CN108279034B - Double-sided alignment platform - Google Patents

Double-sided alignment platform Download PDF

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Publication number
CN108279034B
CN108279034B CN201810148331.8A CN201810148331A CN108279034B CN 108279034 B CN108279034 B CN 108279034B CN 201810148331 A CN201810148331 A CN 201810148331A CN 108279034 B CN108279034 B CN 108279034B
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CN
China
Prior art keywords
platform
guide rail
sliding table
camera
guide rails
Prior art date
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Active
Application number
CN201810148331.8A
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Chinese (zh)
Other versions
CN108279034A (en
Inventor
丁波
徐亮
李轶
徐建兴
张文亮
徐伟涛
陈瀚
侯金松
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Shanghai Micro Semi World Co ltd
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Shanghai Micro Semi World Co ltd
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Priority to CN201810148331.8A priority Critical patent/CN108279034B/en
Publication of CN108279034A publication Critical patent/CN108279034A/en
Application granted granted Critical
Publication of CN108279034B publication Critical patent/CN108279034B/en
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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30Supports specially adapted for an instrument; Supports specially adapted for a set of instruments

Abstract

The invention discloses a double-sided alignment platform, which is characterized in that: including the fixed station, locate the first guide rail on the fixed station, the motion platform on the first guide rail is located in the slip, be equipped with the second guide rail on the motion platform, first guide rail is perpendicular with the second guide rail, be equipped with the slip table on the second guide rail, be equipped with the upper surface for transparent objective table on the slip table, motion platform and slip table are equipped with the fretwork in objective table department under, objective table top is equipped with first camera, be equipped with the second camera under the fretwork, during the use, make the camera that is located objective table upper and lower both sides can detect the characteristics of each position about the object under test wantonly through the translation of motion platform, the fixed station, double-sided counterpoint effect has been realized, compare traditional single-sided counterpoint platform, high efficiency has, high accuracy, high qualification rate's advantage.

Description

Double-sided alignment platform
Technical Field
The invention belongs to the field of electromechanical equipment, and particularly relates to a double-sided alignment platform.
Background
The traditional alignment platform can only realize alignment or detection of one side, the detection object is turned over by a mechanical mode to detect the other side again, the efficiency is relatively slow, the object to be detected is easy to be damaged, along with the development of an automatic control technology, the use efficiency and the qualification rate requirement of products are continuously improved, and under the condition, the traditional single-side alignment platform can not meet the use requirement of consumers.
Disclosure of Invention
The invention aims to solve the problem of providing a double-sided alignment platform with high precision, high efficiency and high qualification rate, and solves the technical problem by the following steps: the utility model provides a two-sided alignment platform which characterized in that: including the fixed station, locate the first guide rail on the fixed station, the motion platform on the first guide rail is located in the slip, be equipped with the second guide rail on the motion platform, first guide rail is perpendicular with the second guide rail, and the slip table slides and locates on the second guide rail, be equipped with the objective table that the upper surface is transparent on the slip table, the motion platform with the slip table is in department under the objective table is equipped with the fretwork, the objective table top is equipped with first camera, be equipped with the second camera under the fretwork.
As a preferred embodiment of the present invention, the stage is mounted on the slide table by a hollow rotation motor, and a plurality of concentric annular adsorption grooves are provided on the stage.
As a preferred embodiment of the invention, the fixed table comprises a bottom plate, the first guide rail is arranged on two sides of the upper surface of the bottom plate, the grating ruler seat and the first linear motor are arranged on the inner side of the first guide rail, the moving platform is connected with the first sliding blocks respectively arranged on the first guide rails on two sides, and the first linear motor is connected below the moving platform.
As a preferred embodiment of the invention, the motion platform comprises a sliding table base, second guide rails are arranged on two sides of the upper surface of the sliding table base, second linear motors are arranged on the inner sides of the second guide rails, the sliding table is connected with second sliding blocks respectively arranged on the second guide rails on two sides, and the second linear motors are connected below the sliding table.
As a preferred implementation scheme of the invention, a first grating ruler reading head is arranged below the sliding table base, and the first grating ruler reading head is correspondingly arranged on the grating ruler base.
As a preferred embodiment of the invention, a second grating ruler reading head is arranged below the sliding table.
As a preferred embodiment of the present invention, the second camera is disposed above the bottom plate, and the second camera extends to below the hollow through the right angle lens.
As a preferable implementation scheme of the invention, the two sides of the moving platform and the fixed platform are respectively provided with an end plate, the fixed platform is provided with an organ cover at a gap between the end plates and the moving platform, and the moving platform is provided with an organ cover at a gap between the end plates and the sliding table.
When the invention is used, an object to be detected is placed on the object stage, the cameras positioned on the upper side and the lower side of the object stage can randomly detect the characteristics of each part on the upper side and the lower side of the object to be detected through the translation of the moving platform and the fixed platform and the rotation of the hollow rotary motor, and the coordinates of each part of the object to be detected are precisely positioned through the grating ruler, so that the double-sided alignment effect is realized, and the invention has the advantages of high efficiency, high precision and high qualification rate compared with the traditional single-sided alignment platform.
Drawings
The invention is further described below with reference to the accompanying drawings:
FIG. 1 is a perspective view of the present invention;
FIG. 2 is an exploded view of the present invention;
fig. 3 is a perspective view of the organ cover of the present invention.
Wherein: 1-fixed table, 2-motion platform, 21-slip table, 22-objective table, 23-first camera, 24-second camera, 25-hollow rotary motor, 31-bottom plate, 32-first guide rail, 33-grating ruler seat, 34-first linear motor, 41-slip table base, 42-second guide rail, 43-second linear motor, 51-first grating ruler reading head, 52-second grating ruler reading head, 61-end plate.
Detailed Description
The invention is further illustrated by the following detailed description:
as shown in fig. 1 and 3, a double-sided alignment platform includes a moving platform 2, a fixed platform 1, a sliding table 21, a stage 22, a first camera 23 and a second camera 24.
As shown in fig. 2, the moving platform 2 is horizontally arranged on the fixed platform 1, the sliding table 21 is slidably arranged on the moving platform 2, the sliding table 21 is provided with an objective table 22, the first camera 23 is arranged above the objective table 22, the second camera 24 is arranged on the fixed platform 1 right below the objective table 22, the upper surface of the objective table 22 is made of transparent materials, the moving platform 2 and the sliding table 21 are provided with hollowed-out parts below the objective table 22 for the second camera 24 to detect, during operation, an object to be detected is placed on the objective table 22, and the camera can detect the characteristics of the upper surface and the lower surface of an object through the transparent objective table 22 by means of the relative movement of the moving platform 2 and the fixed platform 1, so that the effect of double-sided alignment is realized.
The fixed table 1 comprises a bottom plate 31, first guide rails 32 which are arranged on two sides of the upper surface of the bottom plate 31 and are parallel to each other, a grating ruler seat 33 which is arranged on the inner side of the first guide rails 32, first sliding blocks which can freely slide are arranged on the first guide rails 32 on two sides, the top of each first sliding block is connected with a moving platform 2, the moving platforms 2 are driven by a first linear motor 34 which is arranged on the bottom plate 31, a first grating ruler reading head 51 is further fixed on the bottom of the moving platform 2, and the first grating ruler reading head 51 is correspondingly arranged on the grating ruler seat 33, so that the moving parameters of the fixed table 1 can be measured.
The moving platform 2 comprises a sliding table base 41, second guide rails 42 which are arranged on two sides of the upper surface of the sliding table base 41 and are parallel to each other, the second guide rails 42 are perpendicular to the first guide rails 32, second linear motors 43 are arranged on the inner sides of the second guide rails 42, second sliding blocks capable of freely sliding are arranged on the second guide rails 42 on two sides, the tops of the second sliding blocks are connected with the sliding table 21, the sliding table 21 is driven by the second linear motors 43 positioned on the sliding table base 41, a second grating ruler reading head 52 is arranged on one side below the sliding table 21, and moving parameters of the moving platform 2 can be measured.
The objective table 22 is mounted on the sliding table 21 through a hollow rotary motor 25, the upper surface of the objective table 22 is made of transparent material, concentric annular adsorption grooves are formed in the objective table 22, and hollows are formed below the positions of the sliding table 21 and the sliding table base 41, which are opposite to the objective table 22, for detection by the second camera 24.
In order to reduce the overall height of the double-sided alignment platform, the second camera 24 is horizontally arranged on the bottom plate 31 of the fixed table 1, and extends to the hollowed-out part on the sliding table base 41 through the right angle lens to measure the object on the object stage 22.
In order to prevent the falling ash from affecting the platform, as shown in fig. 3, end plates 61 are arranged at two ends of the moving platform 2 and the fixed platform 1, wherein an organ cover is arranged at a gap between the end plates 61 and the moving platform 2 of the fixed platform 1, and the organ cover is also arranged at a gap between the end plates 61 and the sliding table 21 of the moving platform 2 so as to play a role in dust prevention.
When the device is used, an object to be detected is placed on the object stage 22, the characteristics of each part on the upper surface and the lower surface of the object to be detected can be detected randomly by the camera positioned on the upper side and the lower side of the object stage 22 through the translation of the moving platform 2 and the fixed platform 1 and the rotation of the hollow rotary motor 25, the coordinates of each part of the object to be detected are accurately positioned by the grating ruler, the effect of double-sided alignment is realized, and compared with the traditional single-sided alignment platform, the device has the advantages of high efficiency, high precision and high qualification rate.

Claims (6)

1. The utility model provides a two-sided platform of counterpointing, includes fixed station (1), locates first guide rail (32) on fixed station (1), and motion platform (2) on first guide rail (32) are located in the slip, be equipped with second guide rail (42) on the motion platform, first guide rail (32) are perpendicular with second guide rail (42), be equipped with slip table (21) on second guide rail (42), its characterized in that: the novel portable electronic device is characterized in that an objective table (22) with a transparent upper surface is arranged on the sliding table (21), the objective table (22) is installed on the sliding table (21) through a hollow rotary motor (25), a hollow is arranged right below the objective table (22) on the moving platform (2) and the sliding table (21), a first camera (23) is arranged above the objective table (22), and a second camera (24) is arranged right below the hollow; a plurality of concentric annular adsorption grooves are formed in the objective table (22); the moving platform (2) and the fixed platform (1) are both provided with end plates (61), the fixed platform (1) is provided with an organ cover at a gap between the end plates and the moving platform (2), and the moving platform (2) is provided with an organ cover at a gap between the end plates and the sliding table (21).
2. The dual sided alignment platform of claim 1, wherein: the fixed table (1) comprises a bottom plate (31), first guide rails (32) are arranged on two sides of the upper surface of the bottom plate (31), grating ruler seats (33) and first linear motors (34) are arranged on the inner sides of the first guide rails (32), the moving platform (2) is connected with first sliding blocks which are respectively arranged on the first guide rails (32) on two sides, and the first linear motors (34) are connected to the lower portion of the moving platform (2).
3. The dual sided alignment platform of claim 2, wherein: the motion platform (2) comprises a sliding table base (41), second guide rails (42) are arranged on two sides of the upper surface of the sliding table base (41), second linear motors (43) are arranged on the inner sides of the second guide rails (42), the sliding table (21) is connected with second sliding blocks respectively arranged on the second guide rails (42) on two sides, and the second linear motors (43) are connected to the lower portion of the sliding table (21).
4. A dual sided alignment platform as claimed in claim 2 or 3, wherein: a first grating ruler reading head (51) is arranged below the sliding table base (41), and the first grating ruler reading head (51) is correspondingly arranged on the grating ruler seat (33).
5. A dual sided alignment platform as claimed in claim 3, wherein: a second grating ruler reading head (52) is arranged below the sliding table (21).
6. The dual sided alignment platform of claim 2, wherein: the second camera (24) is transversely arranged on the bottom plate (31), and the second camera (24) extends to the lower part of the hollow through the right-angle lens.
CN201810148331.8A 2018-02-13 2018-02-13 Double-sided alignment platform Active CN108279034B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810148331.8A CN108279034B (en) 2018-02-13 2018-02-13 Double-sided alignment platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810148331.8A CN108279034B (en) 2018-02-13 2018-02-13 Double-sided alignment platform

Publications (2)

Publication Number Publication Date
CN108279034A CN108279034A (en) 2018-07-13
CN108279034B true CN108279034B (en) 2024-04-12

Family

ID=62808373

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810148331.8A Active CN108279034B (en) 2018-02-13 2018-02-13 Double-sided alignment platform

Country Status (1)

Country Link
CN (1) CN108279034B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004021760A1 (en) * 2002-08-29 2004-03-11 Fuji Machine Mfg. Co., Ltd. Electronic cicuit part mounting machine and mounting position accuracy inspection method for the mounting machine
CN102262358A (en) * 2011-04-13 2011-11-30 合肥芯硕半导体有限公司 Inner laminate side-to-side aligning apparatus and method
CN102662230A (en) * 2012-03-22 2012-09-12 芜湖市奥尔特光电科技有限公司 Photographic instrument capable of realizing cylindrical trace unfolding
CN206862597U (en) * 2017-06-14 2018-01-09 苏州直为精驱控制技术有限公司 Multi-direction motion platform
CN208155338U (en) * 2018-02-13 2018-11-27 上海微世半导体有限公司 It is a kind of two-sided to bit platform

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004021760A1 (en) * 2002-08-29 2004-03-11 Fuji Machine Mfg. Co., Ltd. Electronic cicuit part mounting machine and mounting position accuracy inspection method for the mounting machine
CN102262358A (en) * 2011-04-13 2011-11-30 合肥芯硕半导体有限公司 Inner laminate side-to-side aligning apparatus and method
CN102662230A (en) * 2012-03-22 2012-09-12 芜湖市奥尔特光电科技有限公司 Photographic instrument capable of realizing cylindrical trace unfolding
CN206862597U (en) * 2017-06-14 2018-01-09 苏州直为精驱控制技术有限公司 Multi-direction motion platform
CN208155338U (en) * 2018-02-13 2018-11-27 上海微世半导体有限公司 It is a kind of two-sided to bit platform

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