is accurate and efficient.
The utility model discloses multi-direction motion platform relies on the advantage of machinery body, combines current motion control technique, not only can realize high accuracy, high speed motion, can also realize the interpolation motion of variable frequency.
The utility model discloses multi-direction motion platform flexibility is good, simple manufacture, both can be used for process flows such as plug-in components, point, soldering, also can be used for exerting forced vibration to the model of trades such as building or space flight, accomplishes the dynamometry and the experiment of testing vibration of model.
It should be noted that the above-mentioned preferred embodiments are only for illustrating the technical concepts and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention accordingly, and the protection scope of the present invention cannot be limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims (10)

1. A multidirectional motion platform comprises a bottom plate (1), an X-direction motion mechanism, a Y-direction motion mechanism and a rotary motion mechanism, wherein the X-direction motion mechanism, the Y-direction motion mechanism and the rotary motion mechanism are arranged on the bottom plate (1);
the X-direction movement mechanism comprises an X-direction movement platform and an X-direction driving mechanism, the X-direction movement platform comprises an X-direction linear slide rail (3) arranged on the bottom plate (1), an X-direction slide block (2) sleeved on the X-direction linear slide rail (3), and an X-direction supporting plate (5) fixedly arranged on the X-direction slide block (2);
the Y-direction movement mechanism comprises a Y-direction movement platform and a Y-direction driving mechanism, the Y-direction movement platform comprises a Y-direction linear slide rail (20) arranged on the X-direction supporting plate (5), a Y-direction sliding block (19) sleeved on the Y-direction linear slide rail (20), and a Y-direction supporting plate (18) fixedly arranged on the Y-direction sliding block (19);
the rotary motion mechanism comprises a rotary driving mechanism, and is characterized in that: the rotary motion mechanism further comprises a rack (29) arranged on the rotary driving mechanism, and a gear (30), a link mechanism and a rotary element (40) which are arranged on the Y-direction supporting plate (18), wherein the rotary element (40) is connected with the gear (30) through the link mechanism, the rotary driving mechanism drives the rack (29) to drive the gear (30) to move, and therefore the link mechanism drives the rotary element (40) to rotate.
2. The multi-directional motion platform of claim 1, wherein: the gear (30) is a sector gear, the link mechanism is a four-bar link mechanism, and the rotating element (40) is a turntable.
3. The multi-directional motion platform of claim 2, wherein: the link mechanism comprises a first four-bar link mechanism (31) and a second four-bar link mechanism (34), and the rotating element (40) is rotatably mounted on the Y-direction supporting plate (18) through a bearing (32).
4. The multi-directional motion platform of claim 1, wherein: the X-direction driving mechanism comprises X-direction linear motor magnetic steel (7) arranged on the bottom plate (1) and an X-direction linear motor coil (8) fixed on the X-direction supporting plate (5); and X-direction limiting parts (4) are arranged at two ends of the X-direction linear slide rail (3).
5. The multi-directional motion platform of claim 1, wherein: the X-direction movement mechanism further comprises an X-direction grating ruler (10) arranged on the bottom plate (1) and an X-direction grating ruler reading head (9) arranged on the X-direction supporting plate (5).
6. The multi-directional motion platform of claim 1, wherein: the Y-direction driving mechanism comprises Y-direction linear motor magnetic steel (12) arranged on the bottom plate (1) and a Y-direction linear motor coil (11) connected to the Y-direction supporting plate (18); and Y-direction limiting parts (21) are arranged at two ends of the Y-direction linear slide rail (20).
7. The multi-directional motion platform of claim 6, wherein: the Y-direction movement mechanism further comprises a Y-direction transmission device, and the Y-direction transmission device comprises a Y-direction transmission slide block (14) and a Y-direction transmission linear slide rail (15); the Y-direction transmission sliding block (14) is connected to the Y-direction linear motor coil (11) through an adapter plate (41), the Y-direction transmission linear sliding rail (15) is installed on the Y-direction supporting plate (18), and the Y-direction transmission sliding block (14) is sleeved on the Y-direction transmission linear sliding rail (15).
8. The multi-directional motion platform of claim 6, wherein: the Y-direction movement mechanism further comprises a Y-direction grating ruler (17) arranged on the bottom plate (1) and a Y-direction grating ruler reading head (16) arranged on the Y-direction linear motor coil (11).
9. The multi-directional motion platform of claim 1, wherein: the rotary driving mechanism comprises a rotary direction linear motor magnetic steel (22) arranged on the Y-direction supporting plate (18) and a linear motor coil (28) fixed on a connecting block (27).
10. The multi-directional motion platform of claim 9, wherein: the rotary motion mechanism also comprises a grating ruler (25) arranged on the linear motor magnetic steel (22) in the rotation direction and a grating ruler reading head (26) arranged on the connecting block (27).
CN201720690681.8U 2017-06-14 2017-06-14 Multi-direction motion platform Active CN206862597U (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107101793A (en) * 2017-06-14 2017-08-29 苏州直为精驱控制技术有限公司 Multi-direction motion platform
CN108279034A (en) * 2018-02-13 2018-07-13 上海微世半导体有限公司 It is a kind of two-sided to bit platform
CN109676577A (en) * 2019-02-26 2019-04-26 苏州舍勒智能科技有限公司 A kind of linear motor to bit platform

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107101793A (en) * 2017-06-14 2017-08-29 苏州直为精驱控制技术有限公司 Multi-direction motion platform
CN108279034A (en) * 2018-02-13 2018-07-13 上海微世半导体有限公司 It is a kind of two-sided to bit platform
CN108279034B (en) * 2018-02-13 2024-04-12 上海微世半导体有限公司 Double-sided alignment platform
CN109676577A (en) * 2019-02-26 2019-04-26 苏州舍勒智能科技有限公司 A kind of linear motor to bit platform

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