CN206862597U - Multi-direction motion platform - Google Patents
Multi-direction motion platform Download PDFInfo
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- CN206862597U CN206862597U CN201720690681.8U CN201720690681U CN206862597U CN 206862597 U CN206862597 U CN 206862597U CN 201720690681 U CN201720690681 U CN 201720690681U CN 206862597 U CN206862597 U CN 206862597U
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- motion
- motion platform
- supporting plate
- slide rail
- electric motors
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Abstract
The utility model discloses a kind of multi-direction motion platform, including bottom plate, X on bottom plate is arranged on to motion, Y-direction motion and rotational motion mechanism, X to the X that motion includes being arranged on bottom plate to line slide rail, be set in X to the X on line slide rail to sliding block, be fixedly mounted on X to the X on sliding block to supporting plate and X to drive mechanism；Y-direction motion includes being arranged on X to the Y-direction line slide rail on supporting plate, the Y-direction sliding block being set on Y-direction line slide rail, the Y-direction supporting plate being fixedly mounted on Y-direction sliding block and Y-direction drive mechanism；Rotational motion mechanism includes rotary drive mechanism, the rack that is arranged on the rotary drive mechanism, and be arranged on Y-direction supporting plate gear, linkage, rotate element, rotate element is connected by linkage with gear.The multi-direction motion platform of the utility model is flexible, it is simple to make, and can not only realize high accuracy, move at high speed, additionally it is possible to realize the moving interpolation of Frequency.
Description
Technical field
The utility model belongs to manufacture and testing field, and in particular to a kind of platform that can be moved with multiple directions.
Background technology
Multi-direction motion platform is widely used in manufacture and testing field.Existing multi-direction motion platform mainly passes through
The superposition of " electric rotating machine+screw mandrel " linear motion platform and electric rotating machine is realized.Due to the driving of creep and the rotation of screw mandrel
The limitation of mode, while the value of existing electric rotating machine quality/output is larger so that existing multi-direction motion platform response
Slowly, stroke is short, and low precision, payload is small, greatly constrains the development of manufacturing industry and other industry.
The content of the invention
Technical problem to be solved in the utility model is to provide a kind of platform that can be moved with multiple directions, Ke Yiyou
Effect solves the problems, such as that short existing motion platform low-response, stroke, low precision, payload are small.
In order to solve the above technical problems, the technical solution adopted in the utility model is, a kind of multi-direction motion platform, including
Bottom plate, the X being arranged on the bottom plate are to motion, Y-direction motion and rotational motion mechanism；The X is to fitness machine
Structure includes X to motion platform and X to drive mechanism, and the X that the X includes being arranged on the bottom plate to motion platform is slided to straight line
Rail, be set in the X to the X on line slide rail to sliding block, be fixedly mounted on the X to the X on sliding block to supporting plate；The Y-direction
Motion includes Y-direction motion platform and Y-direction drive mechanism, and the Y-direction motion platform includes being arranged on the X on supporting plate
Y-direction line slide rail, the Y-direction sliding block being set on the Y-direction line slide rail, the Y-direction support being fixedly mounted on the Y-direction sliding block
Plate；The rotational motion mechanism includes rotary drive mechanism, in addition to the rack being arranged on the rotary drive mechanism, and
Gear on the Y-direction supporting plate, linkage, rotate element are arranged on, the rotate element passes through the linkage and institute
Gear connection is stated, wherein, the rotary drive mechanism drives gear movement described in the rack drives, so as to pass through the connecting rod
Mechanism drives the rotate element rotation.
In addition, the utility model also proposes following attached technical scheme.
Preferably, the gear is sector gear, and the linkage is quadric chain, and the rotate element is to turn
Disk.
Preferably, the linkage includes the first quadric chain, the second quadric chain, and the rotate element passes through
Bearing is installed in rotation on the Y-direction supporting plate.
Preferably, the X that the X includes being arranged on the bottom plate to drive mechanism to linear electric motors magnet steel and is fixed on
The X is to the X on supporting plate to linear motor coil；The X is provided at both ends with X to locating part to line slide rail.
Preferably, the X that the X also includes being arranged on the bottom plate to motion is to grating scale and installed in described
X is to the X on supporting plate to grating ruler reading head.
Preferably, the Y-direction drive mechanism includes the Y-direction linear electric motors magnet steel being arranged on the bottom plate and is connected to
Y-direction linear motor coil on Y-direction supporting plate；The Y-direction line slide rail is provided at both ends with Y-direction locating part.
Preferably, the Y-direction motion also includes Y-direction transmission device, and the Y-direction transmission device includes Y-direction transmission and slided
Block, Y-direction drive linear slide rail, the Y-direction driving block are connected on the Y-direction linear motor coil by pinboard, the Y
It is arranged on to drive linear slide rail on the Y-direction supporting plate, the Y-direction driving block is set on the Y-direction drive linear slide rail.
Preferably, the Y-direction motion also includes the Y-direction grating scale being arranged on bottom plate, and installed in Y-direction straight line
Y-direction grating ruler reading head on motor coil.
Preferably, the rotary drive mechanism includes the direction of rotation linear electric motors magnet steel being arranged on the Y-direction supporting plate
And it is fixed on the linear motor coil on link block.
Preferably, the rotational motion mechanism also includes the grating scale being arranged on the direction of rotation linear electric motors magnet steel
And the grating ruler reading head on the link block.
Compared to prior art, the utility model has the advantage of：The X of the multi-direction motion platform of the utility model is to motion
Mechanism and Y-direction motion, coordinated using line slide rail and sliding block, X is directly driven respectively to motion by two linear electric motors
Platform and Y-direction motion platform, motions of the X to motion platform and the both direction of Y-direction motion platform is realized, greatly simplify machinery
Structure.The rotation of the utility model rotate element is to drive one group of double leval jib machine by rack-and-pinion by rotary drive mechanism
Structure, it is driven one group of quadric chain again and is realized, be driven accurate and efficiency high.
The multi-direction motion platform of the utility model relies on the advantage of basic machine, with reference to existing movement control technology, no
High accuracy can only be realized, moved at high speed, additionally it is possible to realize the moving interpolation of Frequency.
The multi-direction motion platform of the utility model is flexible, it is simple to make, and both can be used for the works such as plug-in unit, dispensing, soldering
Skill flow, it can be used for applying forced vibration to the model of the industries such as building or space flight, dynamometry and the vibration measuring for completing model are real
Test.
Brief description of the drawings
Fig. 1 is the schematic perspective view of the multi-direction motion platform of the utility model.
Fig. 2 be the bottom plate of the multi-direction motion platform of the utility model, X to motion combine schematic perspective view.
Fig. 3 be the bottom plate of the multi-direction motion platform of the utility model, X to motion, Y-direction motion combination solid show
It is intended to.
Fig. 4 is the Y-direction supporting plate of the multi-direction motion platform of the utility model, rotational motion mechanism combination schematic perspective view.
Fig. 5 is the rotate element of the multi-direction motion platform of the utility model and the assembling schematic diagram of bearing.
Fig. 6 is the rotational motion mechanism sketch of the multi-direction motion platform of the utility model.
Fig. 7 is the control principle drawing of the multi-direction motion platform of the utility model.
Wherein,
1. bottom plate 2.X is to sliding block 3.X to line slide rail
4.X is to locating part 5.X to supporting plate 7.X to linear electric motors magnet steel
8.X is to linear motor coil 9.X to grating ruler reading head 10.X to grating scale
11.Y is to linear motor coil 12.Y to the line slide rail of linear electric motors magnet steel 13.
14.Y is to driving block 15.Y to drive linear slide rail 16.Y to grating ruler reading head
17.Y is to grating scale 18.Y to supporting plate 19.Y to sliding block
20.Y is to line slide rail 21.Y to the direction of rotation linear electric motors magnet steel of locating part 22.
23. the grating scale of 24. sliding block of line slide rail 25.
26. the linear motor coil of 27. link block of grating ruler reading head 28.
29. the four-bar mechanism of 30. gear of rack 31. first
32. the four-bar mechanism of 33. bearing tabletting of bearing 34. second
35.PC machine 36.PAC 37.X spindle motor drivers
The rotate element of 39. electric rotating machine driver of 38.Y spindle motors driver 40.
41. the square opening 71.U shape grooves of pinboard 51.
122.U shape groove 221.U shape grooves
Embodiment
Technical solutions of the utility model are made below in conjunction with preferred embodiment and its accompanying drawing further nonrestrictive detailed
Explanation.
As shown in Figures 1 to 7, the multi-direction motion platform of the utility model includes bottom plate 1, is arranged on X on bottom plate 1 to fortune
Motivation structure, Y-direction motion and rotational motion mechanism.
As shown in Figure 1 and Figure 2, X includes X to drive mechanism, X to motion platform to motion.X to drive mechanism be X to
Linear electric motors, including X is to linear electric motors magnet steel 7 and X to linear motor coil 8.X includes X to line slide rail to motion platform
3rd, X is to sliding block 2, X to supporting plate 5.
Two X is bolted on bottom plate 1 respectively to line slide rail 3, in order to realize smooth fortune of the X to motion
Dynamic, two X be arranged in parallel to line slide rail 3.X is slideably set in X on line slide rail 3 to sliding block 2, and X passes through to supporting plate 5
X is bolted to on sliding block 2.During assembling, X will be close to X to the side of sliding block 2 to the positioning side on supporting plate 5, with ensure X to
The side of supporting plate 5 is parallel to line slide rail 3 with X, further ensures that the X directions of motion and Y motion direction can be vertical.
X fits to bottom plate 1 to linear electric motors magnet steel 7 and positions on side and be bolted on bottom plate 1 accordingly.X to
Linear electric motors magnet steel 7 is provided with U-lag 71.X is fixedly mounted on X to the side of supporting plate 5 to linear motor coil 8, and is arranged into X
Into the U-lag 71 of linear electric motors magnet steel 7.Preferably, U-lags 71 of the X to linear motor coil 8 and X to linear electric motors magnet steel 7
The air gap of two side is identical.
The both ends of two X to line slide rails 3 are provided with X to locating part 4, to ensure X to supporting plate 5 always in fixed range
Interior motion.X is jointly mounted on bottom plate 1 to grating scale 10, it is preferred that X is parallel to the direction of motion with X to grating scale 10.X is to support
Square opening 51 is formed on plate 5, the square opening 51 can also be other shapes.X is arranged on X to supporting plate 5 to grating ruler reading head 9
Square opening 51 side.Preferably, X be arranged in parallel to grating ruler reading head 9 and X to grating scale 10 and gap is suitable.
As shown in Figure 1 to Figure 3, Y-direction motion includes Y-direction drive mechanism, Y-direction transmission device, Y-direction motion platform.Y-direction
Drive mechanism is Y-direction linear electric motors, including Y-direction linear electric motors magnet steel 12 and Y-direction linear motor coil 11.Y-direction transmission device
Including Y-direction driving block 14 and Y-direction drive linear slide rail 15.Y-direction motion platform includes Y-direction line slide rail 20, Y-direction sliding block
19th, Y-direction supporting plate 18.
Two Y-direction line slide rails 20 are bolted on X on supporting plate 5 respectively, in order to realize the flat of Y-direction motion
Steady motion, two Y-direction line slide rails 20 be arranged in parallel.The both ends of two Y-direction line slide rails 20 are provided with Y-direction locating part 21,
To ensure that Y-direction supporting plate 18 moves in fixed range always.
Y-direction linear electric motors magnet steel 12 is fitted on the corresponding positioning side of bottom plate 1 and is bolted on bottom plate 1.Y
Linear electric motors magnet steel 12 is provided with U-lag 122, the line slide rail 13 of Y-direction linear motor coil 11 is bolted installation
On the relevant position of Y-direction linear electric motors magnet steel 12.
During assembling, Y-direction linear motor coil 11 is attached on pinboard 41, and slips into the U-shaped of Y-direction linear electric motors magnet steel 12
In groove 122.Preferably, Y-direction linear motor coil 11 and the air gap phase of the two side of U-lag 122 of Y-direction linear electric motors magnet steel 12
Together.Afterwards, Y-direction driving block 14 is installed on pinboard 41, Y-direction drive linear slide rail 15 is assembled to Y along positioning side
Relevant position on supporting plate 18, then Y-direction drive linear slide rail 15 is slided into Y-direction driving block 14.Afterwards, by Y-direction
Supporting plate 18 is bolted on Y-direction sliding block 19.After assembling, Y-direction sliding block 19 is slideably set in Y-direction line slide rail 20
On.
Y-direction grating scale 17 is jointly mounted on bottom plate 1, it is preferred that Y-direction grating scale 17 is parallel with the Y-direction direction of motion.Y-direction
Grating ruler reading head 16 is arranged on Y-direction linear motor coil 11, it is preferred that Y-direction grating ruler reading head 16 and Y-direction grating scale 17
It is arranged in parallel and air gap is suitable.
As shown in Figure 4, Figure 5, rotational motion mechanism includes rotary drive mechanism, rack 29, gear 30, linkage, rotation
Turn element 40.Preferably, gear 30 is sector gear, naturally it is also possible to is the other shapes that can realize its transmission agency.It is preferred that
, linkage is quadric chain, naturally it is also possible to is the other shapes that can realize its transmission agency.
Rotary drive mechanism is direction of rotation linear electric motors, including direction of rotation linear electric motors magnet steel 22 and linear electric motors
Coil 28.Direction of rotation linear electric motors magnet steel 22 fits on the corresponding positioning side of Y-direction supporting plate 18 and is bolted peace
On Y-direction supporting plate 18.Line slide rail 23 is mounted by means of bolts on direction of rotation linear electric motors magnet steel 22 along positioning side
On.
Grating scale 25 is arranged on direction of rotation linear electric motors magnet steel 22, it is preferred that grating scale 25 and direction of rotation straight line
The direction of motion of motor is parallel.Grating ruler reading head 26 is arranged on link block 27, and linear motor coil 28 is arranged on link block
On 27.Direction of rotation linear electric motors magnet steel 22 is provided with U-lag 221.During assembling, by the above-mentioned part and straight line assembled
Motor coil 28 slides into the U-lag 221 of direction of rotation linear electric motors magnet steel 22, and link block 27 is consolidated by bolt together
Determine onto sliding block 24, after the completion of assembling, sliding block 24 is slidably coupled with line slide rail 23.Preferably, grating ruler reading head 26 with
Grating scale 25 be arranged in parallel and air gap is suitable.Preferably, the U-shaped of linear motor coil 28 and direction of rotation linear electric motors magnet steel 22
The air gap of the two side of groove 221 is suitable.Rack 29 is bolted on linear motor coil 28.
As shown in Figure 4, Figure 5, rotational motion mechanism also includes bearing 32 and bearing tabletting 33.Preferably, bearing 32 is
Deep groove ball bearing.During assembling, bearing 32 being pressed into the bearing chamber of Y-direction supporting plate 18, bearing 32 is interference fitted with bearing locular wall, it
Bearing tabletting 33 is pressed on the outer ring of bearing 32, and be bolted afterwards.
Linkage includes the first quadric chain 31 and the second quadric chain 34.Preferably, the first quadric chain
31 and second quadric chain 34 be parallel four-bar linkage.Preferably, rotate element 40 is rotating disk, and rotate element 40 connects
On the second quadric chain 34.
During assembling, on the inner ring on the shaft shoulder top of the multi-diameter shaft of rotate element 40 to bearing 32 and it will be bolted.Will
Gear 30 is pivotally mounted on 18 corresponding pin of Y-direction supporting plate, and ensures that gear 30 can fully engage with rack 29.It
Afterwards, the connecting rod of the first quadric chain 31 and the second quadric chain 34 is coupled successively, as shown in Figure 6.During work, rotation is driven
Motivation structure driving rack 29 moves with moving gear 30, so as to by the first quadric chain 31, the second quadric chain 34, drive
Rotate element 40 is rotated.
As shown in fig. 7, PC 35 is the host computer of the multi-direction motion platform of the utility model, PAC36 is the utility model
The slave computer of multi-direction motion platform, both pass through ModbusTCP/IP bus protocols send instructions and data.PAC36 and X-axis
Motor driver 37, y-axis motor driver 38 and electric rotating machine driver 39 pass through EtherCAT bus protocol send instructions
And data.Wherein, (X is to linear electric motors magnet steel 7 and X to the structure of linear motor coil 8 to linear electric motors by X-axis motor driver 37 and X
Into) and X-axis grating (X is formed to grating ruler reading head 9 and X to grating scale 10) form a closed-loop control system.Y-axis
Motor driver 38 and Y-direction linear electric motors (Y-direction linear electric motors magnet steel 12 and Y-direction linear motor coil 11 are formed) and Y-axis
Grating (Y-direction grating ruler reading head 16 and Y-direction grating scale 17 are formed) forms a closed-loop control system.Electric rotating machine driver
38 with direction of rotation linear electric motors (direction of rotation linear electric motors magnet steel 22 and linear motor coil 28 are formed) and direction of rotation
The grating (grating scale 25 and grating ruler reading head 26 are formed) of linear electric motors forms a closed-loop control system.
The operation principle of the multi-direction motion platform of the utility model is as follows.
From X to linear electric motors magnet steel 7 and X to the X that linear motor coil 8 is formed to linear electric motors, directly drive from X to cunning
Block 2, X are to line slide rail 3 and X to the X that supporting plate 5 forms to motion platform.X is to the real time position of motion platform from X to grating scale
Reading head 9 and X feed back to grating scale 10.In order to ensure X can be moved safely, it is necessary to X to motion platform in fixed position
The range of movement of platform is constrained to locating part 4.
The Y-direction linear electric motors being made up of Y-direction linear electric motors magnet steel 12 and Y-direction linear motor coil 11, it is driven and is slided by Y-direction
The transmission device that block 14 and Y-direction drive linear slide rail 15 form, directly drives by Y-direction supporting plate 18, Y-direction sliding block 19 and Y-direction straight line
The Y-direction motion platform that slide rail 20 forms.The real time position of Y-direction motion platform is by Y-direction grating ruler reading head 16 and Y-direction grating scale 17
Feedback.In order to ensure Y-direction motion platform is capable of the motion in fixed position of safety, it is necessary to which Y-direction locating part 21 constrains platform
Range of movement.
The direction of rotation linear electric motors being made up of direction of rotation linear electric motors magnet steel 22 and linear motor coil 28, pass through tooth
The drive gear 30 of bar 29 drives the first quadric chain 31, then drives the second quadric chain by the first quadric chain 31
34, the purpose for driving rotate element 40 to rotate is reached with this.The real time position that rotate element 40 rotates is according to grating scale 25 and light
The real time position that grid ruler reading head 26 feeds back resolves to obtain by kinematics.
The X of the multi-direction motion platform of the utility model utilizes line slide rail and sliding block to motion and Y-direction motion
Coordinate, directly drive X respectively to motion platform and Y-direction motion platform by two linear electric motors, realize X to motion platform and Y
Motion to the both direction of motion platform, greatly simplify mechanical structure.The rotation of the utility model rotate element is by revolving
Turn drive mechanism by rack-and-pinion to drive one group of quadric chain, it is driven one group of quadric chain again and is realized,
It is driven accurate and efficiency high.
The multi-direction motion platform of the utility model relies on the advantage of basic machine, with reference to existing movement control technology, no
High accuracy can only be realized, moved at high speed, additionally it is possible to realize the moving interpolation of Frequency.
The multi-direction motion platform of the utility model is flexible, it is simple to make, and both can be used for the works such as plug-in unit, dispensing, soldering
Skill flow, it can be used for applying forced vibration to the model of the industries such as building or space flight, dynamometry and the vibration measuring for completing model are real
Test.
It is pointed out that above-mentioned preferred embodiment is only to illustrate technical concepts and features of the present utility model, its purpose
It is to allow person skilled in the art to understand content of the present utility model and implements according to this, this reality can not be limited with this
With new protection domain.All equivalent change or modifications made according to the utility model Spirit Essence, should all cover in this reality
Within new protection domain.
Claims (10)
1. a kind of multi-direction motion platform, including bottom plate (1), the X that is arranged on the bottom plate (1) move to motion, Y-direction
Mechanism and rotational motion mechanism；
The X includes X to motion to be included installed in described to motion platform and X to drive mechanism, the X to motion platform
X on bottom plate (1) to line slide rail (3), be set in the X to the X on line slide rail (3) to sliding block (2), be fixedly mounted on institute
X is stated to the X on sliding block (2) to supporting plate (5)；
The Y-direction motion includes Y-direction motion platform and Y-direction drive mechanism, and the Y-direction motion platform is included installed in described
X pacifies to the Y-direction line slide rail (20) on supporting plate (5), the Y-direction sliding block (19) being set on the Y-direction line slide rail (20), fixation
Y-direction supporting plate (18) on the Y-direction sliding block (19)；
The rotational motion mechanism includes rotary drive mechanism, it is characterised in that：The rotational motion mechanism also includes being arranged on
Rack (29) on the rotary drive mechanism, and be arranged on the Y-direction supporting plate (18) gear (30), linkage,
Rotate element (40), the rotate element (40) are connected by the linkage with the gear (30), wherein, the rotation
Drive mechanism drives the rack (29) to drive gear (30) motion, so as to drive the rotation by the linkage
Element (40) rotates.
2. multi-direction motion platform according to claim 1, it is characterised in that：The gear (30) is sector gear, institute
It is quadric chain to state linkage, and the rotate element (40) is rotating disk.
3. multi-direction motion platform according to claim 2, it is characterised in that：The linkage includes the first double leval jib
Mechanism (31), the second quadric chain (34), the rotate element (40) are installed in rotation on the Y-direction by bearing (32)
On supporting plate (18).
4. multi-direction motion platform according to claim 1, it is characterised in that：The X includes being arranged on to drive mechanism
X on the bottom plate (1) is to linear electric motors magnet steel (7) and is fixed on the X to the X on supporting plate (5) to linear motor coil
(8)；The X is provided at both ends with X to locating part (4) to line slide rail (3).
5. multi-direction motion platform according to claim 1, it is characterised in that：The X also includes installation to motion
X on the bottom plate (1) is to grating scale (10) and installed in the X to the X on supporting plate (5) to grating ruler reading head (9).
6. multi-direction motion platform according to claim 1, it is characterised in that：The Y-direction drive mechanism includes being arranged on
Y-direction linear electric motors magnet steel (12) on the bottom plate (1) and the Y-direction linear electric motors line being connected on the Y-direction supporting plate (18)
Enclose (11)；The Y-direction line slide rail (20) is provided at both ends with Y-direction locating part (21).
7. multi-direction motion platform according to claim 6, it is characterised in that：The Y-direction motion also includes Y-direction and passed
Dynamic device, the Y-direction transmission device include Y-direction driving block (14), Y-direction drive linear slide rail (15)；The Y-direction driving block
(14) it is connected to by pinboard (41) on the Y-direction linear motor coil (11), Y-direction drive linear slide rail (15) installation
On the Y-direction supporting plate (18), the Y-direction driving block (14) is set on the Y-direction drive linear slide rail (15).
8. multi-direction motion platform according to claim 6, it is characterised in that：The Y-direction motion also includes installation
Y-direction grating scale (17) on the bottom plate (1), and the Y-direction grating scale on the Y-direction linear motor coil (11)
Reading head (16).
9. multi-direction motion platform according to claim 1, it is characterised in that：The rotary drive mechanism includes being arranged on
Direction of rotation linear electric motors magnet steel (22) on the Y-direction supporting plate (18) and the linear electric motors line being fixed on link block (27)
Enclose (28).
10. multi-direction motion platform according to claim 9, it is characterised in that：The rotational motion mechanism also includes peace
Grating scale (25) on the direction of rotation linear electric motors magnet steel (22) and the light on the link block (27)
Grid ruler reading head (26).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720690681.8U CN206862597U (en) | 2017-06-14 | 2017-06-14 | Multi-direction motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720690681.8U CN206862597U (en) | 2017-06-14 | 2017-06-14 | Multi-direction motion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206862597U true CN206862597U (en) | 2018-01-09 |
Family
ID=60831871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720690681.8U Active CN206862597U (en) | 2017-06-14 | 2017-06-14 | Multi-direction motion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206862597U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107101793A (en) * | 2017-06-14 | 2017-08-29 | 苏州直为精驱控制技术有限公司 | Multi-direction motion platform |
| CN108279034A (en) * | 2018-02-13 | 2018-07-13 | 上海微世半导体有限公司 | It is a kind of two-sided to bit platform |
| CN109676577A (en) * | 2019-02-26 | 2019-04-26 | 苏州舍勒智能科技有限公司 | A kind of linear motor to bit platform |
-
2017
- 2017-06-14 CN CN201720690681.8U patent/CN206862597U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107101793A (en) * | 2017-06-14 | 2017-08-29 | 苏州直为精驱控制技术有限公司 | Multi-direction motion platform |
| CN108279034A (en) * | 2018-02-13 | 2018-07-13 | 上海微世半导体有限公司 | It is a kind of two-sided to bit platform |
| CN108279034B (en) * | 2018-02-13 | 2024-04-12 | 上海微世半导体有限公司 | Double-sided alignment platform |
| CN109676577A (en) * | 2019-02-26 | 2019-04-26 | 苏州舍勒智能科技有限公司 | A kind of linear motor to bit platform |
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